Clamping device and mobile robot

Abstract

The utility model provides a clamping device and a mobile robot, the clamping device is used for clamping an object, the object is provided with opposite side wall surfaces, each side wall surface is provided with at least one convex structure, the clamping device comprises at least two clamping jaw units, each clamping jaw unit is provided with a clamping surface, and the clamping surface is provided with at least one concave structure; the two clamping jaw units are arranged on the two sides of an object respectively, the clamping faces face the side wall face on the same side, and the concave structures can abut against or be separated from the convex structures in a matched mode. According to the scheme, the clamping device is simple in structure, the concave structures of the clamping jaw units are tightly matched with the convex structures of the articles, the friction force is increased, the relative displacement of the concave structures and the convex structures is reduced, the articles are prevented from sliding or falling off in the transportation process, the damage risk of the articles is reduced, and the clamping stability is improved.

Description

Technical Field

[0001] This application relates to the field of semiconductor product transportation technology, and in particular to a clamping device and a mobile robot. Background Technology

[0002] Wafers are the fundamental material in semiconductor manufacturing. They are typically made from high-purity silicon through processes such as high-temperature crystal pulling and dicing, and are used to manufacture microelectronic devices such as integrated circuits and chips. Wafer cases are containers specifically designed for storing and transporting wafers. They are usually made of high-purity quartz glass or special plastics and have excellent sealing, antistatic properties, and cleanliness to prevent wafers from being contaminated, scratched, or damaged during storage and transportation, thereby ensuring wafer quality and smooth subsequent processing.

[0003] In the transportation process, grippers are often used to hold wafer cassettes. Driven by a robotic arm, the grippers transport the wafer cassettes to a designated location. However, the grippers currently in use lack effective limiting and guiding structures when holding wafer cassettes. This makes the grippers prone to positional deviations during opening and closing, leading to unstable gripping. This can not only cause the wafer cassettes to fall during transportation, causing production interruptions, but also cause collisions and damage to the wafer cassettes and the wafers inside, affecting product quality.

[0004] Therefore, how to provide a clamping device with strong clamping stability is a technical problem that urgently needs to be solved by those skilled in the art. Utility Model Content

[0005] The purpose of this application is to provide a gripping device and a mobile robot. In the gripping device, the recessed structure of the gripper unit closely cooperates with the protruding structure of the item to prevent the item from sliding or falling off during transportation, thereby improving the stability of gripping.

[0006] The solution proposed in this application to solve the problem is:

[0007] In a first aspect, a clamping device is provided for clamping an article having opposing sidewalls, each sidewall having at least one protruding structure, characterized in that the clamping device comprises:

[0008] At least two gripper units, each gripper unit having a gripping surface, the gripping surface having at least one recessed structure;

[0009] The two gripper units are respectively disposed on both sides of the article, with the gripping surface facing the side wall surface on the same side, and the recessed structure can cooperate with or separate from the protruding structure.

[0010] Preferably, the protrusion structure includes a first protrusion structure and a second protrusion structure;

[0011] The recessed structure includes a first recessed structure and a second recessed structure. When the clamping device clamps the article, the first recessed structure and the first protruding structure cooperate to abut against each other, and the second recessed structure and the second protruding structure cooperate to abut against each other.

[0012] Wherein, the projection extension line of the first recessed structure on the clamping surface intersects the projection extension line of the second recessed structure and has a preset included angle.

[0013] Preferably, the preset included angle is 90 degrees.

[0014] Preferably, the gripper unit further includes a clamping plate, the clamping surface being the side of the clamping plate facing the article, the clamping plate including a vertical first part and a second part, the first part having a first recessed structure, and the second part having a second recessed structure.

[0015] Preferably, the clamping device further includes a first detection element embedded in the first recessed structure or the second recessed structure for detecting the position of the item.

[0016] Preferably, the clamping device further includes a driving member and at least two connecting members, the driving member having at least two sliding ends, each of the sliding ends being connected to the clamping plate through one of the connecting members;

[0017] The driving component drives the two sliding ends to move the two clamping plates close to or far apart.

[0018] Preferably, the clamping device further includes a housing, the drive component is disposed inside the housing, and mounting holes are provided on opposite sides of the housing, through which the connector is connected to the clamping plate.

