X-ray focusing optical system based on coupling of single capillary tube and refraction lens and manufacturing method

Abstract

The invention discloses an X-ray focusing optical system based on coupling of a single capillary tube and a refraction lens and a manufacturing method, and belongs to the technical field of X-ray focusing optical devices. Comprising an X-ray light source, a single-capillary X-ray lens and a two-dimensional diamond refraction lens, the two-dimensional diamond refraction lens is arranged between the X-ray light source and the single-capillary X-ray lens, and the focal points of the single-capillary X-ray lens and the two-dimensional diamond refraction lens coincide; the single-capillary X-ray lens is a paraboloid type single-capillary X-ray lens or an ellipsoid type single-capillary X-ray lens, and the two-dimensional diamond refraction lens is of a revolution paraboloid structure. The two-dimensional diamond refraction lens is adopted to replace a traditional light beam stopper, the design that the focus of the single-capillary X-ray lens and the focus of the two-dimensional diamond refraction lens coincide is combined, double focusing regulation and control of X-rays are achieved, and optical loss is greatly reduced.

Description

An X-ray focusing optical system and manufacturing method based on coupling of a single capillary and a refractive lens Technical Field

[0001] This invention relates to the field of X-ray focusing optical device technology, and specifically to an X-ray focusing optical system and manufacturing method based on the coupling of a single capillary and a refractive lens. Background Technology

[0002] A single-capillary X-ray lens is a highly efficient X-ray manipulation device. This lens, created by drawing a single glass tube into a specific geometry, controls the propagation path of X-rays and is widely used in synchrotron radiation sources and laboratory light sources. Single-capillary X-ray lenses offer numerous advantages, particularly in long working distances, adjustable divergence, and sub-micron focal spot sizes, making them an important tool for precision imaging and beam control. Targeted coating of the lens's inner wall can further enhance its efficiency and control over high-energy X-ray focusing and imaging. These advantages make it particularly suitable for the X-ray manipulation requirements of advanced light sources such as fourth-generation synchrotron radiation sources, leading to increasing attention from the field of advanced light source applications.

[0003] However, the application of single-capillary X-ray lenses typically requires the use of a beam blocker to block light passing directly through the lens, ensuring that the lens only receives regulated X-rays and avoiding the influence of direct light on the focused spot. However, the use of a beam blocker introduces certain optical losses, thereby reducing the overall efficiency of the system. Furthermore, beam blockers may also cause additional scattering and absorption losses, affecting image quality and measurement accuracy. Summary of the Invention

[0004] To maximize the utilization of received light and increase the efficiency of the focusing system, a two-dimensional refractive lens is proposed to replace the traditional beam blocker. This design significantly improves X-ray utilization while avoiding the additional losses and unnecessary optical effects that beam blockers may cause. Therefore, this invention provides an X-ray focusing optical system and manufacturing method based on the coupling of a single capillary and a refractive lens, aiming to overcome the shortcomings of existing technologies, further improve the performance of single-capillary X-ray lenses, and enhance their application potential in high-energy X-ray applications.

[0005] To achieve the above objectives, the present invention provides the following technical solution: Firstly, the present invention provides an X-ray focusing optical system based on the coupling of a single capillary and a refractive lens, comprising an X-ray source, a single capillary X-ray lens, and a two-dimensional diamond refractive lens. The two-dimensional diamond refractive lens is disposed between the X-ray source and the single capillary X-ray lens, with the focal points of the single capillary X-ray lens and the two-dimensional diamond refractive lens coinciding. The single capillary X-ray lens is a parabolic single capillary X-ray lens or an ellipsoidal single capillary X-ray lens, and the two-dimensional diamond refractive lens is a parabolic rotating surface structure. The light emitted from the X-ray source is first initially focused by the parabolic rotating surface structure of the two-dimensional diamond refractive lens before being directed towards the single capillary X-ray lens. Secondary precise focusing is achieved through the coupling design where the focal points of the two lenses coincide.

