A crucible cleaning structure for a source furnace

Abstract

This invention provides a crucible cleaning structure for a source furnace, belonging to the technical field of coating equipment. Specifically, it includes a mounting base, a support platform, and a cleaning assembly. The support platform is connected to the mounting base and is used to support the crucible. The cleaning assembly is located within the mounting base and is used to clean the surface of the crucible. The cleaning assembly includes a central disk and a cleaning arm assembly. The central disk is located above the support platform and connected to the mounting base. The central disk can be connected to the crucible, allowing both to move simultaneously. The cleaning arm assembly is movably connected to the central disk and can contact the surface of the crucible. During the simultaneous upward movement of the central disk and the crucible, the cleaning arm assembly scrapes away any adhering substances on the crucible surface. This invention utilizes the axial movement of the crucible during removal as a power source to drive the cleaning arm assembly. That is, during the removal process, the cleaning arm assembly, in conjunction with the crucible, can scrape away surface adhering substances, completing the initial scraping and cleaning of the crucible, thereby shortening the overall cleaning time and improving cleaning efficiency.

Description

Technical Field

[0001] This invention belongs to the field of coating equipment technology, specifically relating to a crucible cleaning structure for a source furnace. Background Technology

[0002] In the thermal evaporation process, the source furnace (evaporation source) is one of the core pieces of equipment. The crucible inside the source furnace is used to hold the organic or inorganic materials to be evaporated. At high temperatures, the materials sublimate and deposit onto the substrate. As the coating process is repeated, residual materials gradually accumulate on the inner wall of the crucible—including unevaporated material residues, high-temperature decomposition products, etc. If these residues are not cleaned in time, they will mix into the new materials when different materials are replaced, affecting the purity of the film layer. Moreover, the condensate on the outer wall changes the thermal radiation characteristics, resulting in uneven temperature distribution in the crucible and fluctuations in the evaporation rate.

[0003] In the existing technology, cleaning the crucible requires removing it from the source furnace, separating it from the source furnace, and then moving it to the cleaning station for cleaning. This process takes a lot of time and involves many steps, resulting in low cleaning efficiency. Summary of the Invention

[0004] The purpose of this invention is to provide a crucible cleaning structure for a source furnace, which cleans the inner wall of the crucible during the removal process, thereby improving the efficiency of crucible cleaning.

[0005] To achieve the above objectives, the technical solution adopted by the present invention is a crucible cleaning structure for a source furnace, comprising a mounting base, a support platform, and a cleaning assembly. The mounting base is cylindrical and mounted on the furnace body; the support platform is connected to the mounting base and is used to support the crucible; the cleaning assembly is located inside the mounting base and is used to clean the surface of the crucible. The cleaning assembly includes a central disk and a cleaning arm assembly. The central disk is located above the support platform and connected to the mounting base. The central disk can be connected to the crucible so that both can move simultaneously. The cleaning arm assembly is movably connected to the central disk and can contact the surface of the crucible. During the simultaneous upward movement of the central disk and the crucible, the cleaning arm assembly scrapes off the adhering substances on the surface of the crucible.

[0006] Furthermore, the cleaning arm assembly includes a slide, a guide seat, and a scraper arm. There are several slides, each connected to a central disk and capable of moving around the circumference of the central disk. The guide seat is movably connected to the slides and can move along the radial direction of the central disk. The scraper arm is connected to the guide seat and can be vertically rotated. When the scraper arm is in a horizontal state, it can contact the surface of the crucible.

[0007] Furthermore, a rail groove is provided on the central plate, extending along the circumference of the central plate. The slide table is connected to the central plate through the rail groove, enabling the slide table to perform circular motion.

[0008] Furthermore, an inner edge platform is provided on the central disk, which is coaxially arranged with the central disk and can press against the crucible.

[0009] Furthermore, a pull-back groove is provided on the slide table, which extends along the radial direction of the central plate, and the slide table is connected to the guide seat through the pull-back groove.

[0010] Furthermore, a flat guide rod is connected to the guide seat, which horizontally passes through the slide table. The flat guide rod is connected to a return spring, which can move the guide seat away from the crucible.

[0011] Furthermore, the end of the flat guide rod is connected to a guide head, and the guide head is coupled with a guide groove. The guide groove is set on the inner wall of the mounting base. When the central plate moves vertically, the cleaning arm assembly moves through the coupling of the guide head and the guide groove.

