Projection objective lens and projection device

Abstract

The utility model discloses a projection objective lens and a projection device, and relates to the technical field of optical systems, the projection objective lens is provided with an object side and an image side which are correspondingly arranged along the optical axis direction, and the projection objective lens comprises a first lens to a twentieth lens which are sequentially arranged from the object side to the image side; wherein the third lens, the fourth lens, the fifth lens, the sixth lens, the eleventh lens, the twelfth lens, the thirteenth lens, the fourteenth lens, the fifteenth lens, the seventeenth lens, the eighteenth lens and the nineteenth lens have positive focal power; the first lens, the second lens, the seventh lens, the eighth lens, the ninth lens, the tenth lens, the sixteenth lens and the twentieth lens have negative focal power, so that the exposure full view field of the projection objective lens is smaller than or equal to 30 mm, and the resolution ratio is smaller than or equal to 1.5 microns. According to the technical scheme provided by the utility model, the projection objective lens simultaneously achieves the effects of high resolution and large field of view through the design and arrangement of twenty optical lenses.

Description

Technical Field

[0001] The utility model relates to the technical field of optical systems, in particular to a projection objective lens and a projection device. Background Art

[0002] With the development of the semiconductor industry, the demand for lithography systems is increasing.

[0003] Among them, the projection lens is one of the core. The resolution and exposure field of the projection lens determine the accuracy and efficiency of the process. The two are a pair of contradictory points in principle. It is difficult to achieve high resolution and large field of view at the same time within a limited cost. Utility Model Content

[0004] The main purpose of the utility model is to provide a projection lens and a projection device, and in particular to a projection lens intended to achieve high resolution while satisfying the effect of a large field of view.

[0005] To achieve the above-mentioned purpose, the projection objective lens provided by the utility model has an object side and an image side correspondingly arranged along the optical axis direction, and the projection objective lens comprises a first lens, a second lens, a third lens, a fourth lens, a fifth lens, a sixth lens, a seventh lens, an eighth lens, a ninth lens, a tenth lens, an eleventh lens, a twelfth lens, a thirteenth lens, a fourteenth lens, a fifteenth lens, a sixteenth lens, a seventeenth lens, an eighteenth lens, a nineteenth lens, and a twentieth lens arranged in sequence from the object side to the image side;

[0006] Among them, the third lens, the fourth lens, the fifth lens, the sixth lens, the eleventh lens, the twelfth lens, the thirteenth lens, the fourteenth lens, the fifteenth lens, the seventeenth lens, the eighteenth lens, and the nineteenth lens have positive optical power; the first lens, the second lens, the seventh lens, the eighth lens, the ninth lens, the tenth lens, the sixteenth lens, and the twentieth lens have negative optical power, so that the exposure full field of view of the projection objective is less than or equal to 30 mm, and the resolution is less than or equal to 1.5 μm.

[0007] In one embodiment, the optical power of the first lens is φ1, -0.004≤φ1≤-0.001;

[0008] The focal power of the second lens is φ2, -0.008≤φ2≤-0.004;

[0009] The focal power of the third lens is φ3, 0.001≤φ3≤0.003;

[0010] The optical power of the fourth lens is φ4, 0.002≤φ4≤0.005;

[0011] The optical power of the fifth lens is φ5, 0.002≤φ5≤0.004;

[0012] The focal power of the sixth lens is φ6, 0.003≤φ6≤0.006;

[0013] The optical power of the seventh lens is φ7, -0.003≤φ7≤-0.001;

[0014] The optical power of the eighth lens is φ8, -0.006≤φ8≤-0.003;

[0015] The optical power of the ninth lens is φ9, -0.008≤φ9≤-0.007;

[0016] The optical power of the tenth lens is φ10, -0.007≤φ10≤-0.004;

[0017] The optical power of the eleventh lens is φ11, 0.005≤φ11≤0.008;

[0018] The focal power of the twelfth lens is φ12, 0.004≤φ12≤0.006;

[0019] The focal power of the thirteenth lens is φ13, 0.001≤φ13≤0.003;

[0020] The optical power of the fourteenth lens is φ14, 0.005≤φ14≤0.007;

[0021] The optical power of the fifteenth lens is φ15, 0.001≤φ15≤0.002;

[0022] The optical power of the sixteenth lens is φ16, -0.009≤φ16≤-0.007;

[0023] The optical power of the seventeenth lens is φ17, 0.002≤φ17≤0.004;

[0024] The optical power of the eighteenth lens is φ18, 0.001≤φ18≤0.002;

[0025] The optical power of the nineteenth lens is φ19, 0.002≤φ19≤0.004;

[0026] The optical power of the twentieth lens is φ20, -0.007≤φ20≤-0.004.

[0027] In one embodiment, the twenty lenses, namely the first lens to the twentieth lens, are all configured as spherical lenses.

