Chip production and processing environment real-time detection device

Abstract

The present application relates to chip production environment detection technical field, especially to a kind of chip production processing environment real-time detection equipment, including detector body, the carrier rack being engaged in the recess of the top of detector body, the inside of carrier rack is provided with multiple wave-shaped optical glass pieces, the inside of carrier rack and located above optical glass piece is provided with moving beam, and the both sides of moving beam are provided with sawtooth plate matched with multiple optical glass pieces, and the bottom of sawtooth plate is fixedly connected with elastic wiper;The present application is completed with the collaborative action of moving beam and two groups of sawtooth plates, the directional scraping of the impurities on the surface of optical glass piece is completed, and the inside of moving beam is combined with the internal circulation airflow system, and the automatic reverse lifting mechanism of two groups of sawtooth plates, the isolation of impurities is realized, and the escape, classification filtering collection and cleaning effect are strengthened, the closed loop process of detection and cleaning is formed, the subsequent detection is effectively avoided by impurity accumulation interference, and the reliability of detection result is guaranteed.

Description

Technical Field

[0001] This invention relates to the field of chip manufacturing environment monitoring technology, and in particular to a real-time monitoring device for chip manufacturing and processing environment. Background Technology

[0002] Real-time environmental monitoring equipment is a specialized device designed for semiconductor chip manufacturing environments, capable of monitoring the cleanliness of the processing environment in real time. Its core consists of a detector, a support frame, and an optical glass plate. Using image acquisition sensors, it captures real-time image data of sedimented impurities on the glass plate, accurately analyzing the impurity content and type to provide feedback on the environmental cleanliness status.

[0003] Existing cleanliness testing instruments for chip manufacturing environments typically employ a structure consisting of a frame and multiple corrugated optical glass plates to increase the contact area for environmental impurities to settle, thereby achieving basic cleanliness testing functions. However, such devices generally have automated impurity cleaning mechanisms. In scenarios involving continuous testing over multiple time periods, impurities that settled on the surface of the optical glass plates in the previous testing period cannot be removed in time and will continue to accumulate on the glass plate surface. In subsequent testing periods, newly settled impurities overlap with old impurities, which not only obstructs the image acquisition sensor from accurately identifying new impurities but also interferes with the data analysis process for contaminant content and type. This results in a significant deviation between the test results and the actual environmental cleanliness, making it difficult to meet the high precision and high reliability requirements of chip manufacturing for environmental cleanliness monitoring.

[0004] To address the aforementioned technical shortcomings, a solution is proposed that utilizes the coordinated action of a moving beam and two sets of serrated plates to achieve directional scraping of impurities on the surface of the optical glass sheet. Combined with an internal circulating airflow system built inside the moving beam and an automatic reverse lifting mechanism for the two sets of serrated plates, this achieves impurity isolation to prevent escape, graded filtration and collection, and enhanced cleaning effects, forming a closed-loop process for detection and cleaning. This effectively avoids impurity accumulation interfering with subsequent detection, ensures the reliability of detection results, and provides accurate data support for controlling chip processing yield. Summary of the Invention

[0005] The purpose of this invention is to provide a real-time monitoring device for chip manufacturing and processing environments to address the aforementioned technical deficiencies.

[0006] The objective of this invention can be achieved through the following technical solution: a real-time detection device for chip manufacturing environment, comprising a detector body, a carrier frame that engages in a groove at the top of the detector body, a plurality of optical glass sheets arranged in a wave-like pattern inside the carrier frame, a movable beam arranged inside the carrier frame and above the optical glass sheets, and serrated plates that cooperate with the plurality of optical glass sheets on both sides of the movable beam, an elastic scraper for scraping off impurities on the top of the optical glass sheets fixedly connected to the bottom of the serrated plates, and switching blocks that cooperate with the carrier frame to cause the two sets of serrated plates to move in opposite directions symmetrically arranged on both sides of the movable beam.

