Data processing device, data processing method, and storage medium

Abstract

The data processing device (4) is located within the drive device (5) that drives the worktable (110) within a movable surface (MP) of two or more dimensions. It includes: a position-dependent data collection unit (41) that collects position-dependent data related to the worktable (110) at multiple positions within the movable surface (MP); and a distribution data generation unit (42) that generates distribution data covering at least a portion of the position-dependent data within the movable surface (MP). The position-dependent data collection unit (41) collects position-dependent data when the worktable (110) stops at multiple positions within the movable surface (MP). The position-dependent data is the positional deviation between the actual stopping position and the target position (ST) when the worktable (110) stops at multiple target positions (ST) within the movable surface (MP).

Description

Technical Field

[0001] This disclosure relates to a data processing device in a drive device, etc. Background Technology

[0002] Patent Document 1 discloses a technique for diagnosing abnormalities in a drive mechanism by repeatedly performing predetermined initial actions on the movable part of the device to be diagnosed. In each initial action, the mover reciprocates from a predetermined initial position, and the offset between the initial position and the return position is recorded over time as data for abnormality diagnosis.

[0003] Previous technical documents Patent documents Patent Document 1: Japanese Patent Application Publication No. 2005-284929 Summary of the Invention

[0004] The technical problem to be solved by the invention In a drive device that drives a movable part or a driven body, such as Patent Document 1, an abnormality may occur at a specific location within the movable area of ​​the driven body. In the technology of Patent Document 1, which diagnoses abnormalities based on reciprocating motion between a predetermined initial position and the actual position, while it is possible to determine whether an abnormality exists, it is difficult to pinpoint the location where it occurs.

[0005] This disclosure was made in view of this situation, and its purpose is to provide a data processing device, etc., capable of displaying differences corresponding to the position of the driven body within the movable area.

[0006] means for solving technical problems To address the aforementioned issues, one embodiment of the data processing apparatus of the present invention includes a driving device for driving a driven body within a movable area of ​​two or more dimensions, comprising: a position-dependent data collection unit that collects position-dependent data related to the driven body at multiple positions within the movable area; and a distribution data generation unit that generates distribution data of position-dependent data covering at least a portion of the movable area.

[0007] According to this embodiment, the distribution data of the position-dependent data is generated based on the position-dependent data collected for multiple positions of the driven body within the movable area, thus revealing the differences corresponding to the position of the driven body.

[0008] Another embodiment of the present invention is a data processing method. This method performs the following steps in a drive device that drives a driven object within a movable region of two dimensions or more: collecting position-dependent data related to the driven object at multiple positions within the movable region; and generating distribution data of the position-dependent data covering at least a portion of the movable region.

[0009] Another embodiment of the present invention is a storage medium. The storage medium stores a data processing program that enables a computer to perform the following steps in a drive device that drives a driven object within a movable area of ​​two dimensions or more: collecting position-dependent data related to the driven object at multiple positions within the movable area; and generating distribution data of the position-dependent data covering at least a portion of the movable area.

[0010] Furthermore, any combination of the above-mentioned constituent elements or the manner in which these expressions are transformed in methods, apparatus, systems, storage media, computer programs, etc., are also included in this invention.

[0011] Invention Effects According to this disclosure, it is possible to make the difference corresponding to the position of the driven body within the movable region apparent. Attached Figure Description

[0012] Figure 1 This is a three-dimensional view of a worktable device that uses a fluid actuator.

[0013] Figure 2 This is a schematic cross-sectional view of a pneumatic actuator.

[0014] Figure 3 This is a block diagram schematically illustrating an example of the structure of a control device for a pneumatic actuator.

[0015] Figure 4 This is a schematic top view of a worktable device that uses an electromagnetic actuator.

[0016] Figure 5 This is a schematic functional block diagram of a data processing device.

[0017] Figure 6 An example of collecting location-dependent data to represent stopping stability is shown.

[0018] Figure 7 This is a schematic functional block diagram of a data processing device.

[0019] Figure 8 An example of distributed data displayed in three-dimensional space is shown. Detailed Implementation

[0020] Hereinafter, the embodiments for carrying out the present disclosure (hereinafter also referred to as embodiments) will be described in detail with reference to the accompanying drawings. In the following description and / or drawings, the same or equivalent constituent elements, components, and processes are labeled with the same reference numerals, and repeated descriptions are omitted. For ease of description, the proportions or shapes of the parts are appropriately set in the drawings, which are not intended to be limiting unless otherwise specified. The embodiments are illustrative and do not limit the scope of the invention in any way. All features or combinations thereof presented in the embodiments are not necessarily essential features or combinations thereof of the present disclosure. For convenience, embodiments are presented as constituent elements that implement each function and / or group of functions of the embodiment. However, a constituent element in an embodiment may be implemented by a combination of multiple constituent elements that are actually separate entities, and multiple constituent elements in an embodiment may be implemented by a single constituent element that is actually integrated.