[0028] In one embodiment, the radius of the object side surface of the first lens is R11, the radius of the image side surface is R12, -500mm≤R11≤-400mm, 200mm≤R12≤350mm;

[0029] The object side radius of the second lens is R21, and the image side radius is R22, -100mm≤R21≤-50mm, -1700mm≤R22≤-1500mm;

[0030] The object side radius of the third lens is R31, and the image side radius is R32, -400mm≤R31≤-300mm, -150mm≤R32≤-80mm;

[0031] The fourth lens has an object side radius of R41 and an image side radius of R42, 1300mm≤R41≤1600mm, -180mm≤R42≤-130mm;

[0032] The object side radius of the fifth lens is R51, and the image side radius is R52, 400mm≤R51≤550mm, -500mm≤R52≤-300mm;

[0033] The object side radius of the sixth lens is R61, and the image side radius is R62, 100mm≤R61≤200mm, 650mm≤R62≤850mm;

[0034] The object side radius of the seventh lens is R71, and the image side radius is R72, 100mm≤R71≤200mm, 50mm≤R72≤110mm;

[0035] The object side radius of the eighth lens is R81, and the image side radius is R82, -400mm≤R81≤-250mm, 120mm≤R82≤250mm;

[0036] The radius of the object side surface of the ninth lens is R91, and the radius of the image side surface is R92, -210mm≤R91≤-90mm, 650mm≤R92≤850mm;

[0037] The object side radius of the tenth lens is R101, and the image side radius is R102, -300mm≤R101≤-150mm, 150mm≤R102≤300mm;

[0038] The object side radius of the eleventh lens is R111, and the image side radius is R112, 150mm≤R111≤300mm, -250mm≤R112≤-100mm;

[0039] The object side radius of the twelfth lens is R121, and the image side radius is R122, 400mm≤R121≤600mm, -250mm≤R122≤-100mm;

[0040] The object side surface of the thirteenth lens is set to be a plane, and the image side surface radius is R132, -400mm≤R132≤-250mm;

[0041] The object side radius of the fourteenth lens is R141, and the image side radius is R142, 100mm≤R141≤250mm, -350mm≤R142≤-200mm;

[0042] The object side radius of the fifteenth lens is R151, and the image side radius is R152, 100mm≤R151≤250mm, 200mm≤R152≤300mm;

[0043] The object side radius of the sixteenth lens is R161, the image side radius is R162, -400mm≤R161≤-200mm, 80mm≤R162≤150mm;

[0044] The object side radius of the seventeenth lens is R171, and the image side radius is R172, 100mm≤R171≤250mm, -700mm≤R172≤-550mm;

[0045] The object side radius of the eighteenth lens is R181, and the image side radius is R182, 150mm≤R181≤250mm, 1000mm≤R182≤1500mm;

[0046] The object side radius of the nineteenth lens is R191, and the image side radius is R192, 100mm≤R191≤200mm, 450mm≤R192≤650mm;

[0047] The object side radius of the 20th lens is R201, and the image side radius is R202, 1000mm≤R201≤1300mm, 70mm≤R202≤120mm.

[0048] In one embodiment, the refractive index of the first lens is n1, 1.50≤n1≤1.60; the refractive index of the second lens is n2, 1.45≤n2≤1.55;

[0049] The refractive index of the third lens is n3, 1.45≤n3≤1.50;

[0050] The refractive index of the fourth lens is n4, 1.45≤n4≤1.55;

[0051] The refractive index of the fifth lens is n5, 1.55≤n5≤1.62;

[0052] The refractive index of the sixth lens is n6, 1.55≤n6≤1.62;

[0053] The refractive index of the seventh lens is n7, 1.55≤n7≤1.62;

[0054] The refractive index of the eighth lens is n8, 1.55≤n8≤1.62;

[0055] The refractive index of the ninth lens is n9, 1.55≤n9≤1.62;

[0056] The refractive index of the tenth lens is n10, 1.55≤n10≤1.60;

[0057] The refractive index of the eleventh lens is n11, 1.45≤n11≤1.51;

[0058] The refractive index of the twelfth lens is n12, 1.45≤n12≤1.51;

[0059] The refractive index of the thirteenth lens is n13, 1.45≤n13≤1.51;

[0060] The refractive index of the fourteenth lens is n14, 1.45≤n14≤1.51;

[0061] The refractive index of the fifteenth lens is n15, 1.48≤n15≤1.51;

[0062] The refractive index of the sixteenth lens is n16, 1.58≤n16≤1.62;

[0063] The refractive index of the seventeenth lens is n17, 1.58≤n17≤1.62;

[0064] The refractive index of the eighteenth lens is n18, 1.51≤n18≤1.62;

[0065] The refractive index of the nineteenth lens is n19, 1.58≤n19≤1.62;

[0066] The refractive index of the twentieth lens is n20, and 1.48≤n20≤1.52.

[0067] In one embodiment, the dispersion coefficient of the first lens is v1, 60≤v1≤70; the dispersion coefficient of the second lens is v2, 70≤v2≤85;

[0068] The dispersion coefficient of the third lens is v3, 60≤v3≤70;

[0069] The dispersion coefficient of the fourth lens is v4, 70≤v4≤85;

[0070] The dispersion coefficient of the fifth lens is v5, 30≤v5≤40;

[0071] The dispersion coefficient of the sixth lens is v6, 30≤v6≤40;

[0072] The dispersion coefficient of the seventh lens is v7, 40≤v7≤45;

[0073] The dispersion coefficient of the eighth lens is v8, 40≤v8≤45;

[0074] The dispersion coefficient of the ninth lens is v9, 35≤v9≤40;

[0075] The dispersion coefficient of the tenth lens is v10, 35≤v10≤45;

[0076] The dispersion coefficient of the eleventh lens is v11, 75≤v11≤85;

[0077] The dispersion coefficient of the twelfth lens is v12, 75≤v12≤85;

[0078] The dispersion coefficient of the thirteenth lens is v13, 75≤v13≤85;

[0079] The dispersion coefficient of the fourteenth lens is v14, 75≤v14≤85;

[0080] The dispersion coefficient of the fifteenth lens is v15, 70≤v15≤75;

[0081] The dispersion coefficient of the sixteenth lens is v16, 35≤v16≤45;

[0082] The dispersion coefficient of the seventeenth lens is v17, 35≤v17≤45;

[0083] The dispersion coefficient of the eighteenth lens is v18, 60≤v18≤65;

[0084] The dispersion coefficient of the nineteenth lens is v19, 35≤v19≤45;

[0085] The dispersion coefficient of the twentieth lens is v20, 60≤v20≤70.

