Acoustic measurement device

Abstract

Provided is an acoustic measurement device installed in a vacuum chamber for determining a state of an acoustic wave generation source in the vacuum chamber. The acoustic measurement apparatus includes: an acoustic wave collection device in the vacuum chamber and configured to collect sound generated from an acoustic wave generation source in the vacuum chamber; and a feeder line configured to convert sound wave information of the sound collected by the sound wave collecting device into an electric signal and transmit the sound wave information to the outside of the vacuum chamber.

Description

[0001] CROSS-REFERENCE TO RELATED APPLICATIONS

[0002] This application claims priority to and the benefit of Korean Patent Application No. 10-2023-0041374 filed in the Korean Intellectual Property Office on March 29, 2023, the disclosure of which is incorporated herein by reference in its entirety. Technical Field

[0003] Aspects of embodiments of the present disclosure relate to apparatus and methods for measuring acoustics in a vacuum chamber. Background Art

[0004] Manufacturing QD (quantum dot) OLED (organic light emitting diode) displays utilizes organic thin film deposition.

[0005] An in-line evaporator for depositing a large-area organic thin film for existing OLED displays is generally used, and the large-area organic thin film is manufactured by depositing a coating organic material gas on a large substrate in a high vacuum chamber.

[0006] In order to confirm whether a good deposition process is performed on a substrate in a vacuum chamber, a method of measuring sounds (eg, acoustic waves) generated in the vacuum chamber may be used.

[0007] The method of measuring sound includes collecting sound waves generated (eg, emitted) by a sound wave generating source to determine a state (eg, condition) of the sound wave generating source.

[0008] However, generally speaking, there is no medium (eg, air) in a vacuum to transmit acoustic waves, and thus acoustic wave measurements in a vacuum chamber are impossible.

[0009] Therefore, in recent years, research has been conducted on determining the state of a sound wave generation source by directly contacting a test object in a vacuum chamber and collecting sound waves through the test object and converting the sound waves into electric signals according to vibrations of the test object.

[0010] For example, a measuring device including an acoustic wave collecting device is placed in contact with an acoustic wave measurement point in a vacuum chamber, and the acoustic waves generated from this point are transmitted to the inside through the solid medium (e.g., wall) of the measuring box, and are transmitted to the acoustic wave collecting device through the air medium present in the measuring device. Utility Model Content

[0011] An acoustic measuring device is provided, which is installed in a vacuum chamber and is used to determine the state of an acoustic wave generating source in the vacuum chamber, and according to an embodiment of the present disclosure, the acoustic measuring device includes: an acoustic wave collecting device, which is in the vacuum chamber and is configured to collect sounds generated from the acoustic wave generating source in the vacuum chamber; and a feeder, which is configured to convert acoustic wave information of the sounds collected by the acoustic wave collecting device into electrical signals and transmit the acoustic wave information to the outside of the vacuum chamber.

[0012] The acoustic wave collecting device may be attached to the inner wall of the vacuum chamber, or to a moving device in the vacuum chamber.

[0013] The moving device may be any one of a vacuum robot, a pump, a mask, a lifting device, a turntable, and a flip chip.

[0014] The interior of the acoustic wave collecting device may be at atmospheric pressure.

[0015] The acoustic wave collecting device may be configured to detect vibrations of an inner wall of the vacuum chamber or a moving device and convert the vibrations into acoustic waves.

[0016] The acoustic wave collection device can be mounted in an atmospheric pressure (ATM) box, which is mounted in a vacuum chamber.

[0017] The ATM box can be mounted on the inner wall of the vacuum chamber, or installed in a mobile device in the vacuum chamber.

[0018] The interior of the ATM box may be at atmospheric pressure.

[0019] The interior of the ATM box can be sealed with solid walls.

[0020] The acoustic wave collecting device may be fixed to the inner surface of the wall of the ATM box.

[0021] The acoustic wave collecting device may be configured to detect vibrations of the walls of the ATM box and convert the detected vibrations into acoustic waves for collection.

[0022] The feeder may be internal to the ATM box and may extend through a wall of the ATM box.

[0023] The vacuum chamber can be configured for high vacuum deposition processes.

[0024] An acoustic measurement method using the acoustic measurement device as described above is also provided. According to an embodiment of the present disclosure, the method includes: collecting sound generated from an acoustic wave generation source in a vacuum chamber by an acoustic wave collecting device; converting the acoustic wave information of the sound collected by the acoustic wave collecting device into an electrical signal through a feeder, and transmitting the electrical signal as electrical signal data to the outside of the vacuum chamber; collecting and analyzing the electrical signal data transmitted to the outside of the vacuum chamber; and diagnosing the state of the acoustic wave generation source based on the analysis result of the electrical signal data.