[0006] Furthermore, the two-dimensional diamond refractive lens is used in a multi-lens stacking manner, with all lenses having collinear optical axes, and its mirror profile satisfies a mathematical expression. ,focal length And it conforms to the Gaussian imaging formula Where R is the radius of curvature of the lens, N is the number of lenses, σ is the refractive index of the lens, u is the object distance, and v is the image distance.

[0007] Furthermore, the inner wall of the parabolic single-capillary X-ray lens is part of a parabola, and its curve satisfies the mathematical expression as follows: F PML is the focal length, representing the distance from the focal point of the parabola to the vertex of the parabola.

[0008] Furthermore, the inner wall of the ellipsoidal single-capillary X-ray lens is ellipsoidal, and its curve satisfies the mathematical expression. Where a, b, and c are the semi-axis lengths of the ellipsoid on the x, y, and z axes, respectively, and a = b; the focal point of the ellipsoidal single-capillary X-ray lens is located at one of the two foci of the ellipsoid, and the focal length is... .

[0009] Furthermore, the converging beam range of the single capillary X-ray lens is from 0.1 micrometers to 5 millimeters.

[0010] Furthermore, the inner wall of the single capillary X-ray lens is provided with a metal coating, and the material of the metal coating is platinum, gold, nickel or iridium.

[0011] Furthermore, the overall length L of the parabolic single-capillary X-ray lens is 10mm-200mm, and the inlet diameter D is... in The diameter of the outlet end is 0.01mm-100mm. outThe thickness is 0.012mm-120mm; the two-dimensional diamond refractive lens is fabricated on a cylindrical diamond rough with a thickness H of 0.3mm-1mm and a diameter D of 0.5-6mm, and its single-sided aperture D is... CRL The thickness is 0.4mm-2mm, and the depth is H. CRL The diameter D of the cylindrical diamond rough is 0.125-0.485 mm; the diameter D of the cylindrical diamond rough is larger than the exit end diameter D of the parabolic single capillary X-ray lens. out The single-sided aperture D of the two-dimensional diamond refractive lens CRL The diameter D at the exit end of the parabolic single capillary X-ray lens is smaller than that at the exit end. out .

[0012] Furthermore, the overall length L of the ellipsoidal single capillary X-ray lens is 10mm-200mm, and the inlet diameter D is... in The diameter of the outlet end is 0.01mm-100mm. out The thickness is 0.012mm-120mm; the two-dimensional diamond refractive lens is fabricated on a cylindrical diamond rough with a thickness H of 0.3mm-2mm and a diameter D of 0.5-2mm, and its single-sided aperture D is 0.012mm-120mm. CRL The thickness is 0.4mm-2mm, and the depth is H. CRL The diameter is 0.125-0.5 mm; t is the distance from the X-ray source to the entrance of the single capillary X-ray lens, and the diameter D of the cylindrical diamond rough is less than... The single-sided aperture D of the two-dimensional diamond refractive lens CRL Less than .

[0013] Furthermore, a slit is provided at the exit position of the single capillary X-ray lens to block X-rays that are not focused by the two-dimensional diamond lens.

