A source table based impedance measurement method and apparatus therefor

Abstract

The application discloses a kind of impedance measurement method and device based on source table, it is related to impedance measurement technical field;Specifically include the following steps: by SMU to the measured device applies bias voltage and alternating current test signal;Synchronous acquisition voltage response of the measured device;FFT analysis is carried out to voltage response, and the real number and imaginary component at fundamental frequency f are extracted;Calculate voltage spectral density and current spectral density;According to the definition Z=V / I of impedance, calculate complex impedance;Output impedance amplitude and phase angle.The application gives high-performance SMU professional impedance analysis function, solves its "have strong body, no professional algorithm" short board, by converting precision time-domain measurement data into frequency domain impedance information, so that single SMU equipment not only can complete traditional direct current parameter test, but also can undertake complex alternating current impedance analysis task, greatly expands the functional range and investment return rate of equipment.

Description

Technical Field

[0001] This invention relates to the field of impedance measurement technology, and in particular to an impedance measurement method and apparatus based on a source meter. Background Technology

[0002] In the field of electronic measurement technology, impedance measurement is one of the core methods for evaluating the performance of electronic components, functional materials, and integrated circuits.

[0003] Traditionally, engineers have relied primarily on dedicated impedance analyzers or LCR meters for measurements. These instruments are stable over typical frequency and impedance ranges, but their inherent architecture imposes significant limitations.

[0004] First, its frequency range is relatively narrow, usually between tens of hertz and several megahertz, making it difficult to cover the complete spectrum from ultra-low frequencies (such as the mHz level used to study 1 / f noise) to high frequencies.

[0005] Secondly, when dealing with emerging objects such as modern semiconductor devices, nanomaterials, and MEMS sensors, their tiny impedances (such as fF-level capacitance and high-resistance leakage channels) and nonlinear characteristics place extremely high demands on measurement accuracy. The excitation signal accuracy, sampling resolution, and background noise level of traditional instruments are often difficult to meet.

[0006] In addition, these instruments are usually fixed in function and are difficult to integrate flexibly with complex test conditions such as DC bias and fast pulse sequences, which limits their application in the comprehensive characteristic analysis of devices.

[0007] Meanwhile, source measurement units (SMUs), as precision instruments, have demonstrated outstanding performance in providing high-precision, programmable DC and AC excitation signals, as well as simultaneously performing nanoampere-level current and microvolt-level voltage measurements, and have become the cornerstone of semiconductor testing.

[0008] However, standard SMUs were originally designed with a focus on static or time-domain IV characteristic measurements, and their built-in analysis functions lack specialized algorithms for impedance, a frequency-domain parameter. Although impedance can be indirectly calculated using the acquired time-domain voltage and current data, the limitations of conventional algorithms in noise suppression, harmonic analysis, and dispersion processing make it difficult to achieve high-precision, wide-bandwidth complex impedance extraction. Consequently, their powerful hardware capabilities are not fully utilized in the field of impedance measurement.

[0009] Therefore, this invention proposes an impedance measurement method and apparatus based on a source meter. Summary of the Invention

[0010] The purpose of this invention is to address the shortcomings of existing technologies by proposing an impedance measurement method and apparatus based on a source meter.

[0011] To achieve the above objectives, the present invention adopts the following technical solution:

[0012] An impedance measurement method based on a source meter includes the following steps:

[0013] S1: Apply bias voltage to the device under test via SMU and AC test signals ,in f is the amplitude, and f is the frequency;

[0014] S2: Synchronously acquire the voltage response of the device under test. and sampling frequency The number of sampling points N is a power of 2;

[0015] S3: Yes and Perform FFT analysis to extract the real and imaginary components at the fundamental frequency f: ;

[0016] S4: Calculate the voltage spectral density and current spectral density , bandwidth ;

[0017] S5: Calculate the complex impedance according to the impedance definition Z=V / I. ;

[0018] S6: Output impedance magnitude and phase angle .

[0019] Preferably, in step S3, the sampled data is filtered using a Hanning window before FFT analysis to reduce spectral leakage, as shown in the formula: T represents the total sampling duration.

[0020] Furthermore: In step S4, the spectral density calculation subtracts the instrument's background noise, specifically by measuring the noise spectral density in an open-circuit state. and And perform corrections: .

