Film thickness detector capable of dynamically compensating and eliminating environmental interference

Abstract

The invention relates to the field of film thickness detection equipment, and discloses a film thickness detector capable of dynamically compensating and eliminating environmental interference, the film thickness detector comprises an X-ray thickness gauge and a stepped cooling mechanism, the stepped cooling mechanism comprises a cooling conveying assembly, and the cooling conveying assembly comprises a heat preservation box; the multiple sets of rubber sleeves are arranged in the heat preservation box at intervals. The forward and reverse driving assembly is used for driving the two rubber sleeves in the same group to rotate in the opposite directions so as to convey metal films and is matched with the temperature control conveying assembly to pour water sources into the multiple sets of rubber sleeves, the temperatures of the multiple sets of rubber sleeves are sequentially decreased in the conveying direction to form stepped cooling, and the forward and reverse driving assembly injects the water sources into the multiple sets of rubber sleeves through the hollow box. The temperature control conveying assembly enables the multiple sets of rubber sleeves to form a temperature decreasing step in the conveying direction, the metal film is gradually cooled through the multiple sets of rubber sleeves, and water drops condensed on the surface due to shock cooling are avoided. Meanwhile, the metal thin film can be stably conveyed, it is ensured that no water drop interference exists when X-rays penetrate through the metal thin film, and the thickness measuring precision is guaranteed.

Description

Technical Field

[0001] This invention belongs to the technical field of thin film thickness testing equipment, and in particular relates to a thin film thickness testing instrument that can dynamically compensate for and eliminate environmental interference. Background Technology

[0002] Metal films, due to their excellent conductivity, ductility, and barrier properties, are important raw materials for manufacturing electronic components, food packaging, and anti-corrosion coatings. Thickness uniformity is a key indicator of metal film performance. In particular, excessive thickness deviation in metal films used in electronic circuits can lead to uneven conductivity, while thickness fluctuations in metal films used in packaging can affect barrier properties and tensile strength. Therefore, in the continuous production process of metal films, it is necessary to control product quality in real time through online thickness detection to ensure that the thickness meets the standards.

[0003] There are many types of thickness gauges. Among them, the X-ray thickness gauge emits X-rays into a continuously conveyed metal film and calculates the film thickness data by utilizing the attenuation law of X-rays when penetrating the film. The data is then fed back to the production control system in real time. It can measure the thickness of the metal film without contacting it, making it suitable for continuous metal film production processes.

[0004] However, during the production of metal films, the measurement accuracy of X-ray thickness gauges is easily affected by environmental interference. After rolling, extrusion, and other production processes, the surface temperature of metal films is usually as high as 120-150℃, requiring rapid transport to the X-ray thickness gauge for testing to ensure production continuity. Meanwhile, the ambient temperature is usually 20-30℃, which is much lower than the surface temperature of the metal film, creating a significant temperature difference. If working in a humid environment, water vapor in the air will condense into water droplets on the surface of the metal film. These water droplets will directly interfere with the X-ray thickness gauge's detection: X-rays will be scattered and refracted when passing through the water droplets, causing distortion of the X-ray intensity signal received by the thickness gauge, making it impossible to accurately reflect the true thickness of the metal film. Summary of the Invention

[0005] The purpose of this invention is to provide a thin film thickness measuring instrument that can dynamically compensate for and eliminate environmental interference, thereby solving the technical problem that water droplets on the surface of metal thin films affect the accuracy of thickness measurement in the prior art.

[0006] To achieve the above objectives, the present invention adopts the following technical solution: A thin film thickness measuring instrument capable of dynamically compensating for and eliminating environmental interference includes an X-ray thickness gauge and a stepped cooling mechanism mounted on the X-ray thickness gauge. The stepped cooling mechanism includes: a cooling conveying assembly, including an insulation box fixedly mounted on the X-ray thickness gauge; multiple sets of rubber sleeves, spaced apart inside the insulation box and connected by multiple sets of temperature-controlled conveying assemblies; and a forward and reverse drive assembly, used to drive two rubber sleeves in the same group to rotate in opposite directions to convey a metal film, and in conjunction with the temperature-controlled conveying assembly to inject water into the multiple sets of rubber sleeves, so that the temperature of the multiple sets of rubber sleeves decreases sequentially along the conveying path of the metal film, forming a stepped cooling effect. The conveying path is the direction of travel of the metal film from entering the first rubber sleeve to entering the detection range of the X-ray thickness gauge.

