Ion beam processing apparatus automatic feeding device

Abstract

This invention discloses an automatic feeding device for ion beam processing equipment, relating to the technical field of automatic feeding equipment. It includes a ground rail module, a scissor lift trolley, a workpiece lifting mechanism, and a workpiece clamp. The ground rail module has a first linear guide rail extending in a first direction. The scissor lift trolley is movably connected to the first linear guide rail and has a lower frame, a lifting assembly connected to the lower frame, and a conveying assembly connected to the lifting assembly. The workpiece lifting mechanism is connected to the conveying assembly, and the conveying assembly can drive the workpiece lifting mechanism to move in a second direction. The workpiece lifting mechanism has a workpiece clamp support block and a lifting electric cylinder. The workpiece clamp support block supports the workpiece. The workpiece clamp is connected to the workpiece and has a support plate. The lifting electric cylinder can extend and retract in the height direction to drive the support plate to move in the height direction. This invention can improve the problem of workpieces easily falling due to manual handling and workpiece clamp assembly.

Description

Technical Field

[0001] This invention relates to the field of automatic feeding equipment technology, and in particular to an automatic feeding device for ion beam processing equipment. Background Technology

[0002] Currently, ion beam equipment for processing 1-meter workpieces on the market is quite large. The size and weight of the workpiece itself also make manual handling and loading impossible. Ion beam processing equipment for optical lenses larger than 1 meter generally uses electric forklifts for loading and unloading. This method is simple, flexible, and low-cost, making it suitable for small-batch production. However, it presents many problems for mass production. For example, it requires manual assembly of the workpiece and workpiece fixture before moving it onto the forklift arm, which can easily cause large-sized lenses to fall. Secondly, manual loading is inefficient, complex, and requires a high level of operator skill, making it difficult to achieve high-efficiency mass production.

[0003] Therefore, how to improve the problem of workpieces easily falling off due to manual handling and workpiece fixtures, and ensure the efficiency and accuracy of loading, is a technical problem that needs to be solved by those skilled in the art. Summary of the Invention

[0004] The purpose of this invention is to provide an automatic feeding device for ion beam processing equipment, which can improve the problem of workpieces easily falling off due to manual handling and workpiece clamping, and ensure the accuracy and high efficiency of feeding.

[0005] To achieve the above objectives, the present invention provides an automatic feeding device for ion beam processing equipment, comprising: The ground rail module is provided with a first linear guide rail extending in a first direction; The scissor lift trolley is movably connected to the first linear guide rail. The scissor lift trolley is equipped with a lower frame, a lifting assembly connected to the lower frame, and a conveying assembly connected to the lifting assembly. The lifting assembly can drive the conveying assembly to move in the height direction. The workpiece lifting mechanism is connected to the conveying assembly. The conveying assembly can drive the workpiece lifting mechanism to move in a second direction perpendicular to the first direction. The workpiece lifting mechanism is provided with a workpiece clamp support block and a lifting electric cylinder. The workpiece clamp support block is used to support the workpiece. The workpiece fixture is connected to the workpiece. The workpiece fixture is equipped with a support plate. The lifting electric cylinder can extend and retract in the height direction to drive the support plate to move in the height direction. Both the first and second directions are perpendicular to the height direction.

[0006] In one possible implementation, the ground rail module is further provided with a drive rack extending along a first direction, and the scissor lift trolley also includes a ground rail conveying power module connected to the lower frame. The ground rail conveying power module includes a servo motor and a drive gear that is driven and connected to the output end of the servo motor. The drive gear meshes with the drive rack.

[0007] In one possible implementation, the ground rail module is further provided with a ground rail base plate for supporting the first linear guide rail. The ground rail base plate is also provided with a left anti-collision component, a right anti-collision component, a left limit switch, and a right limit switch. The left and right anti-collision components are used for anti-collision of the scissor lift trolley, and the left and right limit switches are used for positioning of the scissor lift trolley.

[0008] In one possible implementation, the lifting assembly includes a scissor drive module connected to the lower frame, an upper frame disposed opposite to the lower frame, and a scissor arm. The scissor arm includes a first arm and a second arm hinged to the first arm. The two ends of the first arm are respectively hinged to the lower frame and the upper frame, and the two ends of the second arm are respectively slidably connected to the lower frame and the upper frame. The output end of the scissor drive module is connected to the second arm and is used to drive the second arm to move, thereby causing the upper frame to rise and fall in the height direction.