[0086] In one embodiment, the focal length of the projection objective lens is f, the conjugate working distance is L, 800 mm ≤ L ≤ 900 mm, and 1.98 ≤ f / L ≤ 2.23.

[0087] In one embodiment, the numerical aperture of the projection objective is NA, 0.08≤NA≤0.1.

[0088] In one embodiment, the projection objective lens further includes an aperture stop, which is disposed between the twelfth lens and the thirteenth lens, and a distance d between the aperture stop and the object side surface of the thirteenth lens, wherein 0.19 mm≤d≤0.21 mm.

[0089] The utility model also provides a projection device, the projection device includes a projection lens, the projection lens has an object side and an image side correspondingly arranged along the optical axis direction, the projection lens includes a first lens, a second lens, a third lens, a fourth lens, a fifth lens, a sixth lens, a seventh lens, an eighth lens, a ninth lens, a tenth lens, an eleventh lens, a twelfth lens, a thirteenth lens, a fourteenth lens, a fifteenth lens, a sixteenth lens, a seventeenth lens, an eighteenth lens, a nineteenth lens, and a twentieth lens arranged in sequence from the object side to the image side;

[0090] Among them, the third lens, the fourth lens, the fifth lens, the sixth lens, the eleventh lens, the twelfth lens, the thirteenth lens, the fourteenth lens, the fifteenth lens, the seventeenth lens, the eighteenth lens, and the nineteenth lens have positive optical power; the first lens, the second lens, the seventh lens, the eighth lens, the ninth lens, the tenth lens, the sixteenth lens, and the twentieth lens have negative optical power, so that the exposure full field of view of the projection objective is less than or equal to 30 mm, and the resolution is less than or equal to 1.5 μm.

[0091] The technical solution of the utility model forms a double telecentric structure by designing and arranging twenty optical lenses. The double telecentric system has the characteristic of small distortion, which means that the distortion value will be very small during the imaging process, which is very important for the application requirements of the projection objective 100. The double telecentric system can maintain a stable magnification within the entire depth of field, so the imaging quality will not change due to the change in the distance between the object and the projection objective, and has a high exposure tolerance rate. BRIEF DESCRIPTION OF THE DRAWINGS

[0092] In order to more clearly illustrate the embodiments of the utility model or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the utility model. For ordinary technicians in this field, other drawings can be obtained based on the structures shown in these drawings without paying creative work.

[0093] Figure 1 A schematic structural diagram of an embodiment of a projection objective lens provided by the utility model;

[0094] Figure 2 for Figure 1 MTF curve of the medium projection objective at 350lp / mm;

[0095] Figure 3 for Figure 1 Relative distortion curve of the projection objective.

[0096] Description of Figure Numbers:

[0097] 100. Projection objective lens; 1. first lens; 2. second lens; 3. third lens; 4. fourth lens; 5. fifth lens; 6. sixth lens; 7. seventh lens; 8. eighth lens; 9. ninth lens; 10. tenth lens; 11. eleventh lens; 12. twelfth lens; 13. thirteenth lens; 14. fourteenth lens; 15. fifteenth lens; 16. sixteenth lens; 17. seventeenth lens; 18. eighteenth lens; 19. nineteenth lens; 20. twentieth lens.

[0098] The realization of the purpose, functional features and advantages of the utility model will be further explained in conjunction with embodiments and with reference to the accompanying drawings. DETAILED DESCRIPTION

[0099] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments of the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0100] It should be noted that if the embodiments of the present invention involve directional indications (such as up, down, left, right, front, back...), the directional indications are only used to explain the relative position relationship, movement status, etc. between the components in a certain specific posture. If the specific posture changes, the directional indications will also change accordingly.

[0101] In addition, if there are descriptions involving "first", "second", etc. in the embodiments of the utility model, the descriptions of "first", "second", etc. are only used for descriptive purposes and cannot be understood as indicating or implying their relative importance or implicitly indicating the number of technical features indicated. Therefore, the features limited to "first" and "second" may explicitly or implicitly include at least one of the features. In addition, if "and / or" or "and / or" appears in the full text, its meaning includes three parallel solutions. Taking "A and / or B" as an example, it includes solution A, solution B, or solutions that satisfy both A and B. In addition, the technical solutions between the various embodiments can be combined with each other, but it must be based on the ability of ordinary technicians in this field to implement. When the combination of technical solutions is contradictory or cannot be implemented, it should be deemed that such combination of technical solutions does not exist and is not within the scope of protection required by the utility model.

[0102] The resolution and exposure field of the projection lens determine the accuracy and efficiency of the process. In principle, the two are contradictory points. It is difficult to achieve high resolution and large field of view at the same time within a limited cost.

[0103] The utility model provides a projection objective lens which can meet the requirements of high resolution and large field of view at the same time.

[0104] See also Figure 1 In one embodiment of the utility model, the projection objective lens 100 has an object side and an image side correspondingly arranged along the optical axis direction, and the projection objective lens 100 includes a first lens 1, a second lens 2, a third lens 3, a fourth lens 4, a fifth lens 5, a sixth lens 6, a seventh lens 7, an eighth lens 8, a ninth lens 9, a tenth lens 10, an eleventh lens 11, a twelfth lens 12, a thirteenth lens 13, a fourteenth lens 14, a fifteenth lens 15, a sixteenth lens 16, a seventeenth lens 17, an eighteenth lens 18, a nineteenth lens 19, and a twentieth lens 20 arranged in sequence from the object side to the image side;

[0105] Among them, the third lens 3, the fourth lens 4, the fifth lens 5, the sixth lens 6, the eleventh lens 11, the twelfth lens 12, the thirteenth lens 13, the fourteenth lens 14, the fifteenth lens 15, the seventeenth lens 17, the eighteenth lens 18, and the nineteenth lens 19 have positive optical power; the first lens 1, the second lens 2, the seventh lens 7, the eighth lens 8, the ninth lens 9, the tenth lens 10, the sixteenth lens 16, and the twentieth lens 20 have negative optical power, so that the exposure full field of view of the projection objective is less than or equal to 30 mm, and the resolution is less than or equal to 1.5 μm.

