Clamping device for semiconductor chip processing

Abstract

The utility model relates to the technical field of chip processing equipment, in particular to a clamping device for semiconductor chip processing, which comprises a base, the inner wall of the base is in sliding connection with the outer wall of a height adjusting part, and the outer side wall of the height adjusting part is fixedly connected with the outer side wall of a driving part through a bolt. A locking column is pressed to completely enter a locking cavity, the height of a supporting column can be adjusted, an air cylinder drives a piston rod to drive a guide block to linearly move, the longitudinal distance between clamping parts can be adjusted, an adjusting rod can be driven to rotate by rotating an adjusting block, and two sliding blocks are driven to move in the opposite directions. The adjusting knob is rotated, the threaded rod is driven to rotate in the connecting block, the connecting rod and the clamping head are driven to move downwards to clamp a semiconductor chip, the device is easy to adjust the distances in different directions, the clamping requirements of chips of different sizes and shapes are met, and the clamping efficiency is improved. And the working efficiency of workers is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of chip processing equipment, in particular to a clamping device for semiconductor chip processing. Background Art

[0002] In the prior art, semiconductor chips are usually processed by etching and wiring on semiconductor sheets to produce semiconductor devices that can achieve certain functions. In order to make operators more stable when processing semiconductor sheets, semiconductor chips are generally clamped and fixed by clamps so that the operating equipment can accurately prepare the semiconductor chips.

[0003] Most of the existing clamping devices on the market are often not flexible and convenient in adjustment, and may not have sufficient adjustment range or adjustment accuracy, making it difficult to meet the diverse needs of semiconductor chip processing. This not only increases the labor intensity of the staff, but also affects the processing accuracy and production efficiency. Utility Model Content

[0004] The purpose of the utility model is to provide a clamping device for semiconductor chip processing, so as to solve the problem that the clamping device mentioned in the above background technology is often not flexible and convenient in adjustment. To achieve the above purpose, the utility model provides the following technical solution: a clamping device for semiconductor chip processing, comprising a base, the inner wall of the base is slidably connected to the outer wall of the height adjustment member, the outer side wall of the height adjustment member is fixedly connected to the outer side wall of the driving member by bolts, and one end of the driving member is fixedly connected to the front side of the guide member.

[0005] The inner walls of the guide member close to both sides are respectively slidably connected to the outer walls of the height adjustment member close to both ends, and the inner walls of the guide member close to both sides are slidably connected to the outer wall of the clamping member.

[0006] Preferably, the base consists of a base and four supporting sleeves, and the top of the base is fixedly connected to the bottoms of the four supporting sleeves respectively, the four supporting sleeves are distributed in a ring shape at equal distances, and a plurality of locking holes are opened on the inner wall of one of the supporting sleeves.

[0007] Preferably, the height adjustment member comprises four support columns, a support block, two support plates, two guide rods, two springs and two locking columns, and the tops of the four support columns are fixedly connected to the bottom of the support block, the four support columns are distributed in a ring shape with equal distances, and the tops of the support block near the front and back sides are respectively fixedly connected to the bottoms of the two support plates, the inner walls of the two support plates near both sides are respectively fixedly connected to the outer walls of the two guide rods near both ends, and the inner wall of one of the support columns is provided with two locking cavities, the inner side walls of the two locking cavities are respectively fixedly connected to one end of the two springs, and the other ends of the two springs are respectively fixedly connected to one end of the two locking columns, the outer walls of the two locking columns near one end of the springs are respectively slidably connected to the inner walls of the two locking cavities, and the outer walls of the two locking columns away from one end of the springs are respectively movably plugged into the inner walls of two of the locking holes, and the outer walls of the four support columns are respectively slidably connected to the inner walls of the four support sleeves.

[0008] Preferably, the driving member is composed of a protection block, a cylinder and a piston rod, and the number of the protection block, the cylinder and the piston rod is set to two, the inner walls of the two protection blocks are respectively fixedly connected to the outer walls of the two cylinders, and the output ends of the two cylinders are respectively fixedly connected to one end of the two piston rods, the outer walls of the two piston rods are respectively slidingly connected to the inner walls of the two support plates near the center, and the outer walls of the two protection blocks are respectively fixedly connected to the outer walls of the two support plates by bolts.

