Testing platform for impedance matcher or radio frequency power supply

Abstract

The utility model discloses a test platform for an impedance matcher or a radio frequency power supply, which belongs to the technical field of radio frequency test and comprises a radio frequency input port, a radio frequency output port, a direction coupler, a display, a matching network and a controller, the radio frequency input port is externally connected with the radio frequency power supply and the matcher, the radio frequency output port is externally connected with a load, the direction coupler is connected with the radio frequency input port, and the matching network is connected with the display. The display is connected with the direction coupler; the matching network is connected between the directional coupler and the radio frequency output port and comprises a parallel structure formed by at least any two of a 60M network branch, a 13.56 M network branch and a 400K network branch; the controller is connected with the direction coupler, and the controller is also connected with the matching network. According to the technical scheme, identification of radio frequency power of different frequency bands and switching of network branches can be realized without manual switching and adjustment, so that the universality of the test platform can be improved.

Description

Technical Field

[0001] The utility model relates to the technical field of radio frequency testing, in particular to a testing platform for an impedance matcher or a radio frequency power supply. Background Art

[0002] The existing 13.56MHz test platform is a highly specialized system whose core functions are to accurately evaluate the matching performance of 13.56MHz impedance matchers and monitor the output reflection of 13.56MHz RF power supplies.

[0003] The 13.56MHz test platform primarily consists of a 13.56MHz RF power supply, a 13.56MHz matching box, and a dedicated DDL and load. This test platform is only suitable for testing RF power supplies and matching boxes at the 13.56MHz frequency, and cannot test devices at other frequencies. Due to the varying propagation characteristics of RF power at different frequencies, capacitive and inductive reactances affect HF (high frequency) and LF (low frequency) to varying degrees, the same test platform cannot test devices at two different frequencies. Utility Model Content

[0004] The embodiments of the present application provide a test platform for an impedance matcher or a radio frequency power supply, thereby solving the technical problem that existing test platforms can only test matchers and radio frequency power supplies of one frequency band.

[0005] The present application provides a test platform for an impedance matching box or a radio frequency power supply, including:

[0006] RF input port, used for external RF power supply and RF matching device;

[0007] RF output port, used for external load;

[0008] RF directional coupler, electrically connected to the RF input port

[0009] a display electrically connected to the radio frequency directional coupler, the display being configured to display a reflected signal coupled by the radio frequency directional coupler;

[0010] a matching network connected between the RF directional coupler and the RF output port, the matching network comprising a parallel structure formed by at least any two of the 60M network branch, the 13.56M network branch, and the 400K network branch;

[0011] A controller is electrically connected to the radio frequency directional coupler and is also electrically connected to the matching network. The controller is used to control the on / off of each network branch in the matching network.

[0012] The beneficial effects of the above embodiments are: this technical solution combines multiple matching network branches, directional couplers and PLC controllers to realize automatic frequency selection and matching functions. The existing DDL test platform can only test RF equipment in one frequency band at the same time. If equipment in other frequency bands needs to be tested, the matching network must be manually modified, and the process is complicated and tedious. This technical solution can realize the identification of RF power in different frequency bands and the switching of network branches without manual switching and adjustment, thereby improving the versatility of the test platform.

[0013] Based on the above embodiment, the embodiment of the present application can also be improved as follows:

[0014] In one embodiment of the present application: the 60M network branch includes: a switch S1, a capacitor C1, and a capacitor C2, the switch S1 is electrically connected to the RF directional coupler, the switch S1 is also electrically connected to the capacitor C1 and the capacitor C2 respectively, the other end of the capacitor C1 is grounded, and the other end of the capacitor C2 is connected to the RF output port.

[0015] In one embodiment of the present application: the 13.56M network branch includes: a switch S2, a capacitor C3, a capacitor C4, and an inductor L1. The switch S2 is electrically connected to the RF directional coupler. The switch S2 is also connected to the capacitor C3, the inductor L1, and the capacitor C4 in sequence. The other end of the capacitor C4 is grounded, and the other end of the inductor L1 is connected to the RF output port.

[0016] In one embodiment of the present application: the 400K network branch includes: a switch S3, an inductor L2, and an inductor L3. The switch S2 is electrically connected to the RF directional coupler. The switch S3 is also connected to the inductor L2 and the inductor L3 in sequence. The other end of the inductor L3 is grounded, and the other end of the inductor L2 is connected to the RF output port.

[0017] In one embodiment of the present application: the switch S1, switch S2, and switch S3 are vacuum relays, and the controller is a PLC controller.

[0018] In one embodiment of the present application, the capacitor C1, the capacitor C2, the capacitor C3, and the capacitor C4 are adjustable capacitors, and the inductor L1, the inductor L2, and the inductor L3 are adjustable inductors.

