Sample clamping device for electronic probe test

By designing a sample clamping device with multiple stages and slot structures, the problems of difficulty in fixing thin sheet samples and the influence of carbon spraying on analysis were solved, achieving stable clamping and efficient testing.

CN223664545UActive Publication Date: 2025-12-12GUOBIAO BEIJING TESTING & CERTIFICATION CO LTD
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Patent Information

Application Number
CN202520241355.3
Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2025-02-17
Publication Date
2025-12-12
Estimated Expiration
2035-02-17

AI Technical Summary

Technical Problem

Existing clamping devices are difficult to hold thin sheet samples, especially for cross-sectional testing of coated samples, and carbon spraying can affect the quantitative analysis results of low carbon content.

Method used

A sample clamping device was designed, comprising multiple stages and slot structures. Stable sample clamping is achieved through threaded connection and screw fixation. It is suitable for fixing different types of samples, including sheet samples and coating samples.

Benefits of technology

It achieves stable clamping of thin-section samples, saves sample preparation costs, improves instrument efficiency, and can clamp multiple samples simultaneously, reducing sample change time.

✦ Generated by Eureka AI based on patent content.

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Abstract

The utility model discloses a sample clamping device for electronic probe testing. A first stepped hole, two second stepped holes, two third stepped holes and two fourth stepped holes are formed in the top face of the base downwards, and a clamping groove is integrally and fixedly connected to the bottom face of the base. The first object carrying table is placed in the first object carrying containing space and fixed through a first fixing screw installed in the first fixing threaded through hole. The second object carrying table is placed in the second object carrying containing space and fixed through a second fixing screw rod installed in the second fixing threaded through hole. The third object carrying table is placed in a third object carrying containing space and fixed through a third fixing screw rod installed in a third fixing threaded through hole. The fourth objective table is placed in the fourth objective containing space and fixed through a fourth fixing screw installed in a fourth fixing threaded through hole. According to the utility model, the problem that an electronic probe sheet sample or a small sample is difficult to clamp is solved, and the sample preparation cost of the sheet sample is saved.
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Description

TECHNICAL FIELD

[0001] The utility model belongs to the technical field of measuring photoelectron spectrum equipment, specifically a sample clamping device for electron probe testing for microscopic topography analysis. BACKGROUND

[0002] The function of electron probe is mainly to analyze microscopic topography and micro area composition. It is a high-efficiency analysis instrument developed on the basis of electron optics and X-ray spectroscopy principles. Its principle is to use a fine focus electron beam to irradiate the surface of a sample, to excite characteristic X-rays of elements of the sample, to analyze the wavelength (or characteristic energy) of the characteristic X-rays, and to know the types of elements contained in the sample (qualitative analysis), and to analyze the intensity of the X-rays, and to know how much the content of corresponding elements in the sample is (quantitative analysis).

[0003] However, the existing clamping device has certain deficiencies in use: the existing sample table can only fix the sample by pasting carbon glue, but for cross-section testing of coated samples, if the thickness of the coated substrate is small, such as a thin sheet substrate, the sample cannot be fixed by pasting carbon glue. If metallographic sampling is performed, the coated sample is generally sampled by cold embedding, and the embedding material is non-conductive resin. Before electron probe testing of the non-conductive sample, carbon needs to be sprayed. If quantitative analysis of low content carbon elements of the coating is to be performed, the test result will be affected by the surface sprayed carbon. UTILITY MODEL CONTENT

[0004] In view of the problems in the background art, the utility model provides a sample clamping device for electron probe testing, which has the technical scheme that the bottom base is provided with a stepped hole one, two stepped holes two, two stepped holes three and two stepped holes four on the top surface thereof downwards, and a clamping groove is integrally and fixedly arranged on the bottom surface of the bottom base;

[0005] The first loading space of the stepped hole one is communicated with the side surface of the bottom base through two first fixed threaded holes, the loading table one is placed in the first loading space and is fixed through the first fixed screw rod installed in the first fixed threaded hole, and the first loading space is communicated with the bottom surface of the bottom base through the first bottom surface opening;

[0006] The second loading space of the stepped hole two is communicated with the side surface of the bottom base through two second fixed threaded holes, the loading table two is placed in the second loading space and is fixed through the second fixed screw rod installed in the second fixed threaded hole, and the second loading space is communicated with the bottom surface of the bottom base through the second bottom surface opening;

