Pressure sensor based on MEMS technology

Abstract

The utility model relates to the technical field of MEMS pressure sensors, in particular to a pressure sensor based on the MEMS technology. According to the technical scheme, the device comprises a fixing frame and a bottom plate fixedly installed at the bottom of the fixing frame, and the fixing frame is provided with a detection assembly and a dismounting assembly; the detection assembly comprises a supporting frame fixedly installed at the top of the fixing frame, a movable frame is fixedly connected to the top of the supporting frame, a film is clamped and fixed between the movable frame and the supporting frame, a movable cover is slidably installed at the top of the fixing frame and extends to the periphery of the fixing frame, and a supporting block is fixedly connected to the inner side of the movable cover. The bottom of the supporting block is attached to a film, and an inductance coil is fixedly installed at the bottom of the film. According to the utility model, the movable cover, the supporting block, the movable frame and the supporting frame are matched with one another, and the movable cover is driven to move downwards, so that the pressure value can be conveniently deduced, the deduction of the pressure value is more accurate, and the disassembly, assembly and maintenance are facilitated.

Description

TECHNICAL FIELD

[0001] The utility model relates to MEMS pressure sensor technical field, concretely is a kind of pressure sensor based on MEMS technology. BACKGROUND

[0002] MEMS pressure sensor is a kind of pressure sensing equipment based on micro electro mechanical system technology, with small size, high precision, low cost, small power consumption and other advantages, widely used in consumer electronics, automobile, medical, industrial and aerospace fields, usually based on capacitance change, pressure makes the capacitance plate spacing or area change, resulting in capacitance value change, by measuring capacitance change to deduce pressure, need to use pressure sensor based on MEMS technology.

[0003] In prior art, there are problems as follows:

[0004] Traditional MEMS pressure sensor structure is more complex, use is more troublesome, pressure derivation interface is prone to error, and simultaneously disassembly is more complex, is not convenient for disassembly maintenance. UTILITY MODEL CONTENT

[0005] The utility model aims at providing a kind of pressure sensor based on MEMS technology to solve the problems presented in the above background art.

[0006] To achieve the above object, the utility model provides the following technical scheme: a kind of pressure sensor based on MEMS technology, including fixed frame and bottom plate fixedly installed at the bottom of fixed frame, detection assembly and disassembly assembly are equipped on the fixed frame;The detection assembly includes support frame fixedly installed at the top of fixed frame, the top of support frame is fixedly connected with movable frame, and the movable frame is clamped and fixed with diaphragm between support frame, the top of fixed frame is slidably installed with movable cover, the movable cover extends to the periphery of fixed frame, the inner side of movable cover is fixedly connected with support block, the bottom of support block is attached with diaphragm, the bottom of diaphragm is fixedly installed with inductor coil, the top of bottom plate is fixedly connected with fixed capacitor, and the fixed capacitor is located inside fixed frame, the inductor coil is fixedly connected with fixed capacitor, the top of bottom plate is fixedly installed with battery, and the battery is located at one side of fixed capacitor and is electrically connected with fixed capacitor;The disassembly assembly includes a plurality of fixed columns fixedly installed at the top of support frame, and a plurality of fixed columns are all through diaphragm and extend to the inside of movable frame, and the movable frame and a plurality of fixed columns are respectively fixedly connected through a second fixed bolt, two sliding grooves are respectively arranged on the two sides of movable cover, and the two sides of fixed frame are respectively fixedly connected with two support sleeves through first fixed bolt, each support sleeve is located inside one sliding groove and is slidably connected with sliding groove.

