diaphragm valve device

Abstract

This invention relates to a diaphragm valve device, comprising: a first valve body having an upper opening and a lower opening at its upper and lower parts, respectively, and an internal channel with a head insertion groove communicating with the lower part of the channel; a second valve body having an inner groove for engaging with the lower end of the first valve body, and multiple flow paths communicating with the outside through the lower surface of the inner bottom; a diaphragm opening / closing part consisting of a diaphragm installed in the groove of the second valve body, a shaft inserted into the channel of the first valve body, and a shaft head engaged with the lower end of the shaft and tightly attached to the diaphragm; and a driving part consisting of a body and a piston assembly. The body consists of an outer cover engaged with the upper end of the first valve body, an air injection pipe engaged with the upper part of the outer cover, and a cover connected to an air intake pipe. The piston assembly is engaged with the interior of the body and is driven by air pressure for lifting and lowering. The piston assembly is linked to the lifting and lowering of the shaft to trigger the opening and closing of the diaphragm.

Description

Technical Field

[0001] This invention relates to a diaphragm valve device, and more specifically, to a diaphragm valve device that regulates fluid movement by performing opening and closing operations based on fluid pressure and the operation of a drive unit. Background Technology

[0002] In semiconductor fabrication processes, various special gases are commonly used, including those that are flammable, explosive, decompositionally explosive, corrosive, and toxic, such as phosphine, arsine, and silane. These special material gases are filled into gas cylinders under high pressure conditions ranging from tens of atmospheres to over 100 atmospheres. The gas cylinders are installed in a sealed clean room and are supplied to or discharged from the semiconductor fabrication apparatus through valves installed in the piping.

[0003] Recently, with the increasing integration of semiconductor substrates, the speed and miniaturization of semiconductor devices are making significant progress. As a result, silicon wafers, which serve as substrates, require high purity and high quality. Consequently, the various special gas fluids used in this fabrication process also require very high precision in terms of flow control accuracy.

[0004] As mentioned above, as a fluid control device installed in the semiconductor fabrication process, the valve requires high displacement accuracy in terms of valve body movement precision. In particular, as a component directly related to its distance control and physical aspects, the valve seat needs to be maintained in a high-quality state.

[0005] When normally closed (NC) diaphragm valves are used for high-pressure fluids, in order to ensure high sealing characteristics for high-pressure fluids such as corrosive fluids, the valve in the normally closed state is subjected to external forces such as springs, which continuously apply a pressing load to the valve seat through the valve body. Therefore, there is a situation where the pressing force applied to the valve body increases.

[0006] The inventor has been granted Korean Patent Application No. 10-2024-0008239, “Baffle Valve Device”.

[0007] According to the prior art, it includes a drive unit, in which a power source for shaft lifting operation is provided. The drive unit includes: a piston, which is combined with the interior of the housing; and a packing, which is combined with the outer peripheral surface of the piston and closely attached to the inner peripheral surface of the housing to provide airtightness.

[0008] Therefore, when external air is supplied, the piston moves up and down to raise and lower the shaft connected to it. Due to the difference in air delivery speed, the piston may produce slight working differences. Under such slight working differences, the raising and lowering of the shaft and the opening and closing drive of its driven partition may produce errors, thus resulting in a decrease in the accuracy of the flow path opening and closing.

[0009] Furthermore, since existing technology specifies the piston's rise threshold, the ability to control the flow rate is limited.

[0010] Existing technical documents Patent documents Korean Patent Application No. 10-2024-0008239 Summary of the Invention In order to solve the problems of the prior art, the object of the present invention is to provide a diaphragm valve device that can drive the piston constituting the drive unit and the shaft connected to the piston while lifting the drive shaft to prevent errors. As a result, not only can the accuracy be improved, but the flow rate variation can also be precisely controlled by adjusting the lifting limit position of the piston.