[0007] Preferably, a fixing strip that abuts against the top of the optical glass plate is fixedly connected to the inner walls of both sides of the shelf, and a movable strip that abuts against the bottom of the optical glass plate is installed below the fixing strip by screws. A rounded corner is provided between the top of the fixing strip and the inner wall of the shelf, and a flat corner is provided on the edge of the top of the fixing strip away from the rounded corner.

[0008] Preferably, a guide rod that is slidably connected to the moving beam is fixedly connected to one side of the storage rack, and a lead screw that is threadedly connected to the moving beam is rotatably connected to the other side of the storage rack. A motor that drives the lead screw to rotate is installed on the storage rack by bolts.

[0009] Preferably, a plurality of movable blocks are fixedly connected to one side of the serrated plate, a vertical rod that is slidably connected to the corresponding movable block is fixedly connected to the bottom of the moving beam, a slot that is slidably connected to the switching block is opened through the moving beam, two sets of inclined slots distributed in a figure-eight pattern are opened on the switching block, and a horizontal rod that is slidably connected to the corresponding inclined slot is fixedly connected to the serrated plate.

[0010] Preferably, a ball spring pin is fixedly installed at the bottom of the switching block, and two sets of spherical limiting grooves adapted to the ball spring pin are provided at the bottom of the slot.

[0011] Preferably, the sawtooth plate has a flow-diverting cavity inside, and several inclined air blowing holes are opened through one side of the moving beam on the flow-diverting cavity, as well as two sets of air inlets. The moving beam has a filter cavity inside, and air outlets that cooperate with the corresponding air inlets are opened on both sides of the filter cavity. A sealing ring that slides against the sawtooth plate is embedded on the outer wall of the moving beam and around the corresponding air outlet.

[0012] Preferably, the bottom of the movable beam is fixedly connected to an air suction pipe communicating with the filter chamber, and micro motors are installed on both sides of the filter chamber, with fan blades installed on the conveyor shaft of the micro motors.

[0013] Preferably, the top of the movable beam has a discharge port communicating with the filter chamber, and a blocking plate is installed in the discharge port. At the bottom of the blocking plate and between the suction pipe and the micro motor, multiple filter screens are fixedly installed, and the filter pore size of the multiple filter screens gradually decreases from the suction pipe towards the micro motor.

[0014] This invention also proposes a method for using a real-time monitoring device for chip manufacturing and processing environments, comprising the following steps: Step 1: The detector body is placed in the testing area of ​​the chip processing stage, and the carrier is embedded in the top groove of the detector body; environmental impurities naturally settle on the surface of the optical glass plate, and the image acquisition sensors on both sides of the detector body collect image data of the material on the surface of the optical glass plate. The detection period is set and the content and type of pollutants during the period are analyzed based on the images. Step 2: After the single-period detection and contaminant analysis are completed, the moving beam moves horizontally on top of the optical glass plate. The elastic scraper of the serrated plate on the retracting side of the moving beam adheres to the optical glass plate to scrape off impurities, avoiding accumulation that would affect the accuracy of subsequent detection. The elastic scraper of the serrated plate on the advancing side separates from the optical glass plate to prevent impurities from accumulating on the side of the carrier and hindering subsequent cleaning. Step 3: The moving beam moves horizontally, and two sets of micro motors drive the fan blades to rotate. Air is drawn from between the two sets of serrated plates through the suction pipe. After being filtered by the filter screen, the impurities are collected in the filter chamber. The filtered air enters the air inlet of the corresponding serrated plate through the air outlet on the forward side of the moving beam, and then is blown out at an angle through the air outlet of the diversion chamber to form an isolation air curtain. This prevents impurities from escaping and helps to clean impurities on the surface of the optical glass plate. The internal circulation airflow between the two sets of serrated plates and the filter chamber improves the impurity cleaning and collection effect. Step 4: When the moving beam moves to the other side of the rack, the switching block contacts the inner wall of the rack and triggers the limit switch, causing the two sets of serrated plates to rise and fall synchronously in opposite directions. When the serrated plates rise, the elastic scraper separates from the optical glass plate, and the air inlet of the plate connects with the air outlet of the moving beam. When the serrated plates fall, the elastic scraper is guided by the rounded corners on the fixing strip to deflect towards the moving beam and fit against the optical glass plate, strengthening the airflow guidance direction and improving the impurity cleaning and collection effect.

