A partitioned ultra-high temperature fluid electric heater based on carbon-carbon composite and a heating method thereof

Abstract

The application discloses a partition type superhigh-temperature fluid electric heater based on carbon-carbon composite material and a heating method thereof, which comprises a heater shell, a partition type heating assembly, an electrode energization assembly and a temperature reduction and cooling assembly; the partition type heating assembly is installed inside the heater shell and is divided into at least two independent heating areas along the medium flow direction; the electrode energization assembly is arranged on the heater shell and is electrically connected with the heating pipe; the temperature reduction and cooling assembly is arranged on the heater shell at a position corresponding to the electrode energization assembly; the carbon-carbon composite material is adopted as the high-temperature section heating pipe material, so that the long-term working temperature of the heating pipe reaches 1600 DEG C or above, the temperature resistance bottleneck of 1000 DEG C of the traditional metal heating element is completely broken through, the extreme temperature process requirements of advanced ceramic sintering, superhigh-temperature heat treatment and the like are met, and the application range of the superhigh-temperature electric heater is widened.

Description

Technical Field

[0001] This invention belongs to the technical field of ultra-high temperature fluid electric heating equipment, specifically relating to a partitioned ultra-high temperature fluid electric heater based on carbon-carbon composite material and its heating method. Background Technology

[0002] 1000℃-class ultra-high temperature fluid electric heaters are mainly used in fields with stringent requirements for temperature, purity, and control precision, such as semiconductor and integrated circuit manufacturing, advanced materials research and development, aerospace testing, and high-end chemical production. Existing ultra-high temperature fluid electric heaters mostly use metal resistance elements as heating elements. Current flows through metal heating elements such as molybdenum, tungsten, or high-temperature alloys to generate Joule heat. Fluid heating is achieved through infrared thermal radiation and forced convection. Multi-layer insulation structure and PID temperature control system ensure temperature stability.

[0003] However, existing metal heating elements have obvious technical bottlenecks: commonly used metal materials such as stainless steel, iron-chromium-aluminum, and nickel-chromium alloys have limited melting points and are prone to softening, oxidation, and creep deformation under operating conditions above 1000℃, which directly limits the upper limit of the operating temperature, power density, and long-term reliability of heating equipment. In particular, when the heating medium is oxygen-containing gas such as air, the above problems are particularly prominent. To address this, we propose a partitioned ultra-high temperature fluid electric heater based on carbon-carbon composite materials and its heating method. Summary of the Invention

[0004] The purpose of this invention is to provide a partitioned ultra-high temperature fluid electric heater based on carbon-carbon composite material and its heating method, so as to solve the problems mentioned in the background art.

[0005] To achieve the above objectives, the present invention provides the following technical solution: a partitioned ultra-high temperature fluid electric heater based on carbon-carbon composite material, comprising a heater shell, a partitioned heating component, an electrode energizing component, and a cooling component;

[0006] The heater housing has a medium inlet and a medium outlet at both ends. The partitioned heating assembly is installed inside the heater housing and is divided into at least two independent heating zones along the medium flow direction. The heating tube in the low-temperature heating zone along the medium flow direction is made of metal material, and the heating tube in the high-temperature heating zone is made of carbon-carbon composite material.

[0007] The electrode energizing assembly is disposed on the heater housing and electrically connected to the heating tube. The cooling assembly is disposed on the heater housing at the position corresponding to the electrode energizing assembly and is used to cool the electrode energizing assembly.

[0008] Furthermore, the partitioned heating assembly is divided into a primary heating zone, a secondary heating zone, and a tertiary heating zone along the direction of medium flow, with adjacent heating zones separated by tube sheets.

[0009] Furthermore, the heating tubes in the primary heating area are made of conventional metal materials, the heating tubes in the secondary heating area are made of high-temperature resistant metal materials or non-metal materials, and the heating tubes in the tertiary heating area are made of carbon-carbon composite materials.

[0010] Furthermore, the electrode energizing assembly includes an electrode, a lead-out electrode, an insulating ceramic, and a pull rod; the electrode is fixedly mounted on the tube sheet via the insulating ceramic and electrically connected to the heating tube; the lead-out electrode leads the electrode out to the outside of the heater housing; and the pull rod securely connects the tube sheet to the heater housing.

