Energy-saving high-purity special gas purification column with waste heat utilization

Abstract

The application relates to a waste heat utilization energy-saving type high-purity special gas purification tower, which comprises a rectifying kettle, a packing layer is arranged in the rectifying kettle, a liquid distribution tray is rotationally arranged above the packing layer, a feeding pipe is installed on the side wall of the rectifying kettle above the liquid distribution tray, overflow holes for allowing raw materials to flow downwards are formed in the liquid distribution tray, and an ultrasonic atomizer is further installed on the liquid distribution tray; a purification tower body is connected to the top of the rectifying kettle, the purification tower body adopts a modular segmented heating structure, and each tower segment is provided with an independent micro heat pump system; and a condenser is connected to the purification tower body and used for liquefying the gas flowing out of the purification tower body, a waste heat recovery system is arranged between the condenser and the rectifying kettle, and the waste heat of the condenser is recovered through the waste heat recovery system and then used for preheating and heat preservation of the raw materials in the rectifying kettle. The application has the effect of improving the separation efficiency.

Description

Technical Field

[0001] This application relates to the technical field of purification towers, and in particular to a waste heat utilization energy-saving high-purity special gas purification tower. Background Technology

[0002] High-purity specialty gases are key raw materials for high-end industries such as semiconductor manufacturing, optical fiber production, and pharmaceutical synthesis, and their purity directly affects the performance indicators of the final products. With the development of industrial technology, the purity requirements for high-purity specialty gases have increased from the traditional 99.9% level to above 99.999%, placing higher demands on purification technologies. Currently, the industry commonly uses distillation to purify high-purity specialty gases, with the core equipment being the distillation column system, which mainly consists of three parts: a distillation kettle, a purification column, and a condenser.

[0003] Distillation kettles are mostly single-layer cylindrical structures with a simple internal separator, using electric or steam heating. Purification columns are mainly packed or plate columns, with traditional fixed distributors inside. Condensers generally use shell-and-tube structures, with water or low-temperature heat transfer oil as the cooling medium. During operation, the raw material is heated and vaporized in the distillation kettle and then enters the purification column, where components are separated by the packing or trays inside the column. The product at the top of the column is cooled and collected by the condenser.

[0004] The existing technology has the following defects: the system does not make full use of the waste heat generated during the distillation process, resulting in large energy loss and high energy consumption; the traditional serpentine coil heating method has problems such as large temperature gradient and local overheating, which affect distillation efficiency and product purity; the distribution of reflux liquid by the liquid separator is uneven, resulting in insufficient gas-liquid contact in the column and reduced separation efficiency. Summary of the Invention

[0005] In order to overcome the technical problems described in the prior art, this application provides a waste heat utilization energy-saving high-purity special gas purification tower.

[0006] The waste heat utilization energy-saving high-purity special gas purification tower provided in this application adopts the following technical solution: A waste heat utilization energy-saving high-purity special gas purification tower, comprising: A distillation vessel is provided with a packing layer inside the distillation vessel. A separating plate is rotatably arranged above the packing layer. A feed pipe is installed on the side wall of the distillation vessel above the separating plate. An overflow hole for the raw material to flow downward is opened on the separating plate. An ultrasonic atomizer is also installed on the separating plate. A purification column body, connected to the top of the distillation kettle, is equipped with a modular segmented heating structure, with each segment featuring an independent micro heat pump system; and A condenser, connected to the purification tower, is used to liquefy the gas flowing out of the purification tower. A waste heat recovery system is provided between the condenser and the distillation kettle. The waste heat of the condenser is recovered by the waste heat recovery system and used for preheating and heat preservation of the raw materials in the distillation kettle.

