ZR shaft module and rotary head bonding mechanism

Abstract

This invention discloses a ZR axis module and a rotary head mechanism, relating to the field of semiconductor packaging equipment technology. The ZR axis module includes a mounting base, a first drive structure, a second drive structure, and a dynamic balancing structure. The mounting base is eccentrically fixed to the disk body. The first drive structure is movably mounted on the mounting base and extends radially along the disk body, driving the end effector to rotate. The second drive structure is mounted on the mounting base, parallel to and driven by the first drive structure, driving the first drive structure to reciprocate radially along the disk body. The dynamic balancing structure is mounted on the mounting base and drives the first and second drive structures, ensuring that the centrifugal forces generated by the first and second drive structures cancel each other out when the disk body rotates. The technical solution provided by this invention achieves dynamic balance kinetic energy of the ZR axis module, thereby ensuring operational stability and motion accuracy while aligning the movement direction of the end effector with the centrifugal force.

Description

Technical Field

[0001] This invention relates to the field of semiconductor packaging equipment technology, and in particular to a ZR axis module and a rotary head assembly mechanism. Background Technology

[0002] Rotary assembly mechanisms are common actuators in semiconductor packaging equipment. They drive end effectors to perform various operations by rotating the disk body. The ZR axis module is a crucial working component of the rotary assembly mechanism, used to achieve translation and rotation of the end effector. In actual operation, the rotation of the disk body generates centrifugal force, which significantly affects the ZR axis module and end effector. Excessive centrifugal force can easily impair the operation of the end effector.

[0003] Since the direction of centrifugal force is parallel to the radial direction of the disk body, existing ZR axis modules are typically positioned along the axial direction of the disk body to drive the end effector to move along the axial direction of the disk body. This ensures that the direction of movement of the end effector is 90 degrees to the direction of the centrifugal force, thereby avoiding the influence of centrifugal force on the movement of the end effector. However, when the ZR axis module is positioned radially along the disk body and the direction of movement of the end effector is the same as the centrifugal force, the centrifugal force can still significantly affect the motion accuracy and stability of the end effector, leading to inaccurate operation or deviations. Summary of the Invention

[0004] The main objective of this invention is to propose a ZR axis module and a rotary head mechanism, which aims to achieve dynamic balance of the ZR axis module, thereby ensuring operational stability and motion accuracy when the movement direction of the end effector is in the same direction as the centrifugal force.

[0005] To achieve the above objectives, the present invention proposes a ZR shaft module for a rotary head mechanism, comprising: The mounting base is eccentrically fixed to the disc body of the rotary head mechanism; A first drive structure, movably mounted on the mounting base and extending radially along the disc body, is used to drive the end effector of the rotary head mechanism to rotate. A second drive structure is disposed on the mounting base, the second drive structure is parallel to and drively connected to the first drive structure, and the second drive structure can drive the first drive structure to drive the end effector to reciprocate radially along the disk body; and A dynamic balancing structure is provided on the mounting base and is drivingly connected to the first drive structure and the second drive structure, which is used to make the centrifugal forces generated by the first drive structure and the second drive structure cancel each other out when the disk body rotates.

[0006] In one embodiment, the first driving structure and the second driving structure are located on opposite sides of the dynamic balancing structure.

[0007] In one embodiment, the dynamic balancing structure includes a balancing member, a first transmission member, and a second transmission member. The middle part of the balancing member is movably disposed on the mounting base. The first transmission member and the second transmission member are disposed on opposite sides of the balancing member. The first transmission member drives the balancing member to the first driving structure, and the second transmission member drives the balancing member to the second driving structure. When the disc body rotates, the centrifugal forces generated by the first driving structure and the second driving structure are transmitted to the opposite sides of the balance member through the first transmission member and the second transmission member, respectively, and cancel each other out.

[0008] In a first embodiment, the balancing member includes two idler wheels arranged radially spaced along the disc body and a transmission belt sleeved on the two idler wheels. The transmission belt has a first side and a second side located on opposite sides of the two idler wheels. The first transmission member is configured as a first fixing block fixed to the first side and connected to the first driving structure. The second transmission member is configured as a second fixing block fixed to the second side and connected to the second driving structure.