[0009] In one possible implementation, the lower frame is provided with a second linear guide rail extending along a first direction, and the second arm is slidably connected to the second linear guide rail by a slider. The second linear guide rail is provided with a limiting component to restrict the slider from disengaging from the second linear guide rail.

[0010] In one possible implementation, the conveying assembly includes a synchronous belt conveying mechanism, which includes a first mounting base connected to the upper frame, a second mounting base connected to the upper frame, a drive wheel module connected to the first mounting base, a driven wheel module connected to the second mounting base, and a synchronous belt wound around the drive wheel module and the driven wheel module. The workpiece lifting mechanism is connected to the synchronous belt.

[0011] In one possible implementation, the conveying assembly further includes a guiding module, which includes a third linear guide extending along a second direction, and the workpiece lifting mechanism includes a pallet frame and a guide block connected to the bottom of the pallet frame, the guide block being movably connected to the third linear guide.

[0012] In one possible implementation, the workpiece lifting mechanism further includes a workpiece clamping positioning pin connected to the pallet frame, and a positioning hole is provided on the support plate, with the positioning hole corresponding to the positioning pin, for positioning the workpiece clamp.

[0013] In one possible implementation, the workpiece fixture further includes a glass fixture frame disposed around the workpiece, a polytetrafluoroethylene pad connected to the glass fixture frame and located at the top and bottom of the workpiece, and a first hook connected to the glass fixture frame for connecting to a main hook inside the ion beam cavity.

[0014] In one possible implementation, a support plate is located on both sides of the glass clamp frame in a first direction, and the support plate is provided with a second hook for connecting to an auxiliary hook inside the ion beam cavity.

[0015] Compared to existing technologies, the technical solution provided by this invention has at least the following beneficial effects: The scissor lift trolley is movably connected to the first linear guide rail. After the scissor lift trolley moves along the first direction to the loading position, the height of the conveying component and the workpiece lifting mechanism can be adjusted by the lifting component. Then, the workpiece can be transported onto the workpiece clamp support block of the workpiece lifting mechanism and assembled. The height of the conveying component and the workpiece lifting mechanism is adjusted again by the lifting component. After the scissor lift trolley moves to the set position, the conveying component drives the workpiece lifting mechanism to move along the second direction into the corresponding ion beam chamber, thereby moving the workpiece clamp and workpiece to the designated position within the ion beam chamber. The lifting cylinder extends and retracts in the height direction to move the workpiece clamp and workpiece in the height direction, completing the loading. This configuration automatically completes the loading and unloading actions, eliminating the need for manual entry into the ion beam chamber for workpiece installation, ensuring loading safety, and improving loading efficiency. The workpiece is first placed on the workpiece fixture support block, and then the workpiece fixture is assembled. This means that there is no need to manually handle the assembled workpiece and workpiece fixture, which can improve the problem of workpieces easily falling off due to manual handling of workpieces and workpiece fixtures, and ensure the accuracy and efficiency of loading. Attached Figure Description

[0016] To more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on the provided drawings without creative effort.

[0017] Figure 1 This is a schematic diagram of the automatic feeding device for ion beam processing equipment provided in an embodiment of the present invention; Figure 2 This is a schematic diagram of the automatic feeding device for ion beam processing equipment provided in an embodiment of the present invention from another perspective. Figure 3 This is a schematic diagram of the automatic feeding device of the ion beam processing equipment provided in this embodiment of the invention during the feeding process; Figure 4 This is a schematic diagram of the structure of the ground rail module provided in an embodiment of the present invention; Figure 5 This is a schematic diagram of the structure of the ground rail transport trolley provided in an embodiment of the present invention; Figure 6 This is a schematic diagram of the ground rail transport trolley provided in an embodiment of the present invention from another perspective. Figure 7 This is a schematic diagram of the scissor lift trolley provided in an embodiment of the present invention; Figure 8 This is a schematic diagram of the workpiece lifting assembly provided in an embodiment of the present invention; Figure 9 This is a schematic diagram of the tooling fixture provided in an embodiment of the present invention; Figure 10 This is a schematic diagram of the workpiece hoisting module provided in an embodiment of the present invention.