[0021] Based on the aforementioned scheme: In step S5, the impedance calculation supports series-parallel model conversion:

[0022] Parallel impedance The calculation formula is: ,in Obtained by fitting the real and imaginary parts;

[0023] Series impedance The calculation formula is: , For series resistance, For reactance, for capacitive loads For inductive loads , It is a series capacitor. It is a series inductor.

[0024] An impedance measurement device based on a source meter includes a machine base. A fixing and limiting mechanism for limiting and fixing multiple electrical components under test is provided on one side of the top of the machine base. A lifting control unit is provided on the outer wall of the machine base near the lead wire of the electrical component under test. The moving end of the lifting control unit is provided with multiple sets of probe detection units that are in contact with and connected to the lead wire of the electrical component under test. An SMU (Support Measurement Unit) for impedance measurement is provided on the top outer wall of one side of the machine base and is electrically connected to the probe detection units.

[0025] As a further aspect of the present invention: the fixed limiting mechanism includes a limiting platform fixed to the outer wall of the top of the machine tool by bolts and a plurality of limiting opening slots opened on the inner wall of the limiting platform and matching the size of the electrical component to be tested. A baffle is provided at the side opening of the limiting opening slot. The baffle is slidably connected to the limiting platform by a pull rod. A spring is sleeved on the outer wall of the pull rod. One end of the spring is fastened to the side wall of the pull rod, and the other end of the spring is fastened to the side wall of the limiting platform.

[0026] Meanwhile, the lifting control unit includes a gantry frame, a first movable plate, and a second movable plate. The gantry frame is fixed to the top outer wall of the machine platform by bolts. The first movable plate is lifted and connected to the bottom of the gantry frame by a telescopic component. The second movable plate is slidably connected to the bottom outer wall of the first movable plate by a guide rod, and a second spring is fastened between the first movable plate and the second movable plate. Threaded holes are provided on both sides of the second movable plate, and limit bolts are fitted into the inner walls of the threaded holes.

[0027] As a preferred embodiment of the present invention: the probe detection unit includes multiple sets of probe assemblies disposed on the movable plate two. The probe assembly includes at least two sets of fixed probes and movable probes for pin clamping contact of the electrical component under test. The fixed probes are fixed to the bottom outer wall of the movable plate two, and the movable probes are slidably connected to the inner wall of the movable plate two. The fixed probes are connected to the test terminal of the SMU through a serial / parallel switch.

[0028] The top of the movable probe is provided with an oblique guide, and the bottom of the movable plate is fixed with an oblique limiting component that cooperates with the oblique guide in moving and limiting.

[0029] The clamping contact surfaces of both the fixed probe and the movable probe are provided with toothed grooves.

[0030] Meanwhile, the serial / parallel switch includes a housing and end caps fixed to two stops on the housing. Multiple sets of connection electrodes are fixed to the side wall of the housing, and the connection electrodes are electrically connected to the fixed probes.

[0031] One of the end caps has a busbar fixedly embedded in its side wall. The inner wall of the outer shell is rotatably connected to a rotating frame. Multiple sets of transition electrodes one and multiple sets of transition electrodes two are fixedly embedded in the inner wall of the rotating frame. The multiple sets of transition electrodes one are connected in parallel and then electrically connected to the busbar. The transition electrodes two are connected in series and then electrically connected to the busbar. The busbar is electrically connected to the detection and testing terminal of the SMU.

[0032] As a preferred embodiment of the present invention: another end cap has an electric motor fixed to its outer wall by bolts, and the output shaft of the electric motor is fixed to the outer wall at the rotation center of the rotating frame.

[0033] The beneficial effects of this invention are as follows:

[0034] 1. This invention endows high-performance SMUs with professional impedance analysis capabilities, solving their shortcoming of "having a powerful body but lacking professional algorithms". By converting precise time-domain measurement data into frequency-domain impedance information, a single SMU device can not only complete traditional DC parameter testing, but also handle complex AC impedance analysis tasks, greatly expanding the functional range of the device and the return on investment.

[0035] 2. The present invention has built-in functions such as signal amplitude adjustment, background noise reduction, window function processing, and series-parallel model fitting, which enable the measurement process to intelligently adapt to the characteristics of different measured objects such as semiconductor devices and nanomaterials, and effectively cope with challenges such as nonlinearity and low signal-to-noise ratio.