[0009] In the second embodiment, the balancing component includes a first positioning shaft and a lever. The middle part of the lever is rotatably connected to the first positioning shaft, and the opposite sides of the lever are respectively connected to the first transmission component and the second transmission component. The lever has a first elongated hole and a second elongated hole at its opposite ends. The first transmission component includes a first connecting block and a first convex shaft. The first connecting block is connected to the first driving structure. One end of the first convex shaft is located on the first connecting block, and the other end of the first convex shaft is slidably located in the first elongated hole. The second transmission component includes a second connecting block and a second convex shaft. The second connecting block is connected to the second driving structure. One end of the second convex shaft is located on the second connecting block, and the other end of the second convex shaft is slidably located in the second elongated hole.

[0010] In the third embodiment, the balancing component includes a second positioning shaft and a gear, the gear being rotatably mounted on the second positioning shaft; the first transmission component is configured as a first rack meshing with the gear, and the second transmission component is configured as a second rack meshing with the gear.

[0011] In one embodiment, the first driving structure includes a movable seat and a first power member, the movable seat being slidably disposed on the mounting base and connected to the first transmission member, and the first power member being disposed on the movable seat; and / or The second driving structure includes a second power component and a slider. The stator of the second power component is fixed to the mounting base, and the mover of the second power component is connected to the slider. The slider is slidably disposed on the mounting base and connected to the second transmission component.

[0012] In any of the above embodiments, the first driving structure and / or the second driving structure are provided with a counterweight.

[0013] The present invention also proposes a rotary head mechanism, including the disk body, the end effector, and a ZR axis module as described in any of the above embodiments, wherein the ZR axis module is eccentrically disposed on the disk body and drivenly connected to the end effector.

[0014] In the technical solution of this invention, the ZR axis module is used for a rotary head assembly mechanism. The ZR axis module includes a mounting base, a first drive structure, a second drive structure, and a dynamic balancing structure. The mounting base is eccentrically fixed to the disk body of the rotary head assembly mechanism. The first drive structure is movably mounted on the mounting base and extends radially along the disk body, driving the end effector of the rotary head assembly mechanism to rotate. The second drive structure is mounted on the mounting base, parallel to and connected to the first drive structure, and can drive the first drive structure to reciprocate the end effector radially along the disk body. The dynamic balancing structure is mounted on the mounting base and drives the first drive structure and the second drive structure, ensuring that the centrifugal forces generated by the first and second drive structures cancel each other out when the disk body rotates. Compared to existing ZR shaft modules that require the end effector to be positioned axially along the disk body and driven perpendicular to the centrifugal force direction to avoid its influence, the present invention employs a dynamic balancing structure connecting the first and second drive structures. This ensures power transmission between the two structures. Simultaneously, when the disk body rotates, the dynamic balancing structure receives and cancels out the centrifugal forces generated by the first and second drive structures, thus achieving the dynamic balancing function of the ZR shaft module. Consequently, the first and second drive structures, positioned radially along the disk body, overcome the influence of centrifugal force, preventing any impact on the end effector's motion accuracy and stability. This ensures operational stability and motion accuracy even when the end effector's movement direction coincides with the centrifugal force. Attached Figure Description

[0015] To more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on the structures shown in these drawings without creative effort.

[0016] Figure 1 A schematic diagram of a structure of an embodiment of the rotary head-binding mechanism provided by the present invention; Figure 2 This is a schematic diagram of the structure of the first embodiment of the ZR axis module provided by the present invention; Figure 3 This is a schematic diagram of the structure of a second embodiment of the ZR axis module provided by the present invention; Figure 4 This is a structural schematic diagram of the third embodiment of the ZR axis module provided by the present invention.

[0017] Explanation of icon numbers: 100. The disk itself; 200. ZR axis module; 210. Mounting base; 211. Reader head mounting base; 220. First drive structure; 221. Moving base; 222. First power component; 223. First guide rail; 230. Second drive structure; 231. Second power component; 232. Slider; 233. Second guide rail; 240. Dynamic balancing structure; 2411. Idler wheel; 2412. Transmission belt; 2413. First fixing block; 2414. Second fixing block; 2421. First positioning shaft; 2422. Lever; 2422a. First elongated hole; 2422b. Second elongated hole; 2423. First convex shaft; 2424. Second convex shaft; 2425. First connecting block; 2426. Second connecting block; 2431. Second positioning shaft; 2432. Gear; 2433. First rack; 2434. Second rack; 250. Counterweight; 300. End effector.

[0018] The realization of the objective, functional features and advantages of the present invention will be further explained in conjunction with the embodiments and with reference to the accompanying drawings. Detailed Implementation

[0019] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the scope of protection of the present invention.

