Multi-path spray head of aerosol deposition equipment

Abstract

The utility model provides a multi-path spray head of aerosol deposition equipment, which belongs to the field of film material preparation and comprises a shell, convex parts are arranged on the left side and the right side of the shell, extension plates are fixedly connected to the left side and the right side of the bottom of the shell, and an inlet end is fixedly connected to the top of the shell; and the spray head assembly comprises a lateral electromagnetic valve fixedly connected into the convex part and a straight electromagnetic valve fixedly connected to the inner wall of the bottom of the shell, and a four-way pipe is fixedly connected to the inner wall of the top of the shell. According to the aerosol spraying device, aerosol can be sprayed to a plurality of substrates at the same time through the arranged spray head assembly, whether different spray heads spray or not can be independently controlled, and when the positions of the substrates are different, the positions of the spray heads on the side edges can be adjusted so as to meet the requirement that the actual positions of the substrates are different; the multi-path spray head structure is high in flexibility, and the working speed and the working efficiency of existing aerosol deposition equipment can be effectively improved.

Description

TECHNICAL FIELD

[0001] The utility model relates to thin film material preparation technology, concretely is a kind of aerosol deposition equipment multiway spray head. BACKGROUND

[0002] Aerosol deposition technology is a surface treatment method for preparing thin film materials. This technology is simple, efficient and fast, and can be carried out at room temperature, so it has been widely used in the field of material science. The principle of aerosol deposition technology is to use the diffusion, deposition and solidification process of aerosol particles in the gas flow to deposit particles on the surface of the substrate to form a thin film. First, the particles in the solution are prepared into aerosol by spraying, atomizing and other methods. Then, the aerosol is sprayed onto the substrate surface, and the particles diffuse and deposit on the substrate in the gas flow. Finally, the particles are solidified by heat treatment or other methods to form a dense thin film. The whole process can be carried out at room temperature, avoiding the high temperature treatment step in the traditional thin film preparation method, thus saving energy and reducing the thermal expansion of materials.

[0003] In the existing aerosol deposition equipment, a spray head is needed to spray aerosol onto the substrate surface, but the existing spray head can only spray at a single point, and the spraying efficiency is low when multiple substrates need to be sprayed, slowing down the working speed and efficiency of the equipment. Therefore, we propose a kind of aerosol deposition equipment multiway spray head to solve the above problems. UTILITY MODEL CONTENT

[0004] In view of the deficiencies of the prior art, the utility model provides a kind of aerosol deposition equipment multiway spray head to solve the problems raised in the above background art.

[0005] The purpose of the utility model can be realized by the following technical solutions: including shell, the left and right sides of the shell are provided with convex part, the bottom left and right sides of the shell are fixedly connected with extension plate, the top of the shell is fixedly connected with inlet end;

[0006] The spray head assembly comprises a lateral electromagnetic valve fixedly connected in the convex part and a straight-way electromagnetic valve fixedly connected in the inner wall of the bottom of the shell, a four-way pipe is fixedly connected at the port of the four-way pipe, the straight pipe is connected with the adjacent inlet end, the lateral electromagnetic valve and the straight-way electromagnetic valve respectively, a corrugated pipe is fixedly connected at the output end of the lateral electromagnetic valve, an adjusting frame is fixedly connected at one side of the extension plate, a rotating shaft is rotatably connected in the adjusting frame, a cross frame is rotatably connected at the outer lower side of the rotating shaft, a secondary shaft is also rotatably connected in the adjusting frame, gears are fixedly connected at the outer sides of the rotating shaft and the secondary shaft, the two gears are engaged with each other, a first locking rod is arranged on the adjusting frame, an extension rod is slidably connected in the cross frame, a strip-shaped groove is formed in the bottom of the cross frame, a second locking rod is arranged at the bottom of the cross frame, a disc is fixedly connected at the tail end of the extension rod, the disc and the bottom of the shell are fixedly connected with spray heads, one end of the corrugated pipe is connected with the adjacent spray head, and the straight-way electromagnetic valve is connected with the spray head below through a pipeline.

[0007] Preferably, the left and right sides of the rear side of the shell are fixedly connected with fixed plates, and the fixed plates are provided with left and right symmetrical mounting grooves.

[0008] Preferably, the adjusting frame is provided with a lateral plate, and the lateral plate and the extension plate are fixedly connected through fasteners.

[0009] Preferably, the bottom of the extension rod is provided with a threaded hole, the second locking rod is threadedly connected at the inner side of the threaded hole, a friction plate is fixedly connected to the second locking rod, and a silica gel pad is fixedly connected to the side of the friction plate close to the cross frame.

[0010] Compared with the prior art, the utility model has the advantages of:

[0011] The spray head assembly can realize the spraying of aerosols on multiple substrates at the same time, and the spraying of different spray heads can be independently controlled. When the positions of the substrates are different, the positions of the spray heads on the side edges can be adjusted to meet the requirements of different actual positions of the substrates, so that the flexibility of the multi-way spray head structure is high, and the working speed and efficiency of the existing aerosol deposition equipment can be effectively improved. BRIEF DESCRIPTION OF DRAWINGS

[0012] In order to facilitate the understanding of those skilled in the art, the utility model will be further described below with reference to the drawings.