[0012] Furthermore, the guide groove includes a bottom straight groove, a spiral groove, and an upper straight groove. The bottom straight groove is located at the bottom of the mounting base; the spiral groove is located above the bottom straight groove and communicates with it; the upper straight groove is located above the spiral groove and communicates with it.

[0013] Furthermore, the mounting base is provided with a toothed section that can couple with the scraper arm, allowing the scraper arm to flip when the crucible moves upward.

[0014] Furthermore, the scraper arm includes a straight arm body, a gear, and a contour scraper. The gear is engaged at one end of the straight arm body; the contour scraper is engaged on the long side of the straight arm body. When the straight arm body is in a horizontal state, the edge of the contour scraper is in contact with the surface of the crucible.

[0015] Compared with the prior art, the beneficial effect of the present invention is that it uses the axial movement of the crucible during removal as a power source to drive the cleaning arm assembly to work. That is, during the removal process, the cleaning arm assembly cooperates with the crucible to scrape off the surface deposits, completing the initial scraping and cleaning of the crucible, thereby shortening the overall cleaning time and improving the cleaning efficiency. Attached Figure Description

[0016] Figure 1 This is a schematic diagram of the overall structure of the present invention; Figure 2 This is a schematic diagram of the front cross-sectional structure of the present invention; Figure 3 This is a schematic diagram of the mounting base structure of the present invention; Figure 4 This is a schematic diagram of the inner cover structure of the present invention; Figure 5 This is a schematic diagram of the cleaning component structure of the present invention; Figure 6 This is a schematic diagram of the central disk structure of the present invention; Figure 7 This is a schematic diagram of the inner edge platform structure of the present invention; Figure 8 This is a schematic diagram of the connection between the slide and the guide seat of the present invention; Figure 9 This is a schematic diagram of the scraper arm structure of the present invention; Figure 10 This is a schematic diagram of the guide groove structure of the present invention; Among them, 1-furnace body, 2-mounting base, 3-flange, 4-bottom support ring, 5-hanging rail, 6-radial protrusion, 7-supporting platform, 8-inner cover, 9-tightening plate, 10-cover, 11-center plate, 12-inner edge platform, 13-rail groove, 14-cleaning arm assembly, 15-slide table, 16-pull-back groove, 17-guide seat, 18-flat guide rod, 19-return spring, 20-guide head, 21-support arm, 22-slot, 23-slide groove, 24-slot column, 25-straight arm body, 26-gear, 27-contour scraper, 28-bottom straight groove, 29-spiral groove, 30-upper straight groove, 31-convex tooth section, 32-longitudinal rotating shaft, 33-transverse stop bar, 34-guide strip, 35-lifting part, 36-tray, 37-positioning platform, 38-buffer interval. Detailed Implementation

[0017] To make the objectives, technical solutions, and advantages of the embodiments of the present invention clearer, the technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0018] In the description of this invention, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "linking" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this invention based on the specific circumstances.

[0019] See Figures 1 to 3 As shown, this technical solution is a crucible cleaning mechanism for a source furnace, mainly used for cleaning crucibles. Specifically, it includes a furnace body 1 with an upper opening, and a heating chamber inside the furnace body 1. The crucible can be placed in the heating chamber and heated by the heating unit inside the furnace body 1.

[0020] An installation base 2 is also provided inside the furnace body 1. The installation base 2 is inserted from the top of the furnace body 1. The installation base 2 is a cylindrical stainless steel component. A flange 3 is fixed at the top of the installation base 2, which can connect the installation base 2 to the furnace body 1. At this time, the installation base 2 is located inside the furnace body 1.

[0021] Both ends of the mounting base 2 are open, that is, the upper end of the mounting base 2 has a top opening and the lower end of the mounting base 2 has a bottom opening. A bottom support ring 4 is provided below the mounting base 2. The bottom support ring 4 is connected to the mounting base 2 through two hanging rails 5. The two hanging rails 5 are symmetrically arranged. The bottom support ring 4 is connected to a support platform 7 through a radial protrusion 6. The crucible can be placed in from the top opening of the mounting base 2 and finally placed on the support platform 7. At this time, the heating unit in the furnace body 1 is located around the crucible and can work through the heating unit to put the crucible in a heating environment.