[0007] Preferably, the cooling conveying assembly further includes: a hollow drive roller, fixedly installed inside the rubber sleeve; and a first hollow rotating tube, fixedly installed on the hollow drive roller and connected to the hollow drive roller.

[0008] Preferably, the cooling conveying assembly further includes: a plurality of double-row pulleys, which are respectively fixedly installed on a plurality of the first hollow rotating tubes; and a drive belt for driving two adjacent double-row pulleys to rotate synchronously.

[0009] Preferably, the forward and reverse drive assembly includes: an inlet pipe, with a hollow box fixedly installed at both of its outlet ends; a second fixing cover, fixedly installed on the hollow box; and a first water supply pipe, with one end fixedly connected to the hollow box and the other end fixedly connected to the second fixing cover.

[0010] Preferably, the forward and reverse drive assembly further includes: a second hollow rotating tube, rotatably mounted on the hollow box and fixedly connected to the first hollow rotating tube; and an impeller, located inside the hollow box and fixedly connected to the second hollow rotating tube.

[0011] Preferably, the stepped cooling mechanism further includes an adjustment component, which includes: a connecting block, which is slidably mounted on the insulation box and rotatably connected to the first hollow rotating tube; and a connecting plate, which is used to connect two adjacent connecting blocks.

[0012] Preferably, the adjustment assembly further includes: a positive and negative screw, rotatably mounted on the rubber sleeve, with a threaded block threadedly connected thereto and fixedly connected to the connecting block; and a slide rod, fixedly mounted on the insulation box, with a threaded block slidably connected thereto and fixedly connected to the connecting block.

[0013] Preferably, the cooling conveying assembly further includes: a first fixed cover, fixedly installed on the connecting block; the temperature control conveying assembly includes: a second conveying pipe, used to connect two adjacent first fixed covers, and a one-way valve fixedly installed inside; a folding heat preservation cover, one end of which is fixedly installed on the heat preservation box, and the other end is slidably connected to the second conveying pipe.

[0014] Preferably, the cooling conveying assembly further includes: a retaining tooth, fixedly installed inside the first hollow rotating tube; the stepped cooling mechanism further includes a mixing assembly, the mixing assembly including: a second external toothed column, located inside the first hollow rotating tube.

[0015] Preferably, the mixing assembly further includes: a first rotating shaft, on which multiple stirring plates are fixedly installed, located inside the hollow drive roller, and on which a first external toothed column that meshes with the second external toothed column is fixedly installed.

[0016] In summary, due to the adoption of the above technical solution, the beneficial effects of the present invention are: 1. In this invention, the forward and reverse drive assembly injects water into multiple sets of rubber sleeves through a hollow box; the temperature control and conveying assembly forms a temperature decreasing step along the conveying direction, and the metal film is gradually cooled down by the multiple sets of rubber sleeves, avoiding water droplets from condensing on the surface due to sudden condensation; at the same time, it can also stably convey the metal film, ensuring that there is no water droplet interference when X-rays penetrate, thus ensuring the thickness measurement accuracy.

[0017] 2. When the forward and reverse screws drive the threaded block to move in this invention, the rubber sleeve is flexibly deformed, and the rubber sleeve and the metal film are flatly adhered, increasing the contact area and improving the cooling efficiency. Even if the surface of the rubber sleeve becomes uneven after long-term use, it can still be completely adhered to the metal film after compression deformation. This allows the rubber sleeve to dissipate heat evenly to the metal film, avoiding the problem of localized temperature differences in the metal film due to inability to adhere properly for heat dissipation.