[0007] Furthermore, the dispensing tray includes a tray body, a dispensing rack fixed above the tray body, and a drive mechanism that drives the dispensing rack to rotate synchronously with the tray body. A centrifugal distribution groove is formed on the upper surface of the tray body, and multiple through grooves for gas flow are formed through the tray body. The multiple through grooves divide the tray body into multiple independent fan-shaped areas. The raw material in the feed pipe is guided to the centrifugal distribution groove in each fan-shaped area through the dispensing rack. A baffle is fixed at the end of the centrifugal distribution groove near the through groove. The ultrasonic atomizer and the overflow hole are both located at the bottom of the centrifugal distribution groove, and the ultrasonic atomizer is set close to the baffle.

[0008] Furthermore, the ultrasonic atomizer is tilted toward the center of the fan-shaped area.

[0009] Furthermore, the operating frequency of the ultrasonic atomizer is adjustable.

[0010] Furthermore, the micro heat pump systems in adjacent tower sections achieve cascaded utilization of heat through thermal coupling pipes.

[0011] Furthermore, a phase change material layer is provided in the purification tower corresponding to the micro heat pump system, and the phase change temperature of the phase change material layer matches the design temperature of the corresponding tower section.

[0012] Furthermore, the heating system of the distillation vessel adopts a spiral microchannel heat exchange tube, which is connected to the output end of the waste heat recovery system.

[0013] Furthermore, the inner surface of the spiral microchannel heat exchange tube is provided with a nanoporous coating.

[0014] In summary, the beneficial technical effects of this application are as follows: through the deep coupling design of the three systems of distillation kettle, purification tower and condenser, especially through the synergistic optimization of the liquid separator, modular segmented heating and waste heat recovery system, the key problems of high energy consumption, uneven liquid separation and lag in temperature control in traditional high-purity gas distillation equipment are solved. Attached Figure Description

[0015] Figure 1 This is a schematic diagram of the overall structure of an embodiment of this application.

[0016] Figure 2 This is a schematic diagram of the liquid distribution plate in an embodiment of this application.

[0017] Figure 3 This is a schematic diagram of the disk body in an embodiment of this application.

[0018] Reference numerals: 1. Distillation vessel; 2. Packing layer; 3. Separating tray; 31. Tray body; 32. Separating rack; 33. Drive mechanism; 331. Motor; 332. Transmission rod; 333. Bevel gear set; 334. Magnetic coupler; 4. Feed pipe; 5. Overflow hole; 6. Ultrasonic atomizer; 7. Purification tower body; 8. Condenser; 9. Waste heat recovery system; 10. Centrifugal distribution tank; 11. Through channel; 12. Baffle; 13. Phase change material layer; 14. Spiral microchannel heat exchange tube; 15. Micro heat pump system; 16. Output rod. Detailed Implementation

[0019] The technical solutions of this application will now be clearly and completely described with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of this application. Based on the embodiments of this application, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this application.

[0020] This application discloses an energy-saving high-purity specialty gas purification tower that utilizes waste heat. (Refer to...) Figure 1 , Figure 2 and Figure 3 A high-purity special gas purification tower utilizing waste heat and energy includes a distillation kettle 1, a purification tower body 7 connected to the top of the distillation kettle 1, and a condenser 8 connected to the purification tower body 7. The distillation kettle 1 contains a packing layer 2, with a separating plate 3 above the packing layer 2. A feed pipe 4 is installed on the side wall of the distillation kettle 1 above the separating plate 3. A heating system of spiral microchannel heat exchange tubes 14 is installed at the bottom of the distillation kettle 1, arranged along the inner wall of the distillation kettle 1 and located below the packing layer 2. The raw material enters the distillation kettle 1 through the feed pipe 4, is separated by the separating plate 3, and flows to the packing layer 2. Under gravity, the raw material falls through the gaps in the packing layer 2 to the bottom of the distillation kettle 1. The spiral microchannel heat exchange tubes 14 heat the raw material at the bottom of the distillation kettle 1, causing the light components to vaporize and flow upward through the gaps in the packing layer 2 into the purification tower body 7. The gas purified by the purification tower 7 enters the condenser 8 for liquefaction, thereby obtaining a high-purity distillation product.

