Vacuum cavity cooling device with protective structure

Abstract

The utility model discloses a vacuum cavity cooling device with a protective structure, which comprises a bottom support frame, the top end of the bottom support frame is fixedly connected with a vacuum cavity main body, and a cooling coil is arranged between one end of a water inlet pipe and one end of a water outlet pipe. A protection assembly capable of protecting the coil pipe and improving the cooling capacity is arranged outside the vacuum cavity body. According to the vacuum cavity cooling device with the protection structure, the first bottom protection shell, the second bottom protection shell, the water inlet pipe, the cooling coil and the aluminum alloy fins are arranged, and when the vacuum cavity cooling device is used, the aluminum alloy fins serve as external expansion of the cooling coil, so that the contact area with a vacuum cavity body is increased; and the temperature of the surface of the vacuum cavity main body can be led out, a support is formed between the external protection part and the vacuum cavity main body, the internal cooling coil pipe can be protected when the external protection part is sunken, and the problem that the device does not have the function of improving the cooling effect and enhancing the protection performance is solved.

Description

Technical Field

[0001] This utility model relates to the technical field of vacuum cavity cooling devices, specifically a vacuum cavity cooling device with a protective structure. Background Technology

[0002] A vacuum chamber is a sealed space formed in a vacuum. In the semiconductor industry, vacuum chambers are used to manufacture high-precision devices such as integrated circuits and liquid crystal displays to isolate the external environment from the process. Furthermore, vacuum chambers play an indispensable role in fields such as vacuum coating and solar cell manufacturing.

[0003] Currently, most vacuum chambers on the market are made of stainless steel, and their external cooling is mostly achieved using water-cooled coils to ensure that the internal working conditions are low. However, this approach has some functional shortcomings and room for improvement. For example, the coil, as the main component for cooling, has a limited contact area with the vacuum chamber, leaving room for further improvement in cooling performance. Furthermore, the protective shell on the outside of the coil is directly attached to the outside of the coil, so when the shell is bumped or dented, the coil will also be dented directly, resulting in poor protection performance and failing to enhance cooling performance or improve protection.

[0004] Now, a novel vacuum cavity cooling device with a protective structure is proposed to solve the above problems. Utility Model Content

[0005] The purpose of this invention is to provide a vacuum cavity cooling device with a protective structure to solve the problem mentioned in the background art of not having the function of improving cooling effect and enhancing protective performance.

[0006] To achieve the above objectives, this utility model provides the following technical solution: a vacuum chamber cooling device with a protective structure, including a bottom support frame, a vacuum chamber body fixedly connected to the top of the bottom support frame, a water inlet pipe fixedly connected to one side of the top of the vacuum chamber body, a water outlet pipe fixedly connected to one side of the bottom of the vacuum chamber body, a cooling coil provided between one end of the water inlet pipe and the water outlet pipe, and a protective component that can protect the coil and improve the cooling capacity provided on the outside of the vacuum chamber body.

[0007] The protective assembly includes a first bottom protective shell, which is installed on one side of the bottom end of the vacuum chamber body. A first top protective shell is fixedly connected to the top of the first bottom protective shell. A third bottom protective shell is fixedly connected to the other side of the bottom end of the vacuum chamber body. A third top protective shell is fixedly connected to the top of the third bottom protective shell. Two sets of second bottom protective shells are fixedly connected at the middle position of the bottom end of the vacuum chamber body. A second top protective shell is fixedly connected to the top of the second bottom protective shell. Multiple sets of aluminum alloy fins are welded to the outside of the cooling coil.

[0008] Preferably, the first bottom protective shell, the second bottom protective shell, and the third bottom protective shell are connected together, and the first top protective shell, the second top protective shell, and the third top protective shell are connected together.

[0009] Preferably, the second top protective shell and the second bottom protective shell coincide with the vertical center line of the vacuum chamber body, and the second top protective shell and the second bottom protective shell have the same size.

[0010] Preferably, the aluminum alloy fins are arranged at equal intervals, and the interior of the aluminum alloy fins is uniformly provided with holes, and the vacuum chamber body and the aluminum alloy fins are connected.

[0011] Preferably, a sensor mounting bracket is fixedly connected to one side of the water inlet pipe, a temperature sensor is inserted into the top of one side of the sensor mounting bracket, a PLC controller is fixedly connected to the bottom of one side of the sensor mounting bracket, and a speaker is installed on one side of the PLC controller.

[0012] Preferably, one side of the temperature sensor passes through the sensor mounting bracket and extends into the interior of the water inlet pipe, and the PLC controller, temperature sensor, and speaker are electrically connected.

[0013] Preferably, a first fan mounting base is fixedly connected to the top of the third top protective shell, an exhaust fan is installed at the top of the first fan mounting base, and a second fan mounting base is fixedly connected to the bottom of the first bottom protective shell, a blower is installed at the bottom of the second fan mounting base.

