Vacuum-coated high-efficiency evaporation device

Abstract

This invention relates to the field of coating equipment and provides a high-efficiency vacuum coating evaporation device, including an evaporation chamber and a main roller installed in the evaporation chamber; at least one evaporation boat for evaporating the accepted coating material; each evaporation boat is heated by a heating component; at least one evaporator is correspondingly suspended above the evaporation boat; the evaporator has a blocking part covering the evaporation space of the evaporation boat for blocking splashes from the evaporation boat; the blocking part has at least one through groove for the evaporation material vapor to pass through; the through groove and the evaporation space are offset by a distance perpendicular to the evaporation direction. Therefore, this invention can effectively prevent splashes from moving with the vapor and adhering to the substrate surface, forming defects such as bumps and pinholes on the substrate film surface, thereby significantly improving the uniformity and purity of the coating quality. Simultaneously, the solidification points adhering to the blocking part can be reheated and evaporated.

Description

Technical Field

[0001] This invention relates to the field of coating devices, and more particularly to a vacuum coating high-efficiency evaporation device. Background Technology

[0002] Vacuum evaporation roll-to-roll coating is the mainstream process for producing aluminized products such as capacitor films and flexible packaging films. Currently, the key to increasing the coating speed (i.e., deposition rate) lies in improving the evaporation rate of aluminum. Traditional technologies mainly rely on increasing the heating power to raise the temperature of the evaporation boat and correspondingly increasing the amount of aluminum wire fed.

[0003] However, this method has a significant bottleneck: when the temperature of the evaporation boat is too high, the molten aluminum is prone to violent boiling and micro-explosions, generating a large number of macroscopic aluminum droplets that splash. If these splashed aluminum droplets deposit on the moving film, they will form defects such as bumps and pinholes, leading to a sharp drop in product yield. Therefore, there is an irreconcilable contradiction between evaporation rate and film quality in traditional equipment: simply increasing the power of the evaporation boat can increase the evaporation rate, but it will also increase the scrap rate due to increased aluminum splashing, limiting further improvements in coating speed.

[0004] In conclusion, the existing technology obviously has inconveniences and defects in practical use, so it is necessary to improve it. Summary of the Invention

[0005] To address the aforementioned deficiencies, the present invention aims to provide a high-efficiency vacuum coating evaporation device. This device utilizes a blocking section to effectively prevent splashes from moving with the vapor and adhering to the substrate surface, thus avoiding defects such as bumps and pinholes on the substrate film surface. This significantly improves the uniformity and purity of the coating quality. Simultaneously, the solidification points adhering to the blocking section can be reheated and evaporated.

[0006] To achieve the above objectives, the present invention provides a high-efficiency vacuum coating evaporation apparatus, comprising an evaporation chamber and a main roller installed within the evaporation chamber; at least one evaporation boat for evaporating the received coating material; each evaporation boat being heated by a heating component; at least one evaporator correspondingly suspended above the evaporation boat; the evaporator having a blocking portion covering the evaporation space of the evaporation boat for blocking splashes from the evaporation boat; the blocking portion having at least one through-slot for the passage of evaporation material vapor; the through-slot being offset from the evaporation space along the perpendicular evaporation direction; the evaporator further comprising a heating module connected to the blocking portion; the heating module driving the blocking portion to generate heat for re-evaporating the coating material condensed in the evaporator.

[0007] According to the vacuum coating high-efficiency evaporation apparatus of the present invention, several evaporation boats are arranged below the main roller; two groups of several evaporation boats are arranged side by side and each group of evaporation boats is distributed along the axial direction of the main roller; multiple cooling elements extend along the axial direction of the main roller and are distributed on both sides of the evaporation space of the evaporation boats to form a spatial structure in which hot and cold alternate in the direction of substrate conveying; the end of each cooling element is provided with a gap from the outer edge of the main roller.

[0008] According to the vacuum-coated high-efficiency evaporation apparatus of the present invention, the plurality of cooling components include: two enclosure plates disposed on the outside of two rows of evaporation boats; a partition plate disposed between the two sets of evaporation boats for isolating the evaporation space of the two rows of evaporation boats; both the enclosure plates and the partition plate are provided with cooling channels; coolant flows in the cooling channels, and the cooling channels are connected to a coolant circulation assembly.

