Non-contact motion sensor based on heterojunction interface regulation and preparation method thereof

Abstract

This application provides a method for fabricating a non-touch motion sensor based on heterogeneous interface modulation, comprising the following steps: providing a heterogeneous interface flexible thin film material as the substrate of the non-touch motion sensor; testing the heterogeneous interface flexible thin film material; constructing a heterogeneous interface-modulated non-touch flexible motion sensor using the qualified heterogeneous interface flexible thin film material; extending the heterogeneous interface-modulated non-touch flexible motion sensor into three-dimensional space, and verifying the orientation recognition capability of the non-touch three-dimensional flexible motion sensor. This application aims to achieve high sensing performance while addressing the problems of short device lifespan and poor sensing performance stability in touch sensors, as well as the high cost and complex structure of high-performance sensor construction methods, thereby meeting the application needs of flexible touch sensors in the field of human-computer interaction.

Description

Technical Field

[0001] This application relates to the field of touch sensor fabrication technology, specifically to a non-touch motion sensor based on heterogeneous interface modulation and its fabrication method. Background Technology

[0002] Touch sensors, as an important electronic component, are widely used in electronic technology fields such as smartphones, tablets, laptops, and smart home devices. With the rapid development of modern science and technology, there are higher requirements for the portability, intelligence, and flexibility of touch sensors, as well as higher requirements for their high sensing performance and cost.

[0003] Touch sensing technology mainly includes two modes: touchable and non-touchable. In touchable mode, when a specially designed pointer is used for direct touch, the capacitive or resistive response caused by the deformation of the touched material can be detected. Some of these devices are inherently self-powered because they utilize surface current during contact to convert mechanical energy into electron flow without any external power source. However, this touch-based (pressure or friction) approach not only reduces the device's lifespan but also affects the stability of sensing performance. Driven by scientific interest and industrial needs, tactile sensing technology using non-touchable sensing modes is being explored. In non-touchable mode, the detection range of these previous applications is limited to only 1 cm due to the humidity gradient range of the human finger, which greatly restricts their wider application.

[0004] In pursuit of high sensing performance, various materials have been explored, including conductive fluids, hydrogels, ion- and porous materials, and carbon nanotube / graphene components. Some studies have used ultrathin and cracked sensing layers, or specific morphologies of nanomaterials, to enhance sensitivity. However, these studies primarily focus on improving the sensitivity of each sensing unit; if high sensing accuracy is required, the number of sensing units in a complete array device would be very large. Each sensing unit would have at least two electrodes for signal transmission, resulting in a highly complex and costly device.

[0005] As research continues, future development directions include maintaining high sensing performance while possessing long service life, stable sensing performance, low cost, and meeting application requirements in specific scenarios. Therefore, a non-touch flexible three-dimensional motion sensor based on heterogeneous interface modulation is yet to be developed. Summary of the Invention

[0006] To address the aforementioned technical issues, this application provides a non-touch motion sensor based on heterogeneous interface modulation and its fabrication method. The aim is to pursue high sensing performance while simultaneously solving the problems of short device lifespan and poor sensing performance stability inherent in touch sensors. Furthermore, it addresses the issues of high cost and complex structure associated with high-performance sensor construction methods. This will meet the application requirements of flexible touch sensors in specific scenarios such as curved surfaces and microenvironments, including human and robotic applications, for monitoring, sensing, and decision-making regarding speed, acceleration, and special motion behaviors.

[0007] To achieve the above objectives, the technical solution adopted in this application is as follows:

[0008] The first aspect of this application provides a method for fabricating a non-touch motion sensor based on heterogeneous interface modulation, comprising the following steps: providing a heterogeneous interface flexible thin film material as a substrate for the non-touch motion sensor; testing the heterogeneous interface flexible thin film material; using the qualified heterogeneous interface flexible thin film material to construct a heterogeneous interface-modulated non-touch flexible motion sensor; extending the heterogeneous interface-modulated non-touch flexible motion sensor into three-dimensional space, and verifying the orientation recognition capability of the non-touch three-dimensional flexible motion sensor.

[0009] In some exemplary embodiments, the heterogeneous interface flexible thin film material includes silver nanowires, thermoplastic polyurethane, and polytetrafluoroethylene.

