Carbon dioxide telecentric field lens module with CCD (Charge Coupled Device) monitoring function

Abstract

The utility model discloses a carbon dioxide telecentric field lens module with a CCD (Charge Coupled Device) monitoring function. The carbon dioxide telecentric field lens module comprises a processing light path mechanism and monitoring imaging mechanisms arranged on two sides of the processing light path mechanism, the processing light path mechanism comprises a carbon dioxide telecentric field lens and a visual support arranged at the bottom of the carbon dioxide telecentric field lens, and the visual support is arranged in a hollow square frame shape and used for forming a light path; the monitoring imaging mechanism comprises a spectroscope and a CCD camera lens arranged on one side of the spectroscope. The spectroscope is arranged right below the carbon dioxide telecentric field lens, the surface of the spectroscope is respectively provided with light splitting films of visible light bands of 10.6 microns and 633 nm, and the scanning galvanometer is arranged right above the carbon dioxide telecentric field lens; the laser can accurately reach a working surface at a vertical angle, so that a processed hole site is accurate, and the quality problems of hole site inclination, ellipse and the like caused by aberration of a traditional single carbon dioxide lens are avoided.

Description

Technical Field

[0001] This utility model relates to a carbon dioxide telecentric lens and a beam splitting imaging module, and more particularly to a carbon dioxide telecentric field lens module with CCD monitoring. Background Technology

[0002] With the rise of the PCB manufacturing industry, users have higher requirements for the efficiency and precision of PCB drilling. Traditional PCB manufacturing methods use cutting tools for drilling. This method has many drawbacks. First, precise hole positioning relies on the movement of the machine tool's lead screw and tool setting, resulting in low efficiency. Second, tool wear greatly increases the likelihood of chipping and scrapping.

[0003] With the rise of the laser industry, laser drilling for PCBs is becoming increasingly common. CO2 laser drilling not only ensures precise hole positioning and reduces mechanical wear, but also offers high processing speed and flexibility through galvanometer scanning. It is indispensable for circuit board manufacturing. Due to the high cost of zinc selenide, most CO2 field lenses on the market are currently single-element field lenses. Single-element CO2 lenses have significant aberrations; light only reaches quality requirements in a small central area, while distortion occurs at the edges, resulting in tilted or elliptical holes.

[0004] The prior art utility model patent application number 202023323699.5 describes a parallel combined light source based on a telecentric lens, characterized in that it includes a coaxial device, a telecentric lens disposed at the rear end of the coaxial device, wherein a first lens and a second lens are arranged sequentially from front to back inside the telecentric lens; and a light source assembly disposed inside the telecentric lens; wherein a beam splitter and an intensifying lens are disposed inside the coaxial light source device.

[0005] Therefore, it is necessary to improve an existing telecentric field mirror module with CCD monitoring of carbon dioxide to solve the above problems. Summary of the Invention

[0006] This invention overcomes the shortcomings of the prior art and provides a telecentric field mirror module with CCD monitoring of carbon dioxide, aiming to solve the problems in the prior art.

[0007] To achieve the above objectives, the technical solution adopted by this utility model is as follows: a CCD monitoring carbon dioxide telecentric field mirror module, comprising: a processing optical path mechanism, and a monitoring imaging mechanism disposed on both sides of the processing optical path mechanism;

[0008] The optical path processing mechanism includes: a carbon dioxide telecentric field lens, and a vision support set at the bottom of the carbon dioxide telecentric field lens. The vision support is a hollow square frame used for the formation of the optical path.

[0009] The monitoring imaging mechanism includes: a beam splitter and a CCD camera lens set on one side of the beam splitter; the beam splitter is set directly below the carbon dioxide telecentric field mirror, and the surface of the beam splitter is respectively provided with beam splitting films for the visible light bands of 10.6um and 633nm, and the scanning galvanometer is set directly above the carbon dioxide telecentric field mirror.

[0010] In a preferred embodiment of this utility model, all six sides of the visual support are hollowed out, and a light source is provided at the bottom of the support to provide light.

[0011] In a preferred embodiment of the present invention, the light source includes a ring frame and a ring light source disposed at the bottom of the ring frame, wherein the side of the ring frame opposite to the ring light source is fixedly connected to the visual support.

