SMIF material box facilitating butt joint installation of detection equipment

Abstract

The utility model relates to the technical field of SMIF material boxes, in particular to an SMIF material box convenient for butt joint installation of detection equipment, which comprises an SMIF material box main body, a detection device is attached to the back of the SMIF material box main body, a fastening bolt is in threaded connection between the SMIF material box main body and the detection device and penetrates through the SMIF material box main body to the inside of the detection device, and the SMIF material box main body and the detection device are in threaded connection. A butt joint mechanism is mechanically fixed to the back face of the SMIF material box body and penetrates into the detection device, and a locking mechanism is rotationally connected to the bottom end of the SMIF material box body, penetrates into the SMIF material box body and is located above the fastening bolt. According to the SMIF material box detection device, through mutual cooperation of internal parts of the butt joint mechanism, when the SMIF material box main body is close to the detection device, butt joint and attachment are conveniently completed, the SMIF material box main body is aligned with threaded holes in the surface of the detection device, connection of fastening bolts is facilitated, and through mutual cooperation of internal parts of the locking mechanism, the SMIF material box main body is conveniently pushed to move through universal wheels.

Description

Technical Field

[0001] This utility model relates to the field of SMIF material box technology, specifically to an SMIF material box that is easy to connect and install with testing equipment. Background Technology

[0002] A silicon wafer is a wafer used to fabricate silicon semiconductor circuits. It is made by dissolving high-purity polycrystalline silicon, doping it with silicon seed crystals, and then slowly pulling it out to form a cylindrical monocrystalline silicon ingot. Afterward, the silicon ingot is ground, polished, and sliced ​​to form a silicon wafer. Once the wafer is produced, its performance and quality need to be tested to determine if it is up to standard.

[0003] A search revealed an invention patent with publication number CN116825687B, which discloses a wafer cassette in-cell in-cell (SMIF) loading device suitable for 8-inch wafers. The device includes a mounting plate with a support plate mounted on its front side. By installing the support plate, the invention allows operators to place 8-inch wafers into the inner side of a wafer cassette of the corresponding size for storage. Then, a protective block moves the wafer cassette, causing it to move along with the 8-inch wafers placed inside to the top of the loading plate. The plug is then inserted into the inner side of an annular groove. Subsequently, supported by the loading plate, the operator controls a rotary cylinder to rotate a turntable at a certain angle, causing the turntable to rotate the plug along the annular groove until the plug is inserted into the inner side of the socket. This allows the plug to position the wafer cassette on the top of the loading plate through its interlocking action with the socket. The protective block uses its curvature to buffer external forces, thereby improving the protective effect of the wafer cassette on the 8-inch wafer. Therefore, this device is suitable for supporting, placing, and protecting 8-inch wafers.

[0004] While the aforementioned patent describes how the protective block can utilize its curvature to buffer external forces and thus improve the protection of 8-inch wafers, making the device suitable for supporting and protecting 8-inch wafers, existing cassettes require operators to push them close to the mounting surface of the testing device and align the threaded holes on the device's surface before securing them with bolts. However, aligning the cassette with the threaded holes on the testing device's surface is time-consuming and labor-intensive, requiring operators to adjust the position of the cassette and the testing device multiple times, significantly increasing their workload.

[0005] Therefore, it is necessary to propose an SMIF material box that is easy to connect and install with testing equipment to solve the above problems. Utility Model Content

[0006] The purpose of this invention is to provide an SMIF material box that facilitates the docking and installation of testing equipment. Through the mutual cooperation between the internal parts of the docking mechanism, the SMIF material box body can be easily docked and fitted with the testing device when they are close together, so that the threaded holes on the surface of the SMIF material box body and the testing device are aligned, which facilitates the connection of fastening bolts. This solves the problem in the prior art that aligning the material box with the threaded holes on the surface of the testing device is time-consuming and laborious, requiring the staff to make multiple adjustments to the position between the material box and the testing device, which greatly increases the workload of the staff.

[0007] To achieve the above objectives, this utility model provides the following technical solution: an SMIF material box that facilitates docking and installation of testing equipment, comprising an SMIF material box body, a testing device attached to the back of the SMIF material box body, a fastening bolt threaded between the SMIF material box body and the testing device, the fastening bolt penetrating the SMIF material box body into the interior of the testing device, a docking mechanism mechanically fixed to the back of the SMIF material box body, penetrating into the interior of the testing device, and a locking mechanism rotatably connected to the bottom of the SMIF material box body, penetrating into the interior of the SMIF material box body and located above the fastening bolt;

[0008] The docking mechanism includes docking cones, and there are multiple docking cones. The multiple docking cones are mechanically fixed to the back of the SMIF material box body and penetrate into the interior of the detection device. Multiple positioning pins are machined on the back of the SMIF material box body and are distributed in a ring around the outer surface of the docking cones.