[0009] According to the vacuum-coated high-efficiency evaporation apparatus of the present invention, a base is provided at the bottom of the evaporation space; the heating component includes a positive electrode and a negative electrode, which are spaced apart; each electrode includes a longitudinally connected electrode head and an electrode connection structure, the electrode head is located in the evaporation space above the base, and the electrode connection extends outward through the base; an insulating barrier extending downward is provided outside the electrode head. The positive electrode and the negative electrode are respectively connected to the end of the evaporation boat.

[0010] According to the vacuum-coated high-efficiency evaporation device of the present invention, the base is provided with a movable groove for the positive electrode and / or negative electrode to move away from or towards each other; an elastic reset member is installed in the movable groove to drive the positive electrode and / or negative electrode to reset to the initial position.

[0011] According to the vacuum-coated high-efficiency evaporation apparatus of the present invention, the insulating barrier is fixedly connected to the electrode head, and the outer edge of the insulating barrier is provided with a blocking protrusion for sealing the movable groove during electrode movement.

[0012] According to the vacuum-coated high-efficiency evaporation device of the present invention, a cooling component is provided inside the electrode connection structure; the cooling component includes: a water flow channel disposed inside the electrode seat; an inner tube having a first flow channel inside; and an outer tube having a second flow channel between the inner tube and the outer tube; the first flow channel and the second flow channel are both connected to the water flow channel.

[0013] According to the vacuum-coated high-efficiency evaporation apparatus of the present invention, the enclosure plate and the partition plate are configured as a separable lower region component and an upper region component; the upper region component is rotatably connected to the equipment housing via an extension.

[0014] According to the vacuum-coated high-efficiency evaporation apparatus of the present invention, a cover plate is provided between the evaporation boat and the main roller to block or open the evaporation channel; a through groove for installing the cover plate is provided on the surrounding plate, and the cover plate moves along the through groove to block or open the evaporation channel.

[0015] This invention provides a high-efficiency vacuum coating evaporation device, comprising an evaporation chamber and a main roller installed within the evaporation chamber; at least one evaporation boat for evaporating the accepted coating material; each evaporation boat being heated by a heating component; at least one evaporator correspondingly suspended above the evaporation boat; the evaporator having a blocking portion covering the evaporation space of the evaporation boat for blocking splashes from the evaporation boat; the blocking portion having at least one through-slot for the evaporation material vapor to pass through; the through-slot and the evaporation space having an offset distance along the perpendicular evaporation direction.

[0016] The present invention can effectively prevent splashes from moving with the vapor and adhering to the substrate surface, forming defects such as bumps and pinholes on the substrate film surface by utilizing the blocking part, thereby significantly improving the uniformity and purity of the coating quality. At the same time, the solidification points attached to the blocking part can be reheated and evaporated. Attached Figure Description

[0017] Figure 1 This is a schematic diagram of the mounting structure of the main roller of the present invention; Figure 2 yes Figure 1 A sectional view along section AA; Figure 3 yes Figure 2 Schematic diagram of the structure along another cross section; Figure 4 This is a distribution map of the evaporation boats; Figure 5 This is a schematic diagram of the electrode mounting structure of the present invention; Figure 6 yes Figure 5 Enlarged schematic diagram of part B in the middle; Figure 7 This is a structural diagram of the blocking protrusion on the insulating barrier component; Figure 8 This is a diagram showing the evaporator's location in another embodiment; Figure 9 yes Figure 8 Top view; In the diagram, 00-evaporation chamber, 1-main roller, 2-evaporation boat, 3-partition, 4-cooling channel, 6-cover plate, 7-tank body, 8-positive electrode, 9-negative electrode, 11-lower area component, 12-upper area component, 13-extension, 25-insulating barrier, 26-electrode seat, 27-water flow channel, 29-outer tube, 210-inner tube, 211-bottom enclosure, 212-side enclosure, 213-insulating sleeve, 214-retaining ring, 215-movable groove, 216-first flow channel, 217-second flow channel, 218-blocking protrusion, 32-wire supply structure, 321-wire spool assembly, 322-guide assembly, 34-evaporator, 35-blocking part, 36-through groove. Detailed Implementation

[0018] To make the objectives, technical solutions, and advantages of this invention clearer, the invention will be further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely for explaining the invention and are not intended to limit the invention.

[0019] It should be noted that if the embodiments of the present invention involve directional indicators (such as up, down, left, right, front, back, etc.), the directional indicators are only used to explain the relative positional relationship and movement of the components in a certain specific posture (as shown in the figure). If the specific posture changes, the directional indicators will also change accordingly.

[0020] Meanwhile, the meaning of "and / or" or "and / or" appearing throughout the text is that it includes three options. Taking "A and / or B" as an example, it includes option A, option B, or an option that satisfies both A and B.