[0018] in: 1-Ion beam left cavity; 2-Ion beam right cavity; 3-Ground rail module; 301-Ground rail base plate; 302-First linear guide rail; 303-Drive rack; 304-Left anti-collision assembly; 305-Right anti-collision assembly; 306-Left limit switch; 307-Right limit switch; 4-Ground rail conveyor trolley; 41-Scissor lift trolley; 411-Lower frame; 412-Ground rail conveyor power module; 413-Scissor drive module; 414-Second linear guide rail; 415-Scissor arm; 416-Upper frame; 417-Synchronous belt conveyor mechanism; 418-Guide module; 419-Limit assembly; 4110-Control panel; 42-Workpiece lifting mechanism; 421-Panel frame; 422-Lifting electric cylinder; 423-Workpiece clamping positioning pin; 424-Workpiece clamping support block; 425-Guide block; 43-Workpiece fixture; 431-Workpiece; 432-Glass fixture frame; 433-Left support; 434-Right support; 435-First hook; 436-PTFE pad; 51-Guide module left; 52-Guide module right; 53-Workpiece hoisting module; 531-Main hook; 532-Auxiliary hook. Detailed Implementation

[0019] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0020] To enable those skilled in the art to better understand the present invention, the present invention will be further described in detail below with reference to the accompanying drawings and specific embodiments.

[0021] In the description of this invention, it should be understood that the terms "upper," "lower," "left," and "right," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this invention and simplifying the description, and do not indicate or imply that the position or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations of this invention.

[0022] The purpose of this invention is to provide an automatic feeding device for ion beam processing equipment, which can improve the problem of workpieces easily falling off due to manual handling and workpiece clamping, and ensure the accuracy and high efficiency of feeding.

[0023] It should be noted that in this embodiment, the X direction in the attached figure is defined as the first direction, and the Y direction is defined as the second direction. The first direction and the second direction are perpendicular to each other.

[0024] Please see Figures 1 to 10To achieve the above objectives, the present invention provides an automatic feeding device for ion beam processing equipment, including a ground rail module 3 and a ground rail conveying trolley 4. The ground rail conveying trolley 4 includes a scissor lift trolley 41, a workpiece lifting mechanism 42, and a workpiece clamp 43. The ground rail module 3 is provided with a first linear guide rail 302 extending in a first direction. The scissor lift trolley 41 is movably connected to the first linear guide rail 302. The scissor lift trolley 41 is provided with a lower frame 411, a lifting assembly connected to the lower frame 411, and a conveying assembly connected to the lifting assembly. The lifting assembly can drive the conveying assembly to move in the height direction. A sliding member is provided at the bottom of the lower frame 411, and the sliding member can slide and cooperate with the first linear guide rail 302. The workpiece lifting mechanism 42 is connected to the conveying assembly, which can drive the workpiece lifting mechanism 42 to move in a second direction perpendicular to the first direction. The workpiece lifting mechanism 42 is equipped with a workpiece clamp support block 424 and a lifting electric cylinder 422. The stroke of the lifting electric cylinder 422 can be adjusted according to actual needs, such as setting the stroke of the lifting electric cylinder 422 to 40mm. The workpiece clamp support block 424 is used to support the workpiece 431. The workpiece clamp 43 is connected to the workpiece 431 and is equipped with a support plate. The lifting electric cylinder 422 can extend and retract in the height direction to drive the support plate to move in the height direction. Both the first and second directions are perpendicular to the height direction.

[0025] In this embodiment, the ion beam processing equipment includes a left ion beam cavity 1 and a right ion beam cavity 2, which are arranged along a first direction. Both the left and right ion beam cavities are provided with a left guide module 51, a right guide module 52, and a workpiece hoisting module 53. The left and right guide modules 51 and 52 are mainly used to guide and support the workpiece 431 when it is transported inside the cavity, for example, to support the workpiece lifting mechanism 42 to support the workpiece clamp 43 and the workpiece 431. The workpiece hoisting module 53 is mainly used to install and fix the workpiece 431 inside the cavity, for example, to fix the workpiece clamp 43 so that the position of the workpiece 431 is fixed. The ground rail conveying trolley 4 can move left and right along the first direction on the ground rail module 3. When it is necessary to load the workpiece 431, the ground rail conveying trolley 4 moves to the middle position of the first linear guide rail 302, and the workpiece 431 is manually moved onto the conveying trolley. The workpiece fixture 43 is then assembled and positioned. The ground rail conveying trolley 4 then transports the workpiece 431 to the left cavity or the right cavity to complete the loading. Conversely, the workpiece 431 is unloaded.