[0019] In one embodiment of the present application: it also includes: a cooling device, which is installed on the shell of the test platform. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] To more clearly illustrate the specific embodiments of the present invention or the technical solutions in the prior art, the following briefly describes the drawings required for the specific embodiments or the description of the prior art. Similar elements or parts are generally identified by similar reference numerals throughout the drawings. Elements or parts in the drawings are not necessarily drawn to scale.

[0021] Figure 1 Schematic diagram of the test platform for impedance matching box or RF power supply. DETAILED DESCRIPTION

[0022] In this application, unless otherwise specified or limited, the terms used in this application should be understood in a broad sense. For example, a connection can be a fixed connection, a detachable connection, or an integrated connection. It can be a direct connection or an indirect connection through an intermediate medium. If it involves power or electronic equipment, it can also be an electrical connection or a communication signal connection. For those skilled in the art, the specific meanings of different terms in this utility model can be understood according to specific circumstances. The scope of the specific meanings should be limited to achieving the functions of this application.

[0023] In the description of this application, it should be understood that the terms "center", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc., indicating orientations or positional relationships, are based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present invention.

[0024] Example 1

[0025] A test platform for an impedance matcher or a radio frequency power supply comprises: a radio frequency input port, a radio frequency output port, a radio frequency directional coupler, a display, a matching network, and a controller. The radio frequency input port is used for externally connecting a radio frequency power supply and a radio frequency matcher, the radio frequency output port is used for externally connecting a load, the radio frequency directional coupler is electrically connected to the radio frequency input port, the display is electrically connected to the radio frequency directional coupler, and the display is used to display a reflected signal coupled to the radio frequency directional coupler; the matching network is connected between the radio frequency directional coupler and the radio frequency output port, and the matching network comprises a parallel structure formed by at least any two network branches among a 60M network branch, a 13.56M network branch, and a 400K network branch; the controller is electrically connected to the radio frequency directional coupler and also to the matching network, and the controller is used to control the on / off of each network branch in the matching network.

[0026] The characteristic impedance of the RF power supply is equal to the MATCH plus the cavity, which equals 50Ω. This minimizes the reflected power, maximizing the power efficiency of the RF output to the cavity. When matching LF (low-frequency) equipment using existing test platforms, finding the matching point is difficult, whether in manual or automatic mode. When the matcher cannot find the matching point, the power emitted by the RF power supply will be reflected to varying degrees, or even fully reflected, preventing the power from reaching the load. The impedance environments of different customer cavities vary, and even with the same frequency, the impedance matching range of the matcher will vary. The matcher can only find the matching point when its matching range overlaps with the matching range of the branch circuit.

[0027] Therefore, it is necessary to adjust the branch's adjustable capacitor. The adjustable capacitor's function is to adjust the matching network's capacitive reactance, or impedance, to ensure a matching point during testing. The function of the adjustable inductor is essentially the same as that of the adjustable capacitor, except that the inductor is selected as the primary component of this branch to address low-frequency power characteristics.

[0028] The specific adjustment method is to manually adjust the adjustable capacitor when testing a matching device for the first time to ensure that the matching device is matched. At this time, record the capacitor position and adjust the capacitor to this position before testing the same matching device again. During the test, you can still manually adjust the capacitor position to test the matching device's matching performance at different matching points. The adjustment method for the adjustable inductor is basically the same as that for the adjustable capacitor.

[0029] If fixed inductors are used, the cover needs to be opened and the position adjusted every time the platform is built. Therefore, using adjustable capacitors and adjustable inductors to build the platform can greatly improve the speed of platform construction.

[0030] Specifically, this embodiment adopts three network branches, and the three network branches form a parallel structure between the radio frequency directional coupler and the radio frequency output port.

[0031] Specifically, the 60M network branch includes: switch S1, capacitor C1, and capacitor C2. Switch S1 is electrically connected to the RF directional coupler. Switch S1 is also electrically connected to capacitor C1 and capacitor C2 respectively. The other end of capacitor C1 is grounded, and the other end of capacitor C2 is connected to the RF output port.

[0032] Specifically, the 13.56M network branch includes: switch S2, capacitor C3, capacitor C4, and inductor L1. Switch S2 is electrically connected to the RF directional coupler. Switch S2 is also connected to capacitor C3, inductor L1, and capacitor C4 in sequence. The other end of capacitor C4 is grounded, and the other end of inductor L1 is connected to the RF output port.

[0033] Specifically, the 400K network branch includes: switch S3, inductor L2, and inductor L3. Switch S2 is electrically connected to the RF directional coupler. Switch S3 is also connected to inductor L2 and inductor L3 in sequence. The other end of inductor L3 is grounded, and the other end of inductor L2 is connected to the RF output port.

[0034] Specifically, the switches S1 , S2 and S3 are vacuum relays, and the controller is a PLC controller.

[0035] Specifically, capacitors C1, C2, C3, and C4 are adjustable capacitors, and inductors L1, L2, and L3 are adjustable inductors. Further, the adjustable capacitors are rotary adjustable capacitors, and the inductors are rotary adjustable inductors.

