High-airtightness vacuum cavity

Abstract

The utility model discloses a high-airtightness vacuum cavity which comprises a cavity body, a connecting assembly is arranged on the left side of the cavity body, a movable door is arranged on the front side of the cavity body through the connecting assembly, the rear side of the movable door is in lap joint with the front side of the cavity body, and an installation clamping plate is fixedly arranged on the rear side of the movable door. A sealing air bag is fixedly arranged in the mounting clamping plate, and an air inlet and outlet pipe is fixedly arranged in the sealing air bag. The air pump conveys air into the sealing air bag through the conveying pipe, the connecting pipe and the air inlet and outlet pipe, the gap between the movable door and the cavity is sealed through expansion of the sealing air bag, the sealing air bag can be filled and attached according to the shape of the gap between the movable door and the cavity, the gap can be made up after slight deformation, and in the early-stage debugging stage, the sealing effect is good. Inflation pressure can be reduced to facilitate opening and closing operation of the door, and pressure of the sealing air bag can be increased to strengthen sealing in the formal use process, so that the vacuum cavity has higher air tightness.

Description

Technical Field

[0001] This utility model relates to the field of vacuum cavity technology, and in particular to a high airtight vacuum cavity. Background Technology

[0002] A vacuum chamber is a container that can maintain a high vacuum environment inside and has excellent sealing. It is usually made of stainless steel because stainless steel has good corrosion resistance and is easy to weld. It is commonly used in semiconductor manufacturing, scientific research experiments, aerospace and electronic device production because vacuum chambers can reduce the interference of the external environment on the workpiece.

[0003] The airtightness of the vacuum chamber is particularly important during use, because poor airtightness will prevent the vacuum state inside the chamber from meeting the standards. In order to facilitate the placement of workpieces inside the vacuum chamber, a movable door is installed on the vacuum chamber, and a sealing ring is used to seal the gap between the movable door and the vacuum chamber.

[0004] However, during the use of the vacuum chamber, after a long period of use, the chamber and the movable door of the vacuum chamber will undergo slight deformation. When slight deformation occurs, the movable door and the chamber cannot fit completely, which means that the sealing ring cannot completely seal the gap between the chamber and the movable door, resulting in air leakage between the chamber and the movable door, thereby reducing the airtightness of the vacuum chamber. Based on the above problems, this application proposes a high airtightness vacuum chamber. Utility Model Content

[0005] To address the shortcomings of existing technologies, this invention provides a highly airtight vacuum cavity to solve the problems mentioned in the background section.

[0006] To achieve the above objectives, the present invention adopts the following technical solution:

[0007] A high-airtightness vacuum cavity includes a cavity body. A connecting assembly is provided on the left side of the cavity body. A movable door is provided on the front side of the cavity body via the connecting assembly. The rear side of the movable door overlaps with the front side of the cavity body. A mounting plate is fixedly provided on the rear side of the movable door. A sealing airbag is fixedly provided inside the mounting plate. An inlet and outlet air pipe is fixedly provided inside the sealing airbag. An outlet air assembly is provided on the right side of the inlet and outlet air pipe. A connecting pipe is fixedly provided at the front end of the inlet and outlet air pipe. An opening and closing assembly is provided inside the connecting pipe. An air pump is fixedly provided on the front side of the movable door. A delivery pipe is fixedly provided at the outlet end of the air pump. The outlet end of the delivery pipe is fixedly installed on the front side of the connecting pipe.

[0008] Preferably, the connecting assembly includes a mounting plate fixedly installed on the left side of the cavity, a connecting hole being provided through the surface of the mounting plate, a rotating plate being overlapped inside the mounting plate, the rotating plate being fixedly installed on the front side of the movable door, a fixing hole being provided through the top of the rotating plate, a threaded pin being overlapped inside the fixing hole, the threaded pin being overlapped with the connecting hole, and a fixing nut being bolted to the surface of the threaded pin.

[0009] Preferably, the exhaust assembly includes an exhaust pipe fixedly installed on the right side of the inlet and outlet pipes, a sealing cap is threaded on the surface of the exhaust pipe, a sealing gasket is installed inside the sealing cap, the sealing gasket is overlapped with the exhaust pipe, and an anti-slip strip is fixedly provided on the outer surface of the sealing cap.