[0020] It should be noted that if the embodiments of the present invention involve directional indicators (such as up, down, left, right, front, back, etc.), the directional indicators are only used to explain the relative positional relationship and movement of the components in a specific posture. If the specific posture changes, the directional indicators will also change accordingly.

[0021] Furthermore, if the embodiments of this invention involve descriptions such as "first" or "second," these descriptions are for descriptive purposes only and should not be construed as indicating or implying their relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined with "first" or "second" may explicitly or implicitly include at least one of those features. Additionally, the use of "and / or" or "and / or" throughout the text includes three parallel solutions. For example, "A and / or B" includes solution A, solution B, or a solution where both A and B are satisfied simultaneously. Furthermore, the technical solutions of the various embodiments can be combined with each other, but this must be based on the ability of those skilled in the art to implement them. When the combination of technical solutions is contradictory or impossible to implement, it should be considered that such a combination of technical solutions does not exist and is not within the scope of protection claimed by this invention.

[0022] Rotary assembly mechanisms are common actuators in semiconductor packaging equipment. They drive end effectors to perform various operations by rotating the disk body. The ZR axis module is a crucial working component of the rotary assembly mechanism, used to achieve translation and rotation of the end effector. In actual operation, the rotation of the disk body generates centrifugal force, which significantly affects the ZR axis module and end effector. Excessive centrifugal force can easily impair the operation of the end effector.

[0023] Since the direction of centrifugal force is parallel to the radial direction of the disk body, existing ZR axis modules are typically positioned along the axial direction of the disk body to drive the end effector to move along the axial direction of the disk body. This ensures that the direction of movement of the end effector is 90 degrees to the direction of the centrifugal force, thereby avoiding the influence of centrifugal force on the movement of the end effector. However, when the ZR axis module is positioned radially along the disk body and the direction of movement of the end effector is the same as the centrifugal force, the centrifugal force can still significantly affect the motion accuracy and stability of the end effector, leading to inaccurate operation or deviations.

[0024] This invention proposes a ZR axis module to achieve dynamic balance kinetic energy of the ZR axis module, thereby ensuring operational stability and motion accuracy when the movement direction of the end effector is the same as the centrifugal force.

[0025] Please see Figures 1 to 4In one embodiment, the ZR axis module 200 includes a mounting base 210, a first drive structure 220, a second drive structure 230, and a dynamic balancing structure 240. The mounting base 210 is eccentrically fixed to the disc body 100 of the turntable-type head mechanism. The first drive structure 220 is movably disposed on the mounting base 210 and extends radially along the disc body 100, and is used to drive the end effector 300 of the turntable-type head mechanism to rotate. The second drive structure 230 is disposed on the mounting base 210, and is parallel to and drivenly connected to the first drive structure 220. The second drive structure 230 can drive the first drive structure 220 to drive the end effector 300 to reciprocate radially along the disc body 100. The dynamic balancing structure 240 is disposed on the mounting base 210 and is drively connected to the first drive structure 220 and the second drive structure 230, and is used to cancel out the centrifugal forces generated by the first drive structure 220 and the second drive structure 230 when the disc body 100 rotates.

[0026] ZR axis modules 200 are used in rotary head-binding mechanisms. At least two sets of ZR axis modules 200 can be evenly spaced along the circumference of the rotary head-binding mechanism's disc body 100. Each set drives and connects to an end effector 300 in the rotary head-binding mechanism. Each set of ZR axis modules 200 can operate independently to drive the corresponding end effector 300 to rotate and translate. Of course, in practical applications, only one set of ZR axis modules 200 can be provided on the disc body 100, and the end effector 300 can be a suction nozzle or gripper, etc. The ZR axis modules 200 are arranged radially along the disc body 100, and the end of the ZR axis module 200 facing away from the rotation axis of the disc body 100 is driven and connected to the end effector 300, so that the end effector 300 can protrude from the outer periphery of the disc body 100 for easy operation.

[0027] Mounting base 210 serves as the mounting foundation for ZR axis module 200. Mounting base 210 can be fixedly connected to disk body 100 by means of screws or welding. The first drive structure 220 and the second drive structure 230 are both arranged radially along disk body 100, and the end of the first drive structure 220 facing away from the rotation axis of disk body 100 is drivenly connected to end effector 300, so that the centrifugal force directions of the first drive structure 220 and the second drive structure 230 are consistent and parallel to the radial direction of disk body 100.

