Quartz annular cavity processing method and processing jig

Abstract

The invention discloses a quartz annular cavity processing method and a processing jig. The quartz annular cavity processing method comprises the following steps: S1, manufacturing a first semi-ring part, a second semi-ring part, a third semi-ring part, a fourth semi-ring part, a first flange assembly and a second flange assembly in a processing center; the first flange combination body and the second flange combination body are each provided with a flange pipe part, and an included angle alpha is formed between the two end faces of each flange pipe part. S2, welding of the first semi-ring cavity and the second semi-ring cavity is completed on the machining jig; s3, inner and outer welding seams on the first semi-ring cavity and the second semi-ring cavity are ground; s4, the first flange assembly and the second flange assembly are in butt joint with the two ends of the first semi-ring cavity and the two ends of the second semi-ring cavity correspondingly and are welded; and S5, grinding inner and outer welding seams at the welding part to finish the processing of the quartz ring cavity. Parts prone to failure in the welding process are effectively avoided, the welding machining quality is guaranteed, and the product quality and the machining efficiency are improved.

Description

Technical Field

[0001] This invention relates to the field of semiconductor welding technology, specifically to a method and fixture for processing a quartz annular cavity. Background Technology

[0002] Quartz annular cavities have a unique structure and exhibit multiple different shapes, including multiple semi-annular cavities and multiple cavities with flanges.

[0003] The existing welding method involves first welding the annular portion to form an annular cavity, then welding the flange cavity onto the annular cavity. The height and relative position of the flange and the annular cavity are manually adjusted using a general-purpose graphite block / platform. Finally, the annular cavity and flange are welded together. However, the high temperature and drastic temperature changes inside the annular cavity during welding make it prone to failure. Furthermore, relying on simple graphite blocks and measuring tools makes it difficult to guarantee the shape and position tolerances of the product, resulting in poor product quality, large differences between products in the same batch, and easy dimensional deviations, leading to product scrap.

[0004] Existing Chinese patent document CN115351464A discloses a method for welding a quartz cavity. The welding system includes a base, a heating device, a fixing device, a supporting rotation device, and a welding device. The method for welding the quartz cavity includes the following steps: repairing the weld seam of the quartz cavity using the welding system; controlling the rotation speed of the quartz cavity at 20–50 rpm, the temperature of the quartz cavity at 700–900°C, and the welding temperature at 1600–1800°C during the welding process. The method for welding a quartz cavity of this invention can achieve automatic welding through motor drive and robotic arm operation, replacing manual welding and improving welding safety; it increases the welding range and surface uniformity of the quartz cavity; and it is performed at a higher temperature, thus achieving better welding results.

[0005] Although the above technical solution can achieve the welding of vacuum cavities, it is applicable to the welding of cylindrical or circular quartz cavities and does not involve complex annular cavity structures.

[0006] It is necessary to design a machining method and fixture for a flanged quartz annular cavity to ensure machining accuracy, avoid failure, improve machining accuracy and quality, and increase efficiency. Summary of the Invention

[0007] The purpose of this invention is to solve the problems of complex welding operations, dimensional deviations in welding quality, and easy formation of failure points in existing quartz annular cavities with flange structures, leading to poor product quality and product scrap. This invention provides a quartz annular cavity processing method and fixture that is convenient and quick to operate, has high processing accuracy, effectively avoids deviations and failure points that could cause product scrap, meets the welding accuracy requirements of various complex quartz annular cavities, improves product dimensional accuracy and quality, has strong applicability, and increases the manufacturing efficiency of quartz annular cavities.

[0008] The technical solution adopted by this invention to achieve its objective is: a method for processing a quartz annular cavity, comprising the following steps: S1: The first half-ring, the second half-ring, the third half-ring, the fourth half-ring, the first flange assembly, and the second flange assembly are manufactured in the machining center; wherein, the first flange assembly and the second flange assembly are both provided with flange pipe sections, and an included angle α is provided between the two end faces of the flange pipe sections. S2: Weld the first and second semi-annular cavities on the machining fixture; S3: Grind the inner and outer welds on the first and second semi-annular cavities; S4: Connect the first flange assembly and the second flange assembly to the two ends of the first semi-annular cavity and the second semi-annular cavity respectively and weld them together; S5: Grind the inner and outer weld seams at the weld joint to complete the welding process of the entire quartz ring cavity.

