Chip test probe combination device

Abstract

The utility model discloses a chip test probe combination device, which belongs to the technical field of chip test and comprises a base, a bearing seat, a probe supporting seat, an integrating sphere supporting seat and a connecting piece. When chips of different models are tested, the mounting positions of the probe supporting seat and the integrating sphere supporting seat on the base can be adjusted according to needs by dismounting the connecting piece, and the position of the base can be moved according to needs by matching with the bearing seat placed on the base, so that the testing efficiency is improved. The positions of the probe supporting seat, the integrating sphere supporting seat and the bearing seat can be adjusted according to requirements, so that the flexibility and the universality can be improved, and the testing requirements of various chips can be met; meanwhile, for chip testing in the development stage, the positions of the probe supporting seat, the integrating sphere supporting seat and the bearing seat can be flexibly adjusted, so that the test requirements of different chips can be more quickly met, and the development process is accelerated.

Description

Technical Field

[0001] The utility model belongs to the technical field of chip testing, and in particular relates to a chip testing probe assembly device. Background Art

[0002] Chip testing refers to the process of performing various tests on integrated circuit chips to verify their functions, performance, and reliability. At all stages of chip manufacturing, including design verification, prototype testing, mass production, and terminal applications, rigorous testing is required to ensure that the quality and performance of the chip meet expectations. During the chip testing process, special testing equipment is required, which can efficiently and accurately test the chip to ensure product quality and performance stability.

[0003] However, most existing testing devices are designed for specific types of chips. Although this type of testing device can test batches of chips of the same model, it may require additional customized development or adjustments for chips of different or new models, resulting in limited adaptability. Utility Model Content

[0004] In view of this, an object of the present invention is to provide a chip testing probe assembly device to solve the technical problems raised by the background technology.

[0005] In order to achieve the above object, the utility model provides the following technical solutions:

[0006] The utility model provides a chip test probe assembly device, which comprises a base, a bearing seat, a probe support seat, an integrating sphere support seat and a connecting piece; the base is provided with evenly arranged positioning grooves; the bearing seat is placed on the base; the bearing seat is used to support the chip; the probe support seats are evenly distributed around the bearing seat; the probe support seat is used to install the probe; the integrating sphere support seat is used to fix the integrating sphere; the connecting piece is used to detachably connect the probe support seat and the integrating sphere support seat in the corresponding positioning grooves.

[0007] Furthermore, the probe support seat includes a probe top seat and a probe base; the probe top seat is connected to the probe base; the probe top seat is used to install the probe; and the probe base is connected to the corresponding positioning groove through the connecting piece.

[0008] Furthermore, a vertical through hole is formed on the probe base; one end of the connecting piece slides through the through hole and is threadedly connected in the corresponding positioning groove.

[0009] Furthermore, an adjustment hole is provided on the probe top seat; the probe is slidably disposed in the adjustment hole.

[0010] Furthermore, the combined device also includes a microscope assembly; the microscope assembly is detachably connected to the corresponding positioning groove via the connecting piece.

[0011] Furthermore, the microscope assembly includes a mounting seat, an adjustment rod and a sliding member; the mounting seat is provided with a mounting hole; the connecting member passes through the mounting hole and is detachably connected to the corresponding positioning groove; the adjustment rod is connected to the mounting seat; the adjustment rod is arranged vertically; the sliding member is used for sliding connection to the adjustment rod, and the sliding member can be positioned at any height position of the adjustment rod; the sliding member is used for installing the microscope tube.

[0012] Furthermore, the sliding member includes a sliding seat and a fastener; a sliding hole is opened on the sliding seat; the sliding seat is coaxially slidably sleeved on the adjusting rod through the sliding hole; the sliding seat is used to install the microscope tube; a fastening hole connected to the sliding hole is opened on the sliding seat; the fastening hole is arranged along the radial direction of the adjusting rod; the fastener is threadedly connected in the fastening hole, and one end of the fastener is tightly pressed against the peripheral side of the adjusting rod.

[0013] Furthermore, a limiting groove is provided on the peripheral side of the adjusting rod; the limiting groove is arranged along the axial direction of the adjusting rod; a limiting strip is provided on the hole wall of the sliding hole; and the limiting strip is slidably arranged in the limiting groove.

