Integrated co-evaporation source furnace

Abstract

The application provides an integrated co-evaporation source furnace, and belongs to the technical field of film coating. Specifically, the integrated co-evaporation source furnace comprises a furnace body, a heating unit, a film deposition assembly, a flow guide cover and an outer cover body. The film deposition assembly is arranged above the furnace body and is used for carrying a substrate. A deposition space is arranged in the film deposition assembly. The flow guide cover is installed on the film deposition assembly and can cover the flow-through openings. The outer cover body can cover the film deposition assembly and the heating unit. The outer cover body can be connected to a vacuumizing device. The space covered by the outer cover body is vacuumized by the vacuumizing device. The film deposition assembly can rotate and move, and in the process of rotating and moving, the flow guide cover can pass above the flow-through openings one by one. Through integrated design, the structure is compact, multiple heating units are integrated in the same furnace body, and the rotating film deposition assembly is matched, so that the continuous deposition of a multilayer heterostructure film is realized. The substrate does not need to be transferred between different devices, the equipment volume is greatly reduced, and the production efficiency is improved.

Description

Technical Field

[0001] This invention belongs to the field of coating technology, specifically relating to an integrated co-evaporation source furnace. Background Technology

[0002] Evaporation is a common technique for preparing functional thin film materials. In existing technologies, multiple independent evaporation source furnaces are typically used to deposit multilayer films. The substrate is sequentially transferred to different evaporation sources using a robotic arm or turntable mechanism to achieve the deposition of multilayer films. However, this structure suffers from problems such as bulky equipment, susceptibility to contamination during substrate transfer, and low deposition efficiency. Summary of the Invention

[0003] The purpose of this invention is to provide an integrated co-steam source furnace that facilitates source replacement operations and avoids and improves processing efficiency.

[0004] To achieve the above objectives, the technical solution adopted by the present invention is an integrated co-evaporation source furnace, comprising a furnace body, a heating unit, a membrane deposition assembly, a flow guide hood, and an outer cover. The furnace body is provided with several positioning chambers, and the top of the furnace body is provided with several flow ports. The heating unit is used to carry raw materials, and the internal space of the heating unit can communicate with the flow ports. The membrane deposition assembly is located above the furnace body and is used to carry the substrate. The membrane deposition assembly is provided with a deposition space. The flow guide hood is installed on the membrane deposition assembly and can cover the flow ports, so that the deposition space can communicate with the internal space of the heating unit. The outer cover can cover the membrane deposition assembly and the heating unit. The outer cover can be connected to a vacuum pump, and the vacuum pump can be used to evacuate the space covered by the outer cover. The membrane deposition assembly can rotate and move, and during its rotation and movement, the flow guide hood can pass over the several flow ports in sequence.

[0005] Furthermore, a sealing component is installed at the flow port of the furnace body. The sealing component can be coupled with the membrane deposition component, and can open the flow port when the membrane deposition component rotates and moves.

[0006] Furthermore, the sealing assembly includes a roller body and a horizontal central shaft. The roller body is provided with a central opening that extends radially along the roller body and passes through it. The horizontal central shaft is used to connect the roller body to the top of the furnace body, enabling the roller body to rotate and allowing the central opening to switch between a vertical and a horizontal state.

[0007] Furthermore, a mating wheel is mounted on the horizontal central shaft, the mating wheel is coupled to a transmission gear, and a guide component is connected through the transmission gear. The guide component is mounted at the bottom of the membrane deposition assembly, and when the guide component makes a circular motion, it causes the horizontal central shaft to rotate.

[0008] Furthermore, the roller body is equipped with support rollers, which support the bottom of the film deposition assembly when the center opening is horizontal.

[0009] Furthermore, a locking assembly is installed on the horizontal central shaft, which can lock the roller body in place and can be coupled with the guide component.

[0010] Furthermore, the locking assembly includes a locking disc and a chuck. The locking disc is connected to a horizontal central shaft and a lock cylinder is mounted on the locking disc. The chuck is connected to the horizontal central shaft and is rotatable. When the chuck rotates, it can apply a force to the lock cylinder. The chuck is connected to a lever, which can rotate the chuck.