[0026] The scissor lift trolley 41 is movably connected to the first linear guide rail 302. After the scissor lift trolley 41 moves along the first direction to the loading position, the height of the conveying component and the workpiece lifting mechanism 42 can be adjusted by the lifting component. Then, the workpiece 431 can be transported onto the workpiece clamp support block 424 of the workpiece lifting mechanism 42 and the workpiece clamp 43 can be assembled. The height of the conveying component and the workpiece lifting mechanism 42 can be adjusted again by the lifting component. After the scissor lift trolley 41 moves to the set position, the conveying component drives the workpiece lifting mechanism 42 to move along the second direction into the corresponding ion beam chamber, so that the workpiece clamp 43 and the workpiece 431 can be moved to the designated position in the ion beam chamber. The lifting cylinder 422 extends and retracts in the height direction to drive the workpiece clamp 43 and the workpiece 431 to move in the height direction, thus completing the loading. With this setting, the loading and unloading actions can be completed automatically, eliminating the need for manual entry into the ion beam chamber to install the workpiece 431, ensuring the safety of loading and improving loading efficiency. First, the workpiece 431 is placed on the workpiece fixture support block 424, and then the workpiece fixture 43 is assembled. That is, there is no need for manual handling of the assembled workpiece 431 and workpiece fixture 43. Automatic loading and unloading of workpiece 431 can be achieved, which can solve the risk of workpieces falling due to manual handling and loading, as well as the problems of complex manual loading operations and difficulty in achieving efficient and high-precision loading. Thus, the problem of workpiece 431 falling due to manual handling of workpiece 431 and workpiece fixture 43 is improved, ensuring the accuracy and high efficiency of loading.

[0027] In one possible implementation, the ground rail module 3 is further provided with a ground rail base plate 301 for supporting the first linear guide rail 302 and a drive rack 303 extending along the first direction. The ground rail base plate 301 is fixedly laid along the ground. The first linear guide rail 302 is mainly used for supporting and guiding the ground rail conveying trolley 4. The drive rack 303 is mainly used for driving the ground rail conveying trolley 4. The scissor lift trolley 41 also includes a ground rail conveying power module 412 connected to the lower frame 411. The ground rail conveying power module 412 includes a servo motor and a drive gear that is connected to the output end of the servo motor. A reducer can be set between the output end of the servo motor and the drive gear to increase the torque. The drive gear meshes with the drive rack 303, thereby driving the ground rail conveying trolley 4 to move through the servo motor. In addition, the ground rail base plate 301 is also equipped with a left anti-collision component 304, a right anti-collision component 305, a left limit switch 306, and a right limit switch 307. The left anti-collision component 304 and the right anti-collision component 305 are used for anti-collision of the scissor lift trolley 41, and the left limit switch 306 and the right limit switch 307 are used for positioning of the scissor lift trolley 41, so that the ground rail conveying trolley 4 can determine the accurate position when feeding materials into the left cavity 1 and the right cavity 2 of the ion beam.

[0028] In one possible implementation, the lifting assembly includes a scissor lift drive module 413 connected to the lower frame 411, an upper frame 416 opposite to the lower frame 411, and a scissor arm 415. The scissor arm 415 includes a first arm and a second arm hinged to the first arm. The two ends of the first arm are respectively hinged to the lower frame 411 and the upper frame 416, and the two ends of the second arm are respectively slidably connected to the lower frame 411 and the upper frame 416. The output end of the scissor lift drive module 413 is connected to the second arm to drive the second arm to move, thereby causing the upper frame 416 to rise and fall in the height direction. The lower frame 411 is provided with a second linear guide rail 414 extending along a first direction. The second arm is slidably connected to the second linear guide rail 414 via a slider. The second linear guide rail 414 is provided with a limiting component 419 to limit the slider from disengaging from the second linear guide rail 414. The lifting height of the scissor lift can also be positioned by adjusting the position of the limiting component 419 to ensure accurate height of the lifting mechanism. The scissor lift drive module 413 mainly provides the lifting power for the scissor lift mechanism. The scissor lift drive module 413 mainly includes a ball screw, a servo motor, a planetary reducer and a screw support. The servo motor drive can achieve accurate height control. The second linear guide rail 414 mainly plays a supporting and guiding role, ensuring the smooth operation and accuracy of the scissor arm 415, and ensuring the accuracy during the lifting process.