[0009] This quartz annular cavity machining method addresses the vulnerability of the cavity where the center lines of the two flanges meet, a point prone to failure during manufacturing and resulting in product scrap. The method involves first rationally designing the quartz annular cavity components, then fabricating the first, second, third, and fourth half-ring sections, along with a first and second flange assembly containing the flanged tube section, all at a machining center. By integrating the flanges with a certain length of tube, the method effectively avoids areas prone to failure during welding, rationally adjusting the weld position, and setting the two end faces of the flange tube section at an angle. All components can be precisely positioned on machining jigs and welded using welding equipment, ensuring welding quality, preventing weak points, and improving both product quality and processing efficiency.

[0010] Preferably, the included angle α between the two end faces of the flange pipe section in step 1 is 45 degrees to 55 degrees. An included angle α of 45 degrees to 55 degrees effectively avoids areas prone to failure and facilitates grinding of the internal and external welds.

[0011] Preferably, the processing fixture in step 2 includes a fixture base, on which multiple annular cavity feature limiting structures are provided, including annular body limiting structures and flange limiting structures.

[0012] Preferably, in step 2, the first half-ring and the second half-ring are placed in a fixture base with their relative fastenings engaged, and the third half-ring and the fourth half-ring are placed in a fixture base with their relative fastenings engaged, and are radially limited by the outer ring limiting structure.

[0013] Preferably, in step 2: a graphite gasket is inserted between the first and second half-rings, and between the third and fourth half-rings, and spot-welded together, and then the graphite gasket is removed; or, an inner ring surface limiting member 2 is inserted inside the fixture base to limit the inner diameter of the first and second half-rings, the third half-rings, and the fourth half-rings by welding.

[0014] Preferably, in step 4, the first flange assembly and the second flange assembly are respectively limited and fixed by flange limiting structures.

[0015] The technical solution adopted by this invention to achieve its second objective is: a machining fixture for processing quartz annular cavities, comprising a fixture base, on which a central cavity and multiple annular cavity feature limiting structures are provided, including annular body limiting structures and flange limiting structures. This machining fixture, by providing the annular body limiting structures and flange limiting structures, can achieve the limiting and positioning of the first half-annular cavity, the second half-annular cavity, and the flange assembly, achieving highly stable and high-precision welding.

[0016] Preferably, the annular limiting structure includes an annular limiting surface and an annular roundness limiting component. The annular limiting surface is co-centered with the central cavity of the fixture. The annular limiting surface is fixedly or replaceably mounted on the fixture base, and the annular roundness limiting component is fixedly or adjustablely mounted on the fixture base. The annular limiting surface is used to support and position the semi-annular cavity on the horizontal plane of the fixture base, and the annular roundness limiting component is used to limit and position the semi-annular cavity in terms of angle and height. The annular limiting surface is designed as a replaceable structure to meet the positioning and limiting requirements of annular cavities of different specifications.

[0017] Preferably, the flange limiting structure includes a flange diameter limiting retaining ring and a flange plate limiting retaining groove. The flange diameter limiting retaining ring is used to limit the flange pipe portion on the flange assembly, and the flange plate limiting retaining groove is used to engage and limit the flange plate in the flange assembly.

[0018] Preferably, the jig base is provided with flange limiting clamps at both ends, and the flange limiting clamps include a first flange limiting clamp and a second flange limiting clamp arranged opposite to each other; a limiting arc surface for forming a flange diameter limiting clamp and a limiting groove for forming a flange limiting clamp groove are respectively provided on the opposite side of the first flange limiting clamp and the second flange limiting clamp.

[0019] Preferably, the device also includes a replaceable inner ring core limiting component that can be easily inserted, wherein the inner ring surface limiting component has a welding slot. To further improve positioning accuracy, an inner ring core limiting component can also be provided at the center position to limit the inner diameter of the annular cavity.