[0011] To achieve the aforementioned objectives, the diaphragm valve device of the present invention includes: a first valve body having an upper opening and a lower opening formed at its upper and lower parts, respectively, and an internal channel with a head insertion groove communicating with the lower part of the channel; a second valve body having a connecting groove on its inner side that engages with the lower end of the first valve body, and a plurality of flow paths communicating with the outside through its lower surface formed on its inner bottom surface; and a diaphragm opening / closing part including a diaphragm, a shaft, and a shaft head, wherein the diaphragm is installed in the connecting groove of the second valve body, and the shaft is inserted into the channel of the first valve body. The shaft head is combined with the lower end of the shaft and is tightly attached to the partition; the drive unit includes a body and a piston assembly. The body includes an outer cover, an air injection pipe, and a cover. The outer cover is combined with the upper end of the first valve body. The air injection pipe is combined with the upper part of the outer cover for injecting external air. The cover is connected to an air intake pipe for drawing in air. The piston assembly is combined with the interior of the body and is driven to rise and fall by air pressure. The movement of the piston assembly is linked to the rising and falling of the shaft, thereby triggering the opening and closing of the partition.

[0012] Optionally, the cover of the body has an opening at the bottom and a space inside. An injection port and an intake port, respectively connected to an air injection pipe and an air intake pipe, are formed on one side of the upper plate. The cover includes: a fastening tube communicating with the injection port of the upper plate and protruding from the lower part of the upper plate; a spring engaging with the outer circumferential surface of the fastening tube and disposed inside the cover; and an adjusting component including an adjusting nut and an adjusting bolt. The adjusting nut is threaded into the inner circumferential surface of the fastening tube and has a through hole inside. The adjusting bolt engages with the through hole of the adjusting nut so that its head is exposed at the injection port of the fastening tube and has a channel inside. The adjusting bolt is connected to the piston assembly.

[0013] Optionally, the piston assembly includes: a piston tube body with an insertion hole for inserting the lower part of the adjusting bolt; an upper piston formed in a disc shape on the lower part of the outer periphery of the piston tube body, with a lower through hole on its lower surface communicating with the insertion hole, and closely attached to the inner periphery of the cover; a hollow tube shaft inserted into and connected to the lower through hole of the piston tube body, with a channel formed inside; a lower piston formed in a disc shape on the lower part of the hollow tube shaft, closely attached to the inner periphery of the outer cover; and a piston support platform with a through hole formed in its center for connecting the outer periphery of the hollow tube shaft, fixedly disposed in a disc shape on the inner periphery of the opening of the cover, and disposed between the upper piston and the lower piston.

[0014] Optionally, a first discharge hole communicating with the channel is formed through the outer peripheral surface of the hollow tube shaft. The first discharge hole is formed between the upper piston and the piston support platform. A second discharge hole communicating with the lower surface of the lower piston is formed at the lower part of the channel. The second discharge hole faces the inner bottom surface of the outer cover.

[0015] Optionally, the diaphragm valve device includes a piston connection portion, such that the lower piston and the shaft of the first valve body are driven to move up and down as a whole. The piston connection portion includes: an extension shaft, which protrudes from the lower part of the lower piston and is inserted into the upper opening of the first valve body; and an O-ring, which engages with the inner circumferential surface of the channel of the first valve body and is tightly attached to the outer circumferential surface of the extension shaft to apply a fixing force and a sealing force.

[0016] Optionally, the partition valve device includes a rotating part that allows the first valve body to be rotatably engaged with the outer cover. The rotating part includes: a locking plate that allows the upper part of the first valve body to be inserted into a connecting hole formed on the lower surface of the outer cover, engaging with the upper outer peripheral surface of the first valve body and closely abutting the inner surface of the outer cover; a sealing plate that engages with the upper outer peripheral surface of the first valve body and is inserted into the inner peripheral surface of the connecting hole; and an annular step that protrudes from the upper outer peripheral surface of the first valve body and is supported on the lower surface of the outer cover.