[0028] The dynamic balancing structure 240 is a key structure for achieving the dynamic balancing function of the ZR axis module 200. It connects the first drive structure 220 and the second drive structure 230, transmitting the driving force of the second drive structure 230 to the first drive structure 220, enabling the second drive structure 230 to drive the first drive structure 220 to move radially along the disk body 100. Simultaneously, during the rotation of the disk body 100, the centrifugal forces generated by the first drive structure 220 and the second drive structure 230 both act on the dynamic balancing structure 240. The dynamic balancing structure 240 utilizes the principle of balance to cancel out these two centrifugal forces, thus ensuring the dynamic balance performance of the ZR axis module 200 during rotation. Therefore, even if the movement direction of the end effector 300 is the same as the centrifugal force, operational stability and motion accuracy are guaranteed, effectively avoiding inaccurate operation or deviations caused by centrifugal force.

[0029] In the technical solution of this invention, the ZR axis module 200 is used for a rotary head-binding mechanism. The ZR axis module 200 includes a mounting base 210, a first drive structure 220, a second drive structure 230, and a dynamic balancing structure 240. The mounting base 210 is eccentrically fixed to the disc body 100 of the rotary head-binding mechanism. The first drive structure 220 is movably mounted on the mounting base 210 and extends radially along the disc body 100, used to drive the end effector 300 of the rotary head-binding mechanism to rotate. The second drive structure 230... The first drive structure 220 is located on the mounting base 210 and is driven to move the second drive structure 230 and the first drive structure 220 together. The second drive structure 230 can drive the first drive structure 220 to drive the end effector 300 to move reciprocally along the radial direction of the disk body 100. The dynamic balancing structure 240 is located on the mounting base 210 and is driven to connect the first drive structure 220 and the second drive structure 230. It is used to make the centrifugal forces generated by the first drive structure 220 and the second drive structure 230 cancel each other out when the disk body 100 rotates. Compared to existing ZR axis modules 200 that require the end effector 300 to be driven perpendicular to the centrifugal force direction along the axial direction of the disk body 100 to avoid the influence of centrifugal force, the technical solution of this invention provides a dynamic balancing structure 240 that connects the first drive structure 220 and the second drive structure 230. This ensures power transmission between the first drive structure 220 and the second drive structure 230. Simultaneously, when the disk body 100 rotates, the dynamic balancing structure 240 can receive the centrifugal force generated by the first drive structure 220 and the second drive structure 230 and cancel them out, thus achieving the dynamic balancing function of the ZR axis module 200. In this way, the first drive structure 220 and the second drive structure 230, arranged radially along the disk body 100, can overcome the influence of centrifugal force, avoiding any impact on the motion accuracy and stability of the end effector 300. This ensures operational stability and motion accuracy even when the movement direction of the end effector 300 is in the same direction as the centrifugal force.

[0030] Please see Figures 2 to 4 In one embodiment, the first driving structure 220 and the second driving structure 230 are located on opposite sides of the dynamic balancing structure 240.

[0031] The first drive structure 220 and the second drive structure 230 are respectively connected to the opposite sides of the dynamic balancing structure 240, so that the centrifugal forces generated by the first drive structure 220 and the second drive structure 230 act on the opposite sides of the dynamic balancing structure 240, and the dynamic balancing structure 240 can more effectively balance these two centrifugal forces. Preferably, the first drive structure 220 and the second drive structure 230 are symmetrically arranged with respect to the dynamic balancing structure 240, so that the dynamic balancing structure 240 can receive the centrifugal forces generated by the first drive structure 220 and the second drive structure 230 more evenly, thereby more effectively canceling out the centrifugal forces, which is beneficial to improving the dynamic balancing effect and stability of the ZR shaft module 200. Specifically, during the rotation of the disk body 100, the centrifugal force generated by the first drive structure 220 acts on one side of the dynamic balance structure 240, and the centrifugal force generated by the second drive structure 230 acts on the other side of the dynamic balance structure 240. According to the principle of balance, the dynamic balance structure 240 makes the two centrifugal forces that are equal or approximately equal in magnitude and opposite in direction cancel each other out, thereby ensuring the dynamic balance performance of the ZR axis module 200 during rotation. Even when the disk body 100 rotates at high speed or the centrifugal force is large, the end effector 300 with the same direction of movement as the centrifugal force can be guaranteed to move accurately along the predetermined trajectory, avoiding problems of inaccurate operation or deviation.