[0011] Furthermore, the cooling component is an electrode cooling module, which has a cooling chamber inside. The cooling chamber is filled with electrode coolant, which surrounds the electrode and the lead-out electrode.

[0012] Furthermore, it also includes high-precision thermocouples and a PID control system; the high-precision thermocouples are installed in the primary heating zone, the secondary heating zone and the tertiary heating zone to monitor the temperature of each heating zone in real time; the PID control system is connected to the high-precision thermocouple signal to dynamically adjust the heating power of each heating zone according to the temperature signal.

[0013] Furthermore, the heating tube made of carbon-carbon composite material has a long-term operating temperature of 1600°C or higher.

[0014] Furthermore, the heating tube, which is made of carbon-carbon composite material, is coated with an antioxidant coating.

[0015] A partitioned ultra-high temperature fluid heating method based on carbon-carbon composite materials, applied to the above-mentioned electric heater, includes the following steps:

[0016] A: The fluid medium enters through the medium inlet of the heater shell, flows into the primary heating zone through the guide channel of the tube sheet, and is initially heated by the heating tubes in the primary heating zone;

[0017] B: The initially heated fluid medium continues to flow through the tube sheet into the secondary heating zone, where the heating tubes heat the initially heated fluid medium to a medium-high temperature.

[0018] C: The medium- and high-temperature fluid medium flows through the tube sheet again into the three-stage heating zone. The heating tubes in the three-stage heating zone heat the medium- and high-temperature fluid medium to an ultra-high temperature of over 1000℃, and finally output it from the medium outlet.

[0019] D: The electrode energizing assembly continuously supplies power to the heating tubes of each heating zone, while the cooling assembly simultaneously circulates and cools the electrode energizing assembly. The insulating ceramic achieves electrical insulation between the electrode and the tube sheet and heater housing.

[0020] E: High-precision thermocouples collect temperature data of each heating zone and the medium outlet in real time. The PID control system dynamically adjusts the output power of each heating zone according to the temperature data to maintain a stable medium outlet temperature.

[0021] Furthermore, the primary heating zone heats the medium to a medium-low temperature of ≤800℃, the secondary heating zone heats the medium to 800-1200℃, and the tertiary heating zone heats the medium to 1200℃-1600℃.

[0022] Compared with the prior art, the beneficial effects of the present invention are:

[0023] 1. This invention uses carbon-carbon composite material as the material for the high-temperature section heating tube. This material has a melting point higher than 3500℃ and excellent high-temperature strength, which allows the heating tube to operate at a long-term temperature of 1600℃ and above. This completely breaks through the temperature resistance bottleneck of 1000℃ of traditional metal heating elements, meets the requirements of extreme temperature processes such as advanced ceramic sintering and ultra-high temperature heat treatment, and broadens the application range of ultra-high temperature electric heaters.

[0024] 2. Existing metal heating elements are prone to oxidation, coarse grains, deformation and failure at ultra-high temperatures, requiring frequent replacement and maintenance; the carbon-carbon composite heating tube of this invention has increased strength at high temperatures, and with the surface anti-oxidation coating, it has excellent thermal shock resistance and anti-aging performance. It still maintains structural stability in extreme thermal cycling conditions in an oxygen-containing atmosphere, thus perfectly solving the technical problem of ultra-high temperature air heating, greatly extending the mean time between failures of the equipment, and reducing the frequency of equipment maintenance and total operating costs.

[0025] 3. This invention adopts a three-stage zoned heating structure. The low-temperature zone uses conventional metal materials, the medium-temperature zone uses high-temperature resistant metals or conventional non-metal materials, and only the ultra-high-temperature zone uses carbon-carbon composite materials. This gradient zoned heating not only avoids the waste of high-quality materials, but also strictly limits the metal heating elements that are prone to high-temperature oxidation to a low-temperature working range below 800°C. Within this temperature range, the oxidation resistance of conventional metals is sufficient to cope with oxygen-containing atmospheres, while the ultra-high-temperature heating that is prone to oxidation and failure is completely undertaken by carbon-carbon composite materials, giving full play to their dual advantages of oxidation resistance and ultra-high temperature resistance. At the same time, the segmented structure reduces the difficulty of manufacturing ultra-long non-metallic heating tubes, simplifies the processing technology, reduces raw material loss, and balances equipment performance and cost control.