[0014] Secondly, the present invention provides a method for manufacturing an X-ray focusing optical system based on the coupling of a single capillary and a refractive lens, comprising: Step 1, manufacturing a single capillary X-ray lens; Step 11, selecting a high borosilicate glass tube as the mother tube, cleaning it with acid and alkali solutions, and then drying it with high-pressure inert gas; Step 12, heating the mother tube to 500°C-700°C in a heating furnace to soften it, and stretching it at a varying speed of 1mm / s-10mm / s using a wire drawing machine to form a single tube with a parabolic or ellipsoidal inner wall; Step 13, using an optical detection system to detect the shape curve of the single tube and extracting the effective area; Step 14, using an X-ray optical detection system to select single capillary X-ray lenses that meet the design specifications; Step 15, performing high-density metal coating treatment on the inner wall of the single capillary X-ray lens; Step 2, manufacturing a two-dimensional diamond refractive lens; Step 21, using a femtosecond laser modulated as a Bessel beam to cut a diameter requirement from a double-polished CVD single-crystal diamond rough. The cylindrical diamond rough stone is used, and the wavelength of the femtosecond laser is 400nm-650nm. Step 22: Place the cylindrical diamond rough stone in the center of the high repetition rate ultraviolet femtosecond laser three-dimensional processing system, and adjust the center of the laser beam to the center of the rough stone. Step 23: Adjust the parameters of the laser processing system, and etch circular micro-elements with the designed depth and diameter on the surface of the rough stone. After completing one layer of etching, move the rough stone up so that the center of the laser beam is always at the bottom of the micro-elements. Repeat the etching process until the single-sided lens mirror surface is completed. Step 24: Turn the diamond rough stone over, adjust the laser beam to the center of the rough stone, and repeat step 23 to complete the mirror surface shaping of the other side, and obtain a two-dimensional diamond refractive lens with double-sided top. Step 25: Make multiple two-dimensional diamond refractive lenses with the same or different parameters according to the requirements, and ensure that the optical axes of all lenses are collinear and closely arranged. Step 3: Lens coupling: Place the manufactured single capillary X-ray lens and the two-dimensional diamond refractive lens at the corresponding positions in the optical path to ensure that their focal points coincide.

[0015] Based on the above technical solutions, the embodiments of the present invention can produce at least the following technical effects: (1) The present invention uses a two-dimensional diamond refractive lens to replace the traditional beam blocker, which completely changes the passive mode of blocking direct light in the traditional design, and instead actively focuses and utilizes the originally blocked X-rays. By combining the focal overlap design of the single capillary X-ray lens and the two-dimensional diamond refractive lens, dual focusing control of X-rays is realized, optical losses are greatly reduced, and the utilization rate of X-rays in the energy range of 1-100keV is significantly improved, effectively adapting to the high-intensity application requirements of advanced light sources such as the fourth-generation synchrotron radiation source.

[0016] (2) The rotating parabolic structure and multi-layer stacking design of the two-dimensional diamond refractive lens of this invention can accurately compensate for the focusing deviation of a single capillary lens. At the same time, the diamond material has an extremely low X-ray absorptivity and extremely high mechanical stability, avoiding the scattering and absorption interference caused by traditional beam blockers, thus improving the uniformity of the focused spot. The focal spot size can be stably controlled within the range of 0.1 micrometers to 5 millimeters, meeting the requirements of sub-micrometer precision imaging and high-precision measurement. In addition, the platinum, gold and other metal coatings on the inner wall of the single capillary further enhance the reflection control capability of high-energy X-rays, reduce beam attenuation, and improve imaging contrast and the reliability of measurement data.

[0017] (3) This invention provides two types of single capillary lenses: parabolic and ellipsoidal, which are suitable for different scenarios such as quasi-parallel beam focusing, divergent beam collimation, and point light source focusing. Combined with the adjustable parameters of the two-dimensional diamond refractive lens, it can flexibly adapt to different light source types such as synchrotron radiation sources and laboratory light sources, as well as application requirements with different energies and focusing accuracies. At the same time, the size design of the two types of lenses ensures the compatibility of optical path coupling, and the functionality can be expanded by simply adjusting the lens spacing and arrangement. Attached Figure Description

[0018] To more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on the structures shown in these drawings without creative effort.

[0019] Figure 1 shows the focusing optical system of the present invention with a parabolic capillary coupled with a refractive lens; Figure 2 shows the focusing optical system of the present invention with an ellipsoidal capillary coupled with a refractive lens; In the figures: 1. Quasi-parallel beam, 2. Two-dimensional diamond refractive lens, 3. Parabolic single capillary X-ray lens, 4. Focal point, 5. Slit, 6. X-ray source, 7. Ellipsoidal single capillary X-ray lens. Detailed Implementation

[0020] The technical solutions in the embodiments of the present invention will be clearly and completely described below. Obviously, the described embodiments are only a part of the embodiments of the present invention, and not all of them. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention. In addition, the technical solutions of the various embodiments can be combined with each other, but this must be based on the ability of those skilled in the art to implement them. When the combination of technical solutions is contradictory or cannot be implemented, it should be considered that such combination of technical solutions does not exist and is not within the scope of protection claimed by the present invention.

