Electromagnetic shielding device and preparation method thereof

Abstract

The invention relates to the technical field of electromagnetic shielding equipment, and provides an electromagnetic shielding device and a preparation method thereof, and the device comprises a flexible substrate and liquid metal; a shielding area is formed on the flexible substrate, and a plurality of shielding runners are arranged in the flexible substrate; at least two layers of flexible substrates are arranged, the multiple shielding runners are distributed in each layer of the flexible substrates, and the shielding runners in the multiple layers of flexible substrates cover the shielding area in at least two directions with included angles; the shielding flow channel is filled with the liquid metal. In this way, due to the fact that the shielding effect on electromagnetic waves in different polarization directions is brought by the directions of the shielding flow channels in different layers, and multi-layer reflection and absorption of the electromagnetic waves are brought by the structural size difference between the shielding flow channels in different layers, the more excellent and adjustable electromagnetic shielding effect is achieved; the flexible shielding flow channel is filled with the liquid metal, so that the electromagnetic shielding device has good flexibility, and fine management and regulation of electromagnetic shielding of micro devices can be realized.

Description

Technical Field

[0001] This invention relates to the technical field of sensor shielding equipment, and more particularly to an electromagnetic shielding device and its preparation method. Background Technology

[0002] With the rapid development of mechanization and intelligence, various electrical and electronic equipment have been widely used. Many electrical and electronic equipment generate electromagnetic radiation during use. This electromagnetic radiation can seriously interfere with other electronic equipment, instruments, communication signals, etc., interrupting, hindering, reducing or limiting the effective performance of electrical equipment. Therefore, effective shielding of electromagnetic radiation is particularly important.

[0003] Using electromagnetic shielding materials is an effective way to reduce the impact of electromagnetic interference. It is widely used in electronic devices to protect sensitive circuits from external electromagnetic fields or to prevent electromagnetic wave leakage from the device itself from interfering with other devices. Currently, commonly used electromagnetic shielding materials include metals, carbon materials, ceramics, cement (or concrete), conductive polymers, and their composite materials. These materials are usually processed into thin plates, meshes, or other structures to protect objects.

[0004] However, the aforementioned electromagnetic shielding materials cannot achieve precise management and control of electromagnetic shielding for micro-devices, especially some flexible micro-devices. Summary of the Invention

[0005] This invention provides an electromagnetic shielding device and its preparation method, which solves the defects of existing electromagnetic shielding materials in the electromagnetic shielding of micro devices that cannot achieve precise management and control. It has the advantages of good flexibility and adaptability to various mechanical deformations, which is conducive to achieving precise management and control of electromagnetic shielding of micro devices.

[0006] This invention provides an electromagnetic shielding device, comprising: a flexible substrate and liquid metal; A shielding area is formed on the flexible substrate, and multiple shielding flow channels are arranged within the flexible substrate. The flexible substrate is arranged in at least two layers, and multiple shielding channels are distributed in each layer of the flexible substrate. Furthermore, the shielding channels in the multiple layers of the flexible substrate cover the shielding area along at least two directions forming an angle. The liquid metal is filled into the shielded flow channel.

[0007] According to an electromagnetic shielding device provided by the present invention, the shielding channels in the multi-layered flexible matrix are arranged in a grid-like pattern.

[0008] According to an electromagnetic shielding device provided by the present invention, the shielding channel covers the shielding area along a first direction and a second direction that are perpendicular to each other; the shielding channel includes a plurality of first channels and second channels arranged in a cross pattern. The first flow channel extends along the first direction and is spaced apart along the second direction; the second flow channel extends along the second direction and is spaced apart along the first direction. The flexible substrate includes a bonded first layer and a second layer; the first flow channel is disposed in the first layer, and the second flow channel is disposed in the second layer.

[0009] According to an electromagnetic shielding device provided by the present invention, the shielding channels in the multilayer flexible matrix are arranged in parallel and staggered directions.

[0010] According to an electromagnetic shielding device provided by the present invention, the shielding channel includes multiple first channels and second channels arranged in parallel. The first flow channel extends along a preset direction and is arranged at intervals; the second flow channel extends along the preset direction and is located in the interval between two adjacent first flow channels, and the width of the second flow channel is not less than the interval between two adjacent first flow channels. The flexible substrate includes a bonded first layer and a second layer; the first flow channel is disposed in the first layer, and the second flow channel is disposed in the second layer.