[0021] Furthermore, if the embodiments of this invention involve descriptions such as "first" or "second," these descriptions are for descriptive purposes only and should not be construed as indicating or implying their relative importance or implicitly specifying the number of technical features indicated. Therefore, a feature defined with "first" or "second" may explicitly or implicitly include at least one of those features. Additionally, the technical solutions of the various embodiments can be combined with each other, but this must be based on the ability of those skilled in the art to implement them. If the combination of technical solutions is contradictory or impossible to implement, it should be considered that such a combination of technical solutions does not exist and is not within the scope of protection claimed by this invention.

[0022] See Figure 1 , Figure 2 , Figure 9The present invention provides a vacuum-coated high-efficiency evaporation device, which includes an evaporation chamber 00 located in a vacuum chamber. The vacuum chamber is connected to a vacuum pump, such as a vacuum air pump. A wire feeding structure 32 is provided on the outside of the evaporation chamber 00 to continuously feed aluminum wire to the evaporation chamber 00 for melting and evaporation during operation.

[0023] The evaporation chamber 00 is equipped with a main roller 1 for conveying substrates, such as capacitor films, flexible packaging films and other thin films or sheets. The surface of the main roller 1 is precision polished to ensure that the substrates run smoothly during the conveying process and to avoid wrinkles or displacement of the substrates due to uneven roller surfaces. Several evaporation boats 2 are arranged below the main roller 1, and each evaporation boat 2 is heated by a heating component; The heating assembly includes a positive electrode 8 and a negative electrode 9, which are spaced apart. The electrodes release a high-frequency current to generate a stable current between the two electrodes, thereby driving the evaporation boat 2 to heat up. This heats up the material to be evaporated (generally aluminum wire, which is transported to the evaporation boat 2 by a wire supply structure 32 located in a vacuum space. The wire supply structure 32 includes a wire spool group 321 and a guide assembly 322. The wire spool group 321 is used to wind and store the aluminum wire to be evaporated, and the guide assembly 322 is composed of multiple rotatable guide wheels. The aluminum wire is driven by the guide wheels to be drawn out from the wire spool and transported to a designated position in the evaporation boat 2) to a vaporized state. The electrodes can be distributed in two ways: longitudinally and laterally, such as... Figure 1 In the diagram, the electrodes are horizontally mounted, while in the figure they are vertically mounted. Each electrode includes a vertically connected electrode head and electrode connection structure. The electrode head is located in the working space above the base, and the electrode connection extends outward through the base. The vertically mounted electrode structure effectively reduces the lateral area occupied by the electrodes in the vacuum working space, providing more space for the transport path of the membrane substrate and avoiding interference with the stable transport of the substrate due to excessively large lateral electrode dimensions. Simultaneously, the vertical layout makes it easier to precisely control the relative position between the electrode head and the evaporation boat 2, ensuring that the current energy is concentrated on the evaporation boat 2, improving the vaporization efficiency and stability of the material to be evaporated, and reducing energy loss.

[0024] The positive electrode 8 and negative electrode 9 are respectively connected to the ends of the evaporation boat 2, which can be made of materials such as boron nitride or titanium diboride. These materials have excellent high-temperature resistance and chemical stability, and can maintain structural integrity under high-temperature current, avoiding the impact on service life due to high-temperature oxidation or corrosion. At the same time, their good thermal conductivity can quickly transfer the heat released by the electrodes to the material to be evaporated, ensuring uniform heating and efficient vaporization of the material, and reducing fluctuations in vaporization quality caused by excessively high or low local temperatures.

[0025] See Figure 2 , Figure 3 , Figure 4 There are two sets of several evaporation boats 2 arranged side by side, and each set of evaporation boats 2 is distributed along the axis of the main roller 1. The two sets of evaporation boats 2 arranged side by side can make full use of the space under the main roller 1, significantly improve the coating efficiency and shorten the processing cycle of the substrate without increasing the overall size of the equipment.

[0026] Multiple cooling elements extend axially along the main roller 1 and are distributed on both sides of the evaporation zone of the evaporation boat 2, forming a spatial structure with alternating hot and cold temperatures along the substrate conveying direction. The end of each cooling element is spaced apart from the outer edge of the main roller 1. These cooling elements create localized low-temperature environments on both sides of the evaporation zone. During substrate conveying, the substrate is first cooled, then heated as it passes through the evaporation zone of the evaporation boat 2, followed by further cooling, heating, and finally cooling again—a staggered temperature change. This effectively prevents overheating deformation or abnormal coating quality caused by excessively high local temperatures, ensuring the stability of the entire coating process and product yield.