[0022] It should be noted that the support platform 7 is annular, and the outer diameter of the support platform 7 is smaller than the inner diameter of the bottom support ring 4, so that a gap is formed between the support platform 7 and the bottom support ring 4. This reduces the obstruction of the crucible and facilitates the heating of the crucible.

[0023] See Figures 1 to 4 As shown, after the crucible is placed in, the inner cover 8 can be inserted into the mounting base 2. The inner cover 8 is also a stainless steel component and is cylindrical. A clamping plate 9 is provided at the upper end of the inner cover 8. The clamping plate 9 can be connected to the flange 3 by bolts. At this time, the lower end of the inner cover 8 presses on the crucible. When it is necessary to remove the crucible, the inner cover 8 must be removed first, and then the crucible can be removed from the mounting base 2. A cover 10 can be bolted to the upper end of the inner cover 8.

[0024] After the inner cover 8 is installed, a buffer interval 38 is provided between the inner cover 8 and the mounting base 2. A cleaning component is provided within the buffer interval 38. When the inner cover 8 is not separated from the mounting base 2, the cleaning component is isolated from the crucible by the inner cover 8. After the inner cover 8 is removed, as the crucible is pulled upward, the execution part of the cleaning component can come into contact with the crucible and clean the crucible.

[0025] In this example, after the inner cover 8 is connected to the mounting base 2, the inner cover 8 will also lock the cleaning component in place, for example, the lower end of the inner cover 8 presses against the cleaning component.

[0026] See Figures 2 to 8As shown, the cleaning assembly includes an annular central disk 11, the outer diameter of which is equal to the inner diameter of the mounting base 2. An inner edge platform 12 is provided at the inner edge of the central disk 11. When the cleaning assembly is placed inside the mounting base 2, the inner edge platform 12 presses against the edge of the crucible. After the inner cover 8 is connected to the mounting base 2, the lower end of the inner cover 8 presses against the crucible, and at the same time, the pressure plate presses against the inner edge platform 12.

[0027] A circular track groove 13 is provided on the central disk 11, and a cleaning arm assembly 14 is connected through the track groove 13. When the cleaning arm assembly 14 is subjected to force, it can move along the circumference of the track groove 13. When the cleaning arm assembly 14 makes a circular motion, it can scrape off the adhering substances on the crucible wall.

[0028] The cleaning arm assembly 14 includes a slide 15 with a slider at the bottom. The slider fits into the rail groove 13 and cannot be pulled out of the rail groove 13. The slide 15 is provided with a pull-back groove 16, which extends radially along the central disk 11. The slide 15 is connected to a guide seat 17 through the pull-back groove 16. The guide seat 17 is hinged to a scraper arm. When the guide seat 17 moves away from the center of the central disk 11, it drives the scraper arm to move, so that the edge of the scraper arm contacts the crucible wall.

[0029] In this example, the guide seat 17 is provided with a limiting protrusion, and the inner side surface of the pull-back groove 16 is provided with a limiting groove. The limiting groove extends along the length of the pull-back groove 16, and the limiting protrusion is located in the limiting groove. At this time, the guide seat 17 can slide in the pull-back groove 16, but cannot be pulled out of the pull-back groove 16. A horizontal through hole is provided at one end of the slide table 15 away from the center of the central disk 11. The horizontal through hole communicates with the pull-back groove 16. A flat guide rod 18 passes through the horizontal through hole. The inner end of the flat guide rod 18 is connected to the guide seat 17. A return spring 19 is sleeved on the flat guide rod 18. The return spring 19 is used to move the guide seat 17 away from the crucible. A guide head 20 is fixed at the free end of the flat guide rod 18. One end of the return spring 19 is connected to the guide head 20, and the other end is connected to the slide table 15. This return spring 19 is a spring with restoring force after compression. When the center plate 11 is located at the bottom of the mounting base 2, the return spring 19 is in a compressed state. During the process of the center plate 11 moving upward a certain distance, the elastic force of the return spring 19 can be released. At this time, under the action of the restoring force of the return spring 19, the guide seat 17 moves away from the center of the center plate 11.