[0018] 3. When the first hollow rotating tube in this invention rotates, it will drive the clamping teeth to rotate. The clamping teeth drive the second outer tooth column, the first outer tooth column and the first rotating shaft to rotate, so that the stirring plate stirs the water source in the rubber sleeve, avoiding uneven water temperature stratification and local temperature unevenness, which would affect the uniform cooling of the metal film.

[0019] 4. The folding heat insulation cover in this invention can slide and adjust the coverage of the second conveying pipe. According to the change of the external ambient temperature, it controls the rate of heat loss from the water source and flexibly adjusts the cooling range of the rubber sleeve to adapt to the thickness measurement requirements under different ambient temperatures. At the same time, the forward and reverse drive components drive the rubber sleeves in the same group to rotate in opposite directions. With the flexibility of the rubber sleeve, it can adapt to the conveying of metal films of different thicknesses and avoid uneven cooling caused by conveying deviation. Attached Figure Description

[0020] To more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0021] Figure 1 This is a schematic diagram of the overall structure of the present invention; Figure 2 This is a schematic diagram of the stepped cooling mechanism in this invention; Figure 3 In this invention Figure 2 Enlarged schematic diagram of part A; Figure 4 This is a schematic diagram of the internal structure of the rubber sleeve in this invention; Figure 5 This is a schematic diagram of the assembly structure of multiple insulation boxes in this invention; Figure 6 In this invention Figure 5 Enlarged schematic diagram of part B; Figure 7 This is a schematic diagram of the assembly structure of the adjustment component in this invention; Figure 8 This is a schematic diagram of the internal structure of the heat preservation box in this invention; Figure 9 In this invention Figure 8 Enlarged schematic diagram of part C; Figure 10 This is a schematic diagram of the structure of the folding heat insulation cover in this invention; Figure 11 In this invention Figure 2 Enlarged schematic diagram of part D.

[0022] Reference numerals: 100, X-ray thickness gauge; 200, stepped cooling mechanism; 210, cooling conveying assembly; 211, rubber sleeve; 212, insulation box; 213, first fixing cover; 214, hollow drive roller; 215, double-row pulley; 216, first hollow rotating tube; 217, drive belt; 218, clamping teeth; 220, forward and reverse drive assembly; 221, second fixing cover; 222, first water supply pipe; 223, hollow box; 2 24. Liquid inlet pipe; 225. Impeller; 226. Second hollow rotating pipe; 230. Adjustment component; 231. Threaded block; 232. Slide rod; 233. Connecting plate; 234. Connecting block; 235. Positive and negative screws; 240. Mixing component; 241. First external toothed column; 242. Second external toothed column; 243. Stirring plate; 244. First rotating shaft; 250. Temperature-controlled conveying component; 251. Folding heat preservation cover; 252. Second conveying pipe. Detailed Implementation

[0023] To make the above-mentioned objects, features, and advantages of the present invention more apparent and understandable, specific embodiments of the present invention will be described in detail below with reference to the accompanying drawings. Obviously, the described embodiments are only a part of the embodiments of the present invention, and not all of them. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort should fall within the protection scope of the present invention.

[0024] Many specific details are set forth in the following description in order to provide a full understanding of the invention. However, the invention may also be practiced in other ways different from those described herein, and those skilled in the art can make similar extensions without departing from the spirit of the invention. Therefore, the invention is not limited to the specific embodiments disclosed below.

[0025] Secondly, the term "an embodiment" or "embodiment" as used herein refers to a specific feature, structure, or characteristic that may be included in at least one implementation of the present invention. The phrase "in one embodiment" appearing in different places throughout this specification does not necessarily refer to the same embodiment, nor is it a single embodiment or an embodiment selectively excluded from other embodiments.

[0026] This invention is described in detail with reference to the accompanying drawings. When detailing the embodiments of this invention, for ease of explanation, the cross-sectional views illustrating the device structure may be partially enlarged, not to scale. Furthermore, the accompanying drawings are merely examples and should not be construed as limiting the scope of protection of this invention. In actual fabrication, the three-dimensional spatial dimensions of length, width, and depth should be included.