[0106] The technical solution of the utility model enables the projection objective 100 to achieve high resolution and large field of view at the same time by adopting the design and arrangement of twenty optical lenses. Among them, the design and arrangement of the twenty optical lenses form a double telecentric structure. The double telecentric system has the characteristic of zero distortion, which means that there will be no shape distortion or deformation during the imaging process, which is very important for the application requirements of the projection objective 100. The double telecentric system can maintain a stable magnification within the entire depth of field, so the image quality will not change due to the change in the distance between the object and the projection objective 100, which makes it have excellent performance in actual exposure.

[0107] The optical power determines the degree to which the lens focuses or diverges light. If the optical power is a positive value, it means that the lens has focusing ability and can converge light to a point; if the optical power is a negative value, it means that the lens has diverging ability and can diverge light. The optical power is the reciprocal of the focal length of the lens. By changing the focal length of each lens, its optical power can be adjusted, thereby changing the focusing or diverging ability of the entire projection objective 100. In addition, temperature changes will affect the refractive index of the optical material, thereby affecting the optical power of the lens. For example, some optical materials will expand when the temperature rises, resulting in an increase in the refractive index, thereby reducing the optical power; and they will contract when the temperature drops, resulting in a decrease in the refractive index, thereby increasing the optical power. Taking into account the temperature factor and the image requirements, the design parameters of each lens are as follows: the focal power of the first lens 1 is φ1, -0.004≤φ1≤-0.001; the focal power of the second lens 2 is φ2, -0.008≤φ2≤-0.004; the focal power of the third lens 3 is φ3, 0.001≤φ3≤0.003; the focal power of the fourth lens 4 is φ4, 0.002≤φ4≤0.005; the focal power of the fifth lens 5 is φ5, 0.002 ≤φ5≤0.004; the focal power of the sixth lens 6 is φ6, 0.003≤φ6≤0.006; the focal power of the seventh lens 7 is φ7, -0.003≤φ7≤-0.001; the focal power of the eighth lens 8 is φ8, -0.006≤φ8≤-0.003; the focal power of the ninth lens 9 is φ9, -0.008≤φ9≤-0.007; the focal power of the tenth lens 10 is φ10, -0.007≤φ10≤-0.004; The focal power of the eleventh lens 11 is φ11, 0.005≤φ11≤0.008; the focal power of the twelfth lens 12 is φ12, 0.004≤φ12≤0.006; the focal power of the thirteenth lens 13 is φ13, 0.001≤φ13≤0.003; the focal power of the fourteenth lens 14 is φ14, 0.005≤φ14≤0.007; the focal power of the fifteenth lens 15 is φ15, 0.001≤φ15≤0.002; The optical focal power of the sixteenth lens 16 is φ16, -0.009≤φ16≤-0.007; the optical focal power of the seventeenth lens 17 is φ17, 0.002≤φ17≤0.004; the optical focal power of the eighteenth lens 18 is φ18, 0.001≤φ18≤0.002; the optical focal power of the nineteenth lens 19 is φ19, 0.002≤φ19≤0.004; the optical focal power of the twentieth lens 20 is φ20, -0.007≤φ20≤-0.004.

[0108] In order to achieve high resolution and large field of view at a lower cost, the first lens 1 to the twentieth lens 20, a total of twenty lenses, are all set as spherical lenses. The manufacturing cost of spherical lenses is lower than that of aspherical lenses, which can make the overall manufacturing cost lower.

[0109] In order to meet the requirements of optical power, each spherical lens is designed as follows: the radius of the object side surface of the first lens 1 is R11, and the radius of the image side surface is R12, -500mm≤R11≤-400mm, 200mm≤R12≤350mm; the radius of the object side surface of the second lens 2 is R21, and the radius of the image side surface is R22, -100mm≤R21≤-50mm, -1700mm≤R22≤-1500mm; the radius of the object side surface of the third lens 3 is R31, and the radius of the image side surface is R32, -400mm≤R31≤-300mm, -150mm≤R32≤-80mm; the radius of the object side surface of the fourth lens 4 is R41, and the radius of the image side surface is R42, 13 00mm≤R41≤1600mm, -180mm≤R42≤-130mm; the object side radius of the fifth lens 5 is R51, and the image side radius is R52, 400mm≤R51≤550mm, -500mm≤R52≤-300mm; the object side radius of the sixth lens 6 is R61, and the image side radius is R62, 100mm≤R61≤200mm, 650mm≤R62≤850mm; the object side radius of the seventh lens 7 is R71, and the image side radius is R72, 100mm≤R71≤200mm, 50mm≤R72≤110mm; the object side radius of the eighth lens 8 is R81, and the image side radius is R8 2, -400mm≤R81≤-250mm, 120mm≤R82≤250mm; the radius of the object side surface of the ninth lens 9 is R91, and the radius of the image side surface is R92, -210mm≤R91≤-90mm, 650mm≤R92≤850mm; the radius of the object side surface of the tenth lens 10 is R101, and the radius of the image side surface is R102, -300mm≤R101≤-150mm, 150mm≤R102≤300mm; the radius of the object side surface of the eleventh lens 11 is R111, and the radius of the image side surface is R112, 150mm≤R111≤300mm, -250mm≤R112≤-100mm; the twelfth lens 12 The object side radius is R121, the image side radius is R122, 400mm≤R121≤600mm, -250mm≤R122≤-100mm; the object side surface of the thirteenth lens 13 is set to be a plane, and the image side radius is R132, -400mm≤R132≤-250mm; the object side surface radius of the fourteenth lens 14 is R141, the image side surface radius is R142, 100mm≤R141≤250mm, -350mm≤R142≤-200mm; the object side surface radius of the fifteenth lens 15 is R151, the image side surface radius is R152, 100mm≤R151≤250mm, 200mm≤R152≤300mm;The object side radius of the sixteenth lens 16 is R161, and the image side radius is R162, -400mm≤R161≤-200mm, 80mm≤R162≤150mm; the object side radius of the seventeenth lens 17 is R171, and the image side radius is R172, 100mm≤R171≤250mm, -700mm≤R172≤-550mm; the object side radius of the eighteenth lens 18 is R181, and the image side radius is R182, 1 50mm≤R181≤250mm, 1000mm≤R182≤1500mm; the object side radius of the nineteenth lens 19 is R191, the image side radius is R192, 100mm≤R191≤200mm, 450mm≤R192≤650mm; the object side radius of the twentieth lens 20 is R201, the image side radius is R202, 1000mm≤R201≤1300mm, 70mm≤R202≤120mm. ;