[0011] Furthermore, the membrane deposition assembly includes a bottom disk and an outer casing. The bottom disk is rotatable and has an inlet, through which the flow guide can pass. The outer casing and the bottom disk cooperate to form an integral unit, and the two are joined to enclose the deposition space.

[0012] Furthermore, the membrane deposition assembly also includes a flat tray and a vacuum-compatible linear actuator. The flat tray is located within the deposition space and connected to a flow guide shroud, which passes through the flat tray. The vacuum-compatible linear actuator is located between the flat tray and the bottom disc and is used to move the flat tray vertically so that the lower end of the flow guide shroud abuts against the top of the furnace body.

[0013] Furthermore, a sealing component is provided within the deposition space. The sealing component can cooperate with the upper port of the flow guide shroud. After the two are in cooperation, the upper port of the flow guide shroud can be closed by the sealing component.

[0014] Compared with the prior art, the beneficial effects of the present invention are: integrated design and compact structure, integrating multiple heating units into the same furnace body, and with the rotary film deposition assembly, continuous deposition of multilayer heterogeneous thin films is realized, eliminating the need to transfer substrates between different devices, greatly reducing equipment volume and improving production efficiency. Attached Figure Description

[0015] Figure 1 This is a schematic diagram of the overall structure of the present invention; Figure 2 This is a schematic diagram of the furnace body structure of the present invention; Figure 3 This is a schematic diagram of the baffle structure of the present invention; Figure 4 This is a schematic diagram of the sealing assembly structure of the present invention; Figure 5 This is a schematic diagram of the roller structure of the present invention; Figure 6 This is a schematic diagram of the upper cover structure of the present invention; Figure 7 This is a schematic diagram of the connection between the lever and the chuck of the present invention; Figure 8 This is a schematic diagram of the lock cylinder structure of the present invention; Figure 9 This is a schematic diagram of the overall structure of the membrane deposition assembly of the present invention; Figure 10 This is a schematic cross-sectional view of the membrane deposition assembly of the present invention; Among them, 1-furnace body, 2-heating unit, 3-baffle, 4-flow port, 5-guide component, 6-roller body, 7-horizontal central shaft, 8-center opening, 9-fitting wheel, 10-transmission gear, 11-upper side bending plate, 12-end side bonding plate, 13-bottom shaping plate, 14-elastic plate, 15-locking plate, 16-support roller, 17-locking disc, 18-through hole, 19-locking post, 20-locking ball, 21-reset spring, 22-strip opening, 23-lever, 24-chuck, 25-release mechanism 26-Spherical end, 27-Sliding sleeve, 28-Flat guide rod, 29-Return spring, 30-Bottom disc, 31-Lower support shaft, 32-Upper support shaft, 33-Hanging arm, 34-Clamping component, 35-Outer housing cover, 36-Flow guide cover, 37-Flat tray, 38-Blocking component, 39-Vacuum compatible linear actuator, 40-Outer cover body, 41-Extended disc, 42-Outer vertical arm, 43-Horizontal hanging arm, 44-Power output mechanism, 45-Control arm, 46-Side opening, 47-Side door. Detailed Implementation

[0016] To make the objectives, technical solutions, and advantages of the embodiments of the present invention clearer, the technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0017] In the description of this invention, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "linking" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this invention based on the specific circumstances.

[0018] See Figures 1 to 2As shown, an integrated co-steam source oven includes an oven body 1 and a heating unit 2. The oven body 1 has several independent positioning chambers. Each positioning chamber is equipped with a heating unit 2, which has an upper opening. The heating unit 2 is detachably connected to the positioning chamber. When heating unit 2 needs to be replaced, it can be removed, and the source material can be easily replaced. The positioning chamber is designed with dimensions of 180mm in length × 120mm in width × 80mm in height to accommodate and position heating unit 2. The external dimensions of heating unit 2 itself are slightly smaller than the chamber, with dimensions of 170mm in length × 110mm in width × 75mm in height, to facilitate the disassembly and replacement of heating unit 2.

[0019] In this technical solution, different materials can be placed in several heating units 2 as needed. A film deposition assembly is set above the furnace body 1. After the materials in the heating unit 2 are sublimated into a gaseous structure, the gaseous materials can enter the film deposition assembly and finally form a deposited film on the substrate.