[0014] The beneficial effects of the utility model are:

[0015] In the present application, when testing chips of different models, since the probe support seat and the integrating sphere support seat are detachably connected to the corresponding positioning grooves through connecting pieces, the installation positions of the probe support seat and the integrating sphere support seat on the base can be adjusted as needed by removing the connecting pieces, and the position of the base can be moved as needed in conjunction with the supporting seat placed on the base. In this way, the positions of the probe support seat, the integrating sphere support seat and the supporting seat can be adjusted as needed, which can improve flexibility and versatility and make it suitable for various chip testing needs; at the same time, for chip testing in the development stage, flexible adjustment of the positions of the probe support seat, the integrating sphere support seat and the supporting seat can adapt to the testing needs of different chips more quickly and accelerate the development process.

[0016] Other advantages, objectives and features of the utility model will be described in the following description and will be apparent to those skilled in the art to some extent, or those skilled in the art can be taught from the practice of the utility model. The objectives and other advantages of the utility model can be realized and obtained through the following description. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] In order to make the purpose, technical solution and beneficial effects of the utility model clearer, the utility model is described with the following drawings:

[0018] Figure 1 A three-dimensional diagram of the combined device of the utility model;

[0019] Figure 2 A three-dimensional diagram of the local structure of the combined device of the utility model;

[0020] Figure 3 A three-dimensional diagram of the probe support seat of the utility model;

[0021] Figure 4 A three-dimensional diagram of the bearing seat of the utility model;

[0022] Figure 5 The three-dimensional diagram of the COC stage of the utility model

[0023] Figure 6 It is a three-dimensional diagram of the microscope assembly of the utility model.

[0024] The markings in the accompanying drawings are as follows: base 1, bearing seat 2, probe support seat 3, integrating sphere support seat 4, positioning slot 5, probe 6, integrating sphere 7, integrating sphere base 8, integrating sphere support frame 9, extension bar 10, mounting bar hole 11, COC stage 12, test slot 13, probe top seat 14, probe base 15, middle plate 16, through hole 17, adjustment hole 18, probe fixing block 19, microscope assembly 20, mounting seat 21, adjusting rod 22, mounting tube 23, sliding seat 24, fastener 25, electric telescopic rod 26, limit slot 27, microscope tube 28. DETAILED DESCRIPTION

[0025] In order to make the purpose, technical solutions and advantages of the utility model more clearly understood, the utility model is further described in detail below in conjunction with embodiments and drawings. The schematic implementation manner of the utility model and its description are only used to explain the utility model and are not intended to limit the utility model.

[0026] In the following description, a large number of specific details are set forth in order to provide a thorough understanding of the present invention. However, it is apparent to those skilled in the art that these specific details are not necessary to implement the present invention. In other examples, in order to avoid obscuring the present invention, well-known structures, circuits, materials or methods are not specifically described.

[0027] Throughout the specification, references to "one embodiment," "an embodiment," "an example," or "an example" mean that a particular feature, structure, or characteristic described in conjunction with the embodiment or example is included in at least one embodiment of the present invention. Therefore, the phrases "one embodiment," "an embodiment," "an example," or "an example" appearing in various places throughout the specification do not necessarily all refer to the same embodiment or example. In addition, particular features, structures, or characteristics may be combined in one or more embodiments or examples in any suitable combination and / or sub-combination. In addition, it will be appreciated by those of ordinary skill in the art that the figures provided herein are for illustrative purposes and that the figures are not necessarily drawn to scale. The term "and / or" as used herein includes any and all combinations of one or more of the associated listed items.

[0028] In the description of the present invention, it should be understood that the terms "front", "rear", "left", "right", "up", "down", "vertical", "horizontal", "high", "low", "inside", "outside", etc., indicating directions or positional relationships, are based on the directions or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific direction, be constructed and operated in a specific direction, and therefore should not be understood as limiting the scope of protection of the present invention.

[0029] Embodiment 1:

[0030] like Figures 1 to 6 As shown, the utility model provides a chip test probe combination device, which includes a base 1, a bearing seat 2, a probe support seat 3, an integrating sphere support seat 4 and a connecting piece; the base 1 is provided with evenly arranged positioning grooves 5; specifically, the base 1 is a horizontally arranged plate, and the positioning grooves 5 are vertically opened on the base 1, and the shape of the positioning grooves 5 is a hole shape; the bearing seat 2 is placed on the base 1; the bearing seat 2 is used to support the chip; the probe support seats 3 are evenly distributed on the side of the bearing seat 2, and in this embodiment, the number of probe support seats 3 is two; the probe support seat 3 is used to install a probe 6; the integrating sphere support seat 4 is used to fix an integrating sphere 7; the connecting piece is used to detachably connect the probe support seat 3 and the integrating sphere support seat 4 in the corresponding positioning grooves 5; specifically, the number of connecting pieces is selected according to actual needs, and the connecting piece is specifically a screw.