[0027] The cooling components include: two enclosures, positioned on either side of two rows of evaporation boats 2; the enclosures and partitions 3 together enclose the working space of the evaporation boat 2, specifically, a base is located at the bottom of the working space; the base is provided with an enclosure assembly forming the working space, comprising a bottom enclosure 211 at the bottom and vertically installed side enclosures 212. The bottom enclosure 211 is tightly fitted to the upper surface of the base and fixedly connected by bolts to ensure the sealing of the connection; the side enclosures 212 extend vertically upward along the edge of the bottom enclosure 211, and adjacent side enclosures 212 are joined by mortise and tenon joints, with high-temperature resistant sealant filled at the joints to further enhance the airtightness of the working space. The top of the enclosure assembly is the equipment shell; the end of the enclosure near the main roller 1 is spaced apart from the outer edge of the main roller 1. The enclosures effectively prevent the metal vapor generated during the operation of the evaporation boat 2 from diffusing into the external environment, reducing vapor loss, and preventing vapor from condensing and depositing on other parts of the equipment, ensuring the stability and cleanliness of the coating process. In addition, the enclosure can also provide some protection for the evaporation boat 2, reduce the interference of external factors on the working state of the evaporation boat 2, and improve the safety and reliability of the overall structure.

[0028] A partition 3, positioned between the two sets of evaporation boats 2, isolates the evaporation areas of the two sets of evaporation boats 2. This partition 3 is made of a high-temperature resistant material with good heat insulation properties, such as ceramic or quartz, effectively preventing mutual interference of heat generated by the two sets of evaporation boats 2 during operation, and preventing excessively high local temperatures from affecting the evaporation rate and uniformity of the coating material. Simultaneously, the end of the partition 3 near the main roller 1 is spaced apart from the outer edge of the main roller 1. The size of this gap is precisely calculated to prevent contact friction between the partition 3 and the surface of the main roller 1, thus preventing damage to the main roller 1, and to effectively prevent the steam generated by the two sets of evaporation boats 2 from interfering with and mixing during evaporation, ensuring a stable vapor concentration of the coating material in each evaporation area, thereby guaranteeing a uniform coating effect on the substrate in different evaporation areas.

[0029] In some embodiments of the present invention, both the partition 3 and the surrounding plate are provided with cooling channels 4. The cooling channels 4 can be located inside the partition 3 and the surrounding plate, or they can be attached externally to the partition 3 and the surrounding plate, i.e., the cooling channels 4 are cooling pipes fixed to the end faces of the partition 3 and the surrounding plate. Coolant flows within the cooling channels 4, driven by a circulation mechanism, such as a circulation pump. The circulating flow of the coolant can continuously remove the heat absorbed by the partition 3 under high-temperature conditions. The design of the cooling channels 4 allows for adjustment of the coolant flow rate and temperature according to actual operating conditions. For example, when the evaporator boat 2 has a high power output and generates a large amount of heat, increasing the coolant flow rate or decreasing the coolant temperature ensures that the partition 3 remains within a stable operating temperature range. Furthermore, the cooling channels 4 can effectively extend the service life of the partition 3 and the surrounding plate.

[0030] In some embodiments of the present invention, the two surrounding plates and the end plates together form a working space for surrounding the evaporation boat 2. The surrounding plates and the partition plates 3 extend vertically upward from the base to a position that cooperates with the main roller 1, i.e., in the direction of evaporation. This design allows the metal vapor to be more concentratedly guided to the surface of the main roller 1 during its upward movement, reducing the scattering and loss of vapor in the transmission path, thereby improving the utilization rate of the coating material.

[0031] In some embodiments of the present invention, the two sets of evaporation boats 2 are respectively placed on both sides of the vertical plane containing the central axis of the main roller 1, that is, the central axis of the main roller 1 corresponds to the centerline plane of the two sets of evaporation boats 2. This symmetrical distribution allows the surface of the main roller 1 to uniformly receive the coating material vapor generated by the evaporation boats 2 on both sides during rotation, ensuring that the coating thickness of the substrate remains consistent at different positions. At the same time, the corresponding setting of the centerline plane facilitates precise positioning of the equipment during installation and commissioning, reducing coating quality problems caused by positional deviations.