[0036] 3. The present invention, by setting a fixed limiting mechanism, on the one hand, uses multiple limiting opening slots to limit multiple electrical components under test, which can realize the measurement of multiple electrical components under test at one time; on the other hand, by limiting the opening slots and clamping and fixing the baffle, the convenience of picking up and putting down the electrical components under test is realized.

[0037] 4. In this invention, by setting up a probe detection unit and a lifting control unit, on the one hand, the movement of the first moving plate and the second moving plate can make multiple sets of fixed probes and toothed grooves simultaneously clamp and fix the pins of the electrical components under test, thereby improving the circuit conduction efficiency. On the other hand, by using clamping to conduct the circuit, combined with the setting of the toothed grooves, the reliability of circuit conduction can be guaranteed, and the reliability of impedance measurement can be increased.

[0038] 5. The present invention, based on the switching function of a series / parallel switcher, can realize the series and parallel connection of multiple electrical components under test relative to the SMU. At the same time, based on the series measurement formula and parallel measurement formula in the method, it can realize the measurement of the series impedance and parallel impedance of multiple electrical components under test. Attached Figure Description

[0039] Figure 1 This is a flowchart of an impedance measurement method based on a source meter proposed in this invention;

[0040] Figure 2 This is a schematic diagram of the overall structure of an impedance measurement device based on a source meter proposed in this invention.

[0041] Figure 3 This is a schematic diagram of the fixed limiting mechanism structure of an impedance measurement device based on a source meter proposed in this invention;

[0042] Figure 4 This is a schematic diagram of the probe detection unit and lifting control unit of an impedance measurement device based on a source meter proposed in this invention;

[0043] Figure 5 This is a schematic diagram of the probe detection section of an impedance measurement device based on a source meter proposed in this invention.

[0044] Figure 6 This is a schematic diagram of the serial / parallel switch structure of an impedance measurement device based on a source table proposed in this invention;

[0045] Figure 7 This is a schematic diagram of the internal structure of a series / parallel switcher for an impedance measurement device based on a source table, as proposed in this invention.

[0046] In the diagram: 1. Machine base; 2. Fixed limiting mechanism; 3. Probe detection unit; 4. Lifting control unit; 5. SMU; 6. Electrical component under test; 7. Limiting opening slot; 8. Limiting platform; 9. Baffle; 10. Pull rod; 11. Spring 1; 12. Telescopic component; 13. Gantry frame; 14. Moving plate 1; 15. Moving plate 2; 16. Probe assembly; 17. Spring 2; 18. Guide rod; 19. Fixed probe; 20. Toothed groove; 21. Movable probe; 22. Angled guide; 23. Angled limiting component; 24. Housing; 25. Motor; 26. Connecting electrode; 27. End cap; 28. Busbar; 29. ​​Rotating frame; 30. Transition electrode 1; 31. Transition electrode 2; 32. Threaded hole. Detailed Implementation

[0047] The technical solution of the present invention will be further described in detail below with reference to specific embodiments.

[0048] Embodiments of the present invention are described in detail below. Examples of these embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the present invention, and should not be construed as limiting the present invention.

[0049] Example 1:

[0050] An impedance measurement method based on a source meter includes the following steps:

[0051] S1: Apply bias voltage to the device under test via SMU and AC test signals ,in f is the amplitude, and f is the frequency;

[0052] S2: Synchronously acquire the voltage response of the device under test. and sampling frequency The number of sampling points N is a power of 2;

[0053] S3: Yes and Perform FFT analysis to extract the real and imaginary components at the fundamental frequency f: ;

[0054] S4: Calculate the voltage spectral density and current spectral density , bandwidth ;

[0055] S5: Calculate the complex impedance according to the impedance definition Z=V / I. ;

[0056] S6: Output impedance magnitude and phase angle .

[0057] In step S3, the sampled data is filtered using a Hanning window before FFT analysis to reduce spectral leakage. The formula is as follows: T represents the total sampling duration.

[0058] In step S4, the spectral density calculation subtracts the instrument's background noise, specifically by measuring the noise spectral density in an open-circuit state. and And perform corrections: .

[0059] In step S5, the impedance calculation supports series-parallel model conversion:

[0060] Parallel impedance The calculation formula is: ,in Obtained by fitting the real and imaginary parts;

[0061] Series impedance The calculation formula is: , For series resistance, For reactance, for capacitive loads For inductive loads , It is a series capacitor. It is a series inductor.

