Opportunity for a person to communicate with a computer

Abstract

The application discloses an OPC software verification method, an OPC software verification device, an electronic device and a storage medium. The method comprises the following steps: obtaining first data, wherein the first data comprises data for establishing an OPC model and a test layout; obtaining reference data and a reference correction program corresponding to reference OPC software and verification data and a verification correction program corresponding to to-be-verified OPC software according to the first data, the reference OPC software and the to-be-verified OPC software; and evaluating a verification result of the to-be-verified OPC software according to the reference data and the reference correction program, the verification data and the verification correction program and a preset evaluation threshold. The application introduces the reference OPC software as a verification standard for verifying the to-be-verified OPC software, so that actual feature sizes can be collected without actual exposure of a photomask when the OPC software is verified, and the verification cost can be effectively reduced. Meanwhile, the OPC software can be verified in advance when the OPC software is verified, and the verification time can be greatly reduced.

Description

Technical Field

[0001] This invention relates to the field of semiconductor manufacturing process technology, and in particular to a method, equipment, electronic device, and storage medium for OPC software verification. Background Technology

[0002] Optical proximity correction (OPC) is a technique used in chip manufacturing to compensate for shape changes that occur during photolithography. Verification of OPC software is crucial to ensuring the accuracy and reliability of chip manufacturing. Furthermore, for economic or policy reasons, it is often necessary to select a secondary source from multiple OPC software vendors.

[0003] When validating OPC software, it typically involves using the OPC software to correct the test layout, then arranging the corrected layout on a photomask, exposing it on a wafer, and collecting actual critical dimension (CD) data. Validation of the software requires analyzing the difference between the actual data and the software's correction target. Because the validation process requires actual data support, it is quite cumbersome. When multiple OPC software options need to be selected, the validation time can be very long, and the validation cost can be very high. Summary of the Invention

[0004] This invention provides an OPC software verification method, OPC software verification device, electronic device, and storage medium to solve the problem that in the prior art, OPC software verification requires a comparison between the actual feature size and the software modification target to verify the software, resulting in excessively long verification time and high verification cost.

[0005] According to a first aspect of the present invention, an OPC software verification method is provided, comprising:

[0006] Obtain first data, wherein the first data includes data for establishing the OPC model and a test layout;

[0007] Based on the first data, the reference OPC software, and the OPC software to be verified, reference data corresponding to the reference OPC software and verification data corresponding to the OPC software to be verified are obtained.

[0008] The verification results of the OPC software to be verified are evaluated based on reference data, data to be verified, and preset evaluation thresholds.

[0009] According to a second aspect of the present invention, an OPC software verification device is provided, comprising:

[0010] The first data acquisition module is used to acquire first data, wherein the first data includes data for establishing the OPC model and a test layout.

[0011] The OPC parameter acquisition module is used to obtain reference data corresponding to the reference OPC software and verification data corresponding to the OPC software to be verified based on the first data, the reference OPC software and the OPC software to be verified.

[0012] The results comparison module is used to evaluate the verification results of the OPC software to be verified based on reference data, data to be verified, and preset evaluation thresholds.

[0013] According to a third aspect of the present invention, an electronic device is provided, comprising: at least one processor, and a memory communicatively connected to the at least one processor, wherein the memory stores instructions executable by the at least one processor, the instructions being executed by the at least one processor to enable the at least one processor to perform the steps of the OPC software verification method of the first aspect described above.

[0014] According to a fourth aspect of the present invention, a storage medium is provided thereon storing a computer program, characterized in that, when the program is executed by a processor, it implements the steps of the OPC software verification method of the first aspect described above.