[0032] In some embodiments of the present invention, a cover plate 6 is provided between the evaporation boat 2 and the main roller 1 to block or open the evaporation channel. A groove 7 for installing the cover plate 6 is provided on the surrounding plate. The cover plate 6 moves along the through groove 36 to block or open the evaporation channel. The cover plate 6, in conjunction with the surrounding plate, can block the heat source (i.e., the evaporation boat 2), significantly reducing the ambient temperature and creating a better working environment for the staff. After debugging, the evaporation channel is reopened.

[0033] In some embodiments of the present invention, since the upper end of the enclosure and partition 3 needs to meet the outer edge of the main roller 1, in order to facilitate side operation during the cleaning process of the main roller 1 or other adjustments, the enclosure and partition 3 of this application are configured as a separable lower region component 11 and an upper region component 12; the upper region component 12 is rotatably connected to the equipment housing via an extension 13. During disassembly, the lower region component 11 is first disassembled to make room for the movement of the upper region component 12. After the upper region component 12 rotates, it can be adjusted by the spindle; during assembly, the upper region component 12 is first rotated back, and the lower region component 11 is installed.

[0034] Specifically, the cover plate 6 has a cooling channel 4, which is connected to the coolant circulation assembly via a flexible tube. The flexible tube can be a high-temperature resistant flexible rubber tube. The coolant circulation assembly has been described above.

[0035] In some embodiments of the present invention, the negative electrodes of the two rows of evaporation boats 2 are concentrated near the partition plate 3. This concentrated arrangement can effectively shorten the connection path of the negative electrode lines, reduce the impact of line resistance on current transmission efficiency, and thus improve the heating stability of the evaporation boat 2. In addition, the concentrated arrangement of the negative electrodes also helps to reduce electromagnetic interference, avoid signal disturbance caused by dispersed lines, ensure that the double boat structure maintains a stable electric field environment during operation, and improve the uniformity and consistency of material evaporation.

[0036] In some embodiments of the present invention, the two sets of evaporation boats 2 are staggered. This staggered distribution can increase the coverage area of ​​the evaporation zone, making the material more evenly heated during the evaporation process and avoiding differences in evaporation effect caused by excessively high or low local temperatures.

[0037] See Figure 5 , Figure 6 , Figure 7To facilitate the installation of the evaporation boat 2, the base is provided with a movable groove 215 for the positive electrode 8 and / or negative electrode 9 to move away from or towards each other. An elastic reset element, which can be a spring, is installed within the movable groove 215 to drive the positive electrode 8 and / or negative electrode 9 back to their initial positions. When the evaporation boat 2 needs to be installed, external force can be used to move the positive electrode 8 and negative electrode 9 along the movable groove 215 in a direction away from each other. At this time, the elastic reset element is compressed and stores elastic potential energy. After the evaporation boat 2 is placed in position, the external force is removed, and the elastic reset element releases its potential energy, causing the positive electrode 8 and negative electrode 9 to automatically reset and clamp the evaporation boat 2, achieving rapid positioning and fixation of the evaporation boat 2. This design not only simplifies the installation process of the evaporation boat 2 and reduces the operational difficulty, but also ensures that the electrodes and the evaporation boat 2 maintain a stable contact pressure at all times.

[0038] In some embodiments of the present invention, an insulating barrier 25 extending downwards is provided outside the electrode head. The insulating barrier 25 is an isolation sleeve that forms an insulating region at a predetermined height below the electrode. If the material to be evaporated is sputtered within the evaporation boat 2 and falls into the insulating region below the electrode, it will not cause a short circuit between the electrodes. The height design of this isolation sleeve needs to comprehensively consider the longitudinal dimensions of the electrode and the positional relationship of the evaporation boat 2, ensuring that it effectively covers the area below the electrode susceptible to sputtering without obstructing the current transmission between the electrode head and the evaporation boat 2. Simultaneously, the isolation sleeve can be made of high-temperature resistant insulating materials such as alumina or zirconium oxide. These materials not only withstand the high-temperature environment during the evaporation process but also maintain good insulation performance and structural strength during long-term use, further improving the safety and reliability of the evaporation electrode head structure.