[0015] The beneficial effects of this invention are as follows: (1) The image acquisition sensors on both sides of the detector body of the present invention acquire image data of impurities on the optical glass plate and analyze the content and type of impurities, accurately reflecting the real-time cleanliness status in the chip processing environment; at the same time, after the detection period ends, the impurity scraping is automatically triggered. Through the coordinated action of the moving beam and the two sets of sawtooth plates, the differentiated contact of the elastic scraper on the forward and backward sides is linked to realize the directional scraping of impurities on the surface of the optical glass plate, effectively avoiding the interference of impurity accumulation on subsequent detection data. From the dual dimensions of data acquisition accuracy and detection process continuity, the reliability of environmental cleanliness detection results is guaranteed, providing accurate data support for the yield control of chip processing.

[0016] (2) The micro motor, multi-stage filter screen and diversion cavity structure built into the moving beam of the present invention construct an internal circulation airflow system for extraction, filtration and air curtain isolation. It can prevent impurities from escaping by isolating the air curtain and can also perform graded filtration and collection of scraped impurities. The reverse lifting mechanism of the sawtooth plate triggered by the switching block can dynamically adjust the contact angle of the elastic scraper and the airflow conduction state, further enhancing the impurity cleaning effect and automatically completing the closed-loop collection of impurities. Attached Figure Description

[0017] The invention will now be further described with reference to the accompanying drawings; Figure 1 This is a schematic diagram of the structure of the present invention; Figure 2 This is a schematic diagram showing the disassembled parts of the present invention; Figure 3 This is a schematic diagram showing the cooperation between the shelf and the serrated plate of the present invention; Figure 4 This is a schematic diagram of the structure of the storage rack of the present invention; Figure 5 This is a schematic diagram of the staggered distribution of the two sets of sawtooth plates of the present invention; Figure 6 This is a schematic diagram of the connection between the movable beam and the sawtooth plate of the present invention; Figure 7 This is a cross-sectional view of the movable beam of the present invention. Figure 1 ; Figure 8 This is a cross-sectional view of the movable beam of the present invention. Figure 2 ; Figure 9 This is a schematic diagram of the cooperation between the sawtooth plate and the switching block of the present invention; Figure 10 This is a schematic diagram of the sawtooth plate of the present invention; Figure 11 This is a schematic diagram of the cooperation between the movable beam and the two sets of sawtooth plates of the present invention.

[0018] Legend: 1. The detector itself; 2. Shelf; 21. Optical glass plate; 22. Fixing strip; 23. Movable strip; 24. Rounded corners; 25. Flat corners; 26. Lead screw; 3. Moving beam; 31. Switching block; 32. Vertical rod; 33. Groove; 34. Inclined groove; 35. Ball spring pin; 36. Spherical limiting groove; 37. Filter chamber; 38. Air outlet; 39. Suction pipe; 310. Fan blade; 311. Blocking plate; 312. Filter screen; 4. Serrated plate; 41. Elastic scraper; 42. Movable block; 43. Crossbar; 44. Diverter chamber; 45. Air blower hole; 46. Air inlet hole. Detailed Implementation

[0019] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the scope of protection of the present invention.