[0017] Optionally, the second valve body includes: an intake flow path with a mating groove formed on its inner side, formed at the center of the bottom surface inside the second valve body; an annular step protruding from the upper part of the intake flow path; a washer engaging with the upper opening of the annular step and contacting the shaft head; an annular groove formed on the outer periphery of the annular step; and an exhaust flow path having multiple annular grooves, with an annular step formed along the circumferential direction on the inner circumferential surface of the mating groove, the outer periphery of the partition being mounted and engaged with the annular step, and the partition valve device including a pressure ring engaging with the inner circumferential surface of the mating groove and supported on the upper part of the outer periphery of the partition.

[0018] According to the present invention, a plurality of pistons constituting the drive unit can be formed, and the lifting power can be enhanced by raising and lowering the plurality of pistons simultaneously. Therefore, the lifting drive of the shaft linked with the piston can be precisely executed. Thus, the opening and closing accuracy can be improved by further precisely executing the opening and closing operation of the partition through linkage with the shaft.

[0019] Furthermore, the flow rate used to control the opening and closing of the diaphragm can be precisely changed by increasing the piston's upward limit position, thereby allowing for precise adjustment of the flow movement. Attached Figure Description

[0020] Figure 1 This is a perspective view of the diaphragm valve device of the present invention.

[0021] Figure 2 This is a three-dimensional cross-sectional view of the diaphragm valve device of the present invention.

[0022] Figure 3 This is a front sectional view of the diaphragm valve device of the present invention.

[0023] Figure 4 This is a side sectional view of the diaphragm valve device of the present invention.

[0024] Figure 5 An exploded perspective view of the diaphragm valve device of the present invention is shown.

[0025] Figure 6 This is an exploded perspective view of the diaphragm valve device of the present invention, viewed from below.

[0026] Figure 7 This is an exploded perspective view of the "piston assembly" in the diaphragm valve device of the present invention.

[0027] Figure 8 A front view showing the operation of the "piston assembly" in the diaphragm valve device of the present invention.

[0028] Figure 9 This is a partial cross-sectional perspective view of the "adjusting component" in the diaphragm valve device of the present invention.

[0029] Explanation of reference numerals in the attached figures 3: Partition plate 4: Main body 5: Piston assembly 41: Outer casing 42: Cap 43: Air Injection Pipe 45: Adjusting component; 60: Piston connection part 62: Extension shaft; 64: O-ring 70: Rotating part; 72: Locking plate 74: Package 76: Annular Step 100: First valve body; 110: Upper main body 120: Neck 130: Lower Main Body 200: Second valve body; 210: Suction flow path 202: Joint groove; 220: Annular step 230: Washer; 240: Annular groove 300: Partition opening and closing part; 310: Shaft 320: Shaft head; 400: Drive unit 423: Injection port 424: Suction port 425: Spring; 451: Adjusting nut 452: Adjusting bolt; 510: Upper piston 520: Lower piston; 530: Piston support platform Detailed Implementation The embodiments are described in detail below with reference to the accompanying drawings. However, various modifications can be made to the embodiments, and the scope of protection of the patent application is not limited to or restricted to these embodiments. It should be understood that all modifications, equivalent technical solutions, and alternative technical solutions of the embodiments are within the scope of protection of the invention.

[0030] The specific structural or functional descriptions of the embodiments are disclosed for illustrative purposes only, and the embodiments can be modified through various implementations. Therefore, the embodiments are not limited to the specific disclosed form, and the scope of this specification includes all modifications, equivalent technical solutions, or alternative technical solutions within the technical concept.

[0031] Terms such as "first" or "second" can be used to describe multiple structural elements; however, such terms are only used to distinguish one structural element from another. For example, a first structural element can be named a second structural element, and similarly, a second structural element can be named a first structural element.

[0032] It should be understood that when a structural element is said to be "connected" to another structural element, it can mean that it is directly connected to the other structural element, or that it is connected, but there may be other structural elements in between.