[0009] The locking mechanism includes casters, which are rotatably connected to the bottom of the SMIF material box body via bearings.

[0010] Preferably, the locking mechanism further includes a support column, which is slidably connected to the interior of the SMIF container body and located at the top of the fastening bolt. A support spring is mechanically connected between one side of the support column and the interior of the SMIF container body. A limit rod is horizontally slidably connected inside the SMIF container body, extends through the interior of the caster wheel, and is located at the top of the support column. A telescopic spring is mechanically connected between the bottom end of the limit rod and the interior of the SMIF container body.

[0011] Preferably, the surface of the detection device is provided with a tapered groove and a docking groove that match the docking cone and the positioning pin, and the surface of the universal wheel is equipped with a braking mechanism.

[0012] Preferably, the surface of the docking cone has symmetrically distributed conical surfaces, and the length of the positioning pin is shorter than the overall length of the docking cone.

[0013] Preferably, the SMIF material box body and the detection device have multiple threaded holes on their surfaces that match the fastening bolts, the bottom end of the support column has an arc surface in contact with the fastening bolt surface, and the SMIF material box body has a support groove inside that matches the support spring.

[0014] Preferably, the top of the support column and one side of the limiting rod are provided with matching tapered surfaces, and the interior of the SMIF material box body is provided with a sliding groove that matches the limiting rod, and the top bearing surface of the universal wheel is provided with multiple locking grooves that match the limiting rod.

[0015] The technical effects and advantages provided by this utility model in the above technical solution are as follows:

[0016] 1. By pushing the SMIF material box body, the SMIF material box body slides against the surface of the testing device via the universal wheels at the bottom. At the same time, the SMIF material box body moves the docking cone closer to the conical groove on the surface of the testing device. The docking cone slides in the conical groove, so that the outer wall of the docking cone is completely in contact with the inner wall of the conical groove, completing the initial docking of the SMIF material box body and the testing device. As the SMIF material box body continues to move, the positioning pins surrounding the outer wall of the docking cone penetrate into the interior of the testing device, thus completing the docking installation of the SMIF material box body and the testing device. Finally, the connection and fixation of the SMIF material box body and the testing device are completed by tightening the bolts. This allows for quick docking installation between the SMIF material box body and the testing device, reducing the workload of workers and improving the installation efficiency of the SMIF material box body.

[0017] 2. The fastening bolts penetrate the SMIF material box body into the detection device. The fastening bolts contact the bottom end of the support column. The arc surface of the support column compresses the support column, causing the support column to compress the support spring and slide within the SMIF material box body. The top of the support column and one side of the limiting rod are provided with matching conical surfaces, and the inside of the SMIF material box body is provided with a sliding groove that matches the limiting rod. This facilitates the movement of the support column to push the limiting rod, compressing the telescopic spring and causing it to slide. The limiting rod then moves through the universal wheel, thus completing the limiting and locking of the universal wheel. Attached Figure Description

[0018] To more clearly illustrate the technical solutions in the embodiments of this application or the prior art, the drawings used in the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments recorded in this invention. For those skilled in the art, other drawings can be obtained based on these drawings.

[0019] Figure 1 This is a schematic diagram of the overall structure of this utility model;

[0020] Figure 2 This is an exploded view of the SMIF material box body and the detection device of this utility model;

[0021] Figure 3 This is a schematic diagram of the back structure of the SMIF material box body of this utility model;

[0022] Figure 4 This is a cross-sectional structural diagram of the SMIF material box body of this utility model;

[0023] Figure 5 For the present utility model Figure 3 Enlarged structural diagram at point A in the middle.

[0024] Explanation of reference numerals in the attached figures:

[0025] 1. SMIF material box body; 101. Detection device; 2. Docking mechanism; 201. Docking cone; 202. Positioning pin; 3. Locking mechanism; 301. Caster wheel; 302. Support column; 303. Support spring; 304. Limiting rod; 305. Telescopic spring; 4. Fastening bolt. Detailed Implementation

[0026] To enable those skilled in the art to better understand the technical solution of this utility model, the present utility model will be further described in detail below with reference to the accompanying drawings.

[0027] This utility model provides, for example Figure 1-5 The SMIF box shown is designed for easy installation of testing equipment. It includes an SMIF box body 1, a testing device 101 attached to the back of the SMIF box body 1, a fastening bolt 4 threadedly connected between the SMIF box body 1 and the testing device 101, which penetrates the SMIF box body 1 into the interior of the testing device 101, a docking mechanism 2 mechanically fixed to the back of the SMIF box body 1, which also penetrates into the interior of the testing device 101, and a locking mechanism 3 rotatably connected to the bottom of the SMIF box body 1, which penetrates into the interior of the SMIF box body 1 and is located above the fastening bolt 4.