[0032] Please see Figures 2 to 4 In one embodiment, the dynamic balancing structure 240 includes a balancing member, a first transmission member, and a second transmission member. The middle part of the balancing member is movably disposed on the mounting base 210. The first transmission member and the second transmission member are disposed on opposite sides of the balancing member. The first transmission member drives the balancing member to the first drive structure 220, and the second transmission member drives the balancing member to the second drive structure 230. When the disk body 100 rotates, the centrifugal forces generated by the first drive structure 220 and the second drive structure 230 are transmitted to opposite sides of the balancing member via the first transmission member and the second transmission member, respectively, and cancel each other out.

[0033] The second transmission component receives the driving force from the second drive structure 230, causing the balance component to move around its center. The balance component transmits the driving force to the first drive structure 220 via the first transmission component, thereby enabling the second drive structure 230 to drive the first drive structure 220 to move the end effector 300 radially along the disk body 100. During the rotation of the disk body 100, the centrifugal forces generated by the first drive structure 220 and the second drive structure 230 are transmitted to the opposite sides of the balance component via the first and second transmission components, respectively. This causes the balance component to be subjected to two forces of opposite directions and equal or approximately equal magnitudes, thus canceling out the two centrifugal forces and achieving dynamic balance of the ZR axis module 200. In this way, the dynamic balancing structure 240 not only ensures the effective transmission of driving force and achieves dynamic balancing, but also cancels out centrifugal force while transmitting driving force, fully meeting the working requirements of the ZR axis module 200.

[0034] Please see Figure 2 In the first embodiment, the balancing member includes two idler wheels 2411 arranged radially spaced along the disc body 100 and a transmission belt 2412 sleeved on the two idler wheels 2411. The transmission belt 2412 has a first side and a second side located on opposite sides of the two idler wheels 2411. The first transmission member is configured as a first fixing block 2413 fixed to the first side and connected to the first drive structure 220. The second transmission member is configured as a second fixing block 2414 fixed to the second side and connected to the second drive structure 230.

[0035] Two idler wheels 2411 are rotatably mounted on the mounting base 210 and located between the first drive structure 220 and the second drive structure 230. The two idler wheels 2411 form the middle part of the overall balancing component. The transmission belt 2412 is the main balancing structure of the balancing component. The transmission belt 2412 can rotate around the idler wheels 2411 to allow the first and second sides to move radially along the disk body 100. The second fixed block 2414 can receive the driving force from the second drive structure 230 to move radially along the disk body 100 and drive the transmission belt 2412 to rotate around the two idler wheels 2411. The transmission belt 2412 then drives the first fixed block 2413 to move radially along the disk body 100, so that the driving force is transmitted to the first drive structure 220 through the first fixed block 2413, thereby enabling the second drive structure 230 to drive the first drive structure 220 to drive the end effector 300 to move radially along the disk body 100.

[0036] During the rotation of the disc body 100, the centrifugal force generated by the first drive structure 220 is transmitted to the first side of the transmission belt 2412 through the first fixed block 2413, and the centrifugal force generated by the second drive structure 230 is transmitted to the second side of the transmission belt 2412 through the second fixed block 2414. The forces acting on the first and second sides of the transmission belt 2412 are opposite in direction and equal or approximately equal in magnitude. These two forces are transmitted through the transmission belt 2412 and mutually balanced and cancel each other out, that is, the two centrifugal forces are mutually balanced and canceled out.

[0037] In this way, the balancing component can utilize the transmission characteristics of the transmission belt 2412 to convert the centrifugal force generated by the first drive structure 220 and the second drive structure 230 into the interaction force between the first and second sides of the transmission belt 2412. Through the support of the idler wheel 2411 and the cyclic rotation of the transmission belt 2412, the centrifugal force is automatically canceled out, thereby ensuring the dynamic balance performance of the ZR shaft module 200 during rotation and improving the working reliability and stability of the entire turntable type head mechanism.

[0038] Please see Figure 3 In the second embodiment, the balancing component includes a first positioning shaft 2421 and a lever 2422. The middle part of the lever 2422 is rotatably connected to the first positioning shaft 2421, and the opposite sides of the lever 2422 are respectively connected to the first transmission component and the second transmission component. The opposite ends of the lever 2422 are respectively provided with a first elongated hole 2422a and a second elongated hole 2422b. The first transmission component includes a first connecting block 2425 and a first convex shaft 2423. The first connecting block 2425 is connected to the first driving structure 220. One end of the first convex shaft 2423 is disposed on the first connecting block 2425, and the other end of the first convex shaft 2423 is slidably disposed in the first elongated hole 2422a. The second transmission component includes a second connecting block 2426 and a second convex shaft 2424. The second connecting block 2426 is connected to the second driving structure 230. One end of the second convex shaft 2424 is disposed on the second connecting block 2426, and the other end of the second convex shaft 2424 is slidably disposed in the second elongated hole 2422b.