[0031] Specifically, the integrating sphere support seat 4 includes an integrating sphere base 8 and an integrating sphere support frame 9; the integrating sphere base 8 is a rectangular body; and the vertical side wall of the integrating sphere base 8 has an integrally formed extension bar 10; the bottom side of the extension bar 10 contacts the top side of the base 1; a plurality of vertical extension holes are opened on the extension bar 10; the corresponding extension holes are slidably penetrated by the connecting piece and are threadedly connected in the corresponding positioning groove 5;

[0032] The integrating sphere support frame 9 is a supporting plate; the cross section of the supporting plate is L-shaped; the horizontal side wall of the supporting plate is provided with a mounting bar hole 11; the top side of the integrating sphere base 8 is provided with a mounting bottom hole corresponding to and connected to the mounting bar hole 11; the integrating sphere support frame 9 and the integrating sphere base 8 are connected by screws passing through the mounting bar hole 11 and threadedly connected in the mounting bottom hole; the integrating sphere 7 is connected to the vertical side wall of the supporting plate by bolts (not shown in the figure), and the integrating sphere 7 is arranged close to the bearing seat 2, so as to ensure that the integrating sphere 7 can collect reflected, transmitted or scattered light signals from the chip, and transmit the collected light signals to the display or detector for optical measurement and analysis. By analyzing the characteristics of the light signal, the optical performance, surface morphology, material characteristics and other information of the chip can be understood.

[0033] Specifically, the support seat 2 is in the shape of a rectangle; a COC stage 12 is placed on the top side of the support seat 2; the top of the COC stage 12 has a test slot 13 for positioning the chip, and the test slot 13 can ensure that the scale chip is accurately positioned on the COC stage 12, thereby ensuring the accuracy and stability of the test.

[0034] The principle and beneficial effects of the above technical solution:

[0035] In a specific implementation, the probe support seat 3 and the integrating sphere support seat 4 are detachably connected in the corresponding positioning groove 5 through a connecting piece, and then the chip is placed on the COC stage 12 above the supporting seat 2, and the chip is conveniently positioned through the test groove 13. Then, the optical signal is collected by the integrating sphere 7 and evenly transmitted to the display or detector for analysis, so that the optical properties, surface morphology, material properties and other information of the chip can be understood; at the same time, the probe 6 installed on the probe support seat 3 is usually used to contact the chip surface to transmit electrical signals or collect electrical signals. In chip testing, the probe 6 can be used for the electrical properties of the chip, such as resistance, capacitance, inductance and other characteristics. Through the contact between the probe 6 and the chip, the internal circuits and components of the chip can be tested and measured;

[0036] When it is necessary to test chips of different types, since the probe support seat 3 and the integrating sphere support seat 4 are detachably connected in the corresponding positioning groove 5 through a connecting piece, the installation position of the probe support seat 3 and the integrating sphere support seat 4 on the base 1 can be adjusted as needed by removing the connecting piece, and the position of the base 1 can be moved as needed in conjunction with the supporting seat 2 placed on the base 1. In this way, the positions of the probe support seat 3, the integrating sphere support seat 4 and the supporting seat 2 can be adjusted as needed, which can improve flexibility and versatility and make it suitable for a variety of chip testing needs; at the same time, for chip testing in the development stage, flexible adjustment of the positions of the probe support seat 3, the integrating sphere support seat 4 and the supporting seat 2 can adapt to the testing needs of different chips more quickly and accelerate the development process.

[0037] In this embodiment, Figure 3 As shown, the probe support seat 3 includes a probe top seat 14 and a probe base 15; the probe top seat 14 is connected to the probe base 15; the probe top seat 14 is used to install the probe 6; the probe base 15 is connected to the corresponding positioning groove 5 through the connecting piece.

[0038] Specifically, a horizontally arranged middle plate 16 is fixedly connected to the bottom side of the probe top seat 14 , and the middle plate 16 is connected to the probe base 15 by bolts (not shown in the figure).

[0039] The principle and beneficial effects of the above technical solution:

[0040] In specific implementation, the middle plate 16 serves as a connection medium between the probe top seat 14 and the base 1, which can enhance the overall stability of the probe 6. It reduces the looseness or shaking that may occur during the chip testing process, improves the stability and reliability of the test, and at the same time, the bolt connection method makes the assembly and maintenance between the probe top seat 14 and the base 1 simple, and only the bolts need to be loosened, which is convenient and quick.

[0041] In this embodiment, Figure 3 As shown, a vertical through hole 17 is formed on the probe base 15 ; one end of the connecting member slides through the through hole 17 and is threadedly connected in the corresponding positioning groove 5 .