[0028] The docking mechanism 2 includes a docking cone 201. There are multiple docking cones 201. The multiple docking cones 201 are mechanically fixed to the back of the SMIF material box body 1 and penetrate into the interior of the detection device 101. Multiple positioning pins 202 are machined on the back of the SMIF material box body 1 and are distributed in a ring around the outer surface of the docking cone 201.

[0029] The locking mechanism 3 includes a caster wheel 301, which is rotatably connected to the bottom end of the SMIF material box body 1 via a bearing.

[0030] The mutual cooperation between the internal parts of the docking mechanism 2 facilitates the docking and fitting of the SMIF box body 1 and the detection device 101 when they are close together, aligning the threaded holes on the surface of the SMIF box body 1 and the detection device 101, which facilitates the connection of the fastening bolts 4. The mutual cooperation between the internal parts of the locking mechanism 3 facilitates the movement of the SMIF box body 1 by the universal wheels 301.

[0031] Refer to the instruction manual appendix Figure 1-5 The locking mechanism 3 also includes a support column 302, which is slidably connected to the inside of the SMIF box body 1 and located at the top of the fastening bolt 4. A support spring 303 is mechanically connected between one side of the support column 302 and the inside of the SMIF box body 1. A limit rod 304 is horizontally slidably connected inside the SMIF box body 1 and extends through the inside of the caster wheel 301 and is located at the top of the support column 302. A telescopic spring 305 is mechanically connected between the bottom end of the limit rod 304 and the inside of the SMIF box body 1. Through the mutual cooperation between the internal parts of the locking mechanism 3, it is easy to complete the bonding connection between the SMIF box body 1 and the detection device 101 and perform multiple limit locking on the caster wheel 301.

[0032] Refer to the instruction manual appendix Figure 1-5 The surface of the detection device 101 is provided with a conical groove and a docking groove that match the docking cone 201 and the positioning pin 202. The surface of the caster wheel 301 is equipped with a braking mechanism, which facilitates locking and limiting the caster wheel 301 itself.

[0033] Refer to the instruction manual appendix Figure 1-5 The surface of the docking cone 201 is provided with symmetrically distributed conical surfaces, and the length of the positioning pin 202 is shorter than the overall length of the docking cone 201. The symmetrically distributed conical surfaces on the surface of the docking cone 201 and the shorter length of the positioning pin 202 make it easier for the docking cone 201 to slide into the detection device 101 first and complete the initial docking of the SMIF box body 1 and the detection device 101. Finally, the positioning pin 202 penetrates into the detection device 101, thus completing the docking and installation of the SMIF box body 1 and the detection device 101.

[0034] Refer to the instruction manual appendix Figure 1-5The SMIF box body 1 and the detection device 101 have multiple threaded holes that match the fastening bolts 4 on their surfaces. The bottom end of the support column 302 has an arc-shaped contact surface with the surface of the fastening bolt 4. The SMIF box body 1 has a support groove that matches the support spring 303 inside. The arc-shaped contact surface of the bottom end of the support column 302 with the surface of the fastening bolt 4 and the support groove that matches the support spring 303 inside the SMIF box body 1 facilitate the fastening bolt 4 to pass through the SMIF box body 1. The arc-shaped surface compresses the support column 302 to slide and extend within the SMIF box body 1.

[0035] Refer to the instruction manual appendix Figure 1-5 The top of the support column 302 and one side of the limiting rod 304 are provided with matching tapered surfaces, and the interior of the SMIF material box body 1 is provided with a sliding groove that matches the limiting rod 304. The top bearing surface of the universal wheel 301 is provided with multiple locking grooves that match the limiting rod 304. The fact that the top of the support column 302 and one side of the limiting rod 304 are provided with matching tapered surfaces, and the interior of the SMIF material box body 1 is provided with a sliding groove that matches the limiting rod 304, makes it easy for the support column 302 to move and push the limiting rod 304 to slide.