[0021] Considering that under high-pressure conditions, the existing liquid distribution plate 3 is prone to channeling and wall flow phenomena, resulting in uneven gas-liquid distribution, therefore, referring to... Figure 1 , Figure 2 and Figure 3The separating plate 3 is rotatably mounted inside the distillation vessel 1. The separating plate 3 includes a plate body 31, a separating rack 32 fixed above the plate body 31, and a driving mechanism 33 that drives the separating rack 32 to rotate synchronously with the plate body 31. The plate body 31 is rotatably mounted inside the distillation vessel 1 via bearings or supports. A centrifugal distribution groove 10 is formed on the upper surface of the plate body 31, and multiple overflow holes 5 are spaced apart at the bottom of the centrifugal distribution groove 10. Multiple through grooves 11 for gas flow are formed through the plate body 31, dividing the plate body 31 into multiple independent fan-shaped areas. In this embodiment, six through grooves 11 are provided and are evenly distributed along the axial direction of the plate body 31, so that the plate body 31 is divided into a central disk and six fan-shaped areas evenly distributed around the central disk.

[0022] To ensure that the raw materials can be smoothly guided into the centrifugal distribution tank 10 of the disc 31, refer to Figure 2 and Figure 3 The dispensing rack 32 includes six strip-shaped grooves, each located at the center line of one of the six fan-shaped areas on the disc body 31. The ends of the six grooves that are close to each other are connected to form the central part of the dispensing rack 32, which is coaxially and fixedly connected to the central disc of the disc body 31. Multiple through holes aligned with the centrifugal distribution tank 10 are provided through the bottom of each strip-shaped groove. The outlet end of the feed pipe 4 extends above the central part of the dispensing rack 32. Raw materials are fed onto the dispensing rack 32 through the feed pipe 4, flowing through the through holes in the six strip-shaped grooves into the centrifugal distribution tank 10 on the disc body 31. As the disc body 31 rotates, the raw materials are evenly distributed onto the packing layer 2 through the overflow holes 5 on the centrifugal distribution tank 10. Furthermore, during the rotation of the disc body 31, the raw materials undergo centrifugal motion within the centrifugal distribution tank 10, causing the overflow holes 5 to be flushed as they flow through them, preventing blockage.

[0023] Considering the centrifugal motion, the raw material tends to flow towards the end of the centrifugal distribution tank 10, therefore, referring to... Figure 2 and Figure 3A baffle 12 is fixed at the end of the centrifugal distribution tank 10 near the through channel 11. An ultrasonic atomizer 6 is installed at the bottom of the centrifugal distribution tank 10 near the baffle 12. The ultrasonic atomizer 6 not only breaks down the raw material gathered at the end of the centrifugal distribution tank 10 into micron-sized droplets for ultra-uniform distribution, but also generates a micro-jet that can backflow through the overflow hole 5, increasing anti-clogging capability by 20 times. Because the ultrasonic atomizer 6 is located at the end of the centrifugal distribution tank 10, to prevent micron-sized droplets from affecting gas flow through the through channel 11, the ultrasonic atomizer 6 is tilted towards the center of the fan-shaped area; that is, the spray direction of the ultrasonic atomizer 6 is away from the through channel 11. Furthermore, the operating frequency of the ultrasonic atomizer 6 is adjustable, allowing adjustment based on the viscosity of different raw materials. This ensures that the raw material is evenly sprayed onto the filler layer 2 while also preventing the overflow hole 5 from becoming clogged.

