Electric quartz crucible transport trolley

Abstract

The utility model relates to the technical field of electric transport trolleys, in particular to an electric quartz crucible transport trolley. Comprising a transport vehicle base, a transport frame is fixedly connected to the upper surface of the transport vehicle base, a plurality of crucible bodies abut against the bottom face of the inner wall of the transport frame, a power source body is fixedly connected to the lower surface of the transport vehicle base, and driving modules are electrically connected to the two ends of the power source body; rotating wheels are installed at the two ends of the driving module correspondingly, an adjusting device is arranged at the position, corresponding to the crucible body, of the surface of the inner wall of the conveying frame, the adjusting device comprises a limiting rod, the two ends of the limiting rod are fixedly connected with the two ends of the inner wall of the conveying frame correspondingly, and a plurality of connecting blocks are fixedly connected to the arc surface of the limiting rod; every two connecting blocks form a group, and the surface of each group of connecting blocks is rotationally connected with a driving rod. The electric quartz crucible conveying trolley has the advantage that quartz crucibles can be conveniently limited, fixed and conveyed.

Description

Technical Field

[0001] The utility model relates to the technical field of electric transport trolleys, in particular to an electric quartz crucible transport trolley. Background Art

[0002] Quartz crucibles are often used in heat treatment equipment such as high-temperature furnaces. Due to its stable physical and chemical properties, it has also been widely used in the production process of semiconductor single crystal silicon. Quartz crucibles are an indispensable part of the single crystal silicon pulling operation, and its transportation is also an important part of it. It is more common in the semiconductor single crystal silicon industry.

[0003] The prior art includes a utility model with a publication number of CN202593585U, which discloses a transport vehicle for charging a single crystal furnace. The patent includes a frame and wheels at the bottom thereof. The upper surface of the frame has a circular hole, which is larger than the quartz crucible of the single crystal furnace. A buffer device is provided on the lower side of the upper surface, and the bottom of the quartz crucible passes through the circular hole and is supported by the buffer device. The transport vehicle provided by the utility model can hold a quartz crucible, and silicon material can be loaded into the quartz crucible when the graphite crucible is cleaned. When the graphite crucible is ready to be used again, the quartz crucible can be directly placed into the graphite crucible, which saves the time for loading, shortens the process time for producing single crystal silicon rods, and improves the production efficiency of single crystal silicon rods.

[0004] It is found in the semiconductor single crystal silicon industry that in the semiconductor single crystal silicon production process, the quartz crucible, as an indispensable part of the single crystal silicon pulling operation, usually needs to be transported. Since the quartz crucible transport cart is a manpower-pulled cart, the cart is not convenient to pull by manpower and the crucible is heavy, the crucible is likely to shake during transportation, and the crucible is easily bumped, which can cause the quartz crucible to overturn, causing damage or pollution. Utility Model Content

[0005] The purpose of the utility model is to solve the problem in the prior art that in the production process of semiconductor single crystal silicon, the quartz crucible, as an indispensable part of the single crystal silicon pulling operation, usually needs to be transported. Since the quartz crucible transportation trolley is a manpower-pulled trolley, which is inconvenient to pull by manpower and the crucible is heavy, the crucible is likely to shake during transportation and the crucible is easily bumped, which may lead to the quartz crucible overturning, causing damage or pollution.

[0006] In order to solve the above technical problems, the utility model provides an electric quartz crucible transport trolley, comprising: a transport trolley base, the upper surface of the transport trolley base is fixedly connected with a transport frame, the bottom surface of the inner wall of the transport frame is abutted with a plurality of crucible bodies, the lower surface of the transport trolley base is fixedly connected with a power source body, both ends of the power source body are electrically connected with a drive module, both ends of the drive module are installed with rotating wheels, an adjustment device is provided on the inner wall surface of the transport frame corresponding to the position of the crucible body, the adjustment device comprises a limit rod, both ends of the limit rod are respectively fixedly connected with the two ends of the inner wall of the transport frame, a plurality of connecting blocks are fixedly connected with the arc surface of the limit rod, a plurality of connecting blocks are grouped in pairs, and the surface of each group of connecting blocks is rotatably connected with a drive rod, the arc surface of the drive rod is provided with threads with opposite thread directions, and the two ends of the drive rod are respectively threaded with a first extrusion plate and a second extrusion plate, both ends of the first extrusion plate and the second extrusion plate are arc-shaped, and the arc surface size of the first extrusion plate and the second extrusion plate is adapted to the cross-sectional size of the crucible body.