[0020] In this embodiment, there are four heating units 2, including a first heating unit, a second heating unit, a third heating unit, and a fourth heating unit.

[0021] A baffle 3 is provided on the top of the furnace body 1, which covers the positioning chamber. A flow port 4 is provided on the baffle 3. There are several flow ports 4, and each flow port 4 is connected to the corresponding heating unit 2, so that the gaseous material in the corresponding heating unit 2 can flow out from the flow port 4. An inlet is provided at the bottom of the membrane deposition assembly. The membrane deposition assembly can rotate, and when the membrane deposition assembly starts to rotate, it can make the inlet perform a circular motion, so that the inlet passes over the first heating unit 2, the third heating unit 2, the second heating unit 2 and the fourth heating unit 2 in sequence. When the inlet is aligned with a certain flow port 4, the gaseous material in the corresponding heating unit 2 can enter the membrane deposition assembly.

[0022] In this way, the gaseous materials in the four heating units 2 can be deposited sequentially on the surface of the substrate, thereby forming a multilayer heterogeneous structure on the surface of the substrate; For example, the inlet is first aligned with the first heating unit. At this time, the gaseous material in the first heating unit will be discharged from the flow port 4 and enter the film deposition assembly to form a bottom layer film on the substrate. Then, as the film deposition assembly continues to rotate, the inlet is aligned with the second heating unit. At this time, the film deposition assembly is stopped from rotating, so that the gaseous material in the second heating unit can enter the film deposition assembly and form a cover layer film on the substrate. Then, the film deposition assembly continues to rotate, so that the flow port 4 passes over the third heating unit and the fourth heating unit in sequence, and finally forms a surface layer film on the substrate. In the example, materials can be placed in different heating units 2 according to design requirements. Then, the membrane deposition assembly is rotated so that the inlet passes over the heating unit 2 containing the corresponding material in sequence. It should be noted that the rotation of the membrane deposition assembly should be stopped when the inlet is aligned with the corresponding flow port 4. A sealing assembly is provided at each flow port 4, and a guide component 5 is provided at the bottom of the membrane deposition assembly. During the rotation of the membrane deposition assembly, the guide component 5 can make a circular motion. During this process, the guide component 5 can couple with the sealing assembly, so that the sealing assembly can move. At this time, the flow port 4 is opened, allowing the gaseous material in the corresponding heating unit 2 to flow out. There is one guide component 5, and when the membrane deposition assembly rotates, the guide component 5 can pass over the four heating units 2 in sequence.

[0023] See Figures 2 to 5 As shown, in this example, the sealing assembly includes a cylindrical roller 6 with a diameter of 50 mm and an axial length of 80 mm. The roller 6 is connected to the baffle 3 via a horizontal central shaft 7 with a diameter of 15 mm, allowing the roller 6 to rotate. A radially extending central opening 8 is provided on the roller 6, which radially penetrates the roller 6. When the central opening 8 is in a horizontal state, the flow port 4 is closed by the roller 6, and the gaseous material located in the heating unit 2 cannot enter the film deposition assembly.

[0024] When the guide component 5 passes over the roller body 6, the guide component 5 can cooperate with the roller body 6 to rotate the roller body 6, so that the center port 8 on the roller body 6 rotates from a horizontal state to a vertical state. At this time, the gaseous material located in the heating unit 2 can pass through the center port 8 and enter the film deposition assembly.

[0025] A mating wheel 9 is provided on the central shaft. When the guide component 5 passes over the sealing assembly, the guide component can engage with the mating wheel 9 through the transmission gear 10. As the guide component moves, the mating wheel 9 can start to rotate, thereby driving the roller body 6 to rotate and changing the state of the center opening 8. After the roller body 6 rotates 180°, the guide component 5 no longer applies force to the mating wheel 9, thereby keeping the center opening 8 in that state.

[0026] See Figures 2 to 6 As shown, a cover is connected at the flow port 4. The cover is in close contact with the roller body 6. When the center port 8 is in a horizontal state, it can cooperate with the roller body 6 to form a seal. The covering part includes a traveling side cover and a reverse side cover. Both the traveling side cover and the reverse side cover include an upper cover and a lower cover. The upper cover is located above the baffle 3, while the lower cover is located below the baffle 3. When the center opening 8 is in a horizontal state, the center opening 8 is located between the upper cover and the lower cover, and the width of the center opening 8 needs to be less than the thickness of the baffle 3 so that the upper cover and the lower cover can make surface contact with the surface of the roller 6.

