External gas treatment system with hot fluid

By designing an external air treatment system with hot fluids, and using heat exchange technology to reduce the load of the external air conditioner box, the problem of high energy consumption of the external air conditioner box in the semiconductor manufacturing process is solved, and the effect of energy saving and carbon reduction and energy consumption is achieved.

CN222837033UActive Publication Date: 2025-05-06DESICCANT TECH CORP +1
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Patent Information

Application Number
CN202421491792.2
Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Priority Date
2024-05-10
Filing Date
2024-06-27
Publication Date
2025-05-06
Estimated Expiration
2034-06-27

AI Technical Summary

Technical Problem

The high energy consumption problem of external air conditioning boxes (MAUs) during semiconductor manufacturing has led to large energy consumption and increased carbon emissions.

Method used

An external gas treatment system with hot fluid is designed to exchange heat with the external gas through a heat exchanger, remove the latent heat of the external gas, and transport it to the required place through the air duct, thereby reducing the load of the external air air conditioner box.

Benefits of technology

It realizes the efficiency of heat exchange applications and energy saving and carbon reduction, reduces energy costs, and improves overall practicality and operationality.

✦ Generated by Eureka AI based on patent content.

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Abstract

The utility model provides an external air treatment system with hot fluid, which is mainly characterized in that through the combined design of external air, an external air air conditioning box, an air pipe, an external air treatment system and the hot fluid, the hot fluid can flow into a heat exchanger for heat exchange and is provided for a dehumidification rotating wheel of the external air treatment system for use. Therefore, the load of the external air air conditioning cabinet can be greatly reduced, the external air air conditioning cabinet has the effects of heat exchange application, energy conservation and carbon reduction, and the effect of reducing the energy cost can be achieved.
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Description

Technical Field

[0001] The utility model relates to an external air treatment system with a thermal fluid, and more particularly to a system with heat exchange application and energy saving and carbon reduction performance, and is suitable for places or plants related to the semiconductor field, electronic technology field, biotechnology field, food processing field, precision instrument manufacturing field, etc. Background Art

[0002] Semiconductor manufacturing requires four major exhaust systems, including acid exhaust, alkali exhaust, volatile organic exhaust, and general exhaust. Therefore, a large amount of outside air must be added to meet the exhaust needs.

[0003] The semiconductor industry's factory system's outdoor air conditioning unit (MAU) is an energy-consuming but necessary device. The energy consumption of an outdoor air conditioning unit in an advanced process plant may be as high as 10,000 refrigeration tons.

[0004] In recent years, in order to achieve the goal of energy conservation and carbon reduction, the semiconductor industry has actively sought improvement solutions for high-energy-consuming equipment or facilities in the factory to reduce energy consumption. Among them, the main equipment to be improved is the outdoor air conditioning unit (MAU).

[0005] Therefore, in view of the above-mentioned shortcomings, the applicant hopes to propose an external air treatment system with hot fluid that has the functions of heat exchange application and energy saving and carbon reduction, so that users can easily operate and assemble it. The applicant has devoted himself to research, design and assembly to provide user convenience, which is the creative motivation for the applicant's research and development. Utility Model Content

[0006] In view of this, the utility model provides an external air processing system with a hot fluid, in order to at least partially solve the above technical problems.

[0007] The main purpose of the utility model is to provide an outside air treatment system with a thermal fluid, which is mainly designed by combining an outside air (Outside Air), an outside air conditioning unit (MAU), an air duct, an outside air treatment system and a thermal fluid, so that the thermal fluid can be used to flow into the heat exchanger for heat exchange, and provided to the dehumidification wheel of the outside air treatment system to remove the latent heat of the outside air (Outside Air), and then transported to the required place through the air duct. Therefore, the load of the outside air conditioning unit (MAU) can be greatly reduced, and at the same time, it has the efficiency of heat exchange application and energy saving and carbon reduction, and can also achieve the purpose of reducing energy costs, thereby increasing the overall practicality.