[0042] Specifically, the probe base 15 is a bottom shell, and the cross-sectional shape of the bottom shell is a transverse U-shape; a through hole 17 is vertically opened on a part of the bottom shell that contacts the base 1, one end of the screw slides through the through hole 17 and is threadedly connected in the corresponding positioning groove 5, and the nut of the screw can be tightly pressed against the bottom shell.

[0043] The principle and beneficial effects of the above technical solution:

[0044] During specific implementation, the probe base 15 is connected to the positioning groove 5 by means of a screw passing through the through hole 17. By loosening the screw, the probe base 15 can be rotated around the axis of the screw, thereby adjusting the orientation angle of the probe base 15, adjusting the orientation angle of the probe support seat 3, and further adjusting the orientation angle of the probe 6, thereby ensuring the optimal contact angle between the probe 6 and the chip and improving the accuracy and reliability of the test.

[0045] In this embodiment, Figure 3 As shown, an adjustment hole 18 is opened on the probe top seat 14 ; the probe 6 is slidably disposed in the adjustment hole 18 .

[0046] Specifically, the probe top seat 14 includes a probe fixing block 19 ; a horizontal adjustment hole 18 is opened on the probe fixing block 19 ; and the probe 6 is slidably disposed in the adjustment hole 18 .

[0047] The principle and beneficial effects of the above technical solution:

[0048] In specific implementation, the setting of the adjustment hole 18 enables the probe 6 to be adjusted in the horizontal direction and fine-tuned according to specific test requirements to ensure the best contact state between the probe 6 and the object to be tested, thereby improving the accuracy of the test.

[0049] Embodiment 2:

[0050] This embodiment is based on the first embodiment. Figure 1 , 6 As shown, the combined device further includes a microscope assembly 20; the microscope assembly 20 is detachably connected to the corresponding positioning groove 5 through the connecting piece.

[0051] The principle and beneficial effects of the above technical solution:

[0052] Microscopes can magnify tiny structures on the chip, allowing testers to clearly observe subtle features and details on the chip, such as circuit lines, internal chip structures, etc., in order to conduct accurate testing and analysis.

[0053] In this embodiment, Figure 6 As shown, the microscope assembly 20 includes a mounting seat 21, an adjustment rod 22 and a sliding member; a mounting hole is opened on the mounting seat 21; the connecting member passes through the mounting hole and is detachably connected to the corresponding positioning groove 5; the adjustment rod 22 is connected to the mounting seat 21; the adjustment rod 22 is arranged vertically; the sliding member is used for sliding connection to the adjustment rod 22, and the sliding member can be positioned at any height position of the adjustment rod 22; the sliding member is used to install the microscope tube 28.

[0054] Specifically, the mounting seat 21 is a mounting plate; the upper side wall of the mounting plate is coaxially fixedly connected with a mounting tube 23; the bottom end of the adjusting rod 22 is coaxially fixed in the mounting tube 23; the mounting hole is vertically opened on the mounting plate; the corresponding connecting piece slides through the mounting hole and is threadedly connected with the corresponding positioning groove 5.

[0055] The principle and beneficial effects of the above technical solution:

[0056] In specific implementation, the mounting plate is connected to the positioning groove 5 on the base 1 by screws, and the position of the microscope assembly 20 can be adjusted by loosening the screws. In this way, the position of the microscope assembly 20 can be adjusted as needed to adapt to different test requirements and operating environments.

[0057] In this embodiment, Figure 6 As shown, the sliding member includes a sliding seat 24 and a fastener 25; a sliding hole is opened on the sliding seat 24; the sliding seat 24 is coaxially slidably sleeved on the adjusting rod 22 through the sliding hole; the sliding seat 24 is used to install the microscope tube 28; a fastening hole connected to the sliding hole is opened on the sliding seat 24; the fastening hole is arranged along the radial direction of the adjusting rod 22; the fastener 25 is threadedly connected in the fastening hole, and one end of the fastener 25 is tightly pressed against the peripheral side of the adjusting rod 22, and specifically, the fastener 25 is a screw.

[0058] Specifically, the sliding seat 24 has a vertical side wall, and a horizontal electric telescopic rod 26 is installed on the vertical side wall, and the model of the electric telescopic rod 26 can be NKLA20; the microscope tube 28 is fixedly connected to the telescopic end of the electric telescopic rod 26; and the microscope tube 28 is arranged vertically, and the model of the microscope tube 28 can be ZOOM650.