[0014] Preferably, the third top protective shell and the first fan mounting base are internally connected, and the first bottom protective shell and the second fan mounting base are internally connected.

[0015] Compared with the prior art, the beneficial effects of this utility model are: the vacuum cavity cooling device with protective structure not only realizes the function of improving cooling effect and enhancing protective performance, but also realizes the function of cold water inlet temperature measurement, and also realizes the function of increasing air flow and improving cooling efficiency.

[0016] (1) By setting a first bottom protective shell, a first top protective shell, a second top protective shell, a second bottom protective shell, a water inlet pipe, a cooling coil, aluminum alloy fins, a third bottom protective shell, a third top protective shell and a water outlet pipe, when in use, the bottom support frame serves as the bottom support, the production and processing process is completed inside the vacuum chamber body, during the operation of the vacuum chamber, the chiller pumps cold water in from the water inlet pipe and recovers it from the water outlet pipe to form a cold water circulation, and the cooling coil cools the vacuum chamber body. The first bottom protective shell, the first top protective shell, the second top protective shell, the second bottom protective shell, the third bottom protective shell and the third top protective shell form a cylindrical external protection. The aluminum alloy fins serve as an external extension of the cooling coil, increasing the contact surface with the vacuum chamber body, and can conduct the temperature of the surface of the vacuum chamber body outward, and form a support between the external protection and the vacuum chamber body. When the external protection is recessed, it can protect the internal cooling coil, thus realizing the function of improving the cooling effect and enhancing the protection performance.

[0017] (2) By setting up a sensor mounting bracket, a PLC controller, a temperature sensor and a speaker, when in use, the chiller pumps cold water into the inlet pipe. The temperature sensor on one side of the sensor mounting bracket measures the temperature of the cold water in the inlet pipe in real time and feeds the data back to the PLC controller. The PLC controller controls the speaker according to the data fed back by the temperature sensor. When the temperature is abnormal, it can issue a prompt voice to remind the staff to check whether the chiller is working abnormally, thus realizing the function of measuring the temperature of the cold water inlet.

[0018] (3) By setting up a first fan mounting base, an exhaust fan, a second fan mounting base and a blower, when in use, while water is being introduced for cooling, the exhaust fan on the first fan mounting base is started simultaneously to draw the air out from between the main body of the vacuum chamber and its external protection. The blower on the second fan mounting base then sends in the cold air from outside. The combination of extraction and delivery accelerates the airflow speed between the main body of the vacuum chamber and its external protection, improves the heat dissipation efficiency of the aluminum alloy fins, and further enhances its cooling effect, thus realizing the function of increasing airflow and improving cooling efficiency. Attached Figure Description

[0019] Figure 1 This is a front view structural diagram of the present utility model;

[0020] Figure 2 This is a front view structural diagram of the vacuum cavity body of this utility model;

[0021] Figure 3 For the present utility model Figure 1 Enlarged cross-sectional view of point A in the middle section;

[0022] Figure 4 This is a side view magnified structural diagram of the aluminum alloy fins of this utility model.

[0023] In the diagram: 1. Bottom support frame; 2. Vacuum chamber body; 3. First bottom protective shell; 4. First top protective shell; 5. Second top protective shell; 6. Second bottom protective shell; 7. Water inlet pipe; 8. Cooling coil; 9. Aluminum alloy fins; 10. Third bottom protective shell; 11. Third top protective shell; 12. Water outlet pipe; 13. Sensor mounting bracket; 14. PLC controller; 15. Temperature sensor; 16. Speaker; 17. First fan mounting base; 18. Exhaust fan; 19. Second fan mounting base; 20. Air supply fan. Detailed Implementation

[0024] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0025] Example 1: Please refer to Figure 1-4 A vacuum chamber cooling device with a protective structure includes a bottom support frame 1, a vacuum chamber body 2 fixedly connected to the top of the bottom support frame 1, a water inlet pipe 7 fixedly connected to one side of the top of the vacuum chamber body 2, a water outlet pipe 12 fixedly connected to one side of the bottom of the vacuum chamber body 2, a cooling coil 8 provided between one end of the water inlet pipe 7 and the water outlet pipe 12, and a protective component that can protect the coil and improve the cooling capacity provided on the outside of the vacuum chamber body 2.

[0026] Please see Figure 1-4 A vacuum chamber cooling device with a protective structure also includes a protective component. The protective component includes a first bottom protective shell 3, which is installed on one side of the bottom end of the vacuum chamber body 2. A first top protective shell 4 is fixedly connected to the top of the first bottom protective shell 3. A third bottom protective shell 10 is fixedly connected to the other side of the bottom end of the vacuum chamber body 2. A third top protective shell 11 is fixedly connected to the top of the third bottom protective shell 10. Two sets of second bottom protective shells 6 are fixedly connected at the middle position of the bottom end of the vacuum chamber body 2. A second top protective shell 5 is fixedly connected to the top of the second bottom protective shell 6. Multiple sets of aluminum alloy fins 9 are welded to the outside of the cooling coil 8.

