Physical vapor deposition equipment integrated with waste gas recovery mechanism

Abstract

The utility model discloses physical vapor deposition equipment integrated with a waste gas recovery mechanism, which comprises vapor deposition equipment, the surface of the vapor deposition equipment is provided with a waste gas outlet, the waste gas outlet is connected with a communicating pipe through a flange, and the other end of the communicating pipe is connected with a waste gas treatment tower through a flange. A plurality of movable grooves are formed in the surface of the communicating pipe, movable plates are slidably mounted in the movable grooves, activated carbon filter screens are detachably mounted on the inner sides of the multiple movable plates, and metal particle filter screens are detachably mounted on the inner sides of the remaining movable plates. When the vapor deposition equipment works, waste gas can be generated, and at the moment, the waste gas enters the communicating pipe through the waste gas outlet in the surface of the vapor deposition equipment and sequentially passes through the filter screen filtering structure composed of the activated carbon filter screen and the metal particle filter screen, so that the waste gas is powerfully filtered; the waste gas is prevented from being directly discharged from vapor deposition equipment to pollute the environment.

Description

Technical Field

[0001] This utility model relates to the field of waste gas recovery technology, specifically a physical vapor deposition device that integrates a waste gas recovery mechanism. Background Technology

[0002] Physical vapor deposition (PVD) is a technique that uses physical methods under vacuum conditions to vaporize the surface of a material source (solid or liquid) into gaseous atoms or molecules, or partially ionize them into ions, and then deposits a thin film with a specific function on the substrate surface through a low-pressure gas (or plasma) process. PVD is one of the main surface treatment technologies.

[0003] Physical vapor deposition generates a large amount of harmful waste gas, which needs to be recycled and treated.

[0004] Existing physical vapor deposition (PVD) equipment typically lacks a waste gas recovery mechanism, and such mechanisms are difficult to clean or replace; therefore, they do not meet current needs. To address this, we propose a physical vapor deposition equipment with an integrated waste gas recovery mechanism. Utility Model Content

[0005] The purpose of this invention is to provide a physical vapor deposition device with an integrated waste gas recovery mechanism, in order to solve the problems mentioned in the background art, such as physical vapor deposition devices usually not having a waste gas recovery mechanism, and the waste gas recovery mechanism being difficult to clean or replace.

[0006] To achieve the above objectives, this utility model provides the following technical solution: a physical vapor deposition device integrating a waste gas recovery mechanism, comprising a vapor deposition device, wherein the surface of the vapor deposition device is provided with a waste gas outlet, the waste gas outlet is connected to a connecting pipe via a flange, the other end of the connecting pipe is connected to a waste gas treatment tower via a flange, the surface of the connecting pipe is provided with multiple movable slots, each movable slot having a movable plate slidably installed inside, wherein activated carbon filters are detachably installed on the inner side of multiple movable plates, and metal particle filters are detachably installed on the inner side of the remaining movable plates.

[0007] Preferably, two connecting rods are fixedly installed at the bottom of each movable plate, and two connecting slots are provided inside each movable groove, with the connecting rods slidingly inserted into the connecting slots.

[0008] Preferably, the outer surface of the connecting rod is provided with a limiting groove, and multiple threaded pins are movably installed on both sides of the connecting pipe. The threaded pins movably penetrate the surface of the movable groove and are engaged in the interior of the limiting groove.

[0009] Preferably, a baffle plate is fixedly installed inside the waste gas treatment tower, and the surface of the baffle plate is provided with multiple filter tubes.

[0010] Preferably, the bottom of the exhaust gas treatment tower is provided with a water storage tank, and the interior of the exhaust gas treatment tower and the interior of the water storage tank are connected in a continuous manner. The interior of the water storage tank is provided with a water pump, and the output end of the water pump is detachably connected to a water supply pipe. The water supply pipe is divided into two sections and inserted into the interior of the exhaust gas treatment tower. Multiple spray heads are installed on the surface of the water supply pipe inside the exhaust gas treatment tower by bolts.

[0011] Preferably, a demister is provided between the two sections of the water supply pipe, the demister is fixedly connected to the inner wall of the exhaust gas treatment tower, and a rain shield is fixedly installed at the top of the exhaust gas treatment tower.

[0012] Compared with the prior art, the beneficial effects of this utility model are:

[0013] 1. This utility model, through the combination of activated carbon filter and metal particle filter, enables the device to effectively filter the waste gas generated when the vapor deposition equipment is working. At this time, the waste gas will enter the interior of the connecting pipe through the waste gas outlet on the surface of the vapor deposition equipment, and pass through the filter structure composed of activated carbon filter and metal particle filter in sequence, thereby preventing the waste gas from being directly discharged from the vapor deposition equipment and polluting the environment.