[0033] In the embodiments, the terminology used is for illustrative purposes only and should not be construed as limiting. Unless the context clearly indicates otherwise, singular expressions include plural expressions. In this specification, terms such as "comprising" or "having" are used only to specify the presence of features, numbers, steps, operations, structural elements, components, or combinations thereof described in the specification, and should not be construed as excluding the presence or additional possibilities of one or more other features, numbers, steps, operations, structural elements, components, or combinations thereof.

[0034] Unless otherwise defined, all terms used herein, including technical and scientific terms, have the same meaning as commonly understood by one of ordinary skill in the art to which this invention pertains. Terms as defined in commonly used dictionaries shall be interpreted as having the same meaning as they have in the context of the relevant art, and shall not be construed as having an idealized or overly formal meaning unless expressly defined in this specification.

[0035] Furthermore, during the description with reference to the accompanying drawings, the same structural elements are assigned the same reference numerals regardless of the reference numerals, and repeated descriptions thereof are omitted. In describing embodiments, detailed descriptions of well-known technologies are omitted when it is determined that such detailed descriptions may unnecessarily obscure the spirit of the embodiments.

[0036] The advantages, features, and implementation methods of this invention can be found in conjunction with the appendix. Figure 1 The detailed embodiments become clear. However, the present invention is not limited to the embodiments disclosed below, and can be implemented through different methods. This embodiment is only used to complete the disclosure of the present invention so that those skilled in the art can fully understand the scope of the present invention. The present invention is limited to the scope of the claims.

[0037] In embodiments of the invention, unless otherwise defined, all terms used herein, including technical terms or scientific data, have the same meaning as commonly understood by one of ordinary skill in the art to which this invention pertains. Terms defined in commonly used dictionaries should be interpreted as having the same meaning as the related art in context, and should not be interpreted as having an idealized or overly formal meaning unless explicitly defined in embodiments of the invention.

[0038] In the accompanying drawings illustrating embodiments of the present invention, the shapes, dimensions, proportions, angles, quantities, etc., disclosed are merely examples, and the present invention is not limited to the illustrated items. Furthermore, in describing the present invention, detailed descriptions of well-known technologies will be omitted when it is determined that such descriptions may unnecessarily obscure the spirit of the invention. In this specification, unless "only" is used, terms such as "comprising," "having," and "implementing" may include other parts. When a singular form is used to express a structural element, the plural form is included unless otherwise explicitly stated.

[0039] In interpreting structural elements, even without explicit additional documentation, the interpretation should include the meaning of error range.

[0040] When describing positional relationships, for example, when using terms such as "above," "upper part," "lower part," or "surrounding" to describe the positional relationship between two parts, there may be more than one other part between the two parts unless "immediately" or "directly" is used.

[0041] When indicating that an element or layer is "on" another element or layer, this includes cases where the other element is directly above or is intermediated by another layer or other element. Throughout the specification, the same reference numerals denote the same structural elements.

[0042] In the accompanying drawings, the dimensions and thicknesses of the various structures are shown for illustrative purposes only, and the present invention is not limited to the dimensions and thicknesses of the structures shown.

[0043] The various features of the multiple embodiments of the present invention can be partially combined, combined, or wholly combined or combined, and can realize multiple linkages and drives at the technical level so that those skilled in the art can fully understand them. They can be implemented independently of each embodiment, or they can be implemented together according to the relevant relationship.

[0044] In the attached diagram, Figure 1 This is a perspective view of the diaphragm valve device of the present invention. Figure 2 This is a cross-sectional perspective view of the diaphragm valve device of the present invention. Figure 3 This is a front sectional view of the diaphragm valve device of the present invention. Figure 4 This is a side sectional view of the diaphragm valve device of the present invention. Figure 5 To illustrate the exploded perspective view of the diaphragm valve device of the present invention, Figure 6 This is an exploded perspective view of the diaphragm valve device of the present invention, viewed from below. Figure 7 This is an exploded perspective view of the "piston assembly" in the diaphragm valve device of the present invention. Figure 8 A front view showing the operation of the "piston assembly" in the diaphragm valve device of the present invention. Figure 9This is a partial cross-sectional perspective view of the "adjusting component" in the diaphragm valve device of the present invention.