[0029] In one possible implementation, the conveying assembly includes a synchronous belt conveyor mechanism 417 or a roller mechanism. The synchronous belt conveyor mechanism 417 includes a first mounting base connected to an upper frame 416, a second mounting base connected to the upper frame 416, a drive wheel module connected to the first mounting base, a driven wheel module connected to the second mounting base, and a synchronous belt wound around the drive wheel module and the driven wheel module. A workpiece lifting mechanism 42 is connected to the synchronous belt. The conveying assembly also includes a guide module 418, which includes a third linear guide rail extending in a second direction. The workpiece lifting mechanism 42 includes a pallet frame 421 and a guide block 425 connected to the bottom of the pallet frame 421. The guide block 425 is movably connected to the third linear guide rail. The upper frame 416 is mainly used to install the synchronous belt conveyor mechanism 417 and the guide module 418. The synchronous belt conveyor mechanism 417 is mainly used to drive the workpiece lifting mechanism 42 to send the workpiece 431 into the cavity. The synchronous belt conveyor mechanism 417 also includes a motor connected to the drive wheel module to provide power for the operation of the synchronous belt. The synchronous belt can meet the conveying requirements of a large stroke, such as 1.5m. The guide module 418 is mainly used to support the workpiece lifting mechanism 42 and guide it to ensure that the workpiece lifting mechanism 42 maintains linear motion during the synchronous belt drive process. Among them, there can be multiple sets of guide blocks 425. One set of guide blocks 425 slides with the third linear guide rail mentioned above, and another set of guide blocks 425 can slide with the left guide module 51 and the right guide module 52 to support the workpiece lifting mechanism 42 after it enters the cavity.

[0030] In one possible implementation, the workpiece lifting mechanism 42 further includes a workpiece clamping positioning pin 423 connected to the pallet frame 421. A positioning hole is provided on the support plate, corresponding to the positioning pin, for positioning the workpiece clamp 43. The lifting cylinder 422 of the workpiece lifting mechanism 42 is mainly used to lift and lower the workpiece clamp 43, installing the workpiece clamp 43 onto a hook inside the cavity. This hook can be, but is not limited to, the main hook 531 and auxiliary hook 532 described below. The workpiece clamping positioning pin 423 is mainly used to position the workpiece clamp 43, ensuring consistency in the loading position each time. The workpiece clamping support block 424 is mainly used for support when installing the glass workpiece clamp 43.

[0031] In one possible implementation, the workpiece 431 may be, but is not limited to, a glass workpiece 431. The workpiece clamp 43 further includes a glass clamp frame 432 disposed around the workpiece 431, polytetrafluoroethylene (PTFE) pads 436 connected to the glass clamp frame 432 and located at the top and bottom of the workpiece 431, and a first hook 435 connected to the glass clamp frame 432. The glass workpiece 431 is fixed in the glass clamp frame 432 and supported by the PTFE pads 436. The support plate is located on both sides of the glass clamp frame 432 in a first direction. The support plate includes a left support 433 located on the left side of the glass clamp frame 432 and a right support 434 located on the right side of the glass clamp frame 432. The left support 433 and the right support 434 are used to support the glass workpiece clamp 43 on the workpiece lifting mechanism 42 and are positioned by the positioning pins on the workpiece lifting mechanism 42. There are three first hooks 435, which are staggered in the first direction. The first hooks 435 are used to connect with the three main hooks 531 in the ion beam cavity and hang together to support the glass workpiece clamp 43. Each support plate is provided with two second hooks, which are used to connect with the auxiliary hooks 532 in the ion beam cavity. The three main hooks 531 complete the hoisting support of the glass workpiece clamp 43, while the auxiliary hooks 532 mainly play an auxiliary support and buffering role.