[0059] The principle and beneficial effects of the above technical solution:

[0060] In specific implementation, the fastener 25 can be loosened to release the tight state with the adjusting rod 22, so that the sliding seat 24 can be moved up and down, so that the height position of the microscope tube 28 can be adjusted. When the predetermined height position is reached, the fastener 25 can be tightened so that one end of the fastener 25 can be pressed against the peripheral side of the adjusting rod 22 to ensure that the sliding seat 24 maintains the adjusted height position to meet the test or observation requirements of different height requirements; at the same time, the position of the microscope tube 28 can be adjusted by controlling the extension or shortening of the telescopic end of the electric telescopic rod 26, so that the precise adjustment of the position of the microscope tube 28 can be achieved.

[0061] In this embodiment, Figure 6 As shown, a limiting groove 27 is opened on the peripheral side of the adjusting rod 22; the limiting groove 27 is arranged along the axial direction of the adjusting rod 22; a limiting strip is arranged on the hole wall of the sliding hole; and the limiting strip is slidably arranged in the limiting groove 27.

[0062] Specifically, there are two limit grooves 27; both ends of the limit groove 27 pass through the end of the adjustment rod 22; there are two limit bars, which are integrally formed on the hole wall of the sliding hole; each limit bar slidably cooperates with the corresponding limit groove 27.

[0063] The principle and beneficial effects of the above technical solution:

[0064] In specific implementation, the structure of the limit slot 27 and the limit strip can ensure that the adjustment rod 22 remains stable during the adjustment process. When the limit strip slides in the limit slot 27, it can effectively prevent the adjustment rod 22 from accidentally moving in an unwanted position, thereby improving the stability and reliability of the test process.

[0065] Finally, it should be noted that the above preferred embodiments are only used to illustrate the technical solution of the utility model rather than to limit it. Although the utility model has been described in detail through the above preferred embodiments, those skilled in the art should understand that various changes can be made in form and details without departing from the scope defined by the claims of the utility model.

Claims

1. A chip test probe assembly device, characterized in that: The combined device comprises: A base, wherein the base is provided with evenly arranged positioning grooves; A supporting seat, the supporting seat is placed on the base; the supporting seat is used to support the chip; Probe support seats, the probe support seats are evenly distributed around the bearing seat; the probe support seats are used to install probes; An integrating sphere support seat, wherein the integrating sphere support seat is used to fix the integrating sphere; A connecting piece is used to detachably connect the probe support seat and the integrating sphere support seat in the corresponding positioning groove.

2. A chip testing probe assembly device according to claim 1, characterized in that: The probe support seat includes a probe top seat and a probe base; The probe top seat is connected to the probe base; the probe top seat is used to install the probe; The probe base is connected to the corresponding positioning groove through the connecting piece.

3. A chip testing probe assembly device according to claim 2, characterized in that: The probe base is provided with a vertical through hole; one end of the connecting piece slides through the through hole and is threadedly connected in the corresponding positioning groove.

4. A chip testing probe assembly device according to claim 2 or 3, characterized in that: An adjustment hole is provided on the probe top seat; the probe is slidably arranged in the adjustment hole.

5. The chip testing probe assembly device according to claim 1, characterized in that: The combined device also includes a microscope assembly; The microscope assembly is detachably connected to the corresponding positioning groove via the connecting piece.

6. A chip testing probe assembly device according to claim 5, characterized in that: The microscope assembly includes a mounting seat, an adjustment rod and a sliding member; The mounting seat is provided with a mounting hole; the connecting member passes through the mounting hole and is detachably connected to the corresponding positioning groove; The adjusting rod is connected to the mounting seat; the adjusting rod is arranged vertically; The sliding member is used for being slidably connected to the adjusting rod, and the sliding member can be positioned at any height position of the adjusting rod; the sliding member is used for installing the microscope tube.

7. A chip testing probe assembly device according to claim 6, characterized in that: The sliding member comprises a sliding seat and a fastener; The sliding seat is provided with a sliding hole; the sliding seat is coaxially slidably sleeved on the adjusting rod through the sliding hole; the sliding seat is used to install the microscope tube; The sliding seat is provided with a fastening hole connected to the sliding hole; the fastening hole is arranged along the radial direction of the adjusting rod; The fastener is threadedly connected in the fastening hole, and one end of the fastener is tightly pressed against the peripheral side of the adjusting rod.

8. A chip testing probe assembly device according to claim 7, characterized in that: A limiting groove is provided on the peripheral side of the adjusting rod; the limiting groove is arranged along the axial direction of the adjusting rod; a limiting strip is arranged on the hole wall of the sliding hole; and the limiting strip is slidably arranged in the limiting groove.

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