Heat dissipation mechanism applied to optical head bottom plate and exposure machine thereof

Abstract

The utility model provides a heat dissipation mechanism applied to an optical head bottom plate and an exposure machine thereof. The heat dissipation mechanism comprises a water cooling machine, the connector assembly is exposed on the surface of the barehead bottom plate and is communicated with the water cooling machine; the water channel is distributed in the optical head bottom plate, an optical head set is installed on the surface of the optical head bottom plate, and the water channel penetrates through the optical head bottom plate and can cover the optical head set so as to take away heat gathered by the optical head set. According to the utility model, the water-cooled heat dissipation mechanism is arranged to uniformly dissipate heat of the optical head group arranged on the optical head bottom plate, so that the risk of deformation of the optical head bottom plate due to heating is greatly reduced, and the accuracy of key parameters of the exposure machine is ensured.

Description

TECHNICAL FIELD

[0001] The utility model relates to LDI equipment technical field, concretely relates to a kind of heat dissipation mechanism and exposure machine for optical head bottom plate. BACKGROUND

[0002] When the lens of optical path is irradiated by high-power laser, the optical machine structure in LDI equipment will gather a large amount of heat. Since several optical machine structures are installed on the optical head bottom plate, these heat will cause the optical head bottom plate to deform, thereby affecting the positional relationship of the DMD, resulting in the phenomenon of misalignment.

[0003] At present, the optical head group heat dissipation only adopts air cooling, that is, only relies on the temperature control of the air conditioning of the whole machine. Although this method is simple and easy to implement and has low cost, its disadvantages are also very obvious: first, the thermal conductivity of air as a heat transfer medium is much lower than that of liquid; second, limited by factors such as fan speed, the heat carried away by air is limited.

[0004] It can be seen that the existing optical head group air cooling has the defect of low heat dissipation efficiency, and cannot completely solve the problem of optical head bottom plate heating. UTILITY MODEL CONTENTS

[0005] The first aspect of the utility model, in order to solve the above technical problems, provides a kind of heat dissipation mechanism for optical head bottom plate, including:

[0006] Water cooling machine;

[0007] Joint assembly exposed to the surface of optical head bottom plate, the joint assembly is communicated with the water cooling machine;And

[0008] Water channel distributed in the inside of optical head bottom plate, the surface of optical head bottom plate is installed with optical head group, the water channel penetrates the optical head bottom plate and can cover the optical head group, to take away the heat gathered by the optical head group.

[0009] Further, the optical head bottom plate is also provided with probe sensor for detecting temperature change, the probe sensor is connected with the water cooling machine, to feed back the real-time temperature of the optical head bottom plate to the water cooling machine.

[0010] Further, the water channel is uniformly distributed around the optical head group.

[0011] Further, the joint assembly includes water inlet joint and water outlet joint arranged at both ends of the optical head bottom plate.

[0012] Further, the joint assembly further includes plug, the plug is arranged at the end of the optical head bottom plate to control the direction of coolant and / or adjust the flow of coolant.

[0013] Further, the optical head groups are arranged in at least two rows along the length direction of the optical head bottom plate, and each row of the optical head groups is correspondingly provided with an independent water inlet joint and a water outlet joint.

[0014] In the second aspect, the utility model provides an exposure machine, including light machine subassembly, transmission subassembly and vacuum subassembly, light machine subassembly includes the optical head bottom plate of installing a plurality of optical head groups, optical head bottom plate is provided with the heat abstractor for optical head bottom plate.

[0015] Compared with the prior art, the utility model has the beneficial effects that:

[0016] The utility model discloses a water-cooled heat abstractor is arranged on the optical head bottom plate, which uniformly cools the optical head groups on the optical head bottom plate, greatly reduces the risk of deformation of the optical head bottom plate due to heat, and ensures the accuracy of the key parameters of the exposure machine. BRIEF DESCRIPTION OF DRAWINGS

[0017] Figure 1 The whole structure schematic diagram of the optical head mounting plate provided with the optical head group is disclosed in the embodiment of the utility model;

[0018] Figure 2 The structure schematic diagram of the optical head mounting plate is disclosed, and the distribution schematic diagram of the joint assembly is shown.

[0019] In the drawing:

[0020] 00, optical head bottom plate; 01, optical head group;

[0021] 10, water channel; 11, water inlet joint; 12, water outlet joint; 13, plug. DETAILED DESCRIPTION

[0022] In order to make the technical scheme and technical effects of the utility model clearer, the technical scheme in the embodiment of the utility model will be described clearly and completely in combination with the drawings in the embodiment, and obviously, the described embodiment is a part of the embodiment of the utility model, not all the embodiments.

[0023] The utility model aims at providing a heat abstractor applied to an optical head bottom plate, and solves the problem of low air cooling heat dissipation efficiency of a traditional optical head bottom plate.

[0024] Firstly, the optical head bottom plate 00 in the utility model is described.

