Protective solution coating equipment

Abstract

The utility model relates to the technical field of semiconductors, in particular to protective solution coating equipment. The protective solution coating equipment comprises a storage container, a nozzle mechanism and a cleaning mechanism, wherein the storage container is used for storing a protective solution; the nozzle mechanism comprises a liquid conveying pipeline and a nozzle connected to one end of the liquid conveying pipeline, and the other end of the liquid conveying pipeline is connected with the storage container; the cleaning mechanism comprises a water source assembly and an air source assembly which are connected with the nozzles through liquid conveying pipelines. Wherein the water source assembly is configured to be capable of conveying cleaning liquid to the nozzle, and the gas source assembly is configured to be capable of conveying gas to the nozzle. According to the protective solution coating equipment disclosed by the utility model, the nozzle can be cleaned after one-time coating, so that the problem that subsequent coating is not uniform due to the fact that the nozzle is blocked by hardened blocks can be solved, and the problem that products are unqualified due to the fact that hard blocks are sprayed on wafers during next-time coating can also be solved.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductors, in particular to a protective solution coating device. Background Art

[0002] Materials such as GaAs (gallium arsenide) are often used in semiconductor electronic components. Since these raw materials are brittle and easily broken and damaged, when using original diamond blades for cutting, in order to reduce problems such as breakage during cutting, the cutting speed needs to be reduced, which makes it difficult to improve cutting and production efficiency.

[0003] In order to improve the above problems, laser cutting technology is usually used for cutting, and the cutting efficiency can be increased by more than 10 times. Before laser cutting, a protective solution (i.e., coating solution) needs to be applied. The coating solution is a water-soluble resin that can prevent particles from adhering to the surface of the chip. The protective solution is usually applied by using the nozzle of a spin coater to spray the protective solution for spin coating; however, since the protective solution will gradually harden when it comes into contact with the air, it is easy to harden and agglomerate at the nozzle, affecting the uniformity of the coating during subsequent operations, and even spraying the hard lumps onto the surface of the chip during the next coating, resulting in unqualified products. Utility Model Content

[0004] The utility model aims to provide a protective solution coating device, which can clean the nozzle after one coating to improve the problem of uneven subsequent coating caused by the nozzle being blocked by hardened lumps, and can also improve the problem of unqualified products caused by hard lumps being sprayed onto the wafer during the next coating.

[0005] The embodiment of the utility model is achieved as follows:

[0006] The utility model provides a protective solution coating device, comprising:

[0007] A storage container, wherein the storage container is used for storing a protective solution;

[0008] a nozzle mechanism, the nozzle mechanism comprising a liquid infusion pipeline and a nozzle connected to one end of the liquid infusion pipeline, the other end of the liquid infusion pipeline being connected to a storage container; and,

[0009] The cleaning mechanism includes a water source component and an air source component, both of which are connected to the nozzle through a liquid delivery pipeline; wherein the water source component is configured to deliver cleaning liquid to the nozzle, and the air source component is configured to deliver gas to the nozzle.

[0010] In an optional embodiment, the protective solution coating device further includes a one-way valve assembly, and the water source assembly and the air source assembly are both connected to the liquid delivery pipeline via the one-way valve assembly.

[0011] In an optional embodiment, the one-way valve assembly includes a connecting pipe and a first one-way valve and a second one-way valve connected to the connecting pipe; the infusion pipeline includes a first pipeline and a second pipeline, one end of the first pipeline is connected to the storage container, and the other end of the first pipeline is connected to one end of the connecting pipe, the other end of the connecting pipe is connected to one end of the second pipeline, and the other end of the second pipeline is connected to the nozzle;

[0012] The water source component is connected to the first one-way valve, and the air source component is connected to the second one-way valve.

[0013] In an optional embodiment, the one-way valve assembly further includes a third one-way valve connected between the connecting pipe and the first pipeline.

[0014] In an optional embodiment, the protective solution coating device further includes a first flow meter, the first flow meter is arranged in the first pipeline or the second pipeline; and / or,

[0015] The protective solution coating device also includes a second flow meter, which is arranged on the gas source component.