[0007] The third object-holding space of the stepped hole three is communicated with the side surface of the base through two third fixed threaded holes, the object table three is placed in the third object-holding space and is fixed through the third fixed screw rod installed in the third fixed threaded hole, and the third object-holding space is communicated with the bottom surface of the base through the third bottom opening;

[0008] The fourth object-holding space of the stepped hole four is communicated with the side surface of the base through two fourth fixed threaded holes, the object table four is placed in the fourth object-holding space and is fixed through the fourth fixed screw rod installed in the fourth fixed threaded hole, and the fourth object-holding space is communicated with the bottom surface of the base through the fourth bottom opening.

[0009] The clamping groove is a pair of protrusions, and the protrusions are provided with isosceles right triangle grooves of the same size in the opposite direction, and the length of the isosceles right triangle groove is 4 mm; the diameters of the first fixed threaded hole, the second fixed threaded hole, the third fixed threaded hole and the fourth fixed threaded hole are all 4 mm.

[0010] The shape of the object table one is a cuboid, and a groove one is opened upward and downward on the object table one, the groove one penetrates the object table one from the horizontal direction, and the groove one is communicated with one side surface of the object table one through a threaded hole two; a first sample fixing screw rod is arranged in the threaded hole two.

[0011] The length of the object table one is 41 mm, the width is 19 mm, and the height is 25 mm; the length of the groove one is 18 mm, the width is 19 mm, and the height is 22 mm; and the diameter of the threaded hole two is 10 mm.

[0012] The shape of the object table three is a cuboid, and two parallel grooves three are opened upward and downward on the object table three, the grooves three penetrate the object table three from the horizontal direction, and each groove three is communicated with one side surface of the object table one through a threaded hole three; a second sample fixing screw rod is arranged in the threaded hole three.

[0013] The length of the object table three is 41 mm, the width is 27 mm, and the height is 25 mm; the length of the groove three is 8 mm, the width is 27 mm, and the height is 22 mm; and the diameter of the threaded hole three is 10 mm.

[0014] The object table two is composed of a circular sheet one and a hollow cylinder one, the inner wall of the hollow cylinder one is provided with a first inner thread, the lower side of the circular sheet one is provided with a groove two, and the inner wall of the hollow cylinder one is provided with a first inner thread matched with the first outer thread around the circular sheet one, so that the circular sheet one is installed in the hollow cylinder one through thread connection.

[0015] The inner diameter of the hollow cylinder one is 14 mm, the outer diameter is 17 mm, and the height is 25 mm; the diameter of the circular sheet one is 15 mm, and the thickness is 5 mm; the length of the groove two is 8 mm, the width is 2 mm, and the height is 2 mm.

[0016] The object table four is composed of a hollow cylinder two and a disc two, the disc two is provided with a second outer thread around, the disc two is provided with a groove four below, and the inner wall of the hollow cylinder two is provided with a second inner thread matched with the second outer thread of the disc two, so that the disc two is installed in the hollow cylinder two through the thread connection.

[0017] The inner diameter of the hollow cylinder two is 38mm, the outer diameter is 41mm, and the height is 25mm; the diameter of the disc two is 39mm, and the thickness is 5mm; the length of the groove four is 8mm, the width is 2mm, and the height is 2mm.

[0018] The electronic probe thin sheet sample or small sample is not easy to clamp, the cost of thin sheet sample preparation is saved, the functionality and practicability of the sample table are increased, nine samples can be clamped at the same time, the sample changing time is saved, and the instrument use efficiency is improved. BRIEF DESCRIPTION OF DRAWINGS

[0019] Figure 1 It is a structure schematic view of the base in the sample clamping device for electronic probe testing embodiment of the utility model;

[0020] Figure 2 It is a structure schematic view of the base in another view angle of the embodiment of the utility model;

[0021] Figure 3 It is a structure schematic view of the object table one in the embodiment of the utility model;

[0022] Figure 4 It is a structure schematic view of the object table three in the embodiment of the utility model;

[0023] Figure 5 It is a structure schematic view of the object table two in the embodiment of the utility model;

[0024] Figure 6 It is a structure schematic view of the object table four in the embodiment of the utility model.

