Parallelism detection device and parallelism detection method

Abstract

The application discloses a parallelism detection device and a parallelism detection method. The parallelism detection device comprises a base, a plurality of sensors and a processor. The base comprises a base front surface and a base back surface, the base back surface is used for assembling with a probe head carrier and is parallel to the base front surface. The plurality of sensors are installed on the base. Each sensor comprises a probe head, all the probe heads are uniformly distributed relative to the base front surface, the distance between the top end of each probe head and the base front surface is equal before testing the parallelism, and the plurality of probe heads are used for one-to-one contact or non-contact with different positions of a pressing block to obtain distance values of the probe heads. The processor is connected with the plurality of sensors, and the parallelism between the probe head carrier and the pressing block is obtained according to the plurality of distance values. Therefore, the parallelism detection between the probe head carrier and the pressing block can be conveniently realized.

Description

Technical Field

[0001] This application pertains to testing devices, and particularly relates to a parallelism testing device and a parallelism testing method. Background Technology

[0002] In the research and development and production of probe tips for vertical probe cards, bending fatigue tests are typically required. This involves repeatedly applying a fixed amount of compression to the probe tip, causing it to bend and spring back repeatedly. The purpose is twofold: firstly, to verify the bending fatigue strength of the probe arm (by conducting a sufficient number of bending cycles, such as 1 million), and secondly, to release internal stress in the production process through a small number of bending fatigue cycles (e.g., 10,000 to 20,000 cycles), reducing the risk of probe breakage. Because probe tips have a large number of implanted needles with a large area (some probe cards have implanted needles exceeding 60×60mm), ensuring the accuracy and consistency of the bending fatigue test results requires that the compression of all probe tips be essentially the same. Therefore, the parallelism between the probe tip stage and the pressure block in the fatigue testing device is a critical equipment parameter, typically required to be controlled within a few micrometers.

[0003] However, the space between the probe stage and the pressure block is narrow, so how to detect the parallelism between the probe stage and the pressure block is a technical problem that needs to be solved. Summary of the Invention

[0004] The purpose of this application is to overcome the shortcomings of the prior art and provide a parallelism detection device that can conveniently realize the parallelism detection between the probe head stage and the pressure block.

[0005] To achieve the above objectives, the technical solution adopted in this application is as follows:

[0006] A parallelism detection device for detecting the parallelism between a probe head stage and a pressure block in a fatigue testing apparatus includes a base, multiple sensors, and a processor. The base includes a front side and a back side, the back side being assembled with the probe head stage and parallel to the front side. Multiple sensors are mounted on the base; each sensor includes a probe, all probes being evenly distributed relative to the front side of the base; before testing the parallelism, the tips of all probes are equidistant from the front side of the base; the multiple probes are used to contact or not contact different positions on the pressure block to obtain distance values ​​for each probe. The processor is connected to the multiple sensors and obtains the parallelism between the probe head stage and the pressure block based on the multiple distance values.

[0007] In some embodiments, the sensor is a contact displacement sensor, at least a portion of which is vertically and retractably connected to the base. Before testing parallelism, the probe of each contact displacement sensor extends out of the front of the base; the probe of each contact displacement sensor is used to abut against the pressure block to obtain the distance value.

[0008] In some embodiments, at least a portion of the sensor probe is threadedly connected to the base to enable the liftability.

[0009] In some embodiments, the sensor is a non-contact sensor that utilizes acoustic signals, a non-contact displacement sensor that utilizes optical signals, or a capacitive ranging sensor.

[0010] In some embodiments, the base has a square front, and there are four sensors distributed at the corners of the base's front, with the probes located at the vertices of the square. Alternatively, there are five sensors distributed at the corners and center of the base's front, with the five probes located at the intersection of the vertices of the square and the diagonals of the square.

[0011] In some embodiments, the parallelism detection device includes a reference plate with a reference plane. When the reference plane is in contact with the front of the base and the top of each probe is in contact with the reference plane, the processor resets the reading of each sensor to zero.

[0012] A parallelism detection method is provided for detecting the parallelism between a probe head stage and a pressure block. The parallelism detection method includes:

[0013] A parallelism testing device is provided, comprising a base and sensors spaced apart on the base; each sensor includes a probe; the base and the sensors are placed between a probe head stage and a pressure block, with all probes evenly distributed relative to the pressure block; before testing the parallelism, all probes are equidistant from the front of the base, and the distance values ​​of each probe are obtained by having multiple probes make contact or non-contact with different positions on the pressure block in a one-to-one correspondence.