[0016] In an optional embodiment, the water source assembly includes a water pipe and a heater disposed on the water pipe, and the water pipe is connected to the nozzle via a liquid infusion pipeline.

[0017] In an optional embodiment, the cleaning mechanism further includes a time-delay solenoid valve, and at least one of the water source assembly and the air source assembly is connected to the time-delay solenoid valve.

[0018] In an optional embodiment, both the water source assembly and the air source assembly are connected to the time-delay solenoid valve.

[0019] The beneficial effects of the protective solution coating equipment of the embodiment of the utility model include: after the protective solution coating equipment provided by the embodiment of the utility model completes coating using the nozzle, the water source component can be used to deliver cleaning liquid to the nozzle, and the air source component can be used to deliver gas to the nozzle, so as to thoroughly clean the protective solution remaining in the nozzle, thereby improving the problem of the protective solution remaining in the nozzle hardening and agglomerating to block the nozzle, and improving the problem of subsequent uneven coating due to nozzle blockage, and improving the problem of hard lumps being sprayed onto the wafer during the next coating, resulting in unqualified products. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] In order to more clearly illustrate the technical solutions of the embodiments of the utility model, the drawings required for use in the embodiments will be briefly introduced below. It should be understood that the following drawings only show certain embodiments of the utility model and therefore should not be regarded as limiting the scope. For ordinary technicians in this field, other relevant drawings can be obtained based on these drawings without paying creative work.

[0021] Figure 1 It is a schematic structural diagram of the protective solution coating equipment in the embodiment of the utility model.

[0022] Icons: 010-protective solution coating equipment; 100-storage container; 200-nozzle mechanism; 210-infusion pipeline; 211-first pipeline; 212-second pipeline; 220-nozzle; 300-cleaning mechanism; 310-water source assembly; 311-water pipe; 312-heater; 320-air source assembly; 400-one-way valve assembly; 410-connecting pipe; 421-first one-way valve; 422-second one-way valve; 423-third one-way valve; 510-first flow meter; 520-second flow meter; 600-delay solenoid valve. DETAILED DESCRIPTION

[0023] In order to make the purpose, technical scheme and advantages of the embodiments of the utility model clearer, the technical scheme in the embodiments of the utility model will be clearly and completely described below in conjunction with the drawings in the embodiments of the utility model. Obviously, the described embodiments are part of the embodiments of the utility model, not all of the embodiments. Generally, the components of the embodiments of the utility model described and shown in the drawings here can be arranged and designed in various different configurations.

[0024] Therefore, the following detailed description of the embodiments of the present invention provided in the accompanying drawings is not intended to limit the scope of the present invention to be protected, but merely represents selected embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0025] It should be noted that similar reference numerals and letters denote similar items in the following drawings, and therefore, once an item is defined in one drawing, further definition and explanation thereof is not required in subsequent drawings.

[0026] In the description of the present utility model, it should be noted that the terms "upper", "lower", "inner", "outer", etc. indicate the orientation or position relationship based on the orientation or position relationship shown in the drawings, or the orientation or position relationship in which the utility model product is usually placed when in use, which is only for the convenience of describing the utility model and simplifying the description, and does not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present utility model. In addition, the terms "first", "second", etc. are only used to distinguish the description, and cannot be understood as indicating or implying relative importance.

[0027] In the description of the present invention, it is also necessary to explain that, unless otherwise clearly specified and limited, the terms "setting" and "connection" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be an indirect connection through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0028] Please refer to Figure 1 This embodiment provides a protective solution coating device 010, which may refer to a spin coating device, a spray coating device, etc., and is not specifically limited here.

[0029] The protective solution coating device 010 includes: a storage container 100, a nozzle mechanism 200 and a cleaning mechanism 300, the storage container 100 is used to store the protective solution; the nozzle mechanism 200 includes an infusion pipeline 210 and a nozzle 220 connected to one end of the infusion pipeline 210, and the other end of the infusion pipeline 210 is connected to the storage container 100; the cleaning mechanism 300 includes a water source component 310 and an air source component 320, and the water source component 310 and the air source component 320 are both connected to the nozzle 220 through the infusion pipeline 210; wherein the water source component 310 is configured to deliver cleaning liquid to the nozzle 220, and the air source component 320 is configured to deliver gas to the nozzle 220.