[0021] Figure 1 This is a perspective view of a table assembly 100 using a fluid actuator according to a first embodiment of the drive device disclosed herein. In this embodiment, a pneumatic actuator is shown that uses air as the working fluid to drive a table 110, which is the driven body. The table assembly 100 includes a fixed plate 102, a vibration damping table 104, a vibration damping device 106, a table 110, one X-axis pneumatic actuator 120, and two Y-axis pneumatic actuators 130A and 130B (hereinafter collectively referred to as Y-axis pneumatic actuators 130). The fixed plate 102 is supported by the vibration damping table 104. The table assembly 100 is formed in an H-shape in plan view by the X-axis pneumatic actuator 120 as the upper axis and the two Y-axis pneumatic actuators 130A and 130B as the lower axis. The vibration damping device 106 suppresses vibrations from the floor or other surface on which the table assembly 100 is mounted to the fixed plate 102.

[0022] X-axis pneumatic actuator 120 and Y-axis pneumatic actuator 130 are fluid actuators that use air as the working fluid to drive a worktable 110, which is the driven object, along the X and Y axes, respectively. Semiconductor wafers or other workpieces (not shown) are mounted on the worktable 110. The X-axis pneumatic actuator 120 has a guide rail 122 (square shaft), a slider 124, a servo valve 126 (not shown), and piping 128 (not shown). Similarly, the Y-axis pneumatic actuator 130 has a guide rail 132, a slider 134, a servo valve 136, and piping 138. The worktable 110 is mounted on the slider 124. Both ends of the guide rail 122 are supported by the slider 134 of the Y-axis pneumatic actuator 130.

[0023] Slider 124 and 134 constitute a drive unit that drives the worktable 110, which is the driven body, along the X and Y axes. Servo valves 126 and 136 constitute a working fluid supply unit that supplies air generated based on the air volume (operational quantity output by the control device, not shown) calculated by the air handling unit. Pipes 128 and 138 allow air to flow between the drive unit and the working fluid supply unit. Position sensor 140 detects the position of the worktable 110 in the X-axis direction, and position sensor 142 detects the position of the worktable 110 in the Y-axis direction.

[0024] Figure 2 This is a schematic cross-sectional view of a pneumatic actuator. The X-axis pneumatic actuator 120 includes a guide rail 122, a slider 124, a servo valve 126 (slide valve), and piping 128. Pressurized air is supplied between the outer peripheral surface of the guide rail 122 and the inner peripheral surface of the slider 124 to form a hydrostatic bearing. The slider 124, which floats from the guide rail 122 by pressurized air, can move smoothly along the X-axis in a non-contact manner with the guide rail 122. A servo chamber 150 is provided in the slider 124 as an internal space. The servo chamber 150 is divided into a positive chamber 152 and a negative chamber 154 by a pressure plate 123 integrally formed with the guide rail 122.

[0025] The slider 124 is driven by a servo valve 126. The servo valve 126 controls the intake and exhaust volume of the control port according to the position of the valve core. Each axis pneumatic actuator 120, 130 has a pair of servo valves 126P, 126N configured on the positive and negative sides. The control port of the positive servo valve 126P is connected to the positive chamber 152 via a positive pipe 128P. The control port of the negative servo valve 126N is connected to the negative chamber 154 via a negative pipe 128N. The position of the slider 124 relative to the guide rail 122 (pressure plate 123) is controlled by the pressure difference generated between the positive chamber 152 and the negative chamber 154 based on the position of the valve cores of the servo valves 126P, 126N. The above mainly describes the X-axis pneumatic actuator 120; the Y-axis pneumatic actuator 130 can also be configured in the same way as the X-axis pneumatic actuator 120.

[0026] Figure 3This is a block diagram schematically illustrating a structural example of the control device 300 for the pneumatic actuators 120 and 130. The control device 300 is responsible for driving control of the worktable 110, which is the driven body in the pneumatic actuators 120 and 130. The control device 300 controls arbitrary operating quantities for the pneumatic actuators 120 and 130 in order to control arbitrary control quantities for the worktable 110. The combination of the control quantity for the worktable 110 and the operating quantities for the pneumatic actuators 120 and 130 is arbitrary, as long as drive control of the worktable 110 based on the control device 300 and / or the pneumatic actuators 120 and 130 can be achieved. In the example of this embodiment, the position of the worktable 110 is used as the control quantity, and the intake / exhaust volume u of the servo valves 126 and 136 is used as the operating quantity.

[0027] The pneumatic actuators 120, 130, and / or the worktable 110, which are controlled by the control device 300, have control models of order as high as 3rd order or higher due to the inability to ignore piping resonance and other mechanical resonances. Strictly speaking, these are at least 5th order control systems. However, due to the trade-off between the higher order caused by higher-order differential elements and the deterioration of control responsiveness, it is difficult to implement a 5th order control system in the actual control device 300. Figure 3 As shown, most practical control devices 300 remain at the third-order control system level.

[0028] The control device 300, which has at least three levels, includes: an FB control unit 310 that performs FB control based on multiple (preferably at least three) feedback (FB) gains; and an FF control unit 360 that performs FF control based on multiple (preferably at least three) feedforward (FF) gains. Details will be described later. The operating quantity u for the pneumatic actuators 120 and 130, which is the output of the control device 300, is calculated based on the outputs of both the FF control unit 360 and the FB control unit 310. The operating quantity u output from the output unit 302 of the control device 300 is a valve command that determines the intake and exhaust volume of the servo valves 126 and 136, and the position (control quantity) of the worktable 110 is controlled based on the resulting pressure difference. The position Pos of the worktable 110 is detected by position sensors 140 and 142. fb (The difference measurement value of the control quantity) is used for FB control in FB control unit 310.