[0045] Example The diaphragm valve device of the present invention is generally composed of a first valve body 100, a second valve body 200, a diaphragm opening and closing part 300, and a driving part 400.

[0046] The first valve body 100 includes: an upper body 110, which is cylindrical; a neck 120 connected to the upper body 110 and having a diameter smaller than the upper body 110; and a lower body 130 formed at the lower part of the neck 120 and having a diameter larger than the upper body 110. The first valve body 100 has an upper opening and a lower opening that pass through the upper body 110 and the neck 120, respectively, and a channel is formed inside.

[0047] Furthermore, a head insertion groove 132 that communicates with the lower part of the channel is formed at the bottom of the lower body 130.

[0048] A heat jacket (not shown) is provided in the lower main body 130 to maintain smooth fluid flow while maintaining a high temperature.

[0049] Therefore, in order to prevent heat from the lower body 130 from being transferred to the upper body 110, heat can be released to the outside through the longer neck 120 in the middle for cooling.

[0050] The second valve body 200 has a connecting groove 202 formed on its inner side that connects with the lower end of the first valve body 100, and multiple flow paths 210 and 212 formed on its inner bottom surface that connect the lower surface to the outside.

[0051] The partition opening and closing part 300 is composed of partition 3, shaft 310 and shaft head 320. Partition 3 is installed in the connecting groove 202 of the second valve body 200. Shaft 310 is inserted into the channel of the first valve body 100. Shaft head 320 is connected to the lower end of shaft 310 and closely attached to partition 3.

[0052] The drive unit 400 includes: a body 4, which is composed of an outer cover 41, an air injection pipe 43, and a cover 42. The outer cover 41 is connected to the upper end of the first valve body 100, the air injection pipe 43 is connected to the upper part of the outer cover 41 for injecting external air, and the cover 42 is connected to an air intake pipe 44 for drawing in air; and a piston assembly 5, which is connected to the interior of the body 4 and is driven to rise and fall by air pressure.

[0053] Therefore, as the air injection through the air injection pipe 43 or the air intake through the air intake pipe 44 is linked to the lifting and lowering operation of the piston assembly 5, the opening and closing operation of the partition 3 can be triggered by lifting and lowering the shaft 310.

[0054] The cover 42 of the main body 4 has an opening at the bottom and a space inside. An injection port 423 and an intake port 424, which are respectively connected to the air injection pipe 43 and the air intake pipe 44, are formed on one side of the upper plate 422. The cover 42 includes: a fastening pipe 428, which is connected to the injection port 423 of the upper plate 422 and protrudes from the lower part of the upper plate 422; a spring 425, which is connected to the outer peripheral surface of the fastening pipe 428 and is disposed inside the cover 42; and an adjusting component 45, which consists of an adjusting nut 451 and an adjusting bolt 452. The adjusting nut 451 is threaded to the inner peripheral surface of the fastening pipe 428 and has a through hole inside. The adjusting bolt 452 is connected to the through hole of the adjusting nut 451 so that the head is exposed to the injection port 423 of the fastening pipe 428 and has a channel inside. The adjusting bolt 452 is connected to the piston assembly 5.

[0055] The adjusting component 45 can adjust the flow rate value, which is an inherent function of the valve, by adjusting the distance of the piston assembly 5 through the adjusting nut 451. The adjusting bolt 452 is used to fix the position of the adjusting nut 451 without making additional changes.