[0008] Another object of the present invention is to provide an outside air processing system with a hot fluid, wherein a box is provided in the outside air processing system, and the dehumidification wheel is arranged in the box, and the dehumidification wheel has a processing area and a regeneration area, wherein the front assembly of the dehumidification wheel is designed with at least one first filter device, at least one first temperature device, at least one water washing device and at least one second temperature device, so that the outside air (Outside Air) can first be dusted, filtered and its temperature and humidity controlled by the above-mentioned devices, and then transported to the processing area of ​​the dehumidification wheel for dehumidification and adsorption, and a fan is provided in the box, and the fan is arranged at any one of the front and rear positions of the dehumidification wheel to push and pull the outside air (Outside Air) to move forward, so that it has the efficiency of generating fresh air with constant temperature and humidity, thereby increasing the overall usability.

[0009] Another object of the utility model is to provide an external air processing system with a thermal fluid, which is connected to at least one clean room, at least one ward, at least one food processing area, at least one semiconductor process plant, and at least one electronic process plant through the air duct, so as to provide the above-mentioned places with the need to supplement a large amount of external air, and drive the air circulation in the above-mentioned places to take away dust and heat, achieve the required cleanliness and ventilation volume, and achieve the purpose of replacing the original air, thereby increasing the overall operability. BRIEF DESCRIPTION OF THE DRAWINGS

[0010] In order to further understand the characteristics, features and technical contents of the present invention, please refer to the following detailed description and drawings of the present invention. The following drawings are only provided for reference and explanation and are not intended to limit the present invention.

[0011] Figure 1 This is a schematic diagram of the main architecture;

[0012] Figure 2 Another schematic diagram of the architecture is shown in FIG.

[0013] [Description of Reference Numerals]

[0014] 10. Outside Air

[0015] 20. Outdoor air conditioning unit (MAU)

[0016] 21. Cabinet

[0017] 211. External air inlet

[0018] 22. The first filter equipment

[0019] 23. First temperature equipment

[0020] 231. Precooling coil

[0021] 232. Preheating coil

[0022] 233. Precooler

[0023] 234. Preheater

[0024] 24. Washing equipment

[0025] 25. Second temperature equipment

[0026] 251. Recooling coil

[0027] 252. Reheat coil

[0028] 253. Recooler

[0029] 254. Reheater

[0030] 26. Second filter equipment

[0031] 27. Fan

[0032] 30. Air duct

[0033] 31. Clean Room

[0034] 40. External air treatment system

[0035] 41. Cabinet

[0036] 411. External air inlet

[0037] 42. The first filter equipment

[0038] 43. First temperature equipment

[0039] 431. Precooling coil

[0040] 432. Preheating coil

[0041] 433. Precooler

[0042] 434. Preheater

[0043] 44. Washing equipment

[0044] 45. Second temperature equipment

[0045] 451. Recooling coil

[0046] 453. Recooler

[0047] 46. ​​Second filter equipment

[0048] 47. Fan

[0049] 51. Dehumidification wheel

[0050] 511. Processing Area

[0051] 512, Regeneration Zone

[0052] 52. Heat exchanger

[0053] 60. Thermal Fluid

[0054] 80. Bypass equipment DETAILED DESCRIPTION

[0055] In order to make the purpose, technical solutions and advantages of the present invention more clearly understood, the present invention is further described in detail below in combination with specific embodiments and with reference to the accompanying drawings.

[0056] The terms used herein are only for describing specific embodiments and are not intended to limit the present invention. The terms "include", "comprises", etc. used herein indicate the existence of the features, steps, operations and / or components, but do not exclude the existence or addition of one or more other features, steps, operations or components.

[0057] See also Figure 1-2 , which is a schematic diagram of an embodiment of the utility model. The preferred embodiment of the external air treatment system with thermal fluid of the utility model is suitable for places or factories related to the semiconductor field, electronic technology field, biotechnology field, food processing field, precision instrument manufacturing field, etc., mainly with the efficiency of heat recovery application and energy saving and carbon reduction.

