Near-zero stiffness inertial measurement reference mechanism and inertial measurement device

Abstract

The invention relates to the technical field of low-frequency vibration, and discloses a near-zero-rigidity inertial measurement reference mechanism and an inertial measurement device.The near-zero-rigidity inertial measurement reference mechanism comprises a shell assembly, an extension component, a positive-rigidity assembly, a negative-rigidity assembly and a zero-rigidity assembly, and the positive-rigidity assembly, the negative-rigidity assembly and the zero-rigidity assembly are arranged in the shell assembly; the other end of the positive stiffness assembly is connected with the zero stiffness assembly, the positive stiffness assembly provides positive stiffness for the zero stiffness assembly, the negative stiffness assembly provides negative stiffness for the zero stiffness assembly, and the positive stiffness and the negative stiffness are counteracted; one end of the extension part is connected with the zero-rigidity assembly, the other end of the extension part extends to the outside of the shell assembly to enlarge a zero-rigidity area, the enlarged zero-rigidity area is static relative to the ground and serves as an inertial measurement reference, relative motion between the inertial measurement reference and an object to be measured is detected, and accurate extraction of ultralow-frequency inertial motion of the target is achieved. Therefore, the accuracy of inertial measurement is improved.

Description

Technical Field

[0001] This invention relates to the field of low-frequency vibration technology, and in particular to a near-zero stiffness inertial measurement reference mechanism and inertial measurement device. Background Technology

[0002] As vibration isolation technology continues to expand into low-frequency and ultra-low-frequency domains, the requirements for inertial measurement are also increasing, necessitating higher-precision motion sensing in the low-frequency band. To this end, it is necessary to construct an inertial reference benchmark that is highly insensitive to external low-frequency interference and can remain relatively stationary across a wide frequency band. By integrating a high-sensitivity measurement device onto this inertial measurement benchmark, the relative motion between the benchmark and the object under test can be detected, enabling precise extraction of the target's ultra-low-frequency inertial motion, thereby improving the accuracy of inertial measurement. Summary of the Invention

[0003] The purpose of this invention is to provide a near-zero stiffness inertial measurement reference mechanism and inertial measurement device, so as to use the near-zero stiffness region as an inertial measurement reference for inertial measurement and improve the accuracy of inertial measurement.

[0004] To achieve the above objectives, the present invention provides the following solution: A near-zero stiffness inertial measurement reference mechanism, characterized in that it comprises: a housing assembly, an extension component, and a positive stiffness component, a negative stiffness component, and a zero stiffness component disposed inside the housing assembly. One end of the positive stiffness component is connected to the housing assembly, and the other end of the positive stiffness component is connected to the zero stiffness component. The positive stiffness component provides positive stiffness to the zero stiffness component, and the negative stiffness component provides negative stiffness to the zero stiffness component, with the positive stiffness and negative stiffness canceling each other out. One end of the extension component is connected to the zero stiffness component, and the other end of the extension component extends to the outside of the housing assembly to expand the zero stiffness region. The expanded zero stiffness region is stationary relative to the ground and serves as an inertial measurement reference.

[0005] Furthermore, the positive stiffness component is an elastic diaphragm, and the negative stiffness component includes a magnet array group, which provides negative stiffness to the zero stiffness component through attractive force.

[0006] Furthermore, the magnet array group includes a first magnet array and a second magnet array. The first magnet array is disposed inside the zero-stiffness component, and the second magnet array is disposed below the elastic diaphragm and corresponding to the first magnet array. The magnetic field direction of the first magnet array is opposite to that of the second magnet array.

[0007] Furthermore, the zero-stiffness component includes an intermediate electrode plate and a first magnet support. The first magnet support is sleeved on the outer periphery of the intermediate electrode plate, connected to the elastic diaphragm, and the first magnet array is disposed inside the first magnet support.

[0008] Furthermore, it also includes a second magnet support, which is disposed at the bottom of the housing assembly, and the second magnet array is disposed inside the second magnet support.

[0009] Furthermore, both the first magnet array and the second magnet array adopt the Halbach Array array form.