[0056] Reference Figure 6 and Figure 7 The piston assembly 5 includes: a piston tube 512 with an insertion hole for inserting the lower part of an adjusting bolt 452; an upper piston 510 formed in a disc shape on the lower part of the outer periphery of the piston tube 512, with a lower through hole connected to the insertion hole on its lower surface, and closely attached to the inner periphery of the cover 42; a hollow tube shaft 522 inserted into and engaged in the lower through hole of the piston tube 512, with a channel formed inside; a lower piston 520 formed in a disc shape on the lower part of the hollow tube shaft 522, and closely attached to the inner periphery of the outer cover 41; and a piston support platform 530 with a through hole formed in the center for through engagement with the outer periphery of the hollow tube shaft 522, fixedly disposed in a disc shape on the inner periphery of the opening of the cover 42, and disposed between the upper piston 510 and the lower piston 520.

[0057] A first discharge hole 5221, which is connected to the channel, is formed through the outer peripheral surface of the hollow tube shaft 522. The first discharge hole 5221 is formed between the upper piston 510 and the piston support platform 530.

[0058] Furthermore, a second discharge hole 5222 is formed in the lower part of the channel, which penetrates the lower surface of the lower piston 520, and the second discharge hole 5222 faces the inner bottom surface of the outer cover 41.

[0059] On the other hand, the piston connection part 60 is included, so that the lower piston 520 and the shaft 310 of the first valve body 100 are driven to move up and down as a whole.

[0060] The piston connection portion 60 includes: an extension shaft 62, which protrudes from the lower part of the lower piston 520 and is inserted into the upper opening of the first valve body 100; and an O-ring 64, which engages with the inner circumferential surface of the passage of the first valve body 100 and is tightly attached to the outer circumferential surface of the extension shaft 62 to apply a fixing force and a sealing force.

[0061] The function of piston assembly 5 is as follows.

[0062] As air supplied from the air injection pipe 43 is injected into the body 4 through the air injection port 423, a force is applied to push the hollow tube shaft 522 and the lower piston 520 of the piston assembly 5 downward.

[0063] When the lower piston 520 descends, it pushes the shaft 310 downwards, and the shaft head 320 closes the suction flow path 210 by squeezing the partition 3 (see reference). Figure 8 (part (a)).

[0064] Conversely, if an intake pressure is created inside the body 4 through the air intake pipe 44, the upper piston 510 rises.

[0065] Since the upper piston 510 and the hollow tube shaft 522 are integrated, if the upper piston 510 rises, the spring 425 is compressed, and the hollow tube shaft 522 and the lower piston 520 rise together (see reference). Figure 8 (part (b)).

[0066] On the other hand, the rotating part 70 is included so that the first valve body 100 is rotatably combined with the outer cover 41.

[0067] The rotating part 70 includes: a locking plate 72, which allows the upper part of the first valve body 100 to be inserted and engaged through a coupling hole 410 formed on the lower surface of the outer cover 41, engaging with the upper outer peripheral surface of the first valve body 100 and closely abutting the inner surface of the outer cover 41; an encapsulation 74, which engages with the upper outer peripheral surface of the first valve body 100 and is inserted into the inner peripheral surface of the coupling hole 410; and an annular step 76, which protrudes from the upper outer peripheral surface of the first valve body 100 and is supported on the lower surface of the outer cover 41.

[0068] After the upper body 110 of the first valve body 100 is inserted into the connecting hole 410 formed on the lower surface of the outer cover 41 of the main body 4, the locking plate 72 is connected to the inner surface of the outer cover 41 so that the locking plate 72 is tightly attached to the inner surface of the outer cover 41.

[0069] A groove 111 is formed on the outer surface of the upper body 110, and the groove 111 is combined with the locking plate 72. The locking plate 72 is composed of semi-circular locking plates 721 symmetrically arranged into a circle to be combined with both sides of the upper body 110.

[0070] Therefore, the first valve body 100 can rotate 360 ​​degrees, and the locking plate 72 can be tightly attached to the inner surface of the outer cover 41, thereby preventing it from detaching.