[0058] The outside air processing system with a thermal fluid of the present invention is mainly designed by combining an outside air 10, an outside air conditioning unit (MAU) 20, an air duct 30, an outside air processing system 40 and a thermal fluid 60 (such as Figure 1 and Figure 2 As shown), the outside air 10 contains at least one gas or combination, mainly a mixture of 78.1% nitrogen, 21% oxygen, 0.9% argon and other impurities, and the outside air 10 is commonly known as air. Furthermore, the thermal fluid 60 is any one of hot water or hot steam, wherein the hot water and the hot steam come from the hot water or hot steam generated by the boiler (not shown) used in any of the semiconductor process plant (not shown), the electronic process plant (not shown), the food processing area (not shown), and the medical hospital (not shown), or the hot water or hot steam generated by the incinerator (not shown), but not limited to the above content, and can also be other places or equipment that generate hot water or hot steam, and the temperature of the hot water or hot steam is more than 100°C.

[0059] The MAU 20 is provided with a housing 21, wherein the housing 21 is provided with an outside air inlet 211, and the housing 21 is provided with at least one first filter device 22, at least one first temperature device 23, at least one washing device 24, at least one second temperature device 25, and at least one second filter device 26 (such as Figure 1 and Figure 2 As shown), wherein the at least one first filter device 22 is any one or a combination of a primary filter (Pre Filter) or a medium efficiency filter (Medium efficiency filter), and the primary filter (Pre Filter) is mostly in plate form, suitable for primary filtration, mainly used to filter dust particles above 5μm, and the material is mainly non-woven fabric, nylon mesh, activated carbon filter material, and metal mesh. In addition, the medium efficiency filter (Medium efficiency filter) is mostly in bag form, widely used in medium filtration, mainly used to filter dust particles above 1-5μm, and the material is mainly synthetic fiber and non-woven fabric. In addition, the at least one first temperature device 23 is any one or a combination of a precooling coil 231 and a preheating coil 232 (such as Figure 2 As shown in FIG. 1 ), the precooling coil 231 is fed with either cooling water or ice water to cool the hot air in the outside air 10 into liquid, thereby effectively reducing the air temperature. The preheating coil 232 is fed with either hot water or steam to transfer heat energy to the outside air 10 to increase its temperature. Furthermore, the at least one first temperature device 23 may also be any one or a combination of a precooler 233 and a preheater 234 (such as Figure 1 As shown), the precooler 233 is any one of a shell and tube cooler, a fin tube cooler or a plate heat exchanger cooler, and the preheater 234 is any one of an electric heater, a gas heater, a thermal oil heater, and a hot water heater.

[0060] In addition, the at least one water washing device 24 is a washing humidifier, which is mainly composed of at least one pressure pump, at least one nozzle, at least one water supply valve, at least one drain valve, and at least one pipeline (not shown). When the outside air 10 passes through the washing humidifier, water molecules will fully absorb the heat in the air and vaporize and evaporate, so that the humidity of the outside air 10 increases to form humidified air. In addition, the at least one second temperature device 25 is any one or a combination of a re-cooling coil 251 and a re-heating coil 252 (such as Figure 2As shown in FIG. 1 , the recooling coil 251 is fed with either cooling water or ice water to cool the hot air in the outside air 10 into liquid, thereby effectively reducing the air temperature. The reheating coil 252 is fed with either hot water or steam to transfer heat energy to the outside air 10 to increase its temperature. Furthermore, the at least one second temperature device 25 may also be any one or a combination of a recooler 253 and a reheater 254 (such as Figure 1 As shown in the figure, the recooler 253 is any one of a shell and tube cooler, a fin tube cooler or a plate heat exchanger cooler, and the reheater 254 is any one of an electric heater, a gas heater, a heat medium oil heater, and a hot water heater. The at least one second filter device 26 is any one or a combination of a high efficiency filter (High Efficiency Particulate Air Filter, HEPA) or an ultra low penetration filter (Ultra Low Penetration Air Filter, ULPA), and the high efficiency filter (High Efficiency Particulate Air Filter, HEPA) is suitable for terminal filtration, and the efficiency for 0.1 micron and 0.3 micron is 99.998%, and the removal efficiency of particles with a diameter of 0.3 micron (1 / 200 of the diameter of a hair) can reach more than 99.7%. It is the most effective filtering medium for pollutants such as smoke, dust and bacteria, and the material is mainly ultra-fine glass fiber paper or composite filter paper. The Ultra Low Penetration Air Filter (ULPA) is mainly used to remove particles larger than 0.12µm (120 nanometers). The filtration effect is about DOP 99.995% or more, and the material is mainly special ultra-fine glass fiber paper.