[0015] The OPC software verification method of this invention introduces a reference OPC software as a verification standard for the OPC software to be verified. This eliminates the need for actual exposure of a photomask to collect actual feature dimensions during OPC software verification, effectively reducing verification costs compared to traditional OPC software verification methods. Furthermore, OPC software can be verified in advance, eliminating the need to compare actual feature dimensions with the OPC software's correction targets during verification, significantly reducing verification time. When using the reference OPC software to verify the OPC software to be verified, the model built using the reference OPC software can be compared with the OPC results. Verification can be performed on the OPC software from several dimensions, including model fitting error, model performance differences, correction errors, and correction runtime, thereby ensuring the accuracy and effectiveness of OPC software verification. Attached Figure Description

[0016] To more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings used in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0017] Figure 1This is a flowchart of an OPC software verification method according to an embodiment of the present invention;

[0018] Figure 2 This is a flowchart of step S13 in an OPC software verification method according to an embodiment of the present invention.

[0019] Figure 3 This is a flowchart of step S25 in an OPC software verification method according to an embodiment of the present invention.

[0020] Figure 4 This is a block diagram illustrating the principle of OPC software verification according to an embodiment of the present invention.

[0021] Figure 5 This is a schematic diagram of the structure of an embodiment of the electronic device of the present invention. Detailed Implementation

[0022] To make the objectives, technical solutions, and advantages of the embodiments of the present invention clearer, the technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0023] It should be noted that, unless otherwise specified, the embodiments and features described in this application can be combined with each other.

[0024] This invention can be described in the general context of computer-executable instructions, such as program modules, that are executed by a computer. Generally, program modules include routines, programs, objects, elements, data structures, etc., that perform a specific task or implement a specific abstract data type. This invention can also be practiced in distributed computing environments where tasks are performed by remote processing devices connected via a communication network. In distributed computing environments, program modules can reside in local and remote computer storage media, including storage devices.

[0025] In this invention, terms such as "module," "device," and "system" refer to relevant entities applied to a computer, such as hardware, combinations of hardware and software, software, or software in execution. More specifically, for example, an element can be, but is not limited to, a process running on a processor, a processor, an object, an executable element, an execution thread, a program, and / or a computer. Furthermore, an application program or script running on a server, and the server itself, can also be an element. One or more elements may be in an execution process and / or thread, and elements may be localized on a single computer and / or distributed across two or more computers, and may be run on various computer-readable media. Elements can also communicate via local and / or remote processes based on signals having one or more data packets, for example, signals from data interacting with another element in a local system, a distributed system, and / or interacting with other systems via signals over a network of the Internet.

[0026] Finally, it should be noted that in this document, relational terms such as "first" and "second" are used only to distinguish one entity or operation from another, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Furthermore, the terms "comprising" or "including" include not only those elements but also other elements not expressly listed, or elements inherent to such a process, method, article, or apparatus. Unless otherwise specified, an element defined by the phrase "comprising..." does not exclude the presence of other identical elements in the process, method, article, or apparatus that includes said element.

[0027] The purpose of the OPC software verification method of the present invention is to enable low-cost and rapid verification and screening of OPC software used as a secondary source. Before performing the OPC software verification method of the present invention, the OPC software to be verified can be pre-verified, such as by inputting existing actual data into the OPC software to be verified, establishing an OPC model, performing OPC on the layout, so as to convert the model information, the expected OPC direction and the final OPC result into the parameters of the OPC software, forming a recipe, confirming the operation of the OPC software to be verified, and facilitating the acquisition of parameters used in subsequent verification.

[0028] The present invention will now be described in further detail with reference to the accompanying drawings.

[0029] Figure 1 The flowchart of an OPC software verification method according to an embodiment of the present invention is illustrated schematically. (Refer to...) Figure 1 As shown, the OPC software verification method of the present invention specifically includes the following steps:

[0030] Step S11: Obtain first data, wherein the first data includes data for establishing the OPC model and a test layout;

[0031] Step S12: Based on the first data, the reference OPC software, and the OPC software to be verified, obtain the reference data corresponding to the reference OPC software and the verification data corresponding to the OPC software to be verified.