[0020] The beneficial effects of this invention are: the quartz annular cavity processing method effectively avoids parts that are prone to failure during welding, reasonably adjusts the weld position, sets the two end faces of the flange pipe as an included angle structure, and all manufacturing components can be accurately positioned on the processing fixture and welded by welding equipment, ensuring the quality of welding processing, avoiding the generation of weak parts, and improving product quality and processing efficiency. Attached Figure Description

[0021] Figure 1 This is a schematic diagram of a quartz annular cavity processing fixture of the present invention.

[0022] Figure 2 This is a schematic diagram of the quartz annular cavity processing fixture of the present invention from another angle.

[0023] Figure 3 This is a schematic diagram of a quartz annular cavity processing fixture in Embodiment 2 of the present invention.

[0024] Figure 4 This is a schematic diagram of a quartz annular cavity processing fixture in Embodiment 3 of the present invention.

[0025] Figure 5 , Figure 6 This is a schematic diagram of the structure of each component of the quartz annular cavity to be manufactured.

[0026] Figure 7 This is a schematic diagram of the application structure of the quartz annular cavity processing fixture of the present invention.

[0027] Figure 8 This is a schematic diagram of the application structure of the quartz annular cavity processing fixture of the present invention.

[0028] Figure 9 This is a schematic diagram of the structure of the quartz annular cavity obtained by the present invention.

[0029] In the diagram: 1. Fixture base; 2. Inner ring surface limiting component; 21. Slot; 3. Ring-shaped limiting structure. 4. Flange limiting structure; 41. Flange pipe diameter limiting retaining ring; 42. Flange plate limiting retaining groove; 5. Central cavity of the fixture; 6. Ring-shaped limiting surface; 7. Ring roundness limiting component; 71. Contour limiting structure; 8. Flange limiting clamp; 81. First flange limiting clamp; 82. Second flange limiting clamp; 83. Limiting arc surface; 84. Limiting groove. 9. Quartz annular cavity; 95. Parts prone to failure; 91. First semi-annular cavity; 911. First semi-annular portion; 912. Second semi-annular portion; 92. Second semi-annular cavity; 921. Third semi-annular portion; 922. Fourth semi-annular portion; 93. First flange assembly; 94. Second flange assembly. Detailed Implementation

[0030] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. The component structures not specifically described in the present invention adopt general existing technology, and the welding equipment and welding process conditions also adopt existing technology.

[0031] Example 1: exist Figure 1 , Figure 2 In the illustrated embodiment, a quartz annular cavity machining fixture is mainly suitable for applications such as... Figure 9 The quartz annular cavity 9 shown is located at the center line of the flange on the quartz annular cavity, which is a vulnerable failure point 95. The machining fixture is made of graphite material and includes a fixture base 1, on which multiple annular cavity feature limiting structures are provided.

[0032] The aforementioned annular cavity feature limiting structure includes an annular limiting structure 3, a flange limiting structure 4, and a fixture central cavity 5.

[0033] The central cavity 5 of the fixture is located at the center of the fixture base 1 and extends vertically through the upper and lower end faces of the fixture base 1.

[0034] The ring-shaped limiting structure 3 includes a ring-shaped limiting surface 6 and a ring-shaped roundness limiting component 7. The ring-shaped limiting surface 6 is co-centered with the central cavity 5 of the fixture. The ring-shaped limiting surface 6 is arranged around the upper port of the central cavity 5 of the fixture and protrudes from the end face of the upper port of the central cavity 5 of the fixture.

[0035] The annular roundness limiting component 7 is disposed on the upper end face of the fixture base 1. Specifically, multiple radial adjustment grooves 11 are formed on the upper end face of the fixture base 1, and the annular roundness limiting component 7 is disposed on the radial adjustment grooves 11. In this embodiment, the annular roundness limiting component is a limiting block, and four limiting blocks are provided. The four limiting blocks are symmetrically arranged around the center of the central cavity 5 of the fixture to limit the outer ring surface of the quartz annular cavity to be welded, thereby ensuring the radial position of the quartz annular cavity to be welded.

[0036] The flange limiting structure 4 is symmetrically arranged at both ends of the fixture base 1. The flange limiting structure 4 includes a flange pipe diameter limiting retaining ring 41 and a flange plate limiting retaining groove 42.

