Microwave plasma device and antenna coaxiality detection method thereof, storage medium

Abstract

The application discloses a microwave plasma device and an antenna coaxiality detection method thereof and a storage medium. The microwave plasma device comprises a reaction cavity, an antenna and a detection device. The upper end side wall of the reaction cavity is provided with a plurality of detection holes. The antenna is vertically installed at the upper end of the reaction cavity. The detection device is arranged outside the reaction cavity and comprises a rotating mechanism and a distance measuring sensor. The rotating mechanism drives the distance measuring sensor to rotate concentrically around the reaction cavity. When the distance measuring sensor rotates to the detection hole, transverse distance measuring laser is emitted to the antenna via the detection hole to determine the coaxiality deviation of the antenna and the reaction cavity. The application can quickly locate the antenna installation deviation on the reaction cavity, not only breaks away from the dependence on artificial experience, but also has objective and accurate detection results and high repeatability, thereby significantly improving the detection efficiency and process stability of the antenna coaxiality in the device.

Description

Technical Field

[0001] This invention relates to the technical field of plasma chemical vapor deposition, specifically to a microwave plasma device, a method for detecting the coaxiality of the antenna of a microwave plasma device, and a computer-readable storage medium. Background Technology

[0002] In microwave plasma chemical vapor deposition (MPCVD) equipment, the microwave antenna is a critical component, and its coaxiality directly affects the plasma excitation effect and process stability. Deterioration in the coaxiality between the antenna and the reaction cavity leads to a decrease in the coupling efficiency of the rectangular waveguide to the coaxial direction, resulting in changes in the electric field position. These changes in the electric field position further affect the resonant state of the cavity and the position of the plasma. However, since the antenna is typically mounted on the reaction cavity, there is a lack of effective monitoring methods to directly detect its coaxiality after equipment assembly.

[0003] Currently, the industry commonly uses subjective judgment methods relying on human experience to assess antenna installation quality. In actual production, when process anomalies occur within the reaction chamber, such as plasma position shift, decreased power transmission efficiency, or poor deposition uniformity, technicians first use a process of elimination to rule out possible causes before finally determining that the problem stems from antenna coaxiality deviation. This passive, subjective inspection method is highly dependent on the operator's personal experience and skill level, and its inspection efficiency is low. Furthermore, inconsistent judgment standards among different personnel lead to poor repeatability of evaluation results. Because this method lacks objective, quantifiable inspection indicators and cannot establish standardized inspection procedures, it is difficult to guarantee the consistency and reliability of inspection results.

[0004] To address the aforementioned problems in the existing technology, there is an urgent need in the field for an improved microwave plasma device that can quickly locate antenna installation deviations on the reaction cavity. This not only eliminates the reliance on manual experience but also provides objective, accurate, and highly repeatable test results, thereby significantly improving the detection efficiency and process stability of antenna coaxiality in the device. Summary of the Invention

[0005] The following provides a brief overview of one or more aspects to offer a basic understanding of them. This overview is not an exhaustive summary of all conceived aspects, nor is it intended to identify key or decisive elements of all aspects, nor to define the scope of any or all aspects. Its sole purpose is to present some concepts of one or more aspects in a simplified form as a prelude to the more detailed descriptions that follow.

[0006] To overcome the aforementioned deficiencies in the existing technology, this invention provides a microwave plasma device, a method for detecting the coaxiality of the antenna in the microwave plasma device, and a computer-readable storage medium. This method can quickly locate antenna installation deviations on the reaction cavity, eliminating reliance on manual experience and providing objective, accurate, and highly repeatable detection results. This significantly improves the detection efficiency and process stability of antenna coaxiality in the device.

[0007] Specifically, the microwave plasma device provided according to the first aspect of the present invention includes: a reaction cavity having a plurality of detection holes formed in its upper sidewall; an antenna longitudinally mounted on the upper end of the reaction cavity; and a detection device disposed outside the reaction cavity, including a rotating mechanism and a ranging sensor, wherein the rotating mechanism drives the ranging sensor to rotate concentrically around the reaction cavity, and when the ranging sensor rotates to the detection hole, it emits a transverse ranging laser through the detection hole to the antenna to determine the coaxiality deviation between the antenna and the reaction cavity.

[0008] Furthermore, in some embodiments of the present invention, a plurality of detection holes are formed on the upper sidewall of the reaction cavity to allow the ranging sensor to emit the lateral ranging laser to the antenna. The opening diameter of the detection hole is configured such that the operating wavelength of the microwave source is much larger than the cutoff wavelength corresponding to the detection hole, so that the microwave is in a cutoff state in the detection hole.

[0009] Furthermore, in some embodiments of the present invention, the ranging sensor includes a laser emitting end and a laser receiving end located on the same side. The antenna receives the transverse ranging laser emitted by the laser emitting end and reflects it to the laser receiving end. Based on the laser triangle ranging principle, the measured values ​​of multiple points of the antenna are obtained.

[0010] Furthermore, in some embodiments of the present invention, the rotating mechanism includes a drive motor and a split rotor assembly, wherein one end of the first rotor is connected to the drive motor and the other end is connected to the second rotor, the second rotor is provided with a distance measuring sensor, and the drive motor drives the distance measuring sensor to rotate via the split rotor assembly.

[0011] Furthermore, in some embodiments of the present invention, the rotating mechanism further includes a needle roller array disposed between the split rotor assembly and the reaction chamber, so that rolling friction is formed between the split rotor assembly and the reaction chamber.

[0012] Furthermore, in some embodiments of the present invention, the microwave plasma device further includes: a positioning fixture for calibrating the systematic error of the microwave plasma device via the positioning fixture and the detection device before the antenna is installed on the upper end of the reaction cavity.