[0025] The transmission of the electrical signal data may be performed by using a WiFi communication device.

[0026] The collection and analysis of electrical signal data can be performed using a computer.

[0027] Diagnosing the status of the acoustic wave generating source may be performed manually through visual confirmation of the collected electrical signal data.

[0028] Diagnosing the status of the sound wave generating source may be performed by using an artificial intelligence (AI) speech analysis system.

[0029] The AI ​​voice analysis system can be configured to detect abnormalities in the operating state of the sound wave generation source, the impact and vibration state, and the driving part through noise-based classification.

[0030] The AI ​​speech analysis system can be configured to determine the location of a sound wave generation source through sound waves collected by multiple sound wave collecting devices installed at multiple locations.

[0031] According to an embodiment of the present disclosure, the acoustic wave generated in the vacuum chamber may be analyzed by collecting the acoustic wave by an acoustic measuring device installed in the vacuum chamber and converting it into an electrical signal.

[0032] By measuring abnormal noise caused by the driver, grinding, impact, vibration, etc. of the sound wave generation source, it can be determined whether the sound wave generation source is abnormally driven.

[0033] By connecting the acoustic measurement device with the AI ​​voice analysis system, the sound can be classified according to the operation and noise of the sound wave generation source, so that the operating state of the sound wave generation source can be determined.

[0034] By installing acoustic wave collecting devices at multiple locations in the vacuum chamber, the location of the acoustic wave generating source can be determined. BRIEF DESCRIPTION OF THE DRAWINGS

[0035] Figure 1 is a schematic diagram of an acoustic measurement device according to an embodiment of the present disclosure.

[0036] Figure 2 is a schematic diagram of an acoustic measurement device according to another embodiment of the present disclosure.

[0037] Figure 3 is a flowchart describing an acoustic measurement method according to an embodiment of the present disclosure. DETAILED DESCRIPTION

[0038] The present disclosure will be described more fully below with reference to the accompanying drawings, in which embodiments of the present disclosure are shown. However, the present disclosure may be implemented in various different forms and is not limited to the embodiments described herein.

[0039] In order to more clearly describe aspects and features of the present disclosure, parts of the described embodiments that are not relevant to the present disclosure or are well known to those skilled in the art to which the present disclosure belongs are omitted.

[0040] It will be understood that when an element or layer is referred to as being "on," "connected to," or "coupled to" another element or layer, it may be directly on, connected to, or coupled to another element or layer, or there may be one or more intervening elements or layers. When an element or layer is referred to as being "directly on," "directly connected to," or "directly coupled to" another element or layer, there may be no intervening elements or layers. For example, when a first element is described as being "coupled to" or "connected to" a second element, the first element may be directly coupled to or connected to the second element, or the first element may be indirectly coupled to or connected to the second element through one or more intervening elements.

[0041] In the accompanying drawings, for the clarity of the description, the sizes of various elements, layers, etc. may be exaggerated. The same reference numerals represent the same elements. As used herein, the term "and / or" includes any and all combinations of one or more of the associated listed items. In addition, when describing the embodiments of the present disclosure, the use of "may" relates to "one or more embodiments of the present disclosure". When expressions such as "at least one of ... " and "any one of ... " are after the element list, the entire element list is modified without modifying the single element in the list. For example, the statement "at least one of a, b and c" means only a, only b, only c, a and b, a and c, b and c, a, b and c, all, or variants thereof. As used herein, the terms "use", "by using" and "used" can be regarded as synonymous with the terms "utilize", "by utilizing" and "utilized", respectively. As used herein, the terms "substantially", "about" and similar terms are used as approximate terms rather than terms of degree, and are intended to illustrate the inherent changes in the measured or calculated values ​​that will be recognized by those of ordinary skill in the art.

[0042] It will be understood that although the terms first, second, third, etc. can be used to describe various elements, components, regions, layers and / or parts in this article, these elements, components, regions, layers and / or parts should not be limited by these terms. These terms are used to distinguish an element, component, region, layer or part from another element, component, region, layer or part. Therefore, without departing from the teachings of the exemplary embodiments, the first element, first component, first region, first layer or first part discussed below can be referred to as the second element, second component, second region, second layer or second part.