[0009] Preferably, the guide member includes a guide block, an adjusting rod and an adjusting block, and the number of the guide block, the adjusting rod and the adjusting block is set to two, the inner walls of the two guide blocks close to both sides are rotatably connected with the outer walls of the two adjusting rods close to both ends, and the outer walls on both sides of the center of the two adjusting rods are provided with opposite threads, one end of the two adjusting rods are fixedly welded to one side of the two adjusting blocks, and the back side of one of the guide blocks is fixedly connected to one end of one of the piston rods, the front side of the other guide block is fixedly connected to one end of the other piston rod, and the inner walls of the two guide blocks close to both sides are slidably connected with the outer walls of the two guide rods close to both ends, and the inner walls of the two guide blocks are provided with guide grooves.

[0010] Preferably, the clamping member is composed of a sliding block, a connecting block, a threaded rod, an adjusting knob, a connecting rod and a clamping head, and the number of the sliding block, the connecting block, the threaded rod, the adjusting knob, the connecting rod and the clamping head is set to four, each of the sliding block, the connecting block, the threaded rod, the adjusting knob, the connecting rod and the clamping head form a group, and the top of the sliding block is fixedly connected to the bottom of the connecting block, the inner wall of the connecting block is threadedly connected to the outer wall of the threaded rod, and the top of the threaded rod is fixedly connected to the bottom of the adjusting knob, the bottom end of the threaded rod is fixedly connected to the top of the connecting rod, and a clamping head is provided at the bottom end of the connecting rod, the inner walls of the four sliding blocks are respectively threadedly connected to the outer walls on both sides of the two adjusting rods near the center, and the outer walls of the four sliding blocks are respectively slidably connected to the inner walls of the two guide grooves near both sides.

[0011] Compared with the prior art, the utility model has the following beneficial effects:

[0012] In the utility model, the height of the support column can be adjusted by pressing the locking column to make it completely enter the locking cavity, and the cylinder drives the piston rod to drive the guide block to move linearly, so as to adjust the longitudinal spacing between the clamping parts. Rotating the adjustment block can drive the adjustment rod to rotate, and drive the two sliding blocks to move in opposite directions to achieve the horizontal spacing between the clamping parts. Rotating the adjustment knob drives the threaded rod to rotate in the connecting block, and drives the connecting rod and the clamping head to move downward to clamp the semiconductor chip. In addition, the device can easily adjust the spacing in different directions, thereby meeting the clamping requirements of chips of different sizes and shapes and improving the work efficiency of the staff.

[0013] In the utility model, the guide block moves along the direction of the guide rod when moving, and the sliding block moves stably in the guide groove during the adjustment process, ensuring the stability and linearity of the clamping device during the adjustment process, preventing deviation or tilting during the adjustment process, and by fine-tuning the adjustment knob, the position and clamping force of the clamping head can be accurately controlled to prevent damage to the chip. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] Figure 1 It is a schematic diagram of the overall structure of the utility model;

[0015] Figure 2 It is a cross-sectional view of the utility model;

[0016] Figure 3 It is an exploded view of the utility model;

[0017] Figure 4 For this utility model Figure 3 A magnified view of the structure at center A;

[0018] Figure 5 It is an exploded view of the clamping member in the utility model.

[0019] In the figure: 1. base; 101. base; 102. support sleeve; 2. height adjustment member; 201. support column; 202. support block; 203. support plate; 204. guide rod; 205. spring; 206. locking column; 3. driving member; 301. protection block; 302. cylinder; 303. piston rod; 4. guide member; 401. guide block; 402. adjustment rod; 403. adjustment block; 5. clamping member; 501. sliding block; 502. connecting block; 503. threaded rod; 504. adjusting knob; 505. connecting rod; 506. clamping head. DETAILED DESCRIPTION

[0020] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technical personnel in this field without creative work are within the scope of protection of the utility model.

[0021] See also Figures 1 to 5 The utility model provides a technical solution: a clamping device for semiconductor chip processing, including a base 1, the inner wall of the base 1 is slidably connected to the outer wall of a height adjusting member 2, the outer wall of the height adjusting member 2 is fixedly connected to the outer wall of a driving member 3 by bolts, and one end of the driving member 3 is fixedly connected to the front side of a guide member 4.

[0022] The inner walls of the guide member 4 close to both sides are respectively slidably connected to the outer walls of the height adjustment member 2 close to both ends, and the inner walls of the guide member 4 close to both sides are slidably connected to the outer wall of the clamping member 5.