[0030] When the protective solution coating device 010 is in use, the protective solution stored in the storage container 100 can be transported to the nozzle 220 through the infusion pipeline 210 and sprayed from the nozzle 220, that is, the protective solution sprayed from the nozzle 220 can be applied to the wafer. After the nozzle 220 is used to complete the coating, the water source component 310 can be used to transport the cleaning liquid to the nozzle 220, and the gas source component 320 can be used to transport the gas to the nozzle 220, so as to thoroughly clean the protective solution remaining in the nozzle 220, thereby improving the problem of the protective solution remaining in the nozzle 220 hardening and agglomerating to block the nozzle 220, and improving the problem of subsequent uneven coating due to the blockage of the nozzle 220, and improving the problem of the hard block spraying on the wafer during the next coating, resulting in unqualified products. Moreover, the protective solution coating device 010 does not need to disassemble the nozzle 220 for cleaning, which ensures the ease of operation of cleaning the nozzle 220, and can shorten the time for the protective solution coating device 010 to stop cleaning the nozzle 220, which is conducive to ensuring more efficient production.

[0031] It should be noted that the above-mentioned cleaning fluid includes but is not limited to water; the above-mentioned gas includes but is not limited to air.

[0032] It should also be noted that other structures of the protective solution coating device 010 and the working principle of spraying are similar to those in the related art and will not be described in detail here.

[0033] The protective solution coating device 010 further includes a one-way valve assembly 400, and the water source assembly 310 and the air source assembly 320 are both connected to the liquid delivery pipeline 210 through the one-way valve assembly 400. Through the setting of the one-way valve assembly 400, only the water source assembly 310 can deliver the cleaning liquid to the nozzle 220, and only the air source assembly 320 can deliver the gas to the nozzle 220, and the external air will not flow into the storage container 100 through the one-way valve assembly 400 in the reverse direction, thereby improving the problem of hardening of the unused protective solution stored in the storage container 100.

[0034] Further, the one-way valve assembly 400 includes a connecting pipe 410 and a first one-way valve 421 and a second one-way valve 422 connected to the connecting pipe 410; the infusion pipeline 210 includes a first pipeline 211 and a second pipeline 212, one end of the first pipeline 211 is connected to the storage container 100, and the other end of the first pipeline 211 is connected to one end of the connecting pipe 410, the other end of the connecting pipe 410 is connected to one end of the second pipeline 212, and the other end of the second pipeline 212 is connected to the nozzle 220; the water source assembly 310 is connected to the first one-way valve 421, and the air source assembly 320 is connected to the second one-way valve 422. Such a configuration can prevent the protective solution from accidentally flowing to the air source assembly 320 and the water source assembly 310 when the infusion pipeline 210 transports the protective solution, that is, the first one-way valve 421 ensures that the transport direction is from the water source assembly 310 to the nozzle 220, and the second one-way valve 422 ensures that the transport direction is from the air source assembly 320 to the nozzle 220.

[0035] Furthermore, the one-way valve assembly 400 further includes a third one-way valve 423, which is connected between the connecting pipe 410 and the first pipeline 211. The third one-way valve 423 can effectively prevent the outside air and the gas delivered by the gas source assembly 320 from entering the storage container 100 through the infusion pipeline 210, thereby improving the problem of hardening of the unused protective solution stored in the storage container 100.

[0036] Optionally, the protective solution coating device 010 further includes a first flow meter 510, which is disposed in the first pipeline 211. The first flow meter 510 is used to detect the flow rate of the protective solution transported by the first pipeline 211, that is, the flow rate of the protective solution sprayed from the nozzle 220, so as to accurately grasp and control the coating amount of the protective solution.

[0037] Of course, in other embodiments, the first flow meter 510 may also be disposed in the second pipeline 212 .