[0043] For ease of description, spatially relative terms such as "below," "beneath," "down," "above," "on," etc. may be used herein to describe the relationship of one element or feature to another element or feature as shown in the accompanying drawings. It will be understood that in addition to the orientations described in the accompanying drawings, the spatially relative terms are intended to also include different orientations of the device in use or operation. For example, if the device in the accompanying drawings is turned over, elements described as being "below" or "below" other elements or features will be oriented "above" or "above" the other elements or features. Therefore, the term "below" can include both "above" and "below" orientations. The device can be oriented otherwise (rotated 90 degrees or in other orientations), and the spatially relative descriptors used herein should be interpreted accordingly.

[0044] The terms used herein are for the purpose of describing the embodiments of the present disclosure and are not intended to limit the present disclosure. As used herein, the singular forms "one" and "an" are intended to also include plural forms unless the context clearly indicates otherwise. It should also be understood that the terms "include", "include", "include" and / or "include", when used in this specification, represent the presence of the features, integers, steps, operations, elements, components and / or their groups, but do not exclude the presence or addition of one or more other features, integers, steps, operations, elements, components and / or their groups.

[0045] In the following, reference will be made to Figures 1 to 3 An acoustic measurement device and method according to an embodiment of the present disclosure are described.

[0046] Figure 1 is a schematic diagram of an acoustic measurement device according to an embodiment of the present disclosure.

[0047] refer to Figure 1 The acoustic measurement device 100 includes an acoustic wave collecting device 10 and a feed line 20 installed in a vacuum chamber 5 .

[0048] The acoustic wave generation source is introduced into the vacuum chamber 5 (eg, generates acoustic waves in the vacuum chamber 5 ), and the acoustic wave collecting device 10 collects the acoustic waves generated from the acoustic wave generation source.

[0049] The vacuum chamber 5 may have a high vacuum inside S and may be used for a high vacuum deposition process.

[0050] The acoustic wave collecting device 10 may be attached (eg, mounted and attached) to one inner wall of the vacuum chamber 5 , or may be attached to a separate moving device introduced into the vacuum chamber 5 .

[0051] As some examples, the moving device may be any of a vacuum robot, a pump, a mask, a lifting device, a turntable, and a flip chip.

[0052] When the acoustic wave collecting device 10 is attached to the attachment point 12 at one inner wall of the vacuum chamber 5 , the acoustic wave generating source may also be attached to one inner wall of the vacuum chamber 5 .

[0053] In use, sound waves generated (eg, emitted) by a sound wave generating source are transmitted to the sound wave collecting device 10 in the form of vibrations through the inner wall of the vacuum chamber 5 , and the sound wave collecting device 10 detects the vibrations and converts them into sound waves and collects the sound waves.

[0054] In addition, when the sound wave collecting device 10 is attached to a mobile device, the sound waves generated by the mobile device are transmitted to the sound wave collecting device 10 in the form of vibrations.

[0055] The sound wave collecting device 10 detects the vibration of the mobile device, converts it into sound waves, and collects the sound waves.

[0056] The interior of the acoustic wave collecting device 10 may be at atmospheric pressure (ATM).

[0057] The acoustic wave collecting device 10 includes a front electrode (e.g., a diaphragm) formed on the side of an acoustic wave (or vibration) generating source and a fixed electrode spaced apart from the front electrode, and the vibration of the acoustic wave generating source is measured as a capacitance change generated as a separation distance between the front electrode and the fixed electrode changes.

[0058] At this time, an output is obtained from the charge formed between the two electrodes using a DC external power supply.

[0059] The feed line 20 is attached and installed outside the other side portion of the acoustic wave collecting device 10 .

[0060] The feed line 20 may convert the acoustic wave information collected from the acoustic wave collecting device 10 into an electrical signal and transmit it to the outside of the vacuum chamber 5 .

[0061] The feed line 20 can transmit electrical signals between the atmosphere and a vacuum.

[0062] For example, the sound waves collected from the sound wave collecting device 10 are output to the feeder 20 through the atmosphere in the sound wave collecting device 10 , and the feeder 20 converts the sound waves into electric signals and transmits the electric signals to the outside through the vacuum in the vacuum chamber 5 .

[0063] The electric signal transmitted by the feed line 20 is transmitted to the outside of the vacuum chamber 5 for acoustic wave analysis.

[0064] Figure 2 is a schematic diagram of an acoustic measurement device according to another embodiment of the present disclosure.

[0065] refer to Figure 2 According to another embodiment of the present disclosure, an acoustic measurement device 200 includes an acoustic wave collecting device 15 and a feed line 40 .