[0036] When testing the RF power supply, an external matching box is required. The output of the RF power supply is connected to the input of the matching box through a coaxial cable, and the output of the matching box is then connected to the RF input port. The function of the load is to consume the power emitted from the RF power supply.

[0037] When this impedance matcher or RF power supply test platform is in use, the RF directional coupler is connected to the display and controller through a signal line, and is connected to the matching network through a coaxial cable. The power emitted by the RF power supply is transmitted to the RF directional coupler through the coaxial cable. The RF directional coupler couples to the signal frequency and feeds it back to the controller. The controller sends corresponding instructions to the corresponding vacuum relay (switch S1, switch S2 or switch S3) based on the received signal. The vacuum relay turns on the corresponding network branch, and the power is transmitted to the network branch through the matcher. The matcher starts matching, and the RF directional coupler feeds back the coupled reflected signal to the display for display. The power is finally transmitted to the load for consumption.

[0038] This technical solution combines multiple matching network branches, directional couplers and PLC controllers to realize automatic frequency selection and matching functions. The existing DDL test platform can only test RF devices in one frequency band at the same time. If devices in other frequency bands need to be tested, the matching network must be manually modified, and the process is complicated and tedious. This technical solution can realize the identification of RF power in different frequency bands and the switching of network branches without manual switching and adjustment, thereby improving the versatility of the test platform.

[0039] Example 2

[0040] Based on the first embodiment, the test platform further includes: a cooling device, which is installed on the shell of the test platform.

[0041] The cooling device can be a water cooling device or an air cooling device. The air cooling device can use a fan installed on the outer casing, and the water cooling device can use an external chiller. The chiller is connected to a heat dissipation sheet metal or a water pipe. The heat dissipation sheet metal or the water pipe is in direct contact with the capacitor and inductor, and the temperature is taken away by the water flow, thereby achieving a cooling effect.

[0042] The above are only embodiments of the present invention. Common knowledge such as the known specific structures and characteristics in the scheme is not described in detail here. Ordinary technicians in the relevant field are aware of all common technical knowledge in the technical field of the utility model before the application date or priority date, can obtain all existing technologies in the field, and have the ability to apply conventional experimental means before that date. Ordinary technicians in the relevant field can improve and implement this scheme based on their own abilities under the guidance of this application. Some typical known structures or methods should not become obstacles for ordinary technicians in the relevant field to implement this application. It should be pointed out that for those skilled in the art, without departing from the structure of the utility model, they can also make several variations and improvements, which should also be regarded as the scope of protection of the utility model. These will not affect the effect of the implementation of the utility model and the practicality of the patent.

Claims

1. A test platform for an impedance matcher or a radio frequency power supply, characterized in that: include: RF input port, used for external RF power supply and RF matching device; RF output port, used for external load; RF directional coupler, electrically connected to the RF input port a display electrically connected to the radio frequency directional coupler, the display being configured to display a reflected signal coupled by the radio frequency directional coupler; a matching network connected between the RF directional coupler and the RF output port, the matching network comprising a parallel structure formed by at least any two of the 60M network branch, the 13.56M network branch, and the 400K network branch; A controller is electrically connected to the radio frequency directional coupler and is also electrically connected to the matching network. The controller is used to control the on / off of each network branch in the matching network.

2. The test platform according to claim 1, characterized in that: The 60M network branch includes: a switch S1, a capacitor C1, and a capacitor C2. The switch S1 is electrically connected to the RF directional coupler. The switch S1 is also electrically connected to the capacitor C1 and the capacitor C2 respectively. The other end of the capacitor C1 is grounded, and the other end of the capacitor C2 is connected to the RF output port.

3. The test platform according to claim 2, characterized in that: The 13.56M network branch includes: a switch S2, a capacitor C3, a capacitor C4, and an inductor L1. The switch S2 is electrically connected to the RF directional coupler. The switch S2 is also connected to the capacitor C3, the inductor L1, and the capacitor C4 in sequence. The other end of the capacitor C4 is grounded, and the other end of the inductor L1 is connected to the RF output port.

4. The test platform according to claim 3, characterized in that: The 400K network branch includes: a switch S3, an inductor L2, and an inductor L3. The switch S2 is electrically connected to the RF directional coupler. The switch S3 is also connected to the inductor L2 and the inductor L3 in sequence. The other end of the inductor L3 is grounded, and the other end of the inductor L2 is connected to the RF output port.

5. The test platform according to claim 4, characterized in that: The switches S1, S2 and S3 are vacuum relays, and the controller is a PLC controller.

6. The test platform according to claim 4, characterized in that: The capacitors C1, C2, C3 and C4 are adjustable capacitors, and the inductors L1, L2 and L3 are adjustable inductors.

7. The test platform according to claim 1, characterized in that: Also includes: A cooling device is installed on the shell of the test platform.

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