[0029] The FF control unit 360 extends from the input unit 301 of the control device 300 towards the output unit 302, and includes three pairs of differentiators 364, 366, and 368, and proportional compensators 370, 372, and 374. The first-stage differentiator 364 controls the position command Pos, which is the target value of the control quantity (position of the worktable 110) input to the input unit 301. ref Differentiate it to convert it into velocity. Multiply the first-stage proportional compensator 370 by the proportional gain K. ffvThe speed command for the worktable 110 is calculated by combining the position compensation amount calculated by the FB control unit 310 (described later). The second-stage differentiator 366 differentiates the speed from the differentiator 364 and converts it into acceleration. The second-stage proportional compensator 372 multiplies it by the proportional gain K. ffa The acceleration command for the worktable 110 is calculated by combining the speed compensation amount calculated by the FB control unit 310 (described later). The third-stage differentiator 368 differentiates the acceleration from the differentiator 366. The third-stage proportional compensator 374 multiplies it by the proportional gain K. ffj The provisional operating quantity u′ is calculated by combining the acceleration compensation amount calculated by the FB control unit 310 (described later).

[0030] As described above, the FF control unit 360 has a target value Pos for the control quantity (position of the worktable 110) of the pneumatic actuators 120 and 130. ref The gain K is multiplied by multiple (preferably at least three) FF values ​​in sequence. ffv K ffa K ffj Specifically, the FF control unit 360 has three FF gains: one related to the target value Pos. ref The first FF gain K of the first differential multiplication ffv , and the target value Pos ref The 2FF gain K of the second-order differential multiplication ffa and the target value Pos ref The 3FF gain K of the third-order differential multiplication ffj .

[0031] FB control unit 310 is configured as PDD 2 (Proportional-Differential-2nd Derivative) compensator. Specifically, the FB control unit 310 controls the position (control quantity) of the worktable 110 through a major loop or an outer loop, and controls the speed and acceleration of the worktable 110 through a minor loop or an inner loop. Of the two inner loops, the outer speed loop is also referred to as the middle loop, and the inner acceleration loop is simply referred to as the inner loop. The position Pos, which is the control quantity of the worktable 110, is measured by the differentiator 330. fb The measurement speed of the worktable 110 is obtained by differentiation, and the measurement acceleration of the worktable 110 is obtained by further differentiation using a differentiator 332.

[0032] The FB control unit 310 extends from the input unit 301 of the control device 300 toward the output unit 302, and includes four subtractors 312, 314, 316, and 352 connected in series. Subtractor 312 is a position deviation calculation unit that calculates the position deviation, which is the target value of the position command Pos, which is input to the input unit 301 of the control device 300 as the control quantity (position of the worktable 110). ref The measurement position Pos of the stage 110, which is the measured value of the control quantity. fb The difference between the speed and the speed deviation is calculated by subtractor 314, which is the speed deviation calculation unit that calculates the speed deviation, which is the difference between the speed command obtained according to the calculation described later and the measured speed of the table 110 output by the differentiator 330. Subtractor 316 is the acceleration deviation calculation unit that calculates the acceleration deviation, which is the difference between the acceleration command obtained according to the calculation described later and the measured acceleration of the table 110 output by the differentiator 332. Subtractor 352 is an interference removal unit that removes interference from the provisional operating quantity u′ obtained according to the calculation described later.

[0033] A position proportional compensator 320 is provided between the subtractor 312 for calculating position deviation and the subtractor 314 for calculating speed deviation, serving as a position compensation element for compensating the position of the worktable 110. The position proportional compensator 320 constitutes a speed command calculation unit, which multiplies the position deviation by a proportional gain K. p The speed command of the worktable 110 is calculated by combining the input from the proportional compensator 370 of the FF control unit 360.

[0034] A speed proportional compensator 322 is provided between the subtractor 314 for calculating speed deviation and the subtractor 316 for calculating acceleration deviation, serving as a speed compensation element for compensating the speed of the worktable 110. The speed proportional compensator 322 constitutes an acceleration command calculation unit, which multiplies the speed deviation by a proportional gain K. v The acceleration command of the worktable 110 is calculated by combining the input from the proportional compensator 372 of the FF control unit 360.

[0035] An acceleration proportional compensator 324 is provided between the subtractor 316 for calculating acceleration deviation and the subtractor 352 for removing interference, serving as an acceleration compensation element for compensating the acceleration of the worktable 110. The acceleration proportional compensator 324 constitutes a provisional calculation unit, which multiplies the acceleration deviation by a proportional gain K. a The provisional operating quantity u′ is calculated by combining the input (adder 351) from the proportional compensator 374 of the FF control unit 360.