[0013] Furthermore, in some embodiments of the present invention, the microwave plasma device further includes a controller configured to calibrate the systematic error of the microwave plasma device by: pre-inserting the positioning fixture into the upper end of the reaction cavity; rotating the ranging sensor to the positions of the plurality of detection holes and obtaining the previous values ​​of the plurality of points corresponding to the positioning fixture; and determining the systematic error of each detection hole position based on the difference between the previous value of each point and the theoretical value of the point corresponding to each detection hole position.

[0014] Furthermore, in some embodiments of the present invention, determining the coaxiality deviation between the antenna and the reaction cavity includes: removing the positioning fixture and inserting the antenna into the upper end of the reaction cavity; rotating the ranging sensor to the positions of the plurality of detection holes and acquiring the measured values ​​of the plurality of points corresponding to the antenna; eliminating the systematic error in the measured values ​​of each point by means of the difference between the measured values ​​of each point and the previous value of the corresponding point, and obtaining the true deviation of each point of the antenna; and determining the coaxiality deviation between the antenna and the reaction cavity based on the true deviations of the plurality of points.

[0015] Furthermore, in some embodiments of the present invention, determining the coaxiality deviation between the antenna and the reaction cavity based on the actual deviations of the plurality of points includes: determining the actual center coordinates of the antenna based on the actual deviations of the plurality of points using a geometric circle fitting algorithm; determining the coaxiality deviation value of the antenna based on the actual center coordinates and the theoretical center coordinates of the reaction cavity; and determining the direction of the coaxiality deviation of the antenna based on the sign and magnitude of the actual center coordinates.

[0016] Furthermore, the antenna coaxiality detection method of the microwave plasma device provided by the second aspect of the present invention, implemented via the microwave plasma device provided by the first aspect of the present invention, includes: driving a ranging sensor to rotate concentrically around the reaction cavity via a rotating mechanism in the detection device; and emitting a transverse ranging laser to the antenna via the ranging sensor to determine the coaxiality deviation between the antenna and the reaction cavity.

[0017] Furthermore, according to a third aspect of the present invention, a computer-readable storage medium is provided having computer instructions stored thereon. When the computer instructions are executed by a processor, the antenna coaxiality detection method for the microwave plasma device described above, as provided in the second aspect of the present invention, is implemented.

[0018] This invention provides a microwave plasma device, a method for detecting the coaxiality of the antenna in the microwave plasma device, and a computer-readable storage medium. This method can quickly locate antenna installation deviations on the reaction cavity, eliminating reliance on manual experience and providing objective, accurate, and highly repeatable detection results. This significantly improves the detection efficiency and process stability of antenna coaxiality in the device. Attached Figure Description

[0019] The above-described features and advantages of the present invention will be better understood after reading the following detailed description of embodiments of the present disclosure in conjunction with the accompanying drawings. In the drawings, components are not necessarily drawn to scale, and components having similar related characteristics or features may have the same or similar reference numerals.

[0020] Figure 1 A cross-sectional structural schematic diagram of a microwave plasma device provided according to some embodiments of the present invention is shown.

[0021] Figure 2 A schematic diagram of the cavity structure of a reaction chamber provided according to some embodiments of the present invention is shown.

[0022] Figure 3 A top view of the structure of a microwave plasma device provided according to some embodiments of the present invention is shown.

[0023] Figure 4 A distance measurement schematic diagram of a distance measuring sensor provided according to some embodiments of the present invention is shown.

[0024] Figure 5 A schematic diagram of the external structure of a rotating mechanism provided according to some embodiments of the present invention is shown.

[0025] Figure 6 An exploded view of a rotating mechanism provided according to some embodiments of the present invention is shown.

[0026] Figure 7 A top view of the rotating mechanism provided according to some embodiments of the present invention is shown.

[0027] Figure 8 A calibration schematic diagram of a microwave plasma device provided according to some embodiments of the present invention is shown.

[0028] Figure 9 A structural block diagram of a microwave plasma device provided according to some embodiments of the present invention is shown.

[0029] Figure 10 A flowchart of a method for detecting the coaxiality of an antenna in a microwave plasma device, according to some embodiments of the present invention, is shown.

[0030] Figure label: 100 Microwave plasma equipment; 110 Reaction Chamber; 111 Upper cylinder of the cavity; 112 Sidewall; 120 antenna; 121 Rectangular waveguide; 130 Detection device; 131 Rotating mechanism; 132 Distance sensor; 133 detection wells; 134 Drive motor; 135 needle rollers; 136 Drive gear; 310 Lateral ranging laser; 320 testing area; 410 Laser emitter; 420 laser receiver; 510 Split rotor assembly; 511 First rotor; 512 Second rotor; 513 Transmission gears; 610 Positioning fixture; 710 controller; 720 memory. Detailed Implementation

[0031] The following specific embodiments illustrate the implementation of the present invention. Those skilled in the art can easily understand other advantages and effects of the present invention from the content disclosed in this specification. Although the description of the present invention is presented in conjunction with preferred embodiments, this does not mean that the features of the invention are limited to these embodiments. On the contrary, the purpose of describing the invention in conjunction with embodiments is to cover other options or modifications that may be derived based on the claims of the present invention. To provide a thorough understanding of the invention, many specific details will be included in the following description. The invention may also be implemented without using these details. Furthermore, to avoid confusion or obscuring the focus of the invention, some specific details will be omitted in the description.

[0032] In the description of this invention, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "linking" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this invention based on the specific circumstances.