[0032] Step S13: Evaluate the verification results of the OPC software to be verified based on the reference data, the data to be verified, and the preset evaluation threshold.

[0033] In step S11, the first step is to acquire the first data. This first data is used to input into the OPC software for simulation. Specifically, the first data may include data for building the OPC model and a test layout, thus providing the OPC software with the corresponding data parameters for building the OPC model and performing simulation corrections on the test layout. The data for building the OPC model may include wafer measurement data necessary for constructing the OPC model, such as wafer critical dimension measurement data, wafer eccentricity and wobble measurement data, etc. This data can be designed based on previously used wafer measurement data or according to the actual application scenario. The test layout is a specific set of patterns used to verify and calibrate the OPC model. It includes patterns with varying linewidths and periods, independent patterns in dark and bright fields, discontinuous patterns in dark and bright fields, and adjacent configurations of lines with different orientations. Specific patterns can be designed according to the actual application scenario and will not be elaborated here.

[0034] After obtaining the first data, step S12 can be executed. Based on the first data, the reference OPC software, and the OPC software to be verified, reference data corresponding to the reference OPC software and verification data corresponding to the OPC software to be verified are obtained. This allows for simulation of both the reference OPC model and the OPC model to be verified using the same simulation data, enabling a comparison of their simulation results. This comparison determines the performance of the OPC software to be verified and the reference OPC software in various dimensions of optical proximity effect correction, thus achieving the verification of the OPC software to be verified.

[0035] Specifically, in some possible implementations, the reference data and the data to be verified obtained in step S12 both include data on the OPC software when performing optical proximity effect correction in the following dimensions: 1. Model fitting error when establishing the OPC model using the corresponding OPC model; 2. Simulation profile after simulating the same corrected layout using the corresponding OPC software; 3. Correction error of the corrected layout obtained after correcting the test layout using the corresponding OPC software; 4. Running time for simulating the test layout using the corresponding OPC model.

[0036] Model fitting error refers to the deviation between the photoresist CD size predicted by the OPC model and the actual measured value of the photoresist on the wafer. This is because the model cannot accurately predict the actual photoresist imaging result, and there will be some error in photoresist measurement. Model fitting error can be obtained from the data exported from the OPC software. Simulation profile is the graphic profile obtained by simulating the corrected layout using the OPC software. Correction error is the deviation between the image profile of the corrected layout and the desired target pattern. This error detection is integrated into the OPC software. The detection process roughly involves setting detection points at various points of the desired target pattern and calculating the deviation between the image profile and the desired target pattern at the detection points. Correction error can be obtained by first simulating and correcting the layout using the OPC software, then simulating the corrected layout to obtain the graphic profile, and finally detecting the correction error on the graphic profile. Specific detection methods can be found in relevant descriptions in existing technologies; this part will not be elaborated here. Running time refers to the time taken by the OPC software to perform complete OPC processing. The runtime can also be obtained from the data exported by the OPC software after completing the entire OPC process.

[0037] It is understandable that the model fitting error, correction error, and runtime in the aforementioned reference data and the data to be verified can all be obtained by performing OPC processing only twice. Specifically, when using OPC software for OPC processing, an OPC model is first constructed based on the initial data. Then, the OPC model is used to correct the test layout. Finally, the corrected layout is simulated to obtain the simulation profile. Throughout this process, the model fitting error of the OPC software is generated. After the simulation is completed, the correction error can be detected on the simulation profile to obtain the correction error. Simultaneously, the runtime can be obtained after the entire OPC processing is completed.

[0038] For the simulation profiles in the reference data and the data to be verified, since it is necessary to compare the simulation profiles of the reference OPC software with those of the OPC software to be verified, both simulation profiles need to be obtained by simulating the same modified layout. This modified layout can be obtained by modifying the test layout using the reference OPC software, or it can be obtained by modifying the test layout using the OPC software to be verified. In this embodiment, the modified layout obtained by modifying the test layout using the OPC software to be verified is specifically used.

