Dual-probe tunneling electron beam transmission detection device and alignment and transmission detection method

By using a dual-probe tunneling electron beam transmission detection device, the transmission imaging and three-dimensional morphology reconstruction of the internal structure of nanoscale materials are achieved by utilizing the on-off state changes of the tunneling current. This solves the problems of sample conductivity and physical contact in STM technology and realizes high-precision three-dimensional spatial detection.

CN122449162APending Publication Date: 2026-07-24YANGZHOU UNIV
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Patent Information

Application Number
CN202610851046.7
Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
Filing Date
2026-06-12
Publication Date
2026-07-24

AI Technical Summary

Technical Problem

Existing scanning tunneling microscopy (STM) technology cannot achieve transmission detection of the internal structure of materials. It is limited by the requirements of sample conductivity, physical contact between the probe and the sample, uncontrollable tunneling electron beam, and single signal usage, and cannot perform active scanning detection in three-dimensional space.

Method used

A dual-probe tunneling electron beam transmission detection device is used. By symmetrically arranging the first and second probe assemblies, a tunneling electron beam is generated using a bias power supply, and the on-off state change of the tunneling current is detected by a current detector, so as to realize transmission imaging and three-dimensional morphology reconstruction of nanoscale material structures.

Benefits of technology

It enables transmission detection of the internal structure of materials at the nanoscale with a spatial resolution of up to 0.01 nm. It is suitable for insulating samples, avoids physical contact damage, and can reconstruct the complete three-dimensional morphology.

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Abstract

The application discloses a double-probe tunneling electron beam transmission detection device and an alignment and transmission detection method in the field of nano detection technology, which comprises a bottom plate, a first probe assembly and a second probe assembly are symmetrically arranged on the bottom plate, and a sample conveying mechanism is arranged between the two probe assemblies; the first probe assembly comprises a first nano probe with a first tip; the second probe assembly comprises a second nano probe with a second tip, the second tip is arranged opposite to the first tip, and a tunneling gap is formed between the two tips; a bias power supply is connected between the first nano probe and the second nano probe, and is used for applying a bias between the two probes to generate a tunneling electron beam in the tunneling gap; the device can be used for transmission imaging, cross-section profile measurement and three-dimensional topography reconstruction of nano-scale material structures, and can also be used for measuring tunneling electron characteristics in basic physical research, alignment locking is realized by searching for a maximum value of a tunneling current through XY plane scanning, and the tips of the two probes are accurately aligned in the nano scale.
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