[0014] 2. This utility model, through the cooperation of the movable plate and the handle, allows for the replacement or cleaning of the activated carbon filter and the metal particle filter. First, the operation of the vapor deposition equipment is stopped to prevent exhaust gas from escaping. Then, the movable plate can be pulled upwards from the surface of the connecting pipe to remove the activated carbon filter and the metal particle filter. At this point, the activated carbon filter and the metal particle filter can be cleaned or replaced. Afterwards, the movable plate is reinserted into the surface of the connecting pipe. The connecting rod will then be inserted into the connecting groove to position the movable plate. Threaded pins can then be inserted from both sides of the connecting pipe into the limiting groove to limit the connecting rod, preventing the movable plate from loosening during operation and thus avoiding exhaust gas leakage from the gap between the movable plate and the connecting pipe. This maintains the stability of the movable plate. Attached Figure Description

[0015] Figure 1 This is a schematic diagram of the overall structure of this utility model;

[0016] Figure 2 This is a cross-sectional front view of the entire utility model;

[0017] Figure 3 This is a cross-sectional side view of the entire utility model;

[0018] Figure 4 This utility model Figure 3 A partial structural diagram of part A in the middle.

[0019] In the diagram: 1. Vapor deposition equipment; 2. Connecting pipe; 3. Waste gas treatment tower; 4. Water storage tank; 5. Rain shield; 6. Water supply pipe; 7. Spray head; 8. Demister; 9. Barrier plate; 10. Filter pipe; 11. Movable plate; 12. Activated carbon filter screen; 13. Metal particle filter screen; 14. Handle; 15. Connecting rod; 16. Connecting groove; 17. Limiting groove; 18. Threaded pin. Detailed Implementation

[0020] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments of the present utility model. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments.

[0021] Please see Figures 1 to 4 One embodiment of this utility model is a physical vapor deposition device with an integrated waste gas recovery mechanism, comprising a vapor deposition device 1, a waste gas outlet on the surface of the vapor deposition device 1, a connecting pipe 2 connected to the waste gas outlet via a flange, a waste gas treatment tower 3 connected to the other end of the connecting pipe 2 via a flange, a plurality of movable slots on the surface of the connecting pipe 2, and movable plates 11 slidably installed inside the movable slots, wherein activated carbon filters 12 are detachably installed on the inner side of a plurality of movable plates 11, and metal particle filters 13 are detachably installed on the inner side of the remaining movable plates 11.

[0022] By combining the activated carbon filter 12 and the metal particle filter 13, when the vapor deposition equipment 1 is in operation, waste gas is generated. At this time, the waste gas enters the interior of the connecting pipe 2 through the waste gas outlet on the surface of the vapor deposition equipment 1, and passes through the filter structure composed of the activated carbon filter 12 and the metal particle filter 13 in sequence, thereby effectively filtering the waste gas and preventing the waste gas from being directly discharged from the vapor deposition equipment 1 and polluting the environment.

[0023] Two connecting rods 15 are fixedly installed at the bottom of each movable plate 11, and two connecting slots 16 are provided inside each movable slot. The connecting rods 15 are slidably inserted into the inside of the connecting slots 16.

[0024] The outer surface of the connecting rod 15 is provided with a limiting groove 17, and multiple threaded pins 18 are movably installed on both sides of the connecting pipe 2. The threaded pins 18 movably penetrate the surface of the movable groove and are inserted into the interior of the limiting groove 17.

[0025] With the cooperation of the movable plate 11 and the handle 14, when it is necessary to replace or clean the activated carbon filter 12 and the metal particle filter 13, first stop the operation of the vapor deposition equipment 1 to prevent the exhaust gas from being discharged. Then, the movable plate 11 can be pulled upward from the surface of the connecting pipe 2 to remove the activated carbon filter 12 and the metal particle filter 13. At this time, the activated carbon filter 12 and the metal particle filter 13 can be cleaned or replaced. Then, the movable plate 11 is reinserted into the surface of the connecting pipe 2. At this time, the connecting rod 15 will be inserted into the inside of the connecting groove 16 to position the movable plate 11. At this time, the threaded pin 18 can be inserted from both sides of the connecting pipe 2 into the inside of the limiting groove 17 to limit the connecting rod 15, so as to prevent the movable plate 11 from loosening due to shaking during the operation of the device, and thus prevent exhaust gas from leaking out from the gap between the movable plate 11 and the connecting pipe 2, thus maintaining the stability of the movable plate 11.

[0026] The interior of the exhaust gas treatment tower 3 is fixedly equipped with a baffle plate 9, and the surface of the baffle plate 9 is provided with multiple filter tubes 10.

[0027] The bottom of the exhaust gas treatment tower 3 is equipped with a water storage tank 4. The interior of the exhaust gas treatment tower 3 and the interior of the water storage tank 4 are connected. The interior of the water storage tank 4 is equipped with a water pump. The output end of the water pump is detachably connected to a water supply pipe 6. The water supply pipe 6 is divided into two sections and inserted into the interior of the exhaust gas treatment tower 3. Multiple spray heads 7 are installed on the surface of the water supply pipe 6 inside the exhaust gas treatment tower 3 by bolts.