[0039] After obtaining the aforementioned reference data and data to be verified, step S13 can be executed to compare the reference data and data to be verified with the preset evaluation threshold in order to verify the OPC software to be verified.

[0040] Figure 2 The illustration schematically demonstrates the specific method flow of step S13 in the OPC software verification method according to an embodiment of the present invention. In this embodiment, the reference data and the data to be verified obtained in step S12 both include the model fitting error when the corresponding OPC software establishes the OPC model, the corrected layout after simulation correction of the test layout using the corresponding OPC software, the correction error of the corrected layout obtained after simulation correction of the test layout using the corresponding OPC software, and the running time of simulation correction of the test layout using the corresponding OPC software. (Refer to...) Figure 2 As shown, in Figure 2 The method flow shown can be specifically implemented by including the following steps:

[0041] Step S21: Obtain the first comparison result based on the model fitting error of the reference data and the data to be verified;

[0042] Step S22: Obtain the second comparison result based on the corrected layout of the reference data and the data to be verified;

[0043] Step S23: Based on the correction errors of the reference data and the data to be verified, obtain the third comparison result;

[0044] Step S24: Based on the running time of the reference data and the data to be verified, obtain the fourth comparison result;

[0045] Step S25: Determine the verification result of the OPC software to be verified based on the first comparison result, the second comparison result, the third comparison result, the fourth comparison result, and the preset evaluation threshold.

[0046] It should be noted that steps S21 to S24 involve comparing the reference data obtained after simulation correction of the reference OPC software with the reference data obtained after simulation correction of the OPC software to be verified in various dimensions. The order of the steps in S21 to S24 can be arbitrarily changed without affecting the final verification result. After comparing the reference data obtained after simulation correction of the reference OPC software according to steps S21 to S24 with the reference data obtained after simulation correction of the OPC software to be verified in various dimensions, step S25 can be used to compare each comparison result with the preset evaluation threshold to obtain the overall verification result of the OPC software to be verified.

[0047] Specifically, step S21 involves comparing the model fitting errors of the reference data and the data to be verified. The model fitting error can be corrected through simulation using OPC software, meaning the model fitting error during simulation correction can be obtained from the corresponding OPC software. When comparing the model fitting errors of the reference data and the data to be verified, the difference between the model fitting errors of the reference data and the data to be verified can be calculated first. Then, the proportion of this difference within a pre-defined error range can be calculated as the first comparison result used to evaluate the accuracy of the model fitting error of the OPC software to be verified.

[0048] Specifically, step S22 involves comparing the simulation profiles of the reference data and the data to be verified. When comparing the simulation profiles of the reference data and the data to be verified, an overlay analysis can be performed on the two simulation profiles, and the profile difference between the two simulation profiles can be calculated using OPC software. This difference serves as a second comparison result for evaluating the simulation accuracy of the OPC software to be verified.

[0049] Specifically, step S23 involves comparing the correction errors of the reference data and the data to be verified. When comparing the correction errors of the reference data and the data to be verified, the difference between their correction errors can be calculated as a third comparison result used to evaluate the simulation accuracy of the OPC software to be verified.

[0050] Specifically, step S24 involves comparing the runtime of the reference data and the data to be verified. When comparing the runtime of the reference data and the data to be verified, the difference between their runtimes can be calculated first. Then, the ratio of this difference to the runtime of the reference data is calculated as a benchmark, serving as the fourth comparison result for evaluating the efficiency of the OPC software to be verified. It should be noted that the difference obtained when calculating the runtime of the reference data and the data to be verified must retain its sign. A positive difference indicates that the runtime of the OPC software to be verified is longer than that of the reference OPC software; a negative difference indicates that the runtime of the OPC software to be verified is shorter than that of the reference OPC software.