[0061] The housing 21 of the MAU 20 is provided with a fan 27, which is arranged in front of the at least one second filter device 26 (such as Figure 1 and Figure 2 As shown in FIG. 1 ), the main function is to provide power so that the outside air 10 can be processed by the at least one first filter device 22, the at least one first temperature device 23, the at least one water washing device 24, the at least one second temperature device 25 and the at least one second filter device 26 in sequence to ensure the efficient operation of the outside air conditioning unit (MAU) 20. In addition, the outside air conditioning unit (MAU) 20 is connected to the air duct 30 so that the gas sent out by the outside air conditioning unit (MAU) 20 can be transported to the desired place (such as Figure 1 and Figure 2As shown), the air duct 30 is connected to any one of at least one clean room 31, at least one ward (not shown), at least one food processing area (not shown), at least one semiconductor process plant (not shown), and at least one electronic process plant (not shown), so as to provide the above-mentioned places with a large amount of the outside air 10 required to be supplemented, and drive the air flow circulation in the above-mentioned places to take away dust and heat, achieve the required cleanliness and ventilation volume, and achieve the purpose of replacing the original air.

[0062] Furthermore, the air duct 30 of the utility model can be connected to an external air processing system 40 (such as Figure 1 and Figure 2 As shown in FIG. 1 ), the air duct 30 has a double outside air processing gas, or a single outside air processing gas. The outside air processing system 40 is provided with a box 41, and the box 41 is provided with an outside air inlet 411 for the outside air 10 to enter, and the outside air processing system 40 is connected to the air duct 30, so that the gas sent out by the outside air processing system 40 is transported to a desired place (such as a room) through the air duct 30. Figure 1 and Figure 2 As shown), the air duct 30 is connected to any one of at least one clean room 31, at least one ward (not shown), at least one food processing area (not shown), at least one semiconductor process plant (not shown), and at least one electronic process plant (not shown).

[0063] The external air processing system 40 is provided with a dehumidification wheel 51 and a heat exchanger 52 (such as Figure 1 and Figure 2 As shown), the dehumidification wheel 51 is arranged in the box body 41, and the dehumidification wheel 51 is a special paper wheel with a honeycomb shape carrying a desiccant. Since the honeycomb aperture is only 1.5 mm, 1m 3 The moisture absorption area of ​​the rotary paper core is up to 3000m 2The air flows through the honeycomb pores in a boundary laminar flow state, and the wet exchange effect is good, so the dehumidification capacity is strong. The dehumidification wheel 51 has a processing area 511 and a regeneration area 512. The heat exchanger 52 is connected to the regeneration area 512 and provides a heat source to the regeneration area 512 for desorption. The heat exchanger 52 allows a gas to enter, and the gas is either the outside air 10 or the gas (not shown) after being processed by the processing area for heat exchange. In addition, the heat exchanger 52 allows the hot fluid 60 to flow in for heat exchange. When the hot fluid 60 is hot water, the heat exchanger adopts a water-to-gas heat exchanger. When the hot fluid 60 is hot steam, the heat exchanger adopts a gas-to-gas heat exchanger, so that the hot fluid 60 can exchange heat with the gas entering the heat exchanger 52, so as to transport the gas with a heat source to the regeneration zone 512, so that the regeneration zone 512 can perform thermal desorption.