[0010] Furthermore, the housing assembly includes a top cover, a housing body, and a base. The upper end of the housing body is fixedly connected to the top cover, and the lower end of the housing body is fixedly connected to the base. An extension hole is provided on the top cover, and the extension component passes through the extension hole.

[0011] Furthermore, the extension component is a cylindrical structure, with one end connected to the intermediate electrode plate and the other end extending out of the top cover through the extension hole to expand the zero-stiffness region.

[0012] The present invention also provides an inertial measurement device, including the near-zero stiffness inertial measurement reference mechanism described above, and further including an upper electrode plate. The upper electrode plate is disposed inside the housing assembly and has a distance between it and the intermediate electrode plate. The upper electrode plate is fixedly connected to the lower bottom surface of the top cover. An electrode hole is provided on the upper electrode plate, and the extension member passes through the electrode hole. By monitoring the capacitance change formed between the upper electrode plate and the intermediate electrode plate, the displacement change between the upper electrode plate and the intermediate electrode plate can be measured.

[0013] Furthermore, the inertial measurement device also includes a lower electrode plate, which is disposed on the upper surface of the second magnet support and is at a distance from the intermediate electrode plate. By monitoring the change in capacitance between the lower electrode plate and the intermediate electrode plate, the displacement change of the lower electrode plate relative to the intermediate electrode plate can be measured.

[0014] According to the above description, the present invention has the following technical effects: This invention provides a near-zero stiffness inertial measurement reference mechanism, comprising: a housing assembly, an extension component, and a positive stiffness component, a negative stiffness component, and a zero stiffness component disposed inside the housing assembly. One end of the positive stiffness component is connected to the housing assembly, and the other end of the positive stiffness component is connected to the zero stiffness component. The positive stiffness component provides positive stiffness to the zero stiffness component, and the negative stiffness component provides negative stiffness to the zero stiffness component, with the positive and negative stiffness canceling each other out. One end of the extension component is connected to the zero stiffness component, and the other end of the extension component extends to the outside of the housing assembly to expand the zero stiffness region. The expanded zero stiffness region is stationary relative to the ground and is used as an inertial measurement reference. This reference is highly insensitive to external low-frequency interference and can remain relatively stationary over a wide frequency band. Using this measurement reference as an inertial measurement reference, low-frequency high-precision motion can be sensed. Integrating a high-sensitivity measurement device on this reference can improve the accuracy of low-frequency high-precision motion measurement, i.e., inertial measurement. Attached Figure Description

[0015] To more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the drawings used in the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0016] Figure 1 This is an isometric schematic diagram of the inertial measurement device provided in the embodiments of this specification; Figure 2 A full cross-sectional schematic diagram of the inertial measurement device provided in the embodiments of this specification; Figure 3 This is a schematic diagram of the magnet arrangement in the first magnet array provided in the embodiments of this specification; The components include: 1. base; 2. second magnet support; 3. lower electrode plate; 4. top cover; 5. extension component; 6. middle electrode plate; 7. upper electrode plate; 8. second magnet array; 9. outer shell body; and 10. elastic diaphragm. Detailed Implementation

[0017] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0018] This specification provides a near-zero stiffness inertial measurement reference mechanism, characterized in that it includes: an outer shell assembly, an extension component 5, and a positive stiffness component, a negative stiffness component, and a zero stiffness component disposed inside the outer shell assembly. One end of the positive stiffness component is connected to the outer shell assembly, and the other end of the positive stiffness component is connected to the zero stiffness component. The positive stiffness component provides positive stiffness to the zero stiffness component, and the negative stiffness component provides negative stiffness to the zero stiffness component, with the positive and negative stiffness canceling each other out. One end of the extension component 5 is connected to the zero stiffness component, and the other end of the extension component 5 extends to the outside of the outer shell assembly to expand the zero stiffness region. The expanded zero stiffness region is stationary relative to the ground and serves as an inertial measurement reference. Furthermore, a platform can be extended outward from the intermediate electrode plate 6. Since the intermediate electrode plate is in a near-zero stiffness state and the platform is integrated with the intermediate electrode plate 6, the extended platform is also in a near-zero stiffness state. Therefore, the platform is stationary relative to the ground in space. Thus, the platform can be regarded as a near-zero stiffness inertial measurement reference point. This reference is highly insensitive to external low-frequency interference and can remain relatively stationary over a wide frequency band. Using this measurement reference as an inertial measurement reference, low-frequency high-precision motion can be sensed.