[0010] In some exemplary embodiments, constructing a non-touch flexible motion sensor with heterogeneous interface modulation includes: covering a thermoplastic polyurethane film and a silver nanowire electrode on a negatively charged polytetrafluoroethylene film to obtain a non-touch flexible motion sensor with heterogeneous interface modulation.

[0011] In some exemplary embodiments, constructing a non-touch flexible motion sensor with heterogeneous interface modulation includes: spin-coating a thermoplastic polyurethane solution onto a glass slide, drying it at 100°C for 1 hour to obtain a thermoplastic polyurethane film; depositing silver nanowire electrode patterns of different sizes on the thermoplastic polyurethane film by symmetrical screen printing of silver nanowire dispersion, drying it at 100°C for 0.5 hours, peeling the self-supporting silver nanowires and the thermoplastic polyurethane heterogeneous interface flexible film off the glass slide, and bonding them to the electrodes with copper wires by thermal curing silver paste at 60°C for 3 hours; spin-coating a polytetrafluoroethylene solution onto a glass slide, drying it at 100°C for 1 hour to obtain a polytetrafluoroethylene film; and obtaining materials with different charges by fully rubbing a polyethylene terephthalate film, paper, glass, PS film, human skin, and polytetrafluoroethylene with the thermoplastic polyurethane film for 1-3 minutes.

[0012] In some exemplary embodiments, the thickness of the thermoplastic polyurethane is 40 μm to 60 μm; the length of the silver nanowire electrode pattern is 4 mm to 6 mm; the width of the silver nanowire electrode pattern is 0.1 cm, 0.5 cm, 3 cm, 5 cm or 10 cm; and the thickness of the polytetrafluoroethylene is 60 μm to 140 μm.

[0013] In some exemplary embodiments, the thickness of the thermoplastic polyurethane is 50 μm; the length of the silver nanowire electrode pattern is 5 mm; and the thickness of the polytetrafluoroethylene is 100 μm.

[0014] In some exemplary embodiments, extending a non-touch flexible motion sensor modulated by a heterogeneous interface to three-dimensional space includes: extending the sensing capability of the non-touch flexible motion sensor modulated by a heterogeneous interface to three-dimensional space through programming electrodes and additional logic calculations; the extended sensing capability includes horizontal sensing from 0° to 360° and vertical sensing up and down.

[0015] In some exemplary embodiments, verifying the orientation recognition capability of a non-touch three-dimensional flexible motion sensor includes: verifying whether the structure of the non-touch three-dimensional flexible motion sensor is intact, whether there is a change in the potential signal during response, and how to detect the signal response.

[0016] The second aspect of this application provides a non-touch motion sensor based on heterogeneous interface modulation, which is prepared by the method for preparing a non-touch motion sensor based on heterogeneous interface modulation described in the above embodiments.

[0017] The third aspect of this application provides an application of a non-touch motion sensor based on heterogeneous interface modulation in the field of human-computer interaction, namely, the application of the non-touch motion sensor based on heterogeneous interface modulation provided in this application for monitoring, sensing, and decision-making of speed, acceleration, and special motion behaviors of human beings and robots in curved surfaces and micro-environments.

[0018] As described above, the non-touch motion sensor based on heterogeneous interface modulation and its fabrication method of this application have the following beneficial effects:

[0019] A method for fabricating a non-touch, three-dimensional flexible motion sensor with heterogeneous interface control at the micro / nano scale has been developed, overcoming the problems of short device lifespan and low sensing performance stability inherent in touch-based tactile sensing technology. Because the materials used in this sensor are designed at the micro / nano scale, its sensing performance is higher than that of traditional touch-based sensors. Compared to other methods that use specific shapes of nanomaterials to enhance the sensitivity of each sensing unit, this device is simpler and lower in cost, meeting the application requirements in specific scenarios and possessing broad development and application prospects. Attached Figure Description

[0020] One or more embodiments are illustrated by way of example with reference to the accompanying drawings. These illustrations do not constitute a limitation on the embodiments, and unless otherwise stated, the figures in the drawings are not to be limited by scale.

[0021] Figure 1 A flowchart illustrating the fabrication method of the non-touch motion sensor based on heterogeneous interface modulation provided in this application.