[0036] As described above, the FB control unit 310 has a measured value Pos for the control quantity (position of the worktable 110) of the pneumatic actuators 120 and 130. fband target value Pos ref The deviation is multiplied by multiple (preferably at least three) FB gains K. p K v K a Specifically, the FB control unit 310 has three FB gains: for the measured value Pos fb The positional deviation of the measurement location multiplied by the first FB gain K p For measurements based on Pos fb The first derivative (measured velocity) of the velocity deviation multiplied by the second FB gain K v and based on the measured value Pos fb The second derivative (measured acceleration) of the acceleration deviation multiplied by the third FB gain K a .

[0037] In addition to the above-mentioned structure, the FB control unit 310 also includes a notch filter 340 and a disturbance observer 350.

[0038] The notch filter 340 is a filter with a notch frequency ω no The narrow-band bandstop filter centered on the subtractor 352 consists of two filter elements 340A and 340B positioned before and after the subtractor 352. For example, to remove piping resonance, the notch frequency ω... no It was set to a value close to the frequency ω0 of the piping resonance. Figure 3 In the example, the output of adder 351 is input to the first filter element 340A to obtain a provisional operating quantity u′. Adder 351 adds the FF control output of proportional compensator 374 from FF control unit 360 to the FB control output of acceleration proportional compensator 324 from FB control unit 310.

[0039] The disturbance observer 350 (DOB), acting as a disturbance estimator, is a state observer that estimates the disturbance to the position (control quantity) of the table 110 based on the provisional operation quantity u′ and the measured speed and acceleration of the table 110. The measured values ​​supplied to the disturbance observer 350 are not limited to the speed and acceleration of the table 110, but can be any combination of the driving quantities of the table 110, including position. The subtractor 352 removes (subtracts) the disturbance estimated by the disturbance observer 350 from the provisional operation quantity u′ from the first filter element 340A. The output of the subtractor 352 (the provisional operation quantity u′ after removing the disturbance) is input to the second filter element 340B, and the operation quantity u, which is the final output of the control device 300, is obtained at the output unit 302.

[0040] Figure 4This is a schematic top view of a table assembly 100 using an electromagnetic actuator as a driving device according to the second embodiment of this disclosure. The table assembly 100 is located in the X-axis direction ( Figure 4 (left and right directions) and Y-axis direction ( Figure 4 An XY stage is used to position a stage or worktable, which is a driven object for processing, such as a semiconductor wafer, in the vertical direction. The stage assembly 100 includes: a pair of Y stages 12 extending along the Y-axis and driving the stage in the Y-axis direction; an X stage 110 extending along the X-axis and driving the stage in the X-axis direction, and integrated with the stage; and a mounting plate 102. The pair of Y stages 12 are connected to the two ends of the X stage 110 in the X-axis direction via sliders 124. The Y stages 12 and X stages 110 are H-shaped when viewed from above.

[0041] In the structure of the worktable device 100, at least the central stage, the Y stage 12, and the X stage 110 can be housed in a vacuum chamber that is maintained in a vacuum state. In this specification, "vacuum" refers to a state in which a space is filled with gas at a pressure lower than atmospheric pressure. Vacuum is classified according to pressure range into low vacuum (100 kPa to 100 Pa), medium vacuum (100 Pa to 0.1 Pa), and high vacuum (0.1 Pa to 100 kPa). -5 Pa), ultra-high vacuum (10 -5 Pa~10 -8 Pa), ultra-high vacuum (10 -8 (Pa and below), etc. The worktable device 100 according to this embodiment can be used in any of the above-described vacuum environments. Furthermore, the worktable device 100 according to this embodiment can also be used in non-vacuum environments that do not fall into any of the above categories.

[0042] Linear motors 2X and 2Y, which serve as electromagnetic actuators, are respectively installed on the X-stage 110 and the Y-stage 12. The magnetic linear power generated by each linear motor 2X and 2Y in the X-axis or Y-axis direction linearly drives the stage, which is the driven object, in the X-axis or Y-axis direction.

[0043] The linear motor 2X, responsible for linear drive in the X-axis direction, includes a stator 3 forming a track in the X-axis direction and a mover 20 capable of moving along the stator 3 in the X-axis direction. A platform, serving as the driven body, is fixed to the mover 20 and moves integrally with it. The paired linear motors 2Y, responsible for linear drive in the Y-axis direction, include a stator 3 forming a track in the Y-axis direction and a mover 20 capable of moving along the stator 3 in the Y-axis direction. A slider 124 is fixed to the mover 20 and moves integrally with it.

[0044] Here, since the paired sliders 124 are connected to both ends of the armature 2 of the linear motor 2X, the paired linear motors 2Y drive the armature 2 of the linear motor 2X together with the paired sliders 124 in a linear motion along the Y-axis. Moreover, since there is a platform on the armature 2 (track) of the linear motor 2X, the paired linear motors 2Y drive the platform in a linear motion along the Y-axis.