[0037] The flange limiting structure 4 is provided with a pair of flange limiting clamps 8 arranged opposite each other. The flange limiting clamps 8 include a first flange limiting clamp 81 and a second flange limiting clamp 82. The first flange limiting clamp 81 and the second flange limiting clamp 82 are fixedly connected to the fixture base 1.

[0038] On opposite sides of the first flange limiting clamp 81 and the second flange limiting clamp 82, a limiting arc surface 83 and a limiting groove 84 are respectively provided. The limiting arc surface 83 on the first flange limiting clamp 81 and the limiting arc surface 83 on the second flange limiting clamp 82 cooperate to form a flange diameter limiting retaining ring 41, and the limiting groove 84 on the first flange limiting clamp 81 and the limiting groove 84 on the second flange limiting clamp 82 cooperate to form a flange limiting retaining groove 42.

[0039] The quartz annular cavity processing fixture described in the above embodiments can meet the welding requirements of quartz annular cavities, while effectively improving welding accuracy, product dimensional accuracy and product quality, reducing reliance on the technical skills of on-site personnel, improving applicability, increasing the welding efficiency of quartz annular cavities, facilitating clamping and positioning, making product adjustment convenient, improving product dimensional accuracy, significantly increasing quartz processing efficiency, and avoiding the impact of on-site personnel's professional skills on product quality.

[0040] A method for machining a quartz annular cavity, which uses the quartz annular cavity machining fixture described above.

[0041] The specific welding steps include: Step 1: As Figure 5 , Figure 6 As shown, the welding components of the quartz annular cavity 9 are manufactured in a machining center, including the first half-ring 911, the second half-ring 912, the third half-ring 921, the fourth half-ring 922, the first flange assembly 93, and the second flange assembly 94.

[0042] The first flange assembly 93 and the second flange assembly 94 respectively include a flange pipe section and a flange body, wherein the included angle α between the two end faces of the flange pipe section is set to 45 degrees to 55 degrees (see Figure 5 ).

[0043] Step 2: As Figure 7 As shown, the first and second half-ring portions are fastened together and placed on the fixture base 1, and the third and fourth half-ring portions are fastened together and placed on the fixture base. They are then radially limited by the ring body limiting structure 3. To ensure the alignment of the upper and lower positions during welding, a graphite gasket is provided between the first and second half-ring portions, and graphite gaskets are provided between the third and fourth half-ring portions. Spot welding is performed using welding equipment. After fixing, the graphite gaskets are removed, and the first half-ring portion is fully welded to the second half-ring portion and the third and fourth half-ring portions to form the first half-ring cavity 91 and the second half-ring cavity 92, respectively.

[0044] Step 3: Grind the inner and outer welds on the first semi-annular cavity 91 and the second semi-annular cavity 92 using a grinding tool.

[0045] Step 4: As Figure 8 As shown, the first flange assembly 93 and the second flange assembly 94 are respectively secured on the flange limiting structure 4; the two ends of the first semi-annular cavity 91 and the second semi-annular cavity 92 are adjusted to be connected with the first flange assembly 93 and the second flange assembly 94 respectively, so that they are completely connected and aligned.

[0046] Step 5: Weld the two ends of the first semi-annular cavity 91 to the first flange assembly 93 and the second flange assembly 94 respectively, and the two ends of the second semi-annular cavity 92 to the first flange assembly 93 and the second flange assembly 94 respectively, using welding equipment.

[0047] Step 6: Grind the inner and outer weld seams at the weld joint using a grinding tool to complete the welding process of the entire quartz ring cavity.

[0048] This welding method, through a completely new design of the welding area, utilizes a machining center to process the flange assembly. The two ends of the flange tube are set at a specific angle, which avoids the weak points of the quartz ring cavity, improving its strength, and facilitating the grinding of the internal and external welds. This not only facilitates the positioning and welding of various parts of the quartz ring cavity, effectively preventing failures caused by drastic temperature changes during welding, but also facilitates the grinding of the welds, greatly improving product performance and service life.

[0049] Example 2: exist Figure 3In the embodiment shown, a quartz annular cavity processing fixture is applicable to quartz annular cavities. The processing fixture is made of graphite material and includes a fixture base 1, on which multiple annular cavity feature limiting structures are provided.

[0050] The aforementioned annular cavity feature limiting structure includes an annular limiting structure 3, a flange limiting structure 4, and a fixture central cavity 5.