[0039] In some embodiments of the present invention, the insulating barrier 25 is fixedly connected to the electrode head, and the outer edge of the insulating barrier 25 is provided with a blocking protrusion 218 for sealing the movable groove 215 during electrode movement. This prevents sputtered material (generally aluminum powder) from falling into the movable groove 215, which would affect the movement of the electrode head and also cause short circuits. During operation, the electrode head moves within the movable groove 215 to adjust its relative position with the evaporation boat 2. At this time, the blocking protrusion 218 moves synchronously with the electrode head, always adhering to the upper wall of the movable groove 215 to form a dynamic seal. This design effectively intercepts aluminum powder generated by sputtering, preventing it from entering the gaps inside the movable groove 215. When aluminum powder particles splash near the movable groove 215, they are pushed to one side by the protrusion structure, reducing wear on the internal mechanical structure of the movable groove 215. At the same time, it avoids electrode head jamming or poor contact caused by aluminum powder accumulation, ensuring that the electrode head maintains smooth adjustment performance and stable circuit connection during long-term use.

[0040] In some embodiments of the present invention, the electrode connection structure includes: an electrode base 26 connected to an electrode head; the electrode base 26 extending downward through a base; and a connecting wire, one end of which is connected to the electrode base 26. The other end of the connecting wire can be connected to an external power supply or control circuit to enable power supply and operational status control of the electrode head.

[0041] In some embodiments of the present invention, a cooling assembly is provided within the electrode connection structure. The cooling assembly includes: a water flow channel 27 disposed inside the electrode holder 26; an inner tube 210 having a first flow channel 216 inside; and an outer tube 29 having a second flow channel 217 between the inner tube 210 and the outer tube 29. Both the first flow channel 216 and the second flow channel 217 are connected to the water flow channel 27. The cooling assembly introduces external cooling water into the water flow channel 27 inside the electrode holder 26 through the first flow channel 216 of the inner tube 210. During the flow of water within the water flow channel 27, the water can quickly absorb the heat generated during the operation of the electrode head, and then discharge it through the second flow channel 217 between the outer tube 29 and the inner tube 210, forming a continuous circulating cooling system. This design can effectively reduce the temperature of the electrode holder 26 and the electrode head, avoiding degradation of electrode material performance or aging of the connection structure due to long-term high temperatures, while reducing the impact of heat on surrounding components, further improving the working stability and service life of the entire evaporation electrode head structure. In practical applications, the speed and temperature of the cooling water flow can be adjusted according to the heating power of the electrode head to achieve the best cooling effect.

[0042] Based on the above embodiments, the outer tube 29 is made of a conductive material, such as a copper tube, and its end is connected to the electrode head. This design allows the outer tube 29 to serve as a cooling function while also acting as a current conduction path, further optimizing the conductivity of the electrode head. When current is transmitted to the electrode head through the outer tube 29, the direct connection between the outer tube 29 and the electrode head reduces contact resistance during current transmission, thereby reducing energy loss and improving the working efficiency of the electrode head. Furthermore, the conductive outer tube 29 can work synergistically with the water flow channel 27 in the cooling assembly, cooling the electrode head while also promptly dissipating any localized heat generated during current transmission, preventing localized overheating from affecting the stability of current conduction.

[0043] The enclosure has a cooling channel 4, which is connected to the water flow channel 27 to form a cooling circulation system. The coolant, after heat exchange, is discharged from the outlet located in the enclosure. The cooling channel 4 can be designed as a straight channel or a spiral channel structure to guide the flow of coolant, increase the contact area with the inner wall of the enclosure and the heat exchange time, and further improve the overall cooling effect.

[0044] In some embodiments of the present invention, an insulating sleeve 213 is installed between the electrode holder 26 and the base; a retaining ring 214 is provided between the end of the insulating sleeve 213 and the surrounding plate, the retaining ring 214 is sleeved on the outside of the electrode holder 26, and a blocking protrusion 218 is also provided on the outer edge of the insulating sleeve 213. The insulating sleeve 213 is made of high-strength ceramic material, which has excellent insulation performance and high temperature resistance. At the same time, its blocking protrusion 218 can provide double protection for the movable groove 215, effectively isolating impurities in the external environment and preventing them from entering the movable groove 215 and affecting the connection stability between the electrode holder 26 and the base. The retaining ring 214 is made of elastic metal material, its inner side is tightly fitted to the outer side of the electrode holder 26, and its outer side abuts against the inner wall of the surrounding plate. It can not only play an axial positioning role for the insulating sleeve 213, preventing the insulating sleeve 213 from shifting during installation or use, but also fill the gap between the insulating sleeve 213 and the surrounding plate, further enhancing the sealing performance of the overall structure.