[0022] Figure 2a This is a scanning electron microscope image of the non-touchscreen three-dimensional flexible motion sensor based on heterogeneous interface modulation in this application.

[0023] Figure 2b This is a demonstration diagram of the non-touch-controlled three-dimensional flexible motion sensor based on heterogeneous interface modulation in this application.

[0024] Figure 3a This is a demonstration diagram of the flexible sensing membrane of the non-touch three-dimensional flexible motion sensor based on heterogeneous interface modulation in this application.

[0025] Figure 3b This is a multiphysics simulation diagram of the non-touch three-dimensional flexible motion sensor based on heterogeneous interface control in this application.

[0026] Figure 4a , 4b The diagram above (4c) is the three-dimensional equivalent circuit diagram of the non-touch three-dimensional flexible motion sensor based on heterogeneous interface control in this application.

[0027] Figure 4d This is a potential distribution diagram of the non-touch three-dimensional flexible motion sensor based on heterogeneous interface modulation in this application.

[0028] Figure 4e This is a potential response diagram of the non-touch three-dimensional flexible motion sensor based on heterogeneous interface control in this application at different angles.

[0029] Figure 4f This is a real-time response curve of the non-touch three-dimensional flexible motion sensor based on heterogeneous interface control in this application.

[0030] Figure 4g This is a comparison chart of the theoretical and practical values ​​of the non-touch three-dimensional flexible motion sensor based on heterogeneous interface control in this application.

[0031] Figure 5a and Figure 5b This is a physical image showing the verification application of the non-touch-based three-dimensional flexible motion sensor based on heterogeneous interface control in this application. Detailed Implementation

[0032] As can be seen from the background technology, existing technologies suffer from short device lifespan, poor sensing performance stability, and small detection range. In the pursuit of high sensing performance, the final device structure is very complex and costly, which cannot meet the application requirements of touch sensors in specific situations.

[0033] To address the aforementioned technical problems, this application provides a non-touch motion sensor based on heterogeneous interface modulation and its fabrication method. The fabrication method includes the following steps: providing a heterogeneous interface flexible thin film material as the substrate of the non-touch motion sensor; testing the heterogeneous interface flexible thin film material; constructing a heterogeneous interface-modulated non-touch flexible motion sensor using the qualified heterogeneous interface flexible thin film material; extending the heterogeneous interface-modulated non-touch flexible motion sensor into three-dimensional space, and verifying the orientation recognition capability of the non-touch three-dimensional flexible motion sensor. This application aims to achieve high sensing performance while simultaneously addressing the problems of short device lifespan and poor sensing performance stability in touch sensors, as well as the high cost and complex structure of high-performance sensor construction methods, thereby meeting the application needs of flexible touch sensors in the field of human-computer interaction.

[0034] The embodiments of this application will now be described in detail with reference to the accompanying drawings. However, those skilled in the art will understand that many technical details have been provided in the embodiments of this application to facilitate a better understanding of the application. However, the technical solutions claimed in this application can be implemented even without these technical details and various variations and modifications based on the following embodiments.

[0035] See Figure 1 This application provides a non-touch motion sensor based on heterogeneous interface modulation and its fabrication method, which includes the following steps:

[0036] Step S1: Provide a heterogeneous interface flexible thin film material as a substrate for a non-touch motion sensor.

[0037] Step S2: Test the heterogeneous interface flexible thin film material.

[0038] Step S3: Using qualified heterogeneous interface flexible thin film materials, construct a non-touch flexible motion sensor with heterogeneous interface control.

[0039] Step S4: Extend the non-touch flexible motion sensor with heterogeneous interface control to three-dimensional space and verify the orientation recognition capability of the non-touch three-dimensional flexible motion sensor.

[0040] The purpose of this application is to provide a method for fabricating a non-touch three-dimensional flexible motion sensor based on heterogeneous interface modulation. The aim is to create a heterogeneous interface composed of thermoplastic polyurethane (TPU) and silver nanowire (Ag NW) electrodes, which can identify the left and right movement direction of a charged polytetrafluoroethylene (PVDF) film in a non-touch mode. Practical application has been successfully verified using a self-powered, transparent, and wearable device. The advantages of this method are: (1) it avoids the low device lifespan of touch sensors during use; (2) it improves the stability of sensing performance; (3) it increases the sensor's detection range; and (4) due to the use of micro / nanomaterials, it achieves high sensing performance while maintaining the simplicity and low cost of the final device structure, thus meeting the applicability of touch sensors in this application scenario.