[0027] Furthermore, it should be noted in the description of this invention that the terms "first," "second," or "third" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0028] Unless otherwise explicitly specified and limited, the terms "installation," "connection," and "joining" in this invention should be interpreted broadly. For example, they can refer to fixed connections, detachable connections, or integral connections; similarly, they can refer to mechanical connections, electrical connections, or direct connections, or indirect connections through an intermediate medium, or internal connections between two components. Those skilled in the art can understand the specific meaning of the above terms in this invention based on the specific circumstances.

[0029] Example 1: As Figures 1 to 11 As shown, a film thickness that can dynamically compensate for and eliminate environmental interference includes an X-ray thickness gauge 100 and a stepped cooling mechanism 200 mounted on the X-ray thickness gauge 100. The stepped cooling mechanism 200 includes a cooling conveying component 210, a forward and reverse driving component 220, an adjusting component 230, a mixing component 240, and a temperature control conveying component 250.

[0030] The cooling and conveying assembly 210 includes an insulation box 212 fixedly installed on the X-ray thickness gauge 100; multiple sets of rubber sleeves 211 are arranged at intervals inside the insulation box 212, and the multiple sets of rubber sleeves 211 are connected by multiple sets of temperature-controlled conveying assemblies 250; the forward and reverse drive assembly 220 is used to drive two rubber sleeves 211 in the same group to rotate in opposite directions to convey the metal film, and in conjunction with the temperature-controlled conveying assembly 250, water is injected into the multiple sets of rubber sleeves 211, so that the temperature of the multiple sets of rubber sleeves 211 decreases sequentially along the conveying path of the metal film, forming a stepped cooling, the conveying path being the direction of travel of the metal film from entering the first rubber sleeve 211 to entering the detection range of the X-ray thickness gauge 100.

[0031] It should be noted that after the metal film is produced, it is in a high-temperature state and can directly enter the rubber sleeve 211. It is then transported by multiple sets of rubber sleeves 211 until it reaches the X-ray thickness gauge 100 for thickness measurement. The multiple sets of rubber sleeves 211 are filled with water, and the water has a temperature. The initial temperature of the water is 120-130℃. When it is transported to the second set of rubber sleeves 211 by the first set of temperature-controlled conveying components 250, the water temperature will drop to 80-90℃. When it is transported to the third set of rubber sleeves 211, the water temperature will drop to 40-50℃. This allows for a step-by-step cooling of the metal film, preventing water droplets from condensing on the surface of the metal film and preventing water droplets from interfering with the thickness measurement accuracy of the X-ray thickness gauge.

[0032] like Figures 3 to 6 As shown, the cooling conveying assembly 210 includes a rubber sleeve 211, an insulation box 212, a first fixing cover 213, a hollow drive roller 214, a double-row pulley 215, a first hollow rotating tube 216, and a drive belt 217.

[0033] The hollow drive roller 214 is fixedly installed inside the rubber sleeve 211; the first hollow rotating tube 216 is fixedly installed on the hollow drive roller 214 and is connected to the hollow drive roller 214; multiple double-row pulleys 215 are respectively fixedly installed on multiple first hollow rotating tubes 216; the drive belt 217 is used to drive two adjacent double-row pulleys 215 to rotate synchronously.

[0034] like Figure 3 and Figure 4 As shown, the forward and reverse drive assembly 220 includes a second fixed cover 221, a first water supply pipe 222, a hollow box 223, an inlet pipe 224, an impeller 225, and a second hollow rotating pipe 226.

[0035] Hollow boxes 223 are fixedly installed at both outlet ends of the inlet pipe 224; a second fixed cover 221 is fixedly installed on the hollow box 223; one end of the first water supply pipe 222 is fixedly connected to the hollow box 223, and the other end of the first water supply pipe 222 is fixedly connected to the second fixed cover 221; a second hollow rotating pipe 226 is rotatably installed on the hollow box 223, and the second hollow rotating pipe 226 is fixedly connected to the first hollow rotating pipe 216; an impeller 225 is located inside the hollow box 223, and the impeller 225 is fixedly connected to the second hollow rotating pipe 226.