[0020] Example 1: Please refer to Figures 1-7 and Figure 9 As shown, existing environmental monitoring instruments only have basic cleanliness detection functions and lack automated impurity cleaning of optical glass plates. This can be solved by the following solution: This embodiment discloses a real-time monitoring device for chip manufacturing environment, including a monitoring instrument body 1 and a carrier 2 that is engaged in a groove at the top of the monitoring instrument body 1. The carrier 2 has multiple wavy optical glass plates 21 inside. By setting multiple wavy optical glass plates 21, the settling contact area of ​​environmental impurities is increased. In conjunction with the image acquisition sensors on both sides of the monitoring instrument body 1, the device can realize timed image acquisition and content and type analysis of pollutants, and can accurately reflect the real-time cleanliness status of the chip manufacturing environment. Inside the shelf 2 and above the optical glass plate 21, there is a movable beam 3, and on both sides of the movable beam 3 there are serrated plates 4 that cooperate with multiple optical glass plates 21. The bottom of the serrated plate 4 is fixedly connected to an elastic scraper 41 for scraping off impurities on the top of the optical glass plate 21. After the detection period ends, the impurity scraping is automatically triggered. The moving beam 3 moves horizontally on top of the optical glass plate 21. During the movement of the moving beam 3, the elastic scraper 41 at the bottom of the serrated plate 4 located on its rear side comes into contact with the optical glass plate 21 to scrape off the impurities on the optical glass plate 21. This prevents the newly settled impurities from overlapping with the old impurities when the next detection period is carried out. This would not only obscure the image acquisition sensor's accurate identification of the new impurities, but also interfere with the data analysis process of pollutant content and type, causing the detection results to deviate significantly from the actual environmental cleanliness. The moving beam 3 is symmetrically provided with switching blocks 31 on both sides, which cooperate with the carrying rack 2 to cause the two sets of saw blades 4 to move in opposite directions. The switching blocks 31 are used to make the moving beam 3 move in opposite directions, and the two sets of saw blades 4 move in opposite directions, so that the elastic scraper 41 at the bottom of the saw blade 4 on the forward side is separated from the optical glass plate 21, so as to avoid pushing impurities to one side of the carrying rack 2 and making it inconvenient for later cleaning.

[0021] Fixed strips 22 that abut against the top of optical glass plates 21 are fixedly connected to the inner walls of both sides of the shelf 2. A movable strip 23 that abuts against the bottom of optical glass plates 21 is installed below the fixed strips 22 by screws. The fixed strips 22 and movable strips 23 are used for the installation of multiple optical glass plates 21 and for a wavy distribution. A rounded corner 24 is provided between the top of the fixing strip 22 and the inner wall of the carrier 2. After the moving beam 3 moves from one side of the carrier 2 to the other side, during the descent of the serrated plate 4, the elastic scraper 41 at its bottom contacts the rounded corner 24 at the top of the fixing strip 22. The arc-shaped surface of the rounded corner 24 guides the elastic scraper 41, causing the bottom of the elastic scraper 41 to deflect towards the side closer to the moving beam 3, thereby achieving the effect of removing impurities on the optical glass plate 21. A chamfered angle 25 is provided on the edge of the top of the fixing strip 22 away from the rounded corner 24. The chamfered angle 25 causes the elastic scraper 41 with its bottom bend to move from the fixing strip 22 to the optical glass plate 21, thereby efficiently removing impurities between the fixing strip 22 and the optical glass plate 21 and improving the comprehensiveness of impurity cleaning.

[0022] One side of the shelf 2 is fixedly connected to a guide rod that is slidably connected to the moving beam 3, and the other side of the shelf 2 is rotatably connected to a lead screw 26 that is threadedly connected to the moving beam 3. A motor that drives the lead screw 26 to rotate is installed on the shelf 2 by bolts. The motor drives the lead screw 26 to rotate, and the lead screw 26, together with the slide bar, drives the moving beam 3 to move horizontally at the top of the optical glass plate 21.