[0039] The first positioning shaft 2421 is fixed to the mounting base 210, and the middle part of the lever 2422 is rotatably sleeved on the outer periphery of the first positioning shaft 2421. The lever 2422 rotates around the first positioning shaft 2421 as a fulcrum, and the two opposite sides of the fulcrum of the lever 2422 are respectively located close to the first drive structure 220 and the second drive structure 230. During the rotation of the disk body 100, the centrifugal force generated by the first drive structure 220 is transmitted to one side of the lever 2422 through the first transmission component, and the centrifugal force generated by the second drive structure 230 is transmitted to the other side of the lever 2422 through the second transmission component. These two forces, which are opposite in direction and equal or approximately equal in magnitude, form a torque balance on the lever 2422, thereby achieving mutual cancellation of the two centrifugal forces. In this way, the balancing component utilizes the principle of the lever 2422 to effectively achieve the balance of the two centrifugal forces, ensuring the dynamic balance performance of the ZR axis module 200 during rotation.

[0040] The second connecting block 2426 can receive the driving force of the second driving structure 230 to move radially along the disk body 100, and drive the second convex shaft 2424 to move radially along the disk body 100. The second convex shaft 2424 pushes against the wall of the second elongated hole 2422b and moves along the second elongated hole 2422b, causing the lever 2422 to swing around the first positioning shaft 2421. The lever 2422 then pushes the first convex shaft 2423 through the wall of the first elongated hole 2422a, causing the first convex shaft 2423 to move along the first elongated hole 2422a, and then drives the first driving structure 220 to move radially along the disk body 100 through the first connecting block 2425.

[0041] During the rotation of the disc body 100, the centrifugal force generated by the first drive structure 220 is transmitted to one side of the lever 2422 through the first connecting block 2425 and the first convex shaft 2423, and the centrifugal force generated by the second drive structure 230 is transmitted to the other side of the lever 2422 through the second connecting block 2426 and the second convex shaft 2424. This causes the hole walls on the same side of the first elongated hole 2422a and the second elongated hole 2422b to be subjected to forces that are opposite in direction and equal or approximately equal in magnitude from the first convex shaft 2423 and the second convex shaft 2424, respectively. The two forces form a torque balance on the lever 2422, thereby achieving mutual balance and cancellation of the two centrifugal forces.

[0042] In this way, by utilizing the sliding fit between the first elongated hole 2422a and the first convex shaft 2423, and the second elongated hole 2422b and the second convex shaft 2424, a certain amount of room for the swing of the lever 2422 can be provided, making the entire dynamic balancing structure 240 more flexible and reliable to adapt to changes in centrifugal force under different working conditions, and further enhancing the adaptability and flexibility of the ZR shaft module 200.

[0043] Please see Figure 4In the third embodiment, the balancing component includes a second positioning shaft 2431 and a gear 2432, with the gear 2432 rotatably mounted on the second positioning shaft 2431; the first transmission component is configured as a first rack 2433 meshing with the gear 2432, and the second transmission component is configured as a second rack 2434 meshing with the gear 2432.

[0044] The back of the first rack 2433 is fixedly connected to the first drive structure 220, and the back of the second rack 2434 is fixedly connected to the second drive structure 230. Both the first rack 2433 and the second rack 2434 extend radially along the disk body 100. The second positioning shaft 2431 is fixed to the mounting base 210 and located between the first drive structure 220 and the second drive structure 230. The middle part of the gear 2432 is rotatably sleeved on the outer periphery of the second positioning shaft 2431, and the gear 2432 and the second positioning shaft 2431 are coaxially arranged. The second rack 2434 can receive the driving force of the second drive structure 230 to move radially along the disk body 100, and drive the meshing gear 2432 to rotate around the second positioning shaft 2431; the gear 2432 then drives the meshing first rack 2433 to move radially along the disk body 100, so as to transmit the driving force to the first drive structure 220 through the first rack 2433, thereby realizing that the second drive structure 230 drives the first drive structure 220 to drive the end effector 300 to move radially along the disk body 100.

[0045] During the rotation of the disk body 100, the centrifugal force generated by the first drive structure 220 is transmitted to one side of the gear 2432 through the first rack 2433, and the centrifugal force generated by the second drive structure 230 is transmitted to the other side of the gear 2432 through the second rack 2434. This results in the opposite sides of the gear 2432 being subjected to two forces that are opposite in direction and equal or approximately equal in magnitude under the combined action of the first rack 2433 and the second rack 2434. These two forces form a torque balance on the gear 2432, thereby achieving mutual cancellation of the two centrifugal forces.