[0033] Furthermore, the terms "upper," "lower," "left," "right," "top," "bottom," "horizontal," and "vertical" used in the following description should be understood as the orientations shown in the relevant paragraphs and accompanying drawings. These relative terms are for illustrative purposes only and do not imply that the described apparatus must be manufactured or operated in a specific orientation, and therefore should not be construed as limiting the invention.

[0034] It is understood that although terms such as "first," "second," and "third" may be used herein to describe various components, regions, layers, and / or parts, these components, regions, layers, and / or parts should not be limited by these terms, and these terms are only used to distinguish different components, regions, layers, and / or parts. Therefore, the first components, regions, layers, and / or parts discussed below may be referred to as second components, regions, layers, and / or parts without departing from some embodiments of the present invention.

[0035] As mentioned above, since antennas are typically mounted on the reaction chamber, there is a lack of effective monitoring methods to directly test the antenna's coaxiality after equipment assembly. Currently, the industry generally uses subjective judgment methods relying on human experience to evaluate antenna installation quality. In actual production, when process abnormalities such as plasma position shift, decreased power transmission efficiency, or poor deposition uniformity occur within the reaction chamber, technicians first use a process of elimination to check possible causes one by one before finally determining that the problem stems from antenna coaxiality deviation. This passive, subjective testing method is highly dependent on the operator's personal experience and skill level, and its testing efficiency is low. Moreover, inconsistent judgment standards among different personnel lead to poor repeatability of evaluation results. Because this method lacks objective, quantifiable testing indicators and cannot form a standardized testing process, it is difficult to guarantee the consistency and reliability of the test results.

[0036] To address the aforementioned problems in the prior art, this invention provides a microwave plasma device, a method for detecting the coaxiality of the antenna in the microwave plasma device, and a computer-readable storage medium. This method can quickly locate antenna installation deviations on the reaction cavity, eliminating reliance on manual experience and providing objective, accurate, and highly repeatable detection results. Consequently, it significantly improves the detection efficiency and process stability of antenna coaxiality in the device.

[0037] In some non-limiting embodiments, the microwave plasma device provided in the first aspect of the present invention can be used to implement the antenna coaxiality detection method of the microwave plasma device provided in the second aspect of the present invention.

[0038] The working principle of the microwave plasma device described above will be described below with reference to some embodiments of antenna coaxiality detection methods for microwave plasma devices. Those skilled in the art will understand that these embodiments of antenna coaxiality detection methods for microwave plasma devices are merely non-limiting implementations provided by the present invention, intended to clearly demonstrate the main concepts of the invention and provide specific solutions convenient for public implementation, rather than limiting all operating methods or functions of the microwave plasma device. Similarly, the microwave plasma device is also only one non-limiting implementation provided by the present invention and does not limit the entities implementing the steps in the antenna coaxiality detection methods for these microwave plasma devices.

[0039] First, please refer to Figure 1 . Figure 1 A cross-sectional structural schematic diagram of a microwave plasma device provided according to some embodiments of the present invention is shown.

[0040] like Figure 1 As shown, in some embodiments of the present invention, the microwave plasma device may include a reaction cavity 110, an antenna 120, and a detection device 130.

[0041] Specifically, combined Figure 2 A shared understanding. Figure 2 A schematic diagram of the cavity structure of a reaction chamber provided according to some embodiments of the present invention is shown.

[0042] like Figure 1 and Figure 2 As shown, in some embodiments, the upper end of the reaction cavity 110 may be provided with a cavity upper cylinder 111. The antenna 120 can be inserted into the cavity upper cylinder 111 to be longitudinally mounted on the upper end of the reaction cavity 110. In the microwave plasma device 100, the input end of the rectangular waveguide 121 is connected to a microwave source (not shown in the figure), and its end is connected to the antenna 120. The microwave energy generated by the microwave source is transmitted directionally in a specific mode through the rectangular waveguide 121. The antenna 120 is used to effectively radiate the microwave energy into the reaction cavity 110 below, forming the required electric field distribution to excite the excitation plasma required for the process.

[0043] Continue as Figure 1As shown, the detection device 130 is located outside the reaction chamber 110. The detection device 130 may include a rotating mechanism 131 and a ranging sensor 132. The rotating mechanism 131 can drive the ranging sensor 132 to rotate concentrically around the reaction chamber 110. A lateral ranging laser is emitted to the antenna 120 via the ranging sensor 132 to determine the coaxiality deviation between the antenna 120 and the reaction chamber 110.

[0044] Further, please see Figure 3 . Figure 3 A top view of the structure of a microwave plasma device provided according to some embodiments of the present invention is shown.

[0045] Combination Figure 1 , Figure 2 and Figure 3 As shown, in some embodiments, the upper sidewall 112 of the reaction chamber 110 may have multiple detection holes 133. After the ranging sensor 132 rotates to the detection area 320, it emits a lateral ranging laser 310 through the detection holes 133 to the antenna 120 inserted into the upper cylinder 111 of the cavity.

[0046] Furthermore, in some embodiments, the opening diameter of the detection aperture 133 preferably meets the microwave cutoff condition so that microwaves in the operating frequency band cannot propagate within the openings of these detection apertures 133, thereby suppressing microwave energy leakage within the reaction cavity 110. If microwave energy leaks outward from the detection aperture 133, it will not only cause serious electromagnetic radiation pollution, endangering the health of operators, but also cause strong electromagnetic interference to the ranging sensor 132, leading to distorted ranging data or even sensor failure.

[0047] Specifically, according to the standard microwave cutoff theory, when the operating wavelength λ is much larger than the cutoff wavelength λc, the microwave is cut off and cannot continue to propagate forward. Based on this, the opening diameter of the detection hole 133 can be configured such that the operating wavelength λ of the microwave source is much larger than the cutoff wavelength λc corresponding to the detection hole 133, so that the microwave is in a cutoff state in the detection hole 133.