[0019] Preferably, the clamping device further includes a telescopic tube and a dust extraction component. The telescopic tube is connected between the mounting hole and the clamping plate to cover the part of the connector located outside the housing. The dust extraction component is connected to the telescopic tube or the housing to extract dust from the space formed by the telescopic tube and the interior of the housing.

[0020] Preferably, the clamping device further includes a second detection element disposed on the housing for detecting the distance between the clamping device and the obstacle.

[0021] In a second aspect, a mobile robot is provided, the mobile robot comprising: the gripping device provided in the first aspect;

[0022] The robotic arm's moving axis is connected to the clamping device and is used to drive the clamping device to move.

[0023] According to the specific embodiments provided in this application, the following technical effects are disclosed:

[0024] This application provides a gripping device and a mobile robot. The gripping device is used to grip an object, which has opposing sidewalls. Each sidewall has at least one protruding structure. The gripping device includes at least two gripper units, each gripper unit having a gripping surface with at least one recessed structure. The two gripper units are located on opposite sides of the object, with their gripping surfaces facing the sidewalls on the same side. The recessed structures can engage with or separate from the protruding structures. The gripping device in this solution has a simple structure. By utilizing the tight engagement between the recessed structures of the gripper units and the protruding structures of the object, friction is increased, the relative displacement between the two is reduced, and the object is prevented from sliding or falling off during transportation, thus reducing the risk of damage and improving gripping stability. Attached Figure Description

[0025] To more clearly illustrate the technical solutions in the embodiments of this application or the prior art, the drawings used in the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0026] Figure 1 This is a schematic diagram of the clamping device provided in the embodiments of this application clamping an article;

[0027] Figure 2 This is a front view schematic diagram of the clamping device provided in the embodiments of this application;

[0028] Figure 3 This is a rear view schematic diagram of the clamping device provided in the embodiments of this application;

[0029] Figure 4 This is a side view of the gripper unit provided in an embodiment of this application;

[0030] Figure 5 This is a schematic diagram showing the connection between the driving component and the gripper unit provided in the embodiments of this application.

[0031] Figure label:

[0032] 10. Item; 20. Gripper unit; 30. Drive unit; 40. Connector; 50. Housing; 60. Telescopic tube; 70. Second detection component; 80. Robotic arm moving axis; 100. Protruding structure; 200. Recessed structure; 210. Clamping plate; 211. First part; 212. Second part; 300. Sliding end; 500. Mounting hole; 1000. First protruding structure; 1100. Second protruding structure; 2000. First recessed structure; 2100. Second recessed structure. Detailed Implementation

[0033] To make the objectives, technical solutions, and advantages of this application clearer, the technical solutions in the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments. Based on the embodiments in this application, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this application.

[0034] As described in the background section, in the transportation process, grippers are often used to hold wafer cassettes. Driven by a robotic arm, the grippers transport the wafer cassettes to a designated location. Currently used grippers, lacking effective limiting and guiding structures, are prone to positional deviations during opening and closing, leading to unstable gripping. This can not only cause the wafer cassettes to fall during transportation, resulting in production interruptions, but also cause collisions and damage to the wafer cassettes and the wafers inside, affecting product quality.

[0035] Based on this, this application provides a clamping device and a mobile robot, which aims to solve the technical problem of unstable clamping in the prior art.

[0036] Example 1

[0037] Embodiment 1 of this application provides a clamping device, referencing Figure 1 The device is used to clamp an article 10, which has opposing sidewalls. Each sidewall has at least one protruding structure 100. The clamping device includes at least two gripper units 20, each gripper unit 20 having a gripping surface and at least one recessed structure 200. The two gripper units 20 are located on both sides of the article 10, with the gripping surface facing the sidewall on the same side. The recessed structure 200 can engage with or separate from the protruding structure 100.

[0038] The complementary cooperation between the recessed structure 200 of the gripper unit 20 and the protruding structure 100 of the article 10 increases the friction, reduces the relative displacement between the two, prevents the article 10 from sliding or falling off during transportation, reduces the risk of damage to the article 10, and improves the stability of the gripping.