[0036] The working principle of this practical application is as follows:

[0037] Refer to the instruction manual appendix Figure 1-5 By pushing the SMIF box body 1, the SMIF box body 1 slides against the surface of the detection device 101 via the universal wheels 301 at the bottom. At the same time, the SMIF box body 1 drives the docking cone 201 to approach the conical groove on the surface of the detection device 101. Simultaneously, the docking cone 201 slides in the conical groove, so that the outer wall of the docking cone 201 is completely in contact with the inner wall of the conical groove, completing the initial docking of the SMIF box body 1 and the detection device 101. Meanwhile, the SMIF box body 1 continues to move, causing the positioning pin 202 surrounding the outer wall of the docking cone 201 to penetrate into the interior of the detection device 101, thus completing the docking installation of the SMIF box body 1 and the detection device 101. Finally, the connection and fixation of the SMIF box body 1 and the detection device 101 are completed by tightening the bolts 4. This completes the rapid docking installation between the SMIF box body 1 and the detection device 101, reducing the workload of workers and improving the installation efficiency of the SMIF box body 1.

[0038] Refer to the instruction manual appendix Figure 1-5The fastening bolt 4 passes through the SMIF material box body 1 to the inside of the detection device 101. The fastening bolt 4 contacts the bottom end of the support column 302. The arc surface presses the support column 302, causing the support column 302 to compress the support spring 303 and retract within the SMIF material box body 1. The top of the support column 302 and one side of the limiting rod 304 are both provided with matching conical surfaces. The inside of the SMIF material box body 1 is provided with a sliding groove that matches the limiting rod 304. This facilitates the movement of the support column 302 to push the limiting rod 304 to compress the telescopic spring 305 and retract it. This allows the limiting rod 304 to move through the universal wheel 301, thus completing the limiting and locking of the universal wheel 301.

[0039] The foregoing description only illustrates certain exemplary embodiments of the present invention. Undoubtedly, those skilled in the art can modify the described embodiments in various ways without departing from the spirit and scope of the present invention. Therefore, the above drawings and descriptions are illustrative in nature and should not be construed as limiting the scope of protection of the claims of the present invention.

Claims

1. An SMIF material box that facilitates docking and installation with testing equipment, characterized in that: The device includes an SMIF box body (1), a detection device (101) is attached to the back of the SMIF box body (1), a fastening bolt (4) is threaded between the SMIF box body (1) and the detection device (101), and the fastening bolt (4) passes through the SMIF box body (1) to the inside of the detection device (101), a docking mechanism (2) is mechanically fixed to the back of the SMIF box body (1), and passes through the inside of the detection device (101), and a locking mechanism (3) is rotatably connected to the bottom end of the SMIF box body (1), and passes through the inside of the SMIF box body (1) and is located above the fastening bolt (4); The docking mechanism (2) includes a docking cone (201), and there are multiple docking cones (201). The multiple docking cones (201) are mechanically fixed to the back of the SMIF box body (1) and penetrate into the interior of the detection device (101). Multiple positioning pins (202) are machined on the back of the SMIF box body (1) and are distributed in a ring around the outer surface of the docking cones (201). The locking mechanism (3) includes a caster wheel (301), which is rotatably connected to the bottom end of the SMIF box body (1) via a bearing.

2. The SMIF material box according to claim 1, which facilitates the docking and installation of testing equipment, is characterized in that: The locking mechanism (3) also includes a support column (302), which is slidably connected to the inside of the SMIF box body (1) and located at the top of the fastening bolt (4). A support spring (303) is mechanically connected between one side of the support column (302) and the inside of the SMIF box body (1). A limit rod (304) is horizontally slidably connected inside the SMIF box body (1) and extends through the inside of the caster wheel (301) and is located at the top of the support column (302). A telescopic spring (305) is mechanically connected between the bottom end of the limit rod (304) and the inside of the SMIF box body (1).

3. The SMIF material box according to claim 1, which facilitates the docking and installation of testing equipment, is characterized in that: The surface of the detection device (101) is provided with a tapered groove and a docking groove that match the docking cone (201) and the positioning pin (202), and the surface of the universal wheel (301) is equipped with a braking mechanism.

4. The SMIF material box according to claim 1, which facilitates the docking and installation of testing equipment, is characterized in that: The surface of the docking cone (201) is provided with symmetrically distributed conical surfaces, and the length of the positioning pin (202) is shorter than the overall length of the docking cone (201).

5. The SMIF material box according to claim 2, which facilitates the docking and installation of testing equipment, is characterized in that: The surface of the SMIF box body (1) and the detection device (101) is provided with multiple threaded holes that match the fastening bolts (4). The bottom end of the support column (302) and the contact surface with the fastening bolts (4) are set as an arc surface. The interior of the SMIF box body (1) is provided with a support groove that matches the support spring (303).

6. The SMIF material box according to claim 2, which facilitates the docking and installation of testing equipment, is characterized in that: The top of the support column (302) and one side of the limiting rod (304) are provided with matching tapered surfaces, and the interior of the SMIF material box body (1) is provided with a sliding groove that matches the limiting rod (304), and the top bearing surface of the universal wheel (301) is provided with multiple locking grooves that match the limiting rod (304).

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