[0011] According to an electromagnetic shielding device provided by the present invention, the flexible substrate is arranged with at least three layers, and the shielding flow channel includes a first flow channel, a second flow channel and a third flow channel distributed in each layer of the flexible substrate; the first flow channel and the second flow channel are arranged in a grid-like pattern. The third flow channel is parallel to and staggered with the first flow channel; Alternatively, the direction of the third flow channel may be parallel to that of the second flow channel and they may be staggered. Alternatively, the third flow channel may be a single flow channel that covers the entire shielded area.

[0012] According to an electromagnetic shielding device provided by the present invention, the first flow channel and the second flow channel cover the shielding area along a first direction and a second direction that are perpendicular to each other; The first flow channel extends along the first direction and is spaced apart along the second direction; the second flow channel extends along the second direction and is spaced apart along the first direction. The third flow channel is a single flow channel that covers the entire shielded area.

[0013] According to an electromagnetic shielding device provided by the present invention, a grounding shielding wire is further included. A grounding port that is connected to the shielding flow channel is provided on the flexible substrate. One end of the grounding shielding wire is electrically connected to the liquid metal through the grounding port, and the other end is grounded.

[0014] According to an electromagnetic shielding device provided by the present invention, the ends of adjacent first flow channels are connected to form a fold-back structure; and / or the ends of adjacent second flow channels are connected to form a fold-back structure.

[0015] According to an electromagnetic shielding device provided by the present invention, the grounding port is configured as a liquid metal injection port on the flexible substrate.

[0016] An electromagnetic shielding device provided by the present invention,

[0017] The present invention also provides a method for preparing an electromagnetic shielding device, comprising the following steps: Soft lithography involves coating a substrate with photoresist, pre-baking it, then covering the photoresist surface with a patterned mask, and after exposure, baking, and solvent treatment, obtaining the desired pattern on the substrate. Molding: The prepolymer is poured onto the patterned substrate, cured, and then the substrate is peeled off to obtain a cured product with the desired flow channel structure. Bonding is performed to seal the side openings of the flow channel structure, thereby obtaining a flexible matrix with shielded flow channels; Liquid injection involves injecting liquid metal from the injection port into the shielded flow channel.

[0018] According to a method for manufacturing an electromagnetic shielding device provided by the present invention, the bonding step includes: Film bonding: The film layer is bonded to the side of the cured material with the flow channel structure to seal the side opening of the flow channel structure, thereby obtaining a unit layer with an internal shielded flow channel. Unit layer bonding involves stacking and bonding at least two unit layers, such that the shielding channels in different unit layers are arranged in a grid pattern.

[0019] The method for preparing an electromagnetic shielding device according to the present invention further includes the following steps: Connect the grounding shield wire, insert one end of the grounding shield wire into the injection port to contact the liquid metal, and ground the other end.

[0020] According to a method for preparing an electromagnetic shielding device provided by the present invention, the prepolymer includes a PDMS base agent and a curing agent, wherein the mass ratio of the PDMS base agent and the curing agent is 10:1.

[0021] According to a method for preparing an electromagnetic shielding device provided by the present invention, the membrane layer includes a PDMS membrane or a porous PC membrane.

[0022] The electromagnetic shielding device and its preparation method provided by this invention utilize liquid metal, a metallic material with excellent conductivity and reflective properties against electromagnetic interference. Filling the shielding channel with liquid metal enables the shielding device to possess excellent electromagnetic shielding characteristics. Furthermore, since the shielding channel covers the shielding area along at least two angled directions, the shielding layer formed by the liquid metal can effectively shield electromagnetic interference from multiple directions, achieving a superior electromagnetic shielding effect. In addition, the flexible substrate itself is flexible, and the liquid metal itself is liquid with good fluidity. By filling the shielding channel with liquid metal, the electromagnetic shielding device can possess good flexibility, exhibiting good flexibility and maintaining good electromagnetic shielding performance even when mechanically deformed. It can be used for electromagnetic shielding of some micro-devices, such as micro-sensors, especially flexible sensors. Compared with related technologies, this method is beneficial for achieving precise management and control of electromagnetic shielding for micro-devices. Attached Figure Description

[0023] To more clearly illustrate the technical solutions in this invention or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of this invention. For those skilled in the art, other drawings can be obtained from these drawings without creative effort.

[0024] Figure 1 This is one of the schematic diagrams of the electromagnetic shielding device provided in Embodiment 1 of the present invention.