[0038] Optionally, the protective solution coating device 010 further includes a second flow meter 520, which is disposed on the gas source assembly 320. The second flow meter 520 is used to detect the gas flow rate delivered to the nozzle 220 by the gas source assembly 320, so as to provide feedback on whether the nozzle 220 and the infusion pipeline 210 are blocked. Exemplarily, the second flow meter 520 is used to detect whether the gas pressure delivered to the nozzle 220 by the gas source assembly 320 meets the first set gas pressure. When the second flow meter 520 detects that the gas pressure delivered to the nozzle 220 by the gas source assembly 320 does not meet the first set gas pressure, it is determined that the nozzle 220 is blocked; wherein, when the nozzle 220 is not blocked, the gas delivered to the nozzle 220 by the gas source assembly 320 will be directly discharged, and when the nozzle 220 is blocked, the gas cannot be discharged smoothly, and the gas pressure detected by the second flow meter 520 will be greater than the first set gas pressure.

[0039] It should be understood that the second flow meter 520 is not necessary, and in some embodiments, the second flow meter 520 may not be configured.

[0040] Optionally, the water source assembly 310 includes a water pipe 311 and a heater 312 disposed on the water pipe 311, and the water pipe 311 is connected to the nozzle 220 through the liquid delivery pipe 210. The heater 312 can heat the cleaning liquid delivered to the nozzle 220 by the water source assembly 310, so as to use the warm cleaning liquid to clean the nozzle 220, thereby improving the cleaning effect and efficiency.

[0041] Optionally, the heater 312 is a pipeline-type rapid heating heater, and the purpose of heating can be achieved by the cleaning liquid flowing through the heater 312. It should be understood that in other embodiments, the water pipe 311 is also provided with an on-off valve. When the cleaning liquid is used to clean the nozzle 220, the on-off valve is first closed to fill the water pipe 311 with a certain amount of cleaning liquid, and then the heater 312 is used to heat the cleaning liquid in the water pipe 311. When the cleaning liquid is heated to a set temperature (for example: 35°C, 45°C, etc.), the on-off valve is opened again to allow the heated cleaning liquid to flow into the infusion pipe 210, and the nozzle 220 is cleaned with the heated cleaning liquid.

[0042] Optionally, the cleaning mechanism 300 further includes a time-delay solenoid valve 600 , and at least one of the water source assembly 310 and the air source assembly 320 is connected to the time-delay solenoid valve 600 .

[0043] Further, both the water source assembly 310 and the air source assembly 320 are connected to the time-delay electromagnetic valve 600. This arrangement allows the nozzle 220 to be cleaned after the nozzle 220 has finished coating, thereby achieving an energy-saving effect.

[0044] It should be noted that the water source component 310 can be selected as needed. Exemplarily, the water source component 310 includes a water tank, a water pipe 311 and a water pump. The water pipe 311 is connected between the water pump and the first one-way valve 421, and the water pump is arranged in the water tank. The water pipe 311 is provided with a heater 312; in this way, the water pump can be used to transport the cleaning fluid in the water tank to the infusion pipe 210, and then transport it to the nozzle 220 through the infusion pipe 210; wherein, when the cleaning fluid flows through the heater 312, it can be heated by the heater 312.

[0045] It should also be noted that the air source component 320 can be selected as needed. Exemplarily, the air source component 320 includes an air pump and an air pipe. The air pipe is connected between the air pump and the second guide valve, and the air pipe is provided with a second flow meter 520.

[0046] Optionally, the protective solution coating equipment 010 also includes a controller, and the water pump of the water source component 310, the air pump of the air source component 320, the delay solenoid valve 600, the first flow meter 510, and the second flow meter 520 are all electrically connected to the controller. The controller can receive detection signals from the first flow meter 510 and the second flow meter 520, and control the water pump, the air pump and the delay solenoid valve 600 to operate according to the corresponding detection signals.

[0047] Furthermore, the nozzle mechanism 200 also includes a power pump, which is arranged in the storage container 100 and connected to the end of the infusion pipeline 210 away from the nozzle 220, that is, the infusion pipeline 210 is connected to the storage container 100 through the power pump; the power pump is electrically connected to the controller so that the power pump is controlled by the controller to transport the protective solution in the storage container 100 to the infusion pipeline 210, and then transport it to the nozzle 220 through the infusion pipeline 210.

