A grazing incidence chi-station for x-ray testing

Abstract

A kind of grazing incidence χ table for X-ray test, including χ table base, screw cover, adjustment table base, radian base, first stepper motor, first motor sleeve, arc motor base, first bevel gear, second bevel gear, worm, first proximity switch, lifting table base, lifting table side cover plate, lifting table main body, second stepper motor, second motor sleeve, first connecting rod, first pin shaft, second connecting rod, second pin shaft, guide shaft, linear bearing, bearing cover, second proximity switch, long bolt, sample base, straight-through quick connector.The device can automatically adjust the χ value and height of sample table, so as to carry out grazing incidence test at different angles on the X-ray equipment with fixed light source and detector;The device is small in size, suitable for most X-ray equipment, convenient to carry and install.

Description

Technical Field

[0001] This utility model relates to the field of X-ray testing, specifically to a grazing incidence X-ray stage for X-ray testing. Background Technology

[0002] X-ray diffraction (XRD) is a common technique in materials research for analyzing the microstructure of materials. In testing thin film samples, grazing incidence is typically used to scan the surface structure. This involves placing the sample on a stage, striking the surface with X-rays at a very small angle, and detecting the scattered light after reflection. Changing the incident angle allows for structural characterization at different depths of the sample. Currently, conventional grazing incidence stages are simple in design, with all components fixed, making it impossible to adjust the testing angle, position, and direction. They can only be manually changed using a lifting stage, which is inconvenient for adjusting the test parameters. Improved grazing incidence stages can be moved vertically and rotated, but are only suitable for... A goniometer, in which the light source and detector are fixed to the goniometer arm during testing, can be moved to a specific angle, resulting in a small incident angle between the light source and the sample stage surface. However, this grazing incidence sample stage is not suitable for devices where the angle between the light source and detector is fixed. To overcome this deficiency, a χ-stage was designed that can adjust its own χ angle and vertical translation to perform grazing incidence experiments. This χ-stage can perform grazing incidence tests at different angles on devices with a fixed angle between the light source and detector. Utility Model Content

[0003] In view of the many shortcomings of existing conventional grazing incidence sample stages, this utility model is proposed.

[0004] Therefore, one of the objectives of this invention is to provide a grazing incidence X-ray stage for X-ray testing. This device can meet the grazing incidence testing requirements of samples on X-ray equipment with fixed light source and detector by automatically adjusting the X-ray angle and vertical position of the sample stage.

[0005] To solve the above-mentioned technical problems, according to one aspect of the present invention, the present invention provides the following technical solution:

[0006] A grazing incidence X-ray stage for X testing includes four main parts: a base assembly, an X-angle adjustment assembly, a height adjustment assembly, and a sample holder assembly.

[0007] The base assembly includes an X-ray stage base, a threaded cover, an adjustment stage base, and an arc-shaped base. The X-ray stage base is fixed to the X-ray equipment. The adjustment stage base is fixed to the X-ray stage base via the threaded cover, and the arc-shaped base is fixed to the adjustment stage base via screws. The X-angle adjustment assembly includes a first stepper motor, a first motor sleeve, an arc-shaped motor base, a first bevel gear, a second bevel gear, a worm gear, a first proximity switch, a lifting stage base, a lifting stage side cover plate, and a lifting stage body. The arc-shaped motor base is fixed to the side of the arc-shaped base via screws. The first stepper motor is fixed to the arc-shaped motor base via the first motor sleeve. The first and second bevel gears are located inside the arc-shaped motor base, transmitting the rotation of the stepper motor to the worm gear. The worm gear is fitted into the upper part of the arc-shaped base and screwed to the lifting stage base. The rotation of the worm gear can be converted into the rotation of the lifting stage base. The edge where the lifting stage base and the arc-shaped base meet is arc-shaped. The rotation of the lifting stage base will cause it to tilt slightly in the horizontal plane, thereby changing the X-angle. The lifting stage body and the lifting stage side cover plate are fixed to the lifting stage base via screws. The proximity switch is fixed to the arc-shaped motor base for precise adjustment of the x-angle. The height adjustment assembly includes a second stepper motor, a second motor sleeve, a first connecting rod, a first pin, a second connecting rod, a second pin, a guide shaft, a linear bearing, a bearing cover, a second proximity switch, and a long bolt. The second stepper motor is fixed to the side of the lifting platform body via the second motor sleeve. The guide shaft is fixed to the upper part of the lifting platform body via the linear bearing and the bearing cover. The guide shaft drives the second stepper motor through the first connecting rod, the first pin, the second connecting rod, and the second pin inside the lifting platform base, converting the rotation of the second stepper motor into the up-and-down movement of the guide shaft. The second proximity switch is fixed inside the lifting platform body for precise height adjustment. The long bolt is fixed to the side of the lifting platform body to limit the transmission range of the connecting rod. The sample holder assembly includes a sample base and a quick-connect connector. The sample base is fixed to the upper part of the guide shaft with screws, has a hollow internal structure, and a hollow upper part. The quick-connect connector is fixed to the side of the sample base for vacuuming, allowing the sample to be adsorbed onto the upper part of the sample base.