[0023] A plurality of movable blocks 42 are fixedly connected to one side of the sawtooth plate 4, and a vertical rod 32 that is slidably connected to the bottom of the moving beam 3 is fixedly connected to the bottom of the moving beam 3. The movable blocks 42 and the vertical rod 32 are used to achieve stable vertical sliding between the sawtooth plate 4 and the moving beam 3. The moving beam 3 has a slot 33 that is slidably connected to the switching block 31. The switching block 31 has two sets of inclined slots 34 arranged in a figure-eight pattern. The serrated plate 4 is fixedly connected to a crossbar 43 that is slidably connected to the corresponding inclined slot 34. After the moving beam 3 moves from one side of the shelf 2 to the other side, the two sets of switching blocks 31 on the moving beam 3 abut against the inner wall of the shelf 2, causing the switching blocks 31 to move on the moving beam 3. Combined with the guidance of the inclined slots 34 to the crossbar 43, the two sets of serrated plates 4 move in opposite directions synchronously.

[0024] A ball spring pin 35 is fixedly installed at the bottom of the switching block 31. Two sets of spherical limiting grooves 36 adapted to the ball spring pin 35 are opened at the bottom of the slot 33. The ball spring pin 35 at the bottom of the switching block 31 moves from one side of the spherical limiting groove 36 to the other side of the spherical limiting groove 36 to elastically limit the position of the switching block 31, thereby maintaining the lifting state of the two sets of sawtooth plates 4.

[0025] Example 2: Please refer to Figures 8-11 As shown, the problem of inconvenient collection and disposal of the cleaned-up impurities can be solved by the following solutions: In this embodiment, the sawtooth plate 4 has a flow diversion cavity 44 inside, and several inclined blowing holes 45 are opened through one side of the moving beam 3 on the flow diversion cavity 44, as well as two sets of air inlets 46 are opened through. The moving beam 3 has a filter cavity 37 inside, and air outlet holes 38 that cooperate with the corresponding air inlets 46 are opened on both sides of the filter cavity 37. During the upward movement of the sawtooth plate 4, the air inlet 46 on the sawtooth plate 4 is connected to the corresponding air outlet 38 on the moving beam 3. During the downward movement of the sawtooth plate 4, the air inlet 46 on the sawtooth plate 4 is separated from the corresponding air outlet 38 on the moving beam 3, and the air outlet 38 is blocked by the sawtooth plate 4. Gas is injected into the diversion cavity 44 of the sawtooth plate 4 in the forward direction of the moving beam 3, and blown out obliquely from multiple blowing holes 45 to form an isolation air curtain, preventing impurities on the optical glass plate 21 located between the two sets of sawtooth plates 4 from escaping from below the sawtooth plate 4, and assisting in the blowing of impurities on the optical glass plate 21. A sealing ring is embedded on the outer wall of the movable beam 3 and around the corresponding air outlet 38, which slides against the serrated plate 4. The sealing ring is used to increase the sealing effect of the serrated plate 4 on the corresponding air outlet 38.

[0026] The bottom of the moving beam 3 is fixedly connected to a suction pipe 39 that communicates with the filter chamber 37. The suction pipe 39 has a forked structure and is used to improve the extraction effect of gas on the top of multiple optical glass plates 21. Micro motors are installed on both sides of the filter chamber 37, and fan blades 310 are installed on the conveying shaft of the micro motors. The two sets of micro motors drive the fan blades 310 to rotate, and draw air from the area between the two sets of sawtooth plates 4 through the suction pipe 39. The air is injected into the air inlet 46 of the corresponding sawtooth plate 4 through the air outlet 38 on the forward side of the moving beam 3, and then enters the diversion chamber 44. An internal circulation airflow is formed between the two sets of sawtooth plates 4 and inside the filter chamber 37 to assist in the impurity cleaning effect. In addition, during the descent of the serrated plate 4, the rounded corner 24 guides the elastic scraper 41, causing the bottom of the elastic scraper 41 to deflect towards the side closer to the moving beam 3. This causes the elastic scraper 41 to move in contact with the optical glass plate 21, assisting in guiding the airflow of the isolation curtain upward and strengthening the direction of the internal circulation airflow to improve the impurity cleaning and collection effect.