[0007] The effect achieved by the above components is: in the production process of semiconductor single crystal silicon, quartz crucible is an indispensable part of the single crystal silicon pulling operation, and the quartz crucible usually needs to be transported. At this time, in order to facilitate the handling of the quartz crucible, first place multiple crucible bodies in the transport frame on the upper surface of the transport vehicle base, and then rotate the driving rod in the middle of the connecting block on the surface of the limit rod, so that the driving rod drives the first extrusion plate and the second extrusion plate at both ends to move toward the position of the crucible body, so that the first extrusion plate and the second extrusion plate squeeze and fix the crucible body to prevent the crucible body from shaking, bumping and damaging during transportation, and then start the power supply body fixed on the bottom surface of the transport vehicle, so that the power supply body drives the rotating wheels at both ends of the drive module to move, thereby utilizing the electrically controlled crucible transport trolley.

[0008] Preferably, one end of the driving rod is fixedly connected to a rotating shaft, and the rotating shaft is a hard alloy shaft.

[0009] The effect achieved by the above components is that when the driving rod is rotated better, auxiliary operation can be performed through the hard alloy shaft fixed at one end of the driving rod.

[0010] Preferably, the bottom surface of the inner wall of the transport frame is provided with a limiting groove at a position corresponding to the crucible body, and the cross-sectional size of the limiting groove is matched with the cross-sectional size of the crucible body.

[0011] The effect achieved by the above components is that during the transportation of the crucible body, the crucible body can be protected and limited by the limiting grooves provided on the bottom surface of the transport frame.

[0012] Preferably, a pressing pad is fixedly connected to the sides of the first pressing plate and the second pressing plate close to each other, and a plurality of friction grooves are formed on the surface of the pressing pad, and the plurality of friction grooves are evenly distributed on the surface of the pressing pad.

[0013] The effect achieved by the above components is that in the process of transporting the crucible body, in order to better limit the position of the crucible body, auxiliary fixation is performed through the squeezing pads on the inner walls of the first squeezing plate and the second squeezing plate.

[0014] Preferably, an auxiliary device is provided on one side of the transport frame, the auxiliary device includes a side panel, one end of the side panel is rotatably connected to the transport frame, a fixing frame is fixedly connected to the position of the transport frame surface corresponding to the side panel, a rotating frame is rotatably connected to the inner wall of the fixing frame, a positioning plate is fixedly connected to the position of the rotating frame on the surface of the side panel, the surface of the positioning plate is plugged into the inner wall of the rotating frame, a connecting plate is fixedly connected to the upper surface of the rotating frame, a fixing rod is slidably penetrated through the surface of the connecting plate, a spring is sleeved on the arc surface of the fixing rod, two ends of the spring are respectively fixedly connected to the fixing rod and the connecting plate, and one end of the fixing rod is slidably connected to the surface of the positioning plate.

[0015] The effect achieved by the above components is: in the process of transporting the crucible main body in the transport frame on the upper surface of the transport vehicle base, in order to avoid the inconvenience of transporting the crucible main body due to the height limitation of the transport frame, a rotating side plate is set on one side of the transport frame for adjustment. First, pull the fixed rod sliding on the surface of the connecting plate on the upper end of the positioning plate to separate the fixed rod from the positioning plate, then rotate the rotating frame to separate the rotating frame from the positioning plate, then the entire side plate is in a rotatable state, then pull the side plate to deflect, so that the side plate and the transport frame are in an open and closed state, and then perform the transport operation of the crucible main body.

[0016] Preferably, both ends of the inner wall of the fixing frame are sleeved with coil springs, and both ends of the coil spring are fixedly connected to the rotating frame and the fixing frame respectively.

[0017] The effect achieved by the above components is that the torsional force generated by the coil spring can effectively squeeze and limit the position of the rotating frame to avoid the position deviation of the rotating frame.

[0018] Preferably, an insert block is fixedly connected to the bottom end of the fixing rod, and the cross section of the insert block is in a pointed cone shape.

[0019] The effect achieved by the above components is that during the process of plugging the fixing rod, the cone-shaped plug block can be used for auxiliary operation.