[0028] A demister 8 is installed between the two water supply pipes 6. The demister 8 is fixedly connected to the inner wall of the exhaust gas treatment tower 3. A rain shield 5 is fixedly installed at the top of the exhaust gas treatment tower 3.

[0029] When the physical vapor deposition (PVD) equipment of this integrated waste gas recovery system is in use, waste gas is generated during the operation of the PVD equipment 1. This waste gas enters the connecting pipe 2 through the waste gas outlet on the surface of the PVD equipment 1, and then passes through a filter structure composed of an activated carbon filter 12 and a metal particle filter 13. This effectively filters the waste gas, preventing it from being directly discharged from the PVD equipment 1 and polluting the environment.

[0030] When it is necessary to replace or clean the activated carbon filter 12 and the metal particulate filter 13, first stop the operation of the vapor deposition equipment 1 to prevent the exhaust gas from being discharged. Then, the movable plate 11 can be pulled upward from the surface of the connecting pipe 2 to remove the activated carbon filter 12 and the metal particulate filter 13. At this time, the activated carbon filter 12 and the metal particulate filter 13 can be cleaned or replaced. Then, the movable plate 11 is reinserted into the surface of the connecting pipe 2. At this time, the connecting rod 15 will be inserted into the inside of the connecting groove 16 to position the movable plate 11. Then, the threaded pin 18 can be inserted from both sides of the connecting pipe 2 into the inside of the limiting groove 17 to limit the connecting rod 15, so as to prevent the movable plate 11 from loosening due to shaking during the operation of the device, and thus prevent the exhaust gas from leaking out from the gap between the movable plate 11 and the connecting pipe 2, thus maintaining the stability of the movable plate 11.

[0031] It will be apparent to those skilled in the art that this invention is not limited to the details of the exemplary embodiments described above, and that it can be implemented in other specific forms without departing from the spirit or essential characteristics of this invention. Therefore, the embodiments should be considered illustrative and non-limiting in all respects, and the scope of this invention is defined by the appended claims rather than the foregoing description. Thus, it is intended that all variations falling within the meaning and scope of equivalents of the claims be included within this invention. No reference numerals in the claims should be construed as limiting the scope of the claims.

Claims

1. A physical vapor deposition apparatus integrated with a waste gas recovery mechanism, comprising a gas phase deposition apparatus (1), characterized in that: The surface of the vapor deposition equipment (1) is provided with an exhaust gas outlet. The exhaust gas outlet is connected to a connecting pipe (2) via a flange. The other end of the connecting pipe (2) is connected to an exhaust gas treatment tower (3) via a flange. The surface of the connecting pipe (2) is provided with multiple movable slots. Movable plates (11) are slidably installed inside each movable slot. Activated carbon filters (12) can be detachably installed on the inner side of multiple movable plates (11). Metal particle filters (13) can be detachably installed on the inner side of the remaining movable plates (11).

2. The physical vapor deposition apparatus integrated with a waste gas recovery mechanism according to claim 1, characterized by: Two connecting rods (15) are fixedly installed at the bottom of each movable plate (11), and two connecting slots (16) are provided inside each movable slot. The connecting rods (15) are slidably inserted into the connecting slots (16).

3. The PVD apparatus integrated with a waste gas recovery mechanism according to claim 2, wherein: The outer surface of the connecting rod (15) is provided with a limiting groove (17), and multiple threaded pins (18) are movably installed on both sides of the connecting pipe (2). The threaded pins (18) movably penetrate the surface of the movable groove and are inserted into the interior of the limiting groove (17).

4. The PVD apparatus integrated with a waste gas recovery mechanism according to claim 1, wherein: The waste gas treatment tower (3) is fixedly installed with a baffle plate (9), and the surface of the baffle plate (9) is provided with multiple filter tubes (10).

5. The PVD apparatus integrated with a waste gas recovery mechanism according to claim 1, wherein: The bottom of the exhaust gas treatment tower (3) is provided with a water storage tank (4). The interior of the exhaust gas treatment tower (3) and the interior of the water storage tank (4) are connected in a continuous manner. The interior of the water storage tank (4) is provided with a water pump. The output end of the water pump is detachably connected to a water supply pipe (6). The water supply pipe (6) is divided into two sections and inserted into the interior of the exhaust gas treatment tower (3). Multiple spray heads (7) are installed on the surface of the water supply pipe (6) inside the exhaust gas treatment tower (3) by bolts.

6. The PVD apparatus integrated with a waste gas recovery mechanism according to claim 5, wherein: A demister (8) is provided between the two sections of the water supply pipe (6). The demister (8) is fixedly connected to the inner wall of the exhaust gas treatment tower (3). A rain shield (5) is fixedly installed at the top of the exhaust gas treatment tower (3).

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