[0023] In this embodiment, Figure 1 , Figure 2 , Figure 3 , Figure 4 and Figure 5 As shown, the base 1 is composed of a base 101 and four supporting sleeves 102, and the top of the base 101 is fixedly connected to the bottom of the four supporting sleeves 102, respectively. The four supporting sleeves 102 are distributed in a ring shape at equal distances, and a plurality of locking holes are opened on the inner wall of one of the supporting sleeves 102. The base 101 serves as the foundation of the entire clamping device and provides stable support.

[0024] In this embodiment, Figure 1 , Figure 2 , Figure 3 , Figure 4 and Figure 5As shown, the height adjustment member 2 includes four support columns 201, a support block 202, two support plates 203, two guide rods 204, two springs 205 and two locking columns 206, and the tops of the four support columns 201 are fixedly connected to the bottoms of the support blocks 202, the four support columns 201 are distributed in a ring shape with equal distances, and the tops of the support blocks 202 near the front and back sides are respectively fixedly connected to the bottoms of the two support plates 203, the inner walls of the two support plates 203 near both sides are respectively fixedly connected to the outer walls of the two guide rods 204 near both ends, and the inner wall of one of the support columns 201 is provided with two locking cavities, the inner side walls of the two locking cavities are respectively fixedly connected to one end of the two springs 205, and the two springs 20 The other ends of the two locking posts 206 are fixedly connected to one ends of the two locking posts 206, the outer walls of the two locking posts 206 close to one end of the spring 205 are slidably connected to the inner walls of the two locking cavities, and the outer walls of the two locking posts 206 away from one end of the spring 205 are movably plugged into the inner walls of two of the locking holes, and the outer walls of the four support posts 201 are slidably connected to the inner walls of the four support sleeves 102. When the height of the clamping device needs to be adjusted, the locking post 206 is pressed to make it completely enter the locking cavity, and the spring 205 is compressed. At this time, the height of the support post 201 can be adjusted. After adjusting to the specified position, the locking post 206 is inserted into the corresponding locking hole under the elastic force of the spring 205, so that the clamping device is locked in height.

[0025] In this embodiment, Figure 1 , Figure 2 , Figure 3 , Figure 4 and Figure 5 As shown, the driving member 3 is composed of a protection block 301, a cylinder 302 and a piston rod 303, and the number of the protection blocks 301, the cylinder 302 and the piston rod 303 is set to two, the inner walls of the two protection blocks 301 are respectively fixedly connected to the outer walls of the two cylinders 302, and the output ends of the two cylinders 302 are respectively fixedly connected to one end of the two piston rods 303, the outer walls of the two piston rods 303 are respectively slidably connected to the inner walls of the two support plates 203 near the center, and the outer side walls of the two protection blocks 301 are respectively fixedly connected to the outer side walls of the two support plates 203 by bolts, and the piston rod 303 is driven by the cylinder 302 to perform linear motion.

[0026] In this embodiment, Figure 1 , Figure 2 , Figure 3 , Figure 4 and Figure 5As shown, the guide member 4 includes a guide block 401, an adjusting rod 402 and an adjusting block 403, and the number of the guide block 401, the adjusting rod 402 and the adjusting block 403 is set to two, the inner walls of the two guide blocks 401 close to the two sides are respectively rotatably connected with the outer walls of the two adjusting rods 402 close to the two ends, and the outer walls of the two sides of the center of the two adjusting rods 402 are provided with opposite threads, one end of the two adjusting rods 402 is respectively fixedly welded to one side of the two adjusting blocks 403, and the back side of one of the guide blocks 401 is fixedly connected to one end of one of the piston rods 303, and the other guide block 401 is fixedly connected to the outer wall of the two adjusting rods 402 close to the two ends. The front side of block 401 is fixedly connected to one end of another piston rod 303, and the inner walls of the two guide blocks 401 near both sides are respectively slidably connected to the outer walls of the two guide rods 204 near both ends. The inner walls of the two guide blocks 401 are provided with guide grooves. The piston rod 303 is driven by the cylinder 302 to perform linear motion, thereby driving the guide block 401 to move along the direction of the guide rod 204. The guide rod 204 ensures the stability and linearity of the clamping device during the adjustment process to prevent displacement or tilting during the adjustment process. Rotating the adjustment block 403 can drive the adjustment rod 402 to rotate.