[0045] like Figures 1-4 As shown, the stage device 100 of this embodiment can achieve high-precision positioning or driving in both vacuum and non-vacuum environments. For example, it is suitable for positioning or driving a stage holding a semiconductor wafer, etc., which is the workpiece to be processed, in semiconductor manufacturing apparatuses such as exposure apparatuses, ion implantation apparatuses, heat treatment apparatuses, ashing apparatuses, sputtering apparatuses, dicing apparatuses, inspection apparatuses, and cleaning apparatuses, or in equipment manufacturing apparatuses such as FPD (Flat Panel Display) manufacturing apparatuses. Furthermore, the processing apparatus that can be applied to the stage device 100 of this embodiment can be any apparatus that positions any workpiece for arbitrary processing using the stage device 100 or the positioning device; for example, it can be any manufacturing apparatus, any processing apparatus (e.g., a machine tool), or any inspection apparatus.

[0046] exist Figure 1 and Figure 4 In the worktable device 100, the worktable 110, as the driven body, is driven along the X-axis and Y-axis directions. In other words, the worktable 110 is driven in two dimensions within the XY plane (typically a plane, but it can also be a curved surface). Here, the movable area or movable surface of the worktable 110 is typically defined as a rectangle, defined by the two ends of the movable range of the worktable 110 in the X-axis direction and the two ends of the movable range of the worktable 110 in the Y-axis direction. Furthermore, the movable area of ​​the worktable 110 is not limited to a two-dimensional movable surface (XY plane), but can also be a three-dimensional movable space (XYZ space). In a drive device that drives the worktable 110 using a three-dimensional movable space as the movable area, in addition to the above-mentioned... Figures 1-4 In addition to the described XY drive mechanism, a Z drive mechanism (not shown) is also provided that drives the worktable 110 in the Z-axis direction, which is orthogonal to the X-axis and Y-axis directions. Thus, the drive device according to this embodiment only needs to be able to drive the driven body, such as the worktable 110, within a movable area of ​​two or more dimensions (i.e., a two-dimensional movable surface or a three-dimensional movable space). Furthermore, the data processing device according to this embodiment is responsible for data processing in such a drive device.

[0047] Figure 5This is a schematic functional block diagram of the data processing apparatus 4 according to this embodiment. The data processing apparatus 4 includes a location-dependent data collection unit 41, a distributed data generation unit 42, a three-dimensional display unit 43, and an anomaly determination unit 44. Some of these functional modules may be omitted as long as the data processing apparatus 4 can achieve at least some of the functions and / or effects described below. These functional modules can be implemented through the cooperation of hardware resources such as a computer's central processing unit, memory, input devices, output devices, and peripheral devices connected to the computer, and the software executed using them. Regardless of the type or location of the computer, each of the above functional modules can be implemented by the hardware resources of a single computer or by combining hardware resources distributed across multiple computers.

[0048] In the example shown in this figure, the worktable 110, as the driven body, is based on... Figure 3 Under the control of the control device 300 shown, via Figure 1 The X-axis pneumatic actuator 120 and the Y-axis pneumatic actuator 130 (fluid actuator) are included. Figure 4 The linear motors 2X and 2Y (electromagnetic actuators) and other driving devices 5 are driven within a two-dimensional movable surface MP in the XY plane. The shape of the movable surface MP is arbitrary, for example, it is a rectangle as shown in the figure. The driving method or driving sequence of the worktable 110 within the movable surface MP is also arbitrary, but in the worktable device 100, scanning method and step repetition method are usually used.

[0049] exist Figure 5 In this example, the stage 110 is driven in a scanning manner (the step-repetition method will be described later). Specifically, this is achieved by alternating the X-axis direction ( Figure 5 (in the left and right directions) such as long-stroke X-scan and Y-axis directions (in the left and right directions) Figure 5 For example, a short-stroke Y-scan (in the up-down direction) allows the stage 110 to scan the entirety of the movable surface MP.

[0050] This scanning drive is performed so that a processing device (not shown), such as an ion implantation apparatus, can perform the desired processing on all processed areas, such as semiconductor wafers, on the stage 110. Therefore, the stage 110 does not need to scan the entire movable surface MP at all times; it only needs to scan the entire semiconductor wafer, etc., which is the object being processed. In this embodiment, for convenience, an example of the stage 110 scanning the entire movable surface MP will be described. If "movable surface MP" is replaced with "processed surface of the object being processed" in the following description, it becomes an example of scanning the entire processed surface of the semiconductor wafer, etc. Furthermore, when the object being processed is a semiconductor wafer, its processed surface is typically circular, rather than... Figure 5 A rectangle like the movable surface MP in the game.

[0051] exist Figure 5 In this example, the lower left corner of the movable surface MP is set as the scan start position and the upper right corner of the movable surface MP is set as the scan end position, and the stage 110 is driven to perform a scan. In each X scan, the stage 110 travels a long distance covering approximately the total length of the movable surface MP in the X-axis direction, driven by the drive device 5 ( Figure 1 X-axis pneumatic actuator 120 in Figure 4 The linear motor 2X (e.g., in the case of a linear motor) is driven along the X-axis. Here, the two ends (in the X-axis direction of this long stroke) are... Figure 5 The left and right ends of the table 110 become the acceleration / deceleration intervals (as described later, they can also be referred to as the reversal intervals) where the table 110 is accelerated or decelerated. Moreover, the middle interval between the acceleration / deceleration intervals at both ends becomes the uniform speed interval where the table 110 is typically driven at a constant speed along the X-axis.