[0010] Preferably, the opening and closing assembly includes a connecting plate fixedly installed inside the connecting pipe, an opening and closing plate overlapping the rear side of the connecting plate, a rotating shaft fixedly installed inside the opening and closing plate, and connecting blocks rotatably installed at both ends of the rotating shaft, the connecting blocks being fixedly installed inside the exhaust pipe.

[0011] Preferably, the sealing airbag has a loop-shaped structure, and the sealing airbag is made of nitrile rubber.

[0012] Preferably, the mounting plate has a U-shaped structure, and a U-shaped mounting groove is formed on the outer surface of the mounting plate. The sealing airbag is fixedly connected to the bottom groove of the U-shaped mounting groove.

[0013] Preferably, the connecting plate has a circular structure, and the opening and closing plate is made of rubber.

[0014] Compared with the prior art, the beneficial effects of this utility model are as follows: In this high airtightness vacuum cavity, the air pump delivers gas to the inside of the sealing airbag through the delivery pipe, connecting pipe and inlet / outlet pipe. The expansion of the sealing airbag seals the gap between the movable door and the cavity. The sealing airbag can fill and fit according to the shape of the gap between the movable door and the cavity. It can fill the gap after slight deformation. In the early debugging stage, the inflation pressure can be reduced to facilitate the opening and closing of the door. In the formal use, the pressure of the sealing airbag can be increased to strengthen the seal, so that the vacuum cavity has higher airtightness. Attached Figure Description

[0015] Figure 1 This is an isometric drawing of the structure of this utility model;

[0016] Figure 2 This is a schematic diagram of the connecting component structure of this utility model;

[0017] Figure 3 This is a schematic longitudinal cross-sectional view of the structure of this utility model;

[0018] Figure 4This is a partial structural diagram of the present invention;

[0019] Figure 5 for Figure 3 Enlarged view of the structure at point A;

[0020] Figure 6 This is a partial structural diagram of the opening and closing component of this utility model;

[0021] Figure 7 This is a schematic diagram of the air outlet component of this utility model.

[0022] In the diagram: 1. Cavity; 2. Mounting plate; 3. Connecting hole; 4. Rotating plate; 5. Fixing hole; 6. Threaded pin; 7. Fixing nut; 8. Movable door; 9. Mounting plate; 10. Sealing airbag; 11. Inlet and outlet air pipes; 12. Exhaust pipe; 13. Sealing cover; 14. Sealing gasket; 15. Anti-slip strip; 16. Connecting pipe; 17. Air pump; 18. Delivery pipe; 19. Connecting plate; 20. Connecting block; 21. Rotating shaft; 22. Opening and closing plate. Detailed Implementation