[0030] In this example, see Figure 9As shown, the guide seat 17 is provided with an upwardly extending support arm 21. The upper end of the support arm 21 is hinged to the scraper arm, allowing the scraper arm to rotate around the hinge point and switch between a vertical and a horizontal state. When the inner cover 8 is connected to the mounting base 2, the scraper arm tends to be in a vertical state and rests on the inner cover 8. After the inner cover 8 is pulled out from the mounting base 2, the scraper arm will flip downwards under its own weight until it is in a horizontal state. Then, the crucible is controlled to move upwards, and the crucible applies a pushing force to the central disk 11, causing the central disk 11 to move upwards. In the initial stage, under the action of the return spring 19, the guide seat 17 moves away from the center of the central disk 11, so that the working edge of the scraper arm contacts the crucible wall. Then, as the central disk 11 and the crucible continue to move upwards, when the central disk 11 approaches the upper port of the mounting base 2, the scraper arm can be flipped upwards, at which point the scraper arm no longer obstructs the crucible.

[0031] To facilitate crucible removal, the inner edge platform 12 in this technical solution is detachably connected to the central disk 11. For example, an inner edge groove is provided on the central disk 11. The inner edge groove is annular and extends from the inner side of the central disk 11 to the outer side. A retaining groove 22 is provided on the upper end face of the central disk 11, communicating with the inner edge groove. A sliding groove 23 is provided on the curved wall of the inner edge groove, communicating with the retaining groove 22. The sliding groove 23 extends along the circumference of the central disk 11, starting from the retaining groove 22. The inner edge platform 12 is also annular. The inner edge platform 12 has a locking pin 24 fixed on its outer circumferential surface. When the inner edge platform 12 is aligned with the center plate 11, the locking pin 24 is aligned with the locking groove 22. Then, the inner edge platform 12 is pressed down. When the locking pin 24 is at the bottom of the locking groove 22, the inner edge platform 12 is rotated so that the locking pin 24 enters the sliding groove 23. At this time, the inner edge platform 12 can cover the crucible. When the crucible and the center plate 11 are close to the upper port of the mounting base 2 and the scraper arm is flipped to a vertical position, the inner edge platform 12 can be removed and the crucible can be taken out.

[0032] See Figure 5 , Figure 8 and Figure 9 As shown, in this technical solution, the scraper arm includes a straight arm body 25, a gear 26, and a contour scraper 27. The gear 26 is connected to one end of the straight arm body 25, and the contour scraper 27 is connected to the long side of the straight arm body 25. When the straight arm body 25 is in a horizontal state, the contour scraper 27 is located below the straight arm body 25. At this time, the edge of the contour scraper 27 can contact the bottom surface and side wall of the crucible. Thus, when the scraper arm moves relative to the crucible, the adhering material on the crucible can be scraped off through the edge of the contour scraper 27. When the scraper arm is connected to the support arm 21, a notch is provided at the upper end of the support arm 21, and the gear 26 is located in the notch. The upper end of the support arm 21 and the gear 26 are simultaneously passed through by a short shaft. At this time, the support arm 21 and the gear 26 are in a coaxial state.

[0033] In order to enable the crucible and the center disk 11 to move, a guide groove is provided on the inner wall of the mounting base 2, and the guide head 20 is located in the guide groove. When the crucible and the center disk 11 move upward, the guide head 20 can move in the guide groove until the center disk 11 and the crucible move to the upper end of the mounting base 2. See Figure 5 , Figure 8 and Figure 10 As shown, in this example, the guide groove includes a bottom straight groove 28, a spiral groove 29, and an upper straight groove 30. The bottom straight groove 28 is located at the bottom of the mounting base 2, and the spiral groove 29 is located above the bottom straight groove 28. The lower end of the spiral groove 29 connects with the upper end of the bottom straight groove 28, and the connection point has an arc transition. Both the bottom straight groove 28 and the upper straight groove 30 extend along the axial direction of the mounting base 2. The lower end of the upper straight groove 30 connects with the upper end of the spiral groove 29, and the connection point also has an arc transition. When the central disk 11 and the crucible are located in the mounting base... When the base 2 is at the bottom, the guide head 20 is located in the bottom straight groove 28. As the crucible and the center plate 11 move upward, the guide head 20 moves from the bottom straight groove 28 to the spiral groove 29. As the crucible and the center plate 11 continue to move upward, the guide head 20 moves along the extension direction of the spiral groove 29. At this time, the cleaning component rotates around the axis of the center plate 11. The rotation angle is proportional to the rising height. For example, it rotates 30° for every 10mm rise. During the rotation of the cleaning component, the scraper arm scrapes off the adhering substances on the surface of the crucible.