[0039] In one specific embodiment, each sidewall of the article 10 is provided with a protruding structure 100, and there are two gripper units 20, each gripper unit 20 having a recessed structure 200 on its gripping surface. Before performing the gripping operation, the article 10 is located between the two gripper units 20, with the gripping surface facing the sidewall on the same side. During the gripping operation, the two gripper units 20 move close together, causing the recessed structure 200 on each side to engage and lock with the protruding structure 100. Thus, through the engagement of the recessed structure 200 and the protruding structure 100, the gripper unit 20 can firmly clamp the article 10, reducing the risk of damage to the article 10 due to unstable gripping during transportation. During the release operation, the two gripper units 20 move apart, causing the recessed structure 200 on each side to disengage from the protruding structure 100. This allows the gripper unit 20 to quickly release the article 10 so as to continue gripping subsequent articles 10 to be transported.

[0040] It should be noted that the extension directions of the recessed structure 200 and the raised structure 100 must be consistent so that the two can be fully matched and locked together.

[0041] Preferably, refer to Figures 1 to 4 The protruding structure 100 includes a first protruding structure 1000 and a second protruding structure 1100; the recessed structure 200 includes a first recessed structure 2000 and a second recessed structure 2100. When the clamping device clamps the item 10, the first recessed structure 2000 and the first protruding structure 1000 cooperate to abut against each other, and the second recessed structure 2100 and the second protruding structure 1100 cooperate to abut against each other. Among them, on the clamping surface, the extended projection line of the first recessed structure 2000 and the extended projection line of the second recessed structure 2100 intersect and have a preset angle, and on the side wall surface, the extended projection line of the first protruding structure 1000 and the extended projection line of the second protruding structure 1100 intersect and also have a preset angle.

[0042] The cooperation between the protruding structure 100 and the recessed structure 200 improves the stability of the clamping device. Furthermore, both the protruding structure 100 and the recessed structure 200 are composed of two substructures, and there is a preset angle between the two substructures. This allows each side wall of the item 10 to bear the force in two different directions when it is clamped, making the force more dispersed and avoiding the damage to the gripper unit 20 and the item 10 caused by the parallel arrangement of the two substructures due to excessive force concentration.

[0043] In a specific embodiment, such as Figure 4 As shown, the preset included angle is 90 degrees.

[0044] When the preset angle is 90 degrees, each side surface of item 10 experiences two mutually perpendicular forces when clamped, resulting in a more dispersed and even force distribution. For example... Figure 4 As shown, when clamping the item 10, the first recessed structure 2000 and the first protruding structure 1000 cooperate to abut against each other to lift the item 10, and the second recessed structure 2100 and the second protruding structure 1100 cooperate to abut against each other to avoid the item 10 from shaking back and forth and causing unstable clamping.

[0045] Preferably, refer to Figures 1 to 4 The gripper unit 20 also includes a clamping plate 210, which includes a vertical first part 211 and a second part 212. The first part 211 is provided with a first recessed structure 2000, and the second part 212 is provided with a second recessed structure 2100.

[0046] Among them, the side of the first part 211 and the second part 212 facing the article 10 is the clamping surface. The first recessed structure 2000 and the second recessed structure 2100 are stably set on the clamping surface, forming an "L" shaped structure together, which makes the overall structure of the clamping device simpler and more compact, reducing manufacturing costs and maintenance difficulties.

[0047] Preferably, the clamping device further includes a first detection element (not shown in the figure) embedded in the first recessed structure 2000 or the second recessed structure 2100 for detecting the position of the article 10.

[0048] The device utilizes the contact between the protruding structure 100 of the item 10 and the recessed structure 200 of the gripper unit 20 to trigger a detection signal, thereby achieving real-time detection of the item 10's position. For example, a first detection element is embedded in a first recessed structure 2000. When the first protruding structure 1000 abuts against the first recessed structure 2000, a detection signal is triggered, indicating that the item 10 is in place. Alternatively, the first detection element is embedded in a second recessed structure 2100. When the second protruding structure 1100 abuts against the second recessed structure 2100, a detection signal is triggered, indicating that the item 10 is in place. In this way, the first detection element detects whether the item 10 is correctly gripped in place, preventing the item 10 from falling off or being damaged due to insecure gripping or positional deviation.