[0027] The upper and lower covers have the same structure, both including an upper curved plate 11 and a lower curved plate. The ends of the upper and lower curved plates are connected to end-position side-adhesive plates 12. The bottom edge of the end-position side-adhesive plates 12 is abutted with the baffle 3. At this time, the end-position side-adhesive plates 12 can make surface contact with the end face of the roller body 6. The upper and lower curved plates both include a bottom shaping plate 13, an elastic plate 14 and a locking plate 15. The elastic plate 14 is made of spring steel. The bottom edge of the bottom shaping plate 13 is fixedly connected to the baffle 3. The elastic plate 14 is located between the bottom shaping plate 13 and the locking plate 15. The elastic plate 14 is connected to both the bottom shaping plate 13 and the locking plate 15. Because the elastic plate 14 has a certain degree of flexibility, it can move when the locking plate 15 is subjected to force. After the locking plate 15 loses its force, it can be reset under the action of the reset force of the elastic plate 14. It should be noted that the end-side bonding plate 12 is connected to the end of the bottom shaping plate 13, that is, there is no connection between the end-side bonding plate 12 and the elastic plate 14. At the same time, a warped part is provided on the free side of the locking plate 15. The warped part bends and extends away from the roller body 6. When there are protrusions on the surface of the roller body 6, as the roller body 6 rotates, the protrusions can apply a force away from the roller body 6 to the locking plate 15. A sealing gasket is provided on the inner side of the locking plate 15, thereby increasing the sealing effect.

[0028] See Figure 5 As shown, in this technical solution, a strip groove is provided on the roller body 6, and a support roller 16 is axially connected in the strip groove. The support roller 16 is cylindrical, and a part of the support roller 16 extends out from the groove opening. There are two support rollers 16, and the center opening 8 is located between the two support rollers 16. When the center opening 8 is horizontal, the two support rollers 16 are arranged longitudinally, and when the center opening 8 is vertical, the two support rollers 16 are arranged horizontally. In this way, when the center opening 8 is horizontal, the flow port 4 is blocked by the roller body 6. At this time, one support roller 16 is located above the baffle 3, and the other support roller 16 is located below the baffle 3. The support roller 16 located above the baffle 3 can abut against the bottom of the membrane deposition assembly. When the membrane deposition assembly rotates, there is rolling friction between it and the support roller 16, which facilitates the rotation of the membrane deposition assembly.

[0029] In this technical solution, the guide component 5 is an arc-shaped extended rack. The rack is connected to the bottom of the membrane deposition assembly through a hanger. When the membrane deposition assembly rotates, it can drive the rack to make a circular motion. The end of the roller body 6 is fixedly connected to the horizontal central shaft 7 so that the two can rotate synchronously. At this time, a transmission groove needs to be provided on the baffle 3. The transmission groove is connected to the flow port 4 through the shaft hole. The horizontal central shaft 7 is inserted from the shaft hole so that the end of the horizontal central shaft 7 is located in the transmission groove. The mating wheel 9 in this technical solution is installed on the horizontal central shaft 7 and finally the mating wheel 9 is located in the transmission groove. The transmission gear 10 passes through the baffle 3 and meshes with the mating wheel 9. Since the transmission gear 10 meshes with the guide component 5, when the membrane deposition assembly rotates, it can make the mating wheel 9 rotate, thereby driving the roller body 6 to rotate.

[0030] The transmission gear 10 includes a longitudinally extending shaft that passes through the upper surface of the baffle 3, with its lower end located in the transmission groove and its upper end above the baffle 3. A spur gear is connected to the upper end of the longitudinally extending shaft, which can mesh with the guide component 5. A drive bevel gear is connected to the lower end of the longitudinally extending shaft, and a driven bevel gear is connected to the mating wheel 9 on the horizontal central shaft 7. The drive bevel gear meshes with the mating wheel 9. Therefore, when the film deposition assembly rotates, the guide component 5 can drive the spur gear to rotate, and then the meshing of the drive bevel gear with the mating wheel 9 will cause the roller 6 to rotate, thereby adjusting the state of the center opening 8.