[0025] Figure 2 This is the second schematic diagram of the electromagnetic shielding device provided in Embodiment 1 of the present invention.

[0026] Figure 3 This is one of the schematic diagrams of the electromagnetic shielding device provided in Embodiment 2 of the present invention.

[0027] Figure 4 This is the second schematic diagram of the electromagnetic shielding device provided in Embodiment 2 of the present invention.

[0028] Figure 5 This is one of the schematic diagrams of the electromagnetic shielding device provided in Embodiment 3 of the present invention.

[0029] Figure 6 This is the second schematic diagram of the electromagnetic shielding device provided in Embodiment 3 of the present invention.

[0030] Figure 7 This is a schematic flowchart of the preparation method of the electromagnetic shielding device provided in the embodiment of the present invention.

[0031] Figure label: 1. Flexible substrate; 10. Shielded flow channel; 100. First flow channel; 101. Second flow channel; 102. Third flow channel; 11. First layer; 12. Second layer; 13. Third layer; 2. Liquid metal; 3. Grounding shield wire. Detailed Implementation

[0032] To make the objectives, technical solutions, and advantages of this invention clearer, the technical solutions of this invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of this invention. All other embodiments obtained by those skilled in the art based on the embodiments of this invention without creative effort are within the scope of protection of this invention.

[0033] To facilitate understanding of the electromagnetic shielding device and its preparation method provided in the embodiments of the present invention, its application background is first introduced. With the rapid development of mechanization and intelligence, various electrical and electronic devices have been widely used. Many electrical and electronic devices generate electromagnetic radiation during use. This electromagnetic radiation can seriously interfere with other electronic devices, instruments, communication signals, etc., interrupting, hindering, reducing or limiting the effective performance of electrical equipment.

[0034] Using electromagnetic shielding materials for protection is an effective way to reduce the impact of electromagnetic interference. Currently, commonly used electromagnetic shielding materials include metals, carbon materials, ceramics, cement (or concrete), conductive polymers and their composite materials. These materials are usually processed into plate-like, mesh-like and other structures to protect objects.

[0035] However, most of the aforementioned electromagnetic shielding materials are solid structures, which have poor flexibility and are difficult to adapt to various complex mechanical deformations. They cannot achieve precise management and control of electromagnetic shielding for some micro-devices, especially some flexible micro-devices.

[0036] To address the aforementioned problems, embodiments of the present invention provide an electromagnetic shielding device and its preparation method, which has the advantages of good flexibility and adaptability to various mechanical deformations, and is conducive to the refined management and control of electromagnetic shielding of micro-devices.

[0037] The following is combined Figures 1-4 The electromagnetic shielding device and its preparation method of the present invention are described.

[0038] Reference Figure 1 and Figure 2 An electromagnetic shielding device includes a flexible substrate 1 and a liquid metal 2; wherein a shielding area is formed on the flexible substrate 1, and a shielding channel 10 is arranged inside the flexible substrate 1, the shielding channel 10 covering the shielding area along at least two directions forming an angle; the liquid metal 2 is filled inside the shielding channel 10.

[0039] In practical applications, liquid metal 2, as a metallic material, possesses excellent conductivity and good reflection characteristics against electromagnetic interference. Filling the shielding channel 10 with liquid metal 2 enables the shielding device to have excellent electromagnetic shielding characteristics. Furthermore, since the shielding channel 10 covers the shielding area along at least two angled directions, the shielding layer formed by the liquid metal 2 can effectively shield electromagnetic interference from multiple polarization directions. When multiple layers of shielding channels 10 with different structural dimensions are arranged in parallel and staggered configurations, the mutual reflection and absorption of electromagnetic waves between layers achieve a superior electromagnetic shielding effect. Moreover, the number of layers and structural dimensions can be adjusted according to requirements, thereby enabling... The transmitted electromagnetic waves can be targeted and controlled; after the shielding channels of each layer in the device are filled with liquid metal 2 and grounded, a conductive path can be formed. After grounding, it can also produce a good shielding effect on electrostatic fields and low-frequency electric fields; in addition, the flexible substrate 1 itself is flexible, and the liquid metal 2 itself is liquid with good fluidity. By filling the shielding channel 10 with liquid metal 2, the electromagnetic shielding device can have good flexibility. It has good flexibility and still has good electromagnetic shielding performance when mechanical deformation occurs. It can be used for electromagnetic shielding of some micro devices, such as micro sensors, especially flexible sensors. Compared with related technologies, it is beneficial to realize the fine management and control of electromagnetic shielding of micro devices.