[0064] In addition, the front combination of the dehumidification wheel 51 is designed with at least one first filter device 42, at least one first temperature device 43, at least one water washing device 44 and at least one second temperature device 45, and the above-mentioned device combination is designed in the box body 41, wherein the at least one first filter device 42 is any one or a combination of a primary filter (Pre Filter) or a medium filter (Medium efficiency filter), and the primary filter (Pre Filter) is mostly a plate-shaped type, suitable for primary filtration, mainly used for filtering dust particles above 5μm, and the material is mainly non-woven fabrics, nylon mesh, activated carbon filter material, and metal mesh. In addition, the medium filter (Medium efficiency filter) is mostly a bag-shaped type, which is widely used in intermediate filtration, mainly used for filtering dust particles above 1-5μm, and the material is mainly synthetic fiber and non-woven fabric. In addition, the at least one first temperature device 43 is any one or a combination of a pre-cooling coil 431 and a pre-heating coil 432 (such as Figure 2 As shown in FIG. 1 ), the precooling coil 431 is fed with either cooling water or ice water to cool the hot air in the outside air 10 into liquid, thereby effectively reducing the air temperature. The preheating coil 432 is fed with either hot water or steam to transfer heat energy to the outside air 10 to increase its temperature. Furthermore, the at least one first temperature device 43 may also be any one or a combination of a precooler 433 and a preheater 434 (such as Figure 1 As shown), the precooler 433 is any one of a shell and tube cooler, a fin tube cooler or a plate heat exchanger cooler, and the preheater 434 is any one of an electric heater, a gas heater, a thermal oil heater, and a hot water heater.

[0065] In addition, the at least one water washing device 44 is a washing humidifier, which is mainly composed of at least one pressure pump, at least one nozzle, at least one water supply valve, at least one drain valve, and at least one pipeline (not shown). When the outside air 10 passes through the washing humidifier, water molecules will fully absorb the heat in the air and vaporize and evaporate, so that the humidity of the outside air 10 increases to form humidified air. In addition, the at least one second temperature device 45 is any one or a combination of a re-cooling coil 451 and a reheating coil (not shown). Figure 2 As shown in the figure), the above-mentioned re-cooling coil 451 is supplied with either cooling water or ice water to cool the hot air in the outside air 10 into liquid, thereby effectively reducing the air temperature. And the above-mentioned reheating coil (not shown) is supplied with either hot water or steam to transfer heat energy to the outside air 10 to increase its temperature. Furthermore, the at least one second temperature device 45 can also be any one or a combination of the recooler 453 and the reheater (not shown) (such as Figure 1 As shown), the recooler 453 is any one of a shell and tube cooler, a fin-tube cooler or a plate heat exchanger cooler, and the reheater (not shown) is any one of an electric heater, a gas heater, a thermal oil heater, and a hot water heater.

[0066] The outside air 10 treated by the at least one first filter device 42, the at least one first temperature device 43, the at least one water washing device 44 and the at least one second temperature device 45 is sent to the treatment area 511 of the dehumidification wheel 51 for dehumidification adsorption (such as Figure 1 and Figure 2 As shown in the figure, 3 / 4 of the area of ​​the dehumidification wheel 51 is the processing area 511. When the outside air 10 to be processed passes through the processing area 511, the moisture in the outside air 10 is absorbed by the desiccant attached to the special fiber to become low-humidity dry air, and is blown out from the other end of the processing area 511, so that the absolute humidity of the outside air 10 after passing through the at least one washing device 44 can be adjusted to meet the requirements through condensation dehumidification.

[0067] The heat exchanger 52 also provides a heat source to the regeneration zone 512 (e.g. Figure 1 and Figure 2As shown in FIG. 5 ), the temperature of the heat source exceeds 100°C and enters the remaining 1 / 4 of the dehumidification wheel 51, that is, the regeneration zone 512, in the opposite direction. The heat source slowly enters the regeneration zone 512 to increase the temperature of the desiccant attached to the special fiber, so that the moisture contained in the desiccant attached to the special fiber is vaporized and taken out of the desiccant wheel 51, so that the desiccant attached to the special fiber can restore the moisture absorption function, that is, the desiccant is regenerated. In addition, when the desiccant wheel 51 rotates slowly, the desiccant attached to the special fiber of the desiccant wheel 51 undergoes moisture absorption and regeneration processes simultaneously, so the desiccant wheel 51 can ensure continuous and stable output of dry air.

