Photoresist filling head mechanism

Abstract

The utility model relates to the field of filling heads, in particular to a photoresist filling head mechanism which comprises a shell, and a connecting plate is arranged on the shell. The filling gun head support is arranged on the inner wall of the shell, a positive pressure cavity is formed in the upper end face of the filling gun head support, a through hole is vertically formed in the bottom of the positive pressure cavity, a threaded hole is formed in the bottom face of the filling gun head support, a transverse nitrogen channel communicated with the through hole is arranged on the filling gun head support, and an elbow is arranged on the nitrogen channel; the end cover is arranged at the top of the filling gun head support, and barrels are arranged at the upper and lower ends of the end cover; the back-suction valve is arranged on the shell, and the bottom of the back-suction valve is communicated with the barrel at the top of the end cover; the inner pipe penetrates through the through hole and the top is connected with the cylinder at the bottom of the end cover; the top of the outer pipe is provided with a threaded section, and the outer pipe is sleeved outside the inner pipe. According to the nitrogen filling device, the nitrogen pipeline and the filling pipeline are independently separated, the inlet point of nitrogen is higher than the filling muzzle, positive pressure is generated when nitrogen is supplemented, and liquid is prevented from reversely flowing into the nitrogen pipeline.

Description

Technical Field

[0001] This utility model relates to the field of filling heads, and more particularly to a photoresist filling head mechanism. Background Technology

[0002] Photoresist is a photosensitive organic material with high resolution and high precision, which is widely used in microelectronics manufacturing and optical technology. After the photoresist production is completed, it needs to be packaged.

[0003] Previously, the pre-filling process involved the filling head lowering to the bottom of the bottle to purge air with nitrogen. After 5 seconds of purging, filling would begin, with nitrogen forming a protective curtain at the filling port while the filling head slowly rose with the liquid level. However, after filling, the back-suction valve sucked up any remaining liquid. Because the system wasn't independent, replenishing nitrogen could cause residual liquid to be backflowed into the bottle, potentially generating air bubbles or affecting the actual weighing accuracy. Utility Model Content

[0004] The purpose of this invention is to address the problem in the prior art where the nitrogen pipeline and the filling pipeline are connected in series. When nitrogen is added, residual liquid is backflush into the bottle, which may cause the formation of bubbles or affect the actual weighing. This invention proposes a photoresist filling head mechanism.

[0005] The technical solution of this utility model: a photoresist filling head mechanism, including a housing, a connecting plate disposed on the housing; and further including:

[0006] A filling nozzle support is installed on the inner wall of the outer shell. A positive pressure chamber is opened on the upper end of the filling nozzle support facing downward. A through hole is vertically provided at the bottom of the positive pressure chamber. A threaded hole is opened on the bottom surface of the filling nozzle support facing upward. The threaded hole communicates with the through hole. A nitrogen channel is provided on the filling nozzle support, which is horizontal and communicates with the through hole. An elbow is provided on the nitrogen channel.

[0007] End caps are installed on the top of the filling gun head support and seal the positive pressure chamber. Both the upper and lower ends of the end caps are equipped with cylinders.

[0008] A back suction valve is installed on the outer casing, and the bottom of the back suction valve is connected to the cylinder at the top of the end cap;

[0009] The inner tube passes through the through hole and its top is connected to the bottom of the end cap. The outer diameter of the inner tube is smaller than the diameter of the through hole.

[0010] The outer tube has a threaded section at its top, which is connected to a threaded hole. The outer tube is fitted over the inner tube.

[0011] Preferably, a triangular support plate is provided inside the outer shell, and a vertical mounting surface is milled out on the outer wall of the filling gun head support. Four threaded holes are provided on the mounting surface, and the triangular support plate and the mounting surface are connected by four bolts.

[0012] Preferably, multiple bolt fixing holes are evenly arranged on the end cap along the circumferential direction, and the end cap and the top of the filling gun head support are connected by multiple bolts.

[0013] Preferably, an annular groove is provided at the bottom of the end cap and at the top of the filling gun head support, and a sealing ring is placed in the annular groove.

[0014] Preferably, the bottom of the end cap is provided with a downwardly protruding sealing surface, and the top edge of the positive pressure chamber is provided with an annular groove, with the sealing surface pressing against the bottom surface of the annular groove.

[0015] Preferably, the outer diameter of the bottom section of the outer tube gradually decreases.

