Mounting frame and method of a semiconductor testing device with embedded water cooling structure

By embedding a water-cooling structure into the mounting frame of the semiconductor testing equipment, a closed-loop cooling fluid circulation loop and a fixed housing for protection are constructed. This solves the problems of low equipment integration, uneven temperature control, and vibration interference in existing technologies, achieving high integration, miniaturization, and testing stability. It also reduces the risk of condensate contamination and ensures the accuracy of test results and equipment safety.

CN122193853APending Publication Date: 2026-06-12JIANGSU JINGYITONG PRECISION TECH CO LTD
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
JIANGSU JINGYITONG PRECISION TECH CO LTD
Filing Date
2026-03-31
Publication Date
2026-06-12

AI Technical Summary

Technical Problem

The external water cooling system of existing semiconductor testing equipment results in low equipment integration and poor space utilization, making it unable to meet the requirements of high integration and miniaturization, and also poses risks of uneven temperature control, vibration interference, and condensate contamination.

Method used

In the mounting frame of the semiconductor testing equipment with embedded water-cooling structure, a closed-loop cooling fluid circulation circuit is constructed by integrating a cooling shell, connecting components and a circulating pump body on the frame body. This achieves uniform temperature control and vibration suppression across the entire area, and a fixed shell is set up to protect against condensate, forming an independent condensate collection and storage branch.

Benefits of technology

It achieves high integration and miniaturization of semiconductor testing equipment, ensures temperature uniformity and testing stability, reduces the risk of vibration interference and condensate contamination, and guarantees the accuracy of test results and the long-term safe and stable operation of the equipment.

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Abstract

The present invention discloses an installation framework and method for an embedded water-cooling structure of a semiconductor testing device, including a probe station testing body, and a framework body is provided on the probe station testing body; two groups of side plates are provided on the framework body, a refrigeration housing is provided on the side plates, and two connection components are provided between the two refrigeration housings to enable the inner cavities of the two refrigeration housings to communicate. A fixed housing is provided between the two refrigeration housings, and the fixed housing is arranged directly below the connection components. A circulation pump body is provided in the refrigeration housing. The beneficial effect of the present invention is that by integrating all the core functional components of the water-cooling cycle on the framework body supporting the probe station testing body, while the framework body realizes the basic bearing and fixing function of the semiconductor testing device, it also has the closed-loop water-cooling temperature control function for the testing environment, achieving the deep integration of the bearing structure and the temperature control and heat dissipation system, and greatly reducing the overall occupied space of the semiconductor testing device.
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