[0021] The objective of this invention is achieved through the following technical solution: The core of the focusing optical system of this invention consists of a single capillary X-ray lens and a two-dimensional diamond refractive lens. These two types of lenses are arranged sequentially along the X-ray beam path. The key technical point is to ensure that the focal points of both lenses coincide. Combined with a slit at the exit position of the single capillary X-ray lens to block unfocused X-rays, efficient focusing of X-rays in the 1-100keV energy range is achieved. The single capillary X-ray lens is available in parabolic and ellipsoidal types. The two-dimensional diamond refractive lens employs a multi-layered, collinear arrangement, allowing for adjustment of lens parameters to suit different focusing requirements.

[0022] Example 1: As shown in Figure 1, the focusing optical system coupled with a parabolic single capillary X-ray lens and a two-dimensional diamond refractive lens includes: a parabolic single capillary X-ray lens 3 and a two-dimensional diamond refractive lens 2. The parabolic single capillary X-ray lens 3 and the two-dimensional diamond refractive lens 2 are arranged along the X-ray optical path, and their focal points 4 coincide. The two-dimensional diamond refractive lens 2 is a parabolic rotation structure.

[0023] The inner wall of the parabolic single-capillary X-ray lens 3 is part of a parabola, and the mathematical expression for its curve is: ,in This is the focal length, representing the distance from the focal point of the parabola to its vertex. This parabolic shape is designed for focusing quasi-parallel X-rays or converting divergent X-ray beams into quasi-parallel beams, suitable for synchrotron radiation sources and laboratory light sources. The focusing beam range is from 0.1 micrometers to 5 millimeters, and can be optimized according to application requirements.

[0024] The overall length L of the parabolic single-capillary X-ray lens 3 is 10mm-200m, and the inlet diameter D is... in The diameter of the outlet end is 0.01mm-100mm. out The thickness ranges from 0.012mm to 120mm, and the inner wall coating material is platinum, gold, nickel, and iridium. A two-dimensional diamond refractive lens 2 is fabricated on a cylindrical diamond rough with a thickness H of 0.3mm-1mm and a diameter D of 0.5-6mm. Its single-sided aperture D... CRL The thickness is 0.4mm-2mm, and the depth is H. CRL It should be 0.125-0.485mm. Where D should be slightly larger than Dout. CRL It should be slightly smaller than D out A slit 5 of appropriate size is placed at the lens exit position to block X-rays that are not focused by the two-dimensional diamond lens.

[0025] A two-dimensional diamond refractive lens is a paraboloid of revolution, and the mathematical expression for its mirror profile is: Since it is a dispersive element, its focal length is related to the incident energy, therefore its focal length... The expression is: Where R is the radius of curvature of the lens, and N is the number of lenses. Let be the refractive index of the lens. Its focal position satisfies the Gaussian imaging formula, i.e. Where u is the object distance and v is the image distance. Two-dimensional diamond refractive lenses are used in a multi-lens stacking manner, and focusing requirements can be met by adjusting different lens parameters and the number of lenses. Based on the characteristics of the manufacturing technology and factors such as refractive absorption ratio, two-dimensional refractive lenses can effectively refract X-rays in the energy range of 1-100 keV. The number, arrangement, and material selection of refractive lenses can be optimized according to different experimental needs to achieve the best focusing effect. Because diamond has an X-ray refractive absorption ratio second only to beryllium and possesses extremely high mechanical strength, it is the most perfect two-dimensional refractive lens material for lens groups coupled to a single capillary. This invention uses diamond as the two-dimensional refractive lens material.

[0026] Example 2, as shown in Figure 2, includes a focusing optical system coupled with an ellipsoidal single capillary X-ray lens and a refractive lens, comprising: an ellipsoidal single capillary X-ray lens 7 and a two-dimensional diamond refractive lens 2. The ellipsoidal single capillary X-ray lens 7 and the two-dimensional diamond refractive lens 2 are arranged along the X-ray optical path, and their focal points 4 coincide. The two-dimensional diamond refractive lens 2 has a parabolic rotation structure.