[0036] It should be noted that when an external water supply device is connected to the inlet end of the inlet pipe 224, water at 120-130℃ is supplied. The water entering the inlet pipe 224 is split, flowing into two hollow boxes 223, which in turn drive two impellers 225 to rotate. Because the water supply positions of the two hollow boxes 223 are different, the rotation directions of the two impellers 225 are also different. The hollow box 223 located above the inlet pipe 224 supplies water from the bottom side; the water impacting the impeller 225 causes it to rotate counterclockwise. Conversely, the hollow box 223 located below the inlet pipe 224 supplies water from the top side; the water impacting the impeller 225 causes it to rotate counterclockwise. When the impeller 225 rotates clockwise, the second hollow tube 226, which is fixedly connected to the impeller 225, rotates counterclockwise and clockwise respectively. Since the second hollow tube 226 is fixedly connected to the first hollow tube 216, the two first hollow tubes 216 in the same group will also rotate counterclockwise and clockwise respectively. This can stretch the metal film and play the role of conveying the metal film. When one group of first hollow tubes 216 rotates, the other groups of first hollow tubes 216 will rotate synchronously through the double-row pulleys 215 and the drive belt 217 until the metal film is conveyed to the X-ray thickness gauge 100 for thickness measurement.

[0037] Furthermore, since the hollow drive roller 214 and the rubber sleeve 211 form a water storage space, it is convenient to store hot water. When the water storage space is full, it will enter the next water storage space through the temperature control conveying component 250 until it is discharged.

[0038] like Figure 5 and Figure 7 As shown, the adjustment assembly 230 includes a threaded block 231, a slide rod 232, a connecting plate 233, a connecting block 234, and a positive and negative screw 235. The connecting block 234 is slidably mounted on the insulation box 212 and is rotatably connected to the first hollow rotating tube 216. The connecting plate 233 is used to connect two adjacent connecting blocks 234. The positive and negative screw 235 is rotatably mounted on the insulation box 212 and is threadedly connected to the threaded block 231, which is fixedly connected to the connecting block 234. The slide rod 232 is fixedly mounted on the insulation box 212 and is slidably connected to the threaded block 231, which is fixedly connected to the connecting block 234.

[0039] like Figure 1 , Figure 2 , Figure 10 and Figure 11 As shown, the first fixed cover 213 is fixedly installed on the connecting block 234; the temperature control and delivery assembly 250 includes a folded heat preservation cover 251 and a second delivery pipe 252; the second delivery pipe 252 is used to connect two adjacent first fixed covers 213, and a one-way valve is fixedly installed inside the second delivery pipe 252; one end of the folded heat preservation cover 251 is fixedly installed on the heat preservation box 212, and the other end of the folded heat preservation cover 251 is slidably connected to the second delivery pipe 252.

[0040] It should be noted that because the second delivery pipe 252 has a built-in one-way valve, the water pressure of the water source needs to be greater than the valve's sealing force to deliver the water. This water pressure causes the rubber sleeves 211 to expand. The two expanded rubber sleeves 211 clamp the metal film. By rotating the forward and reverse screws 235, the two threaded blocks 231 can be moved closer or further apart. When the two threaded blocks 231 are close together, the two rubber sleeves 211 will press against each other through the metal film, causing deformation. This deforms the contact surface between the rubber sleeves 211 and the metal film into a flat surface, increasing the contact area and forming a track-like structure. The conveying mechanism not only improves the transport of the metal film but also enhances the cooling effect of the rubber sleeve 211 on the metal film, preventing insufficient contact and inadequate cooling. Furthermore, because the rubber sleeve 211 is flexible, even if its surface becomes uneven after long-term use, it can be deformed by compression to ensure complete adhesion between the rubber sleeve 211 and the metal film. This allows for even heat dissipation from the rubber sleeve 211 on the metal film, preventing localized areas of insufficient adhesion and temperature variations. It also prevents condensation when the film enters the X-ray thickness gauge 100 due to high local temperatures, thus ensuring the accuracy of the X-ray thickness gauge 100.