[0068] In addition, at least one second filter device 46 is disposed in the box 41 of the external air treatment system 40. The at least one second filter device 46 is located at the rear section of the box 41 (eg Figure 1 and Figure 2 As shown in the figure, the outside air 10 after dehumidification and adsorption in the treatment area 511 of the dehumidification wheel 51 enters the at least one second filter device 46 for filtration, and the at least one second filter device 46 is any one or a combination of a high-efficiency particulate air filter (HEPA) or an ultra-low penetration rate filter (ULPA). The high-efficiency particulate air filter (HEPA) is suitable for terminal filtration, and its efficiency for 0.1 micron and 0.3 micron is 99.998%, and the removal efficiency of particles with a diameter of 0.3 micron (1 / 200 of the diameter of a hair) or more can reach more than 99.7%. It is the most effective filtering medium for pollutants such as smoke, dust and bacteria, and its material is mainly ultra-fine glass fiber paper or composite filter paper. The Ultra Low Penetration Air Filter (ULPA) is mainly used to remove particles larger than 0.12µm (120 nanometers). The filtration effect is about DOP 99.995% or more, and the material is mainly special ultra-fine glass fiber paper.

[0069] In addition, a fan 47 is disposed in the housing 41 of the external air treatment system 40. The fan 47 is disposed in front of the dehumidification wheel 51 (eg, Figure 2 As shown), the dehumidification wheel 51 (as shown Figure 1Any one of the places shown in the figure is mainly used to provide power to push and pull the outside air 10, so that the outside air 10 can be processed by the at least one first filter device 42, the at least one first temperature device 43, the at least one water washing device 44 and the at least one second temperature device 45 in sequence (dust is removed, filtered and its temperature and humidity are controlled by the above-mentioned devices), or is processed by the at least one first filter device 42, the at least one first temperature device 43, the at least one water washing device 44, the at least one second temperature device 45 and the dehumidification wheel 51 in sequence (dust is removed, filtered and its temperature and humidity are controlled by the above-mentioned devices, and then transported to the processing area 511 of the dehumidification wheel 51 for dehumidification and adsorption), so as to have the effect of generating fresh air with constant temperature and humidity.

[0070] In addition, the external air processing system 40 is connected to the air duct 30 so that the gas sent out by the external air processing system 40 can be transported to a desired place (such as Figure 1 and Figure 2 As shown), the air duct 30 is connected to any one of at least one clean room 31, at least one ward (not shown), at least one food processing area (not shown), at least one semiconductor process plant (not shown), and at least one electronic process plant (not shown), so as to provide the above-mentioned places with a large amount of the outside air (OutsideAir) 10 required to be supplemented, and drive the air flow circulation in the above-mentioned places to take away dust and heat, achieve the required cleanliness and ventilation volume, and achieve the purpose of replacing the original air.

[0071] Furthermore, the dehumidification wheel 51 of the present invention is additionally provided with a bypass device 80 (such as Figure 2 As shown), the bypass device 80 is any one of a pipeline and a layer plate, and the pipeline is mainly connected to the front and rear ends of the processing area 511 of the dehumidification wheel 51 by a bypass pipeline provided on the outside of the box body 41 or a bypass pipeline provided on the inside of the box body 41, and a control valve is provided for switching. The layer plate is mainly provided with a bypass layer plate (not shown) in the box body 41. When necessary, the bypass layer plate will cover the processing area 511 of the dehumidification wheel 51 to form a gas channel for processing the outside air 10 that passes through the at least one first filter device 42, the at least one first temperature device 43, the at least one water washing device 44 and the at least one second temperature device 45 in sequence. The outside air 10 can bypass the dehumidification wheel 51, mainly when the dehumidification wheel 51 fails, the dehumidification wheel 51 is adsorbed saturated or other force majeure factors occur, in order to avoid the outside air treatment system 40 from being unable to operate, a bypass facility for changing the direction of the airflow is designed.

[0072] Therefore, the utility model mainly adopts a combined design of an outside air (Outside Air) 10, an outside air conditioning unit (MAU) 20, an air duct 30, an outside air treatment system 40 and a thermal fluid 60, so that the thermal fluid 60 can be used to flow into the heat exchanger 52 for heat exchange, and provided to the dehumidification wheel 51 of the outside air treatment system 40 to remove the latent heat of the outside air (Outside Air) 10, and then transported to the required place through the air duct 30. As a result, the load of the outside air conditioning unit (MAU) 20 can be greatly reduced, and at the same time, it has the efficiency of heat exchange application and energy saving and carbon reduction, and can also achieve the effect of reducing energy costs, thereby increasing the overall practicality.

[0073] The above detailed description will enable those skilled in the art to understand that the present invention can indeed achieve the aforementioned objectives and is in compliance with the provisions of the Patent Law, thereby filing a patent application.