[0031] When the aforementioned guide component 5 separates from the spur gear, the roller 6 rotates exactly 180°. After the guide component 5 moves one circumference, as the film deposition assembly continues to rotate, the guide component 5 can re-engage with the transmission gear 10. During this process, the guide component 5 can sequentially engage with different transmission gears 10, ultimately driving the roller 6 on different sealing assemblies.

[0032] In this technical solution, during the rotation of the roller body 6, the idler roller 16 can make a circular motion around the horizontal central axis 7. During this process, after the idler roller 16 comes into contact with the locking plate 15, it can apply a force to the locking plate 15, causing the locking plate 15 to move away from the roller body 6. When the locking plate 15 separates from the idler roller 16, under the action of the restoring force of the elastic plate 14, the locking plate 15 can be reset and moved, and finally the locking plate 15 comes into contact with the surface of the roller body 6.

[0033] To ensure the stability of the roller 6, i.e., when the guide component 5 is not applying force to the mating wheel 9, the roller 6 needs to be in a stable state. Therefore, a locking component can be set in this technical solution. The locking component is connected to the horizontal central shaft 7. The locking component is used to restrict the position of the roller 6. When the guide component 5 is not ready to rotate the mating wheel 9, the locking component locks the roller 6, and the roller 6 cannot move at will. When the guide component 5 moves to the point where it is about to rotate the mating wheel 9, the guide component 5 cooperates with the locking component, so that the locking component starts to work and unlocks the roller 6. Then, as the guide component 5 continues to move, the guide component 5 cooperates with the transmission gear 10, and finally the roller 6 rotates.

[0034] See Figures 2 to 3 , Figures 7 to 8As shown, in this example, the locking assembly includes a locking disc 17 fixed at the inner end of the horizontal central shaft 7. The locking disc 17 can rotate simultaneously with the roller 6. Two through holes 18 are provided on the locking disc 17, which axially penetrate the locking disc 17. The two through holes 18 correspond to the port positions of the central opening 8. A locking pin 19 is provided in each through hole 18, and the locking pin 19 can move axially within the through hole 18. A locking ball 20 is connected to one end of the locking pin 19, and the locking ball 20 is connected to the locking pin 19 via a return spring 21. At this time, the locking pin 19, the locking ball 20, and the return spring 21 form the lock core. The other end of the locking pin 19 is... The spherical spring 21 generates a restoring force after compression. A locking groove is provided on the inner wall of the transmission groove. When the center opening 8 is horizontal, the locking ball 20 in the through hole 18 engages with the corresponding locking groove. A strip-shaped opening 22 is provided on the transmission groove, through which a lever 23 passes, so that the lower end of the lever 23 is located within the transmission groove. A chuck 24 is connected to the lower end of the lever 23. The chuck 24 has a circular opening at its center, allowing it to be fitted onto the horizontal central shaft 7. When a force is applied to the upper end of the lever 23, the lever 23 can swing around the central axis, and the chuck 24 rotates accordingly. Two arc-shaped extensions are provided on the chuck 24. When the locking ball 20 engages with the locking groove, the locking pin 19 and the unlocking port 25 are misaligned. At this time, the return spring 21 is compressed and has a relatively large restoring force, making the locking ball 20 and the locking groove engage more tightly. After the lever 23 starts to swing, the chuck 24 rotates, allowing the spherical end 26 of the locking pin 19 to enter the unlocking port 25. At this time, under the restoring ability of the return spring 21, the locking pin 19 moves slightly, and then the locking ball 20, which is engaged with the locking groove, can move out relatively easily. When the roller 6 rotates, the locking disc 17 rotates simultaneously, causing the locking ball 20 to be subjected to a force. Since the return spring 21 returns to its original position at this time... Normally, the locking ball 20 and the locking groove are not subjected to the force of the return spring 21. As the locking plate 17 continues to rotate and move, the locking ball 20 and the locking groove begin to misalign, and the locking ball 20 moves into the through hole 18. At this time, the return spring 21 is compressed again. When the roller 6 rotates 180°, the locking ball 20 moves from one end of the unlocking port 25 to the other end. At this time, after the lever 23 is reset, the locking plate 17 can be reset and rotated, so that the unlocking port 25 is misaligned with the spherical end 26 of the locking post 19 again, and the spherical end 26 of the locking post 19 moves out of the unlocking port 25. At this time, the locking ball 20 cooperates with the corresponding locking groove again to lock the locking plate 17.