[0040] Depending on different needs and application scenarios, there are multiple possible arrangements for the flexible substrate 1 and the shielded flow channel 10.

[0041] In one embodiment of the present invention, reference is made to Figure 1 and Figure 2 Multiple shielding channels 10 are arranged, intersecting in a grid-like pattern. After liquid metal 2 is injected into the multiple shielding channels 10, the liquid metal 2 fills the shielding channels 10 and forms a grid-like structure, similar in structure and function to a metal mesh. When electromagnetic waves encounter the metal mesh formed by the liquid metal 2, most of them are attenuated, reflected, or absorbed. Furthermore, while liquid metal 2 in a single direction can provide good shielding for electromagnetic waves in a parallel direction, its shielding effect for electromagnetic waves in other directions is weakened. Therefore, by intersecting the multiple shielding channels 10 in different directions, the mesh structure formed by the liquid metal 2 can provide good electromagnetic shielding for electromagnetic waves in all directions, achieving a superior electromagnetic shielding effect.

[0042] It is understandable that parameters such as the number of shielded flow channels 10, their extension direction, and the pore size of the mesh structure formed by multiple shielded flow channels 10 can be adaptively designed according to the actual application scenario.

[0043] Example 1

[0044] In this embodiment, refer to Figure 1 and Figure 2 The flexible substrate 1 has at least two layers, and multiple shielding channels 10 are distributed in each layer of the flexible substrate 1. The multiple shielding channels 10 are arranged in a mesh structure in space to achieve a good electromagnetic shielding effect.

[0045] More specifically, the flexible substrate 1 includes a first layer 11 and a second layer 12; the shielding flow channel 10 includes a first flow channel 100 and a second flow channel 101 arranged in a cross pattern, wherein the first flow channel 100 is arranged in the first layer 11 of the flexible substrate 1, extending along a first direction and spaced apart along a second direction, and the second flow channel 101 is arranged in the second layer 12 of the flexible substrate 1, extending along a second direction and spaced apart along a first direction, the first direction being perpendicular to the second direction, such that the first flow channel 100 and the second flow channel 101 cover the aforementioned shielding area along mutually perpendicular first and second directions.

[0046] Through the above technical solution, multiple first flow channels 100 and second flow channels 101 are arranged vertically in space to form a mesh, so that the liquid metal 2 can cross in two mutually perpendicular directions to form a metal mesh structure. In practical applications, it has been found that the liquid metal 2 in a single direction can produce a good shielding effect on electromagnetic waves in the parallel direction, but has almost no shielding effect on electromagnetic waves in the vertical direction. Therefore, by making the first flow channels 100 and second flow channels 101 cross in the vertical direction to form a mesh, good shielding of electromagnetic waves in all directions can be achieved, and costs can be reduced.

[0047] To facilitate processing and manufacturing, the first layer 11 and the second layer 12 of the flexible substrate 1 can be separately processed to shield the flow channel 10 and then bonded together as a whole.

[0048] To facilitate the injection of liquid metal 2, the ends of adjacent first flow channels 100 are connected, forming a folded structure. A first injection port is provided on the first layer 11 of the flexible substrate 1, and the first injection port is connected to the first flow channel 100. Liquid metal 2 is injected into the first flow channel 100 through the first injection port. Because the ends of the first flow channels 100 are connected, the liquid metal 2 can quickly fill all the first flow channels 100. Similarly, the ends of adjacent second flow channels 101 are connected, forming a folded structure. A second injection port is provided on the second layer 12 of the flexible substrate 1, and the second injection port is connected to the second flow channel 101. Liquid metal 2 is injected into the second flow channel 101 through the second injection port. Because the ends of the second flow channels 101 are connected, the liquid metal 2 can quickly fill all the second flow channels 101. This improves the injection efficiency of liquid metal 2.

[0049] Furthermore, the folded-back structure formed by the first flow channel 100 and the second flow channel 101 can be made interconnected. Specifically, corresponding through holes can be provided on the bonding surfaces of the first layer 11 and the second layer 12. After the first layer 11 and the second layer 12 are bonded into a whole, the through holes on the first layer 11 and the second layer 12 are connected, thereby making the folded-back structure formed by the first flow channel 100 and the second flow channel 101 interconnected. During injection, the liquid metal 2 can quickly fill the first flow channel 100 and the second flow channel 101, thereby improving the injection efficiency of the liquid metal 2.