[0062] This invention endows high-performance SMUs with professional impedance analysis capabilities, solving their shortcoming of "having a powerful body but lacking professional algorithms". By converting precise time-domain measurement data into frequency-domain impedance information, a single SMU device can not only complete traditional DC parameter testing, but also handle complex AC impedance analysis tasks, greatly expanding the device's functional range and return on investment.

[0063] The built-in signal amplitude adjustment, background noise reduction, window function processing, and series-parallel model fitting functions of this invention enable the measurement process to intelligently adapt to the characteristics of different measured objects such as semiconductor devices and nanomaterials, effectively addressing challenges such as nonlinearity and low signal-to-noise ratio.

[0064] Example 2:

[0065] An impedance measurement device based on a source meter is provided for implementing the impedance measurement method based on a source meter in Embodiment 1, such as... Figures 2-7 As shown, the machine includes a machine base 1. A fixing and limiting mechanism 2 for limiting and fixing multiple electrical components 6 under test is provided on one side of the top of the machine base 1. A lifting control unit 4 is provided on the outer wall of the machine base 1 near the lead wire of the electrical component 6 under test. The moving end of the lifting control unit 4 is provided with multiple sets of probe detection units 3 that are in contact with and connected to the lead wire of the electrical component 6 under test. An SMU5 that is electrically connected to the probe detection unit 3 and used for impedance measurement is provided on the top outer wall of one side of the machine base 1.

[0066] The fixed limiting mechanism 2 includes a limiting platform 8 fixed to the outer wall of the top of the machine base 1 by bolts, and a plurality of limiting opening slots 7 opened on the inner wall of the limiting platform 8 and matching the size of the electrical component 6 to be tested. A baffle 9 is provided at the side opening of the limiting opening slot 7. The baffle 9 is slidably connected to the limiting platform 8 by a pull rod 10. A spring 11 is sleeved on the outer wall of the pull rod 10. One end of the spring 11 is fastened to the side wall of the pull rod 10, and the other end of the spring 11 is fastened to the side wall of the limiting platform 8.

[0067] During testing, the baffle 9 can be pulled to create a gap between it and the limiting opening slot 7. Then, the electrical component 6 to be tested is placed in the limiting opening slot 7 with its pins horizontal. After that, the baffle 9 is released, and the elastic force of the spring 11 is transmitted to the baffle 9 through the pull rod 10, thereby clamping the electrical component 6 to be tested. This process is repeated until all the electrical components 6 to be tested are limited.

[0068] This device, by setting a fixed limiting mechanism 2, on the one hand, uses multiple limiting opening slots 7 to limit multiple electrical components 6 under test, which can realize the measurement of multiple electrical components 6 under test at one time. On the other hand, by limiting the opening slots 7 and clamping and fixing the baffle 9, the device can facilitate the picking and putting of electrical components 6 under test.

[0069] To solve the detection problem, such as Figure 4 , 5 As shown, the lifting control unit 4 includes a gantry frame 13, a first movable plate 14, and a second movable plate 15. The gantry frame 13 is fixed to the top outer wall of the machine base 1 by bolts. The first movable plate 14 is lifted and connected to the bottom of the gantry frame 13 by a telescopic member 12. The second movable plate 15 is slidably connected to the bottom outer wall of the first movable plate 14 by a guide rod 18, and a second spring 17 is fastened between the first movable plate 14 and the second movable plate 15.

[0070] The movable plate 15 has threaded holes 32 on both sides, and the inner wall of the threaded holes 32 is fitted with limit bolts.

[0071] The probe detection unit 3 includes multiple sets of probe assemblies 16 disposed on the second movable plate 15. Each probe assembly 16 includes at least two sets of fixed probes 19 and movable probes 21 for pin clamping contact of the electrical component 6 under test. The fixed probes 19 are fixed to the bottom outer wall of the second movable plate 15, and the movable probes 21 are slidably connected to the inner wall of the second movable plate 15. The fixed probes 19 are connected to the test terminal of the SMU5 through a serial / parallel switch.

[0072] The top of the movable probe 21 is provided with an oblique guide 22, and the bottom of the movable plate 14 is fixed with an oblique limiting member 23 that cooperates with the oblique guide 22 for movement limitation.

[0073] The clamping contact surfaces of the fixed probe 19 and the movable probe 21 are both provided with toothed grooves 20.