[0032] In this application, the ground rail conveying trolley 4 moves to the center of the first linear guide rail 302, the scissor lift mechanism is lowered to its lowest position, and the glass workpiece 431 is manually moved onto the ground rail conveying trolley 4. The glass tooling fixture is assembled on the ground rail conveying trolley 4. The scissor lift mechanism raises the loading height of the cavity. Then, the conveying trolley moves on the ground rail module 3 to the front of the left ion beam cavity 1 or the right ion beam cavity 2. The lifting cylinder 422 of the workpiece lifting mechanism 42 lifts the workpiece 431 to a high position. The synchronous belt conveying mechanism 417 on the ground rail conveying trolley 4 delivers the workpiece 431 to a designated position inside the cavity. At this time, the first hook 435 of the glass workpiece fixture 43 and the main hook 531 on the cavity are aligned, and the first hook 435 of the glass workpiece fixture 43 is higher than the main hook 531 on the cavity. Afterwards, the lifting cylinder 422 of the workpiece lifting mechanism 42 descends to its low position, lowering the glass workpiece clamp 43 until its first hook 435 contacts the main hook 531 on the cavity. The glass workpiece clamp 43 is then completely supported by the main hook 531 on the cavity, and the glass workpiece clamp 43 disengages from the workpiece lifting mechanism 42. The synchronous belt conveyor 417 carries the workpiece lifting mechanism 42 out of the cavity, and the ground rail conveyor trolley 4 returns to the center between the left ion beam cavity 1 and the right ion beam cavity 2, completing the loading process.

[0033] It should be noted that each action in this process is equipped with a photoelectric switch and encoder to determine whether the workpiece is in position. The next action is executed only after the previous action is completed and in position, automatically completing the loading and unloading operations. This eliminates the need for manual entry into the cavity to install the workpiece 431, ensuring loading safety and improving loading efficiency. Two ion beam devices share a single loading mechanism, saving costs and floor space. The ground rail conveyor trolley 4 includes a scissor lift trolley 41, which can lift over a wide range. For example, the height before loading can be set to 1m for convenient manual assembly and loading, and the height during cavity loading can be set to 1.9m to achieve the set height. Glass tooling fixtures are assembled on the conveyor trolley, avoiding the increased weight and size risks associated with pre-assembly and subsequent overall transport. One-button loading and unloading is used; after pressing the start button, no further manual operation is required, enabling automated mass production. Furthermore, it can automatically load and unload large-size workpieces 431 (especially large-size optical lenses) using ion beam processing equipment. In addition, a control panel 4110 can be set on the upper frame 416. The entire process is uniformly scheduled by the PLC control system, supporting one-click start and status monitoring, ensuring collaborative operation between multiple devices, improving the overall level of automation and operational stability, and reducing manual operation.

[0034] It should be noted that in this specification, relational terms such as first and second are used only to distinguish one entity from several other entities, and do not necessarily require or imply any such actual relationship or order between these entities.

[0035] The various embodiments in this specification are described in a progressive manner, with each embodiment focusing on the differences from other embodiments. The same or similar parts between the various embodiments can be referred to each other.

[0036] This article uses specific examples to illustrate the principles and implementation methods of the present invention. The descriptions of the above embodiments are only for the purpose of helping to understand the method and core ideas of the present invention. It should be noted that those skilled in the art can make several improvements and modifications to the present invention without departing from the principles of the present invention, and these improvements and modifications also fall within the protection scope of the present invention.

Claims

1. An automatic loading device for an ion beam processing apparatus, characterized by comprising: include: The ground rail module (3) is provided with a first linear guide rail (302) extending in a first direction. The scissor lift trolley (41) is movably connected to the first linear guide rail (302). The scissor lift trolley (41) is provided with a lower frame (411), a lifting assembly connected to the lower frame (411), and a conveying assembly connected to the lifting assembly. The lifting assembly can drive the conveying assembly to move in the height direction. The workpiece lifting mechanism (42) is connected to the conveying assembly. The conveying assembly can drive the workpiece lifting mechanism (42) to move in a second direction perpendicular to the first direction. The workpiece lifting mechanism (42) is provided with a workpiece clamp support block (424) and a lifting electric cylinder (422). The workpiece clamp support block (424) is used to support the workpiece (431). A workpiece clamp (43) is connected to the workpiece (431). The workpiece clamp (43) is provided with a support plate. The lifting electric cylinder (422) can extend and retract in the height direction to drive the support plate to move in the height direction. Wherein, both the first direction and the second direction are perpendicular to the height direction.