[0041] In some embodiments, the heterogeneous interface flexible thin film material includes silver nanowires, thermoplastic polyurethane, and polytetrafluoroethylene.

[0042] In some embodiments, constructing a non-touch flexible motion sensor with heterogeneous interface modulation includes: covering a thermoplastic polyurethane film and a silver nanowire electrode on a negatively charged polytetrafluoroethylene film to obtain a non-touch flexible motion sensor with heterogeneous interface modulation.

[0043] In some embodiments, constructing a non-touch flexible motion sensor with heterogeneous interface control includes: spin-coating a thermoplastic polyurethane solution onto a glass slide, drying it at 100°C for 1 hour to obtain a thermoplastic polyurethane film; depositing silver nanowire electrode patterns of different sizes on the thermoplastic polyurethane film by symmetrical screen printing of silver nanowire dispersion, drying it at 100°C for 0.5 hours, peeling the self-supporting silver nanowires and the thermoplastic polyurethane heterogeneous interface flexible film off the glass slide, and bonding them to the electrodes with copper wires by thermal curing silver paste at 60°C for 3 hours; spin-coating a polytetrafluoroethylene solution onto a glass slide, drying it at 100°C for 1 hour to obtain a polytetrafluoroethylene film; and obtaining materials with different charges by fully rubbing a polyethylene terephthalate film, paper, glass, polystyrene (PS) film, human skin, and polytetrafluoroethylene with the thermoplastic polyurethane film for 1-3 minutes.

[0044] In some embodiments, the thickness of the thermoplastic polyurethane is 40 μm to 60 μm; the length of the silver nanowire electrode pattern is 4 mm to 6 mm; the width of the silver nanowire electrode pattern is 0.1 cm, 0.5 cm, 3 cm, 5 cm or 10 cm; and the thickness of the polytetrafluoroethylene is 60 μm to 140 μm.

[0045] In some embodiments, the thickness of the thermoplastic polyurethane is 50 μm; the length of the silver nanowire electrode pattern is 5 mm; and the thickness of the polytetrafluoroethylene is 100 μm.

[0046] In some embodiments, extending a non-touch flexible motion sensor modulated by a heterogeneous interface to three-dimensional space includes: extending the sensing capability of the non-touch flexible motion sensor modulated by a heterogeneous interface to three-dimensional space through programming electrodes and additional logic calculations; the extended sensing capability includes horizontal sensing from 0° to 360° and vertical sensing.

[0047] In some embodiments, verifying the orientation recognition capability of a non-touch three-dimensional flexible motion sensor includes: verifying whether the structure of the non-touch three-dimensional flexible motion sensor is intact, whether there is a change in the potential signal during response, and how to detect the signal response.

[0048] The second aspect of this application provides a non-touch motion sensor based on heterogeneous interface modulation, which is prepared by the method for preparing a non-touch motion sensor based on heterogeneous interface modulation described in the above embodiments.

[0049] The third aspect of this application provides an application of a non-touch motion sensor based on heterogeneous interface modulation in the field of human-computer interaction, namely, the application of the non-touch motion sensor based on heterogeneous interface modulation provided in this application for monitoring, sensing, and decision-making of speed, acceleration, and special motion behaviors of human beings and robots in curved surfaces and micro-environments.

[0050] The following detailed description of the non-touch motion sensor based on heterogeneous interface modulation and its fabrication method provided in this application is based on specific embodiments.

[0051] like Figure 1 , Figure 2a and Figure 2b As shown, the preparation of heterogeneous interface flexible thin film materials includes the following steps:

[0052] Step 1: Provide a heterogeneous interface flexible thin film material.

[0053] The heterogeneous interface flexible thin film material consists of silver nanowires and thermoplastic polyurethane. The silver nanowires were synthesized in the laboratory and stored in pure water with a solids content of 0.1 mg / ml. The thermoplastic polyurethane was purchased from Usolf.