[0074] However, what is described above is only a preferred embodiment of the present utility model, and should not be used to limit the scope of implementation of the present utility model; therefore, all simple equivalent changes and modifications made according to the claims of the present utility model and the contents of the utility model specification should still fall within the scope of patent protection of the present utility model.

[0075] The embodiments of the present invention are described above. However, these embodiments are for illustrative purposes only and are not intended to limit the scope of the present invention. Although the embodiments are described above separately, this does not mean that the measures in the various embodiments cannot be used in combination to advantage. The scope of the present invention is defined by the attached claims and their equivalents. Without departing from the scope of the present invention, those skilled in the art may make a variety of substitutions and modifications, which should all fall within the scope of the present invention.

Claims

1. An external air treatment system with a hot fluid, characterized in that: include: an external air, the external air comprising at least one gas or a combination of gases; an outside air conditioning box, the outside air conditioning box is used for the outside air to enter; an air duct connected to the outside air conditioning box; an external air treatment system, the external air treatment system is for the external air to enter, the external air treatment system is connected to the air duct, the external air treatment system is designed with a dehumidification wheel and a heat exchanger, the dehumidification wheel has a treatment area and a regeneration area, the treatment area performs dehumidification adsorption, the heat exchanger is connected to the regeneration area, and provides a heat source to the regeneration area for desorption; and A hot fluid flows into the heat exchanger for heat exchange.

2. The external air treatment system with hot fluid according to claim 1, characterized in that: The at least one thermal fluid is further hot water, and the heat exchanger is a water-to-air heat exchanger.

3. The external air treatment system with hot fluid according to claim 1, characterized in that: The at least one hot fluid is further hot steam, and the heat exchanger is a gas-to-gas heat exchanger.

4. The external air treatment system with hot fluid according to claim 1, characterized in that: The heat exchanger further allows a gas to enter for heat exchange.

5. The external air treatment system with hot fluid according to claim 1, characterized in that: The air duct is further connected to any one of at least one clean room, at least one hospital ward, at least one food processing area, at least one semiconductor process plant area, and at least one electronic process plant area.

6. The external air treatment system with hot fluid according to claim 1, characterized in that: The dehumidification wheel is further provided with a bypass device for bypassing the dehumidification wheel.

7. The external air treatment system with hot fluid according to claim 6, characterized in that: The bypass device is further any one of a pipeline and a layer plate.

8. The external air treatment system with hot fluid according to claim 1, characterized in that: The external air processing system is further provided with a box body, and the dehumidification wheel is arranged in the box body.

9. The external air treatment system with hot fluid according to claim 8, characterized in that: The dehumidification wheel is further combined with at least one first filter device, at least one first temperature device, at least one water washing device and at least one second temperature device.

10. The external air treatment system with hot fluid according to claim 9, characterized in that: The first temperature device is further any one or a combination of a precooling coil, a precooler, a preheating coil, and a preheater.

11. The external air treatment system with hot fluid according to claim 9, characterized in that: The second temperature device is further any one or a combination of a recooling coil, a recooler, a reheating coil, and a reheater.

12. The external air treatment system with hot fluid according to claim 8, characterized in that: The box body is further provided with a fan, which is arranged at any one of the front and rear positions of the dehumidification wheel.

13. The external air treatment system with hot fluid according to claim 8, characterized in that: The box body is further provided with at least one second filter device, and the at least one second filter device is located at the rear section of the box body.

14. The external air treatment system with hot fluid according to claim 1, characterized in that: The external air conditioning box is further provided with a box body, in which at least one first filter device, at least one first temperature device, at least one water washing device, at least one second temperature device and at least one second filter device are combined and designed.

15. The external air treatment system with hot fluid according to claim 14, characterized in that: A fan is further provided in the box.

16. The external air treatment system with hot fluid according to claim 14, characterized in that: The first temperature device is further any one or a combination of a precooling coil, a precooler, a preheating coil, and a preheater.

17. The external air treatment system with hot fluid according to claim 14, characterized in that: The second temperature device is further any one or a combination of a recooling coil, a recooler, a reheating coil, and a reheater.