[0048] This embodiment also provides a method for cleaning the protective solution coating device 010 , and the cleaning method is used for the protective solution coating device 010 described above.

[0049] The cleaning method of the protective solution coating equipment 010 includes: a first cleaning, and the steps of the first cleaning specifically include: within a first preset time after the nozzle 220 finishes the operation, if the nozzle 220 does not start the operation again, controlling the water source component 310 to deliver cleaning liquid to the nozzle 220, and then controlling the gas source component 320 to deliver gas to the nozzle 220.

[0050] The cleaning method first cleans the nozzle 220 with a cleaning liquid, and then cleans the nozzle 220 with a gas, which can fully ensure that the nozzle 220 is emptied, and as much as possible ensure that the cleaning liquid in the infusion pipeline 210 and the nozzle 220 is fully discharged, ensure the cleanliness of the nozzle 220, and effectively improve the problem of subsequent uneven coating due to the blockage of the nozzle 220, and improve the problem of hard blocks sprayed on the wafer during the next coating, resulting in unqualified products. Moreover, the nozzle 220 is cleaned only when the nozzle 220 no longer performs the spraying operation within the first preset time, which can achieve a certain purpose of saving energy consumption.

[0051] The first preset time can be selected as needed, for example, it can be 2h, 3h, 4h, 5h, etc., and is not specifically limited here.

[0052] Control the water source component 310 to deliver cleaning liquid to the nozzle 220, and then control the air source component 320 to deliver gas to the nozzle 220. Specifically, it can be: control the water source component 310 to deliver cleaning liquid to the nozzle 220 and continue for a first set time, and then control the air source component 320 to deliver gas to the nozzle 220 and continue for a second set time.

[0053] Both the first set time and the second set time can be selected as needed. For example, the first set time can be 3 minutes, 4 minutes, 5 minutes, 6 minutes, etc., and the second set time can be 1 minute, 2 minutes, 3 minutes, 4 minutes, 5 minutes, etc., which are not specifically limited here.

[0054] It should be noted that when the nozzle 220 finishes working, the controller receives a signal that the power pump is shut down, and the controller can send a control signal to the delay solenoid valve 600. After receiving the control signal from the controller, the delay solenoid valve 600 switches to the delay control state, that is, the delay solenoid valve 600 enters the countdown delay control state from the time it receives the control signal from the controller. If the delay solenoid valve 600 does not receive the stop signal sent by the controller within the first preset time, the delay solenoid valve 600 controls the water source component 310 and the air source component 320 to work in sequence, that is, first controls the water source component 310 to deliver cleaning liquid to the nozzle 220, and then controls the air source component 320 to deliver gas to the nozzle 220; if the power pump works again within the first preset time to deliver the protective solution in the storage container 100 to the nozzle 220, and the controller receives a signal that the power pump works again, the controller sends a stop signal to the delay solenoid valve 600, and the delay solenoid valve 600 is no longer in the countdown state, that is, the delay solenoid valve 600 is no longer in the delay control state.

[0055] Optionally, in the first cleaning step, it further includes: when controlling the air source component 320 to deliver gas to the nozzle 220, determining whether the air pressure delivered to the nozzle 220 meets the first set air pressure; when the air pressure delivered to the nozzle 220 does not meet the first set air pressure, synchronously controlling the water source component 310 to deliver cleaning liquid to the nozzle 220. Wherein, when the air pressure does not meet the first set air pressure, it indicates that there is still a blockage problem in the infusion pipeline 210 and the nozzle 220. At this time, synchronously controlling the water source component 310 to deliver cleaning liquid to the nozzle 220, the cleaning liquid and gas can be used to clean and dredge the infusion pipeline 210 and the nozzle 220 at the same time, which is conducive to reliably cleaning the residual protective solution.