[0026] 4. This invention achieves independent temperature control in each zone by setting high-precision thermocouples in each heating zone and cooperating with a PID control system. It can dynamically adjust the heating power of each zone, accurately maintain the stable temperature of the medium outlet, meet the stringent requirements of high-end fields for temperature control accuracy, and ensure process consistency.

[0027] 5. In this invention, the electrode energizing component achieves electrical insulation through insulating ceramics, avoiding the risk of leakage and short circuit; the cooling component wraps the electrode and lead-out electrode with coolant, continuously removing the working heat of the electrode, preventing the electrode from overheating and being damaged under ultra-high temperature conditions, ensuring the long-term stable operation of the electrode energizing component, and improving the overall operational safety of the equipment. Attached Figure Description

[0028] Figure 1 This is a cross-sectional structural diagram of the present invention.

[0029] In the figure: 1. Heater housing, 2. Zoned heating assembly, 201. Primary heating zone, 202. Secondary heating zone, 203. Tertiary heating zone, 3. Electrode energizing assembly, 301. Electrode, 302. Lead-out electrode, 303. Insulating ceramic, 304. Tie rod, 4. Cooling assembly, 5. Medium inlet, 6. Medium outlet, 7. Heating tube, 8. Tube sheet. Detailed Implementation

[0030] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0031] Please see Figure 1The present invention provides a partitioned ultra-high temperature fluid electric heater based on carbon-carbon composite material, comprising a heater shell 1, a partitioned heating component 2, an electrode energizing component 3, and a cooling component 4.

[0032] Medium inlet 5 and medium outlet 6 are respectively provided at both ends of heater housing 1. The partitioned heating component 2 is installed inside heater housing 1 and is divided into primary heating zone 201, secondary heating zone 202 and tertiary heating zone 203 in sequence along the medium flow direction. Adjacent heating zones are separated by tube sheet 8.

[0033] The heating tube 7 in the first-stage heating zone 201 is made of conventional metal materials (such as 310S stainless steel), the heating tube 7 in the second-stage heating zone 202 is made of high-temperature resistant metal materials (Ni80Cr20 or iron-chromium-aluminum), and the heating tube 7 in the third-stage heating zone 203 is made of carbon-carbon composite material. The surface of the heating tube 7 is coated with an anti-oxidation coating, and its long-term working temperature is 1600℃.

[0034] The electrode energizing assembly 3 includes an electrode 301, a lead-out electrode 302, an insulating ceramic 303, and a pull rod 304. The electrode 301 is fixedly mounted on the tube sheet 8 through the insulating ceramic 303 and is electrically connected to the heating tube 7. The lead-out electrode 302 leads the electrode 301 out to the outside of the heater housing 1. The pull rod 304 fastens the tube sheet 8 to the heater housing 1.

[0035] The cooling component 4 is an electrode cooling module. The electrode cooling module has a cooling chamber inside, which is filled with electrode coolant. The electrode coolant surrounds the electrode 301 and the lead-out electrode 302 to achieve circulating cooling of the electrode component.

[0036] The heater is also equipped with high-precision thermocouples and a PID control system. High-precision thermocouples are installed in the primary heating zone 201, the secondary heating zone 202, and the tertiary heating zone 203. The PID control system is connected to the high-precision thermocouple signals and dynamically adjusts the heating power of each heating zone according to the temperature signals.

[0037] The ultra-high temperature fluid heating method based on the above-mentioned heater provided in this embodiment has the following steps:

[0038] A: The fluid medium enters through the medium inlet 5 of the heater shell 1, flows into the primary heating zone 201 through the guide channel of the tube sheet 8, and is heated to a medium-low temperature of ≤800℃ through the conventional metal heating tube 7 to complete the initial heating;

[0039] B: After initial heating, the medium enters the secondary heating zone 202 through the tube sheet 8, and is heated to a medium-high temperature of 800-1200℃ by the heating tube 7 made of high-temperature resistant metal material;

[0040] C: The medium- and high-temperature medium enters the three-stage heating zone 203 through the tube sheet 8, and is heated to an ultra-high temperature of 1200℃-1600℃ through the carbon-carbon composite heating tube 7, and is finally output from the medium outlet 6;

[0041] D: The electrode energizing component 3 continuously supplies power to the heating tubes 7 at each stage, while the cooling component 4 simultaneously circulates cooling to the electrode 301 and the lead-out electrode 302. The insulating ceramic 303 achieves electrical insulation between the electrode and the tube sheet 8 and the heater housing 1.