[0027] The first bottom protective shell 3, the second bottom protective shell 6, and the third bottom protective shell 10 are connected. The first top protective shell 4, the second top protective shell 5, and the third top protective shell 11 are connected. The second top protective shell 5 and the second bottom protective shell 6 coincide about the vertical center line of the vacuum chamber body 2. The second top protective shell 5 and the second bottom protective shell 6 have the same size. The aluminum alloy fins 9 are arranged at equal intervals. The interior of the aluminum alloy fins 9 is uniformly provided with holes. The connection between the vacuum chamber body 2 and the aluminum alloy fins 9 can improve cooling efficiency and increase protection performance.

[0028] Specifically, such as Figure 1 , Figure 2 and Figure 4 As shown, the first bottom protective shell 3, the first top protective shell 4, the second top protective shell 5, the second bottom protective shell 6, the third bottom protective shell 10, and the third top protective shell 11 form a cylindrical external protection. The aluminum alloy fins 9 serve as an external extension of the cooling coil 8, increasing the contact surface with the vacuum chamber body 2 and allowing the temperature of the surface of the vacuum chamber body 2 to be discharged outward. They also form a support between the external protection and the vacuum chamber body 2, protecting the internal cooling coil 8 when the external protection is recessed.

[0029] Example 2: A sensor mounting bracket 13 is fixedly connected to one side of the water inlet pipe 7. A temperature sensor 15 is inserted into the top of one side of the sensor mounting bracket 13. A PLC controller 14 is fixedly connected to the bottom of one side of the sensor mounting bracket 13. A speaker 16 is installed on one side of the PLC controller 14. One side of the temperature sensor 15 passes through the sensor mounting bracket 13 and extends into the interior of the water inlet pipe 7. The PLC controller 14, the temperature sensor 15, and the speaker 16 are electrically connected, which can monitor the inlet water temperature and avoid insufficient cooling effect caused by abnormal operation of the chiller.

[0030] Specifically, such as Figure 1 and Figure 3 As shown, the temperature sensor 15 on one side of the sensor mounting bracket 13 measures the temperature of the cold water in the inlet pipe 7 in real time and feeds the data back to the PLC controller 14. The PLC controller 14 controls the speaker 16 according to the data fed back by the temperature sensor 15. When the temperature is abnormal, it can issue a prompt voice to remind the staff to check whether the chiller is working abnormally.

[0031] Example 3: The top of the third top protective shell 11 is fixedly connected to the first fan mounting base 17, and the top of the first fan mounting base 17 is equipped with an exhaust fan 18. The bottom of the first bottom protective shell 3 is fixedly connected to the second fan mounting base 19, and the bottom of the second fan mounting base 19 is equipped with a blower 20. The interiors of the third top protective shell 11 and the first fan mounting base 17 are connected, and the interiors of the first bottom protective shell 3 and the second fan mounting base 19 are connected, further improving heat dissipation efficiency.

[0032] Specifically, such as Figure 1 and Figure 2 As shown, the exhaust fan 18 on the first fan mounting base 17 starts to draw the air out from between the vacuum chamber body 2 and its external protection, while the blower 20 on the second fan mounting base 19 sends in the external cold air. The combination of extraction and delivery accelerates the airflow speed between the vacuum chamber body 2 and its external protection, improves the heat dissipation efficiency of the aluminum alloy fins 9, and further enhances its cooling effect.

[0033] Working principle: When this utility model is in use, firstly, the bottom support frame 1 serves as the bottom support. The production and processing process is completed inside the vacuum chamber body 2. During the operation of the vacuum chamber, the chiller pumps cold water in from the inlet pipe 7 and recovers it from the outlet pipe 12, forming a cold water circulation. The cooling coil 8 cools the vacuum chamber body 2. The first bottom protective shell 3, the first top protective shell 4, the second top protective shell 5, the second bottom protective shell 6, the third bottom protective shell 10, and the third top protective shell 11 form a cylindrical external protection. The aluminum alloy fins 9 serve as an external extension of the cooling coil 8, increasing the contact surface with the vacuum chamber body 2 and allowing the heat from the surface of the vacuum chamber body 2 to be discharged outwards. They also form a support between the external protection and the vacuum chamber body 2. When the external protection is recessed, it can protect the internal cooling coil 8. The chiller pumps chilled water into the inlet pipe 7. A temperature sensor 15 on one side of the sensor mounting bracket 13 measures the temperature of the chilled water in the inlet pipe 7 in real time and feeds the data back to the PLC controller 14. The PLC controller 14 controls the speaker 16 based on the data from the temperature sensor 15, issuing a warning voice when the temperature is abnormal, reminding staff to check if the chiller is malfunctioning. Simultaneously with the water cooling process, the exhaust fan 18 on the first fan mounting base 17 starts, drawing air out from between the vacuum chamber body 2 and its external protection. Meanwhile, the blower 20 on the second fan mounting base 19 delivers external cold air. This extraction and delivery accelerates the airflow between the vacuum chamber body 2 and its external protection, improving the heat dissipation efficiency of the aluminum alloy fins 9 and further enhancing the cooling effect.

