Evaporation boat and vacuum evaporation coating device
By designing accommodating grooves and blind hole structures in the evaporation boat to collect impurities, the problem of impurity splashing during vacuum coating is solved, and high-safety and high-quality current collector film deposition is achieved.
Patent Information
- Application Number
- CN202422770007.3
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-11-13
- Publication Date
- 2025-10-03
- Estimated Expiration
- 2034-11-13
AI Technical Summary
In existing vacuum coating technology, the aluminum nitride wetting layer formed after the reaction between the boron nitride of the evaporation boat material and the aluminum liquid can easily cause impurities to splash, resulting in surface defects of the film material, affecting the safety of battery use and the quality of film formation.
An evaporation boat is designed, which includes an evaporation boat body with a receiving tank and blind holes. The side wall of the receiving tank is provided with multiple blind holes for collecting impurities, ensuring that the impurities are deposited in the blind holes and reducing droplet splashing.
The safety of the vacuum evaporation coating process is improved, deposition defects are reduced, and the available area of the current collector film and the safety of battery use are increased.