[0110] In addition, the distance from the center of the object side surface of the first lens 1 to the center of the image side surface is d1, 3≤d1≤10; the distance from the center of the object side surface of the second lens 2 to the center of the image side surface of the first lens 1 is d2, 15≤d2≤25; the distance from the center of the object side surface of the second lens 2 to the center of the image side surface is d3, 3≤d3≤10; the distance from the center of the object side surface of the third lens 3 to the center of the image side surface of the second lens 2 is d4, 15≤d4≤35; the distance from the center of the object side surface of the third lens 3 to the center of the image side surface is d5, 15≤d5≤25; the distance from the center of the object side surface of the fourth lens 4 to the center of the image side surface of the third lens 3 is d6, 0.15≤d6≤0.3; the distance from the center of the object side surface of the fourth lens 4 to the center of the image side surface is d7, 10≤d7 ≤30; the distance from the center of the object side surface of the fifth lens 5 to the center of the image side surface of the fourth lens 4 is d8, 0.15≤d8≤0.3; the distance from the center of the object side surface of the fifth lens 5 to the center of the image side surface is d9, 10≤d9≤30; the distance from the center of the object side surface of the sixth lens 6 to the center of the image side surface of the fifth lens 5 is d10, 0.15≤d10≤0.3; the distance from the center of the object side surface of the sixth lens 6 to the center of the image side surface is d11, 10≤d11≤25; the distance from the center of the object side surface of the seventh lens 7 to the center of the image side surface of the sixth lens 6 is d10, 0.15≤d12≤0.3; the distance from the center of the object side surface of the seventh lens 7 to the center of the image side surface is d13, 30≤d13≤50; the distance from the center of the object side surface of the eighth lens 8 to the center of the image side surface The distance from the center of the image side surface of the seventh lens 7 is d10, 15≤d14≤25; the distance from the center of the object side surface of the eighth lens 8 to the center of the image side surface is d15, 1≤d15≤5; the distance from the center of the object side surface of the ninth lens 9 to the center of the image side surface of the eighth lens 8 is d16, 60≤d16≤90; the distance from the center of the object side surface of the ninth lens 9 to the center of the image side surface is d17, 1≤d17≤4; the distance from the center of the object side surface of the tenth lens 10 to the center of the image side surface of the ninth lens 9 is d18, 3≤d18≤7; the distance from the center of the object side surface of the tenth lens 10 to the center of the image side surface is d19, 2≤d19≤6; the distance from the center of the object side surface of the eleventh lens 11 to the center of the image side surface of the tenth lens 10 is d20, 0.2≤d 20≤1.5; the distance from the center of the object side surface of the eleventh lens 11 to the center of the image side surface is d21, 10≤d21≤25; the distance from the center of the object side surface of the twelfth lens 12 to the center of the image side surface of the eleventh lens 11 is d22, 0.15≤d22≤0.3; the distance from the center of the object side surface of the twelfth lens 12 to the center of the image side surface is d23, 10≤d23≤20; the distance from the aperture to the center of the image side surface of the twelfth lens 12 is d24, 100≤d24≤200; the thickness of the aperture is d25, 0.2≤d25≤1; the distance from the center of the object side surface of the thirteenth lens 13 to the aperture is d26, 2≤d26≤10; the distance from the center of the object side surface of the thirteenth lens 13 to the center of the image side surface is d27, 0.2≤d27≤1; the distance from the center of the object side surface of the fourteenth lens 14 to the center of the image side surface of the thirteenth lens 13 is d28, 10≤d28≤20; the distance from the center of the object side surface of the fourteenth lens 14 to the center of the image side surface is d29, 0.2≤d29≤1; the distance from the center of the object side surface of the fifteenth lens 15 to the center of the image side surface of the fourteenth lens 14 is d30, 4≤d30≤8; the distance from the center of the object side surface of the fifteenth lens 15 to the center of the image side surface is d31, 3≤d31≤8; the distance from the center of the object side surface of the sixteenth lens 16 to the center of the image side surface of the fifteenth lens 15 is d32, 3≤d32≤10; the distance from the center of the object side surface of the sixteenth lens 16 to the center of the image side surface is d33, 100≤d33≤150; the distance from the center of the object side surface of the seventeenth lens 17 to the center of the image side surface of the sixteenth lens 16 is d3 4, 10≤d34≤20; the distance from the center of the object side surface of the seventeenth lens 17 to the center of the image side surface is d35, 0.2≤d35≤1; the distance from the center of the object side surface of the eighteenth lens 18 to the center of the image side surface of the seventeenth lens 17 is d36, 3≤d36≤10; the distance from the center of the object side surface of the eighteenth lens 18 to the center of the image side surface is d37, 0.2≤d37≤1; the distance from the center of the object side surface of the nineteenth lens 19 to the center of the image side surface of the eighteenth lens 18 is d38, 10≤d38≤30; the distance from the center of the object side surface of the nineteenth lens 19 to the center of the image side surface is d39, 0.2≤d39≤2; the distance from the center of the object side surface of the twentieth lens 20 to the center of the image side surface of the nineteenth lens 19 is d40, 20≤d40≤35; the distance from the center of the object side surface of the twentieth lens 20 to the center of the image side surface is d41. .