[0056] Furthermore, when the water source component 310 and the air source component 320 are simultaneously controlled to clean the nozzle 220 and the infusion pipeline 210, the cleaning time can be controlled to be a third set time, and the third set time can be 2 minutes, 3 minutes, 4 minutes, 5 minutes, 6 minutes, etc., which is not specifically limited here; after the third set time, the water source component 310 can be controlled to be closed, and the air source component 320 can be controlled again to clean the nozzle 220 and the infusion pipeline 210 separately, and the air pressure delivered to the nozzle 220 can be measured again to see whether it meets the first set air pressure. If it still does not meet the first set air pressure, the step of synchronously controlling the water source component 310 to deliver cleaning liquid to the nozzle 220 is repeated again, and the cycle is repeated in sequence until the air source component 320 is controlled to clean the nozzle 220 and the infusion pipeline 210 separately, and the air pressure delivered to the nozzle 220 is measured to meet the first set air pressure.

[0057] It should be noted that if after repeating the above steps for a set number of times, when controlling the air source assembly 320 to clean the nozzle 220 and the infusion pipe 210 separately, it is measured that the air pressure delivered to the nozzle 220 still does not meet the first set air pressure, the machine can be stopped for inspection. The set number of times can refer to 2 times, 3 times, 4 times, etc., which is not specifically limited here.

[0058] Optionally, the cleaning method of the protective solution coating device 010 further includes performing a second cleaning after the first cleaning step, and the second cleaning step specifically includes: within a second preset time after the first cleaning, if the nozzle 220 does not start working again, controlling the water source component 310 to deliver cleaning liquid to the nozzle 220, and then controlling the gas source component 320 to deliver gas to the nozzle 220. In this way, when the nozzle 220 is not in use, the time for cleaning the nozzle 220 again can be extended to achieve the purpose of saving energy consumption, and cleaning the nozzle 220 again can keep the nozzle 220 clean.

[0059] The second preset time is greater than the first preset time, for example: 6h, 8h, 10h, etc., which is not specifically limited here.

[0060] Optionally, before the nozzle 220 starts the next operation, the air source component 320 is controlled to supply gas to the nozzle 220, and detects whether the air pressure delivered to the nozzle 220 meets the second set air pressure; when the air pressure delivered to the nozzle 220 does not meet the second set air pressure, the water source component 310 is synchronously controlled to deliver cleaning liquid to the nozzle 220. Before the next operation of the nozzle 220, that is, before the next coating starts, the air source component 320 is controlled to deliver gas to the spray group, and whether the air pressure delivered to the nozzle 220 meets the second set air pressure can be ensured that the infusion pipeline 210 and the nozzle 220 are not in a blocked state during the next coating, so as to ensure the reliability and yield rate of the coating; wherein, when it is detected that the air pressure delivered to the nozzle 220 does not meet the second set air pressure, it is determined that the infusion pipeline 210 and the nozzle 220 are blocked, and the water source component 310 is synchronously controlled to deliver cleaning liquid to the nozzle 220, then the cleaning liquid and gas can be used simultaneously to clean and dredge the infusion pipeline 210 and the nozzle 220, which is conducive to reliably cleaning the residual protective solution.

[0061] Furthermore, before the nozzle 220 starts the next operation, the time length for controlling the gas source component 320 to deliver gas to the nozzle 220 may be 1 minute, 2 minutes, etc., which is not specifically limited here.

[0062] Furthermore, when it is detected that the air pressure delivered to the nozzle 220 does not meet the second set air pressure, and the water source component 310 and the air source component 320 are controlled to clean the nozzle 220 and the infusion pipeline 210 at the same time, the cleaning time can be controlled to be a fourth set time, and the fourth set time can be 2min, 3min, 4min, 5min, 6min, etc., which is not specifically limited here; after the fourth set time, the water source component 310 can be controlled to be closed, and the air source component 320 can be controlled again to clean the nozzle 220 and the infusion pipeline 210 separately, and the air pressure delivered to the nozzle 220 can be measured again to see whether it meets the second set air pressure. If it still does not meet the second set air pressure, the step of synchronously controlling the water source component 310 to deliver cleaning liquid to the nozzle 220 is repeated again, and the cycle is repeated in sequence until the air source component 320 is controlled to clean the nozzle 220 and the infusion pipeline 210 separately, and it is measured that the air pressure delivered to the nozzle 220 meets the second set air pressure.