[0007] By driving the supporting block to move downwards, the supporting block pushes the film downwards to make the film deform, and the inductance coil is deformed synchronously, so that the inductance value of the inductance coil changes, the inductance value of the inductance coil is measured through the fixed capacitor and the inductance coil to obtain the corresponding pressure value, the pressure value is deduced, the pressure value is deduced more accurately, the first fixing bolt is removed, the supporting sleeve can be conveniently taken out from the sliding groove, the movable cover can be conveniently disassembled upwards, then the second fixing bolt is screwed off, the movable frame can be pulled out upwards, and the film can be taken off upwards, so that maintenance is facilitated, the film is sleeved outside the plurality of fixed columns, the fixed columns can be used to support and open the film, then the movable frame is sleeved outside the plurality of fixed columns, the second fixing bolt is used to fix the movable frame and the fixed columns, the movable frame can be driven to move downwards, and the supporting frame can be used for clamping and fixing the film, so that disassembly and maintenance are facilitated.

[0008] Preferably, the bottom plate and the fixed frame are fixedly connected through a plurality of supporting seats, and a plurality of supporting pads are fixedly installed at the bottom of the bottom plate. The supporting seats can be used for connecting and fixing the bottom plate and the fixed frame, and the supporting pads can be used for supporting and fixing the bottom plate.

[0009] Preferably, the top of the movable cover is fixedly connected with a limiting frame, the top of the fixed frame is fixedly installed with a guide frame, and the guide frame is located at the periphery of the supporting frame. The limiting frame can be used for limiting the objects on the top of the movable cover, and the guide frame can be used for guiding the movable frame and the movable cover.

[0010] Preferably, one side of the fixed frame is fixedly installed with a charging seat, and the charging seat is electrically connected with the storage battery. The charging seat can be used for charging the storage battery, and the storage battery can be used for providing electric energy for the fixed capacitor.

[0011] Preferably, the bottom of the supporting block is fixedly installed with a protective pad, the supporting block and the film are attached through the protective pad, the inner side of each fixed column is provided with a threaded hole, and each second fixing bolt is threadedly connected with a threaded hole. The protective pad can prevent the supporting block from damaging the film, and the threaded hole can be used for connecting and fixing the movable frame and the fixed column through the second fixing bolt.

[0012] Preferably, the inner side of the film is provided with a plurality of fixing holes, each fixed column penetrates the film through a fixing hole, the bottom of the movable frame is provided with a plurality of movable grooves, and each fixed column extends to the inner side of a movable groove. The fixing holes can be used for sleeving the film outside the plurality of fixed columns, and the movable grooves can be used for extending the fixed column to the inner side of the movable frame.

[0013] Compared with the prior art, the utility model has the advantages that:

[0014] Through the cooperation between the movable cover, the supporting block, the movable frame and the supporting frame, the movable cover is driven to move downwards, the supporting block is synchronously driven to move downwards, the supporting block pushes the film to recess downwards, the film is deformed, the inductance coil is synchronously deformed, the inductance value of the inductance coil is changed, the inductance value of the inductance coil is measured through the fixed capacitor and the inductance coil to obtain the corresponding pressure value, the pressure value is deduced, the pressure value deduction is more accurate, the first fixed bolt is removed, the supporting sleeve can be conveniently taken out from the sliding groove, the movable cover can be conveniently disassembled upwards, then the second fixed bolt is screwed and removed, the movable frame can be pulled out upwards, the film can be taken off upwards, and maintenance can be conveniently performed. BRIEF DESCRIPTION OF DRAWINGS

[0015] Fig. 1 It is a three-dimensional structure schematic view of the utility model;

[0016] Fig. 2 It is a movable cover cut structure schematic view of the utility model;

[0017] Fig. 3 It is a main view cut structure schematic view of the utility model;

[0018] Fig. 4 It is a film split structure schematic view of the utility model;

[0019] Fig. 5 It is a fixed frame cut structure schematic view of the utility model;

[0020] Fig. 6 It is a main view cut plane structure schematic view of the utility model.

[0021] In the drawing: 1, fixed frame; 2, support seat; 3, bottom plate; 4, supporting pad; 5, movable cover; 6, sliding groove; 7, limiting frame; 8, supporting sleeve; 9, first fixed bolt; 10, guide frame; 11, fixed capacitor; 12, battery; 13, charging seat; 14, supporting frame; 15, film; 16, movable frame; 17, inductance coil; 18, supporting block; 19, protective pad; 20, fixed column; 21, screw hole; 22, fixed hole; 23, movable slot; 24, second fixed bolt. DETAILED DESCRIPTION

[0022] The technical scheme of the utility model is further explained below in combination with the drawings and specific embodiments.