[0051] Finally, through steps S21 to S24, comparison results were obtained for the reference OPC software and the OPC software to be verified in four dimensions: model fitting error, simulation profile, correction error, and correction runtime. Then, step S25 is executed to evaluate the verification results of the OPC software to be verified based on the first comparison result, the second comparison result, the third comparison result, the fourth comparison result, and a preset evaluation threshold. The preset evaluation threshold is used to evaluate whether the OPC software to be verified meets the minimum requirements.

[0052] As some possible implementations, the preset evaluation thresholds may include a first evaluation threshold corresponding to the difference ratio with the model fitting error, a second evaluation threshold corresponding to the difference between the simulation profile and various points, a third evaluation threshold corresponding to the difference with the correction error, and a fourth evaluation threshold corresponding to the difference ratio with the runtime. For example, the first evaluation threshold may be set to 10%. That is, if the value of the first comparison result is greater than 10%, the OPC software to be verified is considered unsatisfactory. If the value of the first comparison result is less than 10%, the smaller the value of the first comparison result, the better the performance of the OPC software to be verified in that aspect. The second evaluation threshold may be set to 5nm. That is, if the value of the second comparison result is greater than 5nm, the OPC software to be verified is considered unsatisfactory. If the value of the second comparison result is less than 5nm, the smaller the value of the second comparison result, the better the performance of the OPC software to be verified in that aspect. The third evaluation threshold may be set to 2nm. That is, if the value of the third comparison result is greater than 2nm, the OPC software to be verified is considered unsatisfactory. If the value of the third comparison result is less than 2nm, the smaller the value of the third comparison result, the better the performance of the OPC software to be verified in that aspect. The fourth evaluation threshold can be set to 20%. That is, if the value of the fourth comparison result is greater than 20%, the OPC software to be verified is considered to fail to meet the requirements. If the value of the fourth comparison result is less than 20%, the smaller the value of the fourth comparison result, the better the performance of the OPC software to be verified in this aspect.

[0053] In some other possible implementations, when comparing the first comparison result, second comparison result, third comparison result, and fourth comparison result with preset evaluation thresholds, the OPC software to be verified can be scored according to the comparison relationship between each comparison result and each evaluation threshold. For example, taking the first comparison result as an example, when the first comparison result is less than the first evaluation threshold, the first comparison result is scored according to its value to obtain a first score. When scoring the first comparison result based on its value, the smaller the value of the first comparison result, the higher the corresponding first score. The specific score can be designed according to the actual situation. For example, in this embodiment, it is necessary to score the comparison results of four dimensions, and the total score can be set to 100 points, with each comparison result accounting for 25 points, and further scores can be set for each comparison result. For example, the comparison results can be scored according to a ratio, or the score of the comparison result can be set higher according to certain specific situations. The specific settings can be based on actual needs, and will not be listed in detail here.

[0054] Figure 3 The flowchart of step S25 in the OPC software verification method according to an embodiment of the present invention is illustrated schematically. (Refer to...) Figure 3 As shown, this method can be specifically implemented by including the following steps:

[0055] Step S31: When the first comparison result is not higher than the first evaluation threshold, determine the first score based on the first comparison result and the first evaluation threshold;

[0056] Step S32: When the second comparison result is not higher than the second evaluation threshold, determine the second score based on the second comparison result and the second evaluation threshold;

[0057] Step S33: When the third comparison result is not higher than the third evaluation threshold, determine the third score based on the third comparison result and the third evaluation threshold;

[0058] Step S34: When the fourth comparison result is not higher than the fourth evaluation threshold, determine the fourth score based on the fourth comparison result and the fourth evaluation threshold;

[0059] Step S35: Determine the total score of the OPC software to be verified based on the first score, the second score, the third score, and the fourth score, and use this score as the verification result of the OPC software to be verified.

