Double-solvent cleaning machine

Abstract

The invention discloses a double-solvent cleaning machine which comprises a machine cabinet, a cleaning mechanism is arranged in the machine cabinet and comprises a cleaning tank and a rinsing tank, the bottoms of the cleaning tank and the rinsing tank are each provided with a liquid inlet and a liquid outlet, and the surfaces of the cleaning tank and the rinsing tank are each provided with a circulating heating cleaning pipe. A heat conduction cylinder is arranged in the circulating heating cleaning pipe, and a heating resistor is arranged in the heat conduction cylinder. According to the cleaning device, the cleaning mechanism is arranged, the liquid is heated through a heating resistor and discharged through a liquid discharging channel of a liquid spraying section, liquid stopping blocks are arranged in a liquid pumping channel and the liquid discharging channel, the liquid flow pressure is increased, the liquid is sprayed out, the liquid flow speed in the cleaning tank is increased, and therefore the cleaning effect is improved; and the filter cover is scraped and washed by a scraper, so that residues are sucked into the filter cartridge to be filtered, and then the filter cartridge is cleaned, so that the service life of the cleaning mechanism is guaranteed.

Description

Technical Field

[0001] This invention belongs to the technical field of semiconductor precision component cleaning equipment, and specifically relates to a dual-solvent cleaning machine. Background Technology

[0002] Precision components such as semiconductors require a cleaning process during production. The workpieces need to be cleaned and dried. The cleaning and drying process requires cleaning equipment. The cleaning machine is equipped with a cleaning chamber in which the workpieces are placed for cleaning. However, the existing cleaning chambers take a long time to clean the workpieces and the cleaning effect is poor, resulting in poor quality of the workpieces. Furthermore, the existing cleaning chambers are structurally unstable.

[0003] Therefore, it is necessary to invent a dual-solvent cleaning machine to solve the above problems. Summary of the Invention

[0004] To address the aforementioned problems, this invention provides a dual-solvent cleaning machine to solve the issues raised in the background section.

[0005] To achieve the above objectives, the present invention provides the following technical solution: a dual-solvent cleaning machine, comprising a cabinet, wherein a cleaning mechanism is provided inside the cabinet, the cleaning mechanism comprising a cleaning tank and a rinsing tank, wherein both the bottom of the cleaning tank and the rinsing tank are provided with a liquid inlet and a liquid outlet, wherein both the surface of the cleaning tank and the rinsing tank are provided with a circulating heating cleaning pipe, wherein a heat-conducting cylinder is provided inside the circulating heating cleaning pipe, wherein a heating resistor is provided inside the heat-conducting cylinder, wherein the circulating heating cleaning pipe is divided into two parts, namely a liquid extraction section and a liquid spraying section, wherein a liquid pump is provided between the liquid extraction section and the liquid spraying section, and both the liquid extraction section and the liquid spraying section are provided with a liquid inlet device and a liquid outlet device.

[0006] Furthermore, the liquid inlet device and the liquid outlet device respectively include a liquid inlet channel and a liquid outlet channel. Both the liquid inlet channel and the liquid outlet channel are provided with a liquid stop block. A sliding rod is movably inserted through both sides of the liquid stop block, and a first spring is sleeved on the surface of the sliding rod.

[0007] Furthermore, the number of liquid extraction channels on the surface of the spray section is two, and the inner diameter is less than 1 / 4 of the inner diameter of the liquid discharge channel on the surface of the spray section.

[0008] Furthermore, the inner diameter of the liquid extraction channel on the surface of the liquid extraction section is larger than the inner diameter of the liquid discharge channel of the liquid extraction section, and is more than twice the inner diameter of the liquid discharge channel of the liquid spraying section.

[0009] Furthermore, one end of the discharge channel of the spray section is located inside the circulating heating cleaning pipe and is equipped with a filter cover, and a shaft frame is provided inside the filter cover. A central shaft is rotatably connected to the center of the shaft frame. One end of the central shaft extends only inside the discharge channel and is equipped with an impeller. The other end of the central shaft rotatably passes through one side of the filter cover and is equipped with a scraper.

[0010] Furthermore, the outer diameter of the impeller matches the inner diameter of the discharge channel of the spray section, and the length of the scraper is equal to the radius of the filter cover.

[0011] Furthermore, a filter cylinder is provided on one side of the junction between the liquid extraction section and the liquid spraying section. A filter element is provided inside the filter cylinder. The top of the filter element and the filter cylinder are enclosed and fixed by bolts.