[0074] After all the electrical components under test 6 are fixed and limited, the position of the limiting bolt is adjusted according to the height of the pin of the electrical component under test 6. Then, the telescopic component 12 is activated to extend it. The telescopic component 12 drives the moving plate 14 and the moving plate 25 to extend together until the end of the limiting bolt contacts the machine base 1. The height of the moving plate 25 is then limited. At the same time, the position of the fixed probe 19 and the movable probe 21 matches the position of the pin of the electrical component under test 6. Then, the telescopic component 12 continues to extend, the moving plate 14 descends, and the moving plate 14 and the moving plate 25 move relative to each other. Thus, the movable probe 21 is moved by the limiting effect of the inclined guide 22 and the inclined limiting component 23 until the fixed probe 19 and the movable probe 21 cooperate to clamp the pin of the electrical component under test 6 and make contact to conduct electricity.

[0075] This device, by setting up a probe detection unit 3 and a lifting control unit 4, can use the movement of the first moving plate 14 and the second moving plate 15 to simultaneously clamp and fix the pins of the electrical component 6 under test with multiple fixed probes 19 and toothed grooves 20, thereby improving the circuit conduction efficiency. At the same time, by using clamping to conduct the circuit and combining it with the setting of toothed grooves 20, the reliability of circuit conduction can be guaranteed, and the reliability of impedance measurement can be increased.

[0076] To address the switching between series and parallel measurement operating conditions, such as Figure 6 , Figure 7 As shown, the serial / parallel switcher includes a housing 24 and end caps 27 fixed to two stops of the housing 24. Multiple sets of connection electrodes 26 are fixed to the side wall of the housing 24, and the connection electrodes 26 are electrically connected to the fixed probes 19.

[0077] One of the end caps 27 has a busbar 28 fixedly embedded in its side wall. The inner wall of the outer shell 24 is rotatably connected to a rotating frame 29. The inner wall of the rotating frame 29 has multiple sets of transition electrodes 30 and multiple sets of transition electrodes 31 fixedly embedded in it. The multiple sets of transition electrodes 30 are connected in parallel and then electrically connected to the busbar 28. The transition electrodes 31 are connected in series and then electrically connected to the busbar 28. The busbar 28 is electrically connected to the detection and testing terminal of the SMU5.

[0078] Another end cap 27 has an electric motor 25 fixed to its outer wall by bolts, and the output shaft of the electric motor 25 is fixed to the outer wall at the rotation center of the rotating frame 29.

[0079] When the motor 25 starts, it drives the rotating frame 29 to rotate. When the rotating frame 29 rotates to the point where the connecting electrode 26 contacts and conducts with the transition electrode 30, multiple electrical components under test 6 are connected in series to the SMU5. The series impedance of the multiple electrical components under test 6 is measured through the SMU5. When the rotating frame 29 rotates to the point where the transition electrode 31 contacts and conducts with the connecting electrode 26, multiple electrical components under test 6 are connected in parallel to the SMU5. The parallel impedance of the multiple electrical components under test 6 is measured through the SMU5.

[0080] This device, based on the switching function of the series / parallel switcher, can realize the series connection and parallel connection of multiple electrical components under test 6 relative to SMU5. At the same time, based on the series measurement formula and parallel measurement formula in the method, it can realize the measurement of the series impedance and parallel impedance of multiple electrical components under test 6.

[0081] The specific applicable scenarios are as follows:

[0082] Parallel impedance measurement scenario:

[0083] High-impedance device measurement: When the impedance of the electrical component under test (6) is high, such as insulating materials, the gate capacitance of a MOSFET, or a nanowire isolation layer, the parallel model can more accurately describe the admittance characteristics of the parallel path. This is because, under high impedance, the effect of parasitic parallel capacitance is significant, and the model can effectively separate the resistive and capacitive components.

[0084] Low-frequency or DC bias applications: In low-frequency measurements, such as 1 / f noise testing, frequencies <100Hz, the parallel model can better reflect leakage current or dielectric loss. For example, when measuring the drain current noise of a MOSFET, if the device has a gate-drain parallel capacitance, the parallel model helps to analyze the noise source.

[0085] Power Devices and Thermal Analysis: In power semiconductors such as IGBTs, parallel models are often used to simulate the changes in parallel admittance caused by thermal effects, because the heat dissipation path often manifests as a parallel resistor-capacitor network.