[0052] In each Y scan following each X scan, the stage 110 travels with a short stroke, much shorter than the total length of the movable surface MP in the Y-axis direction, via the drive device 5 ( Figure 1 Y-axis pneumatic actuator 130 in Figure 4 The linear motor 2Y (etc.) is driven along the Y-axis. After this Y-scan, an X-scan is performed immediately in the opposite direction to the previous X-scan. Therefore, the two ends of the movable surface MP in the X-axis direction where the Y-scan is performed become the reversal section of the worktable 110 in the X-axis direction.

[0053] The position-dependent data collection unit 41 collects position-dependent data related to the worktable 110 at multiple positions (in this embodiment, multiple two-dimensional positions or XY positions) within the movable surface MP, which is a movable area. Here, position-dependent data refers to any data related to the worktable 110 that can be obtained from the worktable 110 itself (as the driven body), the drive device 5 (as the driving body), the control device 300 (as the control body), etc., when the worktable 110 is located at various positions within the movable surface MP.

[0054] Position-dependent data can be data based on any physical quantity related to the state or motion of the stage 110 at various locations within the movable surface MP. For example, in Figure 5 In the turnaround interval, the position deviation between the actual stopping position of the worktable 110 and the target stopping position ST when it stops at each target stopping position ST (indicated by black dots) is ( Figure 3 The output of the subtractor 312 (or its variation or deviation over time) can be collected as location-dependent data by the location-dependent data collection unit 41. For example, such as Figure 6As schematically shown, the position deviation (standard deviation, etc.) of the worktable 110 when it stops at the target stop position ST within a predetermined time is collected by the position-dependent data collection unit 41 as position-dependent data representing the stopping stability at the target stop position ST.

[0055] Furthermore, in Figure 5 Within the uniform speed range, the position deviation when the worktable 110 passes through position CV at each periodic uniform speed, schematically indicated by white circles (in the uniform speed range). Figure 3 The output of subtractor 312 in the middle), speed deviation ( Figure 3 The output of subtractor 314 in the middle), acceleration deviation ( Figure 3 The output of the subtractor 316 in the machine, or its changes or deviations over time, can be collected as position-dependent data by the position-dependent data collection unit 41. Furthermore, the position-dependent data collection unit 41 can collect data for each position within the movable surface MP (not limited to the target stop position ST, any position of the uniformly passing position CV) of the worktable 110. Figure 3 The output of the disturbance observer 350 (the estimated disturbance) or its variation or deviation over time is used as location-dependent data.

[0056] Furthermore, the position-dependent data collection unit 41 can also collect data from the worktable 110 at various positions within the movable surface MP (not limited to the target stopping position ST and any position of the constant speed passing position CV). Figure 3 The control device 300 contains operating quantities, position commands, speed commands, acceleration commands, Figure 4 The driving force of linear motors 2X, 2Y, etc. in the worktable device 100, or torque-related commands in the case of rotary motors, and other command values, or their changes or deviations over time, are used as position-dependent data.

[0057] The position-dependent data collection unit 41 can collect various position-dependent data as described above during processing of a workpiece such as a semiconductor wafer by a processing apparatus (not shown) such as an ion implantation device. However, in the scan drive described above, since the stop position ST (black dot) only exists in the reversal zone, data indicating the position deviation of the stability when the stage 110 stops can be sufficiently collected in the reversal zone, but almost not collected in the constant speed zone. Thus, when there is a large deviation in the amount of position-dependent data collected during processing based on the processing apparatus at various positions within the movable surface MP, the position-dependent data collection unit 41 can move the stage 110 to a position where the amount of position-dependent data collected is low during non-processing periods when the processing apparatus is not processing the workpiece, thereby collecting position-dependent data.

[0058] For example, during non-processing periods when the processing device is not processing the workpiece, the position-dependent data collection unit 41 can stop the worktable 110 at a position it has not stopped at during the processing period (e.g., passing through position CV at a constant speed), and collect position-dependent data such as the position deviation at the time of stopping at that position. Thus, as needed, the worktable 110 can be driven to any position within the movable surface MP during non-processing periods, thereby enabling the collection of the same type of position-dependent data (e.g., position deviation at the time of stopping) across the entire movable surface MP. If multiple collections of the same type of position-dependent data are made for the same position within the movable surface MP, their average or other statistical values ​​can be used as position-dependent data representing that position.

[0059] On the other hand, relative to Figure 5 The driver in the scanning mode shown is in Figure 7 In the step-repetitive drive shown, the movement and stopping of the table 110 are repeated at short intervals. Therefore, in Figure 5 Even within a constant speed range where the stage 110 has not stopped, the stage 110 will stop. In this step-by-step repetitive drive, the stage 110 can temporarily stop the entire processed surface of the workpiece, such as the movable surface MP or semiconductor wafer.