[0035] In order for the lever 23 to swing smoothly, when the lever 23 is in the vertical position, the horizontal height of the upper end of the lever 23 should be higher than the horizontal height of the guide component 5. Specifically, the length of the lever 23 is 50mm, and when it is in the vertical position, its upper end is about 10mm higher than the lower surface of the guide component 5 (rack).

[0036] When the guide component 5 moves in a circular motion, it first contacts the upper end of the lever 23, causing the lever 23 to swing to an inclined state. At this time, the horizontal height of the upper end of the lever 23 is lower than that of the guide component 5. Then, as the guide component 5 continues to move, it can pass over the lever 23. To facilitate the reset of the lever 23, a sliding sleeve 27 is fitted on the lever 23. The sliding sleeve 27 is axially connected to a flat guide rod 28. At the same time, a cylindrical groove is provided on the baffle 3, which is connected to the strip opening 22. The flat guide rod 28 is located in the cylindrical groove. A return spring 29 is fitted on the cylindrical groove. When the lever 23 is in an inclined state, the return spring 29 is in a compressed state. At this time, the return spring 29 has a reset force, causing the upper end of the lever 23 to abut against the surface of the guide component 5. When the guide component 5 separates from the lever 23, the lever 23 is reset to a vertical state.

[0037] In order to reset the lever 23 to the vertical position, the film deposition assembly can be rotated 15° in the opposite direction. When the lever 23 is in the vertical position, the lever 23 is against one end of the strip 22. At this time, the film deposition assembly cannot continue to rotate in the opposite direction, so that the locking plate 17 can be reset and the reset spring 21 is compressed. At this time, the locking ball 20 and the locking groove are more tightly engaged.

[0038] Additionally, see Figure 1 , Figure 9 and Figure 10 As shown, the membrane deposition assembly in this technical solution includes a bottom disk 30, with an inlet located on the bottom disk 30. The center of the bottom disk 30 is connected to a baffle 3 via a lower support shaft 31. A drive motor is connected to the lower end of the lower support shaft 31, which is located inside the furnace body 1. The drive motor can control the rotation of the membrane deposition assembly, allowing the bottom disk 30 to rotate around the central axis of the support shaft. An upper support shaft 32 is also fixed on the bottom disk 30, located on the extension line of the lower support shaft 31. Several [unclear - possibly referring to attachments or connections] are connected to the upper support shaft 32. A boom 33 is provided with several clamping components 34, which can clamp the substrate with the substrate facing downwards. The upper end of the upper support shaft 32 is connected to the outer shell 35, and the inner wall of the outer shell 35 is also connected to the end of the boom 33, so that the outer shell 35 and the bottom disc 30 are integrated to form a whole, and the two are connected to form a deposition space. A side opening is provided on the outer shell 35, and a side door 47 is connected to the side opening. After the side door 47 is opened, the substrate can be picked up and put down through the side opening.

[0039] In this technical solution, since the bottom of the membrane deposition assembly is supported by the roller 16, there is a gap between the bottom of the membrane deposition assembly and the baffle 3. In order to allow the gas material in the heating unit 2 to smoothly enter the interior of the membrane deposition assembly, a flow guide hood 36 is provided inside the membrane deposition assembly. The flow guide hood 36 has a square cylindrical structure. After the inlet is aligned with the corresponding flow port 4, the flow guide hood 36 can extend from the inlet, and at this time the flow guide hood 36 covers the sealing assembly.