[0008] As a preferred embodiment of the grazing incidence χ stage of this utility model, the first stepper motor realizes the precise adjustment operation of the χ value of the sample stage through control software.

[0009] In a preferred embodiment of the grazing incidence X-ray stage of this invention, the second stepper motor performs precise up-and-down translation of the sample stage via control software.

[0010] Compared with existing technologies, the advantages of this invention include: the device can precisely adjust the x-angle and height of the sample stage, thereby enabling grazing incidence testing of the sample while the light source and detector are fixed; the device is compact, with an overall height of about 60 mm, and is compatible with currently available X-ray testing equipment, making it easy to carry and install. Attached Figure Description

[0011] Figure 1 A schematic diagram of the overall structure of a grazing incidence sample stage for X-ray testing provided for an embodiment of this utility model;

[0012] Figure 2 A side view of a grazing incidence sample stage for X-ray testing provided as an embodiment of this utility model;

[0013] Figure 3 A side view cross-sectional view of a grazing incidence sample stage for X-ray testing provided for an embodiment of this utility model;

[0014] Figure 4 A top view of a grazing incidence sample stage for X-ray testing, provided as an embodiment of this utility model;

[0015] Figure 5 A side view of the cross-sectional structure of a grazing incidence sample stage for X-ray testing provided as an embodiment of the present invention;

[0016] In the diagram: 11 χ-shaped platform base, 12 threaded cover, 13 adjustment platform base, 14 arc-shaped base, 21 first stepper motor, 22 first motor sleeve, 23 arc-shaped motor base, 241 first bevel gear, 242 second bevel gear, 25 worm gear, 26 first proximity switch, 27 lifting platform base, 28 lifting platform side cover, 29 lifting platform body, 31 second stepper motor, 32 second motor sleeve, 331 first connecting rod, 341 first pin, 332 second connecting rod, 342 second pin, 35 guide shaft, 36 linear bearing, 37 bearing cover, 38 second proximity switch, 39 long bolt, 41 sample base, 42 straight quick connector. Detailed Implementation

[0017] To make the above-mentioned objectives, features and advantages of this utility model more apparent and understandable, the specific embodiments of this utility model will be described in detail below with reference to the accompanying drawings.

[0018] Many specific details are set forth in the following description in order to provide a full understanding of the present invention. However, the present invention may also be implemented in other ways different from those described herein. Those skilled in the art can make similar extensions without departing from the spirit of the present invention. Therefore, the present invention is not limited to the specific embodiments disclosed below.

[0019] Secondly, this utility model is described in detail with reference to the schematic diagrams. When describing the embodiments of this utility model, for ease of explanation, the cross-sectional views showing the device structure may be partially enlarged, not according to the usual scale. Furthermore, the schematic diagrams are merely examples and should not limit the scope of protection of this utility model. In addition, in actual manufacturing, the three-dimensional spatial dimensions of length, width, and depth should be included.

[0020] To make the objectives, technical solutions, and advantages of this utility model clearer, the embodiments of this utility model will be described in further detail below with reference to the accompanying drawings.