[0060] Steps S31 to S34 are respectively steps for obtaining the first score corresponding to the first comparison result, the second score corresponding to the second comparison result, the third score corresponding to the third comparison result, and the fourth score corresponding to the fourth comparison result. It is understood that the order of steps S31 to S34 can be reversed in the overall process, and the order of the steps will not affect the final verification result. After obtaining the first, second, third, and fourth scores, step S35 can be executed to calculate the total score, which serves as the verification result for the OPC software to be verified.

[0061] The OPC software verification method of this invention introduces a reference OPC software as a verification standard for the OPC software to be verified. This eliminates the need for actual exposure and feature size collection during OPC software verification, effectively reducing verification costs compared to traditional OPC software verification methods. Furthermore, OPC software can be verified in advance, eliminating the need to compare actual feature sizes with the OPC software's correction targets during verification, significantly reducing verification time. When using the reference OPC software to verify the OPC software to be verified, the model built with the OPC software can be compared with the OPC results. Verification can be performed on the OPC software from several dimensions, including model fitting error, model performance differences, correction errors, and correction runtime, ensuring the accuracy and effectiveness of OPC software verification.

[0062] Figure 4 The diagram schematically illustrates an OPC software verification device according to an embodiment of the present invention, such as... Figure 4 As shown, the OPC software verification device includes:

[0063] First data acquisition module 1 is used to acquire first data, wherein the first data includes data for establishing an OPC model and a test layout;

[0064] OPC parameter acquisition module 2 is used to obtain reference data and reference correction program corresponding to the reference OPC software, and verification data and verification correction program corresponding to the OPC software to be verified, based on the first data, the reference OPC software and the OPC software to be verified.

[0065] Result Comparison Module 3 is used to evaluate the verification results of the OPC software to be verified based on reference data and reference correction program, data to be verified and correction program to be verified, and preset evaluation thresholds.

[0066] It should be noted that the implementation process and principle of the OPC software verification device in this embodiment of the invention can be specifically referred to in the corresponding descriptions of the above method embodiments, such as the descriptions of the acquisition of OPC software data of various dimensions, the comparison of data of various dimensions, and the evaluation methods in the method embodiments, and therefore will not be repeated here. For example, the OPC software verification device in this embodiment of the invention can be any intelligent device with a processor, including but not limited to computers, smartphones, personal computers, robots, cloud servers, etc.

[0067] In some embodiments, the present invention provides a non-volatile computer-readable storage medium storing one or more programs including execution instructions, which can be read and executed by electronic devices (including but not limited to computers, servers, or network devices) to perform the OPC software verification method of any of the above embodiments of the present invention.

[0068] In some embodiments, the present invention also provides a computer program product, the computer program product including a computer program stored on a non-volatile computer-readable storage medium, the computer program including program instructions, which, when executed by a computer, cause the computer to perform the OPC software verification method of any of the above embodiments.

[0069] In some embodiments, the present invention also provides an electronic device comprising: at least one processor, and a memory communicatively connected to the at least one processor, wherein the memory stores instructions executable by the at least one processor, the instructions being executed by the at least one processor to enable the at least one processor to perform the OPC software verification method of any of the above embodiments.

[0070] In some embodiments, the present invention also provides a storage medium storing a computer program thereon, characterized in that the program, when executed by a processor, implements the OPC software verification method of any of the above embodiments.

[0071] Figure 5 This is a schematic diagram of the hardware structure of an electronic device for executing the OPC software verification method according to another embodiment of this application, as shown below. Figure 5 As shown, the device includes:

[0072] One or more processors 610 and memory 620, Figure 5 Take the 610 processor as an example.

[0073] The device for performing the OPC software verification method may further include an input device 630 and an output device 640.

[0074] The processor 610, memory 620, input device 630, and output device 640 can be connected via a bus or other means. Figure 5 Taking the example of a connection between China and Israel via a bus.