[0060] As in Figure 7 As schematically shown using black dots, the stop positions ST are roughly evenly distributed across the movable surface MP. The position-dependent data collection unit 41 can collect position-dependent data such as position deviation at each of these stop positions ST. Furthermore, the position-dependent data collection unit 41 can collect position deviation, speed deviation, acceleration deviation, and other data from each drive of the stage 110 between consecutive stop positions ST. Figure 3 The disturbance observer 350 estimates the disturbances, or their changes or deviations over time, as location-dependent data.

[0061] As described above, in the step-repetitive mode, the position-dependent data collection unit 41 can collect various position-dependent data throughout the movable surface MP or the entire processed surface of the workpiece during the processing of a semiconductor wafer or other workpiece by a processing device (not shown) such as an inspection device. Figure 5 In the scanning method, the drive and position-dependent data of the workbench 110 were collected during non-processing periods as needed, but... Figure 7 In the step-repetitive mode, in principle, it is sufficient to drive the workbench 110 and collect position-dependent data during the processing.

[0062] The position-dependent data collection unit 41, as described above, collects position-dependent data in the movable surface MP, preferably during multiple processing periods and / or multiple non-processing periods for multiple (preferably a large number) processed objects. In this case, as described above, for the same type of position-dependent data collected at the same position in the movable surface MP across multiple processed objects, statistical processing such as averaging is preferably performed to obtain position-dependent data representing that position. The position-dependent data is affected not only by the state of the drive device 5 at each position in the movable surface MP that is originally to be grasped, but also by the weight or arrangement of the processed objects. However, through the statistical processing described above, the influence of specific processed objects can be removed.

[0063] The distribution data generation unit 42 generates distribution data that covers at least a portion of the movable region, based on various position-dependent data collected by the position-dependent data collection unit 41. In this embodiment, where the movable region is a two-dimensional movable surface MP, the distribution data generation unit 42 generates distribution data in three-dimensional space that covers at least a portion of the two-dimensional region of the movable surface MP, based on position-dependent data. Specifically, the distribution data consists of position-dependent data D at each XY position or at each XY coordinate (X,Y) within the movable surface MP. In other words, the distribution data is a set of three-dimensional data (X,Y,D) in the three-dimensional space formed by the X-axis, Y-axis, and D-axis (where each position-dependent data D is uniquely determined based on the XY coordinate (X,Y)). Here, since there is no location-dependent data D at the XY coordinate (X,Y) where the location-dependent data collection unit 41 has not collected the location-dependent data D, the distribution data generation unit 42 or the location-dependent data collection unit 41 can calculate or estimate the location-dependent data D for the XY coordinate (X,Y) by interpolation or the like based on multiple location-dependent data collected near the XY coordinate (X,Y).

[0064] The three-dimensional display unit 43 displays the distributed data generated by the distributed data generation unit 42 in three-dimensional space. For example, the three-dimensional display unit 43 displays the distributed data generated by the distributed data generation unit 42 on the monitor (display device) of the computer 6 used by the administrator or other user of the workbench device 100. Figure 8 A schematic illustration of the distribution of data in three-dimensional space. Figure 8 In the example, for each position on the XY plane formed by the X and Y axes, the distribution of stopping stability of the position-dependent data D is visualized as contour lines.

[0065] Observed as Figure 8The user, as shown in the image, can visually identify abnormal areas on the movable surface MP of the worktable 110 where position-dependent data such as stopping stability has significantly changed or deteriorated. Furthermore, the user can determine the type, cause, and severity of the abnormality based on various visual characteristics, such as the shape, size, and degree of change in position-dependent data compared to normal areas. For example, ... Figure 8 As shown, when the abnormal parts are distributed in a dotted or hill-like pattern near a specific XY position, it is suspected that there are foreign objects such as dust that may obstruct the drive of the worktable 110 at that XY position. Furthermore, when the abnormal parts are distributed throughout a specific X-axis range, it is suspected that the mechanism in the drive unit 5 responsible for driving in the X-axis direction within that X-axis range has abnormalities such as scratches or damage.

[0066] Abnormalities can include poor mechanical adjustment (e.g., deformation during installation, over-tightening of screws) or the resulting reduction in assembly accuracy. Furthermore, abnormalities can also include undesirable changes in the condition of the device (e.g., dust adhesion, friction caused by deterioration, insufficient lubricant such as grease, mechanical misalignment, or interference from other devices).

[0067] In addition to the three-dimensional display to the user via the three-dimensional display unit 43 as described above, or as an alternative, the anomaly determination unit 44 can automatically determine, based on the distribution data generated by the distribution data generation unit 42, anomalies related to a specific location in the movable area as described above. Furthermore, the anomaly determination unit 44 can append information related to the determined anomalies to the display on the three-dimensional display unit 43, such as... Figure 8 In the displayed image. In addition, the anomaly detection unit 44 can inform the user of the identified anomaly in a manner different from the image display performed by the three-dimensional display unit 43 (e.g., sound or light).

[0068] In addition, the three-dimensional display unit 43, besides such as Figure 8 The static image shown, or its alternative, can be displayed as a dynamic image or animation showing its changes over time. By enabling users to visually grasp these changes over time, they can intuitively understand the pattern of occurrence or the degree of progression (or severity) of the anomaly. The anomaly determination unit 44 can be based on a large amount of training data (such as...) Figure 8 Artificial intelligence is derived by performing machine learning on the distributed data shown and the information group related to the anomalies present therein, so that anomalies can be identified with the same or higher accuracy as the user.

