Photomask clamping device

Abstract

The utility model provides a photomask clamping device which comprises a grabbing assembly used for grabbing a photomask; the horizontal adjusting mechanism is connected with the grabbing assembly and used for controlling the grabbing assembly to move in the horizontal direction; the lifting mechanism is connected with the grabbing assembly and used for controlling the grabbing assembly to move in the vertical direction; and the bearing platform is used for bearing and connecting the horizontal adjusting mechanism and the lifting mechanism. The photomask clamping device can prevent the photomask from being artificially damaged.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor manufacturing, in particular to a photomask clamping device. Background Art

[0002] With the development of semiconductor technology, the area of ​​semiconductor chips is getting smaller and smaller, and the key dimensions of semiconductor devices in the chip are also shrinking. Therefore, the semiconductor process capability is increasingly challenged, and the accuracy of the process and the control of process variation are becoming more important. In the process of manufacturing semiconductor chips, the most important process is photolithography, and the quality of the photolithography process will directly affect the performance of the final chip.

[0003] In the current semiconductor chip manufacturing technology, the photolithography process requires a specific tool - the mask. The photolithography machine "carves" the specific morphological information on the mask onto the wafer during the exposure process. Different products or different layers of the same product require different masks. Therefore, in the semiconductor chip manufacturing process, a large number of different masks are needed, and the conversion of different masks requires a photolithography machine to complete.

[0004] When switching between different masks in a photolithography machine, a mask robot is required to take the mask out of the mask storage unit. As a transit warehouse mechanism, the mask storage unit can store 12 masks at the same time. Before the photolithography process, the required masks can be placed in the mask storage unit in advance, and then the mask ID information is memorized by reading the mask barcode during the photolithography process. Different masks will be automatically converted according to the product formula information during the photolithography process. In the process of converting and transmitting masks, the machine sometimes loses the mask information when it crashes. At this time, since the photolithography machine cannot identify whether there are masks at various positions in the machine, and the corresponding mask information is lost, it is necessary to manually take out the mask and initialize it. In the process of manually taking out the mask in the machine, due to the narrow internal space of the photolithography machine, the operating space is extremely limited, and the space gap of the mask storage unit is small, it is very easy to scratch the mask, thereby affecting production efficiency. Utility Model Content

[0005] The technical problem solved by the utility model is to provide a photomask clamping device to avoid artificial photomask damage.

[0006] In order to solve the above technical problems, an embodiment of the utility model provides a photomask clamping device, including: a grabbing assembly, used to grab the photomask; a horizontal adjustment mechanism, connected to the grabbing assembly, used to control the movement of the grabbing assembly in the horizontal direction; a lifting mechanism, connected to the grabbing assembly, used to control the movement of the grabbing assembly in the vertical direction; a supporting platform, used to support and connect the horizontal adjustment mechanism and the lifting mechanism.

[0007] Optionally, the grabbing assembly includes: two clamping arms arranged opposite to each other; and a clamping arm connecting member fixedly connected to the two clamping arms respectively to control the two clamping arms to clamp the photomask.

[0008] Optionally, the horizontal adjustment mechanism includes: an X-axis adjustment component connected to the grabbing component and a Y-axis adjustment component connected to the supporting platform.

[0009] Optionally, the X-axis adjustment assembly includes: an X-axis rotating component and an X-axis rotating support seat connected to the X-axis rotating component.

[0010] Optionally, the X-axis rotating component includes: an X-axis rotating rod, and an X-axis rotating handle located at the end of the X-axis rotating rod, and the X-axis rotating rod and the X-axis rotating handle are connected by screwing, riveting, welding, or integral molding.

[0011] Optionally, the X-axis rotation support seat includes: a base, and a support column connected to the base, and the support column is fixed to the base by screwing, riveting, clamping, welding, etc.

[0012] Optionally, the X-axis rotating rod is connected to the supporting column.

[0013] Optionally, the Y-axis adjustment assembly includes: a Y-axis rotating component and a Y-axis rotating support seat connected to the Y-axis rotating component.

[0014] Optionally, the Y-axis rotating component includes: a Y-axis rotating rod, and a Y-axis rotating handle located at the end of the Y-axis rotating rod, and the Y-axis rotating rod and the Y-axis rotating handle can be connected by screwing, riveting, welding, or integral molding.

[0015] Optionally, the Y-axis rotation support seat includes a first support body and a second support body, the second support body is horizontally arranged with the first support body, supports and connects the Y-axis rotation component, and the Y-axis rotation component passes through the first support body and the second support body.