[0051] The central cavity 5 of the fixture is located at the center of the fixture base 1 and extends vertically through the upper and lower end faces of the fixture base 1.

[0052] The ring-shaped limiting structure 3 includes a ring-shaped limiting surface 6 and a ring-shaped roundness limiting component 7. The ring-shaped limiting surface 6 is co-centered with the central cavity 5 of the fixture, and is arranged around the upper port of the central cavity 5 and protrudes from the end face of the upper port of the central cavity 5. The ring-shaped limiting surface 6 is detachably connected to the fixture base 1, allowing for the replacement of ring-shaped limiting surfaces 6 of different sizes to meet the limiting requirements of quartz ring cavities of different diameters. The ring-shaped limiting surface 6 can be an integral structure or a split structure.

[0053] The annular roundness limiting component 7 is movably and adjustablely disposed on the upper end face of the fixture base 1. Specifically, multiple radial adjustment grooves 11 are formed on the upper end face of the fixture base 1, and the annular roundness limiting component 7 is slidably disposed on the radial adjustment grooves 11. Sliding adjustment scales 12 are provided on the fixture base 1 corresponding to the radial adjustment grooves 11.

[0054] The annular roundness limiting component 7 is provided with a contour limiting structure 71 that matches the annular surface of the quartz annular cavity to be welded, so as to limit the annular surface of the quartz annular cavity to be welded, thereby ensuring the radial position of the quartz annular cavity to be welded.

[0055] The flange limiting structure 4 is symmetrically arranged at both ends of the fixture base 1. The flange limiting structure 4 includes a flange pipe diameter limiting retaining ring 41 and a flange plate limiting retaining groove 42.

[0056] The flange limiting structure 4 is provided with a pair of flange limiting clamps 8 arranged opposite each other. The flange limiting clamps 8 include a first flange limiting clamp 81 and a second flange limiting clamp 82. The first flange limiting clamp 81 and the second flange limiting clamp 82 are slidably and adjustablely connected to the fixture base 1.

[0057] On opposite sides of the first flange limiting clamp 81 and the second flange limiting clamp 82, a limiting arc surface 83 and a limiting groove 84 are respectively provided. The limiting arc surface 83 on the first flange limiting clamp 81 and the limiting arc surface 83 on the second flange limiting clamp 82 cooperate to form a flange diameter limiting retaining ring 41, and the limiting groove 84 on the first flange limiting clamp 81 and the limiting groove 84 on the second flange limiting clamp 82 cooperate to form a flange limiting retaining groove 42.

[0058] The first flange limiting clamp 81 and the second flange limiting clamp 82 are replaceable components, which can meet the limiting requirements of different flange structures. The limiting arc surface 83 and the limiting groove 84 on the first flange limiting clamp 81 and the second flange limiting clamp 82 can also be set accordingly.

[0059] The quartz annular cavity processing fixture described in the above embodiments can meet the welding requirements of quartz annular cavities of various sizes. At the same time, it can effectively improve welding accuracy, improve product dimensional accuracy and product quality, reduce reliance on the technical skills of on-site personnel, improve applicability, improve the welding efficiency of quartz annular cavities, and make clamping and positioning convenient and quick. It is also convenient to adjust the product, improve product dimensional accuracy, significantly improve quartz processing efficiency, and avoid the impact of on-site personnel's professional skills on product quality.

[0060] A method for machining a quartz annular cavity, employing the aforementioned quartz annular cavity machining fixture. Specific welding steps include: Step 1: Fabricate the welding components of the quartz annular cavity 9 to be welded in the machining center, including the first half-ring 911, the second half-ring 912, the third half-ring 921, the fourth half-ring 922, the first flange assembly 93, and the second flange assembly 94.

[0061] The first flange assembly 93 and the second flange assembly 94 respectively include a flange pipe section and a flange body, wherein the included angle α between the two end faces of the flange pipe section is set to 45 degrees to 55 degrees.