[0045] This application also includes at least one evaporator 34, which is suspended above the evaporation boat 2. The evaporator 34 has a blocking portion 35 covering the evaporation area of ​​the evaporation boat 2 to block splashes from the evaporation boat 2. The blocking portion 35 has at least one through-slot 36 for the evaporation material vapor to pass through. The through-slot 36 is offset from the evaporation area along the vertical evaporation direction. During operation, the coating material is heated and evaporated into vapor in the evaporation boat 2. As the vapor moves upward, the splashes generated are intercepted by the blocking portion 35 due to the vertical offset between the through-slot 36 and the evaporation area, while the vapor escapes smoothly through the through-slot 36. This application utilizes the blocking portion 35 to effectively prevent splashes from moving with the vapor and adhering to the substrate surface, forming defects such as bumps and pinholes on the substrate film surface, thereby significantly improving the uniformity and purity of the coating quality. At the same time, the position design of the through-slot 36 is precisely calculated to ensure the smooth passage of vapor to meet the coating efficiency requirements, while maximizing the protective function of the blocking portion 35. This structural design is simple and reliable, and without the need for additional complex control devices, it can effectively solve the coating defects caused by splashes in traditional evaporation sources without affecting the evaporation rate.

[0046] In some embodiments of this application, the evaporator 34 further includes a heating module connected to the baffle 35; the heating module drives the baffle 35 to generate heat to re-evaporate the coating material condensed on the evaporator 34. This heating module can employ resistance heating, induction heating, or other methods, and its heating temperature can be precisely controlled according to the characteristics of the coating material. When some coating material vapor encounters the relatively cool surface of the baffle 35 during evaporation, it easily condenses to form solid deposits. If not handled promptly, this may cause blockage of the channel 36 or affect the thermal stability of the baffle 35. The heating module, by continuously heating the baffle 35, can convert these condensates back into vapor to participate in the coating process, not only avoiding material waste but also keeping the channel 36 unobstructed and ensuring stable vapor flow. Furthermore, the increased temperature of the baffle 35 itself reduces the probability of vapor condensation on its surface, further reducing the potential risk of splashing, thereby maintaining the efficient and stable operation of the evaporation source device during long-term use. This integrated design combines barrier protection with heating and decondensation functions, further optimizing the overall performance of the composite evaporation source device and enabling it to exhibit superior reliability and economy in continuous coating production.

[0047] In some embodiments of this application, the evaporator 34 further includes a temperature measuring module connected to the blocking part 35 to monitor the temperature of the blocking part 35. The temperature measuring module can collect the temperature data of the blocking part 35 in real time and feed it back to the equipment control system, so that the operator can keep abreast of the thermal status of the blocking part 35. When the temperature is detected to be lower than the set threshold, the system can automatically start the heating module to raise the temperature, ensuring that the coating material condensed on the surface of the blocking part 35 continues to evaporate, avoiding material accumulation due to low temperature and affecting the steam passage efficiency; if the temperature exceeds the safe range, the system will issue a warning signal to remind the staff to check and adjust, to prevent damage to the blocking part 35 or affect the evaporation characteristics of the coating material due to overheating, thereby further ensuring the stability and reliability of the entire evaporation coating process.

[0048] In some embodiments of this application, the evaporation boats 2 are arranged in multiple groups along a first direction; the evaporator 34 is a single piece of high-temperature resistant plate or block structure extending along the first direction, or the evaporator 34 is composed of multiple high-temperature resistant plate or block structures spliced ​​together, with its arrangement direction parallel to the first direction. When the substrate passes over the evaporation boats 2, the coating vapor released by a single evaporation boat 2 has a limited coating thickness on the substrate. However, by setting the evaporation boats 2 in multiple groups and arranging them along the first direction, the spacing and number of each group of evaporation boats 2 can be adjusted to flexibly adapt to the coating requirements of substrates with different thicknesses, thereby improving the adaptability of the equipment to diverse production scenarios. The evaporator 34, designed with a single piece of high-temperature resistant plate or block structure extending along the first direction, effectively reduces splicing gaps, minimizes heat loss, and ensures uniform temperature distribution throughout the evaporator 34, thereby guaranteeing the stability of the evaporation rate of the coating material. Furthermore, the evaporator 34, composed of multiple pieces of high-temperature resistant plate or block structure spliced ​​together and arranged parallel to the first direction, facilitates module replacement and maintenance according to actual production needs. When local damage occurs, only the corresponding module needs to be replaced, reducing equipment maintenance costs and downtime.