[0020] Compared with the related art, the electric quartz crucible transport trolley provided by the utility model has the following beneficial effects:

[0021] The utility model provides an electric quartz crucible transport trolley. In the semiconductor single crystal silicon production process, the quartz crucible is an indispensable part of the single crystal silicon pulling operation. It is usually necessary to transport the quartz crucible. At this time, in order to facilitate the handling of the quartz crucible, a plurality of crucible main bodies are first placed in the transport frame on the upper surface of the transport trolley base, and then the driving rod in the middle of the connecting block on the surface of the limit rod is rotated, so that the driving rod drives the first extrusion plate and the second extrusion plate at both ends to move toward the position of the crucible main body, so that the first extrusion plate and the second extrusion plate squeeze and fix the crucible main body, so as to avoid the crucible main body from being transported. If the crucible is damaged by shaking, bumping or collision during transportation, the power supply body fixed on the bottom surface of the transport vehicle is started, and the power supply body drives the rotating wheels at both ends of the driving module to move, thereby utilizing the electrically controlled crucible transport trolley. This process is more time-saving and labor-saving than manual pulling, and the transportation process is also more stable and safer than manual pulling. By operating the adjusting device, the driving rod in the transport frame is rotated, so that the driving rod drives the first extrusion plate and the second extrusion plate at both ends to squeeze and limit the crucible body, thereby reducing the shaking and bumping of the crucible body in the entire transport frame during transportation.

[0022] In the process of carrying the crucible body in the transport frame on the upper surface of the transport vehicle base, in order to avoid the inconvenience of carrying the crucible body due to the height limitation of the transport frame, a rotating side plate is set on one side of the transport frame for adjustment. First, pull the fixed rod sliding on the surface of the connecting plate at the upper end of the positioning plate to separate the fixed rod from the positioning plate, then rotate the rotating frame to separate the rotating frame from the positioning plate. At this time, the entire side plate is in a rotatable state, and then pull the side plate to deflect, so that the side plate and the transport frame are in an open and closed state, and then perform the carrying operation of the crucible body. By operating the auxiliary device, the rotation limit of the side plate of the side wall of the transport frame is achieved, which makes it more convenient to carry the crucible body in the transport frame. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] Figure 1 A schematic diagram of the structure of an electric quartz crucible transport trolley provided by the utility model;

[0024] Figure 2 for Figure 1 A bottom-up structural schematic diagram of the three-dimensional structure shown;

[0025] Figure 3 for Figure 1 The structural schematic diagram of the regulating device shown;

[0026] Figure 4 for Figure 3 A partial structural schematic diagram of the regulating device shown;

[0027] Figure 5for Figure 1 Schematic diagram of the structure of the auxiliary device shown.

[0028] Numbers in the figure: 1. base of the transport vehicle; 2. transport frame; 3. crucible body; 4. adjusting device; 41. limiting rod; 42. first extrusion plate; 43. driving rod; 44. rotating shaft; 45. connecting block; 46. limiting groove; 47. extrusion pad; 48. second extrusion plate; 49. friction groove; 5. auxiliary device; 51. side plate; 52. fixing frame; 53. coil spring; 54. rotating frame; 55. connecting plate; 56. positioning plate; 57. spring; 58. plug-in block; 59. fixing rod; 6. power supply body; 7. driving module; 8. rotating wheel. DETAILED DESCRIPTION

[0029] In order to make the purpose, technical solution and advantages of the utility model more clear, the utility model is further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described here are only used to explain the utility model and are not used to limit the utility model.

[0030] The specific implementation of the present utility model is described in detail below in conjunction with specific embodiments.

[0031] See also Figures 1 to 5 The electric quartz crucible transport trolley provided by the embodiment of the utility model includes: a transport trolley base 1, a transport frame 2 is fixedly connected to the upper surface of the transport trolley base 1, a plurality of crucible bodies 3 are abutted against the bottom surface of the inner wall of the transport frame 2, a power supply body 6 is fixedly connected to the lower surface of the transport trolley base 1, both ends of the power supply body 6 are electrically connected to the driving module 7, both ends of the driving module 7 are installed with rotating wheels 8, an adjusting device 4 is provided at the position of the inner wall surface of the transport frame 2 corresponding to the crucible body 3, and an auxiliary device 5 is provided on one side of the transport frame 2.