[0027] In this embodiment, Figure 1 , Figure 2 , Figure 3 , Figure 4 and Figure 5As shown, the clamping member 5 is composed of a sliding block 501, a connecting block 502, a threaded rod 503, an adjusting knob 504, a connecting rod 505 and a clamping head 506, and the number of the sliding block 501, the connecting block 502, the threaded rod 503, the adjusting knob 504, the connecting rod 505 and the clamping head 506 is set to four, each sliding block 501, the connecting block 502, the threaded rod 503, the adjusting knob 504, the connecting rod 505 and the clamping head 506 are a group, and the top of the sliding block 501 is fixedly connected to the bottom of the connecting block 502, the inner wall of the connecting block 502 is threadedly connected to the outer wall of the threaded rod 503, and the top of the threaded rod 503 is fixedly connected to the bottom of the adjusting knob 504, the bottom end of the threaded rod 503 is fixedly connected to the top of the connecting rod 505, and the bottom end of the connecting rod 505 is provided with a clamping head 506, the inner walls of the four sliding blocks 501 are respectively connected to two adjusting The outer walls of the section rod 402 on both sides near the center are threadedly connected, and the outer walls of the four sliding blocks 501 are respectively slidably connected to the inner walls of the two guide grooves on both sides. When the adjusting rod 402 rotates, it drives the two sliding blocks 501 to move in opposite directions. The guide groove ensures the stability and linearity of the sliding block 501 during the adjustment process, and prevents the sliding block 501 from offsetting or rotating during the adjustment process, thereby ensuring the stability and safety of the clamping. By rotating the adjusting knob 504, the threaded rod 503 is driven to rotate in the connecting block 502, driving the connecting rod 505 and the clamping head 506 to move downward to clamp the semiconductor chip. The four corners of the semiconductor chip are clamped by four clamping components, which ensures the stability and safety of the clamping. By fine-tuning the adjusting knob 504, the position and clamping force of the clamping head 506 can be accurately controlled to prevent damage to the chip.

[0028] The use method and advantages of the utility model: When the clamping device for semiconductor chip processing is working, the working process is as follows:

[0029] like Figure 1 , Figure 2 , Figure 3 , Figure 4 and Figure 5As shown, by pressing the locking column 206 to make it completely enter the locking cavity, the height of the support column 201 can be adjusted, and the cylinder 302 drives the piston rod 303 to drive the guide block 401 to move linearly, so as to adjust the longitudinal spacing between the clamping parts. Rotating the adjustment block 403 can drive the adjustment rod 402 to rotate, and drive the two sliding blocks 501 to move in opposite directions to achieve the horizontal spacing between the clamping parts. Rotating the adjustment knob 504 drives the threaded rod 503 to rotate in the connecting block 502, and drives the connecting rod 505 and the clamping head 506 to move downward in half. The conductor chip is clamped, and the device is easy to adjust the spacing in different directions, which meets the clamping requirements of chips of different sizes and shapes and improves the work efficiency of the staff. The guide block 401 moves along the direction of the guide rod 204 when moving, and the sliding block 501 moves stably in the guide groove during the adjustment process, ensuring the stability and linearity of the clamping device during the adjustment process, preventing displacement or tilting during the adjustment process, and by fine-tuning the adjustment knob 504, the position and clamping force of the clamping head 506 can be accurately controlled to prevent damage to the chip.

[0030] The above shows and describes the basic principle, main features and advantages of the utility model. Technical staff in this industry should understand that the utility model is not limited by the above embodiments. The above embodiments and descriptions are only preferred examples of the utility model and are not used to limit the utility model. Without departing from the spirit and scope of the utility model, the utility model will have various changes and improvements, which fall within the scope of the utility model to be protected. The scope of protection of the utility model is defined by the attached claims and their equivalents.

Claims

1. A clamping device for semiconductor chip processing, comprising a base (1), characterized in that: The inner wall of the base (1) is slidably connected to the outer wall of the height adjustment member (2), the outer wall of the height adjustment member (2) is fixedly connected to the outer wall of the driving member (3) by means of bolts, and one end of the driving member (3) is fixedly connected to the front side of the guide member (4); The inner walls of the guide member (4) close to both sides are respectively slidably connected to the outer walls of the height adjustment member (2) close to both ends, and the inner walls of the guide member (4) close to both sides are slidably connected to the outer wall of the clamping member (5).