[0049] Furthermore, the evaporator 34 is made of high-temperature resistant high-purity graphite or other high-temperature resistant materials. Among them, high-temperature resistant high-purity graphite has excellent high-temperature resistance and chemical stability, can maintain structural stability in high-temperature evaporation environment, and is not prone to chemical reaction with coating materials, thus ensuring the purity of coating components. Other high-temperature resistant materials, such as ceramics and tungsten-molybdenum alloys, can be selected according to the characteristics of different coating materials and evaporation temperature requirements to meet diverse coating process needs. At the same time, these materials also have good thermal conductivity, which can quickly and evenly transfer heat, further ensuring the stability and efficiency of the evaporation process.

[0050] In some embodiments of this application, the evaporator 34 is suspended directly above the evaporation boat 2. This suspended arrangement allows the coating vapor generated by the evaporation boat 2 to diffuse more evenly during its ascent, reducing vapor loss and concentration fluctuations in the transport path, thereby ensuring sufficient contact between the lower surface of the substrate and the vapor, and improving the uniformity of the coating.

[0051] Of course, the present invention may have other various embodiments. Without departing from the spirit and essence of the present invention, those skilled in the art can make various corresponding changes and modifications according to the present invention, but these corresponding changes and modifications should all fall within the protection scope of the appended claims.

Claims

1. A vacuum-coated high-efficiency evaporation device, characterized in that, Includes the evaporation chamber and the main roller installed inside the evaporation chamber; At least one evaporation boat is used to evaporate the accepted coating material; each evaporation boat is driven to be heated by a heating assembly; At least one evaporator is correspondingly suspended above the evaporation boat; The evaporator has a blocking section covering the evaporation space of the evaporation boat to block splashes from the evaporation boat; the blocking section has at least one through groove for the vapor of the evaporation material to pass through; the through groove and the evaporation space are offset by a distance perpendicular to the evaporation direction. The evaporator also includes a heating module connected to the baffle section; The heating module drives the blocking part to generate heat to re-evaporate the coating material condensed in the evaporator.

2. The vacuum-coated high-efficiency evaporation device according to claim 1, characterized in that, Several evaporation boats are provided and located below the main roller; the evaporation boats are arranged in two groups side by side and each group of evaporation boats is distributed along the axial direction of the main roller. Multiple cooling elements extend along the axial direction of the main roller and are distributed on both sides of the evaporation space of the evaporation boat to form a spatial structure in which hot and cold alternate in the direction of substrate conveying; the end of each cooling element is provided with a gap from the outer edge of the main roller.

3. The vacuum-coated high-efficiency evaporation device according to claim 2, characterized in that, The plurality of cooling components include: Two enclosure panels are installed on the outside of the two rows of evaporation boats; A partition is placed between two sets of evaporation boats to block the evaporation space of the two rows of evaporation boats; Both the enclosure and the partition are provided with cooling channels; coolant flows in the cooling channels, and the cooling channels are connected to a coolant circulation assembly.

4. The vacuum-coated high-efficiency evaporation device according to claim 1, characterized in that, A base is provided at the bottom of the evaporation space; the heating assembly includes: Positive and negative electrodes are spaced apart; each electrode includes a longitudinally connected electrode head and electrode connection structure, the electrode head is located in the evaporation space above the base, and the electrode connection extends outward through the base; an insulating barrier extending downward is provided outside the electrode head; The positive electrode and the negative electrode are respectively connected to the end of the evaporation boat.

5. The vacuum-coated high-efficiency evaporation device according to claim 4, characterized in that, The base is provided with movable grooves for the positive electrode and / or negative electrode to move away from or towards each other; An elastic reset component is installed in the movable slot to drive the positive electrode and / or negative electrode to reset to the initial position.

6. The vacuum-coated high-efficiency evaporation device according to claim 4, characterized in that, The insulating barrier is fixedly connected to the electrode head, and the outer edge of the insulating barrier is provided with a blocking protrusion for sealing the movable groove during electrode movement.

7. The vacuum-coated high-efficiency evaporation device according to claim 4, characterized in that, A cooling component is provided within the electrode connection structure; the cooling component includes: Water flow channel, located inside the electrode holder; The inner tube has a primary flow channel inside. The outer tube has a second flow channel between the inner tube and the outer tube; both the first flow channel and the second flow channel are connected to the water flow channel.

8. The vacuum-coated high-efficiency evaporation device according to claim 3, characterized in that, The enclosure and partition are configured as a separable lower area component and an upper area component; The upper region component is rotatably connected to the device housing via an extension.

9. The vacuum-coated high-efficiency evaporation device according to claim 3, characterized in that, A cover plate is provided between the evaporation boat and the main roller to block or open the evaporation channel; The enclosure is provided with a through groove for installing a cover plate, which moves along the through groove to block or open the evaporation channel.

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