[0027] The inner wall of the ellipsoidal single-capillary X-ray lens 7 is ellipsoidal, and the focal point is located at one of the two foci of the ellipsoid. Its curve is mathematically expressed as follows: Where a, b, and c are the semi-axis lengths of the ellipsoid along the x, y, and z axes, respectively (generally a = b). The converging beam ranges from 0.1 micrometers to 5 millimeters, with a focal length of... The expression is: It can be optimized according to application requirements and is suitable for synchrotron radiation sources and laboratory light sources.

[0028] Ellipsoidal single capillary X-ray lens 7 Overall length The range is 10mm-200m, where t is the distance from the X-ray source 6 to the inlet of the ellipsoidal single capillary X-ray lens 7, and the inlet diameter of the ellipsoidal single capillary X-ray lens 7 is... The diameter of the outlet end is 0.01mm-100mm. The thickness ranges from 0.012mm to 120mm, and the inner wall coating material is platinum, gold, nickel, and iridium. The two-dimensional diamond refractive lens 2 is fabricated on a cylindrical diamond rough with a thickness H of 0.3mm-2mm and a diameter D of 0.5-2mm. Its single-sided aperture... The depth is 0.4mm-2mm. It should be 0.125-0.5mm. Where D should be slightly smaller than... , It should be slightly smaller Therefore, a appropriately sized slit is placed at the exit position of the ellipsoidal single capillary X-ray lens to block X-rays that are not focused by the two-dimensional diamond lens.

[0029] Example 3: A method for manufacturing an X-ray focusing optical system based on a single capillary coupled with a refractive lens, comprising: Step 1, manufacturing a single capillary X-ray lens; Step 11, selecting a high borosilicate glass tube as the mother tube, cleaning it with acid and alkali solutions, and then drying it with high-pressure inert gas; Step 12, heating the mother tube to 500°C-700°C in a heating furnace to soften it, and then stretching it at a variable speed of 1mm / s-10mm / s using a wire drawing machine to form a single tube with a parabolic or ellipsoidal inner wall; Step 13, inspecting it using an optical inspection system. Step 14: Measure the single-tube shape curve and extract the effective area; Step 15: Use an X-ray optical inspection system to screen single-capillary X-ray lenses that meet the design specifications; Step 16: Perform high-density metal coating treatment on the inner wall of the single-capillary X-ray lens; Step 2: Manufacturing a two-dimensional diamond refractive lens Step 21: Use a femtosecond laser modulated as a Bessel beam to cut cylindrical diamond rough stones that meet the diameter requirements from double-sided polished CVD single-crystal diamond rough stones, wherein the wavelength of the femtosecond laser is 400nm-650nm; Step 22: Cut the cylindrical diamond rough stones into cylindrical shapes that meet the diameter requirements. A cylindrical diamond rough is placed at the center of a high-repetition-rate ultraviolet femtosecond laser (e.g., 343nm, 200fs, 600kHz) 3D processing system, and the laser beam center is adjusted to the center of the rough. Step 23: Adjust the parameters of the laser processing system (e.g., scanning speed, scanning line spacing, laser power, number of cycles, etc.) to etch circular micro-elements (e.g., depth 0.0025mm, diameter 1mm) on the surface of the rough with a depth and diameter conforming to the design. After completing one layer of etching, move the rough upward so that the laser beam center is always located on the surface of the rough (i.e., the bottom of the micro-element). Repeat the etching process until the single-sided lens mirror is formed; Step 24: Turn the diamond rough over, adjust the laser beam to the center of the rough, and repeat Step 23 to complete the mirror forming of the other side, obtaining a two-dimensional diamond refractive lens with double-sided top; Step 25: Make multiple two-dimensional diamond refractive lenses with the same or different parameters as needed, ensuring that the optical axes of all lenses are collinear and closely arranged; Step 3: Lens coupling: Place the manufactured single capillary X-ray lens and two-dimensional diamond refractive lens at corresponding positions in the optical path, ensuring that their focal points coincide.