[0040] Specifically, a flat tray 37 is provided in the sedimentation space, which divides the sedimentation space into an upper part and a lower part. A hole is provided in the center of the flat tray 37, and a sealing ring is provided in the hole. The upper support shaft 32 passes through the center of the flat tray 37, enabling the flat tray 37 to move vertically. A flow guide port is provided on the flat tray 37, and a flow guide hood 36 passes through the flow guide port and is fixedly connected to the flat tray 37. When the flat tray 37 moves vertically, it can drive the flow guide hood 36 to move vertically, so that the flow guide hood 36 extends or retracts from the flow port 4. A sealing component 38 is provided in the deposition space. The sealing component 38 is mated to the inner wall of the outer casing 35 and fixed to the casing. The sealing component 38 can cooperate with the upper port of the guide hood 36. After the two are in cooperation, the upper port of the guide hood 36 can be closed by the sealing component 38. At this time, the guide hood 36 is retracted into the deposition space. When the flow blocking port 4 is aligned with the inlet, the flat tray 37 moves downward and the guide hood 36 extends out from the inlet. At this time, the guide hood 36 is separated from the sealing component 38. When the lower end of the guide hood 36 abuts against the baffle 3, the deposition space and the internal space of the heating unit 2 are connected by the guide hood 36, so that the gas material can flow between the two spaces.

[0041] In order to enable the flat tray 37 to move vertically, a vacuum-compatible linear actuator 39 is installed on the bottom disc 30. The output end of the vacuum-compatible linear actuator 39 is connected to the flat tray 37. When the vacuum-compatible linear actuator 39 starts working, it can drive the flat tray 37 to move up and down.

[0042] The vacuum-compatible linear actuator 39 is connected to a programmable logic controller (PLC), which is connected to a proximity switch mounted on the bottom disc 30. A sensing block is mounted on the baffle 3, corresponding to the flow port 4. During the rotation of the bottom disc 30, when the proximity switch passes over the sensing block, it sends an electrical signal to the PLC, which then controls the vacuum-compatible linear actuator 39 to operate. There are two sensing blocks. When the proximity switch passes over the first sensing block, the PLC controls the vacuum-compatible linear actuator 39 to operate, causing the flat tray 37 to move downward. When the proximity switch passes over the second sensing block, the PLC controls the vacuum-compatible linear actuator 39 to reset, causing the flat tray 37 to move upward and reset.

[0043] Finally, this technical solution also includes an outer cover 40, with a sealing flange at the lower end of the outer cover. The outer cover 40 is located directly above the furnace body 1. An outer extension plate 41 is installed on the furnace body 1, and an outer vertical arm 42 is fixed on the outer extension plate 41. A horizontal lifting arm 43 is connected to the outer vertical arm 42, and the inner end of the horizontal lifting arm 43 is connected to the outer cover 40. A power output mechanism 44 is installed on the outer extension plate 41. The power output mechanism 44 can be an electric push rod, and the output end of the power output mechanism 44 is connected to the horizontal lifting arm 43. 3. Through the operation of the power output mechanism 44, the horizontal boom 43 can be driven to move vertically, thereby raising and lowering the outer cover 40. When the outer cover 40 moves downward, its lower end can abut against the epitaxial disk 41. At this time, the outer cover 40 covers the film deposition assembly. A vacuum port is provided on the outer cover 40. When the lower port of the outer cover 40 is engaged with the epitaxial disk 41, the vacuum equipment can be connected to the vacuum port, and then the internal environment of the outer cover 40 can be vacuumed. In order to perform vacuum treatment on the internal space of the heating unit 2, a side opening 46 is provided on the heating unit 2, and an adjustment arm 45 is provided on the outer cover. The inner end of the adjustment arm 45 is connected to a sealing plug. When the outer cover body is engaged with the outer extension plate 41, the side opening 46 corresponds to the adjustment arm 45. At this time, the movement of the sealing plug can be controlled by the adjustment arm 45 to make the sealing plug engage with the side opening 46 and achieve the closure of the side opening 46.

[0044] In this technical solution, after the heating unit 2 is installed on the furnace body 1, the guide shroud 36 is adjusted to move downward slightly, and then the outer cover 40 is moved downward until it is engaged with the outer extension plate 41. The space inside the outer cover 40 is vacuumed by an external vacuuming device. After the vacuuming is completed, the side opening 46 is sealed by controlling the control arm 45, which facilitates the subsequent coating process.

[0045] In this technical solution, the sealing components and housing are made of materials suitable for vacuum environments (such as stainless steel, ceramics, and high-temperature resistant seals) and undergo degassing treatment.