[0012] In a preferred embodiment of this utility model, the telecentric field lens barrel of the carbon dioxide lens includes a first lens, a second lens, and a third lens arranged sequentially along the optical axis from the object plane to the image plane inside the barrel.

[0013] In a preferred embodiment of this utility model, the first lens is a negative power lens, the radius of curvature of the first surface of the first lens is R1, -115mm < R1 < -100mm, and the radius of curvature of the second surface of the first lens is R2, 440mm < R2 < 470mm.

[0014] In a preferred embodiment of this utility model, the second lens is a positive power lens, the radius of curvature of the first surface of the second lens is R3, 550mm < R3 < 680mm, and the radius of curvature of the second surface of the second lens is R4, 120mm < R4 < 140mm.

[0015] In a preferred embodiment of this utility model, the third lens is a positive power lens, the radius of curvature of the first surface of the third lens is R5, 754mm < R5 < 905mm, and the radius of curvature of the second surface of the third lens is R6, 140mm < R6 < 175mm.

[0016] In a preferred embodiment of this utility model, the first lens and the second lens are arranged adjacent to each other, and the distance between the second lens and the third lens is 70mm.

[0017] In a preferred embodiment of this invention, the beam splitter is set at 135° to allow the carbon dioxide laser to pass through and reach the working surface.

[0018] In a preferred embodiment of this invention, the CCD camera lens operates in the 400-700nm visible light band and is used to receive reflected images from the working surface.

[0019] This utility model solves the defects existing in the background technology, and has the following beneficial effects:

[0020] (1) This utility model provides a carbon dioxide telecentric field lens module with CCD monitoring. By adopting a composite structure design of multi-element zinc selenide material and the curvature radius and optical power of each lens, the carbon dioxide telecentric field lens effectively corrects aberrations and forms a stable telecentric optical path. This design ensures that the laser can reach the working surface at a vertical angle, thereby making the processed hole position accurate and avoiding quality problems such as hole tilting and ellipticity caused by aberrations in traditional single carbon dioxide lenses.

[0021] (2) This utility model provides a telecentric field mirror module for carbon dioxide laser with CCD monitoring. Through the design of a beam splitter, and by coating the surface of the beam splitter with a beam-splitting film suitable for the 10.6µm and 633nm visible light bands, and placing it at a 135-degree angle, the CO2 laser can smoothly pass through to the working surface. Simultaneously, it can transmit the reflected image from the working surface to the CCD camera lens. The CCD camera lens operates in the 400-700nm visible light band and can clearly receive the reflected image. Operators can observe the processing status in real time through the monitoring system. This allows operators to promptly identify problems during processing, such as hole misalignment or uneven hole walls, and adjust processing parameters accordingly, further ensuring the stability and reliability of processing quality, reducing waste, and improving production efficiency and the company's economic benefits. Attached Figure Description

[0022] The present invention will be further described below with reference to the accompanying drawings and embodiments;

[0023] Figure 1 This is a perspective structural diagram of a preferred embodiment of the present invention;

[0024] Figure 2 This is a view of the bottom annular light source of a preferred embodiment of the present invention;

[0025] Figure 3 This is a schematic diagram of the cross-sectional structure of a carbon dioxide telecentric field mirror according to a preferred embodiment of this utility model.

[0026] In the diagram: 1. Processing optical path mechanism; 2. Monitoring imaging mechanism; 3. Scanning galvanometer; 4. Carbon dioxide telecentric field mirror; 5. Vision support; 6. Ring light source; 7. CCD camera lens; 8. Beam splitter; 9. Lens tube; 10. First lens; 11. Second lens; 12. Third lens; 13. Ring frame. Detailed Implementation

[0027] The present invention will now be described in further detail with reference to the accompanying drawings and embodiments. These drawings are simplified schematic diagrams, which are only used to illustrate the basic structure of the present invention in a schematic manner, and therefore only show the components related to the present invention.

[0028] As shown in the figure, a telecentric field mirror module for monitoring carbon dioxide with CCD includes: a processing optical path mechanism 1, and a monitoring imaging mechanism 2 disposed on both sides of the processing optical path mechanism 1.