[0023] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0024] Reference Figure 1-7A high-airtightness vacuum cavity includes a cavity 1. A connecting assembly is provided on the left side of the cavity 1. A movable door 8 is provided on the front side of the cavity 1 via the connecting assembly. The rear side of the movable door 8 overlaps with the front side of the cavity 1. A mounting plate 9 is fixedly provided on the rear side of the movable door 8. A sealing airbag 10 is fixedly provided inside the mounting plate 9. The mounting plate 9 has a U-shaped structure. A U-shaped mounting groove is formed on the outer surface of the mounting plate 9. The sealing airbag 10 is fixedly connected to the bottom groove of the U-shaped mounting groove. The sealing airbag 10 has a U-shaped structure and is made of nitrile rubber. The U-shaped mounting groove facilitates the installation of the U-shaped sealing airbag 10 and ensures a tight seal. The airbag 10 is fixed in the bottom groove of the U-shaped mounting groove, allowing the sealing airbag 10 to fully deploy, thus facilitating the sealing of the gap between the cavity 1 and the movable door 8. An inlet / outlet pipe 11 is fixedly installed inside the sealing airbag 10. An air outlet assembly is located on the right side of the inlet / outlet pipe 11. A connecting pipe 16 is fixedly installed at the front end of the inlet / outlet pipe 11. An opening / closing assembly is installed inside the connecting pipe 16. The opening / closing assembly includes a connecting plate 19 fixedly installed inside the connecting pipe 16. An opening / closing plate 22 overlaps on the rear side of the connecting plate 19. The connecting plate 19 has a circular ring structure. The opening / closing plate 22 is made of rubber and has a rotating mechanism fixedly installed inside it. The rotating shaft 21 has connecting blocks 20 rotatably mounted at both ends. The connecting blocks 20 are fixedly installed inside the exhaust pipe 12. Gas blows the opening and closing plate 22, causing it to drive the rotating shaft 21 to rotate inside the connecting blocks 20. This allows air to enter the rear side of the connecting plate 19 from the front. After the sealing airbag 10 is fully filled with gas, the gas exerts a reverse thrust on the opening and closing plate 22, causing it to completely seal against the connecting plate 19. This prevents gas leakage from the sealing airbag 10, ensuring the proper expansion of the sealing airbag 10 and avoiding leakage that could cause malfunctions. Air leakage occurs between door 8 and cavity 1. An air pump 17 is fixedly installed on the front side of the movable door 8. A delivery pipe 18 is fixedly installed at the air outlet of the air pump 17. The air outlet of the delivery pipe 18 is fixedly installed on the front side of the connecting pipe 16. The air pump 17 delivers gas to the inside of the connecting pipe 16 through the delivery pipe 18, and enters the sealing airbag 10 through the inlet and outlet pipes 11, so that the sealing airbag 10 is in close contact with the inner wall of the cavity 1, thereby facilitating the sealing of the gap between the cavity 1 and the movable door 8. After the cavity 1 undergoes slight deformation, the sealing airbag 10 can also expand to seal the deformation, thereby preventing air leakage at the deformation point during vacuuming.

[0025] Preferably, the connecting assembly includes a mounting plate 2 fixedly installed on the left side of the cavity 1. A connecting hole 3 is provided through the surface of the mounting plate 2. A rotating plate 4 is overlapped inside the mounting plate 2. The rotating plate 4 is fixedly installed on the front side of the movable door 8. A fixing hole 5 is provided through the top of the rotating plate 4. A threaded pin 6 is overlapped inside the fixing hole 5. The threaded pin 6 and the connecting hole 3 are overlapped. A fixing nut 7 is bolted to the surface of the threaded pin 6. The rotating plate 4 is placed inside the mounting plate 2 through the movable door 8, so that the fixing hole 5 and the connecting hole 3 are vertically aligned. The fixing hole 5 is passed through the connecting hole 3 and the inside of the fixing hole 5, so that the threaded pin 6 contacts the top of the connecting hole 3. The fixing nut 7 is tightened on the surface of the threaded pin 6, thereby facilitating the installation of the movable door 8 on the cavity 1.

[0026] Specifically, the air outlet assembly includes an exhaust pipe 12 fixedly installed on the right side of the inlet / outlet pipe 11. A sealing cap 13 is threaded on the surface of the exhaust pipe 12, and a sealing gasket 14 is installed inside the sealing cap 13. The sealing gasket 14 and the exhaust pipe 12 are overlapped. An anti-slip strip 15 is fixedly installed on the outer surface of the sealing cap 13. By pulling the handle on the front side of the movable door 8, it can be flipped, so that the mounting plate 9 moves the sealing airbag 10 out of the cavity 1. If the sealing airbag 10 is in too tight contact with the cavity 1, the sealing cap 13 can be removed from the exhaust pipe 12, so that the gas in the sealing airbag 10 enters the exhaust pipe 12 through the inlet / outlet pipe 11 and is discharged through the exhaust pipe 12, thereby reducing the expansion degree of the sealing airbag 10, thus making it easier to open the movable door 8.

[0027] This highly airtight vacuum chamber is connected to a 220V mains power supply, and the main controller can be a conventional known device such as a computer for control.