[0111] The refractive index has a profound impact on the projection lens 100, including but not limited to the imaging quality, focal length, chromatic aberration, and the design and manufacture of optical elements. The refractive index of each lens in the projection lens 100 is: the refractive index of the first lens 1 is n1, 1.50≤n1≤1.60; the refractive index of the second lens 2 is n2, 1.45≤n2≤1.55; the refractive index of the third lens 3 is n3, 1.45≤n3≤1.50; the refractive index of the fourth lens 4 is n4, 1.45≤n4≤1.55; the refractive index of the fifth lens 5 is n5, 1.55≤n5≤1. 62; the refractive index of the sixth lens 6 is n6, 1.55≤n6≤1.62; the refractive index of the seventh lens 7 is n7, 1.55≤n7≤1.62; the refractive index of the eighth lens 8 is n8, 1.55≤n8≤1.62; the refractive index of the ninth lens 9 is n9, 1.55≤n9≤1.62; the refractive index of the tenth lens 10 is n10, 1.55≤n10≤1.60; the refractive index of the eleventh lens 11 The refractive index of the twelfth lens 12 is n12, 1.45≤n12≤1.51; the refractive index of the thirteenth lens 13 is n13, 1.45≤n13≤1.51; the refractive index of the fourteenth lens 14 is n14, 1.45≤n14≤1.51; the refractive index of the fifteenth lens 15 is n15, 1.48≤n15≤1.51; The refractive index of the sixth lens 16 is n16, 1.58≤n16≤1.62; the refractive index of the seventeenth lens 17 is n17, 1.58≤n17≤1.62; the refractive index of the eighteenth lens 18 is n18, 1.51≤n18≤1.62; the refractive index of the nineteenth lens 19 is n19, 1.58≤n19≤1.62; the refractive index of the twentieth lens 20 is n20, 1.48≤n20≤1.52. By setting the refractive index, the design wavelength of the projection objective 100 is 370nm to 380nm.

[0112] In addition, the dispersion coefficient of the lens is one of the important factors that determine the size of its chromatic aberration. Chromatic aberration is caused by the different refractive indices of light of different wavelengths when passing through the lens, which causes light of different colors to be unable to converge at the same focal point at the same time, thus forming chromatic aberration. In order to ensure the quality of imaging and reduce chromatic aberration, lenses can be made by combining multiple lenses and selecting materials with matching dispersion coefficients, wherein the dispersion coefficient of the first lens 1 is v1, 60≤v1≤70; the dispersion coefficient of the second lens 2 is v2, 70≤v2≤85; the dispersion coefficient of the third lens 3 is v3, 60≤v3≤70; the dispersion coefficient of the fourth lens 4 is v4, 70≤v4≤85; the dispersion coefficient of the fifth lens 5 is v5, 30≤v5≤40; the dispersion coefficient of the sixth lens 6 is v6, 30≤v6≤40; the dispersion coefficient of the seventh lens 7 is v7, 40≤v7≤45; the dispersion coefficient of the eighth lens 8 is v8, 40≤v8≤45; the dispersion coefficient of the ninth lens 9 is v9, 35≤v9≤40; the dispersion coefficient of the tenth lens 10 is v10, 35≤v 10≤45; the dispersion coefficient of the eleventh lens 11 is v11, 75≤v11≤85; the dispersion coefficient of the twelfth lens 12 is v12, 75≤v12≤85; the dispersion coefficient of the thirteenth lens 13 is v13, 75≤v13≤85; the dispersion coefficient of the fourteenth lens 14 is v14, 75≤v14≤85; the dispersion coefficient of the fifteenth lens 15 is v15, 70≤v15≤ 75; the dispersion coefficient of the sixteenth lens 16 is v16, 35≤v16≤45; the dispersion coefficient of the seventeenth lens 17 is v17, 35≤v17≤45; the dispersion coefficient of the eighteenth lens 18 is v18, 60≤v18≤65; the dispersion coefficient of the nineteenth lens 19 is v19, 35≤v19≤45; the dispersion coefficient of the twentieth lens 20 is v20, 60≤v20≤70.

[0113] Based on the above characteristics, the exposure field of the projection objective is less than or equal to 30 mm, and the resolution is less than or equal to 1.5 μm.