[0046] The device embodiments described above are merely illustrative. The units described as separate components may or may not be physically separate. The components shown as units may or may not be physical units; that is, they may be located in one place or distributed across multiple network units. Some or all of the modules can be selected to achieve the purpose of this embodiment according to actual needs. Those skilled in the art can understand and implement this without any creative effort.

[0047] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, and not to limit them; although the present invention has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some of the technical features; and these modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the spirit and scope of the technical solutions of the embodiments of the present invention.

Claims

1. An integrated co-steam source oven, characterized in that, include: The furnace body (1) is provided with several positioning chambers, and the top of the furnace body (1) is provided with several flow ports (4). Heating unit (2) is used to carry raw materials, and the internal space of heating unit (2) can be connected to flow port (4); The membrane deposition assembly is located above the furnace body (1) and is used to support the substrate. A deposition space is provided inside the membrane deposition assembly. The flow guide (36) is installed on the membrane deposition assembly and can cover the flow port (4) to connect the deposition space with the internal space of the heating unit (2); The outer cover (40) can cover the membrane deposition assembly and the heating unit (2). The outer cover (40) can be connected to a vacuum pumping device, and the space covered by the outer cover (40) can be evacuated by the vacuum pumping device. The membrane deposition assembly is rotatable and, during its rotation, the flow guide (36) passes over several flow ports (4) in sequence.

2. The integrated co-steam source furnace according to claim 1, characterized in that, A sealing component is installed at the flow port (4) of the furnace body (1). The sealing component can be coupled with the membrane deposition component. When the membrane deposition component rotates and moves, the flow port (4) can be opened.

3. The integrated co-distillation source furnace according to claim 2, characterized in that, The sealing assembly includes: The roller body (6) is provided with a central opening (8), which extends radially along the roller body (6) and penetrates the roller body (6); A horizontal central shaft (7) is used to connect the roller (6) to the top of the furnace body (1), so that the roller (6) can rotate and the central opening (8) can switch between vertical and horizontal states.

4. The integrated co-distillation source furnace according to claim 3, characterized in that, A mating wheel (9) is installed on the horizontal central shaft (7). The mating wheel (9) is coupled with a transmission gear (10) and connected to a guide component (5) through the transmission gear (10). The guide component (5) is installed at the bottom of the film deposition assembly. When the guide component (5) makes a circular motion, it causes the horizontal central shaft (7) to rotate.

5. The integrated co-distillation source furnace according to claim 3, characterized in that, The roller body (6) is provided with a support roller (16), which supports the bottom of the film deposition assembly when the center opening (8) is horizontal.

6. The integrated co-distillation source furnace according to claim 4, characterized in that, A locking assembly is installed on the horizontal central shaft (7), which can lock the roller (6) in place. The locking assembly can be coupled with the guide component (5).

7. The integrated co-distillation source furnace according to claim 6, characterized in that, The locking component includes: Locking plate (17) is connected to horizontal central shaft (7), and lock cylinder is installed on locking plate (17); The chuck (24) is connected to the horizontal central shaft (7) and can rotate. When the chuck (24) rotates, it can apply force to the lock cylinder. The chuck (24) is connected to a lever (23), which allows the chuck (24) to rotate.

8. The integrated co-distillation source furnace according to any one of claims 1-7, characterized in that, The film deposition assembly includes: The bottom disc (30) is rotatable and has an inlet, through which the flow guide (36) can pass; The outer shell (35) and the bottom disc (30) work together to form a whole, and the two connect to enclose the deposition space.

9. The integrated co-steam source oven according to claim 8, characterized in that, The film deposition assembly further includes: A flat tray (37) is located in the deposition space and connected to a flow guide (36), which penetrates the flat tray (37). A vacuum-compatible linear actuator (39), located between the flat tray (37) and the bottom disc (30), is used to move the flat tray (37) vertically so that the lower end of the flow guide (36) abuts against the top of the furnace body (1).

10. The integrated co-distillation source oven according to claim 9, characterized in that, The deposition space is provided with a sealing component (38), which can cooperate with the upper port of the flow guide (36). After the two cooperate, the upper port of the flow guide (36) can be closed by the sealing component (38).

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