[0066] The acoustic wave collecting device 15 may be installed inside an atmospheric pressure (ATM) box 30 which is installed in the vacuum chamber 5 .

[0067] The vacuum chamber 5 has a high vacuum inside S, and the ATM box 30 may be mounted on one inner wall of the vacuum chamber 5 or attached to a separate moving device introduced into the vacuum chamber 5 .

[0068] The ATM box 30 may have atmospheric pressure (ATM) therein.

[0069] The ATM box 30 may be internally closed and sealed by solid walls (eg, by walls formed from a solid material).

[0070] The ATM box 30 may have a hexahedral shape in which there is a hollow.

[0071] The acoustic wave collecting device 15 may be fixed to the inside of the ATM box 30 and the inner surface of the wall of the ATM box 30 .

[0072] When the ATM box 30 is attached to the attachment point 35 at one inner wall of the vacuum chamber 5 , the acoustic wave generating source may be attached to the inner wall of the vacuum chamber 5 .

[0073] In use, the sound waves generated (eg, emitted) by the sound wave generating source are transmitted to the ATM box 30 through the inner wall of the vacuum chamber 5 in the form of vibrations, and are transmitted to the sound wave collecting device 15 through the wall of the ATM box 30 in the form of vibrations.

[0074] The sound wave collecting device 15 detects this vibration, converts it into a sound wave, and collects the sound wave.

[0075] When the ATM box 30 is attached to the mobile device, sound waves generated by the mobile device are transmitted to the sound wave collecting device 15 in the form of vibrations through the wall of the ATM box 30, and the sound wave collecting device 15 detects the vibrations, converts them into sound waves, and collects the sound waves.

[0076] The feed line 40 may be arranged to penetrate (or extend through) one wall of the ATM box 30 at a position inside the ATM box 30 opposite to the acoustic wave collecting device 15 .

[0077] Since the inside of the ATM box 30 is under atmospheric pressure, the sound waves collected from the sound wave collecting device 15 may be transmitted to the feed line 40 through the atmosphere (eg, through the air).

[0078] The feed line 40 can transmit electrical signals between the atmosphere and a vacuum.

[0079] For example, the sound waves collected in the sound wave collecting device 15 are output to the feeder 40 through the ATM box 30 , the feeder 40 converts the sound waves into electric signals, and transmits the electric signals to the outside through the vacuum in the vacuum chamber 5 .

[0080] The electrical signal transmitted from the feed line 40 is transmitted to the outside of the vacuum chamber 5 for acoustic wave analysis.

[0081] Figure 3 is a flowchart describing an acoustic measurement method according to an embodiment of the present disclosure.

[0082] refer to Figure 3 The acoustic measurement method according to the embodiment of the present disclosure is to use the above references respectively Figure 1 and Figure 2 The acoustic measurement method of the acoustic measurement devices 100 and 200 is described. First, the sound generated by the acoustic wave generation source in the vacuum chamber is collected by the acoustic wave collecting device 10, 15 (S101).

[0083] As described above, the acoustic wave collecting device 10, 15 can be installed on the inner wall of the vacuum chamber 5, the inner wall of the ATM box 30, or attached to a mobile device, and in each embodiment, the acoustic wave vibration is transmitted to the acoustic wave collecting device 10, 15 to be collected.

[0084] Subsequently, the acoustic wave information of the sound collected from the acoustic wave collecting devices 10 and 15 is converted into an electrical signal and transmitted to the outside of the vacuum chamber through the feed lines 20 and 40 ( S102 ).

[0085] As described above, the feed lines 20 , 40 may be mounted and attached to another outer wall of the acoustic wave collecting device 10 , or may be arranged so that the acoustic wave collecting device 15 penetrates one wall of the ATM box 30 .

[0086] Since the feeders 20 and 40 can transmit electrical signals between the atmosphere and vacuum, the sound waves collected from the sound wave collecting devices 10 and 15 are output to the feeders 20 and 40, and the feeders 20 and 40 convert the sound waves into electrical signals and transmit the electrical signals to the outside through the vacuum in the vacuum chamber 5.

[0087] Subsequently, the electrical signal data transmitted to the outside of the vacuum chamber is collected and analyzed (S103).

[0088] The electrical signal data may be transmitted outside the vacuum chamber 5 using a suitable wireless communication device (eg, a WiFi communication device) of a wireless communication protocol, and may be collected and analyzed using a computer (eg, a PC).