[0027] The top of the moving beam 3 is provided with a discharge port that communicates with the filter chamber 37, and a blockage plate 311 is installed in the discharge port. At the bottom of the blockage plate 311 and between the suction pipe 39 and the micro motor, multiple filter screens 312 are fixedly installed. The filter pore size of the multiple filter screens 312 decreases step by step from the suction pipe 39 toward the micro motor. The two sets of micro motors drive the fan blades 310 to rotate, and draw air from the area between the two sets of sawtooth plates 4 through the suction pipe 39. The air is then filtered through multiple filter screens 312 with progressively smaller filter pore sizes to remove impurities and is collected in the filter chamber 37. The filtered air is injected into the air inlet 46 of the corresponding sawtooth plate 4 through the air outlet 38 on the forward side of the moving beam 3, and then enters the diversion chamber 44. Remove the carrier 2 from the detector body 1, and move the moving beam 3 to the middle of the carrier 2 and flip it upside down. Remove the blocking plate 311 from the moving beam 3. The blocking plate 311 drives multiple filter screens 312 to be removed from the filter chamber 37. Clean the collected impurities on the filter chamber 37 and filter screens 312 and put them back to avoid excessive accumulation of impurities and reduce the cleaning effect on the optical glass plate 21.

[0028] Example 3: Please refer to Figures 1-11 As shown, the present invention also proposes a method for using a real-time monitoring device for chip manufacturing and processing environments, comprising the following steps: Step 1: The detector body 1 is placed in the environment area where the cleanliness of the chip processing is to be tested. The carrier 2 is placed in the groove on the top of the detector body 1. Impurities in the surrounding air naturally fall onto multiple optical glass plates 21 that are distributed in a wave-like pattern. The image acquisition sensors on both sides of the detector body 1 acquire image data of the substances on the surface of the optical glass plates 21 and set the detection time period. Based on the image data, the content and type of pollutants during the time period are analyzed. Step 2: After a certain detection period ends and the analysis of pollutants within that period is completed, the motor drives the lead screw 26 to rotate. The lead screw 26, in conjunction with the slide bar, drives the moving beam 3 to move horizontally at the top of the optical glass plate 21. During the movement of the moving beam 3, the elastic scraper 41 at the bottom of the serrated plate 4 on its rear side contacts the optical glass plate 21 to scrape off the impurities on the optical glass plate 21, thus preventing excessive accumulation of impurities that could lead to deviations in the detection results when the next detection period begins. The elastic scraper 41 at the bottom of the serrated plate 4 on the forward side separates from the optical glass plate 21, thus preventing impurities from being pushed to one side of the carrier 2, which would make subsequent cleaning inconvenient. Step 3: During the horizontal movement of the moving beam 3, two sets of micro motors drive the fan blades 310 to rotate, drawing air from the area between the two sets of sawtooth plates 4 through the suction pipe 39. The air then passes through multiple filter screens 312 with progressively smaller filter holes to filter impurities in the air, and is collected in the filter chamber 37. The filtered air is injected into the air inlet 46 of the corresponding sawtooth plate 4 through the air outlet 38 on the forward side of the moving beam 3, and then enters the diversion chamber 44 and is blown out at an angle from multiple blowing holes 45 to form an isolation air curtain. This prevents impurities on the optical glass plate 21 located between the two sets of sawtooth plates 4 from escaping from below the sawtooth plates 4, and assists in the blowing of impurities on the optical glass plate 21. By forming an internal circulating airflow between the two sets of sawtooth plates 4 and inside the filter chamber 37, the impurity cleaning effect is assisted while the impurity isolation collection is completed. Step 4: After the moving beam 3 moves from one side of the shelf 2 to the other side, the two sets of switching blocks 31 on the moving beam 3 abut against the inner wall of the shelf 2, causing the switching blocks 31 to move on the moving beam 3. The ball spring pin 35 at the bottom of the switching block 31 moves from one side of the spherical limiting groove 36 to the other side of the spherical limiting groove 36, elastically limiting the position of the switching block 31. Combined with the guidance of the inclined groove 34 on the crossbar 43, the two sets of saw blades 4 move synchronously in opposite directions. During the upward movement of the saw blades 4, the elastic scraper 41 at the bottom of the saw blades 4 separates from the optical glass plate 21. The air inlet 46 on the saw blades 4 is connected to the corresponding air outlet 38 on the moving beam 3. During the descent of the serrated plate 4, the elastic scraper 41 at its bottom contacts the rounded corner 24 at the top of the fixing strip 22. The rounded corner 24 guides the elastic scraper 41, causing the bottom of the elastic scraper 41 to deflect closer to the moving beam 3. This causes the elastic scraper 41 to move in contact with the optical glass plate 21, assisting in guiding the airflow of the isolation curtain upward and strengthening the flow direction of the internal circulation airflow to improve the cleaning and collection effect of impurities. The air inlet 46 on the serrated plate 4 separates from the corresponding air outlet 38 on the moving beam 3, and the air outlet 38 is blocked by the serrated plate 4.