[0086] Series impedance measurement scenario:

[0087] Measurement of low-impedance devices: When the impedance of the electrical component under test is low, such as metal interconnects, package resistors or semiconductor channel resistance, the series model can directly reflect the series resistance and reactance, avoiding the computational complexity brought by the parallel model; for example, when measuring the drain current of a MOSFET, if the series effect of the channel resistance is of concern, the model can simplify the analysis.

[0088] High-frequency applications: In high-frequency measurements, such as >1MHz, lead inductance and parasitic series resistance dominate, and the series model can accurately describe the impedance frequency characteristics. Although this document focuses on low-frequency noise, FFT analysis can be extended to high frequencies, and the series model is suitable for analyzing resonance or transmission line effects.

[0089] Linear device characterization: For discrete components such as resistors, inductors, or capacitors, series models are the standard method, facilitating the direct extraction of parameters from the real part "resistance" and the imaginary part "reactance." For example, the formula editor in the document supports linear fitting, which can be used to extract parameters for series impedance.

[0090] In this embodiment, the baffle 9 is pulled to create a gap between it and the limiting slot 7. The electrical component 6 to be tested is then placed in the limiting slot 7 with its pins horizontal. The baffle 9 is then released, and the spring force of spring 11 is transmitted to the baffle 9 through the pull rod 10, thus clamping the electrical component 6. This process is repeated until all electrical components 6 are limited. After all electrical components 6 are fixed and limited, the position of the limiting bolt is adjusted according to the height of the pins of the electrical components 6. Then, the telescopic component 12 is activated, extending it. The telescopic component 12 drives the moving plate 14 and the moving plate 25 to extend together until the end of the limiting bolt contacts the machine base 1. At this point, the height of the moving plate 25 is limited, and the positions of the fixed probe 19 and the movable probe 21 match the positions of the pins of the electrical component 6. The telescopic component 12 then continues to extend. The first movable plate 14 descends, and the first movable plate 14 moves relative to the second movable plate 15. This movement is caused by the limiting effect of the inclined guide 22 and the inclined limiting member 23, which drives the movable probe 21 to move until the fixed probe 19 and the movable probe 21 cooperate to clamp the pins of the electrical component under test 6 and make contact to conduct electricity. Then, according to the series and parallel connection requirements, the motor 25 is started. When the motor 25 starts, it can drive the rotating frame 29 to rotate. When the rotating frame 29 rotates to the point where the connecting electrode 26 and the transition electrode 30 make contact and conduct, multiple electrical components under test 6 are connected in series in the SMU5. The series impedance of multiple electrical components under test 6 is measured through the SMU5. When the rotating frame 29 rotates to the point where the transition electrode 31 and the connecting electrode 26 make contact and conduct, multiple electrical components under test 6 are connected in parallel in the SMU5. The parallel impedance of multiple electrical components under test 6 is measured through the SMU5. Then, the impedance measurement is performed.

[0091] The above description is only a preferred embodiment of the present invention, but the scope of protection of the present invention is not limited thereto. Any equivalent substitutions or modifications made by those skilled in the art within the scope of the technology disclosed in the present invention, based on the technical solution and inventive concept of the present invention, should be covered within the scope of protection of the present invention.

Claims

1. An impedance measurement method based on a source meter, characterized in that, Includes the following steps: S1: Apply bias voltage to the device under test via SMU and AC test signals ,in f is the amplitude, and f is the frequency; S2: Synchronously acquire the voltage response of the device under test. and sampling frequency The number of sampling points N is a power of 2; S3: Yes and Perform FFT analysis to extract the real and imaginary components at the fundamental frequency f: ; S4: Calculate the voltage spectral density and current spectral density , bandwidth ; S5: Calculate the complex impedance according to the impedance definition Z=V / I. ; S6: Output impedance magnitude and phase angle .

2. The impedance measurement method based on a source meter according to claim 1, characterized in that, In step S3, the sampled data is filtered using a Hanning window before FFT analysis to reduce spectral leakage. The formula is as follows: T represents the total sampling duration.

3. The impedance measurement method based on a source meter according to claim 1, characterized in that, In step S4, the spectral density calculation subtracts the instrument's background noise, specifically by measuring the noise spectral density in an open-circuit state. and And perform corrections: .