[0012] Furthermore, the cleaning mechanism also includes a steam rinsing zone and a condensation drying zone. The steam rinsing zone is located at the top of the cleaning tank and the rinsing tank and is connected to the interior of the cleaning tank and the rinsing tank.

[0013] Furthermore, the condensation drying zone is located at the top of the steam rinsing zone, and its inner wall is equipped with a condenser tube as a solvent recovery device.

[0014] The technical effects and advantages of this invention are as follows:

[0015] 1. This invention features a cleaning mechanism that heats the liquid with a heating resistor and discharges it through the drainage channel of the spray section. Since both the suction and discharge channels contain liquid-stopping blocks, the liquid pressure is increased, causing the liquid to spray out and increasing the liquid flow velocity inside the cleaning tank, thereby improving the cleaning effect. Furthermore, the filter cover is scraped by a scraper, causing the residue to be sucked into the filter cartridge for filtration. Finally, the filter cartridge is cleaned, thus ensuring the service life of the cleaning mechanism.

[0016] Other features and advantages of the invention will be set forth in the following description, and will be apparent in part from the description, or may be learned by practicing the invention. The objects and other advantages of the invention may be realized and obtained by means of the structures pointed out in the description and drawings. Attached Figure Description

[0017] To more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0018] Figure 1 A schematic diagram of the overall structure of an embodiment of the present invention is shown;

[0019] Figure 2 A schematic diagram of the cleaning mechanism according to an embodiment of the present invention is shown;

[0020] Figure 3 An embodiment of the present invention is shown. Figure 1 Enlarged view of section A in the middle;

[0021] Figure 4 An embodiment of the present invention is shown. Figure 3 Enlarged view of section B;

[0022] Figure 5 An embodiment of the present invention is shown. Figure 3 Enlarged view of section C;

[0023] Figure 6 An embodiment of the present invention is shown. Figure 1 Enlarged view of section D

[0024] In the diagram: 1. Cabinet; 2. Cleaning mechanism; 3. Cleaning tank; 4. Rinsing tank; 5. Liquid inlet; 6. Liquid outlet; 7. Circulating heating cleaning pipe; 8. Heat-conducting cylinder; 9. Heating resistor; 10. Liquid extraction section; 11. Liquid spraying section; 12. Liquid pump; 13. Liquid inlet device; 14. Liquid outlet device; 15. Liquid inlet channel; 16. Liquid outlet channel; 17. Stop block; 18. Slide rod; 19. First spring; 20. Filter cover; 21. Shaft bracket; 22. Central shaft; 23. Impeller; 24. Scraper; 25. Filter cartridge; 26. Filter element; 27. Steam rinsing area; 28. Condensation drying area; 29. ​​Condenser pipe. Detailed Implementation

[0025] To make the objectives, technical solutions, and advantages of the embodiments of the present invention clearer, the technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0026] This invention provides a dual-solvent cleaning machine, such as... Figure 1-6As shown, the system includes a cabinet 1, inside which a cleaning mechanism 2 is installed. The cleaning mechanism 2 includes a cleaning tank 3 and a rinsing tank 4. Both the cleaning tank 3 and the rinsing tank 4 have a liquid inlet 5 and a liquid outlet 6 at their bottoms. Both the cleaning tank 3 and the rinsing tank 4 have circulating heating cleaning pipes 7 on their surfaces. Each circulating heating cleaning pipe 7 has a heat-conducting cylinder 8 inside, and a heating resistor 9 inside the heat-conducting cylinder 8. The circulating heating cleaning pipe 7 is divided into two parts: a liquid extraction section 10 and a liquid spraying section 10. 1. A liquid pump 12 is provided between the liquid extraction section 10 and the liquid spraying section 11 in the circulating heating cleaning pipe 7. Both the liquid extraction section 10 and the liquid spraying section 11 are provided with a liquid inlet device 13 and a liquid outlet device 14. The liquid inlet device 13 and the liquid outlet device 14 respectively include a liquid inlet channel 15 and a liquid outlet channel 16. Both the liquid inlet channel 15 and the liquid outlet channel 16 are provided with a liquid stop block 17. A sliding rod 18 is inserted through and movable on both sides of the liquid stop block 17. A first spring 19 is sleeved on the surface of the sliding rod 18.