[0016] Preferably, the inner tube is made of PFA tubing, and the outer tube, filling nozzle support, and end cap are all machined from PTFE rod stock. The nitrogen channel has internal threads on its inner circumferential surface near the outer end, and the elbow is connected to the internal thread.

[0017] Compared with the prior art, this utility model has the following beneficial technical effects: the filling liquid is injected into the container through the back suction valve, end cap and inner tube. After filling, the back suction valve draws back to prevent the liquid in the inner tube from dripping. Nitrogen gas is injected into the nitrogen channel, entering the through hole and positive pressure chamber. Simultaneously, nitrogen gas can also be blown out through the gap between the inner and outer tubes. Furthermore, the nitrogen entry point is higher than the filling nozzle, and the replenishment of nitrogen is also under positive pressure, thus preventing liquid from flowing back into the nitrogen pipeline. Attached Figure Description

[0018] Figure 1 This is a schematic diagram of the structure of one embodiment of the present utility model;

[0019] Figure 2 for Figure 1 Schematic diagram of the internal structure of the inner and outer shells;

[0020] Figure 3 for Figure 2 Exploded view;

[0021] Figure 4 for Figure 3 Enlarged diagram of point A in the diagram;

[0022] Figure 5 This is a schematic diagram of the end cap structure.

[0023] Reference numerals: 1. Outer shell; 2. Connecting plate; 3. Triangular support plate; 4. Back suction valve; 5. Filling nozzle support; 6. End cap; 7. Bolt fixing hole; 8. Annular groove; 9. Sealing surface; 10. Cylinder; 11. Mounting surface; 12. Sealing ring; 13. Positive pressure chamber; 14. Through hole; 15. Inner tube; 16. Threaded hole; 17. Outer tube; 18. Threaded section; 19. Elbow; 20. Nitrogen passage. Detailed Implementation

[0024] Example 1

[0025] like Figures 1-4 As shown, the photoresist filling head mechanism proposed in this utility model includes a housing 1, on which a connecting plate 2 is disposed; and further includes:

[0026] A filling nozzle support 5 is set on the inner wall of the outer shell 1. A positive pressure chamber 13 is opened on the upper end of the filling nozzle support 5 facing downward. A through hole 14 is vertically set at the bottom of the positive pressure chamber 13. A threaded hole 16 is opened on the bottom surface of the filling nozzle support 5 facing upward. The threaded hole 16 communicates with the through hole 14. Under vertical projection, the through hole 14 is located inside the threaded hole 16. The through hole 14 and the threaded hole 16 are coaxial. A nitrogen channel 20 is provided on the filling nozzle support 5, which is transverse and communicates with the through hole 14. An elbow 19 is provided on the nitrogen channel 20, which is used to introduce nitrogen.

[0027] End cap 6 is set on top of filling gun head support 5 and seals positive pressure chamber 13. Both ends of end cap 6 are provided with cylinder 10. End cap 6 is penetrated by φ6.5 through hole for the flow of chemical liquid.

[0028] A back suction valve 4 is installed on the outer shell 1, and the bottom of the back suction valve 4 is connected to the cylinder 10 at the top of the end cover 6;

[0029] The inner tube 15 passes through the through hole 14 and its top is connected to the bottom of the end cap 6 of the cylinder 10. The outer diameter of the inner tube 15 is smaller than the diameter of the through hole 14.

[0030] And the outer tube 17, which has a threaded section 18 at its top. The threaded section 18 is connected to the threaded hole 16. The outer tube 17 is sleeved on the outside of the inner tube 15.

[0031] Example 2

[0032] like Figures 1-5 As shown, this utility model proposes a photoresist filling head mechanism, which, compared with Embodiment 1, details the structural details.

[0033] A triangular support plate 3 is installed inside the outer casing 1. A vertical mounting surface 11 is milled on the outer wall of the filling nozzle support 5, and four threaded holes are provided on the mounting surface 11. The triangular support plate 3 and the mounting surface 11 are connected by four bolts. Multiple bolt fixing holes 7 are evenly provided on the end cap 6 along the circumferential direction. The end cap 6 and the top of the filling nozzle support 5 are connected by multiple bolts. Annular grooves 8 are provided at the bottom of the end cap 6 and the top of the filling nozzle support 5. A sealing ring 12 is placed in the annular groove 8 to stably seal the positive pressure chamber 13 and prevent nitrogen leakage. The sealing ring 12 is made of Teflon and has an inner diameter of 60 mm and a wire diameter of 5 mm. A downwardly protruding sealing surface 9 is provided at the bottom of the end cap, and an annular groove is provided at the top edge of the positive pressure chamber 13. The sealing surface 9 presses against the bottom surface of the annular groove to achieve a mechanical seal. The outer diameter of the bottom section of the outer tube 17 gradually decreases, making the transition smoother. The inner tube 15 is a PFA tube, and the outer tube 17, the filling gun head support 5 and the end cap 6 are all machined from PTFE rods. The inner circumferential surface of the nitrogen channel 20 near the outer end is provided with internal threads, and the elbow 19 is connected to the internal thread.