[0071] Reference Figure 3 The second valve body 200 includes: a suction flow path 210, with a mating groove 202 formed on the inner side, which is formed at the center of the bottom surface inside the second valve body 200; an annular step 220, which protrudes and is formed on the upper part of the suction flow path 210; and a washer 230, which is mated with the upper opening of the annular step 220 and contacts the shaft head 320.

[0072] A donut-shaped annular groove 240 is formed on the outer periphery of the annular step 220. Two discharge channels 212 are symmetrically formed in this annular groove 240.

[0073] The discharge path 212 can pass through the bottom surface of the second valve body 200 and discharge fluid.

[0074] Preferably, the suction flow path 210 and the discharge flow path 212 are formed in a curved shape to minimize the residual area of ​​the fluid in order to achieve smooth cleaning.

[0075] Furthermore, an annular step 250 is formed along the circumferential direction on the inner circumferential surface of the mating groove 202 of the second valve body 200.

[0076] The outer periphery of the partition 3 is installed and joined to the annular step 250.

[0077] It includes a pressure ring 260, which engages with the inner circumferential surface of the engagement groove 202 of the second valve body 200 and is supported on the upper part of the outer periphery of the partition 3.

[0078] The partition 3 is composed of a flexible part and a wing. The flexible part is hemispherical and protrudes towards the shaft head 320. The wing is a flat circular plate and is formed on the outer periphery of the flexible part.

[0079] The wing is mounted and fixed to the pressure ring 260.

[0080] Therefore, as the lower piston 520 descends, the shaft 310 descends, and the shaft head 320 presses against the partition 3 and presses tightly against the washer 230, thereby sealing the suction flow path 210 (see reference). Figure 8 (part (a)).

[0081] Conversely, if the upper piston 510 rises, the shaft 310 also rises. As the force squeezing the partition 3 decreases due to the rise of the shaft head 320, the washer 230 is separated from and opened by the partition 3, thereby allowing fluid to flow in through the suction flow path 210 (see reference). Figure 8 (part (b)).

[0082] The incoming fluid fills the annular groove 240 and can be discharged through the discharge path 212.

[0083] While the embodiments of the present invention have been described in further detail above with reference to the accompanying drawings, the present invention is not limited to these embodiments, and various modifications can be made without departing from the scope of the inventive concept. Therefore, the embodiments disclosed in this invention are for illustrative purposes only and are not intended to limit the inventive concept, and the scope of the inventive concept is not limited to these embodiments. Thus, the embodiments described above are merely examples at all levels and should not be construed as limiting. The scope of protection of this invention should be interpreted based on the appended claims, and all technical ideas within the equivalent scope fall within the scope of protection of this invention.

[0084] Therefore, other implementation methods, other embodiments, and contents equivalent to the scope of the invention claims also fall within the scope of the invention claims.

Claims

1. A diaphragm valve apparatus, characterized by, include: The first valve body has an upper opening and a lower opening formed in the upper and lower parts, respectively, and has a channel formed inside, with a head insertion groove connected to the lower part of the channel. The second valve body has a mating groove formed on its inner side that is connected to the lower end of the first valve body. Multiple flow paths are formed on the bottom surface of the inner side that are connected to the outside through the lower surface. The multiple flow paths include a suction flow path and a discharge flow path. The suction flow path and the discharge flow path can minimize the residual area of ​​the fluid. The flow path is formed into a curved shape in order to achieve smooth cleaning. The partition opening and closing part includes a partition, a shaft, and a shaft head. The partition is installed in the mating groove of the second valve body, the shaft is inserted into the channel of the first valve body, and the shaft head is engaged with the lower end of the shaft and closely attached to the partition. as well as The drive unit includes a body and a piston assembly. The body includes an outer cover, an air injection pipe, and a cover. The outer cover is connected to the upper end of the first valve body. The air injection pipe is connected to the upper part of the outer cover for injecting external air. The cover is connected to an air intake pipe for drawing in air. The piston assembly is connected to the interior of the body and is driven to rise and fall by air pressure. The piston assembly is linked to the rising and falling of the piston assembly, and the opening and closing of the partition is triggered by the rising and falling of the shaft.