[0014] The parallelism between the probe head stage and the pressure block is obtained based on multiple distance values.

[0015] In some implementations, the readings of each sensor are calibrated before parallelism is detected, including the following steps: the reference plane of the reference plate is placed against the front of the base, and the tip of each probe is abutted against the reference plane, at which point the processor resets the readings of each sensor to zero.

[0016] In some embodiments, the sensor is a contact displacement sensor, and the pressure block abuts against the probe of each contact displacement sensor to obtain the distance value.

[0017] In some embodiments, the base has a square front, and there are four sensors distributed at the corners of the base's front, with the probes located at the vertices of the square. Alternatively, there are five sensors distributed at the corners and center of the base's front, with the five probes located at the intersection of the vertices of the square and the diagonals of the square.

[0018] This application has the following advantages compared with the prior art:

[0019] Since the base and sensor of the parallelism detection device are located between the pressure block and the probe head stage, and the distance value is obtained by the contact or non-contact between the pressure block and the sensor probe, the parallelism can be obtained based on the distance value. Thus, the parallelism detection between the probe head stage and the pressure block can be conveniently realized. Attached Figure Description

[0020] Figure 1 This is a schematic diagram of a parallelism detection device according to one embodiment of this application;

[0021] Figure 2 yes Figure 1 A three-dimensional view of the sensor of the parallelism detection device shown;

[0022] Figure 3 yes Figure 2 The side view of the sensor shown;

[0023] Figure 4 yes Figure 2 A schematic diagram of the assembly consisting of the sensor and the base;

[0024] Figure 5 This is a schematic diagram of one implementation method in which the sensor is installed on the base and is in a free state;

[0025] Figure 6 A schematic diagram of sensor height zeroing in one implementation method;

[0026] Figure 7 This is a schematic diagram illustrating the parallelism measurement between the probe head stage and the pressure block in one implementation method.

[0027] Figure 8 This is a schematic diagram of a fatigue testing device in related technologies;

[0028] Figure 9a This is a schematic diagram of a probe that is not bent in related technologies;

[0029] Figure 9bThis is a schematic diagram of a bent probe in related technologies. Detailed Implementation

[0030] To illustrate the technical content, structural features, achieved objectives, and effects of the invention in detail, the technical solutions of the embodiments of this application will be described below with reference to the accompanying drawings. Obviously, the described embodiments are only a part of the embodiments of this application, and not all of them. In the following description, for illustrative purposes, numerous specific details are set forth to provide a detailed description of various exemplary embodiments or implementations of the invention. However, various exemplary embodiments can also be implemented independently without these specific details or in one or more equivalent arrangements. Furthermore, the various exemplary embodiments may differ, but are not necessarily exclusive. For example, without departing from the inventive concept, the specific shape, structure, and characteristics of the exemplary embodiments may be used or implemented in another exemplary embodiment.

[0031] See Figure 8 , Figure 8 A fatigue testing device for a probe is disclosed, comprising a base 21, a probe head stage 22, a pressure block 23, a pressure block connecting bracket 24, a motor module 25, and a column 26. The probe head stage 22 is located on the base 21. The pressure block 23 is connected to the motor module 25 via the pressure block connecting bracket 24. The motor module 25 is mounted on the column 26.

[0032] During testing, probe 4 is positioned between probe head platform 22 and pressure block 23. Motor module 25 drives pressure block 23 to reciprocate, thereby abutting or moving away from probe 4, thus repeatedly applying a fixed amount of compression to the tip of probe 4, causing probe 4 to bend and spring back repeatedly. Figure 9a This shows that probe 4 is not bent. Figure 9b This illustrates that probe 4 is bent.

[0033] To address the problem that the narrow space between the probe head stage 22 and the pressure block 23 makes it difficult to detect the parallelism between them, this application discloses a parallelism detection device.

[0034] See Figure 1 A parallelism detection device is used to detect the parallelism between the probe head stage 22 and the pressure block 23 of a fatigue testing device, including a base 11, multiple sensors 12, and a processor 13. See also... Figure 4The base 11 includes a base front 111 and a base back 112. The base back 112 is used for assembly with the probe head stage 22 and is parallel to the base front 111. Here, if processing conditions allow, the parallelism means that the base back 112 and the base front 111 are absolutely parallel. Of course, in some embodiments, due to errors such as processing errors, the base back 112 and the base front 111 cannot be absolutely parallel, but these are within a small range to ensure the measurement accuracy of the parallelism between the probe head stage 22 and the pressure block 23. Therefore, in some embodiments, the parallelism between the base front 111 and the base back 112 is Δ, where Δ ≤ 2 μm.