[0029] The optical path processing mechanism 1 includes: a carbon dioxide telecentric field lens 4, and a vision support 5 disposed at the bottom of the carbon dioxide telecentric field lens 4. The vision support 5 is a hollow square frame used for the formation of the optical path.

[0030] In a preferred embodiment of this utility model, the visual support 5 has six hollowed-out sides, and a light source is provided at the bottom of the support to provide light.

[0031] In a preferred embodiment of the present invention, the light source includes a ring frame 13 and a ring light source 6 disposed at the bottom of the ring frame 13. The side of the ring frame 13 opposite to the ring light source 6 is fixedly connected to the visual support 5.

[0032] It should be noted that the processing optical path mechanism 1 uses a carbon dioxide telecentric field lens 4 as the core optical component. Its unique lens barrel 9 structure contains three lenses arranged sequentially along the optical axis to form a composite optical system. The vision support 5, as the supporting frame, adopts a six-sided hollow design. This open structure not only reduces the overall weight but, more importantly, ensures the purity of the optical path transmission by eliminating sidewall reflection interference. The bottom of the vision support 5 is fixedly connected to a ring frame 13, and an innovative design integrating a ring light source 6 at the bottom of the ring frame 13 is implemented. The rigid connection between the ring frame 13 and the vision support 5 achieves stable fixation of the light source. The uniformly diffused light generated by the ring light source 6 provides all-around illumination of the working surface, effectively solving the shadow occlusion problem caused by traditional side light sources.

[0033] In this invention, the telecentric field lens 4 has a lens barrel 9, inside which a first lens 10, a second lens 11, and a third lens 12 are arranged sequentially from the object plane to the image plane along the optical axis. The first lens 10 is a negative power lens, with the radius of curvature of its first surface being R1, -115mm < R1 < -100mm, and the radius of curvature of its second surface being R2, 440mm < R2 < 470mm. The second lens 11 is a positive power lens, with the radius of curvature of its first surface being R... 3. 550mm < R3 < 680mm, the radius of curvature of the second surface of the second lens 11 is R4, 120mm < R4 < 140mm; the third lens 12 is a positive power lens, the radius of curvature of the first surface of the third lens 12 is R5, 754mm < R5 < 905mm, the radius of curvature of the second surface of the third lens 12 is R6, 140mm < R6 < 175mm; the first lens 10 and the second lens 11 are arranged adjacent to each other, and the distance between the second lens 11 and the third lens 12 is 70mm.

[0034] It should be noted that in terms of optical system construction, the three lenses adopt a negative-positive-positive combination architecture. The negative optical power design of the first lens 10 (R1: -115 to -100 mm, R2: 440 to 470 mm) effectively diverges the incident laser beam. The positive optical power combination of the second lens 11 (R3: 550 to 680 mm, R4: 120 to 140 mm) and the third lens 12 (R5: 754 to 905 mm, R6: 140 to 175 mm) is responsible for secondary focusing and aberration correction of the beam. The precise spacing design of the second lens 11 to the third lens 1270 mm effectively controls the axial dimensions of the optical system while ensuring beam transmission efficiency. This gradual change in the radius of curvature, combined with the specific lens spacing, enables efficient transmission and precise focusing of 10.6 μm wavelength laser light.

[0035] The monitoring imaging mechanism 2 includes: a beam splitter 8 and a CCD camera lens 7 disposed on one side of the beam splitter 8; the beam splitter 8 is disposed directly below the carbon dioxide telecentric field mirror 4, and the surface of the beam splitter 8 is respectively provided with beam splitting films for the visible light bands of 10.6μm and 633nm; the beam splitter 8 is set at 135° to allow the carbon dioxide laser to pass through and reach the working surface; the CCD camera lens 7 operates in the visible light band of 400-700nm and is used to receive the reflected image from the working surface.