2. The diaphragm valve device according to claim 1, characterized in that, The cover of the main body has an opening at the bottom and a space inside. An injection port and an intake port, respectively connected to an air injection pipe and an air intake pipe, are formed on one side of the upper plate. The cover includes: The fastening tube is connected to the injection port of the upper plate and protrudes from the lower part of the upper plate; A spring, which engages with the outer circumferential surface of the fastening tube, is disposed within the cover; and The adjusting component includes an adjusting nut and an adjusting bolt. The adjusting nut is threaded onto the inner circumferential surface of the fastening tube and has a through hole formed inside. The adjusting bolt engages with the through hole of the adjusting nut so that its head is exposed at the injection port of the fastening tube and has a channel formed inside. The adjusting bolt is connected to a piston assembly. The adjusting component can adjust the flow rate, which is an inherent function of the valve, by adjusting the distance of the piston assembly through the adjusting nut. To fix the position of the adjusting nut without additional changes, an adjusting bolt is used for securing it. The piston assembly includes: The piston tube has an insertion hole into which the lower part of the adjusting bolt can be inserted; The upper piston is formed in the shape of a disc on the lower part of the outer periphery of the piston tube body, and a lower through hole connected to the insertion hole is formed on the lower surface, which is close to the inner periphery of the cover. A hollow tube shaft is inserted into and connected to the lower through hole of the piston tube body, forming a channel inside; The lower piston, formed in a disc shape at the lower part of the hollow tube shaft, is in close contact with the inner circumferential surface of the outer casing; and A piston support platform has a through hole formed in its center, allowing the outer circumferential surface of the hollow tube shaft to pass through and engage. It is fixedly mounted in a disc shape on the inner circumferential surface of the opening of the cover, and is positioned between the upper and lower pistons. A first discharge hole, communicating with a channel, is formed through the outer circumferential surface of the hollow tube shaft. The first discharge port is formed between the upper piston and the piston support platform. A second discharge hole is formed in the lower part of the channel, which penetrates the lower surface of the lower piston. The second discharge port faces the inner bottom surface of the outer cover. The diaphragm valve device includes a piston connection portion, which allows the lower piston and the shaft of the first valve body to move up and down as a single unit. The piston connection portion includes: An extension shaft, protruding from the lower part of the lower piston, is inserted into the upper opening of the first valve body; and The O-ring engages with the inner circumferential surface of the channel of the first valve body and is tightly attached to the outer circumferential surface of the extension shaft to apply fixing force and sealing force.

3. The diaphragm valve device according to claim 1, characterized in that, The second valve body includes: The suction flow path has a connecting groove formed on the inner side, which is formed at the center of the bottom surface inside the second valve body; An annular step is formed prominently at the upper part of the suction flow path; The washer, which is combined with the upper opening of the annular step, comes into contact with the shaft end; An annular groove is formed at the outer periphery of the annular step; and The discharge flow path is formed in multiple annular grooves. An annular step is formed along the circumferential direction on the inner circumferential surface of the connecting groove, and the outer periphery of the partition is fitted into the annular step. The diaphragm valve device includes a pressure ring that engages with the inner circumferential surface of the connecting groove and is supported on the upper part of the outer circumferential edge of the diaphragm. The diaphragm valve device includes a rotating part, allowing the first valve body to be rotatably engaged with the outer cover. The rotating part includes: A locking plate is provided so that the upper part of the first valve body is inserted and engaged through a mating hole formed on the lower surface of the outer cover, engaging with the upper outer peripheral surface of the first valve body and tightly fitting against the inner surface of the outer cover; and Encapsulation, which combines with the upper outer peripheral surface of the first valve body and is inserted into the inner peripheral surface of the mating hole; and An annular step is formed on the upper outer circumferential surface of the first valve body and supported on the lower surface of the outer cover.

Images