[0023] The utility model provides a pressure sensor based on MEMS technique as shown in a kind of Figs. 1-4 The utility model discloses a pressure sensor based on MEMS technique, including fixed frame 1 and the bottom plate 3 of fixed installation in the bottom of fixed frame 1, be equipped with detection subassembly and dismounting subassembly on fixed frame 1;Detection subassembly includes the support frame 14 of fixed installation in the top of fixed frame 1, the top of support frame 14 is fixedly connected with movable frame 16, and movable frame 16 and support frame 14 are clamped fixed with film 15, the top of fixed frame 1 is slidably installed with movable cover 5, movable cover 5 extends to the periphery of fixed frame 1, the inboard of movable cover 5 is fixedly connected with support block 18, and the bottom of support block 18 is combined with film 15, and the bottom of film 15 is fixedly installed with inductance coil 17, the top of bottom plate 3 is fixedly connected with fixed capacitor 11, and fixed capacitor 11 is located inboard of fixed frame 1, and inductance coil 17 is fixedly connected with fixed capacitor 11, the top of bottom plate 3 is fixedly installed with battery 12, and battery 12 is located one side of fixed capacitor 11 and is electrically connected with fixed capacitor 11;Dismounting subassembly includes the multiple fixed column 20 of fixed installation in the top of support frame 14, and multiple fixed column 20 all are through film 15 and extend to movable frame 16 inside, and movable frame 16 and multiple fixed column 20 are fixedly connected respectively through a second fixed bolt 24 between, and both sides of movable cover 5 are provided with two sliding grooves 6 respectively, and the both sides of fixed frame 1 are fixedly connected with two support sleeves 8 through first fixed bolt 9 respectively, and each support sleeve 8 is located one sliding groove 6 inboard and is slidably connected with sliding groove 6;

[0024] Bottom plate 3 and fixed frame 1 are fixedly connected through multiple support seats 2, and multiple support pads 4 are fixedly installed on the bottom of bottom plate 3;

[0025] The top of movable cover 5 is fixedly connected with limiting frame 7, and the top of fixed frame 1 is fixedly installed with guide frame 10, and guide frame 10 is located the periphery of support frame 14;

[0026] The side of fixed frame 1 is fixedly installed with charging seat 13, and charging seat 13 is electrically connected with battery 12;

[0027] The bottom of support block 18 is fixedly installed with protective pad 19, and support block 18 and film 15 are combined through protective pad 19 between, and the inboard of each fixed column 20 is provided with threaded hole 21, and each second fixed bolt 24 is threadedly connected with a threaded hole 21;

[0028] The inboard of film 15 is provided with multiple fixed holes 22, and each fixed column 20 is through a fixed hole 22 and penetrates film 15, and the bottom of movable frame 16 is provided with multiple movable slots 23, and each fixed column 20 extends to one movable slot 23 inboard.

[0029] The working principle of the MEMS technology-based pressure sensor based on the embodiment is that: by sliding the supporting sleeve 8 up and down along the sliding groove 6, the movable cover 5 can be conveniently slid up and down; by driving the movable cover 5 to move downward, the supporting block 18 is synchronously driven to move downward; by pushing the diaphragm 15 downward by the supporting block 18, the diaphragm 15 is deformed, and the inductor coil 17 is synchronously deformed, so that the inductance value of the inductor coil 17 changes; the inductance value of the inductor coil 17 is measured by the LC circuit composed of the fixed capacitor 11 and the inductor coil 17, so that the corresponding pressure value is obtained, and the pressure value is deduced, so that the pressure value is more accurately deduced;

[0030] By removing the first fixing bolt 9, the supporting sleeve 8 can be conveniently taken out of the sliding groove 6, the movable cover 5 can be conveniently disassembled upward, then the second fixing bolt 24 is unscrewed, the movable frame 16 can be pulled out upward, and the diaphragm 15 can be taken out upward, so that maintenance can be conveniently performed.