[0016] Optionally, the lifting mechanism includes: a lifting rod connected to the supporting platform by thread, screw or pressure, and a lifting rotating handle connected to the lifting rod.

[0017] Optionally, a lifting and rotating rod and a lifting and rotating handle connected to the lifting and rotating rod are sleeved on a limiting structure on the lifting and rotating rod.

[0018] Optionally, the limiting structure includes: a limiting block and a limiting column, the limiting block is sleeved on the lifting and rotating rod, and the limiting column is fixed by the cooperation between the limiting block and the upper limiting hole of the lifting and rotating rod.

[0019] Optionally, the support platform includes: a top plate, a bottom plate, a connecting plate and a connecting column,

[0020] Optionally, the top plate is fixedly connected to the end of the lifting and rotating rod and to the connecting column, and the lifting and rotating rod and the connecting column jointly support the top plate.

[0021] Optionally, the connecting plate is fixedly connected to the first supporting body.

[0022] Optionally, the base plate is fixedly connected to the second support body.

[0023] Compared with the prior art, the technical solution of the embodiment of the utility model has the following beneficial effects: the use of a mask clamping device to take and place the mask from the lithography machine can effectively prevent the mask from being artificially scratched due to manual removal of the mask.

[0024] Furthermore, the horizontal adjustment mechanism and the lifting mechanism can well keep the grabbing assembly and the light mask to be picked up on the same plane, and accurately control the action of picking up and placing the light mask by controlling the three degrees of freedom. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] Figure 1 It is a schematic diagram of a mask clamping device provided by an embodiment of the utility model;

[0026] Figure 2 The lifting mechanism of the mask clamping device provided in the embodiment of the utility model is schematically shown. Figure 1 ;

[0027] Figure 3 The lifting mechanism of the mask clamping device provided in the embodiment of the utility model is schematically shown. Figure 2 ;

[0028] Figure 4 It is a schematic diagram of an X-axis adjustment component in a mask clamping device provided in an embodiment of the utility model;

[0029] Figure 5 It is a schematic diagram of a photomask clamping device with a telescopic bracket provided in an embodiment of the utility model. DETAILED DESCRIPTION

[0030] In the photolithography process, it is often necessary to transport the mask. The photolithography equipment generally uses a mask robot to transfer the mask to the inside of the equipment. The mask robot is very important for taking and placing the mask during the transportation process. However, when an accident or failure occurs in the photolithography equipment, the mask information may be lost, resulting in the inability to identify whether there is a mask at each position in the photolithography equipment, and the corresponding mask information is lost; at this time, the mask needs to be manually removed and initialized. In the process of manually removing the mask from the equipment, due to the narrow internal space of the photolithography equipment and extremely limited operating space, the manual removal process may also be affected by factors such as breathing, emotions, and standing posture, and will be accompanied by jitters of varying amplitudes, which can easily cause scratches on the mask, thereby affecting production efficiency.

[0031] In response to the above problems, an embodiment of the utility model provides a photomask clamping device, including: a grabbing assembly, used to grab the photomask; a horizontal adjustment mechanism, connected to the grabbing assembly, used to control the movement of the grabbing assembly in the horizontal direction; a lifting mechanism, connected to the grabbing assembly, used to control the movement of the grabbing assembly in the vertical direction; a supporting platform, used to support and connect the horizontal adjustment mechanism and the lifting mechanism.

[0032] In order to make the above-mentioned objects, features and beneficial effects of the present invention more obvious and easy to understand, the specific embodiments of the present invention are described in detail below with reference to the accompanying drawings.

[0033] Figure 1 Schematic diagram of the mask clamping device provided by the embodiment of the utility model. Figure 1 As shown, the mask clamping device 10 includes: a gripping component 100, used to grip the mask to be processed and take the mask to be processed out of the lithography equipment; a horizontal adjustment mechanism, connected to the gripping component 100, used to control the movement of the gripping component 100 in the horizontal direction, specifically, can control the movement of the gripping component 100 in various directions on the horizontal plane, and provide effective support and limiting effect for the gripping component 100; a lifting mechanism 300, connected to the gripping component 100, used to control the movement of the gripping component 100 in the vertical direction; a supporting platform 400, used to support and connect the horizontal adjustment mechanism and the lifting mechanism 300, the supporting platform 400 is used to enhance the stability of the entire device, and prevent displacement between the mechanisms from causing damage to the mask during the process of taking and placing the mask.