[0029] The above description is only a preferred embodiment of the present invention, but the scope of protection of the present invention is not limited thereto. Any equivalent substitutions or modifications made by those skilled in the art within the scope of the technology disclosed in the present invention, based on the technical solution and inventive concept of the present invention, should be covered within the scope of protection of the present invention.

Claims

1. A real-time monitoring device for chip manufacturing environment, comprising a monitoring instrument body (1) and a carrier (2) engaged in a groove at the top of the monitoring instrument body (1), characterized in that, The interior of the shelf (2) is provided with a plurality of optical glass plates (21) arranged in a wave-like pattern. A movable beam (3) is provided inside the shelf (2) and above the optical glass plates (21). Both sides of the movable beam (3) are provided with serrated plates (4) that cooperate with the plurality of optical glass plates (21). The bottom of the serrated plate (4) is fixedly connected with an elastic scraper (41) for scraping off impurities on the top of the optical glass plates (21). The movable beam (3) is symmetrically provided with switching blocks (31) that cooperate with the shelf (2) to cause the two sets of serrated plates (4) to move in opposite directions.

2. The real-time monitoring equipment for chip manufacturing and processing environment according to claim 1, characterized in that, The inner walls of both sides of the shelf (2) are fixedly connected with a fixing strip (22) that abuts against the top of the optical glass plate (21). A movable strip (23) that abuts against the bottom of the optical glass plate (21) is installed below the fixing strip (22) by screws. A rounded corner (24) is provided between the top of the fixing strip (22) and the inner wall of the shelf (2). A flat corner (25) is provided on the edge of the top of the fixing strip (22) away from the rounded corner (24).

3. The real-time monitoring equipment for chip manufacturing and processing environment according to claim 1, characterized in that, One side of the rack (2) is fixedly connected to a guide rod that is slidably connected to the moving beam (3), and the other side of the rack (2) is rotatably connected to a screw rod (26) that is threadedly connected to the moving beam (3). A motor that drives the screw rod (26) to rotate is installed on the rack (2) by bolts.

4. The real-time monitoring equipment for chip manufacturing and processing environment according to claim 1, characterized in that, A plurality of movable blocks (42) are fixedly connected to one side of the sawtooth plate (4), and a vertical rod (32) that is slidably connected to the corresponding movable block (42) is fixedly connected to the bottom of the moving beam (3). A slot (33) that is slidably connected to the switching block (31) is opened through the moving beam (3). Two sets of inclined slots (34) that are distributed in a figure-eight pattern are opened on the switching block (31). A horizontal rod (43) that is slidably connected to the corresponding inclined slot (34) is fixedly connected to the sawtooth plate (4).

5. The real-time monitoring equipment for chip manufacturing and processing environment according to claim 4, characterized in that, The bottom of the switching block (31) is fixedly installed with a ball spring pin (35), and the bottom of the slot (33) is provided with two sets of spherical limiting grooves (36) that are adapted to the ball spring pin (35).