[0031] By sleeving the diaphragm 15 outside the plurality of fixing columns 20, the fixing columns 20 can be used to support and open the diaphragm 15, then the movable frame 16 is sleeved outside the plurality of fixing columns 20, the movable frame 16 and the fixing columns 20 are fixed by the second fixing bolt 24, the movable frame 16 can be driven to move downward, and the diaphragm 15 can be clamped and fixed in cooperation with the supporting frame 14, so that disassembly and maintenance can be conveniently performed.

[0032] The above specific embodiments are only several preferred embodiments of the utility model, based on the technical scheme of the utility model and the related inspiration of the above embodiments, the person skilled in the art can make various alternative improvements and combinations on the above specific embodiments.

Claims

1. A pressure sensor based on MEMS technology, comprising a fixed frame (1) and a bottom plate (3) fixedly installed at the bottom of the fixed frame (1), characterized in that: The fixed frame (1) is provided with a detection assembly and a disassembly assembly; The detection assembly comprises a support frame (14) fixedly installed on the top of the fixed frame (1), the top of the support frame (14) is fixedly connected with a movable frame (16), the movable frame (16) and the support frame (14) are clamped and fixed with a film (15), the top of the fixed frame (1) is slidably installed with a movable cover (5), the movable cover (5) extends to the periphery of the fixed frame (1), the inner side of the movable cover (5) is fixedly connected with a support block (18), the bottom of the support block (18) is attached to the film (15), the bottom of the film (15) is fixedly installed with an inductor coil (17), the top of the bottom plate (3) is fixedly connected with a fixed capacitor (11), the fixed capacitor (11) is located on the inner side of the fixed frame (1), the inductor coil (17) is fixedly connected with the fixed capacitor (11), the top of the bottom plate (3) is fixedly installed with a storage battery (12), the storage battery (12) is located on one side of the fixed capacitor (11) and is electrically connected with the fixed capacitor (11); The disassembly assembly comprises a plurality of fixed columns (20) fixedly installed on the top of the support frame (14), the plurality of fixed columns (20) all penetrate through the film (15) and extend to the inside of the movable frame (16), the movable frame (16) and the plurality of fixed columns (20) are fixedly connected through a second fixed bolt (24) respectively, the two sides of the movable cover (5) are respectively provided with two sliding grooves (6), the two sides of the fixed frame (1) are respectively fixedly connected with two support sleeves (8) through a first fixed bolt (9), each support sleeve (8) is located on the inner side of a sliding groove (6) and is slidably connected with the sliding groove (6).

2. The pressure sensor based on MEMS technology according to claim 1, characterized in that: The bottom plate (3) and the fixed frame (1) are fixedly connected through a plurality of support seats (2), the bottom of the bottom plate (3) is fixedly installed with a plurality of support pads (4).

3. The pressure sensor based on MEMS technology according to claim 1, characterized in that: The top of the movable cover (5) is fixedly connected with a limiting frame (7), the top of the fixed frame (1) is fixedly installed with a guide frame (10), and the guide frame (10) is located on the periphery of the support frame (14).

4. The pressure sensor based on MEMS technology according to claim 1, characterized in that: One side of the fixed frame (1) is fixedly installed with a charging seat (13), and the charging seat (13) is electrically connected with the storage battery (12).

5. The pressure sensor based on MEMS technology according to claim 1, characterized in that: The bottom of the support block (18) is fixedly installed with a protective pad (19), the support block (18) and the film (15) are attached through the protective pad (19), the inner side of each fixed column (20) is provided with a threaded hole (21), and each second fixed bolt (24) is threadedly connected with a threaded hole (21).

6. The pressure sensor based on MEMS technology according to claim 1, characterized in that: The inner side of the film (15) is provided with a plurality of fixed holes (22), each fixed column (20) penetrates through the film (15) through a fixed hole (22), and the bottom of the movable frame (16) is provided with a plurality of movable grooves (23), each fixed column (20) extends to the inner side of a movable groove (23).

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