[0019] The positive stiffness component is preferably an elastic diaphragm 10, and the negative stiffness component includes a magnet array group. The magnet array group provides negative stiffness to the zero stiffness component through attractive force. Preferably, the magnet array group includes a first magnet array and a second magnet array 8. The first magnet array is disposed inside the zero stiffness component, and the second magnet array 8 is disposed below the elastic diaphragm 10 and corresponding to the first magnet array. The magnetic field direction of the first magnet array is opposite to the magnetic field direction of the second magnet array 8.

[0020] The zero-stiffness component includes an intermediate electrode plate 6 and a first magnet support. The first magnet support is sleeved on the outer periphery of the intermediate electrode plate 6 and is connected to the elastic diaphragm 10. The first magnet array is disposed inside the first magnet support. Specifically, the first magnet array is embedded in the first magnet support, and the number of magnets in the first magnet array is preferably 12.

[0021] It also includes a second magnet support 2, which is disposed at the bottom of the housing assembly, and a second magnet array 8 is disposed inside the second magnet support 2. Specifically, the second magnet array 8 is embedded inside the second magnet support 2, and the number of magnets in the second magnet array 8 is preferably 12.

[0022] Both the first and second magnet arrays 8 preferably adopt a Halbach array configuration, as this arrangement enhances magnetic force compared to conventional arrangements. The magnet arrangement in the first magnet array is as follows: Figure 3 As shown in the figure, the arrow points from the S pole to the N pole.

[0023] The housing assembly includes a top cover 4, a housing body 9, and a base 1. The upper end of the housing body 9 is fixedly connected to the top cover 4, and the lower end of the housing body 9 is fixedly connected to the base 1. An extension hole is provided on the top cover 4, and an extension component 5 passes through the extension hole.

[0024] The extension component 5 is preferably a cylindrical structure. One end of the cylindrical structure is connected to the intermediate electrode plate 6, and the other end of the cylindrical structure extends out of the top cover 4 through the extension hole to expand the zero stiffness area. Other shapes of extension components 5 can also be selected according to the actual situation.

[0025] This specification also provides an inertial measurement device, such as... Figures 1-2 As shown, the near-zero stiffness inertial measurement reference mechanism described above also includes an upper electrode plate 7. The upper electrode plate 7 is disposed inside the housing assembly and is spaced apart from the middle electrode plate 6. The upper electrode plate is fixedly connected to the bottom surface of the top cover 4. An electrode hole is provided on the upper electrode plate 7, and the extension component 5 passes through the electrode hole. By monitoring the capacitance change formed between the upper electrode plate 7 and the middle electrode plate 6, the displacement change between the upper electrode plate 7 and the middle electrode plate 6 can be measured, thereby enabling the monitoring of the low-frequency vibration of the upper electrode plate 7 relative to the middle electrode plate 6.

[0026] The inertial measurement device also includes a lower electrode plate 3, which is disposed on the upper surface of the second magnet support 2 and is spaced apart from the intermediate electrode plate 6. By monitoring the change in capacitance formed between the lower electrode plate 3 and the intermediate electrode plate 6, the displacement change of the lower electrode plate 3 relative to the intermediate electrode plate 6 can be measured, thereby enabling the monitoring of low-frequency vibration of the lower electrode plate 3 relative to the intermediate electrode plate 6. Integrating a high-sensitivity measuring device on the aforementioned reference can improve the measurement of low-frequency, high-precision motion, i.e., improve the accuracy of inertial measurement.

[0027] The various embodiments in this specification are described in a progressive manner, with each embodiment focusing on its differences from other embodiments. Similar or identical parts between embodiments can be referred to interchangeably. For the systems disclosed in the embodiments, since they correspond to the methods disclosed in the embodiments, the descriptions are relatively simple; relevant parts can be referred to the method section.