[0030] Below is an example of a focusing optical system coupled with a parabolic single-capillary X-ray lens and a two-dimensional diamond refractive lens. The parabolic single-capillary X-ray lens is manufactured from a capillary. The capillary length L is 80 mm, and the inlet diameter D... in The diameter is 3mm, and the outlet diameter is D.out The diameter is 1mm. The parameters of the two-dimensional diamond refractive lens are as follows: H = 1.025mm, D = 1mm, D... CRL With a focal length of 0.68 mm and a radius of 0.1 mm, when focusing X-rays with an energy of 30 keV, N is 25, and the two types of lenses are 2.4 m apart. Keeping the relative positions unchanged, when focusing X-rays with an energy of 18 keV, N is 9.

[0031] The foregoing has shown and described the basic principles, main features, and advantages of the present invention. Those skilled in the art should understand that the present invention is not limited to the above embodiments. The embodiments and descriptions in the specification are merely illustrative of the principles of the invention. Various changes and modifications can be made to the invention without departing from its spirit and scope, and all such changes and modifications fall within the scope of the present invention as claimed. The scope of protection of the present invention is defined by the appended claims and their equivalents.

Claims

1. An X-ray focusing optical system based on the coupling of a single capillary and a refractive lens, characterized in that, The system includes an X-ray source (6), a single capillary X-ray lens, and a two-dimensional diamond refractive lens (2). The two-dimensional diamond refractive lens (2) is positioned between the X-ray source (6) and the single capillary X-ray lens, and the focal points of the single capillary X-ray lens and the two-dimensional diamond refractive lens (2) coincide. The single capillary X-ray lens is a parabolic single capillary X-ray lens (3) or an ellipsoidal single capillary X-ray lens (7). The two-dimensional diamond refractive lens (2) is a rotating parabolic structure. The light emitted by the X-ray source (6) is first initially focused by the rotating parabolic two-dimensional diamond refractive lens (2) and then directed towards the single capillary X-ray lens. The two lenses are coupled together to achieve secondary precise focusing.

2. The X-ray focusing optical system based on the coupling of a single capillary and a refractive lens according to claim 1, characterized in that, The two-dimensional diamond refractive lens (2) is used in a multi-layer stacking manner, with all lenses having collinear optical axes and their mirror profiles satisfying the mathematical expression. ,focal length And it conforms to the Gaussian imaging formula Where R is the radius of curvature of the lens, N is the number of lenses, σ is the refractive index of the lens, u is the object distance, and v is the image distance.

3. The X-ray focusing optical system based on the coupling of a single capillary and a refractive lens according to claim 1, characterized in that, The inner wall of the parabolic single-capillary X-ray lens (3) is part of a parabola, and its curve satisfies the mathematical expression: F PML is the focal length, representing the distance from the focal point of the parabola to the vertex of the parabola.

4. The X-ray focusing optical system based on the coupling of a single capillary and a refractive lens according to claim 1, characterized in that, The inner wall of the ellipsoidal single-capillary X-ray lens (7) is ellipsoidal, and its curve satisfies the mathematical expression. Where a, b, and c are the semi-axis lengths of the ellipsoid on the x, y, and z axes, respectively, and a = b; the focal point of the ellipsoidal single capillary is located at one of the two foci of the ellipsoid, and the focal length is... 。 5. The X-ray focusing optical system based on the coupling of a single capillary and a refractive lens according to claim 1, characterized in that, The converging beam range of the single capillary X-ray lens is from 0.1 micrometers to 5 millimeters.

6. The X-ray focusing optical system based on the coupling of a single capillary and a refractive lens according to claim 1, characterized in that, The inner wall of the single capillary X-ray lens is coated with a metal film, and the material of the metal film is platinum, gold, nickel or iridium.