[0048] For example, assuming the microwave source operates at a frequency of 915 MHz, its operating wavelength λ is approximately 328 mm. The cutoff wavelength λc is determined based on the aperture diameter d of the detection aperture 133. For a circular cross-section waveguide / circular aperture, the lowest order transmission mode is TE. 11 The mode has a cutoff wavelength of: Where d is the aperture diameter, and 1.841 is the TE value. 11 The first-order derivative of the Bessel function corresponding to the modulus. When the aperture diameter d of the detection aperture 133 is 20mm, the cutoff wavelength is... It is approximately 34mm. This is because the operating wavelength of microwaves (λ=328mm) is much larger than the cutoff wavelength. Therefore, the operating wavelength (λ=328mm) cannot propagate through the detection hole 133 with an opening diameter of 20mm. That is, the microwave is in a cutoff state in the detection hole 133.

[0049] Furthermore, in some preferred embodiments, according to microwave shielding engineering principles, to avoid microwave energy leakage from the cavity, the aperture diameter d of the detection hole 133 can be less than 1 / 16 of the operating wavelength λ (i.e., This value allows the aperture size d to be much smaller than the operating wavelength λ, preventing the electromagnetic wave from forming an effective transmission mode and resulting in a field strength attenuation of over 40dB, thus achieving a shielding effect with no energy leakage. Continuing with the example of the aforementioned 915MHz microwave source, the operating wavelength λ is approximately 328mm. 1 / 16 of the operating wavelength λ is 20.5mm. Therefore, the detection aperture 133 with an aperture diameter d of 20mm perfectly satisfies this requirement. .

[0050] In the embodiments provided by this invention, by limiting the opening diameter of the detection hole 133, microwave cutoff at the detection hole 133 can be achieved, thereby greatly reducing the risk of microwave leakage within the reaction cavity 110. This invention enables real-time detection of antenna position offset while the microwave plasma equipment is in operation, i.e., during the MPCVD process, ensuring not only the safety of operators but also the safe and stable operation of the equipment.

[0051] Next, please refer to Figure 4 . Figure 4 A distance measurement schematic diagram of a distance measuring sensor provided according to some embodiments of the present invention is shown.

[0052] like Figure 4 As shown, in some optional embodiments, the ranging sensor 132 may include a laser emitter 410 and a laser receiver 420 located on the same side. The laser emitter 410 emits a lateral ranging laser towards the antenna 120. After receiving the lateral ranging laser, the antenna 120 reflects it back to the laser receiver 420. Based on the principle of laser triangulation, the measured values ​​of multiple points on the antenna 120 can be calculated.

[0053] Specifically, laser triangulation is a non-contact ranging technology based on geometrically similar triangles. Its core principle is to calculate the distance between the object being measured and the sensor by utilizing the fixed geometric relationships between the laser emitter, reflector, and receiver. For example... Figure 4As shown, the baseline L between the light emission point of the laser emitter 410 and the optical center of the lens of the laser receiver 420, and the imaging focal length f between the lens of the laser receiver 420 and the photosensitive element (CCD / CMOS) are known parameters calibrated by the system. The object distance D from the plane where the laser emitter 410 is located to the surface of the antenna 120 under test is the measured value of the point position of the antenna 120 to be tested.

[0054] Furthermore, the principle of laser triangulation is as follows: A transverse ranging laser beam is emitted from the laser transmitter 410 and illuminates the surface of the antenna 120 at a fixed angle, forming a light spot. The transverse ranging laser undergoes diffuse reflection (or specular reflection) upon encountering the antenna 120. The reflected light is focused by the lens of the laser receiver 420, forming a light spot image on the photosensitive element. When the distance between the antenna and the laser transmitter 410 changes, the incident angle of the reflected light changes. The position of the light spot on the photosensitive element of the laser receiver 420 will shift laterally. The closer the distance between the antenna and the ranging sensor 132, the larger the shift x. The farther the distance between the line and the ranging sensor 132, the smaller the shift x. Using the principle of similar triangles, combined with the known baseline L and focal length f, the object distance can be derived from the shift x. .

[0055] In the above optional embodiments, based on the laser triangle ranging principle, an optical non-contact measurement method is adopted, which can accurately obtain the measured values ​​of multiple points on the surface of antenna 120, with high detection accuracy and simple component structure.

[0056] In some alternative embodiments, time-of-flight (TOF) ranging, an optical non-contact measurement method, can also be used to acquire the measured value of the antenna's position. For example... Figure 4 As shown, both the laser transmitter 410 and the laser receiver 420 are disposed on one side of the cavity sidewall 112. The laser transmitter 410 emits a lateral ranging laser towards the antenna 120. This lateral ranging laser reaches the surface of the antenna 120 and is received by the laser receiver 420 after reflection. In this embodiment, by detecting the flight time of the laser signal, the distance between the antenna 120 and the ranging sensor 132 can be calculated, i.e., the measured value of the antenna 120's position.

[0057] Those skilled in the art will understand that the laser triangulation and time-of-flight ranging methods listed above are merely two non-limiting embodiments of the present invention, intended to clearly demonstrate the main concept of the invention and provide two specific solutions convenient for public implementation, rather than limiting the scope of protection of the present invention. Optionally, in other embodiments, those skilled in the art may also employ other equivalent ranging methods based on the concept of the present invention to achieve the same technical effect.