[0024] For the configuration of drive mechanism 33, refer to 1 and Figure 2 The drive mechanism 33 includes an output rod 16 fixed at the center of the distributor rack 32, a transmission rod 332 rotatably mounted on the side wall of the distillation vessel 1, a bevel gear set 333 located between the transmission rod 332 and the output rod 16, and a motor 331 that drives the transmission rod 332 to rotate. Considering the service life of the motor 331 and the sealing of the distillation vessel 1, the motor 331 is sealed and fixed to the outside of the distillation vessel 1 by a flange, completely isolated from the inside. The end of the transmission rod 332 away from the bevel gear set 333 is rotatably embedded in the side wall of the distillation vessel 1. A magnetic coupler 334 is provided between the transmission rod 332 and the output shaft of the motor 331. Under the action of the magnetic coupler 334, neither the transmission rod 332 nor the output shaft of the motor 331 needs to pass through the side wall of the distillation vessel 1 and can achieve synchronous rotation. This design not only ensures the sealing of the distillation vessel 1, but also effectively drives the distributor plate 3 to rotate, so as to achieve uniform spraying of raw materials.

[0025] To reduce energy consumption while ensuring purification efficiency, refer to Figure 1 The purification tower 7 adopts a modular segmented heating structure, with each segment equipped with an independent micro heat pump system 15. Each segment is precisely heated according to separation requirements, avoiding excessive energy consumption caused by traditional overall heating. At the same time, the micro heat pump systems 15 of adjacent tower segments achieve cascaded utilization of heat through thermal coupling pipes, minimizing energy consumption to a certain extent.

[0026] To further achieve precise temperature control and energy consumption reduction in the purification tower, refer to Figure 1A phase change material layer 13 is installed inside the purification tower 7 at the location corresponding to the micro heat pump system 15. The phase change temperature of the phase change material layer 13 matches the design temperature of the corresponding tower section. The phase change material layer 13 absorbs or releases latent heat, smooths temperature fluctuations, and maintains the temperature stability of the tower section. If the temperature of the high-temperature section inside the purification tower 7 is 150-200℃, the main material of the corresponding phase change material layer 13 is selected as NaNO3-KNO3 eutectic salt, with a phase change point of 172℃±1℃ and a latent heat of 178kJ / kg. In addition, 2-5% nano Al2O3 can be added to improve thermal conductivity, and a carbon fiber skeleton (3vol%) can be added to suppress phase separation.

[0027] After the gas flows out of the purification tower 7, it enters the condenser 8 for liquefaction. A large amount of heat is generated during liquefaction, which can be collected and used for preheating and maintaining the temperature of the raw material in the distillation kettle 1, thus further reducing energy consumption. Therefore, referring to... Figure 1 A waste heat recovery system 9 is installed between the condenser 8 and the distillation vessel 1. The spiral microchannel heat exchange tube 14 at the bottom of the distillation vessel 1, which is used to heat the raw material, is connected to the output end of the waste heat recovery system 9, so that the heat in this part can be directly used for heating the raw material. In addition, the inner surface of the spiral microchannel heat exchange tube 14 is coated with a nanoporous coating, which increases the boiling heat transfer coefficient by 3-5 times, further reducing heating energy consumption.

[0028] The implementation principle of a waste heat utilization energy-saving high-purity special gas purification tower in this application embodiment is as follows: First, the raw material is guided to the liquid distribution rack 32 through the feed pipe 4. The raw material flows into the centrifugal distribution tank 10 on the disc body 31 through the through holes on the six strip grooves of the liquid distribution rack 32. As the drive mechanism 33 drives the disc body 31 to rotate, the raw material is evenly sprayed onto the packing layer 2 through the overflow hole 5 on the centrifugal distribution tank 10. In addition, during the rotation of the disc body 31, the raw material generates centrifugal motion in the centrifugal distribution tank 10, so that the raw material will flush the overflow hole 5 when it flows through it, preventing the overflow hole 5 from being blocked by the raw material. When the raw material flows to the end of the centrifugal distribution tank 10 under the action of centrifugal force, the ultrasonic atomizer 6 can not only break the raw material gathered at the end of the centrifugal distribution tank 10 into micron-sized droplets to achieve ultra-uniform distribution, but also the micro-jet generated by the ultrasonic waves can back-flush the overflow hole 5, thereby improving the anti-clogging ability by 20 times.