[0036] It should be noted that the monitoring imaging mechanism 2 integrates both processing and monitoring functions through the beam splitter 8. The beam splitter 8 is set at a special 135° tilt angle, allowing efficient transmission of 10.6μm laser light while reflecting 633nm visible light. The dual-band coating technology of the beam splitter is a key innovation; by integrating films with different wavelength response characteristics onto a single optical element, physical separation of the processing laser (10.6μm) and the monitoring optical path (633nm) is achieved. The CCD camera lens 7 is equipped with a wide spectral response capability of 400-700nm, capable of completely capturing visible light information reflected from the working surface. Its optical parameters have been specially optimized to effectively suppress noise interference in the carbon dioxide laser band while maintaining high resolution.

[0037] The three-element structure of the telecentric field mirror ensures the collimation and focusing accuracy of the processing beam. The combination of the hollow structure of the vision support 5 and the ring light source 6 achieves unobstructed illumination. The dual-band film technology of the beam splitter 8 solves the problem of optical path coupling between processing and monitoring. Through precise optomechanical coordination, each subsystem ensures the efficiency of CO2 laser processing while achieving real-time visual monitoring of the processing process, providing a reliable technical solution for industrial precision machining.

[0038] The scanning galvanometer 3 is positioned directly above the carbon dioxide telecentric field mirror 4. The scanning galvanometer 3 is used to control the scanning path of the laser and is mounted on the top of the system.

[0039] In use, this module includes a scanning galvanometer 3, a carbon dioxide telecentric field mirror 4, a vision support 5, a beam splitter 8, a ring light source 6, and a CCD camera lens 7. The scanning galvanometer 3 controls the laser scanning path; the carbon dioxide telecentric field mirror 4 employs a multi-piece zinc selenide composite structure to form a telecentric optical path; the vision support 5 secures the CCD camera lens 7, beam splitter 8, ring light source 6, and other components; the beam splitter 8 is made of zinc selenide, with a coating suitable for splitting light in the 10.6µm and 633nm visible light bands, and is positioned at a 135-degree angle; the ring light source 6 provides illumination for the CCD camera; the CCD camera lens 7 operates in the 400-700nm visible light band and receives reflected images from the working surface for real-time monitoring of the processing.

[0040] In the detailed design of the carbon dioxide telecentric field lens 4, the field lens includes a first lens 10, a second lens 11, and a third lens 12, all made of zinc selenide. The first lens 10 is a negative power lens with a first surface radius of curvature (R1) of -105mm and a second surface radius of curvature (R2) of 450mm. During installation, the first lens 10 and the second lens 11 are placed together and fixed with threaded clamps to form a lens group, and the distance between this lens group and the third lens 12 is extended to about 70mm, thereby forming a telecentric optical path.

[0041] The beam splitter 8 is made of zinc selenide, and its coating is suitable for beam splitting in the 10.6µm and 633nm visible light bands. It is positioned at a 135-degree angle so that the CO2 laser can pass through the lens smoothly to reach the working surface. The CCD camera lens 7 operates in the 400-700nm visible light band.

[0042] During module assembly, the scanning galvanometer 3 is first installed at the front of the system, followed by the carbon dioxide telecentric field mirror 4, ensuring optical axis alignment. Next, a beam splitter 8, positioned at a 135-degree angle, is installed after the carbon dioxide telecentric field mirror 4. The ring light source 6 and CCD camera lens 7 are then fixed using the vision support 5 and the bottom ring frame 13. During the debugging phase, the parameters of the scanning galvanometer 3 are adjusted to ensure the laser can accurately scan along the preset path. Simultaneously, the position and angle of the carbon dioxide telecentric field mirror 4 are adjusted to ensure the laser reaches the working surface perpendicularly, eliminating taper in the processed holes. Furthermore, the angle of the beam splitter 8 needs adjustment to ensure the 10.6µm CO2 laser can pass through smoothly, while the 633nm visible light can be received by the CCD camera lens 7. Finally, the focal length and aperture of the CCD camera lens 7 are adjusted to ensure clear monitoring of the processing process.