[0075] The memory 620, as a non-volatile computer-readable storage medium, can be used to store non-volatile software programs, non-volatile computer-executable programs, and modules, such as the program instructions / modules corresponding to the OPC software verification method in the embodiments of this application. The processor 610 executes various functional applications and data processing of the server by running the non-volatile software programs, instructions, and modules stored in the memory 620, thereby realizing the full-coverage path planning method of the above method embodiments.

[0076] The memory 620 may include a program storage area and a data storage area. The program storage area may store the operating system and applications required for at least one function; the data storage area may store data created according to the use of the OPC software verification method, etc. Furthermore, the memory 620 may include high-speed random access memory and may also include non-volatile memory, such as at least one disk storage device, flash memory device, or other non-volatile solid-state storage device. In some embodiments, the memory 620 may optionally include memory remotely located relative to the processor 610, and these remote memories can be connected to the electronic device via a network. Examples of such networks include, but are not limited to, the Internet, corporate intranets, local area networks, mobile communication networks, and combinations thereof.

[0077] Input device 630 can receive input digital or character information and generate signals related to user settings and function control of the image processing device. Output device 640 may include a display device such as a display screen.

[0078] The one or more modules are stored in the memory 620, and when executed by the one or more processors 610, they execute the OPC software verification method in any of the above method embodiments.

[0079] The above-described product can perform the methods provided in the embodiments of this application, and has the corresponding functional modules and beneficial effects for performing the methods. Technical details not described in detail in this embodiment can be found in the methods provided in the embodiments of this application.

[0080] The electronic devices in this application embodiments exist in various forms, including but not limited to:

[0081] (1) Mobile communication devices: These devices are characterized by their mobile communication capabilities and primarily aim to provide voice and data communication. These terminals include: smartphones (e.g., iPhones), multimedia phones, feature phones, and low-end phones, etc.

[0082] (2) Ultra-mobile personal computer devices: These devices fall under the category of personal computers, possessing computing and processing capabilities, and generally also have mobile internet access features. These terminals include PDAs, MIDs, and UMPCs, such as the iPad.

[0083] (3) Portable entertainment devices: These devices can display and play multimedia content. This category includes audio and video players (such as iPods), handheld game consoles, e-book readers, as well as smart toys and portable car navigation devices.

[0084] (4) Server: A device that provides computing services. The components of a server include a processor, hard disk, memory, system bus, etc. Servers are similar to general computer architectures, but because they need to provide highly reliable services, they have higher requirements in terms of processing power, stability, reliability, security, scalability, and manageability.

[0085] (5) Other electronic devices with data interaction functions.

[0086] The device embodiments described above are merely illustrative. The units described as separate components may or may not be physically separate. The components shown as units may or may not be physical units; that is, they may be located in one place or distributed across multiple network units. Some or all of the modules can be selected to achieve the purpose of this embodiment according to actual needs.

[0087] Through the above description of the embodiments, those skilled in the art can clearly understand that each embodiment can be implemented using software plus a general-purpose hardware platform, or of course, using hardware. Based on this understanding, the above technical solutions, in essence or the parts that contribute to the related technology, can be embodied in the form of a software product. This computer software product can be stored in a computer-readable storage medium, such as ROM / RAM, magnetic disk, optical disk, etc., and includes several instructions to cause a computer device (which may be a personal computer, server, or network device, etc.) to execute the methods described in the various embodiments or some parts of the embodiments.

[0088] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of this application, and are not intended to limit them. Although this application has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some of the technical features. Such modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the spirit and scope of the technical solutions of the embodiments of this application.

Claims

1. An OPC software verification method, characterized in that, include: Obtain first data, wherein the first data includes data for establishing the OPC model and a test layout; Based on the first data, the reference OPC software, and the OPC software to be verified, reference data corresponding to the reference OPC software and verification data corresponding to the OPC software to be verified are obtained. The verification results of the OPC software to be verified are evaluated based on reference data, data to be verified, and preset evaluation thresholds.