[0025] Wherein: 1—base, 3—step hole one, 4—step hole two, 5—step hole three, 6—step hole four, 7—slot, 8—stage one, 9—threaded hole two, 10—groove one, 11—stage two, 12—circular piece one, 13—groove two, 14—hollow cylinder one, 15—stage three, 16—threaded hole three, 17—groove three, 18—stage four, 19—circular piece two, 20—groove four, 21—hollow cylinder two, 31— 32—First fixed threaded through hole, 33—First loading space, 41—Second fixed threaded through hole, 42—Second loading space, 43—Second loading space, 51—Third fixed threaded through hole, 52—Third loading space, 53—Third loading space, 61—Fourth fixed threaded through hole, 62—Fourth loading space, 63—Fourth loading space, 71—Protrusion, 72—Isosceles right-angled triangular groove. Detailed Implementation

[0026] The present invention will be further described in detail below with reference to the accompanying drawings.

[0027] like Figure 1 The embodiment of the present invention shown includes: a base 1, a first stage 8, a second stage 11, a third stage 15, and a fourth stage 18. The top surface of the base 1 has a stepped hole 3, two stepped holes 4, two stepped holes 5, and two stepped holes 6. The bottom surface of the base 1 is integrally fixed with a slot 7, and the base 1 is connected to the base of the testing instrument through the slot 7.

[0028] The first loading space 32 of the stepped hole 3 communicates with the side of the base 1 through two first fixed threaded through holes 31. The platform 8 is placed in the first loading space 32 and is tightened and fixed by the first fixed screw (not shown in the figure) installed in the first fixed threaded through hole 31. The first loading space 32 communicates with the bottom surface of the base 1 through the first bottom opening 33. The first bottom opening 33 is used to remove the platform 8.

[0029] The second loading space 42 of the stepped hole 4 communicates with the side of the base 1 through two second fixed threaded through holes 41. The second loading platform 11 is placed in the second loading space 42 and is tightened and fixed by the second fixed screw (not shown in the figure) installed in the second fixed threaded through hole 41. The second loading space 42 communicates with the bottom surface of the base 1 through the second bottom opening 43. The second bottom opening 43 is used to remove the second loading platform 11.

[0030] The third loading space 52 of the two stepped holes 3 5 is connected to the side of the base 1 through two third fixed threaded through holes 51. The loading platform 3 15 is placed in the third loading space 52 and is tightened and fixed by the third fixed screw (not shown in the figure) installed in the third fixed threaded through hole 51. The third loading space 52 is connected to the bottom surface of the base 1 through the third bottom opening 53. The third bottom opening 53 is used to remove the loading platform 3 15.

[0031] The fourth loading space 62 of the two stepped holes 6 is connected to the side of the base 1 through two fourth fixed threaded through holes 61. The loading platform 18 is placed in the fourth loading space 62 and is tightened and fixed by the fourth fixed screw (not shown in the figure) installed in the fourth fixed threaded through hole 61. The fourth loading space 62 is connected to the bottom surface of the base 1 through the fourth bottom opening 63. The fourth bottom opening 63 is used to remove the loading platform 18.

[0032] Both stage 18 and stage 315 are rectangular parallelepipeds with grooves and threaded holes. The thin sample is placed in the groove, and after adjusting the clamping position, the sample is secured with a nut. The space enclosed by the first and third accommodating spaces 32 is also rectangular parallelepiped. Specifically:

[0033] like Figure 3 The stage 8 shown is a cuboid in shape. A groove 10 is formed on the top of the stage 8 and extends horizontally through the stage 8. The groove 10 is connected to one side of the stage 8 through a threaded hole 2 9. A first sample fixing screw (not shown in the figure) is provided in the threaded hole 2 9 to fix the sample placed in the groove 10.

[0034] like Figure 4 The main body of the stage 315 shown is a cuboid, with two parallel grooves 317 extending downwards from the top. The grooves 317 penetrate the stage 315 horizontally, and each groove 317 is connected to one side of the stage 8 through a threaded hole 316. A second sample fixing screw (not shown in the figure) is provided in the threaded hole 316 to fix the sample placed in the groove 317.