[0050] Example 2

[0051] In this embodiment, refer to Figure 3 and Figure 4 The flexible substrate 1 has at least two layers, and multiple shielding channels 10 are distributed in each layer of the flexible substrate 1. The multiple shielding channels 10 are staggered in the same direction in space, and the mutual reflection and absorption between the layers are used to achieve a better electromagnetic shielding effect for electromagnetic waves in that direction.

[0052] More specifically, the shielded flow channel 10 includes multiple first flow channels 100 and second flow channels 101 arranged in parallel; the first flow channels 100 extend along a preset direction and are spaced apart; the second flow channels 101 also extend along a preset direction and are located in the interval between two adjacent first flow channels 100, and the width of the second flow channel 101 is not less than the interval between two adjacent first flow channels 100. The flexible substrate 1 includes a bonded first layer 11 and a second layer 12; the first flow channels 100 are arranged in the first layer 11, and the second flow channels 101 are arranged in the second layer 12.

[0053] To facilitate the injection of liquid metal 2, the ends of adjacent first flow channels 100 are connected, forming a folded structure. A first injection port is provided on the first layer 11 of the flexible substrate 1, and the first injection port is connected to the first flow channel 100. Liquid metal 2 is injected into the first flow channel 100 through the first injection port. Because the ends of the first flow channels 100 are connected, the liquid metal 2 can quickly fill all the first flow channels 100. Similarly, the ends of adjacent second flow channels 101 are connected, forming a folded structure. A second injection port is provided on the second layer 12 of the flexible substrate 1, and the second injection port is connected to the second flow channel 101. Liquid metal 2 is injected into the second flow channel 101 through the second injection port. Because the ends of the second flow channels 101 are connected, the liquid metal 2 can quickly fill all the second flow channels 101. This improves the injection efficiency of liquid metal 2.

[0054] Example 3

[0055] In this embodiment, refer to Figure 4 and Figure 5The flexible substrate has at least three layers, and the shielding flow channel 10 includes a first flow channel 100, a second flow channel 101 and a third flow channel 102 distributed in each layer of the flexible substrate 1; the first flow channel 100 and the second flow channel 101 are arranged in a grid pattern.

[0056] The third flow channel 102 can be arranged parallel to and staggered with the direction of the first flow channel 100, or parallel to and staggered with the direction of the second flow channel 101, or it can form a single flow channel that covers the entire shielding area.

[0057] More specifically, the flexible substrate 1 includes a first layer 11, a second layer 12, and a third layer 13; the shielding flow channel 10 includes a first flow channel 100 and a second flow channel 101 arranged in a cross pattern, and a third flow channel 102 covering the entire shielding area. The first flow channel 100 is arranged in the first layer 11 of the flexible substrate 1, extending along a first direction and spaced apart along a second direction. The second flow channel 101 is arranged in the second layer 12 of the flexible substrate 1, extending along a second direction and spaced apart along a first direction. The first direction is perpendicular to the second direction, such that the first flow channel 100 and the second flow channel 101 cover the shielding area along the mutually perpendicular first and second directions. The third flow channel 102 is arranged in the third layer 13 of the flexible substrate 1 and includes only one flow channel covering the entire shielding area.

[0058] Thus, when liquid metal 2 is injected into the first shielding channel 100, the second shielding channel 101 and the third shielding channel 103, the electromagnetic waves entering the shielding area will be basically totally reflected because the third layer of liquid metal 13 is a closed structure, and the mutual absorption and reflection between the layers will be greatly enhanced.

[0059] In one embodiment of the present invention, the electromagnetic shielding device further includes a grounding shielding wire 3. A grounding port connected to the shielding flow channel 10 is provided on the flexible substrate 1. One end of the grounding shielding wire 3 is electrically connected to the liquid metal 2 through the grounding port, and the other end is grounded. Through the grounding wire, the induced current generated on the surface of the liquid metal 2 can be conducted to the ground, thereby improving the shielding effect.

[0060] Specifically, the injection port can be used as the grounding port mentioned above.

[0061] Specifically, the flexible substrate 1 can be made of polydimethylsiloxane (PDMS), which gives the flexible substrate 1 good stretchability and good adhesion to the silicon wafer during fabrication.

