Double-probe tunneling electron beam transmission detection device and alignment and transmission detection method

By using a dual-probe tunneling electron beam transmission detection device, the transmission imaging and three-dimensional morphology reconstruction of the internal structure of nanoscale materials are achieved by utilizing the on-off state changes of the tunneling current. This solves the problems of sample conductivity and physical contact in STM technology and realizes high-precision three-dimensional spatial detection.

CN122449162APending Publication Date: 2026-07-24YANGZHOU UNIV
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Patent Information

Application Number
CN202610851046.7
Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
Filing Date
2026-06-12
Publication Date
2026-07-24

AI Technical Summary

Technical Problem

Existing scanning tunneling microscopy (STM) technology cannot achieve transmission detection of the internal structure of materials. It is limited by the requirements of sample conductivity, physical contact between the probe and the sample, uncontrollable tunneling electron beam, and single signal usage, and cannot perform active scanning detection in three-dimensional space.

Method used

A dual-probe tunneling electron beam transmission detection device is used. By symmetrically arranging the first and second probe assemblies, a tunneling electron beam is generated using a bias power supply, and the on-off state change of the tunneling current is detected by a current detector, so as to realize transmission imaging and three-dimensional morphology reconstruction of nanoscale material structures.

Benefits of technology

It enables transmission detection of the internal structure of materials at the nanoscale with a spatial resolution of up to 0.01 nm. It is suitable for insulating samples, avoids physical contact damage, and can reconstruct the complete three-dimensional morphology.

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Abstract

The invention discloses a double-probe tunneling electron beam transmission detection device and an alignment and transmission detection method in the technical field of nanometer detection, and the device comprises a bottom plate, a first probe assembly and a second probe assembly are symmetrically arranged on the bottom plate, and a sample conveying mechanism is arranged between the two groups of probe assemblies; the first probe assembly includes a first nanoprobe having a first tip; the second probe assembly comprises a second nanoprobe and is provided with a second tip, the second tip and the first tip are oppositely arranged, and a tunneling gap is formed between the second tip and the first tip; a bias power supply is connected between the first nanoprobe and the second nanoprobe and is used for applying bias voltage between the two probes so as to generate a tunneling electron beam in the tunneling gap; the device can be used for transmission imaging, cross section profile measurement and three-dimensional shape reconstruction of a nanoscale material structure, can also be used for measurement of tunneling electronic characteristics in basic physical research, searches a tunneling current maximum value through XY plane scanning to realize alignment locking, and ensures that the tips of the two probes are accurately centered at the nanoscale.
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