[0034] After the crucible and center plate 11 rise to a certain height, continue to move the crucible and center plate 11 upwards, so that the guide head 20 moves from the spiral groove 29 to the upper straight groove 30. Then continue to move the crucible and center plate 11, so that the guide head 20 moves in the upper straight groove 30. A toothed section 31 is provided in the upper straight groove 30. The toothed section 31 is composed of several teeth arranged along the length of the upper straight groove 30. When the guide head 20 is in the upper straight groove 30, since the gear 26 on the scraper arm is above the guide head 20, as the crucible continues to move upwards, the gear 26 meshes with the toothed section 31, which can make the scraper arm flip upwards. When the scraper arm flips to a near-vertical state, the crucible is located at the upper port of the mounting base 2, at which point the crucible can be removed.

[0035] In this example, the bottom straight groove 28 includes a shallow groove and a deep groove. The deep groove is located above the shallow groove, and the lower end of the deep groove is connected to the shallow groove. The connection is transitioned by a guide ramp. When the guide head 20 is in the shallow groove, the return spring 19 is in a compressed state. When the center plate 11 moves upward until the guide head 20 and the deep groove are at the same horizontal height, the guide head 20 enters the deep groove under the restoring force of the return spring 19. At this time, the guide seat 17 moves away from the center of the center plate 11.

[0036] In this technical solution, a limiting component is also provided. The limiting component is set on the inner wall of the mounting base 2. When the horizontal scraper arm moves downward, the limiting component is coupled with the scraper arm, which enables the scraper arm to flip from the horizontal state to the vertical state. The limiting component includes a longitudinal rotating shaft 32, a cylindrical cavity is provided on the mounting base 2, and a receiving cavity is connected to the lower end of the cylindrical cavity. The longitudinal rotating shaft 32 is located inside the cylindrical cavity. After applying a twisting force to the longitudinal rotating shaft 32, the longitudinal rotating shaft 32 can be rotated. A transverse stop bar 33 is connected to the lower end of the longitudinal rotating shaft 32. The transverse stop bar 33 is arc-shaped and is located inside the receiving cavity. An inner opening is provided on the inner wall of the mounting base 2, and the inner opening communicates with the receiving cavity. When the longitudinal rotating shaft 32 rotates, the transverse stop bar 33 can be moved out from the inner opening. If the transverse stop bar 33 is located above the center plate 11 and below the scraper arm at this time, the transverse stop bar 33 will prevent the scraper arm from moving further downward. A guide strip 34 is provided on the side of the straight arm 25 of the scraper arm. When the scraper arm is in a horizontal state and moves downward with the center plate 11, the guide strip 34 moves downward accordingly. The free end of the transverse stop bar 33 is located on the travel path of the guide strip 34. After the center plate 11 moves downward, the guide strip 34 contacts the free end of the transverse stop bar 33. At this time, the transverse stop bar 33 hinders the downward movement of the guide strip 34. As the center plate 11 continues to move downward, the scraper arm can be flipped, and finally the scraper arm is in a vertical state. Then the inner cover 8 can be inserted from the upper port of the mounting base 2.

[0037] In this technical solution, in order to enable the crucible to move to the upper end of the mounting base 2, a lifting part 35 is provided in the furnace body 1. There is a certain vertical distance between the lifting part 35 and the lower end of the mounting base 2. A high-temperature resistant tray 36 is fixed to the upper end of the lifting part 35. The tray 36 can be moved up or down by the operation of the lifting part 35. When it is necessary to remove the crucible, the lifting part 35 controls the tray 36 to move upward, and then the tray 36 supports and pushes the crucible, so that the crucible gradually moves upward. During this process, the upper surface of the crucible is cleaned by the cleaning component. During the process of placing the crucible into the furnace body 1, the lifting unit 35 controls the tray 36 to move downwards, while other tools press down on the center plate 11. To facilitate the downward movement of the center plate 11, a positioning platform 37 can be provided on the inner circumference of the center plate 11. The positioning platform 37 is in a circular state. When the crucible is placed on the positioning platform 37 and forms a surface contact with the positioning platform 37, the crucible and the center plate 11 are coaxially arranged. At this time, the edge of the crucible is located between the positioning platform 37 and the inner edge platform 12. At this time, the crucible can be directly pressed down to make the crucible move downwards.