[0041] Furthermore, the temperature of the external environment changes constantly over time, so the temperature of the metal film after it exits the rubber sleeve 211 also needs to change accordingly, rather than remaining constant. To ensure that no water droplets condense on the surface of the metal film after it exits the rubber sleeve 211, the folded insulation cover 251 can be adjusted according to the actual temperature of the external environment. The folded insulation cover 251 has an insulation effect and can keep the second delivery pipe 252 warm. Thus, the second delivery pipe 252 located inside the folded insulation cover 251 slowly loses heat from the water source when it is transporting water, while the second delivery pipe 252 located outside the folded insulation cover 251 loses heat from the water source quickly. Therefore, the coverage area of ​​the folded insulation cover 251 on the second delivery pipe 252 can be adjusted as needed to control the rate of heat loss from the water source. Ultimately, the temperature of the metal film after it leaves the rubber sleeve 211 is controlled, preventing water droplets on the metal film from affecting the thickness measurement of the X-ray thickness gauge 100.

[0042] The working principle of this embodiment: After the high-temperature metal film is produced, it directly enters the stepped cooling mechanism 200. The external water supply equipment is started, and water at 120-130℃ is transported to the forward and reverse drive assembly 220 through the liquid inlet pipe 224. The water is diverted through the liquid inlet pipe 224 into two hollow boxes 223. Because the water supply positions of the two hollow boxes 223 are different, the water drives the impellers 225 inside to rotate in opposite directions. The impellers 225 drive the second hollow rotating tube 226 to rotate synchronously. The second hollow rotating tube 226 drives the first hollow rotating tube 216 to rotate. The double-row pulleys 215 on the adjacent first hollow rotating tubes 216 are driven by the drive belt 217 to make multiple sets of rubber sleeves 211 rotate synchronously. The two rubber sleeves 211 in the same set rotate in opposite directions to achieve stable transportation of the metal film until the film is transported to the X-ray thickness gauge 100.

[0043] Water enters the hollow drive roller 214 through the first hollow rotating pipe 216, and then flows into the water storage space formed by the rubber sleeve 211 and the hollow drive roller 214. After the water storage space is full, the water is transported to the next set of rubber sleeves 211 through the second conveying pipe 252 of the temperature control conveying component 250. The second conveying pipe 252 has a built-in one-way valve, and the water pressure of the water source needs to overcome the valve's sealing force to convey the water. The water pressure causes the rubber sleeve 211 to expand and form a preliminary fit with the metal film. At the same time, multiple sets of rubber sleeves 211 form a temperature decreasing step along the film conveying direction, which cools the metal film stepwise, avoids water droplets from condensing on the film surface due to sudden condensation, and eliminates interference from X-ray thickness measurement.

[0044] Rotating the adjusting component 230 causes the positive and negative screws 235 to drive the threaded blocks 231 to move closer together. The threaded blocks 231 then move the connecting blocks 234. The connecting blocks 234 are linked to the adjacent connecting blocks 234 through the connecting plate 233, causing the two rubber sleeves 211 in the same group to be squeezed and deformed against each other through the metal film. The contact surface between the rubber sleeves 211 and the film becomes flat, increasing the contact area and improving the cooling efficiency. Even if the surface of the rubber sleeves 211 is uneven after long-term use, they can still fit completely against the film after being squeezed and deformed, ensuring uniform cooling of all areas of the film and avoiding local high temperature condensation.

[0045] According to changes in the ambient temperature, the folded heat insulation cover 251 of the temperature control and conveying component 250 is adjusted to adjust its coverage of the second conveying pipe 252: the larger the coverage, the slower the heat loss from the water source and the smaller the temperature drop of the rubber sleeve 211; the smaller the coverage, the faster the heat loss and the greater the temperature drop, flexibly adapting to the cooling requirements under different ambient temperatures and ensuring that there are no water droplets on the surface of the film after cooling; the heat insulation box 212 insulates the rubber sleeve 211 to reduce heat loss from the water source and maintain the stability of the stepped cooling.