[0058] However, it should be noted that when using laser ranging, the laser emitter 410 and laser receiver 420 of the ranging sensor 132 are preferably arranged on the same side opposite to the antenna. In existing methods for detecting the coaxiality of common antennas, a laser emitter and receiver are typically installed at opposite ends of the antenna, and the coaxiality deviation is detected by creating a through-hole inside the antenna. However, in MPCVD equipment, such as... Figure 1 As shown, since the area directly in front of the antenna 120 is a high-temperature plasma region, the high-temperature environment can easily burn out the sensor and optical components. Furthermore, the plasma strongly absorbs, refracts, and scatters the laser beam, preventing the laser receiver from receiving the effective reflected light and causing ranging failure. Therefore, in MPCVD equipment, no monitoring facilities can be installed in the space between the antenna 120 and the reaction chamber 110.

[0059] Furthermore, in some embodiments, a water-cooling pipeline can be installed inside the antenna 120 to continuously cool the antenna 120 during equipment operation. This counteracts the radiant heat from the high-temperature plasma and the heat generated by microwave losses, preventing the antenna from overheating, deforming, melting, or deteriorating its electrical performance, thus ensuring the antenna's structural strength, microwave transmission efficiency, and the stability of the equipment's manufacturing process. Therefore, the method of detecting internal openings in the aforementioned general antenna coaxiality detection method is not suitable for MPCVD equipment.

[0060] Next, please refer to Figure 5 , Figure 6 and Figure 7 . Figure 5 A schematic diagram of the external structure of a rotating mechanism provided according to some embodiments of the present invention is shown. Figure 6 An exploded view of a rotating mechanism provided according to some embodiments of the present invention is shown. Figure 7 A top view of the rotating mechanism provided according to some embodiments of the present invention is shown.

[0061] Combination Figure 3 , Figure 5 , Figure 6 and Figure 7 As shown, in some embodiments, the rotating mechanism 131 may include a drive motor 134 and a split rotor assembly 510. The split rotor assembly 510 is mounted on the outer contour of the cavity and includes a first rotor 511 and a second rotor 512. One end of the first rotor 511 is connected to the drive motor 134, and the other end is connected to the second rotor 512. A distance sensor 132 is provided on the second rotor 512. The drive motor 134 drives the distance sensor 132 to rotate concentrically around the reaction cavity 110 via the split rotor assembly 510 (the rotation path of the distance sensor 132 is as follows). Figure 3(As shown by the arc arrow in the diagram). High-precision ranging sensors 132 are installed at corresponding positions in multiple detection zones 320. The ranging sensors 132 are driven to rotate to a specific point of the detection hole 133 in the detection zone 320 by the rotating mechanism 131, so as to measure the position of the antenna 120 in real time.

[0062] Specifically, such as Figure 5 and Figure 6 As shown, the drive motor 134 is connected to the drive gear 136. The drive gear 136 meshes with the transmission gear 513. The first rotor 511 is connected to the transmission gear 513. The first rotor 511 and the second rotor 512 can be coupled to form a complete rotor structure. When the drive motor 134 is working, the drive gear 136 rotates, driving the transmission gear 513 to rotate synchronously. Through the transmission of the transmission gear 513, the first rotor 511 is driven to rotate. The second rotor 512 can also rotate synchronously through the push of the first rotor 511, thereby driving the ranging sensor 132 to rotate.

[0063] In this embodiment, a split rotor assembly 510, composed of a first rotor 511 and a second rotor 512, is used, which facilitates installation, disassembly, and maintenance. Because the shape of some MPCVD equipment is fixed and influenced by microwave transmission characteristics, the cavity shape is generally complex. For example... Figure 2 As shown, the reaction chamber 110 typically has large diameter flanges at both ends and a small diameter at the middle testing position. Therefore, a common one-piece rotor structure cannot be fitted onto the reaction chamber 110. However, the split rotor assembly in this embodiment can be adapted to different types of chambers, allowing for plug-and-play operation. Even with complex external contours of the MPCVD chamber, this invention ensures the feasibility of mechanical assembly.

[0064] Furthermore, returning to Figure 1 As shown, in some optional embodiments, the rotating mechanism 131 may further include a needle roller array 135. The needle roller array 135 is disposed between the split rotor assembly 510 and the reaction chamber 110, converting the original sliding friction between the two into rolling friction, thereby significantly reducing the frictional resistance when the split rotor assembly 510 rotates. The high-precision needle roller array 135 can improve the smoothness and rotational accuracy of the split rotor assembly 510 during rotation.

[0065] Next, please refer to Figure 8 . Figure 8 A calibration schematic diagram of a microwave plasma device provided according to some embodiments of the present invention is shown.

[0066] like Figure 8As shown, in some embodiments, the microwave plasma device 100 may also include a positioning fixture 610. Before the antenna 120 is mounted to the upper end of the reaction cavity 110, the systematic error of the microwave plasma device 100 is calibrated via the positioning fixture 610 and the detection device 130.

[0067] Specifically, please combine Figure 9 and Figure 10 A shared understanding. Figure 9 A structural block diagram of a microwave plasma device provided according to some embodiments of the present invention is shown. Figure 10 A flowchart of a method for detecting the coaxiality of an antenna in a microwave plasma device, according to some embodiments of the present invention, is shown.

[0068] like Figure 9 As shown, in some non-limiting embodiments, the microwave plasma device 100 provided in the first aspect of the present invention may include a controller 710 and a memory 720. Here, the memory 720 includes, but is not limited to, the computer-readable storage medium provided in the third aspect, on which computer instructions are stored. The controller 710 is connected to the memory 720 and configured to execute the computer instructions stored in the memory 720 to implement the antenna coaxiality detection method of the microwave plasma device as provided in the second aspect of the present invention.