6. The real-time monitoring equipment for chip manufacturing and processing environment according to claim 1, characterized in that, The sawtooth plate (4) has a flow-dividing cavity (44) inside, and several inclined air holes (45) are opened through one side of the moving beam (3) on the flow-dividing cavity (44), as well as two sets of air inlets (46). The moving beam (3) has a filter cavity (37) inside, and air outlets (38) that cooperate with the corresponding air inlets (46) are opened on both sides of the filter cavity (37). A sealing ring that slides against the sawtooth plate (4) is embedded on the outer wall of the moving beam (3) and around the corresponding air outlets (38).

7. The real-time monitoring equipment for chip manufacturing and processing environment according to claim 6, characterized in that, The bottom of the movable beam (3) is fixedly connected to a suction pipe (39) that communicates with the filter chamber (37). Both sides of the filter chamber (37) are equipped with micro motors, and fan blades (310) are installed on the conveying shaft of the micro motors.

8. The real-time monitoring equipment for chip manufacturing and processing environment according to claim 7, characterized in that, The top of the movable beam (3) is provided with a discharge port that communicates with the filter chamber (37), and a block plate (311) is installed in the discharge port. Multiple filter screens (312) are fixedly installed at the bottom of the block plate (311) between the suction pipe (39) and the micro motor. The filter hole size of the multiple filter screens (312) decreases step by step from the suction pipe (39) toward the micro motor.

9. A method of using a real-time monitoring device for chip manufacturing and processing environment, comprising the real-time monitoring device for chip manufacturing and processing environment as described in any one of claims 1-8, characterized in that, Includes the following steps: Step 1: The detector body (1) is placed in the test area of ​​the chip processing table, and the carrier (2) is embedded in the top groove of the detector body (1); environmental impurities naturally settle on the surface of the optical glass plate (21), and the image acquisition sensors on both sides of the detector body (1) acquire the material image data on the surface of the optical glass plate (21), set the detection period, and analyze the content and type of pollutants in the period based on the image. Step 2: After the single-period detection and contaminant analysis are completed, the moving beam (3) moves horizontally on the top of the optical glass plate (21). The elastic scraper (41) of the serrated plate (4) on the retracting side of the moving beam (3) adheres to the optical glass plate (21) to scrape off impurities, avoiding accumulation that affects the accuracy of subsequent detection. The elastic scraper (41) of the serrated plate (4) on the advancing side separates from the optical glass plate (21) to prevent impurities from accumulating on the side of the carrier (2) and hindering subsequent cleaning. Step 3: The moving beam (3) moves horizontally, and the two sets of micro motors drive the fan blades (310) to rotate. The air between the two sets of saw blades (4) is drawn through the suction pipe (39). After being filtered by the filter screen (312), the impurities are collected in the filter chamber (37). The filtered air enters the air inlet (46) of the corresponding saw blade (4) through the air outlet (38) on the forward side of the moving beam (3), and then is blown out at an angle through the air outlet (45) of the diversion chamber (44) to form an isolation air curtain, which prevents impurities from escaping and helps to blow away impurities on the surface of the optical glass plate (21). Through the internal circulation airflow between the two sets of saw blades (4) and the filter chamber (37), the impurity cleaning and collection effect is improved. Step 4: When the moving beam (3) moves to the other side of the rack (2), the switching block (31) contacts the inner wall of the rack (2) and triggers the limit switch, so that the two sets of saw blades (4) rise and fall in opposite directions. When the saw blades (4) rise, the elastic scraper (41) separates from the optical glass plate (21), and the air inlet (46) of the plate is connected to the air outlet (38) of the moving beam (3). When the saw blades (4) fall, the elastic scraper (41) is guided by the rounded corner (24) on the fixing strip (22) to bend towards the moving beam (3) and stick to the optical glass plate (21), which strengthens the airflow guidance direction and improves the impurity cleaning and collection effect.

Images