[0046] Finally, after being cooled in stages, the surface of the metal film is dry and free of water droplets, and it smoothly enters the X-ray thickness gauge 100. When the X-rays penetrate the film, there is no scattering or refraction interference, ensuring that the thickness gauge accurately detects the film thickness.

[0047] Example 2: As Figure 8 and Figure 9 As shown, while all other parts are the same as in Example 1, the difference between this example and Example 1 is that: The toothed gear 218 is fixedly installed inside the first hollow rotating tube 216; the mixing assembly 240 also includes a first external toothed column 241, a second external toothed column 242, a stirring plate 243 and a first rotating shaft 244; the second external toothed column 242 is located inside the first hollow rotating tube 216; multiple stirring plates 243 are fixedly installed on the part of the first rotating shaft 244 located inside the hollow drive roller 214, and a first external toothed column 241 that meshes with the second external toothed column 242 is fixedly installed on the part of the first hollow rotating tube 216.

[0048] The working principle of this embodiment is as follows: There are multiple second external toothed columns 242, which are rotatably connected to the first fixed cover 213 and the rubber sleeve 211, respectively. Similarly, the first rotating shaft 244 is also rotatably connected to the first fixed cover 213 and the rubber sleeve 211. When the first hollow rotating tube 216 rotates, it causes the hollow drive roller 214 to rotate and transport the metal film, thus cooling the metal film. Simultaneously, the retaining teeth 218 inside the first hollow rotating tube 216 also rotate. The rotation of the retaining teeth 218 drives the second external toothed columns 242 to rotate, which in turn causes the first external toothed column 241 to rotate. The rotation of the first external toothed column 241 then causes the first rotating shaft 244 to rotate. The rotation of the first rotating shaft 244 will also cause the stirring plate 243 on it to rotate. The rotation of the stirring plate 243 will mix the water source inside the rubber sleeve 211. Since the water source is not filled into the rubber sleeve 211 instantly, and the water temperature will change locally as the cooling process progresses, it is not conducive to cooling. However, the mixing of the water source by the stirring plate 243 avoids water temperature stratification or uneven local heating and cooling, making the water source temperature uniform and stable, thereby improving the uniformity and efficiency of cooling the metal film. More importantly, the uniform cooling effect can strictly control the surface temperature of the metal film and prevent water droplets from condensing due to local sudden cooling, thus improving the thickness measurement accuracy of the X-ray thickness gauge 100.

[0049] The above description is only a preferred embodiment of the present invention, but the scope of protection of the present invention is not limited thereto. Any equivalent substitutions or modifications made by those skilled in the art within the scope of the technology disclosed in the present invention, based on the technical solution and inventive concept of the present invention, should be covered within the scope of protection of the present invention.

[0050] The preferred embodiments of the present invention disclosed above are merely illustrative of the invention. These preferred embodiments do not exhaustively describe all details, nor do they limit the invention to specific implementations. Clearly, many modifications and variations can be made based on the content of this specification. This specification selects and specifically describes these embodiments to better explain the principles and practical applications of the invention, thereby enabling those skilled in the art to better understand and utilize the invention. The invention is limited only by the claims and their full scope and equivalents.

Claims

1. A thin film thickness measuring instrument capable of dynamically compensating for and eliminating environmental interference, comprising an X-ray thickness gauge (100) and a stepped cooling mechanism (200) mounted on the X-ray thickness gauge (100), characterized in that, The stepped cooling mechanism (200) includes: The cooling delivery assembly (210) includes a heat preservation box (212) fixedly installed on the X-ray thickness gauge (100). Multiple sets of rubber sleeves (211) are spaced apart inside the heat preservation box (212) and connected by multiple sets of temperature control and conveying components (250); The forward and reverse drive assembly (220) is used to drive the two rubber sleeves (211) in the same group to rotate in opposite directions to transport the metal film. It is also used in conjunction with the temperature control and transport assembly (250) to inject water into the multiple sets of rubber sleeves (211) so that the temperature of the multiple sets of rubber sleeves (211) decreases sequentially along the transport path of the metal film, forming a stepped cooling. The transport path is the direction of travel of the metal film from entering the first rubber sleeve (211) to entering the detection range of the X-ray thickness gauge (100).