[0046] Thus, through the meshing transmission of gear 2432 with first rack 2433 and second rack 2434, the centrifugal force generated by first drive structure 220 and second drive structure 230 can be converted into a balancing force on both sides of gear 2432 while realizing the transmission of driving force, thus ensuring the dynamic balance performance of ZR shaft module 200 during rotation.

[0047] Please see Figures 2 to 4In one embodiment, the first driving structure 220 includes a movable seat 221 and a first power member 222. The movable seat 221 is slidably disposed on the mounting base 210 and connected to the first transmission member, and the first power member 222 is disposed on the movable seat 221; and / or, the second driving structure 230 includes a second power member 231 and a slider 232. The stator of the second power member 231 is fixed to the mounting base 210, and the mover of the second power member 231 is connected to the slider 232. The slider 232 is slidably disposed on the mounting base 210 and connected to the second transmission member.

[0048] The movable base 221 is slidably connected to the mounting base 210 via the first guide rail 223. The first power component 222 is configured as a rotary motor. The stator of the first power component 222 is fixed to the movable base 221. The rotor of the first power component 222 is located at one end of its stator away from the rotation axis of the disk body 100 and is fixedly connected to the end actuator 300 to drive the end actuator 300 to rotate.

[0049] The slider 232 is slidably connected to the mounting base 210 via the second guide rail 233. The first guide rail 223 and the second guide rail 233 extend in parallel directions and both extend radially along the disk body 100. The second power component 231 is configured as a linear motor or a voice coil motor. The stator of the second power component 231 is fixed to the mounting base 210, and the mover of the second power component 231 is located at the end of its stator away from the disk body 100 and is fixedly connected to the slider 232 to drive the slider 232 to drive the second transmission component to move radially along the disk body 100. The second transmission component drives the first transmission component to move radially along the disk body 100 through the balancing component. The first transmission component drives the moving base 221 to move radially along the disk body 100, thereby realizing the radial movement of the first drive structure 220 and the end effector 300 along the disk body 100.

[0050] Among them, the first guide rail 223 and the second guide rail 233 are provided in two sets at parallel intervals to provide stable support and guidance for the sliding of the moving seat 221 and the slider 232, thereby ensuring the stability and reliability of the overall ZR axis module 200.

[0051] Furthermore, a reading head mounting seat 211 is provided on the side of the mounting base 210. The reading head mounting seat 211 is located on the side of the movable base 221 away from the second power member 231. The reading head mounting seat 211 is equipped with a reading head. A grating ruler is attached to the side of the movable base 221 close to the reading head mounting seat 211. The reading head can read the displacement data on the grating ruler, thereby realizing closed-loop control when the end effector 300 moves linearly.

[0052] Please see Figures 2 to 4 In one embodiment, the first drive structure 220 and / or the second drive structure 230 are provided with a counterweight 250.

[0053] The counterweight 250 is used to adjust the magnitude of the centrifugal force generated by the first drive structure 220 and / or the second drive structure 230 during rotation, to ensure that the magnitudes of the centrifugal forces generated by the first drive structure 220 and the second drive structure 230 are equal or very close, further optimizing the dynamic balance performance of the entire ZR shaft module 200. Specifically, when the centrifugal force generated by the first drive structure 220 is relatively large, a counterweight 250 of appropriate weight can be set on the second drive structure 230 to balance the centrifugal forces generated by the two. The counterweight 250 can be set on the second power component 231 or the slider 232; conversely, when the centrifugal force generated by the second drive structure 230 is large, a counterweight 250 of appropriate weight is set on the first drive structure 220. The counterweight 250 can be set on the first power component 222 or the moving seat 221; in addition, counterweights 250 of different weights can also be set on both the first drive structure 220 and the second drive structure 230. The weight and installation position of the counterweight 250 can be precisely calculated and adjusted based on centrifugal force test data under actual working conditions to ensure optimal dynamic balance under various working conditions. When installing the counterweight 250, it is crucial to ensure it is securely installed to prevent loosening or detachment during the rotation of the disc body 100, which could affect the dynamic balance and the normal operation of the entire ZR shaft module 200.