[0062] Step 2: Replace or adjust the ring limiting surface 6 according to the diameter of the quartz annular cavity 9 to be welded, and place the first half-ring and the second half-ring relative to each other on the ring limiting surface 6. Place the third half-ring and the fourth half-ring relative to each other on the ring limiting surface 6 on the other side. Adjust the relative position of the ring roundness limiting piece 7 to achieve external radial limiting of the first half-ring and the second half-ring, and the third half-ring and the fourth half-ring. In order to ensure the vertical alignment during welding, a graphite gasket is set between the first half-ring and the second half-ring, and a graphite gasket is set between the third half-ring and the fourth half-ring. Spot weld using welding equipment. After fixing, remove the graphite gasket and fully weld the first half-ring and the second half-ring, and the third half-ring and the fourth half-ring to form the first half-ring cavity 91 and the second half-ring cavity 92 respectively.

[0063] Step 3: Grind the inner and outer welds on the first semi-annular cavity 91 and the second semi-annular cavity 92 using a grinding tool.

[0064] Step 4: Replace or adjust the flange limiting clamps, and clamp the first flange assembly 93 and the second flange assembly 94 onto the flange limiting structure 4 for limiting; adjust the two ends of the first semi-annular cavity 91 and the second semi-annular cavity 92 to the docking positions with the first flange assembly 93 and the second flange assembly 94 respectively, so that they are fully docked and aligned.

[0065] Step 5: Weld the two ends of the first semi-annular cavity 91 to the first flange assembly 93 and the second flange assembly 94 respectively, and the two ends of the second semi-annular cavity 92 to the first flange assembly 93 and the second flange assembly 94 respectively, using welding equipment.

[0066] Step 6: Grind the inner and outer weld seams at the weld joint using a grinding tool to complete the welding process of the entire quartz ring cavity.

[0067] This welding method, through a completely new design of the welding area, utilizes a machining center to process the flange assembly. The two ends of the flange tube are set at a specific angle, which avoids the weak points of the quartz ring cavity, improving its strength, and facilitating the grinding of the internal and external welds. This not only facilitates the positioning and welding of various parts of the quartz ring cavity, effectively preventing failures caused by drastic temperature changes during welding, but also facilitates the grinding of the welds, greatly improving product performance and service life.

[0068] Example 3: exist Figure 4In the illustrated embodiment, a quartz annular cavity processing fixture is provided, suitable for quartz annular cavities. This fixture is made of graphite material and includes a fixture base 1 on which multiple annular cavity feature limiting structures are provided. It also includes a movable, insertable inner annular surface limiting member 2, which has a slot 21 for facilitating welding at the inner diameter joint. The inner annular surface limiting member 2 is a replaceable component to meet the welding needs of quartz annular cavities of different specifications.

[0069] The aforementioned annular cavity feature limiting structure includes an annular limiting structure 3, a flange limiting structure 4, and a fixture central cavity 5.

[0070] The central cavity 5 of the fixture is located at the center of the fixture base 1 and extends vertically through the upper and lower end faces of the fixture base 1.

[0071] The ring-shaped limiting structure 3 includes a ring-shaped limiting surface 6 and a ring-shaped roundness limiting component 7. The ring-shaped limiting surface 6 is co-centered with the central cavity 5 of the fixture, and is arranged around the upper port of the central cavity 5 and protrudes from the end face of the upper port of the central cavity 5. The ring-shaped limiting surface 6 is detachably connected to the fixture base 1, allowing for the replacement of ring-shaped limiting surfaces 6 of different sizes to meet the limiting requirements of quartz ring cavities of different diameters. The ring-shaped limiting surface 6 can be an integral structure or a split structure.

[0072] The annular roundness limiting component 7 is movably and adjustablely disposed on the upper end face of the fixture base 1. Specifically, multiple radial adjustment grooves 11 are formed on the upper end face of the fixture base 1, and the annular roundness limiting component 7 is slidably disposed on the radial adjustment grooves 11. Sliding adjustment scales 12 are provided on the fixture base 1 corresponding to the radial adjustment grooves 11.

[0073] The annular roundness limiting component 7 is provided with a contour limiting structure 71 that matches the annular surface of the quartz annular cavity to be welded, so as to limit the annular surface of the quartz annular cavity to be welded, thereby ensuring the radial position of the quartz annular cavity to be welded.