[0038] By applying this technical solution, the crucible is cleaned during the handling process, and the adhering substances on its surface are scraped off.

[0039] This technical solution can be widely used in source furnaces in fields such as OLED evaporation equipment, solar cell production equipment, and organic semiconductor research equipment. The crucible cleaning structure using this technical solution can significantly reduce equipment maintenance time, improve crucible replacement efficiency, and reduce the risk of cross-contamination, thus having high practical value and economic benefits.

[0040] The device embodiments described above are merely illustrative. The units described as separate components may or may not be physically separate. The components shown as units may or may not be physical units; that is, they may be located in one place or distributed across multiple network units. Some or all of the modules can be selected to achieve the purpose of this embodiment according to actual needs. Those skilled in the art can understand and implement this without any creative effort.

[0041] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, and not to limit them; although the present invention has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some of the technical features; and these modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the spirit and scope of the technical solutions of the embodiments of the present invention.

Claims

1. A crucible cleaning structure for a source furnace, characterized in that, include: The mounting base (2) is cylindrical and is mounted on the furnace body (1); The support platform (7) is connected to the mounting base (2) and is used to support the crucible; A cleaning component, located within the mounting base (2), is used for surface cleaning of the crucible; The cleaning component includes: The central disk (11) is located above the support platform (7) and connected to the mounting base (2). The central disk (11) can be connected to the crucible so that both can move simultaneously. The cleaning arm assembly (14) is movably connected to the central disk (11) and can contact the surface of the crucible; As the central disk (11) and the crucible move upward simultaneously, the cleaning arm assembly (14) scrapes off the adhering substances on the surface of the crucible.

2. The crucible cleaning structure of the source furnace according to claim 1, characterized in that, The cleaning arm assembly (14) includes: The slide (15) is connected to the central disk (11) and can move around the circumference of the central disk (11); The guide seat (17) is movably connected to the slide (15) and can move along the radial direction of the central disk (11); The scraper arm is connected to the guide seat (17) and can be rotated vertically. When the scraper arm is in a horizontal state, it can contact the surface of the crucible.

3. The crucible cleaning structure of the source furnace according to claim 2, characterized in that, The central disk (11) is provided with a rail groove (13), which extends along the circumference of the central disk (11). The slide (15) is connected to the central disk (11) through the rail groove (13), so that the slide (15) can make circular motion.

4. The crucible cleaning structure of the source furnace according to claim 2, characterized in that, The central disk (11) is provided with an inner edge platform (12), which is coaxially arranged with the central disk (11) and can press on the crucible.

5. The crucible cleaning structure of the source furnace according to claim 2 or 3, characterized in that, The slide (15) is provided with a pull-back groove (16), which extends along the radial direction of the central disk (11). The slide (15) is connected to the guide seat (17) through the pull-back groove (16).

6. The crucible cleaning structure of the source furnace according to claim 5, characterized in that, A flat guide rod (18) is connected to the guide seat (17). The flat guide rod (18) passes horizontally through the slide table (15). The flat guide rod (18) is connected to a return spring (19), which can move the guide seat (17) away from the crucible.

7. The crucible cleaning structure of the source furnace according to claim 6, characterized in that, The end of the flat guide rod (18) is connected to a guide head (20), and the guide head (20) is coupled with a guide groove. The guide groove is set on the inner wall of the mounting base (2). When the central disk (11) moves vertically, the cleaning arm assembly (14) moves through the coupling of the guide head (20) and the guide groove.

8. The crucible cleaning structure of the source furnace according to claim 7, characterized in that, The guide groove includes: The bottom straight groove (28) is located at the bottom of the mounting base (2); The spiral groove (29) is located above the bottom straight groove (28) and communicates with the bottom straight groove (28); The upper straight groove (30) is located above the spiral groove (29) and is connected to the spiral groove (29).

9. The crucible cleaning structure of the source furnace according to claim 2, characterized in that, The mounting base (2) is provided with a toothed section (31), which can be coupled with the scraper arm. When the crucible moves upward, the scraper arm can be flipped.

10. The crucible cleaning structure of the source furnace according to any one of claims 2-9, characterized in that, The scraper arm includes: straight arm body (25); The gear (26) is connected to one end of the straight arm (25); The contour scraper (27) is attached to the long side of the straight arm (25); When the straight arm (25) is in a horizontal state, the edge of the contour scraper (27) contacts the surface of the crucible.

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