[0027] The equipment's built-in robotic arm places precision components such as semiconductors into the cleaning tank 3 for cleaning. During the cleaning process, the liquid pump 12 is activated to pump the cleaning liquid from the cleaning tank 3 into the circulating heating cleaning pipe. The principle is that hydraulic pressure is used to open the liquid stop block 17 inside the liquid extraction channel of the liquid extraction section 10, allowing the cleaning liquid to enter the circulating heating cleaning channel. It is heated by the heating resistor 9 and then discharged through the liquid discharge channel 16 of the spray section 11. Since both the liquid extraction channel and the liquid discharge channel 16 contain liquid stop blocks 17, the liquid pressure is increased, causing it to spray out and increase the volume of the cleaning tank 3.

[0028] like Figure 1-6As shown, the number of liquid extraction channels on the surface of the spray section 11 is two, and the inner diameter is less than 1 / 4 of the inner diameter of the drain channel 16 on the surface of the spray section 11; the inner diameter of the liquid extraction channel on the surface of the extraction section 10 is greater than the inner diameter of the drain channel 16 of the extraction section 10, and is greater than twice the inner diameter of the drain channel 16 of the spray section 11; one end of the drain channel 16 of the spray section 11 is located inside the circulating heating cleaning pipe 7 and is provided with a filter cover 20, and a shaft frame 21 is provided inside the filter cover 20. The shaft frame 21 is rotatably connected to a central shaft 22. One end of the central shaft 22 extends only inside the drain channel 16 and is provided with an impeller 23. The other end of the central shaft 22 rotatably passes through one side of the filter cover 20 and is provided with a scraper 24; The outer diameter of the impeller 23 matches the inner diameter of the discharge channel 16 of the spray section 11, and the length of the scraper 24 is equal to the radius of the filter cover 20. A filter cylinder 25 is provided on one side of the junction between the liquid extraction section 10 and the spray section 11. A filter element 26 is provided inside the filter cylinder 25. The top of the filter element 26 and the filter cylinder 25 are enclosed and fixed by bolts. The cleaning mechanism 2 also includes a steam rinsing zone 27 and a condensation drying zone 28. The steam rinsing zone is located at the top of the cleaning tank 3 and the rinsing tank 4 and communicates with the interior of the cleaning tank 3 and the rinsing tank 4. The condensation drying zone 28 is located at the top of the steam rinsing zone 27, and a condenser pipe 29 is provided on the inner wall as a solvent recovery device.

[0029] During the discharge of liquid from the spray section 11, the liquid is filtered through the filter cover 20 to remove impurities from the cleaning liquid. The discharge of the cleaning liquid also drives the impeller 23 to rotate, which in turn drives the central shaft 22 to rotate. This causes the scraper 24 at one end of the central shaft 22 to scrape and wash the surface of the filter cover 20, removing the adsorbed waste and extending the service life of the filter cover 20. After cleaning, precision components such as semiconductors are added to the rinsing tank 4 using a robotic arm and rinsed using the above steps. After cleaning and rinsing, the filter element 26 in the filter cartridge 25 is removed, cleaned, and reinstalled. Then, the reverse pump 12 is used to inject liquid through the suction pipe of the spray section 11 to backwash the filter cover 20. The scraper 24 scrapes and washes the filter cover 20, causing residue to be drawn into the filter cartridge 25 for filtration. Finally, the filter cartridge 25 is cleaned, thus ensuring the service life of the cleaning mechanism 2.

[0030] Working principle of this invention:

[0031] Refer to the instruction manual appendix Figure 1-6When the equipment is in use, the built-in robotic arm places precision components such as semiconductors to be cleaned into the cleaning tank 3 for cleaning. During the cleaning process, the liquid pump 12 is activated to draw the cleaning liquid from the cleaning tank 3 into the circulating heated cleaning pipe. The principle is that hydraulic pressure opens the stop block 17 inside the liquid extraction channel of the extraction section 10, allowing the cleaning liquid to enter the circulating heated cleaning channel. It is then heated by the heating resistor 9 and discharged through the drain channel 16 of the spray section 11. Since both the extraction and drain channels 16 contain stop blocks 17, the liquid pressure is increased, causing it to spray out and increasing the liquid flow velocity inside the cleaning tank 3, thereby improving the cleaning effect. Furthermore, during the discharge process from the spray section 11, the liquid is filtered through the filter cover 20, ensuring the cleaning liquid is cleaned properly. Impurities in the liquid are removed, and during the discharge of the cleaning liquid, the impeller 23 is rotated, causing the impeller 23 to drive the central shaft 22 to rotate. This causes the scraper 24 at one end of the central shaft 22 to scrape and wash the surface of the filter cover 20, cleaning the adsorbed garbage to one side and extending the service life of the filter cover 20. After cleaning, precision components such as semiconductors are added to the rinsing tank 4 using a robotic arm and rinsed using the above steps. After cleaning and rinsing, the filter element 26 in the filter cartridge 25 is removed, cleaned, and reinstalled. Then, the liquid pump 12 is reversed, and liquid is introduced through the liquid extraction pipe of the spray section 11 to backwash the filter cover 20. The scraper 24 scrapes and washes the filter cover 20, causing the residue to be sucked into the filter cartridge 25 for filtration. Then, the filter cartridge 25 is cleaned, thus ensuring the service life of the cleaning mechanism 2.