[0054] For thermoplastic polyurethane (PP), a PPS solution is first spin-coated onto a glass slide. After drying at 100°C for 1 hour, a film with a controllable thickness of 50 μm is obtained. Then, silver nanowire dispersions are symmetrically screen-printed onto the PPS film to deposit silver nanowire electrode patterns of different sizes. The lengths of the silver nanowire electrode patterns are all 5 mm, and the widths are 0.1 cm, 0.5 cm, 3 cm, 5 cm, and 10 cm, respectively. After drying at 100°C for 0.5 hours, the self-supporting silver nanowires and the PPS heterostructure flexible film can be peeled off from the glass slide. Copper wire bonding to the electrodes is then achieved by thermal curing silver paste at 60°C for 3 hours. For polytetrafluoroethylene (PTFE), the PTFE solution and its film are also prepared using the above method, but with a thickness of 100 μm. By thoroughly rubbing a TPU film against a PET film, paper, glass, PS film, human skin, and PVDF for approximately 2 minutes, materials with different charges can be prepared.

[0055] Step 2: Inspect the heterogeneous interface flexible thin film material.

[0056] The microstructure and surface shape of TPU film, PVDF film and silver nanowire electrode were observed using scanning electron microscopy.

[0057] Step 3: Construct a non-touch flexible motion sensor with heterogeneous interface control.

[0058] The construction of a heterogeneous interface-controlled spatial logic sensor involves covering a thermoplastic polyurethane film and a silver nanowire electrode onto a negatively charged polytetrafluoroethylene.

[0059] Step 4: Extend the non-touch flexible motion sensor with heterogeneous interface control to three-dimensional space, and verify the orientation recognition capability of the non-touch three-dimensional flexible motion sensor.

[0060] A spatial logic sensing system, as shown in scanning electron microscopy (SEM) images, consists of a TPU film and a silver nanowire electrode covering a negatively charged PVDF film to sense the biomechanical behavior of a human finger. The film accurately identifies the spatial mechanical behavior direction of the charged PTFE film above it by responding to positive / negative or strong / weak potential signals. Specifically, during movement, a computer records the sliding behavior of the different materials above it using a multimeter to test the potential response. The movement speed of material-ii is timed using a stopwatch, and the distance between material-i and material-ii is measured using a ruler.

[0061] like Figure 3aAs shown, to better analyze the sensing mechanism, the non-touch sensing capability of the flexible sensing film non-touch device was experimentally verified. First, the flexible sensing film and PVDF were wrapped around the middle finger and thumb, respectively. Opening and closing the two fingers detected corresponding positive and negative changes in the potential signal. Further, the entire logic sensing system was considered as a pseudo-capacitor, C... PVDF-TPU-AgNWs Using TPU as the dielectric material to modulate the interaction between the negatively charged PVDF and the electrode, this pseudo-capacitor is divided into C... PVDF-AgNWs C PVDF-TPU C TPU-AgNWs The three parts have no change in potential when at rest. According to the principle of capacitance, any movement of a human finger will cause C to change. PVDF-TPU Or C PVDF-AgNWs The change in distance and the resulting change in charge density due to the charging and discharging process generate a corresponding potential signal, enabling the entire sensing system to reach a new dynamic equilibrium.

[0062] When a person's finger slides off the electrode at a constant height, C PVDF-TPU The value of remains constant, while an increase in distance will cause C to... PVDF-AgNWs The capacity is reduced, and C PVDF-AgNWs Discharge results in a positive potential current flowing from the electrode to ground. Conversely, it is a negative potential when the charge is near the electrode. According to Ampere's law, the directional movement of charges creates an electric current and generates a potential. When the direction of movement changes, a potential is also generated in the other direction.

[0063] like Figure 3b As shown, multiphysics simulation was used to monitor this process. Due to sufficient friction, the charge density on PVDF and TPU is very high, so only the change in charge distribution at the AgNWs-TPU heterogeneous interface needs to be considered. The change in the response of the charge on the electrodes to the left and right sliding motion provides direct evidence of current flow. However, this change did not occur on the TPU film. Due to the insulation of TPU, the charge distribution boundary on the electrodes is clear, indicating the crucial role of interface effects in logic sensing.

[0064] Based on the performance of single-electrode flexible thin film spatial logic sensing, its sensing capabilities are further expanded through programming heterogeneous interfaces and logic computing to identify more motion directions and meet the functional and accuracy requirements of extending to three-dimensional space.

