Crucible melting ventilation device

Abstract

The utility model discloses a crucible melting ventilation device, which relates to the technical field of quartz crucible processing, is used for replacing air in a crucible mold, and comprises a copper electrode, an electrode joint, a graphite electrode and a ventilation pipe, the copper electrode is provided with a gas channel in the axial direction in a penetrating manner; the graphite electrode is connected with the copper electrode through an electrode connector, a first through hole communicated with the gas channel is formed in the graphite electrode in the axial direction in a penetrating mode, and a breather pipe is detachably arranged in the first through hole in a penetrating mode. Through the arrangement, gas can be prevented from being melted into the inner surface of the crucible when the crucible is melted, so that the numerical value of micro-bubbles is reduced, and the micro-bubbles in the quartz crucible are prevented from severely expanding and even breaking.

Description

Technical Field

[0001] The utility model relates to the technical field of quartz crucible processing, in particular to a crucible melting ventilation device. Background Art

[0002] Single crystal silicon is an indispensable basic material in modern science and technology, such as electronic computers and automatic control systems in daily life. Televisions, computers, refrigerators, telephones, watches and cars are inseparable from single crystal silicon materials. As one of the popular materials for technological applications, single crystal silicon has penetrated into every corner of people's lives. Single crystal is a crystal with a basically complete lattice structure. Different directions have different properties and are a good semiconductor material. The purity requirement is 99.9999%, or even above 99.9999999%. In the single crystal furnace, high-purity polycrystalline silicon is put into a quartz crucible and pulled. Therefore, researchers attach great importance to the purity of the quartz crucible and microbubbles, which not only affect the purity of the single crystal silicon ingot, but also play a crucial role in the pulling of single crystals. The quality of the quartz crucible is also one of the most important factors in determining the quality of single crystal silicon. Especially in the semiconductor industry, the purity requirements for single crystal silicon are extremely stringent, and the manufacturing difficulty is far greater than that of the photovoltaic industry. Therefore, the quartz crucible used in the preparation of semiconductors is the most important technical barrier in the crucible industry. In the preparation process of semiconductor quartz crucibles, not only do we rely heavily on imports of high-purity quartz sand raw materials, but most domestic quartz crucible preparation companies are unable to prepare quartz crucibles used in semiconductors, and most of them rely on imports, and the cost is high.

[0003] The quartz crucible is an important glassware auxiliary for pulling single crystal silicon rods. When preparing the quartz crucible, a layer of micron-sized microbubbles will be formed, mainly existing within 1mm depth of the inner surface of the quartz crucible. During the growth of the single crystal silicon rod, the microbubbles in the quartz crucible slowly expand and grow under continuous high temperature environment, and merge into larger microbubbles. Once broken, quartz fragments and impurities will be brought into the molten silicon liquid, aggravating the reaction between the quartz crucible and the molten silicon liquid, causing the silicon liquid level at the liquid level line inside the quartz crucible to vibrate, resulting in crystal pulling failure or wire breakage during the crystal pulling process.

[0004] Therefore, how to prevent the microbubbles in the quartz crucible from expanding severely or even bursting is a technical problem that those skilled in the art need to solve at present. Utility Model Content

[0005] The utility model aims to provide a crucible melting ventilation device which can prevent microbubbles in a quartz crucible from serious expansion or even rupture.

[0006] In order to achieve the above purpose, the utility model provides the following technical solutions:

[0007] A crucible melting ventilation device, used for replacing air in a crucible mold, comprising:

[0008] The copper electrode is provided with a gas channel running through it along the axial direction;

[0009] A graphite electrode is connected to the copper electrode via an electrode joint. The graphite electrode is provided with a through first through hole connected to the gas channel along the axial direction. A vent pipe is detachably provided in the first through hole.

[0010] Preferably, the ventilation tube is a graphite tube.

[0011] Preferably, the gas passage, the first through hole and the ventilation pipe are all circular in cross-section.

[0012] Preferably, the axes of the gas passage, the first through hole and the ventilation pipe coincide with each other.

[0013] Preferably, the electrode connector is a cylindrical structure with a stepped through hole in the middle.

[0014] Preferably, one end of the copper electrode is provided with a first stepped shaft for cooperating with the stepped through hole.

[0015] Preferably, one end of the graphite electrode is provided with a second stepped shaft for cooperating with the stepped through hole.

[0016] Preferably, the end of the graphite electrode facing away from the second stepped axis is provided with a rounded corner.

[0017] Preferably, the length of the ventilation tube is greater than the length of the graphite electrode.

[0018] Compared with the above-mentioned background technology, the utility model provides a crucible melting ventilation device for replacing the air in the crucible mold, comprising: a copper electrode, an electrode joint, a graphite electrode and a ventilation pipe; the copper electrode is provided with a gas channel along the axial direction; the graphite electrode is connected to the copper electrode through the electrode joint, and the graphite electrode is provided with a through-type first through hole connecting the gas channel along the axial direction, and a detachable ventilation pipe is inserted into the first through hole.