[0042] E: High-precision thermocouples collect temperature data of each heating zone and medium outlet 6 in real time. The PID control system dynamically adjusts the output power of each heating zone to maintain the stability of the medium outlet temperature.

[0043] In this embodiment, the fluid medium is selected from inert gases such as nitrogen or argon. The equipment operates stably in a continuous state, with high precision in controlling the outlet temperature of the medium. There is no process pollution, and it can be used for a long time in ultra-high temperature and high purity heating scenarios such as semiconductors and aerospace.

[0044] Compared with the prior art, the present invention has the following beneficial effects:

[0045] 1. This invention uses carbon-carbon composite material as the material for the high-temperature section heating tube. This material has a melting point higher than 3500℃ and excellent high-temperature strength, which allows the heating tube to operate at a long-term temperature of 1600℃ and above. This completely breaks through the temperature resistance bottleneck of 1000℃ of traditional metal heating elements, meets the requirements of extreme temperature processes such as advanced ceramic sintering and ultra-high temperature heat treatment, and broadens the application range of ultra-high temperature electric heaters.

[0046] 2. Existing metal heating elements are prone to oxidation, coarse grains, deformation and failure at ultra-high temperatures, requiring frequent replacement and maintenance; the carbon-carbon composite heating tube of this invention has increased strength at high temperatures, and with the surface anti-oxidation coating, it has excellent thermal shock resistance and anti-aging performance. It still maintains structural stability in extreme thermal cycling conditions in an oxygen-containing atmosphere, thus perfectly solving the technical problem of ultra-high temperature air heating, greatly extending the mean time between failures of the equipment, and reducing the frequency of equipment maintenance and total operating costs.

[0047] 3. This invention adopts a three-stage zoned heating structure. The low-temperature zone uses conventional metal materials, the medium-temperature zone uses high-temperature resistant metals or conventional non-metal materials, and only the ultra-high-temperature zone uses carbon-carbon composite materials. This gradient zoned heating not only avoids the waste of high-quality materials, but also strictly limits the metal heating elements that are prone to high-temperature oxidation to a low-temperature working range below 800°C. Within this temperature range, the oxidation resistance of conventional metals is sufficient to cope with oxygen-containing atmospheres, while the ultra-high-temperature heating that is prone to oxidation and failure is completely undertaken by carbon-carbon composite materials, giving full play to their dual advantages of oxidation resistance and ultra-high temperature resistance. At the same time, the segmented structure reduces the difficulty of manufacturing ultra-long non-metallic heating tubes, simplifies the processing technology, reduces raw material loss, and balances equipment performance and cost control.

[0048] 4. This invention achieves independent temperature control in each zone by setting high-precision thermocouples in each heating zone and cooperating with a PID control system. It can dynamically adjust the heating power of each zone, accurately maintain the stable temperature of the medium outlet, meet the stringent requirements of high-end fields for temperature control accuracy, and ensure process consistency.

[0049] 5. In this invention, the electrode energizing component achieves electrical insulation through insulating ceramics, avoiding the risk of leakage and short circuit; the cooling component wraps the electrode and lead-out electrode with coolant, continuously removing the working heat of the electrode, preventing the electrode from overheating and being damaged under ultra-high temperature conditions, ensuring the long-term stable operation of the electrode energizing component, and improving the overall operational safety of the equipment.

[0050] Although embodiments of the invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the invention, the scope of which is defined by the appended claims and their equivalents.

Claims

1. A partitioned ultra-high temperature fluid electric heater based on carbon-carbon composite material, characterized in that, It includes a heater housing (1), a zoned heating assembly (2), an electrode energizing assembly (3), and a cooling assembly (4); The heater housing (1) is provided with a medium inlet (5) and a medium outlet (6) at both ends. The partitioned heating assembly (2) is installed inside the heater housing (1) and is divided into at least two independent heating areas along the medium flow direction. The heating tube (7) in the low-temperature section heating area along the medium flow direction is made of metal material, and the heating tube (7) in the high-temperature section heating area is made of carbon-carbon composite material. The electrode energizing component (3) is disposed on the heater housing (1) and electrically connected to the heating tube (7). The cooling component (4) is disposed on the heater housing (1) at the position corresponding to the electrode energizing component (3) and is used to cool the electrode energizing component (3).