[0069] like Figure 10 As shown, in some embodiments of the present invention, the antenna coaxiality detection method of a microwave plasma device may include steps S810-S820. Step S810: The ranging sensor is driven to rotate concentrically around the reaction cavity via a rotating mechanism in the detection device. Step S820: A transverse ranging laser is emitted to the antenna via the ranging sensor to determine the coaxiality deviation between the antenna and the reaction cavity.

[0070] Specifically, in the microwave plasma device 100, the installation positions of sensors, detection holes, and drive mechanisms inevitably contain systematic errors such as machining and assembly tolerances. Therefore, if step S810 is executed directly, the obtained measured antenna position data will be a mixture of the actual antenna position value and the systematic errors of the sensors, etc. Since it is impossible to distinguish whether the influencing factor of this mixture is antenna installation offset or the installation offset of other components such as sensors, the obtained measurement results are of no reference value and will lead to measurement failure.

[0071] In some preferred embodiments, before performing the above step S810, the positioning fixture 610 can be used to calibrate and eliminate systematic errors.

[0072] Specifically, such as Figure 8As shown, in some embodiments, since the positioning fixture 610 is a precision-machined standard part, its outer circle and the inner hole of the cavity are in a high-precision fit. Therefore, the central axis O of the positioning fixture 610 itself is... tool It can be defined as the ideal theoretical center of the reaction chamber 110 (i.e., the absolute zero point of measurement). Based on this, the positioning fixture 610 can be pre-inserted into the upper cylinder 111 of the reaction chamber 110.

[0073] After that, as Figure 2 As shown, the controller 710 controls the rotating mechanism 131 to drive the ranging sensor 132 to the position of multiple detection holes 133, and causes it to emit a lateral ranging laser towards the positioning fixture 610 for laser ranging. The controller 710 acquires the previous values ​​V of multiple points corresponding to the positioning fixture 610. tool For example, controller 710 controls the ranging sensor 132 to orbit around the theoretical center O of the aforementioned cavity. tool Rotate the device and collect readings at three evenly distributed detection points (e.g., 0°, 120°, 240°), recording these readings as the previous value at each point: V. tool 1 V tool 2 V tool 3 These three values ​​represent the distance of the ranging sensor 132 at the known theoretical center O. tool The measurement results are as follows.

[0074] Subsequently, based on the previous value V at each point tool The theoretical value V of the point corresponding to each detection hole position ideal The difference is used to determine the systematic error E at the position of each detection hole. ideal The theoretical measurement value of an ideally centered tooling when components such as sensors are error-free. Under ideal conditions, the theoretical value V at each point... ideal They should be completely equal. Continuing with the above example, the systematic errors for each detection hole position are: E1 = V tool 1 -V ideal E2=V tool 2 -V ideal E3=V tool 3 -V ideal In this embodiment, through the aforementioned preliminary steps, by using the previous values ​​of multiple points on the positioning fixture 610, all systematic errors of the detection system can be recorded, which is equivalent to performing a zero-point calibration on the system.

[0075] Then, steps S810 and S810 can be executed.

[0076] Specifically, the positioning fixture 610 is removed. Then, the installation state of the detection device 130 (e.g., ranging sensor 132, drive motor 134, detection holes 133) is kept completely unchanged to ensure that the aforementioned system errors (e.g., E1, E2, and E3) remain constant. The antenna 120 is inserted into the upper cylinder 111 of the reaction chamber 110. Then, the controller 710 controls the rotating mechanism 131 to drive the ranging sensor 132 to rotate again to the positions of the multiple detection holes 133, causing it to emit a transverse ranging laser towards the antenna 120 for laser ranging. The controller 710 acquires the measured values ​​V of multiple points corresponding to the antenna 120. ant For example, the drive motor 134 drives the ranging sensor 132 to collect readings at the three identical detection apertures 133 positions (e.g., 0°, 120°, 24°), which are recorded as the antenna's measured value: V. ant 1 V ant 2 V ant 3 The three measured values ​​for the antennas here are a mixture of the actual antenna locations and system errors, i.e., V. ant 1 =D ant 1 +E1, V ant 2 = D ant 2 +E2, V ant 3 = D ant 3 +E3. D ant 1 D ant 2 D ant 3 It is antenna 120 relative to the theoretical center O tool The actual value of the point.

[0077] Subsequently, the measured values ​​V at each point were used. ant Its corresponding point previous value V tool The difference is eliminated by the measured values ​​V at each point. ant The systematic error E in the antenna 120 is used to obtain the true deviation of each point. Measured value V at the location ant Its corresponding point previous value V tool The formula for the difference is as follows:

[0078] According to the three formulas above, the systematic errors E1, E2, and E3 are completely canceled out, resulting in... , and It only reflects the position of each point on the surface of antenna 120 relative to the theoretical center O. tool The actual position deviation is independent of the systematic errors or installation errors of the ranging sensor 132 and other mechanisms.

[0079] Then, based on the actual deviation at multiple points The coaxiality deviation between antenna 120 and reaction cavity was determined.

[0080] Specifically, in some embodiments, a geometric circle fitting algorithm (e.g., least squares method) can be used to determine the true deviations of the aforementioned multiple points. , and Determine the actual center coordinates O of antenna 120. ant By comparing the actual center coordinates O of antenna 120 ant The theoretical center coordinates O of reaction chamber 110 tool The actual center coordinates O of antenna 120 can be obtained. ant Relative to the theoretical center coordinate O of the cavity tool coordinate offset ( , ).

[0081] Furthermore, by calculating the actual center coordinates O of antenna 120 ant Relative to the theoretical center coordinate O of the cavity tool The coaxiality deviation of antenna 120 can be obtained by measuring the straight-line distance. The formula for calculating the coaxiality deviation is as follows: .