7. The X-ray focusing optical system based on the coupling of a single capillary and a refractive lens according to claim 1, characterized in that, The overall length L of the parabolic single-capillary X-ray lens is 10mm-200mm, and the inlet diameter D is... in The diameter of the outlet end is 0.01mm-100mm. out The thickness is 0.012mm-120mm; the two-dimensional diamond refractive lens is fabricated on a cylindrical diamond rough with a thickness H of 0.3mm-1mm and a diameter D of 0.5-6mm, and its single-sided aperture D is... CRL The thickness is 0.4mm-2mm, and the depth is H. CRL The diameter D of the cylindrical diamond rough is 0.125-0.485 mm; the diameter D of the cylindrical diamond rough is larger than the exit end diameter D of the parabolic single capillary X-ray lens. out The single-sided aperture D of the two-dimensional diamond refractive lens CRL The diameter D at the exit end of the parabolic single capillary X-ray lens is smaller than that at the exit end. out .

8. The X-ray focusing optical system based on the coupling of a single capillary and a refractive lens according to claim 1, characterized in that, The overall length L of the ellipsoidal single-capillary X-ray lens is 10mm-200mm, and the inlet diameter D is... in The diameter of the outlet end is 0.01mm-100mm. out The thickness is 0.012mm-120mm; the two-dimensional diamond refractive lens is fabricated on a cylindrical diamond rough with a thickness H of 0.3mm-2mm and a diameter D of 0.5-2mm, and its single-sided aperture D is 0.012mm-120mm. CRL The thickness is 0.4mm-2mm, and the depth is H. CRL The diameter is 0.125-0.5 mm; t is the distance from the X-ray source to the entrance of the ellipsoidal single-capillary X-ray lens, and the diameter D of the cylindrical diamond rough is less than... The single-sided aperture D of the two-dimensional diamond refractive lens CRL Less than 。 9. The X-ray focusing optical system based on the coupling of a single capillary and a refractive lens according to claim 1, characterized in that, The single capillary X-ray lens has a slit (6) at the exit position to block X-rays that are not focused by the two-dimensional diamond lens.

10. The method for manufacturing an X-ray focusing optical system based on the coupling of a single capillary and a refractive lens according to any one of claims 1-9, characterized in that, include: Step 1: Manufacturing a Single Capillary X-ray Lens Step 11: Select a high borosilicate glass tube as the mother tube, clean it with acid and alkali solutions, and then dry it with high-pressure inert gas. Step 12: Soften the mother tube by heating it to 500°C-700°C in a furnace, and then stretch it at a variable speed of 1mm / s-10mm / s using a wire drawing machine to form a single tube with a parabolic or ellipsoidal inner wall. Step 13: Detect the shape curve of the single tube using an optical inspection system and extract the effective area. Step 14: Select single capillary X-ray lenses that meet the design specifications using an X-ray optical inspection system. Step 15: Perform high-density metal coating treatment on the inner wall of the single capillary X-ray lens. Step 2: Manufacturing a Two-Dimensional Diamond Refractive Lens Step 21: Use a femtosecond laser modulated as a Bessel beam to cut cylindrical diamond rough stones that meet the diameter requirements from double-sided polished CVD single-crystal diamond rough stones. The wavelength of the femtosecond laser is 400 nm. nm-650nm; Step 22: Place the cylindrical diamond rough in the center of the high-repetition-rate ultraviolet femtosecond laser 3D processing system, and adjust the center of the laser beam to the center of the rough; Step 23: Adjust the parameters of the laser processing system, and etch circular micro-elements with the designed depth and diameter on the surface of the rough. After completing one layer of etching, move the rough upward so that the center of the laser beam is always at the bottom of the micro-elements. Repeat the etching process until the single-sided lens mirror surface is completed; Step 24: Turn the diamond rough over, adjust the laser beam to the center of the rough, and repeat Step 23 to complete the mirror surface shaping of the other side, obtaining a two-dimensional diamond refractive lens with double-sided top; Step 25: Make multiple two-dimensional diamond refractive lenses with the same or different parameters according to the requirements, ensuring that the optical axes of all lenses are collinear and closely arranged; Step 3: Lens coupling: Place the manufactured single capillary X-ray lens and the two-dimensional diamond refractive lens at the corresponding positions in the optical path, ensuring that their focal points coincide.

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