[0034] In summary, during use, the liquid is injected into the container through the back suction valve 4, end cap 6, and inner tube 15. After filling, the back suction valve 4 draws back to prevent liquid from dripping from the inner tube 15. Nitrogen is injected into the nitrogen channel 20, entering the through hole 14 and the positive pressure chamber 13. Simultaneously, nitrogen can also be blown out through the gap between the inner tube 15 and the outer tube 17. Furthermore, the nitrogen entry point is higher than the filling nozzle, and the replenishment of nitrogen is also under positive pressure, thus preventing liquid from flowing back into the nitrogen pipeline.

[0035] The embodiments of the present invention have been described in detail above with reference to the accompanying drawings. However, the present invention is not limited thereto. Various changes can be made within the scope of knowledge possessed by those skilled in the art without departing from the spirit of the present invention.

Claims

1. A photoresist filling head mechanism, comprising a housing (1) and a connecting plate (2) disposed on the housing (1); characterized in that, Also includes: A filling gun head support (5) is set on the inner wall of the outer shell (1). A positive pressure chamber (13) is opened on the upper end of the filling gun head support (5) facing downward. A through hole (14) is vertically set at the bottom of the positive pressure chamber (13). A threaded hole (16) is opened on the bottom surface of the filling gun head support (5) facing upward. The threaded hole (16) communicates with the through hole (14). A nitrogen channel (20) is provided on the filling gun head support (5) and is transverse and communicates with the through hole (14). An elbow (19) is provided on the nitrogen channel (20). End cap (6) is set on top of filling gun head support (5) and seals positive pressure chamber (13). Both ends of end cap (6) are provided with cylinder (10). A back suction valve (4) is installed on the outer shell (1), and the bottom of the back suction valve (4) is connected to the cylinder (10) at the top of the end cap (6); The inner tube (15) passes through the through hole (14) and its top is connected to the bottom of the cylinder (10) of the end cap (6). The outer diameter of the inner tube (15) is smaller than the diameter of the through hole (14). And an outer tube (17), with a threaded section (18) at its top, the threaded section (18) and the threaded hole (16) are connected together, and the outer tube (17) is sleeved outside the inner tube (15).

2. The photoresist filling head mechanism according to claim 1, characterized in that, A triangular support plate (3) is provided inside the outer shell (1). A vertical mounting surface (11) is milled out on the outer wall of the filling gun head support (5). Four threaded holes are provided on the mounting surface (11). The triangular support plate (3) and the mounting surface (11) are connected by four bolts.

3. The photoresist filling head mechanism according to claim 1, characterized in that, Multiple bolt fixing holes (7) are evenly arranged along the circumference of the end cap (6), and the top of the end cap (6) and the filling gun head support (5) are connected by multiple bolts.

4. The photoresist filling head mechanism according to claim 1, characterized in that, An annular groove (8) is provided at the bottom of the end cap (6) and the top of the filling gun head support (5), and a sealing ring (12) is placed in the annular groove (8).

5. The photoresist filling head mechanism according to claim 1, characterized in that, The end cap has a downward protruding sealing surface (9) at the bottom, and the positive pressure chamber (13) has an annular groove at the top edge, with the sealing surface (9) pressing against the bottom surface of the annular groove.

6. The photoresist filling head mechanism according to claim 1, characterized in that, The outer diameter of the bottom section of the outer tube (17) gradually decreases.

7. The photoresist filling head mechanism according to claim 1, characterized in that, The inner tube (15) is a PFA tube, and the outer tube (17), filling gun head support (5) and end cap (6) are all machined from PTFE rods. The nitrogen channel (20) has internal threads on the inner circumferential surface near the outer end, and the elbow (19) is connected to the internal thread.

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