2. The partitioned ultra-high temperature fluid electric heater based on carbon-carbon composite material according to claim 1, characterized in that: The partitioned heating assembly (2) is divided into a primary heating zone (201), a secondary heating zone (202) and a tertiary heating zone (203) along the medium flow direction, and adjacent heating zones are separated by tube sheets (8).

3. A partitioned ultra-high temperature fluid electric heater based on carbon-carbon composite material according to claim 2, characterized in that: The heating tube in the first-level heating zone (201) is made of metal material, the heating tube in the second-level heating zone (202) is made of high-temperature resistant metal material or non-metal material, and the heating tube in the third-level heating zone (203) is made of carbon-carbon composite material.

4. A partitioned ultra-high temperature fluid electric heater based on carbon-carbon composite material according to claim 2, characterized in that: The electrode energizing assembly (3) includes an electrode (301), a lead-out electrode (302), an insulating ceramic (303), and a pull rod (304). The electrode (301) is fixedly mounted on the tube sheet (8) by insulating ceramic (303) and electrically connected to the heating tube (7). The lead-out electrode (302) leads the electrode (301) out to the outside of the heater housing (1). The pull rod (304) fastens the tube sheet (8) to the heater housing (1).

5. A partitioned ultra-high temperature fluid electric heater based on carbon-carbon composite material according to claim 4, characterized in that: The cooling component (4) is an electrode cooling module. The electrode cooling module has a cooling chamber inside, which is filled with electrode coolant. The electrode coolant surrounds the electrode (301) and the lead-out electrode (302).

6. A partitioned ultra-high temperature fluid electric heater based on carbon-carbon composite material according to claim 4, characterized in that: It also includes high-precision thermocouples and a PID control system; the high-precision thermocouples are installed in the first-level heating zone (201), the second-level heating zone (202) and the third-level heating zone (203) to monitor the temperature of each heating zone in real time. The PID control system is connected to the high-precision thermocouple signal and is used to dynamically adjust the heating power of each heating zone according to the temperature signal.

7. A partitioned ultra-high temperature fluid electric heater based on carbon-carbon composite material according to claim 3, characterized in that: The heating tube (7) made of carbon-carbon composite material has a long-term operating temperature of 1600℃ and above.

8. A partitioned ultra-high temperature fluid electric heater based on carbon-carbon composite material according to claim 3, characterized in that: The heating tube (7) made of carbon-carbon composite material is coated with an antioxidant coating.

9. A partitioned ultra-high temperature fluid heating method based on carbon-carbon composite materials, applied to the electric heater described in any one of claims 1-8, characterized in that, Includes the following steps: A: The fluid medium enters through the medium inlet (5) of the heater shell (1), flows into the primary heating zone (201) through the guide channel of the tube sheet (8), and is initially heated by the heating tube (7) in the primary heating zone (201); B: The initially heated fluid medium continues to flow through the tube sheet (8) into the secondary heating zone (202), where the initially heated fluid medium is heated to a medium-high temperature by the heating tubes (7) in the secondary heating zone (202); C: The medium- and high-temperature fluid medium flows through the tube sheet (8) again and enters the three-stage heating zone (203). The medium- and high-temperature fluid medium is heated to an ultra-high temperature of over 1000°C by the heating tube (7) in the three-stage heating zone (203), and is finally output from the medium outlet (6). D: The electrode energizing assembly (3) continuously supplies power to the heating tubes of each heating zone, and the cooling assembly (4) simultaneously circulates and cools the electrode energizing assembly (3). The insulating ceramic achieves electrical insulation between the electrode and the tube sheet and the heater housing (1). E: High-precision thermocouples collect temperature data of each heating zone and medium outlet (6) in real time. The PID control system dynamically adjusts the output power of each heating zone according to the temperature data to maintain the stable medium outlet temperature.

10. A partitioned ultra-high temperature fluid heating method based on carbon-carbon composite materials according to claim 9, characterized in that: The primary heating zone heats the medium to a medium-low temperature of ≤800℃, the secondary heating zone heats the medium to 800-1200℃, and the tertiary heating zone heats the medium to 1200℃-1600℃.

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