[0035] Multiple sensors 12 are mounted on the base 11. In some embodiments, see [reference needed]. Figures 2 to 5 Sensor 12 includes a sensor base 121 and a probe 122. Although Figure 1 , Figure 5 and Figure 7 Four sensors 12 are shown, but those skilled in the art will understand that typically, there are at least three sensors 12. Each sensor 12 is mounted on a base 11 via a sensor base 121, for example, a groove is formed in the base 11, and the sensor base 121 is located within the groove to achieve the mounting. All probes 122 are evenly distributed relative to the pressure block 23 because the front surface 111 of the base is parallel to the mounting surface of the probe head stage 22. Furthermore, the parallelism between the probe head stage 22 and the pressure block 23 is measured; therefore, it can also be said that all probes 122 are evenly distributed relative to the front surface 111 of the base. The method of even distribution is not limited; for example, they can be evenly distributed circumferentially along the front surface 111 of the base. Figure 1 When the base 111 (or pressure block 23) is square, the probes 122 are evenly distributed circumferentially. When the pressure block 23 has other shapes (e.g., circular), the probes 122 can still be evenly distributed circumferentially around the pressure block 23, or, in addition to the circumferential direction, the probes 122 can also be distributed between the edge and center of the pressure block 23. In short, even distribution should ultimately reflect the parallelism between the pressure block 23 and the probe head stage 22.

[0036] Before testing the parallelism, the tips of all probes 122 are equidistant from the front surface 111 of the base. This equivalence includes: 1) manufacturing and assembly errors that result in no or minimal error in the distance between each probe 122 and the front surface 111 of the base, insufficient to affect the accuracy of the parallelism measurement; 2) distance differences between the probes 122 and the front surface 111 of the base that may affect measurement accuracy, in which case zeroing is required. For more details, see [link to documentation]. Figure 4 , Figure 5 and Figure 6In the installed state, due to manufacturing and assembly errors, the tops of the four probes 122 cannot be coplanar, inevitably resulting in a certain height difference between them and the front surface 111 of the base; that is, the distances are not equidistant. Because of this aforementioned error, the height readings of the probes 122 must be calibrated (also known as zeroing) before use of the parallelism testing device. See [link / reference] Figure 6 The parallelism testing device includes a reference plate. The reference plate includes a reference plane 3. During calibration, the front surface 111 of the base 11 needs to be aligned with the reference plane 3 (the reference plane 3 should be a plane with extremely small flatness error, such as a finely ground marble countertop). At this time, the tip of the probe 122 abuts against the reference plane 3, thus, as... Figure 6 As shown, the top of the probe head 122, the reference plane 3, and the front surface 111 of the base are all coplanar. The processor 13 clears the readings of each sensor 12 to zero, thus completing the height calibration operation of the sensor 12.

[0037] See Figure 7 and Figure 1 and combined Figure 8 The plurality of probes 122 are used to contact or not contact different positions of the pressure block 23 to obtain the distance value of each probe 122. The processor 13 is connected to the plurality of sensors 12, see [link to documentation]. Figure 1 , Figure 2 and Figure 3 Each sensor 12 includes a connector 124, and each connector 124 is connected to the processor 13 via a connecting line 14. The processor 13 obtains the parallelism between the probe head stage 22 and the pressure block 23 based on a plurality of the distance values.

[0038] As described above, since the base 11 and sensor 12 of the parallelism detection device are located in the narrow space between the pressure block 23 and the probe head stage 22, and the pressure block 23 is in contact with or not in contact with the probe 122 of the sensor 12, the distance value is obtained, and the parallelism is obtained based on the distance value. Thus, the parallelism detection between the probe head stage 22 and the pressure block 23 can be conveniently realized.

[0039] See Figure 2 , Figure 3 and Figure 7The sensor 12 is a contact displacement sensor, at least a portion of which is vertically and flexibly connected to the base 11. Before testing parallelism, the probe 122 of each contact displacement sensor extends out of the front surface 111 of the base. Therefore, the vertically flexible structure is not limited, as long as the aforementioned purpose is achieved. The probe 122 of each contact displacement sensor is used to abut against the pressure block 23 to obtain the distance value. Of course, as an alternative to the contact displacement sensor, in some other embodiments, when the sensor is a non-contact sensor, the sensor is a non-contact sensor utilizing sound wave signals, such as an ultrasonic sensor; the sensor is a non-contact displacement sensor utilizing light signals, such as a laser displacement sensor; the sensor can also be a capacitive ranging sensor.