[0021] The embodiments of this utility model provide the following technical solution: a grazing incidence X-ray stage for X-ray testing, which can automatically adjust the X-angle and height of the sample stage, so that grazing incidence tests at different incident angles can be performed on the sample while the light source and detector are fixed; the X-ray stage is small in size and can be installed on most X-ray testing equipment, making it convenient to move and test.

[0022] Figures 1-5 The overall structure, side view, and top view of the grazing incidence X-ray stage for X-ray testing provided by an embodiment of this utility model are shown. See also... Figures 1-5 The grazing incidence X-ray stage for X-ray testing provided in the embodiments of this utility model includes an X-ray stage base 11, a threaded cover 12, an adjustment stage base 13, an arc-shaped base 14, a first stepper motor 21, a first motor sleeve 22, an arc-shaped motor base 23, a first bevel gear 241, a second bevel gear 242, a worm gear 25, a first proximity switch 26, a lifting stage base 27, a lifting stage side cover plate 28, a lifting stage body 29, a second stepper motor 31, a second motor sleeve 32, a first connecting rod 331, a first pin 341, a second connecting rod 332, a second pin 342, a guide shaft 35, a linear bearing 36, a bearing cover 37, a second proximity switch 38, a long bolt 39, a sample base 41, and a straight-through quick-connect connector 42.

[0023] The X-ray stage base 11 is fixed to the sample stage of the X-ray equipment. The adjustment stage base 13 is fixed to the upper part of the X-ray stage base 11 by a threaded cap 12. The arc-shaped base 13 is fixed to the adjustment stage base 13 by screws. The arc-shaped motor base 23 is fixed to the side of the arc-shaped base 13 by screws. The first stepper motor 21 is fixed to the side of the arc-shaped motor base 23 by a first motor sleeve 22. The worm gear 25 is fitted inside the arc-shaped base 13 and drives the stepper motor through the first bevel gear 241 and the second bevel gear 242 inside the arc-shaped motor base 23. The rotation of the stepper motor drives the rotation of the worm gear; the lifting platform base 27 is located on the upper part of the arc-shaped base 13 and is screwed into the worm gear 25. The rotation of the worm gear 25 can drive the rotation of the lifting platform base 27; the contact edge between the lifting platform base 27 and the arc-shaped base 13 is arc-shaped, so the rotation of the lifting platform base 27 can be converted into the x-angle adjustment of the sample stage; the first proximity switch 26 is fixed to the side of the arc-shaped motor base, making the x-angle adjustment more precise; the lifting platform body 29 is a hollow structure and is fixed to the lifting platform base 27 by screws. The side is sealed with a lifting platform side plate cover 28; the second stepper motor 31 is fixed to the side of the lifting platform body 29 via a second motor sleeve 32; the guide shaft 35 is fixed to the upper part of the lifting platform body 29 via a linear bearing 36 and a bearing cover 37; the second stepper motor 31 is connected to the guide shaft 35 inside the lifting platform body 29 via a first connecting rod 331, a first pin 341, a second connecting rod 332, and a second pin 342, and the rotation of the second stepper motor 31 can be converted into the up-and-down translation of the guide shaft 35; the second proximity switch 38 is fixed to... The curved side of the motor base allows for more precise height adjustment; the long bolt 39 is fixed to the side of the lifting platform body 29 and fits against the first connecting rod 331 inside to prevent excessive transmission; the sample base 41 is fixed to the upper end of the guide shaft 35 by screws, and has a hollow internal structure with a hole structure at the top that communicates with the outside; a straight quick connector 42 is fixed to the side of the sample base 41, which can be connected to a vacuum device to achieve a vacuum inside the sample base 41, thereby allowing the silicon wafer with the sample to be adsorbed onto the upper end of the sample base 41.

[0024] The sample base 41 is fixed to the upper end of the guide shaft 35. It has a hollow structure inside and a hole-like structure at the top, so that the inside can be evacuated through the quick-connect connector 42, allowing the sample to be firmly adsorbed on the upper part of the sample base 41.