[0062] Specifically, liquid metal 2 can be made of metal graft or gallium-based alloys, etc.

[0063] It is understood that, without contradiction, those skilled in the art can combine and integrate the different embodiments or examples described in this specification, as well as the features of the different embodiments or examples.

[0064] The preparation method of the electromagnetic shielding device provided by the present invention is described below. The preparation method of the electromagnetic shielding device described below can be referred to in correspondence with the electromagnetic shielding device described above.

[0065] Reference Figure 7 A method for preparing an electromagnetic shielding device includes the following steps: Step 101: Soft lithography. The substrate is coated with photoresist, and after pre-baking, a patterned mask is applied to the surface of the photoresist. After exposure, baking and solvent treatment, the desired pattern is obtained on the substrate.

[0066] Specifically, the substrate can be a silicon wafer, and the photoresist can be SU-8 photoresist. SU-8 photoresist is spin-coated onto the silicon wafer. After pre-baking, a mask with the desired pattern is placed on the photoresist surface. The photoresist is exposed to ultraviolet light, then baked and developed. After rinsing with developer, the photoresist not exposed to ultraviolet light dissolves, thereby obtaining the desired pattern on the silicon wafer.

[0067] Step 102: Casting. Pour the prepolymer onto a patterned substrate. After curing, peel off the substrate to obtain a cured product with the desired flow channel structure.

[0068] Specifically, the prepolymer comprises a PDMS base agent and a curing agent, with a PDMS base agent to curing agent mass ratio of 10:1. The prepolymer is poured onto a patterned silicon wafer, baked to cure and release the substrate, resulting in a cured product with the desired flow channel structure.

[0069] Step 103: Bonding, sealing the side opening of the flow channel structure, and obtaining a flexible substrate 1 with shielded flow channel 10.

[0070] Step 104: Inject liquid. Inject liquid metal 2 into the shielded flow channel 10 from the injection port.

[0071] In one embodiment of the present invention, the bonding step includes: Film bonding: The film layer is bonded to the side of the cured material with the flow channel structure to seal the side opening of the flow channel structure, thus obtaining a unit layer with the shielded flow channel 10 inside.

[0072] Unit layer bonding involves stacking and bonding at least two unit layers, so that the shielding channels 10 in different unit layers are arranged in a grid pattern.

[0073] Specifically, the membrane layer can be a PDMS membrane. The two PDMS surfaces to be bonded are plasma-treated and then bonded together, thereby sealing the side openings of the flow channel structure and obtaining a product with an internal shielded flow channel 10. Alternatively, a porous PC membrane can be used. The PDMS surfaces to be bonded and the porous PC membrane surfaces are treated with a silanization solution and then plasma-treated. The two surfaces are then bonded together to obtain a product with an internal shielded flow channel 10.

[0074] Specifically, when bonding between unit layers, the two PDMS surfaces that need to be bonded are plasma-treated and then cross-stacked and bonded.

[0075] In one embodiment of the present invention, the method for preparing the electromagnetic shielding device further includes the following steps: Step 105: Connect the grounding shield wire 3. Insert one end of the grounding shield wire 3 into the injection port to contact the liquid metal 2, and ground the other end.

[0076] The electromagnetic shielding device and its preparation method provided by the embodiments of the present invention utilize liquid metal 2, a metallic material, which possesses excellent conductivity and reflective properties against electromagnetic interference. Filling the shielding channel 10 with liquid metal 2 enables the shielding device to possess excellent electromagnetic shielding characteristics. Furthermore, since the shielding channel 10 covers the shielding area along at least two angled directions, the shielding layer formed by the liquid metal 2 can effectively shield electromagnetic interference from multiple directions, achieving a superior electromagnetic shielding effect. In addition, the flexible substrate 1 itself is flexible, and the liquid metal 2 itself is liquid with good fluidity. By filling the shielding channel 10 with liquid metal 2, the electromagnetic shielding device can possess good flexibility, exhibiting good flexibility and maintaining good electromagnetic shielding performance even when mechanically deformed. This can be used for electromagnetic shielding of some micro-devices, such as micro-sensors, especially flexible sensors. Compared with related technologies, this facilitates the refined management and control of electromagnetic shielding for micro-devices.

[0077] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, and not to limit them; although the present invention has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some of the technical features; and these modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the spirit and scope of the technical solutions of the embodiments of the present invention.