[0082] In addition, according to the actual center coordinates O ant By determining the sign and magnitude of the sign, the coaxiality deviation direction of antenna 120 can be calculated. Specifically, this can be achieved using the formula for calculating the coaxiality deviation angle θ: This allows us to obtain the coaxial offset angle θ of antenna 120. For example, the coordinate offset ( , )middle = +0.1 mm, = +0.1732 mm. At this time, the coaxiality deviation of antenna 120 is 0.2 mm, and its coaxial deviation angle θ is 60°. That is to say, the center of antenna 120 is offset by 0.2 mm in the 60° direction (upper right direction) from the 0° reference. For example, the coordinate offset ( , )middle = -0.1732 mm, = +0.1mm. At this time, the coaxial deviation angle θ of antenna 120 is 150°, which means that antenna 120 is deflected to the upper left by 150°.

[0083] In the above-described embodiments provided by the present invention, the coaxiality detection accuracy of the antenna 120 relative to the theoretical center of the cavity can reach 0.01 mm after system error compensation by the positioning fixture 610.

[0084] This invention employs a single ranging sensor 132, driven by a rotating mechanism 131 to perform concentric circular motion around the reaction cavity 110. This allows for online detection of multiple points on the surface of the antenna 120 under the same reference condition, thereby obtaining the accurate coaxiality deviation between the antenna 120 and the reaction cavity 110. Since only one ranging sensor is used in this invention, systematic errors such as installation eccentricity, zero-point drift, and detection hole deviation can be calibrated once using the positioning fixture 160 to obtain a unified error compensation model. During subsequent antenna measurements, all data are subtracted from the same set of compensation values ​​to completely offset systematic errors, ensuring that the actual deviation of the antenna points is relative to the same reference. In contrast, the traditional distributed multi-point detection method, where multiple ranging sensors are distributed around the object being measured, requires a large number of sensors, resulting in high detection costs, and also leads to poor consistency in the detection reference of the results. Each ranging sensor has its own independent systematic error (e.g., zero-point offset of sensor A +0.02mm, zero-point offset of sensor B -0.03mm, and zero-point offset of sensor C +0.01mm). Furthermore, each sensor has its own different installation deviations. Therefore, multiple sensors cannot share the same theoretical reference center, leading to inconsistent calibration of the detection results. Errors will accumulate and become chaotic, ultimately preventing the accurate determination of the antenna coaxiality deviation.

[0085] This concludes the basic description of the main structure of the microwave plasma device provided in the first and second aspects of the present invention, as well as the main steps of the antenna coaxiality detection method. By obtaining the deviation parameters of the antenna coaxiality in the microwave plasma device 100 and their changes, the influence of antenna position changes on the plasma can be observed, thereby optimizing the design of the antenna mechanism.

[0086] In summary, this invention provides a microwave plasma device, a method for detecting the coaxiality of the antenna in the microwave plasma device, and a computer-readable storage medium, which can quickly locate antenna installation deviations on the reaction cavity. This not only eliminates the reliance on manual experience but also provides objective, accurate, and highly repeatable detection results, thereby significantly improving the detection efficiency and process stability of antenna coaxiality in the device.

[0087] Although the methods described above are illustrated and depicted as a series of actions for the sake of simplicity, it should be understood and appreciated that these methods are not limited by the order of the actions, as some actions may occur in a different order and / or concurrently with other actions from the illustrations and descriptions herein or not illustrated and described herein but which may be understood by those skilled in the art, according to one or more embodiments.

[0088] Those skilled in the art will further appreciate that the various illustrative logic blocks, modules, circuits, and algorithm steps described in conjunction with the embodiments disclosed herein can be implemented as electronic hardware, computer software, or a combination of both. To clearly illustrate this interchangeability between hardware and software, the various illustrative components, blocks, modules, circuits, and steps are described above in a generalized manner in terms of their functionality. Whether such functionality is implemented as hardware or software depends on the specific application and the design constraints imposed on the overall system. Those skilled in the art may implement the described functionality in different ways for each specific application, but such implementation decisions should not be construed as departing from the scope of the invention.

[0089] The various illustrative logic modules and circuits described in conjunction with the embodiments disclosed herein may be implemented or performed using a general-purpose processor, a digital signal processor (DSP), an application-specific integrated circuit (ASIC), a field-programmable gate array (FPGA) or other programmable logic device, discrete gate or transistor logic, discrete hardware components, or any combination thereof designed to perform the functions described herein. The general-purpose processor may be a microprocessor, but in alternatives, it may be any conventional processor, controller, microcontroller, or state machine. The processor may also be implemented as a combination of computing devices, such as a combination of a DSP and a microprocessor, multiple microprocessors, one or more microprocessors cooperating with a DSP core, or any other such configuration.

[0090] The steps of the methods or algorithms described in conjunction with the embodiments disclosed herein may be embodied directly in hardware, in a software module executed by a processor, or in a combination of both. The software module may reside in RAM memory, flash memory, ROM memory, EPROM memory, EEPROM memory, registers, hard disk, removable disk, CD-ROM, or any other form of storage medium known in the art. An exemplary storage medium is coupled to a processor such that the processor can read and write information to / from the storage medium. In an alternative, the storage medium may be integrated into the processor. The processor and storage medium may reside in an ASIC. The ASIC may reside in a user terminal. In an alternative, the processor and storage medium may reside as discrete components in the user terminal.