[0065] like Figure 4a , 4bAs shown, four symmetrical electrodes are integrated into a single TPU film, meaning that four potential signals are generated with each sliding motion. Note that this flexible sensing film is attached to a glass substrate to obtain accurate data. By combining strong / weak signals, negative / positive signals, and the ratio of the amplitudes of signals from adjacent electrodes, the sensing system can theoretically be extended to all horizontal directions (0°-360°). This sensing mechanism is very similar to that of homing pigeons, which can remember their way home even in complex magnetic fields using magnetoreceptors in their heads. Figure 4c As shown.

[0066] Figure 4d The potential distribution maps of the four electrodes responding to the direction of movement within the range of 0°-360° are summarized. These potential distribution maps resemble periodic sine waves and can be defined as a database for calculating the angle of each movement behavior. For example, at 90°, E2 and E4 exhibit stronger positive and negative potential responses, respectively, compared to the weak potential responses of E1 and E3. At 225°, all four electrodes (E1, E2, E3, and E4) show potential responses, with E1 and E2 being positive signals and E3 and E4 being negative signals. For any given angle, such as 310°, the region to which the angle belongs can first be determined based on the positive and negative potentials of the four electrodes. Note that the four-electrode panel is divided into four regions: i: 0°-90° (E1-E2), ii: 90°-180° (E2-E3), iii: 180°-270° (E3-E4), and iv: 270°-360° (E4-E1). Based on this, and according to the potential ratio between E4 and E1, the detailed angle value can be further calculated.

[0067] In addition, Figure 4e The vertical movement behavior can also be determined. Upward movement results in positive potential responses from electrodes E1, E2, E3, and E4, while downward movement results in negative potential responses. Therefore, based on the differences in amplitude and positive / negative potential responses, it is easy to distinguish the response performance in the vertical and horizontal directions. Single-electrode sensing systems do not possess this capability. A typical real-time response potential curve is shown below. Figure 4f As shown.

[0068] Figure 4g By comparing theoretical and practical values, the high precision and efficiency of the four-electrode sensing system in three-dimensional space are demonstrated.

[0069] like Figure 5a and Figure 5bAs shown, to demonstrate the practical application of flexible spatial logic sensing films in wearable communication devices, components of the sensing system were integrated into a person's hand. A TPU film (3cm × 1.2cm × 25μm) with two symmetrical electrodes was attached to the thumb, and a PVDF film (3cm × 1.2cm × 100μm) was attached to the index finger. When the distance between the two fingers changes, a potential signal is generated. Therefore, a logical relationship can be established between biomechanical behavior and potential signals, such as turning right (G1) or left (G2), up (G3) or down (G4), and these actions repeated twice (2×G1 / 2; 2×G3 / 4). The configuration file in the figure is very regular and highly identifiable; these functions allow it to function like a controller, sending various commands like a mouse.

[0070] Based on the above technical solutions, the non-touch motion sensor and its fabrication method based on heterogeneous interface modulation disclosed in this application have the following beneficial effects:

[0071] A method for fabricating a non-touch, three-dimensional flexible motion sensor with heterogeneous interface control at the micro / nano scale has been developed, overcoming the problems of short device lifespan and low sensing performance stability inherent in touch-based tactile sensing technology. Because the materials used in this sensor are designed at the micro / nano scale, its sensing performance is higher than that of traditional touch-based sensors. Compared to other methods that use specific shapes of nanomaterials to enhance the sensitivity of each sensing unit, this device is simpler and lower in cost, meeting the application requirements in specific scenarios and possessing broad development and application prospects.

[0072] The above embodiments are merely illustrative examples of the technical solutions of this application. The method for fabricating a non-touch three-dimensional flexible motion sensor based on heterogeneous interface modulation disclosed in this application is not limited to the content described in the above embodiments. This method can also fabricate various types of non-touch three-dimensional flexible motion sensors other than those described in the embodiments. The fabrication of the heterogeneous interface flexible thin film is not limited to the content described in the embodiments; heterogeneous interface flexible thin films made of different materials can be achieved through various processes. For those skilled in the art, various modifications, supplements, or equivalent substitutions can be made without departing from the concept of this application, and all such modifications, supplements, or equivalent substitutions should fall within the protection scope of this application.