Claims

1. An electromagnetic shielding device, characterized in that, include: Flexible substrate (1) and liquid metal (2); A shielding area is formed on the flexible substrate (1), and multiple shielding channels (10) are arranged inside the flexible substrate (1); The flexible substrate (1) is arranged with at least two layers, and multiple shielding channels (10) are distributed in each layer of the flexible substrate (1). Furthermore, the shielding channels (10) in the multiple layers of the flexible substrate (1) cover the shielding area along at least two directions at an angle. The liquid metal (2) is filled in the shielded flow channel (10).

2. The electromagnetic shielding device according to claim 1, characterized in that, The shielding channels (10) within the multilayer flexible substrate (1) are arranged in a grid-like pattern.

3. The electromagnetic shielding device according to claim 2, characterized in that, The shielding channel (10) covers the shielding area along a first direction and a second direction that are perpendicular to each other; the shielding channel (10) includes a plurality of first channels (100) and second channels (101) arranged in a cross pattern; The first flow channel (100) extends along the first direction and is spaced apart along the second direction; the second flow channel (101) extends along the second direction and is spaced apart along the first direction; The flexible substrate (1) includes a bonded first layer (11) and a second layer (12); the first flow channel (100) is disposed on the first layer (11), and the second flow channel (101) is disposed on the second layer (12).

4. The electromagnetic shielding device according to claim 1, characterized in that, The shielding channels (10) within the multilayer flexible substrate (1) are arranged parallel to each other and staggered.

5. The electromagnetic shielding device according to claim 4, characterized in that, The shielded flow channel (10) includes multiple first flow channels (100) and second flow channels (101) arranged in parallel; The first flow channel (100) extends along a preset direction and is arranged at intervals; the second flow channel (101) extends along the preset direction and is located in the interval between two adjacent first flow channels (100), and the width of the second flow channel (101) is not less than the interval between two adjacent first flow channels (100). The flexible substrate (1) includes a bonded first layer (11) and a second layer (12); the first flow channel (100) is disposed on the first layer (11), and the second flow channel (101) is disposed on the second layer (12).

6. The electromagnetic shielding device according to claim 1, characterized in that, The flexible substrate is arranged with at least three layers, and the shielding flow channel (10) includes a first flow channel (100), a second flow channel (101) and a third flow channel (102) distributed in each layer of the flexible substrate (1); the first flow channel (100) and the second flow channel (101) are arranged in a grid shape; The third flow channel (102) is parallel to and staggered with the first flow channel (100); Alternatively, the third flow channel (102) and the second flow channel (101) may be arranged parallel to each other and staggered. Alternatively, the third flow channel (102) may be a single flow channel that covers the entire shielded area.

7. The electromagnetic shielding device according to claim 6, characterized in that, The first flow channel (100) and the second flow channel (101) cover the shielding area along a first direction and a second direction that are perpendicular to each other; The first flow channel (100) extends along the first direction and is spaced apart along the second direction; the second flow channel (101) extends along the second direction and is spaced apart along the first direction; The third flow channel (102) is a single flow channel that covers the entire shielded area.

8. The electromagnetic shielding device according to any one of claims 1 to 7, characterized in that, It also includes a grounding shield wire (3), on which a grounding port connected to the shielding flow channel (10) is provided. One end of the grounding shield wire (3) is electrically connected to the liquid metal (2) through the grounding port, and the other end is grounded.

9. A method for preparing an electromagnetic shielding device, characterized in that, Includes the following steps: Soft lithography involves coating a substrate with photoresist, pre-baking it, then covering the photoresist surface with a patterned mask, and after exposure, baking, and solvent treatment, obtaining the desired pattern on the substrate. Molding: The prepolymer is poured onto the patterned substrate, cured, and then the substrate is peeled off to obtain a cured product with the desired flow channel structure. Bonding is performed to seal the side opening of the flow channel structure and obtain a flexible substrate (1) with a shielded flow channel (10); Liquid injection: Liquid metal (2) is injected from the injection port into the shielded flow channel (10).

10. The method for preparing the electromagnetic shielding device according to claim 9, characterized in that, The bonding step includes: Film bonding: The film layer is bonded to the side of the cured material with the flow channel structure to seal the side opening of the flow channel structure, thereby obtaining a unit layer with a shielded flow channel (10) inside. Unit layer bonding involves stacking and bonding at least two unit layers so that the shielding channels (10) in different unit layers are arranged in a grid pattern.

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