[0032] In the embodiments of the present invention, please refer to Figure 3 and Figure 4The adjusting device 4 includes a limiting rod 41, and the two ends of the limiting rod 41 are fixedly connected to the two ends of the inner wall of the transport frame 2, and the arc surface of the limiting rod 41 is fixedly connected with a plurality of connecting blocks 45, and the plurality of connecting blocks 45 form a group of two, and the surface of each group of connecting blocks 45 is rotatably connected with a driving rod 43, and the arc surface of the driving rod 43 is provided with threads with opposite thread directions, and the two ends of the driving rod 43 are respectively threaded with a first extrusion plate 42 and a second extrusion plate 48, and the two ends of the first extrusion plate 42 and the second extrusion plate 48 are both arc-shaped, and the first extrusion plate 42 and the second extrusion plate 48 are connected to each other. The arc surface dimensions at both ends of the extrusion plate 48 are adapted to the cross-sectional dimensions of the crucible body 3. One end of the driving rod 43 is fixedly connected to a rotating shaft 44, which is a hard alloy shaft. The bottom surface of the inner wall of the transport frame 2 is provided with a limiting groove 46 at a position corresponding to the crucible body 3. The cross-sectional dimensions of the limiting groove 46 are adapted to the cross-sectional dimensions of the crucible body 3. The first extrusion plate 42 and the second extrusion plate 48 are fixedly connected to an extrusion pad 47 on the side close to each other. A plurality of friction grooves 49 are provided on the surface of the extrusion pad 47, and the plurality of friction grooves 49 are evenly distributed on the surface of the extrusion pad 47.

[0033] In the embodiments of the present invention, please refer to Figure 5 The auxiliary device 5 includes a side plate 51, one end of the side plate 51 is rotatably connected to the transport frame 2, a fixing frame 52 is fixedly connected to the position of the side plate 51 on the surface of the transport frame 2, a rotating frame 54 is rotatably connected to the inner wall of the fixing frame 52, a positioning plate 56 is fixedly connected to the surface of the side plate 51 corresponding to the position of the rotating frame 54, the surface of the positioning plate 56 is plugged into the inner wall of the rotating frame 54, a connecting plate 55 is fixedly connected to the upper surface of the rotating frame 54, a fixing rod 59 is slidably penetrated through the surface of the connecting plate 55, a spring 57 is sleeved on the arc surface of the fixing rod 59, two ends of the spring 57 are respectively fixedly connected to the fixing rod 59 and the connecting plate 55, one end of the fixing rod 59 is slidably connected to the surface of the positioning plate 56, both ends of the inner wall of the fixing frame 52 are sleeved with coil springs 53, two ends of the coil spring 53 are respectively fixedly connected to the rotating frame 54 and the fixing frame 52, an insert block 58 is fixedly connected to the bottom end of the fixing rod 59, and the cross section of the insert block 58 is a pointed cone.

[0034] The working principle of the electric quartz crucible transport trolley provided by the utility model is as follows: in the production process of semiconductor single crystal silicon, quartz crucible is an indispensable part of the single crystal silicon pulling operation, and it is usually necessary to transport the quartz crucible. At this time, in order to facilitate the handling of the quartz crucible, firstly, a plurality of crucible bodies 3 are placed in the transport frame 2 on the upper surface of the transport trolley base 1, and then the driving rod 43 in the middle of the connecting block 45 on the surface of the limit rod 41 is rotated, so that the driving rod 43 drives the first extrusion plate 42 and the second extrusion plate 48 at both ends to move toward the position of the crucible body 3, so that the first extrusion plate 42 and the second extrusion plate 48 squeeze and fix the crucible body 3 to prevent the crucible body 3 from shaking, bumping and damaging during transportation, and then the power supply body 6 fixed on the bottom surface of the transport trolley is started, so that the power supply body 6 drives the rotating wheels 8 at both ends of the driving module 7 to move, thereby utilizing the electrically controlled crucible transport trolley. This process is more time-saving and labor-saving than manual pulling, and the transportation process is also more stable and safe than manual pulling.

[0035] In the process of transporting the crucible main body 3 in the transport frame 2 on the upper surface of the transport vehicle base 1, in order to avoid the inconvenience of transporting the crucible main body 3 due to the height limitation of the transport frame 2, a rotating side plate 51 is set on one side of the transport frame 2 for adjustment. First, the fixing rod 59 sliding on the surface of the connecting plate 55 at the upper end of the positioning plate 56 is pulled to separate the fixing rod 59 from the positioning plate 56. Then the rotating frame 54 is rotated to separate the rotating frame 54 from the positioning plate 56. At this time, the entire side plate 51 is in a rotatable state. Then, the side plate 51 is pulled to deflect, so that the side plate 51 and the transport frame 2 are in an open and closed state, and then the crucible main body 3 is transported.