[0025] Combination Figures 1-5 The working principle of the grazing incidence sample stage provided in the embodiments of this utility model is as follows:

[0026] (1) First, place the silicon wafer loaded with the sample on the upper part of the sample base 41, and evacuate the sample base 41 through the quick-connect connector 42 so that the silicon wafer is adsorbed and fixed on the table.

[0027] (2) The entire sample stage is moved up and down by controlling the motor through the height adjustment component to find a suitable grazing incidence angle;

[0028] (3) The X-angle of the sample stage is adjusted by controlling the motor through the X-value adjustment component, so that the X-rays of the light source can be received by the detector through the scattered light after grazing incident on the sample.

[0029] (4) By changing the height and χ value, different grazing incidence angles can be tested.

[0030] Although the present invention has been described above with reference to embodiments, various modifications can be made and components can be replaced with equivalents without departing from the scope of the present invention. In particular, as long as there is no structural conflict, the features in the embodiments disclosed in this invention can be combined with each other in any way. The lack of an exhaustive description of these combinations in this specification is merely for the sake of brevity and resource conservation. Therefore, the present invention is not limited to the specific embodiments disclosed herein, but includes all technical solutions falling within the scope of the claims.

Claims

1. A grazing incidence X-ray stage for X-ray testing, characterized in that, The grazing incidence X-ray stage for X-ray testing includes a stage base (11), a threaded cover (12), an adjustment stage base (13), an arc-shaped base (14), a first stepper motor (21), a first motor sleeve (22), an arc-shaped motor base (23), a first bevel gear (241), a second bevel gear (242), a worm gear (25), a first proximity switch (26), a lifting stage base (27), a lifting stage side cover plate (28), a lifting stage body (29), a second stepper motor (31), a second motor sleeve (32), a first connecting rod (331), a first pin (341), a second connecting rod (332), a second pin (342), a guide shaft (35), a linear bearing (36), a bearing cover (37), a second proximity switch (38), a long bolt (39), a sample base (41), and a straight-through quick-connect connector (42).

2. The grazing incidence X-ray stage for X-ray testing according to claim 1, characterized in that, The χ-stage base (11) is fixed to the X-ray testing equipment, the adjustment stage base (13) is fixed to the χ-stage base (11) by the threaded cover (12), the arc-shaped base (14) is fixed to the adjustment stage base (13), and the arc-shaped motor base (23) is fixed to the arc-shaped base (14).

3. The grazing incidence X-ray stage for X-ray testing according to claim 2, characterized in that, The first stepper motor (21) is fixed to the side of the arc-shaped motor base (23) through the first motor sleeve (22). The worm (25) is driven to rotate through the transmission of the first bevel gear (241) and the second bevel gear (242). The rotation of the worm (25) drives the rotation of the lifting platform base (27), thereby realizing the adjustment of the χ value.

4. The grazing incidence X-ray stage for X-ray testing according to claim 3, characterized in that, The main body (29) of the lifting platform is fixed to the upper part of the lifting platform base (27), and the side is sealed by the lifting platform side cover plate (28). The second stepper motor (31) is fixed to the side of the lifting platform base (27) through the second motor sleeve (32). The guide shaft (35) is fixed to the upper part of the lifting platform base (27) through the linear bearing (36) and the bearing cover (37). The second stepper motor (31) and the guide shaft (35) are connected through the first connecting rod (331), the first pin (341), the second connecting rod (332) and the second pin (342) inside the lifting platform main body (29), so that the rotation of the second stepper motor (31) is converted into the vertical displacement of the guide shaft (35) to achieve height adjustment. The long bolt (39) can limit the excessive rotation of the first connecting rod (331).

5. The grazing incidence X-ray stage for X-ray testing according to claim 4, characterized in that, The sample base (41) is fixed to the upper end of the guide shaft (35). The interior is hollow and the upper part is a hole-like structure, so that the interior can be evacuated through the quick-connect connector (42) to allow the sample to be firmly adsorbed on the upper part of the sample base (41).

6. The grazing incidence X-ray stage for X-ray testing according to claim 5, characterized in that, The first proximity switch (26) and the second proximity switch (38) can achieve precise adjustment of the χ value and height.

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