[0013] Figure 1 is the three-dimensional structure schematic diagram of the utility model;

[0014] Figure 2 is the partial structure schematic diagram of the utility model;

[0015] Figure 3 is the main view structure schematic diagram of the utility model;

[0016] Figure 4 is the partial enlarged structure schematic diagram one of the utility model;

[0017] Figure 5 is the partial enlarged structure schematic diagram two of the utility model.

[0018] In the figure: 1, shell, 2, convex part, 3, extension plate, 4, lateral electromagnetic valve, 5, straight electromagnetic valve, 6, four-way pipe, 7, straight pipe, 8, inlet, 9, corrugated pipe, 10, adjusting frame, 11, rotating shaft, 12, cross frame, 13, auxiliary shaft, 14, gear, 15, first locking rod, 16, extension rod, 17, strip-shaped groove, 18, second locking rod, 19, spray head, 20, disc, 21, fixed plate. DETAILED DESCRIPTION

[0019] The technical solutions of the utility model will be described clearly and completely below in combination with embodiments, obviously, the described embodiments are only part of the embodiments of the utility model, not all the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by the ordinary skill in the art without creative labor belong to the protection scope of the utility model.

[0020] Please refer to Figures 1-5 As shown in the figure, a kind of aerosol deposition equipment multi-way spray head, including shell 1, convex part 2 is provided on the left and right sides of shell 1, the bottom left and right sides of shell 1 are fixedly connected with extension plate 3, the top of shell 1 is fixedly connected with inlet 8, convex part 2 is used to provide space for the installation of lateral electromagnetic valve 4, extension plate 3 is used to install adjusting frame 10, inlet 8 is used to communicate the multi-way spray head with aerosol generating equipment, facilitate the entry of aerosol;

[0021] The spray head assembly comprises a lateral electromagnetic valve 4 fixedly connected in the convex part 2 and a straight electromagnetic valve 5 fixedly connected in the inner wall of the bottom of the shell 1, a four-way pipe 6 fixedly connected at the port of the four-way pipe 6, a straight pipe 7 fixedly connected at the port of the four-way pipe 6, the straight pipe 7 being in communication with the adjacent inlet end 8, the lateral electromagnetic valve 4 and the straight electromagnetic valve 5, respectively, a corrugated pipe 9 fixedly connected at the output end of the lateral electromagnetic valve 4, an adjusting frame 10 fixedly connected at one side of the extension plate 3, a rotating shaft 11 rotatably connected in the adjusting frame 10, a cross frame 12 rotatably connected at the outer lower side of the rotating shaft 11, a secondary shaft 13 also rotatably connected in the adjusting frame 10, a gear 14 fixedly connected at the outer side of the rotating shaft 11 and the secondary shaft 13, the two gears 14 being in mesh with each other, a first locking rod 15 provided on the adjusting frame 10, an extension rod 16 slidably connected in the cross frame 12, a strip-shaped groove 17 provided at the bottom of the cross frame 12, a second locking rod 18 provided at the bottom of the cross frame 12, a disc 20 fixedly connected at the end of the extension rod 16, a spray head 19 fixedly connected at the bottom of the disc 20 and the shell 1, one end of the corrugated pipe 9 being in communication with the adjacent spray head 19, and the straight electromagnetic valve 5 being in communication with the spray head 19 below through a pipeline.

[0022] It should be noted that the straight electromagnetic valve 5 and the lateral electromagnetic valve 4 are used for independently controlling different spray heads 19, the four-way pipe 6 is used for controlling the aerosol of the inlet end 8 to be allowed to flow in three directions, the corrugated pipe 9 can be changed in length with the change of the position of the lateral spray head 19, the adjusting frame 10 is used for installing and integrating the structure for adjusting the position of the spray head 19, the cross frame 12 can be rotated at the outer side of the rotating shaft 11 to change the position of the lateral spray head 19, can be moved along an arc, the gear 14 is used for providing an audible prompt for the operator to judge when the spray head 19 is rotated, the first locking rod 15 is threadedly connected at the top of the adjusting frame 10, a protective layer is fixedly connected at the top of the gear 14 at the outer side of the secondary shaft 13, used for being in contact with and being extruded by the bottom end of the first locking rod 15, used for reducing the surface wear of the gear 14 itself, the extension rod 16 is used for conveniently extending the position of the spray head 19 in the horizontal direction, the strip-shaped groove 17 is used for allowing the second locking rod 18 to pass through, avoiding interference, through the provided spray head assembly, the aerosol can be sprayed on multiple substrates at the same time, and whether the different spray heads 19 spray or not can be independently controlled, when the positions of the substrates are different, the positions of the lateral spray heads 19 can also be adjusted to meet the requirements of different actual positions of the substrates, so that the flexibility of the multi-way spray head 19 structure is high, and the working speed and working efficiency of the existing aerosol deposition equipment can be effectively improved.