[0025] Please refer to Figure 1 The optical head group 01 is installed on the surface of the optical head bottom plate 00, and a large amount of heat will be generated under high power of the optical head group 01. The optical head bottom plate 00 is heated and then deformed, thereby affecting the positional relationship of the DMD and causing the phenomenon of deviation.

[0026] Then, the heat dissipation mechanism is described.

[0027] Please refer to Figure 2 The heat dissipation mechanism is water-cooled heat dissipation, mainly comprising an external water cooler, water channels 10 distributed in the light head bottom plate 00, and a joint assembly exposed on the surface of the light head bottom plate 00, the joint assembly being in communication with the water cooler.

[0028] The water channels 10 penetrate the light head bottom plate 00 and can cover the light head group 01, so that the heat gathered by the light head group 01 is taken away by the flowing cooling liquid, thereby inhibiting the deformation problem of the light head bottom plate 00 caused by the gathered heat.

[0029] The water channels 10 are uniformly distributed around the light head group 01.

[0030] The light head group 01 shown in the embodiment is provided with at least two rows along the length direction of the light head bottom plate 00, and each row of the light head group 01 is provided with the water channels 10 at equal intervals, so as to achieve uniform heat dissipation of the light head bottom plate 00.

[0031] The joint assembly comprises a water inlet joint 11 and a water outlet joint 12 arranged at both ends of the light head bottom plate 00.

[0032] Preferably, each row of the light head group 01 is provided with independent water inlet joint 11 and water outlet joint 12.

[0033] The joint assembly further comprises a plug 13 arranged at the end of the light head bottom plate 00 to control the direction of the cooling liquid and / or adjust the flow of the cooling liquid.

[0034] In a further scheme of the embodiment, the light head bottom plate 00 is further provided with a probe sensor for detecting temperature change, the probe sensor being connected with the external water cooler, for feeding back the real-time temperature of the light head bottom plate 00 to the water cooler, and then adjusting the refrigeration temperature of the external water cooler, so as to realize the effect of closed-loop constant temperature of the light head bottom plate 00.

[0035] The embodiment improves the traditional air-cooled heat dissipation of the light head group 01 to water-cooled heat dissipation, so that each independent light head group 01 is uniformly cooled, thereby reducing the deformation of the light head bottom plate 00 caused by heating to the maximum extent, and improving the accuracy of the key parameters of the exposure machine.

[0036] In addition, the utility model discloses an exposure machine, and the exposure machine comprises a light machine assembly, a transmission assembly and a vacuum assembly, wherein the light machine assembly comprises a light head bottom plate 00 provided with a plurality of light head groups 01, and the light head bottom plate 00 is provided with the heat dissipation mechanism applied to the light head bottom plate.

[0037] Although the embodiments of the present application have been shown and described, it is to be understood that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the present application, the scope of which is defined by the appended claims and their equivalents.

Claims

1. A heat dissipating mechanism applied to an optical head base plate, characterized by comprising: The application relates to a light engine assembly. The light engine assembly comprises: a water cooling machine; a joint assembly exposed on the surface of a light head base plate (00), which is communicated with the water cooling machine; and 2. The heat dissipating mechanism applied to the base plate of the optical pickup as claimed in claim 1, wherein, water channels (10) distributed inside the light head base plate (00), the surface of the light head base plate (00) is mounted with a light head group (01), the water channels (10) penetrate through the light head base plate (00) and can cover the light head group (01) to take away the heat gathered by the light head group (01).

3. The heat dissipating mechanism applied to the base plate of the optical pickup as claimed in claim 1, wherein, The light head base plate (00) is further provided with a probe sensor for detecting temperature change, the probe sensor is connected with the water cooling machine to feed back the real-time temperature of the light head base plate (00) to the water cooling machine.

4. The heat dissipating mechanism applied to the base plate of the optical pickup as claimed in claim 1, wherein, The water channels (10) are uniformly distributed around the light head group (01).

5. The heat dissipating mechanism applied to the base plate of the optical pickup as claimed in claim 4, wherein, The joint assembly comprises water inlet joints (11) and water outlet joints (12) arranged at both ends of the light head base plate (00).

6. The heat dissipating mechanism applied to the base plate of the optical pickup as claimed in claim 4, wherein, The joint assembly further comprises plugs (13) arranged at the ends of the light head base plate (00) to control the direction of the cooling liquid and / or adjust the flow of the cooling liquid.

7. An exposure machine comprising a light engine assembly, a drive assembly, and a vacuum assembly, characterized in that, The light head group (01) is arranged in at least two rows along the length direction of the light head base plate (00), and each row of the light head group (01) is correspondingly provided with independent water inlet joints (11) and water outlet joints (12). The light engine assembly comprises a light head base plate (00) mounted with a plurality of light head groups (01), and the light head base plate (00) is provided with the heat dissipation mechanism applied to the light head base plate as claimed in any one of claims 1-6.

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