[0114] The data of one specific embodiment are given below:

[0115]

[0116]

[0117]

[0118] The utility model also provides a projection device, the projection device includes a projection lens 100, the projection lens 100 has an object side and an image side correspondingly arranged along the optical axis direction, the projection lens 100 includes a first lens 1, a second lens 2, a third lens 3, a fourth lens 4, a fifth lens 5, a sixth lens 6, a seventh lens 7, an eighth lens 8, a ninth lens 9, a tenth lens 10, an eleventh lens 11, a twelfth lens 12, a thirteenth lens 13, a fourteenth lens 14, a fifteenth lens 15, a sixteenth lens 16, a seventeenth lens 17, an eighteenth lens 18, a nineteenth lens 19, and a twentieth lens 20 arranged in sequence from the object side to the image side; wherein the third lens 3 , the fourth lens 4, the fifth lens 5, the sixth lens 6, the eleventh lens 11, the twelfth lens 12, the thirteenth lens 13, the fourteenth lens 14, the fifteenth lens 15, the seventeenth lens 17, the eighteenth lens 18, and the nineteenth lens 19 have positive focal lengths; the first lens 1, the second lens 2, the seventh lens 7, the eighth lens 8, the ninth lens 9, the tenth lens 10, the sixteenth lens 16, and the twenty-third lens 20 have negative focal lengths, so that the exposure field area of ​​the projection objective lens 100 is maximized to 30 mm, and the resolution is less than or equal to 1.5 μm. The specific structure of the projection objective lens 100 refers to the above embodiment. Since the projection device adopts all the technical solutions of all the above embodiments, it at least has all the beneficial effects brought by the technical solutions of the above embodiments, which will not be repeated here.

[0119] The above description is only an exemplary embodiment of the present invention, and does not limit the patent scope of the present invention. All equivalent structural changes made by using the contents of the present invention specification and drawings under the technical concept of the present invention, or directly / indirectly applied in other related technical fields are included in the patent protection scope of the present invention.

Claims

1. A projection objective lens, characterized in that: The projection objective lens has an object side and an image side correspondingly arranged along the optical axis direction, and the projection objective lens includes a first lens, a second lens, a third lens, a fourth lens, a fifth lens, a sixth lens, a seventh lens, an eighth lens, a ninth lens, a tenth lens, an eleventh lens, a twelfth lens, a thirteenth lens, a fourteenth lens, a fifteenth lens, a sixteenth lens, a seventeenth lens, an eighteenth lens, a nineteenth lens, and a twentieth lens arranged in sequence from the object side to the image side; Among them, the third lens, the fourth lens, the fifth lens, the sixth lens, the eleventh lens, the twelfth lens, the thirteenth lens, the fourteenth lens, the fifteenth lens, the seventeenth lens, the eighteenth lens, and the nineteenth lens have positive optical power; the first lens, the second lens, the seventh lens, the eighth lens, the ninth lens, the tenth lens, the sixteenth lens, and the twentieth lens have negative optical power, so that the exposure full field of view of the projection objective is less than or equal to 30 mm, and the resolution is less than or equal to 1.5 μm.

2. The projection objective according to claim 1, characterized in that The optical power of the first lens is φ1, -0.004≤φ1≤-0.001; The focal power of the second lens is φ2, -0.008≤φ2≤-0.004; The focal power of the third lens is φ3, 0.001≤φ3≤0.003; The optical power of the fourth lens is φ4, 0.002≤φ4≤0.005; The optical power of the fifth lens is φ5, 0.002≤φ5≤0.004; The focal power of the sixth lens is φ6, 0.003≤φ6≤0.006; The optical power of the seventh lens is φ7, -0.003≤φ7≤-0.001; The optical power of the eighth lens is φ8, -0.006≤φ8≤-0.003; The optical power of the ninth lens is φ9, -0.008≤φ9≤-0.007; The optical power of the tenth lens is φ10, -0.007≤φ10≤-0.004; The optical power of the eleventh lens is φ11, 0.005≤φ11≤0.008; The focal power of the twelfth lens is φ12, 0.004≤φ12≤0.006; The focal power of the thirteenth lens is φ13, 0.001≤φ13≤0.003; The optical power of the fourteenth lens is φ14, 0.005≤φ14≤0.007; The optical power of the fifteenth lens is φ15, 0.001≤φ15≤0.002; The optical power of the sixteenth lens is φ16, -0.009≤φ16≤-0.007; The optical power of the seventeenth lens is φ17, 0.002≤φ17≤0.004; The optical power of the eighteenth lens is φ18, 0.001≤φ18≤0.002; The optical power of the nineteenth lens is φ19, 0.002≤φ19≤0.004; The optical power of the twentieth lens is φ20, -0.007≤φ20≤-0.

004.

3. The projection objective according to claim 1, characterized in that The twenty lenses, namely the first lens to the twentieth lens, are all configured as spherical lenses.