[0023] The left and right sides of the rear side of the shell 1 are fixedly connected with fixed plates 21, symmetrically provided with mounting grooves on the fixed plates 21, the mounting grooves on the fixed plates 21 can be used for conveniently connecting and fixing the multi-way spray head structure with the aerosol deposition equipment, facilitating installation.

[0024] The adjusting frame 10 is provided with a lateral plate which is fixedly connected with the extension plate 3 through fasteners, and the lateral plate can facilitate the fixing and dismounting between the adjusting frame 10 and the extension plate 3.

[0025] The bottom of the extension rod 16 is provided with a threaded hole, and the second locking rod 18 is threadedly connected to the inner side of the threaded hole.

[0026] In the specific implementation of the utility model, the multi-way spray head is connected and installed with the aerosol deposition equipment through the installation slot on the fixing plate 21, and the two are communicated through a pipeline, when the substrate needs to be sprayed, the first locking rod 15 and the second locking rod 18 are respectively rotated in advance, so that the first locking rod 15 and the second locking rod 18 respectively release the restriction on the gear 14 and the extension rod 16, the extension rod 16 is pulled to drive the disc 20 and the spray head 19 to move, and the crossbar 12 can be rotated to rotate outside the rotating shaft 11, the position of the side spray head 19 is adjusted by two methods, after the adjustment is completed, the first locking rod 15 and the second locking rod 18 are reversely rotated, so that one end or the friction plate of the first locking rod 15 and the second locking rod 18 respectively contacts and presses the gear 14 and the crossbar 12, the fixing of the position of the spray head 19 is completed, and then whether the corresponding spray head 19 is supplied with aerosol is determined by whether the different lateral electromagnetic valves 4 and the straight electromagnetic valves 5 work.

[0027] The above disclosed preferred embodiments of the utility model are only used for helping to describe the utility model. The preferred embodiments do not describe all the details, and the utility model is not limited to the specific implementation. Obviously, according to the content of the specification, many modifications and changes can be made. The specification selects and specifically describes these embodiments, in order to better explain the principle and practical application of the utility model, so that the person skilled in the art can well understand and utilize the utility model. The utility model is limited by the claims and the whole scope and equivalents.

Claims

1. An aerosol deposition apparatus multi-jet, characterized in that, The utility model relates to a kind of automatic spray device, including: Shell (1), the convex part (2) is provided on the left and right sides of the shell (1), the bottom left and right sides of the shell (1) are fixedly connected with extension plate (3), the top of the shell (1) is fixedly connected with inlet (8); Spray head assembly, the lateral electromagnetic valve (4) and fixedly connected in the straight-way electromagnetic valve (5) of the bottom inner wall of the shell (1) are included in the convex part (2) respectively, the top inner wall of the shell (1) is fixedly connected with four-way pipe (6), the straight pipe (7) is fixedly connected at the port of four-way pipe (6), the straight pipe (7) is communicated with adjacent inlet (8), lateral electromagnetic valve (4) and straight-way electromagnetic valve (5) respectively, the output end of the lateral electromagnetic valve (4) is fixedly connected with bellows (9), one side of the extension plate (3) is fixedly connected with adjusting frame (10), the adjusting frame (10) is rotatably connected with rotating shaft (11) inside, the outer lower side of rotating shaft (11) is rotatably connected with cross frame (12), the adjusting frame (10) is also rotatably connected with auxiliary shaft (13) inside, the outer side of rotating shaft (11) and auxiliary shaft (13) is fixedly connected with gear (14), two gears (14) are engaged with each other, first locking lever (15) is also provided on the adjusting frame (10), the cross frame (12) is slidably connected with extension rod (16) inside, the bottom of the cross frame (12) is provided with strip slot (17), the bottom of the cross frame (12) is provided with second locking lever (18), the end of the extension rod (16) is fixedly connected with disc (20), the disc (20) and the bottom of the shell (1) are fixedly connected with spray head (19), one end of the bellows (9) is communicated with adjacent spray head (19), the straight-way electromagnetic valve (5) is communicated with lower spray head (19) below by pipeline.

2. An aerosol-deposition apparatus multi-jet head according to claim 1, wherein The rear left and right sides of the shell (1) are fixedly connected with fixed plate (21), and the left-right symmetrical mounting groove is formed in the fixed plate (21).

3. An aerosol-deposition apparatus multi-jet according to claim 2, wherein The lateral plate is provided on the adjusting frame (10), and the lateral plate and the extension plate (3) are fixedly connected by fastener.

4. An aerosol-deposition-apparatus multi-jet according to claim 3, wherein Threaded hole is formed in the bottom of the extension rod (16), the second locking lever (18) is threadedly connected in the inner side of the threaded hole, the second locking lever (18) is fixedly connected with friction plate, and the side close to the cross frame (12) of the friction plate is fixedly connected with silica gel pad.

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