[0028] In use: Pulling the movable door 8 causes the rotating plate 4 to rotate on the surface of the threaded pin 6, so that the rear side of the movable door 8 contacts the front side of the cavity 1, causing the mounting plate 9 to drive the sealing airbag 10 into the cavity 1. Air is drawn out by the air pump 17, and the air enters the connecting pipe 16 through the delivery pipe 18. The air blows the opening and closing plate 22, causing the opening and closing plate 22 to drive the rotating shaft 21 to rotate inside the connecting block 20. The air enters the rear side of the connecting plate 19 from the front side, and enters the inlet and outlet air pipe 11 through the connecting pipe 16. Then, it enters the sealing airbag 10 through the inlet and outlet air pipe 11. When the air enters the sealing airbag 10, the sealing airbag 10 expands and contacts the inner wall of the cavity 1, so that the sealing airbag 10 seals the gap between the cavity 1 and the movable door 8.

[0029] It should be noted that, in this document, relational terms such as "first" and "second" are used only to distinguish one entity or operation from another, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Furthermore, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such process, method, article, or apparatus.

[0030] Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the present invention, the scope of which is defined by the appended claims and their equivalents.

Claims

1. A high-airtightness vacuum cavity, comprising a cavity (1), characterized in that, A connecting component is provided on the left side of the cavity (1). A movable door (8) is provided on the front side of the cavity (1) through the connecting component. The rear side of the movable door (8) overlaps with the front side of the cavity (1). A mounting plate (9) is fixedly provided on the rear side of the movable door (8). A sealing airbag (10) is fixedly provided inside the mounting plate (9). An inlet / outlet pipe (11) is fixedly provided inside the sealing airbag (10). An outlet component is provided on the right side of the inlet / outlet pipe (11). A connecting pipe (16) is fixedly provided at the front end of the inlet / outlet pipe (11). An opening / closing component is provided inside the connecting pipe (16). An air pump (17) is fixedly provided on the front side of the movable door (8). A delivery pipe (18) is fixedly provided at the outlet end of the air pump (17). The outlet end of the delivery pipe (18) is fixedly installed on the front side of the connecting pipe (16).

2. The high airtightness vacuum cavity according to claim 1, characterized in that, The connecting assembly includes a mounting plate (2) fixedly installed on the left side of the cavity (1). A connecting hole (3) is provided through the surface of the mounting plate (2). A rotating plate (4) is overlapped inside the mounting plate (2). The rotating plate (4) is fixedly installed on the front side of the movable door (8). A fixing hole (5) is provided through the top of the rotating plate (4). A threaded pin (6) is overlapped inside the fixing hole (5). The threaded pin (6) and the connecting hole (3) are overlapped. A fixing nut (7) is bolted on the surface of the threaded pin (6).

3. The high airtightness vacuum cavity according to claim 1, characterized in that, The exhaust assembly includes an exhaust pipe (12) fixedly installed on the right side of the inlet and outlet pipes (11). A sealing cap (13) is threaded on the surface of the exhaust pipe (12). A sealing gasket (14) is installed inside the sealing cap (13). The sealing gasket (14) and the exhaust pipe (12) are overlapped. An anti-slip strip (15) is fixedly installed on the outer surface of the sealing cap (13).

4. A high-airtightness vacuum cavity according to claim 1, characterized in that, The opening and closing assembly includes a connecting plate (19) fixedly installed inside the connecting pipe (16). An opening and closing plate (22) is overlapped on the rear side of the connecting plate (19). A rotating shaft (21) is fixedly installed inside the opening and closing plate (22). A connecting block (20) is rotatably installed at both ends of the rotating shaft (21). The connecting block (20) is fixedly installed inside the exhaust pipe (12).

5. A high-airtightness vacuum cavity according to claim 1, characterized in that, The sealing airbag (10) has a loop-shaped structure and is made of nitrile rubber.

6. A high-airtightness vacuum cavity according to claim 1, characterized in that, The mounting plate (9) has a U-shaped structure, and a U-shaped mounting groove is provided on the outer surface of the mounting plate (9). The sealing airbag (10) is fixedly connected to the bottom groove of the U-shaped mounting groove.

7. A high-airtightness vacuum cavity according to claim 4, characterized in that, The connecting plate (19) has a circular structure, and the opening and closing plate (22) is made of rubber.

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