[0040] As described above, the sensor 12 is a contact displacement sensor. Compared with non-contact sensors, because the measurement is achieved through the contact between the probe 122 and the pressure block 23, the interference in parallelism measurement is small, resulting in high accuracy, high reliability, and easier implementation.

[0041] See Figure 2 and Figure 3 At least a portion of the probe 122 of the sensor 12 is threadedly connected to the base 11 to achieve the liftability. This includes the following situations: 1) The probe 122 is fixedly connected to a height adjustment screw 123, which is threadedly connected to the base 11 or to the structure of the sensor 12 (e.g., sensor base 121). By adjusting the height adjustment screw 123, the probe 122 is ensured to be higher than the front surface 111 of the base 11. 2) In another embodiment, the probe 122 is threadedly connected to the height adjustment screw 123, which is fixed to the base 11. Thus, the probe 122 can also be raised or lowered by adjusting the amount of thread tightening. To ensure stable contact between the sensor 12 and the measured surface (pressure block 23) during measurement without exceeding the measurement range and causing damage, in some embodiments, such as... Figure 3 and Figure 4 As shown, the height difference between the probe 122 and the front surface 111 of the base 11 is 0.1 mm < Hi < L (four sensors 12 are shown in the figure, therefore i = 1, 2, 3, 4). L represents the measurement range of the probe 122 of the sensor 12. In some embodiments, the measurement range L of the probe 122 can be selected between 0.2 and 2 mm.

[0042] As described above, the probe 122 is raised and lowered through a threaded connection so that the probe 122 can extend out of the front 111 of the base. In this way, through the engagement of the threads, the position of the probe 122 is not easily changed after adjustment, and the probe 122 has good stability and can be maintained in the adjusted position.

[0043] See Figure 1 The base front 111 is square, and four sensors 12 are shown in the figure. These four sensors 12 are distributed at the corners of the base front 111, and four probes 122 are distributed at the vertices of the square. Of course, if there are five sensors 12, then these five sensors 12 are distributed at the corners and center of the base front 111, and the five probes 122 are distributed at the intersection of the vertices of the square and the diagonals of the square.

[0044] As described above, by setting up four or five sensors and using the above-described positional relationship between the probes 122, the number of sensors 12 is reduced and the cost is lower, while still being able to measure the parallelism between the pressure block 23 and the probe head stage 22.

[0045] Based on the above, in a second aspect, this application discloses a parallelism detection method, which is used to detect the parallelism between the probe head stage and the pressure block, the parallelism detection method comprising:

[0046] A parallelism detection device is provided, comprising a base 11 and sensors 12 spaced apart on the base 11; each sensor 12 includes a probe 122. The base 11 and sensors 12 are placed between a probe head stage 22 and a pressure block 23, with all probes 122 evenly distributed relative to the pressure block 23. Before testing the parallelism, all probes 122 are equidistant from the front surface 111 of the base 11. The distance values ​​of each probe 122 are obtained by having multiple probes 122 make contact or non-contact with different positions of the pressure block 23.

[0047] The parallelism between the probe head stage 22 and the pressure block 23 is obtained based on multiple distance values.

[0048] In some embodiments of the parallelism detection method described above, the readings of each sensor 12 are calibrated before parallelism detection, including the following steps: the reference plane 3 of the reference plate is placed against the front surface 111 of the base, and the top of each probe 122 is aligned with the reference plane 3. At this time, the processor 13 resets the readings of each sensor to zero. How to calibrate is described in the aforementioned description of the parallelism detection device section, and will not be repeated here.

[0049] Subsequently, the calibrated parallelism testing device base 11 and sensors 12 are placed on the probe head stage 22, with the probes 122 of each of the four sensors facing upwards and aligned with the pressure block 23, ensuring that the probes 122 do not exceed the range of the pressure block 23. Figure 8The pressure block 23 is gradually moved downward by the drive motor module 25, so that the pressure block 23 is in stable contact with all the probes 122, but not directly in contact with the upper surface 221 of the probe head carrier 22. At this time, the height readings hi of each sensor 12 are recorded respectively (i=1, 2, 3, 4). By calculating the height difference, the parallelism error of the pressure block 23 relative to the front face 111 of the base can be obtained. Adding the parallelism error between the front face 111 and the back face 112 of the base 11, the parallelism error between the pressure block 23 and the probe head carrier 22 can be obtained.