[0028] This document uses specific examples to illustrate the principles and implementation methods of the present invention. The descriptions of the above embodiments are only for the purpose of helping to understand the method and core ideas of the present invention. Furthermore, those skilled in the art will recognize that, based on the ideas of the present invention, there will be changes in the specific implementation methods and application scope. Therefore, the content of this specification should not be construed as a limitation of the present invention.

Claims

1. A near-zero stiffness inertial measurement reference mechanism, characterized in that, include: The system includes an outer shell assembly, an extension component, and a positive stiffness component, a negative stiffness component, and a zero stiffness component disposed within the outer shell assembly. One end of the positive stiffness component is connected to the outer shell assembly, and the other end of the positive stiffness component is connected to the zero stiffness component. The positive stiffness component provides positive stiffness to the zero stiffness component, and the negative stiffness component provides negative stiffness to the zero stiffness component, with the positive stiffness and negative stiffness canceling each other out. One end of the extension component is connected to the zero stiffness component, and the other end of the extension component extends to the outside of the outer shell assembly to expand the zero stiffness region. The expanded zero stiffness region is stationary relative to the ground and serves as an inertial measurement reference.

2. The near-zero stiffness inertial measurement reference mechanism according to claim 1, characterized in that, The positive stiffness component is an elastic diaphragm, and the negative stiffness component includes a magnet array group, which provides negative stiffness to the zero stiffness component through attractive force.

3. The near-zero stiffness inertial measurement reference mechanism according to claim 2, characterized in that, The magnet array group includes a first magnet array and a second magnet array. The first magnet array is disposed inside the zero-stiffness component, and the second magnet array is disposed below the elastic diaphragm and is disposed corresponding to the first magnet array. The magnetic field direction of the first magnet array is opposite to that of the second magnet array.

4. The near-zero stiffness inertial measurement reference mechanism according to claim 3, characterized in that, The zero-stiffness component includes an intermediate electrode plate and a first magnet support. The first magnet support is sleeved on the outer periphery of the intermediate electrode plate and connected to the elastic diaphragm. The first magnet array is disposed inside the first magnet support.

5. The near-zero stiffness inertial measurement reference mechanism according to claim 4, characterized in that, It also includes a second magnet support, which is disposed at the bottom of the housing assembly, and the second magnet array is disposed inside the second magnet support.

6. The near-zero stiffness inertial measurement reference mechanism according to claim 3, characterized in that, Both the first magnet array and the second magnet array adopt the Halbach Array array form.

7. The near-zero stiffness inertial measurement reference mechanism according to claim 5, characterized in that, The housing assembly includes a top cover, a housing body, and a base. The upper end of the housing body is fixedly connected to the top cover, and the lower end of the housing body is fixedly connected to the base. An extension hole is provided on the top cover, and the extension component passes through the extension hole.

8. The near-zero stiffness inertial measurement reference mechanism according to claim 7, characterized in that, The extension component is a cylindrical structure. One end of the cylindrical structure is connected to the intermediate electrode plate, and the other end of the cylindrical structure extends out of the top cover through the extension hole to expand the zero stiffness region.

9. An inertial measurement device, characterized in that, The near-zero stiffness inertial measurement reference mechanism according to any one of claims 7 to 8 further includes an upper electrode plate, which is disposed inside the housing assembly and has a distance between it and the intermediate electrode plate. The upper electrode plate is fixedly connected to the lower bottom surface of the top cover. An electrode hole is provided on the upper electrode plate, and the extension member passes through the electrode hole. By monitoring the change in capacitance formed between the upper electrode plate and the intermediate electrode plate, the displacement change between the upper electrode plate and the intermediate electrode plate can be measured.

10. The inertial measurement device according to claim 9, characterized in that, It also includes a lower electrode plate, which is disposed on the upper surface of the second magnet support and is at a distance from the intermediate electrode plate. By monitoring the change in capacitance between the lower electrode plate and the intermediate electrode plate, the displacement change of the lower electrode plate relative to the intermediate electrode plate can be measured.

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