4. The impedance measurement method based on a source meter according to claim 1, characterized in that, In step S5, the impedance calculation supports series-parallel model conversion: Parallel impedance The calculation formula is: ,in Obtained by fitting the real and imaginary parts; Series impedance The calculation formula is: , For series resistance, For reactance, for capacitive loads For inductive loads , It is a series capacitor. It is a series inductor.

5. An impedance measurement device based on a source meter, used to implement the impedance measurement method based on a source meter according to any one of claims 1-4, characterized in that, The equipment includes a machine base (1), and a fixed limiting mechanism (2) for limiting and fixing multiple electrical components (6) under test is provided on one side of the top of the machine base (1). A lifting control unit (4) is provided on the outer wall of the machine base (1) near the lead wire of the electrical component (6) under test. The moving end of the lifting control unit (4) is provided with multiple sets of probe detection units (3) that are in contact with and connected to the lead wire of the electrical component (6) under test. An SMU (5) is provided on the top outer wall of one side of the machine base (1) and is electrically connected to the probe detection unit (3) for impedance measurement.

6. The impedance measurement device based on a source meter according to claim 5, characterized in that, The fixed limiting mechanism (2) includes a limiting platform (8) fixed to the outer wall of the top of the machine base (1) by bolts and multiple limiting opening slots (7) opened on the inner wall of the limiting platform (8) and matching the size of the electrical component (6) to be tested. A baffle (9) is provided at the side opening of the limiting opening slot (7). The baffle (9) is slidably connected to the limiting platform (8) by a pull rod (10). A spring (11) is sleeved on the outer wall of the pull rod (10). One end of the spring (11) is fastened to the side wall of the pull rod (10), and the other end of the spring (11) is fastened to the side wall of the limiting platform (8).

7. The impedance measurement device based on a source meter according to claim 5, characterized in that, The lifting control unit (4) includes a gantry frame (13), a first movable plate (14), and a second movable plate (15). The gantry frame (13) is fixed to the top outer wall of the machine base (1) by bolts. The first movable plate (14) is lifted and connected to the bottom of the gantry frame (13) by telescopic component (12). The second movable plate (15) is slidably connected to the bottom outer wall of the first movable plate (14) by guide rod (18). A second spring (17) is fastened between the first movable plate (14) and the second movable plate (15). Threaded holes (32) are provided on both sides of the second movable plate (15). Limit bolts are fitted to the inner walls of the threaded holes (32).

8. The impedance measurement device based on a source meter according to claim 7, characterized in that, The probe detection unit (3) includes multiple sets of probe assemblies (16) disposed on the second movable plate (15). The probe assembly (16) includes at least two sets of fixed probes (19) and movable probes (21) for pin clamping contact of the electrical component (6) under test. The fixed probes (19) are fixed to the bottom outer wall of the second movable plate (15), and the movable probes (21) are slidably connected to the inner wall of the second movable plate (15). The fixed probes (19) are connected to the test terminal of the SMU (5) through a serial / parallel switch. The top of the movable probe (21) is provided with an inclined guide (22), and the bottom of the movable plate (14) is fixed with an inclined limiting member (23) that is in active limiting cooperation with the inclined guide (22). The clamping contact surfaces of the fixed probe (19) and the movable probe (21) are both provided with toothed grooves (20).

9. An impedance measurement device based on a source meter according to claim 8, characterized in that, The serial / parallel switch includes a housing (24) and end caps (27) fixed to two stops on the housing (24). Multiple sets of connecting electrodes (26) are fixed to the side wall of the housing (24). The connecting electrodes (26) are electrically connected to the fixed probes (19). One of the end caps (27) has a busbar (28) fixedly embedded in its side wall. The inner wall of the outer shell (24) is rotatably connected to a rotating frame (29). The inner wall of the rotating frame (29) has multiple sets of transition electrodes one (30) and multiple sets of transition electrodes two (31) fixedly embedded in it. The multiple sets of transition electrodes one (30) are connected in parallel and then electrically connected to the busbar (28). The transition electrodes two (31) are connected in series and then electrically connected to the busbar (28). The busbar (28) is electrically connected to the detection and testing terminal of the SMU (5).

10. An impedance measurement device based on a source meter according to claim 9, characterized in that, Another end cap (27) has an electric motor (25) fixed to its outer wall by bolts, and the output shaft of the electric motor (25) is fixed to the outer wall at the rotation center of the rotating frame (29).

Images