[0035] Stage 2 11 and Stage 4 18 consist of a circular plate and a hollow cylinder. The circular plate has grooves to hold the sample to its upper surface. The hollow cylinder has threads inside that match the perimeter of the circular plate, allowing the sample height to be adjusted via the circular plate. The spaces enclosed by the second and fourth loading spaces 42 are both cylindrical. Specifically:

[0036] like Figure 5The stage 11 shown consists of a circular plate 12 and a hollow cylinder 14. The inner wall of the hollow cylinder 14 is provided with a first internal thread, and the bottom of the circular plate 12 is provided with a groove 13. The inner wall of the hollow cylinder 12 is provided with a first internal thread that matches the first external thread around the circular plate 12, so that the circular plate 12 is installed in the hollow cylinder 12 by threaded connection, and the position of the circular plate 12 in the hollow cylinder 12 can be adjusted by rotating the groove 13. The sample is attached to the upper end face of the circular plate 12 for testing.

[0037] like Figure 6 The stage 4 18 shown is composed of a hollow cylinder 21 and a disc 2 19. The disc 2 19 has a second external thread around its perimeter and a groove 4 20 below it. The inner wall of the hollow cylinder 21 has a second internal thread that matches the second external thread around the disc 2 19, so that the disc 2 19 is installed in the hollow cylinder 21 by threaded connection, and the position of the disc 2 19 in the hollow cylinder 21 can be adjusted by rotating the groove 4 20. The sample is attached to the upper end face of the disc 2 19 for testing.

[0038] In this embodiment, as Figure 2 The slot 7 shown consists of a pair of protrusions 71, and each pair of protrusions 71 has an isosceles right-angled triangular groove 72 of the same size facing each other. The side length of the isosceles right-angled triangular groove is 4mm.

[0039] In this embodiment, the diameters of the first fixed threaded through hole 31, the second fixed threaded through hole 41, the third fixed threaded through hole 51, and the fourth fixed threaded through hole 61 are all 4mm.

[0040] In this embodiment, the stage 8 has a length of 41mm, a width of 19mm, and a height of 25mm; the groove 10 has a length of 18mm, a width of 19mm, and a height of 22mm; and the threaded hole 9 has a diameter of 10mm.

[0041] In this embodiment, the stage 3 15 has a length of 41mm, a width of 27mm, and a height of 25mm; the groove 3 17 has a length of 8mm, a width of 27mm, and a height of 22mm; and the threaded hole 3 16 has a diameter of 10mm.

[0042] In this embodiment, the hollow cylinder 14 in the stage 2 11 has an inner diameter of 14mm, an outer diameter of 17mm, and a height of 25mm; the disc 12 has a diameter of 15mm and a thickness of 5mm; and the groove 2 13 has a length of 8mm, a width of 2mm, and a height of 2mm.

[0043] In this embodiment, the hollow cylinder 21 in the stage 4 18 has an inner diameter of 38mm, an outer diameter of 41mm, and a height of 25mm; the disc 2 19 has a diameter of 39mm and a thickness of 5mm; and the groove 4 20 has a length of 8mm, a width of 2mm, and a height of 2mm.

[0044] In specific embodiment 1, the sample is an alloy sheet with a size of 10*10mm and a thickness of 2mm. A cross-sectional test is required. Based on the test surface and the sample size, stage three is selected. The sample is placed in the groove, and the height of the test surface does not exceed 2mm of the groove. The sample fixing screw is tightened to fix the sample. The stage is placed in step hole three, and the fixing screw on the base is tightened to perform electron probe testing.

[0045] In specific embodiment 2, the sample is an alloy sheet with a size of 10*10mm and a thickness of 2mm. Surface testing is required. Depending on the test surface and sample size, either stage two or four can be selected. Carbon adhesive is applied to the upper surface of the disc, and the sample is attached to the disc. Then, the disc is rotated to adjust its height to be flush with the top of stage two. Stage two is placed in step hole two, and the fixing screw on the base is tightened to perform electron probe testing.