[0074] The flange limiting structure 4 is symmetrically arranged at both ends of the fixture base 1. The flange limiting structure 4 includes a flange pipe diameter limiting retaining ring 41 and a flange plate limiting retaining groove 42.

[0075] The flange limiting structure 4 is provided with a pair of flange limiting clamps 8 arranged opposite each other. The flange limiting clamps 8 include a first flange limiting clamp 81 and a second flange limiting clamp 82. The first flange limiting clamp 81 and the second flange limiting clamp 82 are slidably and adjustablely connected to the fixture base 1.

[0076] On opposite sides of the first flange limiting clamp 81 and the second flange limiting clamp 82, a limiting arc surface 83 and a limiting groove 84 are respectively provided. The limiting arc surface 83 on the first flange limiting clamp 81 and the limiting arc surface 83 on the second flange limiting clamp 82 cooperate to form a flange diameter limiting retaining ring 41, and the limiting groove 84 on the first flange limiting clamp 81 and the limiting groove 84 on the second flange limiting clamp 82 cooperate to form a flange limiting retaining groove 42.

[0077] The first flange limiting clamp 81 and the second flange limiting clamp 82 are replaceable components. The limiting arc surface 83 and the limiting groove 84 on them can also be configured accordingly.

[0078] The quartz annular cavity processing fixture described in the above embodiments can meet the welding requirements of quartz annular cavities of various sizes. At the same time, it can effectively improve welding accuracy, improve product dimensional accuracy and product quality, reduce reliance on the technical skills of on-site personnel, improve applicability, improve the welding efficiency of quartz annular cavities, and make clamping and positioning convenient and quick. It is also convenient to adjust the product, improve product dimensional accuracy, significantly improve quartz processing efficiency, and avoid the impact of on-site personnel's professional skills on product quality.

[0079] In use, this quartz annular cavity machining fixture is mounted on the welding equipment and can be placed or fixed in place. The specific configuration can be adjusted according to requirements.

[0080] A method for machining a quartz annular cavity, employing the aforementioned quartz annular cavity machining fixture. Specific welding steps include: Step 1: Fabricate the welding components of the quartz annular cavity 9 to be welded in the machining center, including the first half-ring 911, the second half-ring 912, the third half-ring 921, the fourth half-ring 922, the first flange assembly 93, and the second flange assembly 94.

[0081] The first flange assembly 93 and the second flange assembly 94 respectively include a flange pipe section and a flange body, wherein the included angle α between the two end faces of the flange pipe section is set to 45 degrees to 55 degrees.

[0082] Step 2: Replace or adjust the ring limiting surface 6 according to the diameter of the quartz annular cavity 9 to be welded, and place the first half-ring and the second half-ring relative to each other on the ring limiting surface 6. Place the third half-ring and the fourth half-ring relative to each other on the ring limiting surface 6 on the other side. Adjust the relative position of the ring roundness limiting piece 7 to achieve external radial limiting of the first half-ring and the second half-ring and the third half-ring and the fourth half-ring. In order to ensure the alignment of the upper and lower positions during welding, insert the inner ring limiting piece 2 into the central cavity 5 of the fixture to limit the inner diameter of the half-ring cavity. Use welding equipment to fully weld the first half-ring and the second half-ring and the third half-ring and the fourth half-ring to form the first half-ring cavity 91 and the second half-ring cavity 92 respectively.

[0083] Step 3: Grind the inner and outer welds on the first semi-annular cavity 91 and the second semi-annular cavity 92 using a grinding tool.

[0084] Step 4: Replace or adjust the flange limiting clamps, and clamp the first flange assembly 93 and the second flange assembly 94 onto the flange limiting structure 4 for limiting; adjust the two ends of the first semi-annular cavity 91 and the second semi-annular cavity 92 to the docking positions with the first flange assembly 93 and the second flange assembly 94 respectively, so that they are fully docked and aligned.

[0085] Step 5: Weld the two ends of the first semi-annular cavity 91 to the first flange assembly 93 and the second flange assembly 94 respectively, and the two ends of the second semi-annular cavity 92 to the first flange assembly 93 and the second flange assembly 94 respectively, using welding equipment.

[0086] Step 6: Grind the inner and outer weld seams at the weld joint using a grinding tool to complete the welding process of the entire quartz ring cavity.