[0034] In this embodiment, the gripping assembly 100 includes: a first clamping arm 100a and a second clamping arm 100b; the first clamping arm 100a and the second clamping arm 100b are arranged opposite to each other. The first clamping arm 100a and the second clamping arm 100b can clamp the photomask, avoid large-area contact with the photomask, and reduce the probability of the photomask being contaminated.

[0035] In this embodiment, the grabbing assembly 100 also includes: a clamp arm connector 100c, which is fixedly connected to the ends of the first clamp arm 100a and the second clamp arm 100b, respectively, so that a certain distance is maintained between the first clamp arm 100a and the second clamp arm 100b, and the certain distance is the diameter of the mask.

[0036] The connection between the ends of the first clamp arm 100a and the second clamp arm 100b and the clamp arm connector 100c may be screwed, clamped, riveted, welded, or the like.

[0037] In this embodiment, the grab assembly 100 further includes a telescopic arm 100d, which is fixedly connected to the clamp arm connector 100c, and may be screwed, welded, riveted, or integrally formed, etc. The first clamp arm 100a and the second clamp arm 100b are transferred to a predetermined position by the telescopic arm 100d.

[0038] In this embodiment, the horizontal adjustment mechanism includes: an X-axis adjustment component 200 connected to the grabbing component 100 and a Y-axis adjustment component 500 connected to the carrier 400. The positions of the X-axis adjustment component 200 and the Y-axis adjustment component 500 can be interchanged, and it is only necessary to ensure that the grabbing component 100 moves in the horizontal direction to pick up and place the photomask.

[0039] In this embodiment, Figure 4 As shown, the X-axis adjustment assembly 200 includes: an X-axis rotating component 200a, and an X-axis rotating support seat 200b connected to the X-axis rotating component 200a.

[0040] The X-axis rotating member 200a includes an X-axis rotating rod 2002 and an X-axis rotating handle 2001 at the end of the X-axis rotating rod 2002. The X-axis rotating rod 2002 and the X-axis rotating handle 2001 can be connected by screwing, riveting, welding, or integral molding. The grab assembly 100 is fixed to the X-axis rotating rod 2002 by screwing, riveting, clamping, or welding. The X-axis rotating handle 2001 is shaken to drive the X-axis rotating rod 2002 to rotate, thereby driving the grab assembly 100 to move horizontally in the X-axis direction.

[0041] The X-axis rotating rod 2002 may be a threaded rod or a screw rod, etc. A sleeve may be sleeved on the X-axis rotating rod 2002 to connect the telescopic arm 100d in the grab assembly 100 with the X-axis rotating rod 2002 .

[0042] The X-axis rotation support seat 200b includes a base 2011 and a support column 2012 connected to the base 2011. The support column 2012 is fixed to the base 2011 by screwing, riveting, clamping, welding or the like.

[0043] In this embodiment, the X-axis rotating rod 2002 is connected to the supporting column 2012, and the supporting column 2012 has at least two to support the rotating member 200a. The supporting column 2012 is connected to the X-axis rotating rod 2002 by screwing or clamping, so that the X-axis rotating member 200a drives the grabbing assembly 100 to move horizontally in the X-axis direction.

[0044] In this embodiment, the Y-axis adjustment assembly 500 includes: a Y-axis rotating component 500a and a Y-axis rotating support seat 500b connected to the Y-axis rotating component 500a.

[0045] Among them, the Y-axis rotating component 500a includes a Y-axis rotating rod 5002 and a Y-axis rotating handle 5001 located at the end of the Y-axis rotating rod 5002. The Y-axis rotating rod 5002 and the Y-axis rotating handle 5001 can be connected by screwing, riveting, welding or integral molding.

[0046] The Y-axis rotating rod 5002 may be a threaded rod or a lead screw.

[0047] Among them, the Y-axis rotation support seat 500b includes a first support body 5011, and the first support body 5011 can move along the Y-axis through the rotation of the Y-axis rotation component 500a; the second support body 5012 is horizontally arranged with the first support body 5011, supports and connects the Y-axis rotation component 500a and the first support body 5011, and the Y-axis rotation component 500a passes through the first support body 5011 and the second support body 5012. By shaking the Y-axis rotation handle 5001, the Y-axis rotation rod 5002 is driven to rotate, so that the first support body 5011 moves in the Y-axis direction, thereby driving the grasping component 100 to move horizontally in the Y-axis direction.

[0048] The first support body 5011 may be at least two support columns or a support plate.