[0054] Please see Figure 1 This invention also proposes a rotary head mechanism, including a disk body 100, an end effector 300, and ZR axis modules 200 as described in the above embodiments. The ZR axis modules 200 are eccentrically disposed on the disk body 100 and drivenly connected to the end effector 300. Further, at least two sets of ZR axis modules 200 can be evenly spaced along the circumference of the disk body 100. Each ZR axis module 200 is drivenly connected to one end effector 300, and each ZR axis module 200 can operate independently. The specific structure of the ZR axis module 200 is as described in the above embodiments. Since this ZR axis module 200 adopts all the technical solutions of all the above embodiments, it possesses at least all the beneficial effects brought about by the technical solutions of the above embodiments, which will not be elaborated further here.

[0055] The above description is merely an exemplary embodiment of the present invention and does not limit the scope of protection of the present invention. Any equivalent structural transformations made based on the technical concept of the present invention and the contents of the specification and drawings of the present invention, or direct / indirect applications in other related technical fields, are included within the scope of protection of the present invention.

Claims

1. A ZR shaft module for a rotary head mechanism, characterized in that, include: The mounting base is eccentrically fixed to the disc body of the rotary head mechanism; A first drive structure, movably mounted on the mounting base and extending radially along the disc body, is used to drive the end effector of the rotary head mechanism to rotate. A second drive structure is provided on the mounting base. The second drive structure is parallel to and drively connected to the first drive structure. The second drive structure can drive the first drive structure to drive the end effector to reciprocate radially along the disk body. as well as A dynamic balancing structure is provided on the mounting base and is drivingly connected to the first drive structure and the second drive structure, which is used to make the centrifugal forces generated by the first drive structure and the second drive structure cancel each other out when the disk body rotates.

2. The ZR axis module as described in claim 1, characterized in that, The first driving structure and the second driving structure are located on opposite sides of the dynamic balancing structure.

3. The ZR axis module as described in claim 2, characterized in that, The dynamic balancing structure includes a balancing component, a first transmission component, and a second transmission component. The middle part of the balancing component is movably disposed on the mounting base. The first transmission component and the second transmission component are disposed on opposite sides of the balancing component. The first transmission component drives the balancing component to the first driving structure, and the second transmission component drives the balancing component to the second driving structure. When the disc body rotates, the centrifugal forces generated by the first driving structure and the second driving structure are transmitted to the opposite sides of the balance member through the first transmission member and the second transmission member, respectively, and cancel each other out.

4. The ZR axis module as described in claim 3, characterized in that, The balancing component includes two idler wheels spaced radially apart along the disc body and a transmission belt sleeved on the two idler wheels. The transmission belt has a first side and a second side located on opposite sides of the two idler wheels. The first transmission component is configured as a first fixing block fixed to the first side, and the first fixing block is connected to the first drive structure. The second transmission component is configured as a second fixing block fixed to the second side, and the second fixing block is connected to the second drive structure. The balancing component includes a first positioning shaft and a lever. The middle part of the lever is rotatably connected to the first positioning shaft, and the opposite sides of the lever are respectively connected to the first transmission component and the second transmission component. The lever has a first elongated hole and a second elongated hole at its opposite ends. The first transmission component includes a first connecting block and a first convex shaft. The first connecting block is connected to the first driving structure. One end of the first convex shaft is located on the first connecting block, and the other end is slidably located in the first elongated hole. The second transmission component includes a second connecting block and a second convex shaft. The second connecting block is connected to the second driving structure. One end of the second convex shaft is located on the second connecting block, and the other end is slidably located in the second elongated hole. The balancing component includes a second positioning shaft and a gear, the gear being rotatably mounted on the second positioning shaft; the first transmission component is configured as a first rack meshing with the gear, and the second transmission component is configured as a second rack meshing with the gear.

5. The ZR axis module as described in claim 3, characterized in that, The first driving structure includes a movable seat and a first power component. The movable seat is slidably disposed on the mounting base and connected to the first transmission component, and the first power component is disposed on the movable seat; and / or The second driving structure includes a second power component and a slider. The stator of the second power component is fixed to the mounting base, and the mover of the second power component is connected to the slider. The slider is slidably disposed on the mounting base and connected to the second transmission component.

6. The ZR axis module as described in any one of claims 1 to 5, characterized in that, The first drive structure and / or the second drive structure are provided with a counterweight.

7. A rotary head-binding mechanism, characterized in that, It includes the disk body, the end effector, and the ZR axis module as described in any one of claims 1 to 6, wherein the ZR axis module is eccentrically disposed on the disk body and drivenly connected to the end effector.

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