2. A semiconductor chip processing clamping device according to claim 1, characterized in that: The base (1) is composed of a base (101) and four supporting sleeves (102), and the top of the base (101) is fixedly connected to the bottoms of the four supporting sleeves (102), respectively. The four supporting sleeves (102) are distributed in a ring shape at equal distances, and a plurality of locking holes are provided on the inner wall of one of the supporting sleeves (102).

3. A semiconductor chip processing clamping device according to claim 2, characterized in that: The height adjustment member (2) comprises four support columns (201), a support block (202), two support plates (203), two guide rods (204), two springs (205) and two locking columns (206), and the tops of the four support columns (201) are fixedly connected to the bottom of the support block (202), the four support columns (201) are distributed in a ring shape with equal distances, and the tops of the support block (202) near the front and back sides are respectively fixedly connected to the bottoms of the two support plates (203), and the inner walls of the two support plates (203) near both sides are respectively fixedly connected to the outer walls of the two guide rods (204) near both ends. Two locking cavities are formed on the inner wall of one of the support columns (201), the inner side walls of the two locking cavities are respectively fixedly connected to one end of the two springs (205), and the other ends of the two springs (205) are respectively fixedly connected to one end of the two locking columns (206), the outer walls of the two locking columns (206) close to one end of the spring (205) are respectively slidably connected to the inner walls of the two locking cavities, and the outer walls of the two locking columns (206) away from one end of the spring (205) are respectively movably plugged into the inner walls of two of the locking holes, and the outer walls of the four support columns (201) are respectively slidably connected to the inner walls of the four support sleeves (102).

4. A semiconductor chip processing clamping device according to claim 3, characterized in that: The driving member (3) is composed of a protection block (301), a cylinder (302) and a piston rod (303), and the number of the protection block (301), the cylinder (302) and the piston rod (303) is set to two, the inner walls of the two protection blocks (301) are respectively fixedly connected to the outer walls of the two cylinders (302), and the output ends of the two cylinders (302) are respectively fixedly connected to one end of the two piston rods (303), the outer walls of the two piston rods (303) are respectively slidably connected to the inner walls of the two support plates (203) near the center, and the outer side walls of the two protection blocks (301) are respectively fixedly connected to the outer side walls of the two support plates (203) by bolts.

5. A semiconductor chip processing clamping device according to claim 4, characterized in that: The guide member (4) comprises a guide block (401), an adjusting rod (402) and an adjusting block (403), and the number of the guide block (401), the adjusting rod (402) and the adjusting block (403) is set to two, the inner walls of the two guide blocks (401) close to both sides are respectively rotatably connected to the outer walls of the two adjusting rods (402) close to both ends, and the outer walls of the two adjusting rods (402) at the center are provided with opposite threads, one end of the two adjusting rods (402) is respectively fixedly welded to one side of the two adjusting blocks (403), and the back side of one of the guide blocks (401) is fixedly connected to one end of one of the piston rods (303), and the front side of the other guide block (401) is fixedly connected to one end of the other piston rod (303), and the inner walls of the two guide blocks (401) close to both sides are respectively slidably connected to the outer walls of the two guide rods (204) close to both ends, and the inner walls of the two guide blocks (401) are provided with guide grooves.

6. A semiconductor chip processing clamping device according to claim 4, characterized in that: The clamping member (5) is composed of a sliding block (501), a connecting block (502), a threaded rod (503), an adjusting knob (504), a connecting rod (505) and a clamping head (506), and the number of the sliding block (501), the connecting block (502), the threaded rod (503), the adjusting knob (504), the connecting rod (505) and the clamping head (506) is set to four, and each of the sliding block (501), the connecting block (502), the threaded rod (503), the adjusting knob (504), the connecting rod (505) and the clamping head (506) is a set, and the top of the sliding block (501) is connected to the The bottom of the connecting block (502) is fixedly connected, the inner wall of the connecting block (502) is threadedly connected to the outer wall of the threaded rod (503), and the top of the threaded rod (503) is fixedly connected to the bottom of the adjusting knob (504), the bottom end of the threaded rod (503) is fixedly connected to the top of the connecting rod (505), and the bottom end of the connecting rod (505) is provided with a clamping head (506), the inner walls of the four sliding blocks (501) are respectively threadedly connected to the outer walls on both sides of the two adjusting rods (402) near the center, and the outer walls of the four sliding blocks (501) are respectively slidably connected to the inner walls on both sides of the two guide grooves near the two sides.

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