[0049] In an optional embodiment, the first detection element is an inductive proximity sensor or a photoelectric sensor.

[0050] Preferably, refer to Figure 5 The clamping device also includes a drive member 30 and at least two connectors 40. The drive member 30 has at least two sliding ends 300, and each sliding end 300 is connected to the clamping plate 210 through one of the connectors 40. The drive member 30 drives the two sliding ends 300 to move close to or away from each other, so that the two clamping plates 210 move close to or away from each other.

[0051] In one specific embodiment, the driving member 30 is a cylinder, the sliding end 300 is the two output ends of the cylinder, and the connecting member 40 serves as a transmission member to transmit the power of the cylinder to the clamping plate 210. For example, the cylinder drives the two output ends to move close together, causing the two clamping plates 210 to move close together under the drive of the connecting member 40, so that the recessed structure 200 and the protruding structure 100 engage and abut against each other; or, the cylinder drives the two output ends to move away from each other, causing the two clamping plates 210 to move away from each other under the drive of the connecting member 40, so that the recessed structure 200 and the protruding structure 100 separate and disconnect.

[0052] Specifically, the driving component 30 is an electric cylinder with a force feedback mechanism, which can drive the gripper unit to grip the item 10 according to a preset force value, so as to avoid damage to the item 10 due to excessive force.

[0053] Preferably, refer to Figures 1 to 3 The clamping device also includes a housing 50, inside which a drive component 30 is provided, and mounting holes 500 are provided on opposite sides of the housing 50. A connector 40 passes through the mounting holes 500 and is connected to the clamping plate 210.

[0054] The housing 50 is used to protect the safety of the drive unit 30 and to install the other working parts involved in the clamping device. The mounting hole 500 allows the connector 40 to pass smoothly to perform relative insertion into or extension out of the housing 50.

[0055] Preferably, refer to Figures 1 to 3 The clamping device also includes a telescopic tube 60 and a dust extraction component (not shown in the figure). The telescopic tube 60 is connected between the mounting hole 500 and the clamping plate 210 to cover the part of the connector 40 located outside the housing 50. The dust extraction component is connected to the telescopic tube 60 or the housing 50 to extract dust from the space formed by the telescopic tube 60 and the interior of the housing 50.

[0056] The telescopic tube 60 protects the connector 40, preventing contaminants from the external environment from entering the housing 50 through the connector 40. The telescopic design also allows the clamping device to operate normally in different positions and angles, improving its flexibility. Since the clamping plate 210 has several wiring holes (not shown in the figure) for sensor wiring, and these holes are not sealed, dust may enter the communication space between the telescopic tube 60 and the housing 50. Therefore, a dust extraction device is added. This dust extraction device can be located at the bottom of the housing 50 to reduce the impact of dust on the internal structure of the clamping device and extend its service life.

[0057] Preferably, refer to Figure 3 The clamping device also includes a second detection element 70 disposed on the housing 50 for detecting the distance between the clamping device and the obstacle.

[0058] In one specific embodiment, the second detection element 70 is an ultrasonic sensor and is located at one end of the housing 50 near the gripper unit 20. By emitting and receiving ultrasonic signals, it measures the time difference between the sound wave and the obstacle after it is emitted and reflected back, thereby calculating the distance between the gripping device and the obstacle.

[0059] In one specific embodiment, the item 10 is a rectangular box with opposing side walls. Each side wall is provided with a first recessed structure 2000 and a second recessed structure 2100. The box contains a plurality of wafers arranged in sequence.

[0060] Example 2

[0061] Embodiment 2 of this application provides a mobile robot, including: the gripping device provided in Embodiment 1; and a robotic arm moving axis 80 connected to the gripping device for driving the gripping device to move in multiple degrees of freedom within the workspace.

[0062] The robotic arm's moving axis 80 can be connected to the housing 50. It includes multiple joint axes, each driven by a motor, to achieve precise movement of the gripping device in the horizontal, vertical, and rotational directions.