2. The method according to claim 1, characterized in that, The reference data and the data to be verified both include the model fitting error when building the OPC model using the corresponding OPC software, the simulation profile after simulating the same modified layout using the corresponding OPC software, the correction error of the modified layout obtained after correcting the test layout using the corresponding OPC software, and the running time for simulating and correcting the test layout using the corresponding OPC software. The verification results of the OPC software to be verified are evaluated based on reference data, data to be verified, and preset evaluation thresholds, including: Based on the model fitting error between the reference data and the data to be verified, the first comparison result is obtained; The second comparison result is obtained based on the revised layout of the reference data and the data to be verified; Based on the correction errors of the reference data and the data to be verified, the third comparison result is obtained; The fourth comparison result is obtained based on the running time of the reference data and the data to be verified; Based on the first comparison result, the second comparison result, the third comparison result, the fourth comparison result, and the preset evaluation threshold, the verification result of the OPC software to be verified is determined.

3. The method according to claim 2, characterized in that, The first comparison result is obtained based on the model fitting error between the reference data and the data to be verified, including: The difference between the model fitting error of the reference data and the model fitting error of the data to be verified is calculated, and the proportion of the difference within the set error range is calculated to form the first comparison result.

4. The method according to claim 2, characterized in that, The second comparison result is obtained from the corrected layout based on the reference data and the data to be verified, including: The differences between the simulation profile of the reference data and the simulation profile of the data to be verified are determined at various points to form a second comparison result.

5. The method according to claim 2, characterized in that, The third comparison result, obtained by correcting errors based on the reference data and the data to be verified, includes: The difference between the correction error of the reference data and the correction error of the data to be verified is determined to form a third comparison result.

6. The method according to claim 2, characterized in that, The fourth comparison result, obtained based on the running time of the reference data and the data to be verified, includes: Determine the ratio of the difference between the runtime of the reference data and the runtime of the data to be verified to form the fourth comparison result.

7. The method according to claim 2, characterized in that, The evaluation thresholds include a first evaluation threshold corresponding to the difference ratio with the model fitting error, a second evaluation threshold corresponding to the difference between each point on the simulation profile, a third evaluation threshold corresponding to the difference with the correction error, and a fourth evaluation threshold corresponding to the difference ratio with the running time. The step of determining the verification result of the OPC software to be verified based on the first comparison result, the second comparison result, the third comparison result, the fourth comparison result, and a preset evaluation threshold includes: When the first comparison result is not higher than the first evaluation threshold, the first score is determined based on the first comparison result and the first evaluation threshold; When the second comparison result is not higher than the second evaluation threshold, the second score is determined based on the second comparison result and the second evaluation threshold. When the third comparison result is not higher than the third evaluation threshold, the third score is determined based on the third comparison result and the third evaluation threshold. When the fourth comparison result is not higher than the fourth evaluation threshold, the fourth score is determined based on the fourth comparison result and the fourth evaluation threshold. The total score of the OPC software to be verified is determined based on the first, second, third, and fourth scores, and this score serves as the verification result for the OPC software.

8. An OPC software verification device, characterized in that, include: The first data acquisition module is used to acquire first data, wherein the first data includes data for establishing the OPC model and a test layout. The OPC parameter acquisition module is used to obtain reference data corresponding to the reference OPC software and verification data corresponding to the OPC software to be verified based on the first data, the reference OPC software and the OPC software to be verified. The results comparison module is used to evaluate the verification results of the OPC software to be verified based on reference data, data to be verified, and preset evaluation thresholds.

9. An electronic device, characterized in that, include: At least one processor, and a memory communicatively connected to the at least one processor, wherein the memory stores instructions executable by the at least one processor to enable the at least one processor to perform the steps of the method according to any one of claims 1-7.

10. A storage medium having a computer program stored thereon, characterized in that, When executed by a processor, the program implements the steps of the method described in any one of claims 1-7.

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