[0091] In one or more exemplary embodiments, the described functionality may be implemented in hardware, software, firmware, or any combination thereof. If implemented in software as a computer program product, the functionality may be stored or transmitted as one or more instructions or code on or through a computer-readable medium. A computer-readable medium includes both computer storage media and communication media, encompassing any medium that facilitates the transfer of a computer program from one location to another. A storage medium may be any available medium accessible to a computer. By way of example and not limitation, such a computer-readable medium may include RAM, ROM, EEPROM, CD-ROM or other optical disc storage, disk storage or other magnetic storage devices, or any other medium that can be used to carry or store desired program code in the form of instructions or data structures and is accessible to a computer. Any connection is also legitimately referred to as a computer-readable medium. For example, if the software is transmitted from a website, server, or other remote source using coaxial cable, fiber optic cable, twisted pair, digital subscriber line (DSL), or wireless technologies such as infrared, radio, and microwave, then the coaxial cable, fiber optic cable, twisted pair, DSL, or wireless technologies such as infrared, radio, and microwave are included in the definition of a medium. As used in this article, disk and disc include compact discs (CDs), laser discs, optical discs, digital multi-purpose discs (DVDs), floppy disks, and Blu-ray discs. Disks typically reproduce data magnetically, while discs reproduce data optically using lasers. Combinations of these should also be included within the scope of computer-readable media.

[0092] The prior description of this disclosure is provided to enable any person skilled in the art to make or use this disclosure. Various modifications to this disclosure will be apparent to those skilled in the art, and the general principles defined herein may be applied to other variations without departing from the spirit or scope of this disclosure. Therefore, this disclosure is not intended to be limited to the examples and designs described herein, but should be accorded the widest scope consistent with the principles and novel features disclosed herein.

Claims

1. A microwave plasma device, characterized in that, include: The reaction chamber has multiple detection holes on its upper sidewall. An antenna is mounted longitudinally at the upper end of the reaction chamber; as well as The detection device, located outside the reaction cavity, includes a rotating mechanism and a ranging sensor. The rotating mechanism drives the ranging sensor to rotate concentrically around the reaction cavity. When the ranging sensor rotates to the detection hole, it emits a lateral ranging laser through the detection hole to the antenna to determine the coaxiality deviation between the antenna and the reaction cavity.

2. The microwave plasma device as described in claim 1, characterized in that, The opening diameter of the detection hole is configured such that the operating wavelength of the microwave source is much larger than the cutoff wavelength corresponding to the detection hole, so that the microwave is in a cutoff state in the detection hole.

3. The microwave plasma device as described in claim 2, characterized in that, The ranging sensor includes a laser transmitter and a laser receiver located on the same side. The antenna receives the transverse ranging laser emitted by the laser transmitter and reflects it to the laser receiver. Based on the laser triangle ranging principle, the measured values ​​of multiple points of the antenna are obtained.

4. The microwave plasma device as described in claim 1, characterized in that, The rotating mechanism includes a drive motor and a split rotor assembly. One end of the first rotor is connected to the drive motor, and the other end is connected to the second rotor. The second rotor is equipped with a distance measuring sensor, and the drive motor drives the distance measuring sensor to rotate via the split rotor assembly.

5. The microwave plasma device as described in claim 4, characterized in that, The rotating mechanism also includes a needle roller array, which is disposed between the split rotor assembly and the reaction chamber, so that rolling friction is formed between the split rotor assembly and the reaction chamber.

6. The microwave plasma device as described in claim 3, characterized in that, Also includes: A positioning fixture is used to calibrate the systematic error of the microwave plasma device via the positioning fixture and the detection device before the antenna is installed on the upper end of the reaction cavity.

7. The microwave plasma device as described in claim 6, characterized in that, It also includes a controller configured such that the systematic errors in calibrating the microwave plasma device include: The positioning fixture is pre-inserted into the upper end of the reaction chamber; The ranging sensor is rotated to the positions of the multiple detection holes, and the previous values ​​of multiple points corresponding to the positioning fixture are obtained; and The systematic error of each detection hole position is determined based on the difference between the previous value of each point and the theoretical value of the point corresponding to each detection hole position.

8. The microwave plasma device as described in claim 7, characterized in that, Determining the coaxiality deviation between the antenna and the reaction cavity includes: Remove the positioning fixture and insert the antenna into the upper end of the reaction chamber; The ranging sensor is rotated to the positions of multiple detection holes, and the measured values ​​of multiple points corresponding to the antenna are obtained; By using the difference between the measured value at each location and its corresponding previous value, systematic errors in the measured values ​​at each location are eliminated, thus obtaining the true deviation of each location of the antenna; and Based on the actual deviations at multiple points, the coaxiality deviation between the antenna and the reaction cavity is determined.

9. The microwave plasma device as described in claim 8, characterized in that, Determining the coaxiality deviation between the antenna and the reaction cavity based on the actual deviations of multiple points includes: The actual center coordinates of the antenna are determined by using a geometric circle fitting algorithm based on the actual deviations of multiple points. Based on the actual center coordinates and the theoretical center coordinates of the reaction cavity, determine the coaxiality deviation value of the antenna; and The coaxiality deviation direction of the antenna is determined based on the sign and magnitude of the actual center coordinates.

10. A method for detecting the coaxiality of an antenna in a microwave plasma device, characterized in that, The antenna coaxiality detection method, implemented via any one of claims 1 to 9, comprises: The ranging sensor is driven to rotate concentrically around the reaction chamber via a rotating mechanism in the detection device; and A lateral ranging laser is emitted to the antenna via the ranging sensor to determine the coaxiality deviation between the antenna and the reaction cavity.

11. A computer-readable storage medium storing computer instructions thereon, characterized in that, When the computer instructions are executed by the controller, the antenna coaxiality detection method of the microwave plasma device as described in claim 10 is implemented.

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