[0049] The first support body 5011 and the base 2011 may be connected by screwing or riveting.

[0050] In this embodiment, the lifting mechanism 300 includes: a lifting rotating rod 300a, a lifting rotating handle 300c connected to the lifting rotating rod 300a, and a limiting structure 300b sleeved on the lifting rotating rod 300a.

[0051] The lifting and rotating rod 300a and the lifting and rotating handle 300c may be connected by screwing, riveting, welding or integral molding.

[0052] The lifting and rotating rod 300a may be a threaded rod or a screw rod.

[0053] In this embodiment, the lifting and rotating rod 300a can be directly fixedly connected to the grabbing assembly 100 to drive the grabbing assembly 100 to move up and down; it can also be fixedly connected to the base 2011 in the X-axis rotating support seat 200b to drive the X-axis adjustment assembly 200 to move up and down, and then drive the grabbing assembly 100 to move up and down.

[0054] The lifting and rotating rod 300a can be connected to the grabbing assembly 100 or to the base 2011 in the X-axis rotating support seat 200b by screwing, clamping, riveting or other methods.

[0055] In this embodiment, Figure 2 As shown, the limiting structure 300b includes: a limiting block 3002 and a limiting column 3001. Correspondingly, the lifting and rotating rod 300a has a limiting hole. The limiting block 3002 is sleeved on the lifting and rotating rod 300a, and the limiting block 3002 can slide up and down outside the lifting and rotating rod 300a. Figure 3 As shown, by the cooperation and fixation of the limit column 3001 with the upper limit hole of the lifting and rotating rod 300a, the movement trajectory of the lifting and rotating rod can be limited to a certain extent, avoiding uncontrollable movement during operation.

[0056] In this embodiment, the carrying platform 400 includes a top plate 400a, a bottom plate 400b, a connecting plate 400c and a connecting column 400d. The top plate 400a and the bottom plate 400b define the grab assembly 100, the level adjustment mechanism and the lifting mechanism 300 in one space.

[0057] The top plate 400 a is fixedly connected to the end of the lifting and rotating rod 300 a , and the lifting and rotating rod 300 a and the connecting column 400 d are supported together, so that the top plate 400 a is located above the X-axis adjustment assembly 200 .

[0058] In this embodiment, the connecting plate 400c is connected to the first support body 5011 by screwing, riveting, welding, or integral molding, and then the connecting plate 400c is connected to the base 2011 by using the connecting column 400d.

[0059] In this embodiment, the connecting column 400d, the top plate 400a and the connecting plate 400c can be connected by screwing, clamping or riveting.

[0060] In this embodiment, the lifting and rotating rod 300a, the top plate 400a and the connecting plate 400c can be connected by screwing, clamping or riveting.

[0061] In this embodiment, the bottom plate 400b and the second support body 5012 can be fixedly connected by screwing, riveting, welding, or integral molding, etc., to support and ensure the stability of the device.

[0062] Figure 5 Schematic diagram of a mask clamping device with a telescopic bracket provided by an embodiment of the utility model. Figure 5 As shown, the mask clamping device 10 may further include a telescopic bracket 20. Specifically, the telescopic bracket 20 may be a tripod bracket, including a platform 20a and three telescopic supporting legs 20b fixedly connected to the platform 20a.

[0063] The telescopic bracket 20 may also be a telescopic bracket with a cylinder piston mechanism, which is a prior art and will not be described in detail here.

[0064] In summary, after reading the contents of this application, those skilled in the art will appreciate that the aforementioned application contents may be presented only in an exemplary manner and may not be restrictive. Although not explicitly stated herein, those skilled in the art will appreciate that this application is intended to encompass various reasonable changes, improvements and modifications to the embodiments. These changes, improvements and modifications are within the spirit and scope of the exemplary embodiments of this application.

[0065] It should be understood that the term "and / or" used in this embodiment includes any or all combinations of one or more of the associated listed items. It should be understood that when an element such as a layer, region, or substrate is referred to as being "on" another element, it can be directly on the other element, or there can be an intermediate element. In contrast, the term "directly" means that there are no intermediate elements. It should also be understood that the terms "comprising," "containing," "including," or "comprising," when used in this application document, indicate the presence of the recorded features, wholes, steps, operations, elements, and / or components, but do not exclude the presence or addition of one or more other features, wholes, steps, operations, elements, components, and / or groups thereof.