[0063] It should be noted that if after repeating the above steps for a preset number of times, when controlling the air source assembly 320 to clean the nozzle 220 and the infusion pipe 210 separately, it is measured that the air pressure delivered to the nozzle 220 still does not meet the second set air pressure, the machine can be stopped for inspection. The preset number of times can refer to 2 times, 3 times, 4 times, etc., which is not specifically limited here.

[0064] To sum up, the protective solution coating equipment 010 of the utility model can clean the nozzle 220 after one coating to improve the problem of the nozzle 220 being blocked by hardened lumps, resulting in subsequent uneven coating. It can also improve the problem of hard lumps being sprayed onto the wafer during the next coating, resulting in unqualified products.

[0065] The above are only preferred embodiments of the present invention and are not intended to limit the present invention. For those skilled in the art, the present invention may be subject to various modifications and variations. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present invention shall be included in the protection scope of the present invention.

Claims

1. A protective solution coating device, characterized in that: include: A storage container (100), wherein the storage container (100) is used to store a protective solution; a nozzle mechanism (200), the nozzle mechanism (200) comprising a liquid infusion pipeline (210) and a nozzle (220) connected to one end of the liquid infusion pipeline (210), the other end of the liquid infusion pipeline (210) being connected to the storage container (100); and, A cleaning mechanism (300), the cleaning mechanism (300) comprising a water source component (310) and an air source component (320), the water source component (310) and the air source component (320) both being connected to the nozzle (220) via the liquid delivery pipeline (210); wherein the water source component (310) is configured to deliver cleaning liquid to the nozzle (220), and the air source component (320) is configured to deliver gas to the nozzle (220).

2. The protective solution coating device according to claim 1, characterized in that: The protective solution coating device further comprises a one-way valve assembly (400), and the water source assembly (310) and the air source assembly (320) are both connected to the liquid delivery pipeline (210) via the one-way valve assembly (400).

3. The protective solution coating device according to claim 2, characterized in that: The one-way valve assembly (400) comprises a connecting pipe (410) and a first one-way valve (421) and a second one-way valve (422) connected to the connecting pipe (410); the infusion pipeline (210) comprises a first pipeline (211) and a second pipeline (212), one end of the first pipeline (211) is connected to the storage container (100), and the other end of the first pipeline (211) is connected to one end of the connecting pipe (410), the other end of the connecting pipe (410) is connected to one end of the second pipeline (212), and the other end of the second pipeline (212) is connected to the nozzle (220); The water source component (310) is connected to the first one-way valve (421), and the air source component (320) is connected to the second one-way valve (422).

4. The protective solution coating device according to claim 3, characterized in that: The one-way valve assembly (400) further comprises a third one-way valve (423), wherein the third one-way valve (423) is connected between the connecting pipe (410) and the first pipeline (211).

5. The protective solution coating device according to claim 3, characterized in that: The protective solution coating device further comprises a first flow meter (510), wherein the first flow meter (510) is arranged on the first pipeline (211).

6. The protective solution coating device according to claim 3, characterized in that: The protective solution coating device further comprises a first flow meter (510), wherein the first flow meter (510) is arranged on the second pipeline (212).

7. The protective solution coating device according to claim 3, characterized in that: The protective solution coating device further comprises a second flow meter (520), and the second flow meter (520) is arranged on the gas source component (320).

8. The protective solution coating device according to claim 1, characterized in that: The water source component (310) comprises a water pipe (311) and a heater (312) arranged on the water pipe (311); the water pipe (311) is connected to the nozzle (220) via the liquid infusion pipeline (210).

9. The protective solution coating device according to claim 1, characterized in that: The cleaning mechanism (300) further comprises a time-delay electromagnetic valve (600), and at least one of the water source component (310) and the air source component (320) is connected to the time-delay electromagnetic valve (600).

10. The protective solution coating device according to claim 9, characterized in that: Both the water source component (310) and the air source component (320) are connected to the time-delay solenoid valve (600).

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