Claims

1. A sample clamping device for electron probe testing, characterized in that, include: The base (1), platform one (8), platform two (11), platform three (15) and platform four (18) are provided. The top surface of the base (1) has a step hole one (3), two step holes two (4), two step holes three (5) and two step holes four (6) and the bottom surface of the base (1) is integrally fixed with a slot (7). The first loading space (32) of the stepped hole (3) is connected to the side of the base (1) through two first fixed threaded through holes (31). The platform (8) is placed in the first loading space (32) and fixed by the first fixed screw installed in the first fixed threaded through hole (31). The first loading space (32) is connected to the bottom surface of the base (1) through the first bottom opening (33). The second loading space (42) of the stepped hole 2 (4) is connected to the side of the base (1) through two second fixed threaded through holes (41). The second loading platform (11) is placed in the second loading space (42) and fixed by the second fixed screw installed in the second fixed threaded through hole (41). The second loading space (42) is connected to the bottom surface of the base (1) through the second bottom opening (43). The third loading space (52) of the stepped hole three (5) is connected to the side of the base (1) through two third fixed threaded through holes (51). The loading platform three (15) is placed in the third loading space (52) and fixed by the third fixed screw installed in the third fixed threaded through hole (51). The third loading space (52) is connected to the bottom surface of the base (1) through the third bottom opening (53). The fourth loading space (62) of the stepped hole four (6) is connected to the side of the base (1) through two fourth fixed threaded through holes (61). The loading platform four (18) is placed in the fourth loading space (62) and fixed by the fourth fixed screw installed in the fourth fixed threaded through hole (61). The fourth loading space (62) is connected to the bottom surface of the base (1) through the fourth bottom opening (63).

2. The sample clamping device for electron probe testing according to claim 1, characterized in that, The slot (7) consists of a pair of protrusions (71), and the pair of protrusions (71) are provided with isosceles right-angled triangular grooves (72) of the same size facing each other. The side length of the isosceles right-angled triangular groove is 4mm. The diameters of the first fixed threaded through hole (31), the second fixed threaded through hole (41), the third fixed threaded through hole (51) and the fourth fixed threaded through hole (61) are all 4mm.

3. The sample clamping device for electron probe testing according to claim 1, characterized in that, The main body of the stage (8) is a cuboid. A groove (10) is opened downward on the top of the stage (8). The groove (10) passes through the stage (8) horizontally. The groove (10) is connected to one side of the stage (8) through a threaded hole (9). A first sample fixing screw is provided in the threaded hole (9).

4. The sample clamping device for electron probe testing according to claim 3, characterized in that, The stage 1 (8) is 41mm long, 19mm wide and 25mm high; the groove 1 (10) is 18mm long, 19mm wide and 22mm high; the threaded hole 2 (9) is 10mm in diameter.

5. The sample clamping device for electron probe testing according to claim 1, characterized in that, The main body of the stage three (15) is a cuboid with two parallel grooves three (17) on the top and downward. The grooves three (17) penetrate the stage three (15) horizontally. Each groove three (17) is connected to one side of the stage one (8) through a threaded hole three (16). A second sample fixing screw is provided in the threaded hole three (16).

6. The sample clamping device for electron probe testing according to claim 5, characterized in that, The platform three (15) is 41mm long, 27mm wide and 25mm high; the groove three (17) is 8mm long, 27mm wide and 22mm high; the threaded hole three (16) is 10mm in diameter.

7. The sample clamping device for electron probe testing according to claim 1, characterized in that, The second platform (11) is composed of a circular plate (12) and a hollow cylinder (14). The inner wall of the hollow cylinder (14) is provided with a first internal thread, and the bottom of the circular plate (12) is provided with a groove (13). The inner wall of the hollow cylinder (12) is provided with a first internal thread that matches the first external thread around the circular plate (12), so that the circular plate (12) is installed in the hollow cylinder (12) by threaded connection.

8. The sample clamping device for electron probe testing according to claim 7, characterized in that, The inner diameter of the hollow cylinder (14) is 14mm, the outer diameter is 17mm, and the height is 25mm; the diameter of the disc (12) is 15mm and the thickness is 5mm; the length of the groove (13) is 8mm, the width is 2mm, and the height is 2mm.

9. The sample clamping device for electron probe testing according to claim 1, characterized in that, The platform four (18) is composed of a hollow cylinder two (21) and a circular plate two (19). The circular plate two (19) has a second external thread around its perimeter and a groove four (20) below it. The inner wall of the hollow cylinder two (21) has a second internal thread that matches the second external thread around the circular plate two (19), so that the circular plate two (19) is installed in the hollow cylinder two (21) by threaded connection.

10. A sample clamping device for electron probe testing according to claim 9, characterized in that, Hollow cylinder 2 (21) has an inner diameter of 38mm, an outer diameter of 41mm, and a height of 25mm; disc 2 (19) has a diameter of 39mm and a thickness of 5mm; groove 4 (20) has a length of 8mm, a width of 2mm, and a height of 2mm.