2. The ion beam processing apparatus automatic feeding device according to claim 1, wherein The ground rail module (3) is also provided with a drive rack (303) extending along the first direction. The scissor lift trolley (41) also includes a ground rail conveying power module (412) connected to the lower frame (411). The ground rail conveying power module (412) includes a servo motor and a drive gear that is connected to the output end of the servo motor. The drive gear meshes with the drive rack (303).

3. The automatic feeding device for ion beam processing equipment according to claim 1, characterized in that, The ground rail module (3) is also provided with a ground rail base plate (301) for supporting the first linear guide rail (302). The ground rail base plate (301) is also provided with a left anti-collision component (304), a right anti-collision component (305), a left limit switch (306), and a right limit switch (307). The left anti-collision component (304) and the right anti-collision component (305) are used for anti-collision of the scissor lift trolley (41), and the left limit switch (306) and the right limit switch (307) are used for positioning of the scissor lift trolley (41).

4. The automatic feeding device for ion beam processing equipment according to claim 1, characterized in that, The lifting assembly includes a scissor drive module (413) connected to the lower frame (411), an upper frame (416) disposed opposite to the lower frame (411), and a scissor arm (415). The scissor arm (415) includes a first arm and a second arm hinged to the first arm. The two ends of the first arm are respectively hinged to the lower frame (411) and the upper frame (416). The two ends of the second arm are respectively slidably connected to the lower frame (411) and the upper frame (416). The output end of the scissor drive module (413) is connected to the second arm and is used to drive the second arm to move so as to drive the upper frame (416) to rise and fall in the height direction.

5. The automatic feeding device for ion beam processing equipment according to claim 4, characterized in that, The lower frame (411) is provided with a second linear guide rail (414) extending along the first direction. The second arm is slidably connected to the second linear guide rail (414) by a slider. The second linear guide rail (414) is provided with a limiting component (419) for limiting the slider from disengaging from the second linear guide rail (414).

6. The automatic feeding device for ion beam processing equipment according to claim 4, characterized in that, The conveying assembly includes a synchronous belt conveying mechanism (417), which includes a first mounting base connected to the upper frame (416), a second mounting base connected to the upper frame (416), a drive wheel module connected to the first mounting base, a driven wheel module connected to the second mounting base, and a synchronous belt wound around the drive wheel module and the driven wheel module. The workpiece lifting mechanism (42) is connected to the synchronous belt.

7. The automatic feeding device for ion beam processing equipment according to claim 6, characterized in that, The conveying assembly further includes a guide module (418), which includes a third linear guide rail extending along the second direction. The workpiece lifting mechanism (42) includes a pallet frame (421) and a guide block (425) connected to the bottom of the pallet frame (421). The guide block (425) is movably connected to the third linear guide rail.

8. The automatic feeding device for ion beam processing equipment according to claim 7, characterized in that, The workpiece lifting mechanism (42) also includes a workpiece clamping positioning pin (423) connected to the pallet frame (421). The support plate is provided with positioning holes, which are corresponding to the positioning pins and are used to position the workpiece clamp (43).

9. The automatic feeding device for ion beam processing equipment according to any one of claims 1 to 8, characterized in that, The workpiece fixture (43) further includes a glass fixture frame (432) disposed around the workpiece (431), a polytetrafluoroethylene pad (436) connected to the glass fixture frame (432) and located at the top and bottom of the workpiece (431), and a first hook (435) connected to the glass fixture frame (432), the first hook (435) being used to connect to the main hook (531) inside the ion beam cavity.

10. The automatic feeding device for ion beam processing equipment according to claim 9, characterized in that, The support plate is located on both sides of the glass clamp frame (432) in the first direction. The support plate is provided with a second hook, which is used to connect with the auxiliary hook (532) in the ion beam cavity.

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