[0050] P ≤ (himax – himin) + Δ, i=1, 2, 3, 4.

[0051] Of course, if calibration is not required, the calibration step can be omitted in the above steps.

[0052] In some embodiments of the above-mentioned parallelism detection method, the sensor is a contact displacement sensor, and the pressure block abuts against the probe of each contact displacement sensor to obtain the distance value.

[0053] In some embodiments of the above parallelism detection method, the base is square in shape, and there are four sensors distributed in the corners of the base and the probes are distributed at the vertices of the square. Alternatively, there are five sensors distributed in the corners and center of the base, and the five probes are distributed at the intersection of the vertices of the square and the diagonals of the square.

[0054] The foregoing has shown and described the basic principles, main features, and advantages of the present invention. Those skilled in the art should understand that the present invention is not limited to the above embodiments. The embodiments and descriptions in the specification are merely illustrative of the principles of the invention. Various changes and modifications can be made to the invention without departing from its spirit and scope. The scope of protection of the present invention is defined by the appended claims, specification, and their equivalents.

Claims

1. A parallelism testing device for detecting the parallelism between the probe head stage and the pressure block of a fatigue testing device, characterized in that, include: The base includes a base front and a base back, the base back being used for assembly with the probe head stage and also parallel to the base front; Multiple sensors are mounted on the base; each sensor includes a probe, and all probes are evenly distributed relative to the front of the base; before testing the parallelism, the tips of all probes are equidistant from the front of the base; the multiple probes are used to contact or not contact different positions of the pressure block to obtain the distance value of each probe; The processor, connected to the plurality of sensors, obtains the parallelism between the probe head stage and the pressure block based on the plurality of distance values.

2. The parallelism detection device according to claim 1, characterized in that, The sensor is a contact displacement sensor, and at least a portion of the contact displacement sensor is vertically and retractably connected to the base. Before testing parallelism, the probe of each contact displacement sensor extends out of the front of the base; the probe of each contact displacement sensor is used to abut against the pressure block to obtain the distance value.

3. The parallelism detection device according to claim 2, characterized in that, At least a portion of the sensor probe is threadedly connected to the base to enable the liftability.

4. The parallelism detection device according to claim 1, characterized in that, The sensor is a non-contact sensor that uses sound wave signals, a non-contact displacement sensor that uses light signals, or a capacitive ranging sensor.

5. The parallelism detection device according to claim 1, characterized in that, The base has a square front, and there are four sensors distributed in the corners of the front of the base, with the probes located at the vertices of the square; or, there are five sensors distributed in the corners and center of the front of the base, with the five probes located at the intersection of the vertices of the square and the diagonals of the square.

6. The parallelism detection device according to claim 1, characterized in that, The parallelism detection device includes a reference plate, which includes a reference plane. When the reference plane is in contact with the front of the base and the top of each probe is in contact with the reference plane, the processor resets the reading of each sensor to zero.

7. A parallelism detection method for detecting the parallelism between a probe head stage and a pressure block, characterized in that, The parallelism detection method includes: A parallelism testing device is provided, comprising a base and sensors spaced apart on the base; each sensor includes a probe; the base and the sensors are placed between a probe head stage and a pressure block, with all probes evenly distributed relative to the pressure block; before testing the parallelism, all probes are equidistant from the front of the base, and the distance values ​​of each probe are obtained by having multiple probes make contact or non-contact with different positions on the pressure block in a one-to-one correspondence. The parallelism between the probe head stage and the pressure block is obtained based on multiple distance values.

8. The method for detecting parallelism according to claim 7, characterized in that, Before testing parallelism, the readings of each sensor are calibrated, including the following steps: the reference plane of the reference plate is placed against the front of the base, and the top of each probe is aligned with the reference plane. At this time, the processor resets the readings of each sensor to zero.

9. The method for detecting parallelism according to claim 7, characterized in that, The sensor is a contact displacement sensor, and the pressure block abuts against the probe of each contact displacement sensor to obtain the distance value.

10. The method for detecting parallelism according to claim 7, characterized in that, The base has a square front, and there are four sensors distributed in the corners of the front of the base, with the probes located at the vertices of the square; or, there are five sensors distributed in the corners and center of the front of the base, with the five probes located at the intersection of the vertices of the square and the diagonals of the square.

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