Variable-angle built-in sample table device for ion sputtering instrument

Through the design of a variable-angle built-in sample stage device, the ball hinge mechanism and the rotating rod are used to achieve multi-angle rotation and tilt of the sample stage, which solves the problems of complex sample stage structure and low sputtering efficiency in the existing technology, achieves uniform coating on the surface and sides of the sample, and reduces costs.

CN223373214UActive Publication Date: 2025-09-23ZHEJIANG UNIV
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Patent Information

Application Number
CN202423237109.5
Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2024-12-26
Publication Date
2025-09-23
Estimated Expiration
2034-12-26

AI Technical Summary

Technical Problem

The sample stage in the existing ion sputtering instrument has a complex structure and is expensive. The motor drive causes the magnetic field and electric field to affect the sputtering efficiency, making it impossible to uniformly coat the sample surface and sides.

Method used

A variable-angle built-in sample stage device is used, and a ball joint mechanism and a rotating rod are used to achieve multi-angle rotation and tilt of the sample stage. The slide is performed under vacuum conditions by a toggle device, and non-magnetic materials are used to avoid interference from electric and magnetic fields.

Benefits of technology

The uniform coating on the surface and side of the sample is achieved, the structure is simple, the cost is low, the sputtering efficiency is improved, and the influence of electric and magnetic fields on sputtering is avoided.

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Abstract

The utility model discloses a variable angle built-in sample stage device for ion sputtering instrument, including base, spherical hinge mechanism and rotating rod, the base is cylindrical, the spherical hinge mechanism is arranged in the base, the spherical hinge mechanism is fixed with bushing tube, the rotating rod passes through the bushing tube and is in sliding fit with the bushing tube, and the rotating rod is fixed on the base. A wavy annular sliding groove is formed in the inner wall of the base, a guide ball head is arranged at one end of the rotating rod, the part, located between the guide ball head and the lining pipe, of the rotating rod is sleeved with a spring, the two ends of the spring abut against the guide ball head and the lining pipe respectively, the guide ball head is matched with the wavy annular sliding groove, and a sample table is fixed to the lining pipe. The sample table can rotate and incline within a certain angle range (namely, multi-angle rotation), the upper surface and the side face of a sample with a certain thickness can be evenly coated, the whole structure is simple, use is convenient, cost is low, and an electric field and a magnetic field are not generated.
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