[0019] Specifically, before the quartz melts in the crucible mold and the arc is struck, the graphite electrode is moved to the ventilation position and the gas switch is turned on. The replacement gas can be introduced into the mold from the gas channel and the vent pipe. After the replacement gas is introduced, the graphite electrode is raised to the position required by the process, and the arc is struck to start the quartz sand melting. At this time, the replacement gas fills the entire mold. After the arc is struck, the entire interior is in a relative vacuum state, which can effectively reduce the gas melting into the inner surface of the crucible when the quartz in the crucible mold is melted, thereby reducing the number of microbubbles. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] In order to more clearly illustrate the embodiments of the utility model or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings in the following description are only embodiments of the utility model. For ordinary technicians in this field, other drawings can be obtained based on the provided drawings without paying creative work.

[0021] Figure 1 A schematic diagram of the overall structure of the ventilation device provided by an embodiment of the utility model;

[0022] Figure 2 An exploded view of the ventilation device structure provided by an embodiment of the utility model;

[0023] Figure 3 A schematic diagram of the installation position of the ventilation device provided in the embodiment of the utility model in the ventilation state;

[0024] Figure 4 This is a schematic diagram of the arc starting state position of the graphite electrode provided in an embodiment of the utility model.

[0025] in:

[0026] 100-crucible mold;

[0027] 200-copper electrode, 210-gas channel, 220-first step shaft;

[0028] 300-graphite electrode, 310-first through hole, 320-ventilation pipe, 330-second stepped shaft;

[0029] 400-Electrode connector. DETAILED DESCRIPTION

[0030] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0031] In order to enable those skilled in the art to better understand the present invention, the present invention is further described in detail below in conjunction with the accompanying drawings and specific implementation methods.

[0032] In the description of the present invention, it should be understood that the terms "upper", "lower", "front", and "back" etc. indicate directions or positional relationships based on the directions or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the positions or elements referred to must have specific directions, be constructed and operated in specific directions, and therefore should not be understood as limitations of the present invention.

[0033] The utility model aims to provide a crucible melting ventilation device which can prevent microbubbles in a quartz crucible from serious expansion or even rupture.

[0034] In order to achieve the above purpose, the utility model provides the following technical solutions:

[0035] See also Figures 1 to 4 The present embodiment provides a crucible melting ventilation device for replacing air in a crucible mold 100, including: a copper electrode 200, an electrode joint 400, a graphite electrode 300 and a ventilation pipe 320; the copper electrode 200 is provided with a gas channel 210 along the axial direction; the graphite electrode 300 is connected to the copper electrode 200 through the electrode joint 400, and the graphite electrode 300 is provided with a through-type first through hole 310 connected to the gas channel 210 along the axial direction, and a ventilation pipe 320 is detachably penetrated in the first through hole 310.

[0036] The ventilation device provided by the utility model is mainly used to replace the air in the crucible mold 100 with an inert gas before melting the quartz in the crucible mold 100. In this way, the crucible mold 100 is filled with the inert gas, so that the quartz is in a relatively vacuum state, which can prevent the quartz in the crucible mold 100 from generating microbubbles on the inner surface of the cast crucible due to the reaction with air when melting.

[0037] Specifically, the copper electrode 200 and the graphite electrode 300 are both cylindrical structures. The copper electrode 200 is connected to the arc starting device. The copper electrode 200 is detachably connected to the graphite electrode 300 through the electrode connector 400. The graphite electrode 300 will burn and be consumed in the arc starting state. The graphite electrode 300 needs to be replaced every time the quartz in the crucible mold 100 is melted.

[0038] It should be noted that the copper electrode 200, the graphite electrode 300 and the electrode joint 400 in the embodiment of the present application are provided with a connected channel for gas to pass through in the middle. Specifically, a gas channel 210 is provided inside the copper electrode 200, and a first through hole 310 is provided inside the graphite electrode 300. A ventilation tube 320 is inserted into the first through hole 310, wherein the copper electrode 200 and the graphite electrode 300 are connected via the electrode joint 400.

[0039] In this embodiment, before the quartz melts and arcs in the crucible mold 100, the graphite electrode 300 is moved to the ventilation position, such as Figure 4 As shown, by turning on the gas switch, the replacement gas can be introduced into the mold from the gas channel 210 and the vent pipe 320. After the replacement gas is introduced, the graphite electrode 300 is raised to the position required by the process, as shown in FIG. Figure 3 As shown, the arc starts to melt the quartz sand, and the replacement gas fills the entire mold. After the arc is struck, the entire interior is in a relative vacuum state, which can effectively reduce the gas melting into the inner surface of the crucible when the quartz in the crucible mold 100 melts, thereby reducing the number of microbubbles.

[0040] Preferably, the ventilation tube 320 is a graphite tube.

[0041] It is understandable that the graphite electrode 300 will continue to burn and be consumed during the arcing process, and the graphite electrode 300 will continue to become shorter. Therefore, in order to ensure that the ventilation tube 320 installed inside it does not affect the use of the graphite electrode 300, the ventilation tube 320 is also preferably a graphite tube. In this way, the ventilation tube 320 can be burned along with the combustion and consumption of the graphite electrode 300, and will not affect the electrode melting process.