[0087] This welding method, through a completely new design of the welding area, utilizes a machining center to process the flange assembly. The two ends of the flange tube are set at a specific angle, which avoids the weak points of the quartz ring cavity, improving its strength, and facilitating the grinding of the internal and external welds. This not only facilitates the positioning and welding of various parts of the quartz ring cavity, effectively preventing failures caused by drastic temperature changes during welding, but also facilitates the grinding of the welds, greatly improving product performance and service life.

Claims

1. A method for processing a quartz annular cavity, characterized in that: Includes the following steps: S1: The first half-ring, the second half-ring, the third half-ring, the fourth half-ring, the first flange assembly, and the second flange assembly are manufactured in the machining center; wherein, the first flange assembly and the second flange assembly are both provided with flange pipe sections, and an included angle α is provided between the two end faces of the flange pipe sections. S2: Weld the first and second semi-annular cavities on the machining fixture; S3: Grind the inner and outer welds on the first and second semi-annular cavities; S4: Connect the first flange assembly and the second flange assembly to the two ends of the first semi-annular cavity and the second semi-annular cavity respectively and weld them together; S5: Grind the inner and outer weld seams at the weld joint to complete the machining of the quartz ring cavity.

2. The method for processing a quartz annular cavity according to claim 1, characterized in that: The included angle α between the two ends of the flange pipe section mentioned in step 1 is 45 degrees to 55 degrees.

3. The method for processing a quartz annular cavity according to claim 1 or 2, characterized in that: The processing fixture mentioned in step 2 includes a fixture base (1), and multiple annular cavity feature limiting structures are provided on the fixture base. The annular cavity feature limiting structures include annular body limiting structures (3) and flange limiting structures (4).

4. The method for processing a quartz annular cavity according to claim 3, characterized in that: In step 2, the first half-ring (911) and the second half-ring (912) are fastened together and placed on the fixture base (1), and the third half-ring (921) and the fourth half-ring (922) are fastened together and placed on the fixture base, and are radially limited by the ring limiting structure (3).

5. The method for processing a quartz annular cavity according to claim 3, characterized in that: Step 2: Insert graphite gaskets between the first half-ring (911) and the second half-ring (912), and between the third half-ring (921) and the fourth half-ring (922), spot weld them together, and then remove the graphite gaskets; or, insert an inner ring surface limiting member (2) inside the fixture base (1) to limit the inner diameter of the first half-ring (911), the second half-ring (912), the third half-ring (921), and the fourth half-ring (922) by welding.

6. The method for processing a quartz annular cavity according to claim 3, characterized in that: In step 4, the first flange assembly (93) and the second flange assembly (94) are respectively limited and fixed by the flange limiting structure (40).

7. A machining fixture for a method of machining a quartz annular cavity according to any one of claims 1 to 5, characterized in that: It includes a fixture base (1), on which a fixture center cavity (5) and multiple annular cavity feature limiting structures are provided, the annular cavity feature limiting structures including annular body limiting structure (3) and flange limiting structure (4).

8. The machining fixture according to claim 6, characterized in that: The ring limiting structure (3) includes a ring limiting surface (6) and a ring roundness limiting component (7). The ring limiting surface (6) is co-centered with the central cavity (5) of the fixture. The ring limiting surface (6) is fixedly or replaceably mounted on the fixture base. The ring roundness limiting component (7) is fixedly or adjustablely mounted on the fixture base.

9. The machining fixture according to claim 6, characterized in that: The flange limiting structure (4) includes a flange diameter limiting ring (41) and a flange plate limiting groove (42); the two ends of the fixture base (1) are respectively provided with flange limiting clamps (8), and the flange limiting clamps (8) include a first flange limiting clamp (81) and a second flange limiting clamp (82) arranged opposite to each other; on the opposite side of the first flange limiting clamp (81) and the second flange limiting clamp (82), a limiting arc surface (83) for forming the flange diameter limiting ring (41) and a limiting groove (84) for forming the flange plate limiting groove (42) are respectively provided.

10. The machining fixture according to claim 6, characterized in that: It also includes a replaceable inner ring core limiting member (2) that can be inserted movably, wherein the inner ring surface limiting member (20) is provided with a welding slot (21).

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