[0043] In practical applications, taking PCB drilling as an example, this module enables high-precision processing, real-time monitoring, and improved efficiency. The telecentric optical path design of the CO2 telecentric field lens 4 ensures the laser reaches the work surface perpendicularly, resulting in precise hole positioning and reduced mechanical wear. The CCD camera lens 7 receives reflected images from the work surface, allowing for real-time monitoring of the processing and timely detection of problems such as hole misalignment and uneven hole walls. The galvanometer scanning method provides high processing speed and flexibility, meeting the efficiency requirements of the PCB manufacturing industry.

[0044] Based on the preferred embodiments of this utility model described above, those skilled in the art can make various changes and modifications without departing from the technical concept of this utility model. The technical scope of this utility model is not limited to the contents of the specification, but must be determined according to the scope of the claims.

Claims

1. A module with a CCD-based telecentric field microscope (4) for monitoring carbon dioxide, comprising: The processing optical path mechanism (1), the scanning galvanometer (3) disposed on the top of the processing optical path mechanism (1), and the monitoring imaging mechanism (2) disposed on the bottom of the processing optical path mechanism (1) are characterized in that; The processing optical path mechanism (1) includes: a carbon dioxide telecentric field lens (4) and a vision support (5) disposed at the bottom of the carbon dioxide telecentric field lens (4). The vision support (5) is a hollow square frame used for the formation of the optical path. The monitoring imaging mechanism (2) includes: a beam splitter (8) and a CCD camera lens (7) disposed on one side of the beam splitter (8); the beam splitter (8) is disposed directly below the carbon dioxide telecentric field mirror (4), and the surface of the beam splitter (8) is respectively provided with beam splitting films of 10.6um and 633nm visible light bands; The scanning galvanometer (3) is positioned directly above the carbon dioxide telecentric field mirror (4).

2. The module with CCD monitoring of carbon dioxide telecentric field mirror (4) according to claim 1, characterized in that: The visual support (5) has six hollowed-out sides, and a light source is provided at the bottom of the support to provide light.

3. The module with CCD monitoring of carbon dioxide telecentric field mirror (4) according to claim 2, characterized in that: The light source includes a ring frame (13) and a ring light source (6) disposed at the bottom of the ring frame (13). The side of the ring frame (13) opposite to the ring light source (6) is fixedly connected to the visual support (5).

4. The module with CCD monitoring of carbon dioxide telecentric field mirror (4) according to claim 1, characterized in that: The carbon dioxide telecentric field mirror (4) includes a lens tube (9), and a first lens (10), a second lens (11), and a third lens (12) arranged sequentially along the optical axis from the object plane to the image plane inside the lens tube (9).

5. A module with a CCD-monitored telecentric field mirror (4) for carbon dioxide as described in claim 4, characterized in that: The first lens (10) is a negative power lens. The radius of curvature of the first surface of the first lens (10) is R1, -115mm < R1 < -100mm, and the radius of curvature of the second surface of the first lens (10) is R2, 440mm < R2 < 470mm.

6. A module with a CCD-monitored telecentric field mirror (4) for carbon dioxide as described in claim 4, characterized in that: The second lens (11) is a positive power lens. The radius of curvature of the first surface of the second lens (11) is R3, 550mm < R3 < 680mm, and the radius of curvature of the second surface of the second lens (11) is R4, 120mm < R4 < 140mm.

7. A module with a CCD-monitored telecentric field mirror (4) for carbon dioxide as described in claim 4, characterized in that: The third lens (12) is a positive power lens. The radius of curvature of the first surface of the third lens (12) is R5, 754mm < R5 < 905mm, and the radius of curvature of the second surface of the third lens (12) is R6, 140mm < R6 < 175mm.

8. A module with a CCD-monitored telecentric field mirror (4) for carbon dioxide as described in claim 4, characterized in that: The first lens (10) and the second lens (11) are arranged adjacent to each other, and the distance between the second lens (11) and the third lens (12) is 70mm.

9. A module with a CCD-monitored telecentric field mirror (4) for carbon dioxide as described in claim 1, characterized in that: The beam splitter (8) is set at 135° to allow carbon dioxide laser light to pass through and reach the working surface.

10. A module with a CCD-monitored telecentric field mirror (4) for carbon dioxide as described in claim 1, characterized in that: The CCD camera lens (7) operates in the 400-700nm visible light band and is used to receive reflected images from the working surface.

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