[0089] Subsequently, the state of the acoustic wave generation source is diagnosed based on the analysis result of the electric signal data (S104).

[0090] Diagnosis of the status of the acoustic wave generating source may be performed manually based on visual confirmation of all collected electrical signal data, or may be performed using an artificial intelligence (AI) voice (or sound) analysis system.

[0091] The AI ​​speech analysis system classifies the collected electrical signal data and distinguishes it as noise-specific data.

[0092] The noise can be periodic specific noise, rolling noise of rollers, and various grinding noises.

[0093] By means of such noise specific data, the operation state, impact state and vibration state of the sound wave generation source can be distinguished and classified, and abnormalities in the driving part (eg, driver) can be diagnosed thereby.

[0094] The AI ​​speech analysis system may be implemented by using at least one processor operating according to a program (eg, a predetermined or stored program), and the program may include instructions for performing operations on the collected electrical signal data and classifying noise.

[0095] The sound wave collecting devices 10 , 15 may be installed at a plurality of locations of the vacuum chamber 5 , and the AI ​​speech analysis system may determine the location of the sound wave generation source based on the sound waves collected by the sound wave collecting devices 10 , 15 installed at the plurality of locations.

[0096] Therefore, according to an embodiment of the present disclosure, by collecting the acoustic waves generated in the vacuum chamber and converting them into electrical signals using an acoustic measurement device installed in the vacuum chamber, the acoustic waves may be analyzed.

[0097] Furthermore, by measuring abnormal noise caused by a driving portion, grinding, impact, vibration, or the like of the sound wave generation source, it is possible to determine whether the sound wave generation source is abnormally driven.

[0098] In addition, by connecting the acoustic measurement device with the AI ​​voice analysis system, it is possible to classify the sound according to the operation and noise of the sound wave generation source, so that the operating state of the sound wave generation source can be determined.

[0099] Furthermore, by installing acoustic wave collecting devices at multiple locations in the vacuum chamber, the locations where acoustic waves are generated can be determined.

[0100] Although the embodiments of the present disclosure have been described in detail above, the scope of the present disclosure is not limited thereto. Various modifications and other embodiments that will be understood by ordinary technicians in the field based on the above concepts of the present disclosure defined in the attached claims and their equivalents also fall within the scope of the present disclosure.

[0101] Description of some reference symbols

[0102] 100, 200: Acoustic measurement device 5: Vacuum chamber

[0103] 10, 15: Sound wave collection device 20, 40: Feeder

[0104] 30: ATM box 12, 35: Attachment point

Claims

1. An acoustic measurement device installed in a vacuum chamber for determining the state of an acoustic wave generating source in the vacuum chamber, characterized in that: The acoustic measurement device comprises: an acoustic wave collecting device in the vacuum chamber and configured to collect sound generated from the acoustic wave generating source in the vacuum chamber; and A feed line is configured to convert the acoustic wave information of the sound collected by the acoustic wave collecting device into an electrical signal and transmit the acoustic wave information to the outside of the vacuum chamber.

2. The acoustic measurement device according to claim 1, characterized in that: The acoustic wave collecting device is attached to the inner wall of the vacuum chamber or to a moving device in the vacuum chamber.

3. The acoustic measurement device according to claim 2, characterized in that: The moving device is any one of a vacuum robot, a pump, a mask, a lifting device, a turntable, and a flip chip.

4. The acoustic measurement device according to claim 2, characterized in that: The interior of the acoustic wave collecting device is at atmospheric pressure.

5. The acoustic measurement device according to claim 4, characterized in that: The acoustic wave collecting device is configured to detect vibration of the inner wall of the vacuum chamber or the moving device and convert the vibration into an acoustic wave.

6. The acoustic measurement device according to claim 2, characterized in that: The sound wave collecting device is installed in an atmospheric pressure box, and the atmospheric pressure box is installed in the vacuum chamber.

7. The acoustic measurement device according to claim 6, characterized in that: The atmospheric pressure box is installed on the inner wall of the vacuum chamber or in the moving device in the vacuum chamber.

8. The acoustic measurement device according to claim 6, characterized in that: The sound wave collecting device is fixed on the inner surface of the wall of the atmospheric pressure box.

9. The acoustic measurement device according to claim 8, characterized in that: The acoustic wave collecting device is configured to detect vibrations of the wall of the atmospheric pressure box and convert the detected vibrations into acoustic waves for collection.

10. The acoustic measurement device according to claim 6, characterized in that: The feed line is located inside the atmospheric pressure box and extends through a wall of the atmospheric pressure box.

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