[0066] It should also be understood that although the terms first, second, third, etc. can be used to describe various elements, these elements should not be limited by these terms. These terms are only used to distinguish one element from another element. Therefore, without departing from the teachings of the present application, the first element in some embodiments can be referred to as the second element in other embodiments. The same reference numerals or the same reference signs represent the same elements throughout the specification.

[0067] In addition, the present specification describes exemplary embodiments by reference to idealized exemplary cross-sectional views and / or plan views and / or stereograms. Therefore, differences from the illustrated shapes due to, for example, manufacturing techniques and / or tolerances are foreseeable. Therefore, the exemplary embodiments should not be interpreted as being limited to the shapes of the regions shown herein, but should include deviations in shapes caused by, for example, manufacturing. For example, an etched region shown as a rectangle will typically have circular or curved features. Therefore, the region shown in the figure is schematic in nature, and its shape is not intended to illustrate the actual shape of the region of the device nor to limit the scope of the exemplary embodiments.

Claims

1. A mask clamping device, It is characterized in that include: A grabbing assembly, used for grabbing the photomask; A horizontal adjustment mechanism, connected to the grabbing assembly, for controlling the grabbing assembly to move in a horizontal direction; A lifting mechanism, connected to the grabbing assembly, for controlling the grabbing assembly to move in a vertical direction; The bearing platform is used to bear and connect the horizontal adjustment mechanism and the lifting mechanism.

2. The mask clamping device according to claim 1, It is characterized in that The grabbing assembly comprises: a first clamping arm and a second clamping arm arranged opposite to each other; The clamping arm connecting piece is fixedly connected to the two clamping arms respectively to control the two clamping arms to clamp the photomask.

3. The mask clamping device according to claim 1, It is characterized in that The horizontal adjustment mechanism includes: an X-axis adjustment component connected to the grabbing component and a Y-axis adjustment component connected to the supporting platform.

4. The mask clamping device according to claim 3, It is characterized in that The X-axis adjustment assembly includes: an X-axis rotating component and an X-axis rotating support seat connected to the X-axis rotating component.

5. The mask clamping device according to claim 4, It is characterized in that The X-axis rotating component includes: an X-axis rotating rod, and an X-axis rotating handle located at the end of the X-axis rotating rod, and the X-axis rotating rod and the X-axis rotating handle are connected by screwing, riveting, welding or integral molding.

6. The mask clamping device according to claim 4, It is characterized in that The X-axis rotation support seat includes: a base, a support column connected to the base, and the support column is fixed to the base by screwing, riveting, clamping or welding.

7. The mask clamping device according to claim 6, It is characterized in that The X-axis rotating rod is connected to the supporting column.

8. The mask clamping device according to claim 3, It is characterized in that The Y-axis adjustment assembly includes: a Y-axis rotating component and a Y-axis rotating support seat connected to the Y-axis rotating component.

9. The mask clamping device according to claim 8, It is characterized in that The Y-axis rotating component includes: a Y-axis rotating rod, and a Y-axis rotating handle located at the end of the Y-axis rotating rod. The Y-axis rotating rod and the Y-axis rotating handle can be connected by screwing, riveting, welding or integral molding.

10. The mask clamping device according to claim 8, It is characterized in that The Y-axis rotation support seat includes a first support body and a second support body. The second support body is horizontally arranged with the first support body, supports and connects the Y-axis rotation component, and the Y-axis rotation component passes through the first support body and the second support body.

11. The mask clamping device according to claim 10, It is characterized in that The lifting mechanism comprises: a lifting rotating rod, a lifting rotating handle connected to the lifting rotating rod, and a limiting structure sleeved on the lifting rotating rod.

12. The mask clamping device according to claim 11, It is characterized in that The limiting structure comprises: a limiting block and a limiting column, wherein the limiting block is sleeved on the lifting and rotating rod, and the limiting column is fixed by the cooperation between the limiting block and the upper limiting hole on the lifting and rotating rod.

13. The photomask clamping device according to claim 12, It is characterized in that The bearing platform comprises: a top plate, a bottom plate, a connecting plate and connecting columns.

14. The photomask clamping device according to claim 13, It is characterized in that The top plate is fixedly connected to the end of the lifting and rotating rod and to the connecting column, and the lifting and rotating rod and the connecting column jointly support the top plate.

15. The photomask clamping device according to claim 13, It is characterized in that The connecting plate is fixedly connected to the first supporting body.

16. The photomask clamping device according to claim 13, It is characterized in that Also includes: The bottom plate is fixedly connected to the second support body.

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