2. The thin film thickness measuring instrument that can dynamically compensate for and eliminate environmental interference according to claim 1, characterized in that, The cooling conveying assembly (210) also includes: A hollow drive roller (214) is fixedly installed inside the rubber sleeve (211); The first hollow rotating tube (216) is fixedly installed on the hollow drive roller (214) and connected to the hollow drive roller (214).

3. A thin film thickness measuring instrument capable of dynamically compensating for and eliminating environmental interference according to claim 2, characterized in that, The cooling conveying assembly (210) also includes: Multiple double-row pulleys (215) are respectively fixedly installed on multiple first hollow rotating tubes (216); A drive belt (217) is used to drive two adjacent double-row pulleys (215) to rotate synchronously.

4. A thin film thickness measuring instrument capable of dynamically compensating for and eliminating environmental interference according to claim 2, characterized in that, The forward and reverse drive assembly (220) includes: The inlet pipe (224) has a hollow box (223) fixedly installed at both outlet ends. The second fixing cover (221) is fixedly installed on the hollow box (223); The first water supply pipe (222) is fixedly connected at one end to the hollow box (223) and at the other end to the second fixing cover (221).

5. A thin film thickness measuring instrument capable of dynamically compensating for and eliminating environmental interference according to claim 4, characterized in that, The forward and reverse drive assembly (220) also includes: The second hollow rotating tube (226) is rotatably mounted on the hollow box (223) and fixedly connected to the first hollow rotating tube (216); The impeller (225) is located inside the hollow box (223) and is fixedly connected to the second hollow rotating tube (226).

6. A thin film thickness measuring instrument capable of dynamically compensating for and eliminating environmental interference according to claim 2, characterized in that, The stepped cooling mechanism (200) further includes an adjustment component (230), which includes: The connecting block (234) is slidably mounted on the heat preservation box (212) and rotatably connected to the first hollow rotating tube (216); A connecting plate (233) is used to connect two adjacent connecting blocks (234).

7. A thin film thickness measuring instrument capable of dynamically compensating for and eliminating environmental interference according to claim 6, characterized in that, The adjustment component (230) further includes: The positive and negative screws (235) are rotatably mounted on the rubber sleeve (211), and a threaded block (231) is threadedly connected to the connecting block (234). A slide bar (232) is fixedly installed on the heat preservation box (212), and a threaded block (231) is slidably connected to it and fixedly connected to the connecting block (234).

8. A thin film thickness measuring instrument capable of dynamically compensating for and eliminating environmental interference according to claim 7, characterized in that, The cooling conveying assembly (210) also includes: The first fixing cover (213) is fixedly installed on the connecting block (234); The temperature-controlled delivery assembly (250) includes: The second delivery pipe (252) is used to connect two adjacent first fixed covers (213), and a one-way valve is fixedly installed inside it; The folding heat preservation cover (251) is fixedly installed on the heat preservation box (212) at one end and slidably connected to the second delivery pipe (252) at the other end.

9. A thin film thickness measuring instrument capable of dynamically compensating for and eliminating environmental interference according to claim 8, characterized in that, The cooling conveying assembly (210) also includes: The retaining tooth (218) is fixedly installed inside the first hollow rotating tube (216); The stepped cooling mechanism (200) further includes a mixing component (240), which comprises: The second external toothed column (242) is located inside the first hollow rotary tube (216).

10. A thin film thickness measuring instrument capable of dynamically compensating for and eliminating environmental interference according to claim 9, characterized in that, The hybrid component (240) also includes: The first rotating shaft (244) has multiple stirring plates (243) fixedly installed on the part inside the hollow drive roller (214), and the first external tooth column (241) that meshes with the second external tooth column (242) is fixedly installed on the part inside the first hollow rotating tube (216).

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