[0063] In a specific implementation, the robotic arm's moving axis 80 moves the gripping device to the object 10 within the workspace according to a preset path or control signal. During the movement, the second detection element 70 continuously monitors the surrounding environment. If an obstacle is detected to be too close, the robotic arm's moving axis 80 automatically adjusts its movement path or pauses its movement to ensure the safety of the robot and the gripping device. During gripping, the gripping device uses the recessed structure 200 of the gripper unit 20 to cooperate with the protruding structure 100 of the object 10 to achieve stable gripping of the object 10. Simultaneously, the first detection element detects whether the object 10 is correctly gripped in place, and the second detection element 70 monitors the distance between the gripping device and surrounding obstacles in real time to ensure the reliability of the gripping operation.

[0064] In the description of this specification, the references to terms such as "one embodiment," "some embodiments," "example," "specific example," or "some examples," etc., indicate that a specific feature, structure, material, or characteristic described in connection with that embodiment or example is included in at least one embodiment or example of this application. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples.

[0065] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one of that feature. In the description of this application, "multiple" means at least two, such as two, three, etc., unless otherwise explicitly specified.

[0066] Although embodiments of this application have been shown and described above, it is understood that the above embodiments are exemplary and should not be construed as limiting this application. Those skilled in the art can make changes, modifications, substitutions and variations to the above embodiments within the scope of this application.

Claims

1. A clamping device for clamping an article (10), said article (10) having opposite side wall surfaces, each of said side wall surfaces being provided with at least one protruding structure (100), characterized in that, The clamping device comprises: at least two clamping jaw units (20), two of which are arranged on the two sides of the article (10), each of which has a clamping surface facing the side wall surface on the same side, and at least one recess structure (200) is arranged on the clamping surface, which can be in abutment or separation with the protruding structure (100).

2. The clamping device of claim 1, wherein The protruding structure (100) comprises a first protruding structure (1000) and a second protruding structure (1100). The recess structure (200) comprises a first recess structure (2000) and a second recess structure (2100), and when the clamping device clamps the article (10), the first recess structure (2000) is in abutment with the first protruding structure (1000), and the second recess structure (2100) is in abutment with the second protruding structure (1100). The projection extension line of the first recess structure (2000) on the clamping surface intersects with the projection extension line of the second recess structure (2100) and has a preset included angle.

3. The clamping device of claim 2, wherein The preset included angle is 90 degrees.

4. The clamping device of claim 3, wherein The clamping jaw unit (20) further comprises a clamping plate member (210), the clamping surface is one side of the clamping plate member (210) facing the article (10), and the clamping plate member (210) comprises a vertical first part (211) and a second part (212), the first part (211) is provided with the first recess structure (2000), and the second part (212) is provided with the second recess structure (2100).

5. The clamping device of claim 4, wherein The clamping device further comprises a first detection member embedded in the first recess structure (2000) or the second recess structure (2100) for detecting the position of the article (10).

6. The clamping device according to claim 4 or 5, characterized in that The clamping device further comprises a driving member (30) and at least two connecting members (40), the driving member (30) has at least two sliding ends (300), and each sliding end (300) is connected to the clamping plate member (210) through one of the connecting members (40). The driving member (30) drives two sliding ends (300) to drive two clamping plate members (210) to move close to or away from each other.

7. The clamping device of claim 6, wherein The clamping device further comprises a housing (50), the housing (50) is internally provided with the driving member (30), and opposite sides of the housing (50) are provided with mounting holes (500), and the connecting members (40) are connected to the clamping plate members (210) through the mounting holes (500).

8. The clamping device of claim 7, wherein The clamping device further comprises a telescopic pipe member (60) and a dust extraction member, the telescopic pipe member (60) is connected between the mounting hole (500) and the clamping plate member (210) to cover a part of the connecting member (40) located outside the housing (50), and the dust extraction member is connected to the telescopic pipe member (60) or the housing (50) to extract dust in the space formed by the telescopic pipe member (60) and the housing (50).

9. The clamping device of claim 7, wherein The clamping device further comprises a second detecting member (70) arranged on the casing (50) and used for detecting the distance between the clamping device and an obstacle.

10. A mobile robot, characterized by The mobile robot comprises: The clamping device according to any one of claims 1 to 9; A mechanical arm moving shaft (80) is connected to the clamping device and used for driving the clamping device to move.

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