[0032] Although the present invention has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some of the technical features; and these modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the spirit and scope of the technical solutions of the embodiments of the present invention.

Claims

1. A dual-solvent cleaning machine, comprising a cabinet (1), characterized in that: The cabinet (1) is equipped with a cleaning mechanism (2), which includes a cleaning tank (3) and a rinsing tank (4). The bottom of the cleaning tank (3) and the rinsing tank (4) are provided with a liquid inlet (5) and a liquid outlet (6). The surface of the cleaning tank (3) and the rinsing tank (4) is provided with a circulating heating cleaning pipe (7). The circulating heating cleaning pipe (7) is provided with a heat-conducting cylinder (8) inside. The heat-conducting cylinder (8) is provided with a heating resistor (9). The circulating heating cleaning pipe (7) is divided into two parts, namely a liquid extraction section (10) and a liquid spraying section (11). A liquid pump (12) is provided between the liquid extraction section (10) and the liquid spraying section (11) of the circulating heating cleaning pipe (7). The liquid extraction section (10) and the liquid spraying section (11) are both provided with a liquid inlet device (13) and a liquid outlet device (14).

2. The dual-solvent cleaning machine according to claim 1, characterized in that: The liquid inlet device (13) and the liquid outlet device (14) respectively include a liquid inlet channel (15) and a liquid outlet channel (16). Both the liquid inlet channel (15) and the liquid outlet channel (16) are provided with a liquid stop block (17). Both sides of the liquid stop block (17) are movably inserted with a slide rod (18). A first spring (19) is sleeved on the surface of the slide rod (18).

3. The dual-solvent cleaning machine according to claim 2, characterized in that: The number of liquid extraction channels on the surface of the spray section (11) is two, and the inner diameter is less than 1 / 4 of the inner diameter of the drain channel (16) on the surface of the spray section (11).

4. The dual-solvent cleaning machine according to claim 2, characterized in that: The inner diameter of the liquid extraction channel on the surface of the liquid extraction section (10) is greater than the inner diameter of the liquid discharge channel (16) of the liquid extraction section (10), and is more than twice the inner diameter of the liquid discharge channel (16) of the spray section (11).

5. A dual-solvent cleaning machine according to claim 2, characterized in that: One end of the discharge channel (16) of the spray section (11) is located inside the circulating heating cleaning pipe (7) and is equipped with a filter cover (20). The filter cover (20) is equipped with a shaft frame (21). The shaft frame (21) is rotatably connected to a central shaft (22). One end of the central shaft (22) extends only inside the discharge channel (16) and is equipped with an impeller (23). The other end of the central shaft (22) rotatably passes through one side of the filter cover (20) and is equipped with a scraper (24).

6. A dual-solvent cleaning machine according to claim 5, characterized in that: The outer diameter of the impeller (23) matches the inner diameter of the discharge channel (16) of the spray section (11), and the length of the scraper (24) is equal to the radius of the filter cover (20).

7. The dual-solvent cleaning machine according to claim 1, characterized in that: A filter cartridge (25) is provided on one side of the junction of the liquid extraction section (10) and the liquid spraying section (11). A filter element (26) is provided inside the filter cartridge (25). The top of the filter element (26) and the filter cartridge (25) are enclosed and fixed by bolts.

8. The dual-solvent cleaning machine according to claim 1, characterized in that: The cleaning mechanism (2) further includes a steam rinsing zone (27) and a condensation drying zone (28). The steam rinsing zone is located at the top of the cleaning tank (3) and the rinsing tank (4) and is connected to the interior of the cleaning tank (3) and the rinsing tank (4).

9. A dual-solvent cleaning machine according to claim 8, characterized in that: The condensation drying zone (28) is located at the top of the steam rinsing zone (27), and the inner wall is equipped with a condenser tube (29) as a solvent recovery device.

Images