Calibration method, device and equipment of linear array scanning imaging and storage medium
By combining linear solution and nonlinear optimization methods, introducing solution quality evaluation index and joint iterative optimization, the problem of insufficient calibration accuracy of linear array scanning imaging systems in nanoscale detection scenarios is solved, and high-precision and stable calibration results are achieved.
CN122415753APending Publication Date: 2026-07-17GUANGDONG SOLUDA TECHNOLOGY CO LTD
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Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- GUANGDONG SOLUDA TECHNOLOGY CO LTD
- Filing Date
- 2026-06-15
- Publication Date
- 2026-07-17
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Figure CN122415753A_ABST
Abstract
本发明提供一种线阵扫描成像的标定方法、装置、设备及存储介质，通过引入解质量评价指标对标定结果的可靠性进行评估，并根据评估结果自适应地选择线性求解或非线性优化路径，从而在标定图像质量良好时保持线性算法的高效性，在非理想条件下自动切换至非线性优化，确保标定解始终稳定收敛。同时，该方法将线扫模式标定结果反馈至面阵模式标定过程，实现面阵标定与线扫标定的联合迭代优化，打破了传统方法中两个标定阶段相互独立的局限，使得线扫方向像元数量不足的天然缺陷得到有效补偿。最终，在满足预设收敛条件时输出高精度标定结果，显著提升了线阵扫描成像系统在纳米级检测场景下的标定鲁棒性与精度。
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