[0029] After the raw material is evenly sprayed onto the packing layer 2, it falls to the bottom of the distillation vessel 1 under gravity through the gaps in the packing layer 2. The spiral microchannel heat exchange tube 14 heats the raw material at the bottom of the distillation vessel 1, causing the light components to vaporize and flow upward through the gaps in the packing layer 2 into the purification tower 7. The gas purified by the purification tower 7 enters the condenser 8 for liquefaction, thereby obtaining a high-purity distillation product.

[0030] The above are all preferred embodiments of this application, and are not intended to limit the scope of protection of this application. Therefore, all equivalent changes made in accordance with the structure, shape and principle of this application should be covered within the scope of protection of this application.

Claims

1. A waste heat utilization energy-saving high-purity special gas purification tower, characterized in that: include A distillation vessel (1) is provided with a packing layer (2) inside the distillation vessel (1), and a separating plate (3) is rotatably arranged above the packing layer (2). A feed pipe (4) is installed on the side wall of the distillation vessel (1) above the separating plate (3). An overflow hole (5) for the raw material to flow downward is opened on the separating plate (3). An ultrasonic atomizer (6) is also installed on the separating plate (3). A purification column (7) is connected to the top of the distillation vessel (1). The purification column (7) adopts a modular segmented heating structure, and each column segment is equipped with an independent micro heat pump system (15). The condenser (8) is connected to the purification tower (7) and is used to liquefy the gas flowing out of the purification tower (7). A waste heat recovery system (9) is provided between the condenser (8) and the distillation kettle (1). The waste heat of the condenser (8) is recovered by the waste heat recovery system (9) and used for preheating and heat preservation of the raw materials in the distillation kettle (1).

2. The waste heat utilization energy-saving high-purity special gas purification tower according to claim 1, characterized in that, The liquid distribution plate (3) includes a plate body (31), a liquid distribution rack (32) fixed above the plate body (31), and a drive mechanism (33) that drives the liquid distribution rack (32) to rotate synchronously with the plate body (31). A centrifugal distribution groove (10) is provided on the upper surface of the plate body (31). Multiple through grooves (11) for gas flow are provided through the plate body (31). The multiple through grooves (11) divide the plate body (31) into multiple independent fan-shaped areas. The raw material in the feed pipe (4) is guided to the centrifugal distribution groove (10) in each fan-shaped area through the liquid distribution rack (32). A baffle (12) is fixed at the end of the centrifugal distribution groove (10) near the through groove (11). The ultrasonic atomizer (6) and the overflow hole (5) are both located at the bottom of the centrifugal distribution groove (10), and the ultrasonic atomizer (6) is set near the baffle (12).

3. The waste heat utilization energy-saving high-purity special gas purification tower according to claim 2, characterized in that, The ultrasonic atomizer (6) is tilted toward the center of the fan-shaped area.

4. The waste heat utilization energy-saving high-purity special gas purification tower according to claim 2, characterized in that, The operating frequency of the ultrasonic atomizer (6) is adjustable.

5. The waste heat utilization energy-saving high-purity special gas purification tower according to claim 1, characterized in that, The micro heat pump system (15) of the adjacent tower section realizes the cascade utilization of heat through thermal coupling pipes.

6. The waste heat utilization energy-saving high-purity special gas purification tower according to claim 1, characterized in that, A phase change material layer (13) is provided inside the purification tower (7) at the location corresponding to the micro heat pump system (15), and the phase change temperature of the phase change material layer (13) matches the design temperature of the corresponding tower section.

7. The waste heat utilization energy-saving high-purity special gas purification tower according to claim 1, characterized in that, The heating system of the distillation vessel (1) adopts a spiral microchannel heat exchange tube (14), which is connected to the output end of the waste heat recovery system (9).

8. The waste heat utilization energy-saving high-purity special gas purification tower according to claim 7, characterized in that, The inner surface of the spiral microchannel heat exchange tube (14) is provided with a nanoporous coating.

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