Claims

1. A method for fabricating a non-touch motion sensor based on heterogeneous interface modulation, characterized in that, Includes the following steps: Provide heterogeneous interface flexible thin film materials as substrates for non-touch motion sensors; The heterogeneous interface flexible thin film material was tested. Using qualified heterogeneous interface flexible thin film materials, a non-touch flexible motion sensor with heterogeneous interface regulation was constructed. The non-touch flexible motion sensor with heterogeneous interface modulation was extended to three-dimensional space, and the orientation recognition capability of the non-touch three-dimensional flexible motion sensor was verified.

2. The method for fabricating a non-touch motion sensor based on heterogeneous interface modulation according to claim 1, characterized in that, The heterogeneous interface flexible thin film material includes silver nanowires, thermoplastic polyurethane, and polytetrafluoroethylene.

3. The method for fabricating a non-touch motion sensor based on heterogeneous interface modulation according to claim 1, characterized in that, Constructing a non-touch flexible motion sensor with heterogeneous interface modulation, including: A non-touch flexible motion sensor with heterogeneous interface modulation is obtained by covering a thermoplastic polyurethane film and a silver nanowire electrode on a negatively charged polytetrafluoroethylene film.

4. The method for fabricating a non-touch motion sensor based on heterogeneous interface modulation according to claim 1 or 3, characterized in that, Constructing a non-touch flexible motion sensor with heterogeneous interface modulation, including: A thermoplastic polyurethane solution was prepared by spin coating on a glass slide, and a thermoplastic polyurethane film was obtained after drying at 100°C for 1 hour. Silver nanowire electrode patterns of different sizes were deposited on a thermoplastic polyurethane film by symmetrical screen printing of silver nanowire dispersion. After drying at 100°C for 0.5 hours, the self-supporting silver nanowires and thermoplastic polyurethane heterostructure flexible film were peeled off from the glass slide and bonded to the electrode by silver paste thermal curing at 60°C for 3 hours. A polytetrafluoroethylene (PTFE) solution was prepared by spin-coating on a glass slide and dried at 100°C for 1 hour to obtain a PTFE film. Materials with different charges can be prepared by fully rubbing a thermoplastic polyurethane film against a polyethylene terephthalate film, paper, glass, PS film, human skin, and polytetrafluoroethylene for 1-3 minutes.

5. The method for fabricating a non-touch motion sensor based on heterogeneous interface modulation according to claim 4, characterized in that, The thickness of the thermoplastic polyurethane is 40μm to 60μm; the length of the silver nanowire electrode pattern is 4mm to 6mm; the width of the silver nanowire electrode pattern is 0.1cm, 0.5cm, 3cm, 5cm or 10cm; and the thickness of the polytetrafluoroethylene is 60μm to 140μm.

6. The method for fabricating a non-touch motion sensor based on heterogeneous interface modulation according to claim 5, characterized in that, The thickness of the thermoplastic polyurethane is 50 μm; the length of the silver nanowire electrode pattern is 5 mm; and the thickness of the polytetrafluoroethylene is 100 μm.

7. The method for fabricating a non-touch motion sensor based on heterogeneous interface modulation according to claim 1, characterized in that, Extending a non-touch flexible motion sensor modulated by a heterogeneous interface to three-dimensional space includes: extending the sensing capability of the non-touch flexible motion sensor modulated by a heterogeneous interface to three-dimensional space through programmable electrodes and additional logic calculations; the extended sensing capability includes horizontal sensing from 0° to 360° and vertical sensing up and down.

8. The method for fabricating a non-touch motion sensor based on heterogeneous interface modulation according to claim 1, characterized in that, Verify the orientation recognition capability of the non-touch 3D flexible motion sensor, including: verifying whether the structure of the non-touch 3D flexible motion sensor is intact, whether there is a change in potential signal during response, and how to detect the signal response.

9. A non-touch motion sensor based on heterogeneous interface modulation, characterized in that, The non-touch motion sensor based on heterogeneous interface control is prepared using any one of the methods described in claims 1 to 8.

10. An application of the non-touch motion sensor based on heterogeneous interface control as described in claim 9 in the field of human-computer interaction.

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