[0042] Preferably, the cross-sections of the gas channel 210 , the first through hole 310 , and the vent pipe 320 are all circular.

[0043] In this embodiment, the cross-sectional shapes of the gas channel 210, the first through hole 310 and the ventilation tube 320 are all circular. This is because circular through holes and cylindrical tubes are easy and convenient to process and have a stable structure.

[0044] Preferably, the axes of the gas channel 210 , the first through hole 310 and the ventilation pipe 320 coincide with each other.

[0045] It can be understood that in this embodiment, the gas channel 210, the first through hole 310 and the vent pipe 320 need to be interconnected. Therefore, the gas channel 210, the first through hole 310 and the vent pipe 320 are horizontally arranged in a straight line to facilitate the rapid circulation of gas.

[0046] Preferably, the electrode connector 400 is a cylindrical structure with a stepped through hole in the middle.

[0047] Specifically, Figure 2 As shown, the electrode connector 400 is responsible for connecting the copper electrode 200 and the graphite electrode 300. Since the graphite electrode 300 needs to be replaced each time it is used, the electrode connector 400 is detachably connected to the graphite electrode 300. In addition, the arrangement of the stepped through holes facilitates the positioning of the centers of the copper electrode 200 and the graphite electrode 300, and facilitates the arrangement of the gas channel 210, the first through hole 310 and the vent pipe 320.

[0048] Preferably, one end of the copper electrode 200 is provided with a first stepped shaft 220 for matching with the stepped through hole.

[0049] In this embodiment, in order to facilitate the installation of the copper electrode 200 on the electrode connector 400 , a first stepped shaft 220 that can cooperate with the electrode connector 400 is provided at one end thereof.

[0050] Preferably, one end of the graphite electrode 300 is provided with a second stepped shaft 330 for matching with the stepped through hole.

[0051] In this embodiment, a second stepped shaft 330 is provided at one end of the graphite electrode 300 connected to the electrode connector 400 , and the second stepped shaft 330 can just fit with the stepped through hole in the electrode connector 400 .

[0052] Preferably, the end of the graphite electrode 300 facing away from the second stepped axis 330 is provided with a rounded corner.

[0053] Specifically, the end of the graphite electrode 300 away from the second stepped shaft 330 is rounded, so that the end of the graphite electrode 300 is more rounded to prevent it from scratching the installer.

[0054] Preferably, the length of the ventilation tube 320 is greater than the length of the graphite electrode 300 .

[0055] In this embodiment, the length of the vent pipe 320 is slightly greater than the length of the graphite electrode 300, that is, the vent pipe 320 will extend from the graphite electrode 300 when installed, so that the replacement gas can be easily introduced into the designated position.

[0056] It should be noted that, in this specification, relational terms such as first and second are merely used to distinguish one entity from other entities, but do not necessarily require or imply any actual relationship or order between these entities.

[0057] The various embodiments in this specification are described in a progressive manner, and each embodiment focuses on the differences from other embodiments. The same or similar parts between the various embodiments can be referenced to each other.

[0058] The above is a detailed introduction to the embodiments provided by the utility model. This article uses specific examples to illustrate the principles and implementation methods of the utility model. The description of the above embodiments is only used to help understand the method and core ideas of the utility model. It should be pointed out that for ordinary technicians in this technical field, without departing from the principles of the utility model, the utility model can also be improved and modified, and these improvements and modifications also fall within the scope of protection of the claims of the utility model.

Claims

1. A crucible melting ventilation device for replacing air in a crucible mold (100), characterized in that: include: The copper electrode (200) is provided with a gas channel (210) penetrating along the axial direction; A graphite electrode (300) is connected to the copper electrode (200) via an electrode connector (400); the graphite electrode (300) is provided with a through-type first through hole (310) connected to the gas channel (210) along the axial direction; a vent pipe (320) is detachably provided in the first through hole (310).

2. The crucible melting ventilation device according to claim 1, characterized in that: The ventilation tube (320) is specifically a graphite tube.

3. The crucible melting ventilation device according to claim 1, characterized in that: The gas channel (210), the first through hole (310) and the ventilation pipe (320) are all circular in cross-section.

4. The crucible melting ventilation device according to claim 3, characterized in that: The axes of the gas channel (210), the first through hole (310) and the ventilation pipe (320) coincide with each other.

5. The crucible melting ventilation device according to claim 1, characterized in that: The electrode connector (400) is a cylindrical structure with a stepped through hole in the middle.

6. The crucible melting ventilation device according to claim 5, characterized in that: One end of the copper electrode (200) is provided with a first stepped shaft (220) for matching with the stepped through hole.

7. The crucible melting ventilation device according to claim 6, characterized in that: One end of the graphite electrode (300) is provided with a second stepped shaft (330) for matching with the stepped through hole.

8. The crucible melting ventilation device according to claim 7, characterized in that: An end of the graphite electrode (300) facing away from the second stepped axis (330) is provided with a rounded corner.

9. The crucible melting ventilation device according to claim 1, characterized in that: The length of the ventilation tube (320) is greater than the length of the graphite electrode (300).

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