[0036] The circuits and controls involved in the present invention are all prior art and will not be described in detail here.

[0037] The above description is only an embodiment of the present invention, and does not limit the patent scope of the present invention. Any equivalent structure or equivalent process transformation made by using the contents of the specification and drawings of the present invention, or directly or indirectly applied in other related technical fields, are also included in the patent protection scope of the present invention.

Claims

1. Electric quartz crucible transport trolley, characterized in that: include: A transport vehicle base (1), wherein the upper surface of the transport vehicle base (1) is fixedly connected to a transport frame (2), the bottom surface of the inner wall of the transport frame (2) is abutted against a plurality of crucible bodies (3), the lower surface of the transport vehicle base (1) is fixedly connected to a power source body (6), both ends of the power source body (6) are electrically connected to a drive module (7), both ends of the drive module (7) are equipped with rotating wheels (8), and an adjustment device (4) is provided at a position of the inner wall surface of the transport frame (2) corresponding to the crucible body (3), and the adjustment device (4) comprises a limit rod (41), and both ends of the limit rod (41) are respectively fixed to the two ends of the inner wall of the transport frame (2). The limiting rod (41) is connected with a plurality of connecting blocks (45) fixedly connected to the arc surface of the limiting rod (41), and the plurality of connecting blocks (45) are grouped in pairs. The surface of each group of connecting blocks (45) is rotatably connected to a driving rod (43). The arc surface of the driving rod (43) is provided with threads with opposite thread directions. The two ends of the driving rod (43) are respectively threaded with a first extrusion plate (42) and a second extrusion plate (48). Both ends of the first extrusion plate (42) and the second extrusion plate (48) are in an arc shape. The dimensions of the arc surfaces at both ends of the first extrusion plate (42) and the second extrusion plate (48) are adapted to the cross-sectional dimensions of the crucible body (3).

2. The electric quartz crucible transport trolley according to claim 1, characterized in that: One end of the driving rod (43) is fixedly connected to a rotating shaft (44), and the rotating shaft (44) is a hard alloy shaft.

3. The electric quartz crucible transport trolley according to claim 1, characterized in that: A limiting groove (46) is provided on the bottom surface of the inner wall of the transport frame (2) at a position corresponding to the crucible body (3), and the cross-sectional dimensions of the limiting groove (46) are matched to the cross-sectional dimensions of the crucible body (3).

4. The electric quartz crucible transport trolley according to claim 1, characterized in that: A squeezing pad (47) is fixedly connected to the first squeezing plate (42) and the second squeezing plate (48) on one side close to each other, and a plurality of friction grooves (49) are provided on the surface of the squeezing pad (47), and the plurality of friction grooves (49) are evenly distributed on the surface of the squeezing pad (47).

5. The electric quartz crucible transport trolley according to claim 1, characterized in that: An auxiliary device (5) is provided on one side of the transport frame (2), and the auxiliary device (5) comprises a side plate (51), one end of the side plate (51) is rotatably connected to the transport frame (2), a fixing frame (52) is fixedly connected to the surface of the transport frame (2) at a position corresponding to the side plate (51), an inner wall of the fixing frame (52) is rotatably connected to a rotating frame (54), a positioning plate (56) is fixedly connected to the surface of the side plate (51) at a position corresponding to the rotating frame (54), the surface of the positioning plate (56) is plugged into the inner wall of the rotating frame (54), a connecting plate (55) is fixedly connected to the upper surface of the rotating frame (54), a fixing rod (59) is slidably penetrated through the surface of the connecting plate (55), a spring (57) is sleeved on the arc surface of the fixing rod (59), two ends of the spring (57) are respectively fixedly connected to the fixing rod (59) and the connecting plate (55), and one end of the fixing rod (59) is slidably connected to the surface of the positioning plate (56).

6. The electric quartz crucible transport trolley according to claim 5, characterized in that: Both ends of the inner wall of the fixed frame (52) are sleeved with coil springs (53), and both ends of the coil spring (53) are fixedly connected to the rotating frame (54) and the fixed frame (52) respectively.

7. The electric quartz crucible transport trolley according to claim 5, characterized in that: The bottom end of the fixing rod (59) is fixedly connected with an insert block (58), and the cross section of the insert block (58) is in the shape of a pointed cone.

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