[0069] Based on the location-dependent data described above, various anomalies or deteriorations of the device can be determined or estimated, and notifications can be sent to relevant users such as the device operator in various ways. For example, relevant users can be automatically notified via email of detailed information such as the content, type, cause, severity, and response methods of the anomalies or deteriorations determined or estimated using location-dependent data. Furthermore, the anomaly determination unit 44 can notify relevant users of the recommended maintenance period, frequency, and content of the device based on the determined or estimated type, cause, and severity of the anomalies or deteriorations.

[0070] In the above example, the movable area of ​​the worktable 110 is a two-dimensional movable surface MP (XY plane), but the movable area of ​​the worktable 110 can also be a three-dimensional movable space (XYZ plane). In this case, the position-dependent data collection unit 41 collects various position-dependent data D for the three-dimensional XYZ coordinates (X,Y,Z). Therefore, the distribution data generated by the distribution data generation unit 42 consists of a set of four-dimensional data (X,Y,Z,D). The three-dimensional display unit 43 cannot display this entire four-dimensional distribution data on one screen; therefore, for example, it can perform operations on a specific Z coordinate specified by the user. Figure 8 The three-dimensional display shown.

[0071] The present disclosure has been described above based on embodiments. Various modifications can be implemented in the combinations of constituent elements or processes in the illustrated embodiments, and such modifications are included within the scope of the present disclosure, which will be apparent to those skilled in the art.

[0072] Furthermore, the configuration, function, and purpose of each device or method described in the embodiments can be implemented using hardware resources, software resources, or through the collaboration of hardware and software resources. Hardware resources include, for example, processors, ROMs, RAMs, and various integrated circuits. Software resources include, for example, operating systems, application programs, and other programs.

[0073] Industrial availability This disclosure relates to a data processing device in a drive device, etc.

[0074] Symbol Explanation 4-Data processing device, 5-Drive device, 6-Computer, 41-Position-dependent data collection unit, 42-Distributed data generation unit, 43-3D display unit, 44-Anomaly determination unit, 100-Workbench device, 110-Workbench, 300-Control device.

Claims

1. A data processing apparatus, located in a drive device for driving a driven body within a movable region of two or more dimensions, comprising: The position-dependent data collection unit collects position-dependent data related to the driven body for multiple positions of the driven body within the movable area; and The distribution data generation unit generates distribution data of the position-dependent data that covers at least a portion of the movable region.

2. The data processing apparatus according to claim 1, wherein, The position-dependent data collection unit collects position-dependent data when the driven body stops at the plurality of positions within the movable area.

3. The data processing apparatus according to claim 2, wherein, The position-dependent data is based on the positional deviation between the actual stopping position and the target position when the driven body stops at multiple target positions within the movable area.

4. The data processing apparatus according to claim 2, wherein, The driven body is a worktable that holds the workpiece to be processed by the processing device. The position-dependent data collection unit collects position-dependent data for the multiple positions where the worktable stops during the processing of the workpiece by the processing device.

5. The data processing apparatus according to claim 4, wherein, The location-dependent data collection unit stops the worktable at a position that it has not stopped at during the processing period when the processing device does not perform the processing on the workpiece, and collects the location-dependent data for that position.

6. The data processing apparatus according to any one of claims 1 to 5, wherein, The movable area is a two-dimensional movable surface. The position-dependent data collection unit collects position-dependent data for multiple two-dimensional positions of the driven body within the movable surface. The distribution data generation unit generates distribution data in three-dimensional space that covers at least a portion of the two-dimensional region of the movable surface, representing the position-dependent data.

7. The data processing apparatus according to claim 6, wherein, The data processing device includes a three-dimensional display unit that displays the distributed data in three-dimensional space.

8. The data processing apparatus according to any one of claims 1 to 5, wherein, The data processing device includes an anomaly determination unit that determines anomalies related to a specific location in the movable area based on the distribution data.

9. The data processing apparatus according to claim 8, wherein, The anomaly determination unit is composed of artificial intelligence obtained by machine learning on training data, which is a group of distribution data and information related to anomalies present in the drive device when the distribution data is generated.

10. The data processing apparatus according to any one of claims 1 to 5, wherein, The driving device is a fluid actuator that uses a working fluid to drive the driven body within the movable area.

11. The data processing apparatus according to any one of claims 1 to 5, wherein, The driving device is an electromagnetic actuator that electromagnetically drives the driven body within the movable area.

12. A data processing method, comprising the following steps in a drive device that drives a driven body within a movable region of two or more dimensions: For multiple positions of the driven body within the movable region, position-dependent data related to the driven body is collected; and Generate distribution data of the location-dependent data that covers at least a portion of the movable region.

13. A storage medium storing a data processing program that causes a computer to perform the following steps in a drive device that drives a driven body in a movable area of ​​two or more dimensions: For multiple positions of the driven body within the movable region, position-dependent data related to the driven body is collected; and Generate distribution data of the location-dependent data that covers at least a portion of the movable region.

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