4. The projection objective according to claim 3, characterized in that The object side radius of the first lens is R11, the image side radius is R12, -500mm≤R11≤-400mm, 200mm≤R12≤350mm; The object side radius of the second lens is R21, and the image side radius is R22, -100mm≤R21≤-50mm, -1700mm≤R22≤-1500mm; The object side radius of the third lens is R31, and the image side radius is R32, -400mm≤R31≤-300mm, -150mm≤R32≤-80mm; The fourth lens has an object side radius of R41 and an image side radius of R42, 1300mm≤R41≤1600mm, -180mm≤R42≤-130mm; The object side radius of the fifth lens is R51, and the image side radius is R52, 400mm≤R51≤550mm, -500mm≤R52≤-300mm; The object side radius of the sixth lens is R61, and the image side radius is R62, 100mm≤R61≤200mm, 650mm≤R62≤850mm; The object side radius of the seventh lens is R71, and the image side radius is R72, 100mm≤R71≤200mm, 50mm≤R72≤110mm; The object side radius of the eighth lens is R81, and the image side radius is R82, -400mm≤R81≤-250mm, 120mm≤R82≤250mm; The radius of the object side surface of the ninth lens is R91, and the radius of the image side surface is R92, -210mm≤R91≤-90mm, 650mm≤R92≤850mm; The object side radius of the tenth lens is R101, and the image side radius is R102, -300mm≤R101≤-150mm, 150mm≤R102≤300mm; The object side radius of the eleventh lens is R111, and the image side radius is R112, 150mm≤R111≤300mm, -250mm≤R112≤-100mm; The object side radius of the twelfth lens is R121, and the image side radius is R122, 400mm≤R121≤600mm, -250mm≤R122≤-100mm; The object side surface of the thirteenth lens is set to be a plane, and the image side surface radius is R132, -400mm≤R132≤-250mm; The object side radius of the fourteenth lens is R141, and the image side radius is R142, 100mm≤R141≤250mm, -350mm≤R142≤-200mm; The object side radius of the fifteenth lens is R151, and the image side radius is R152, 100mm≤R151≤250mm, 200mm≤R152≤300mm; The object side radius of the sixteenth lens is R161, the image side radius is R162, -400mm≤R161≤-200mm, 80mm≤R162≤150mm; The object side radius of the seventeenth lens is R171, and the image side radius is R172, 100mm≤R171≤250mm, -700mm≤R172≤-550mm; The object side radius of the eighteenth lens is R181, and the image side radius is R182, 150mm≤R181≤250mm, 1000mm≤R182≤1500mm; The object side radius of the nineteenth lens is R191, and the image side radius is R192, 100mm≤R191≤200mm, 450mm≤R192≤650mm; The object side radius of the 20th lens is R201, and the image side radius is R202, 1000mm≤R201≤1300mm, 70mm≤R202≤120mm.

5. The projection objective according to claim 1, wherein: The refractive index of the first lens is n1, 1.50≤n1≤1.60; The refractive index of the second lens is n2, 1.45≤n2≤1.55; The refractive index of the third lens is n3, 1.45≤n3≤1.50; The refractive index of the fourth lens is n4, 1.45≤n4≤1.55; The refractive index of the fifth lens is n5, 1.55≤n5≤1.62; the refractive index of the sixth lens is n6, 1.55≤n6≤1.62; the refractive index of the seventh lens is n7, 1.55≤n7≤1.62; the refractive index of the eighth lens is n8, 1.55≤n8≤1.62; the refractive index of the ninth lens is n9, 1.55≤n9≤1.62; the refractive index of the tenth lens is n10, 1.55≤n10≤1.60; the refractive index of the eleventh lens is n11, 1.45≤n11≤1.51; the refractive index of the twelfth lens is n12, 1.45≤n12≤1.51; the refractive index of the thirteenth lens is n13, 1.55≤n13≤1.51; The refractive index is n13, 1.45≤n13≤1.51; the refractive index of the fourteenth lens is n14, 1.45≤n14≤1.51; the refractive index of the fifteenth lens is n15, 1.48≤n15≤1.51; the refractive index of the sixteenth lens is n16, 1.58≤n16≤1.62; the refractive index of the seventeenth lens is n17, 1.58≤n17≤1.62; the refractive index of the eighteenth lens is n18, 1.51≤n18≤1.62; the refractive index of the nineteenth lens is n19, 1.58≤n19≤1.62; and the refractive index of the twentieth lens is n20, 1.48≤n20≤1.

52.

6. The projection objective according to claim 1, wherein: The dispersion coefficient of the first lens is v1, 60≤v1≤70; The dispersion coefficient of the second lens is v2, 70≤v2≤85; The dispersion coefficient of the third lens is v3, 60≤v3≤70; The dispersion coefficient of the fourth lens is v4, 70≤v4≤85; The dispersion coefficient of the fifth lens is v5, 30≤v5≤40; The dispersion coefficient of the sixth lens is v6, 30≤v6≤40; The dispersion coefficient of the seventh lens is v7, 40≤v7≤45; The dispersion coefficient of the eighth lens is v8, 40≤v8≤45; The dispersion coefficient of the ninth lens is v9, 35≤v9≤40; The dispersion coefficient of the tenth lens is v10, 35≤v10≤45; The dispersion coefficient of the eleventh lens is v11, 75≤v11≤85; the dispersion coefficient of the twelfth lens is v12, 75≤v12≤85; The dispersion coefficient of the thirteenth lens is v13, 75≤v13≤85; The dispersion coefficient of the fourteenth lens is v14, 75≤v14≤85; The dispersion coefficient of the fifteenth lens is v15, 70≤v15≤75; The dispersion coefficient of the sixteenth lens is v16, 35≤v16≤45; The dispersion coefficient of the seventeenth lens is v17, 35≤v17≤45; The dispersion coefficient of the eighteenth lens is v18, 60≤v18≤65; The dispersion coefficient of the nineteenth lens is v19, 35≤v19≤45; The dispersion coefficient of the twentieth lens is v20, 60≤v20≤70.

7. The projection objective according to claim 1, characterized in that The focal length of the projection objective lens is f, the conjugate working distance is L, 800mm≤L≤900mm, and 1.98≤f / L≤2.

23.

8. The projection objective according to claim 1, wherein: The numerical aperture of the projection objective lens is NA, 0.08≤NA≤0.

1.

9. The projection objective according to claim 1, wherein: The projection objective lens also includes a diaphragm, which is arranged between the twelfth lens and the thirteenth lens, and the distance between the diaphragm and the object side surface of the thirteenth lens is d, 0.19mm≤d≤0.21mm.

10. A projection device, characterized in that: Comprising the projection objective lens as described in any one of claims 1 to claim 9.

Images