[0034] It will be apparent to those skilled in the art that this invention is not limited to the details of the exemplary embodiments described above, and that it can be implemented in other specific forms without departing from the spirit or essential characteristics of this invention. Therefore, the embodiments should be considered illustrative and non-limiting in all respects, and the scope of this invention is defined by the appended claims rather than the foregoing description. Thus, it is intended that all variations falling within the meaning and scope of equivalents of the claims be included within this invention. No reference numerals in the claims should be construed as limiting the scope of the claims.

Claims

1. A vacuum chamber cooling device with a protective structure, comprising a bottom support frame (1), characterized in that: The top end of the bottom support frame (1) is fixedly connected with a vacuum cavity body (2), one side of the top end of the vacuum cavity body (2) is fixedly connected with a water inlet pipe (7), one side of the bottom end of the vacuum cavity body (2) is fixedly connected with a water outlet pipe (12), a cooling coil (8) is arranged between one end of the water inlet pipe (7) and the water outlet pipe (12), and the outside of the vacuum cavity body (2) is provided with a protection assembly capable of protecting the coil and improving the cooling capacity of the coil; The protection assembly comprises a first bottom protection shell (3) which is arranged on one side of the bottom end of the vacuum cavity body (2), the top end of the first bottom protection shell (3) is fixedly connected with a first top protection shell (4), the other side of the bottom end of the vacuum cavity body (2) is fixedly connected with a third bottom protection shell (10), the top end of the third bottom protection shell (10) is fixedly connected with a third top protection shell (11), two groups of second bottom protection shells (6) are fixedly connected to the middle position of the bottom end of the vacuum cavity body (2), and the top end of each second bottom protection shell (6) is fixedly connected with a second top protection shell (5); and a plurality of groups of aluminum alloy fins (9) are welded to the outside of the cooling coil (8).

2. The vacuum chamber cooling device with a protective structure according to claim 1, characterized in that: The first bottom protection shell (3), the second bottom protection shell (6) and the third bottom protection shell (10) are connected, and the first top protection shell (4), the second top protection shell (5) and the third top protection shell (11) are connected.

3. The vacuum chamber cooling device with a protective structure according to claim 1, characterized in that: The second top protection shell (5) and the second bottom protection shell (6) coincide about the vertical center line of the vacuum cavity body (2), and the second top protection shell (5) and the second bottom protection shell (6) have the same size.

4. The vacuum chamber cooling device with a protective structure according to claim 1, characterized in that: The aluminum alloy fins (9) are arranged at equal intervals, and the inside of each aluminum alloy fin (9) is uniformly provided with a hole, and the vacuum cavity body (2) and the aluminum alloy fin (9) are connected.

5. The vacuum chamber cooling device with a protective structure according to claim 1, characterized in that: One side of the water inlet pipe (7) is fixedly connected with a sensor fixing frame (13), a temperature sensor (15) is inserted into the top of one side of the sensor fixing frame (13), a PLC controller (14) is fixedly connected to the bottom of one side of the sensor fixing frame (13), and a loudspeaker (16) is arranged on one side of the PLC controller (14).

6. The vacuum chamber cooling device with a protective structure according to claim 5, characterized in that: One side of the temperature sensor (15) penetrates through the sensor fixing frame (13) and extends into the inside of the water inlet pipe (7), and the PLC controller (14), the temperature sensor (15) and the loudspeaker (16) are electrically connected.

7. The vacuum chamber cooling device with a protective structure according to claim 1, characterized in that: The top end of the third top protection shell (11) is fixedly connected with a first fan mounting seat (17), an air extractor (18) is arranged on the top end of the first fan mounting seat (17), the bottom end of the first bottom protection shell (3) is fixedly connected with a second fan mounting seat (19), and an air blower (20) is arranged on the bottom end of the second fan mounting seat (19).

8. The vacuum chamber cooling device with a protective structure according to claim 1, characterized in that: The inside of the third top protection shell (11) and the first fan mounting seat (17) are communicated, and the inside of the first bottom protection shell (3) and the second fan mounting seat (19) are communicated.

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