Silicon carbide boat

Abstract

This utility model relates to a silicon carbide crystal boat, comprising two end plates arranged opposite each other, and a grooved bar disposed between the end plates. Each end plate is composed of region A, region B, and region C. Region A has two evenly spaced circular holes. A foolproof hole is located at the center of the lower edge of region C of one end plate. Regions B and C each have three circular holes. A handle is also provided on the outer side of region B of the end plate. The diameter of the circular holes is 20-35 mm. This silicon carbide crystal boat is a complex structural component formed integrally and then perforated. Through innovative end plate partitioning and optimized circular hole topology, thermal stress reduction is achieved, providing a core guarantee for the long lifespan and low defect rate operation of the silicon carbide crystal boat in high-temperature semiconductor processes.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor technology, specifically to silicon carbide crystal boats. Background Technology

[0002] Silicon carbide (SiC) boats are the "high-temperature backbone" of high-end manufacturing. With their excellent temperature resistance, ultra-low pollution, and long lifespan, they have become an irreplaceable core consumable in fields such as semiconductors and photovoltaics, used to stably support silicon wafers, crystal wafers, or other substrates during high-temperature and corrosive processes. However, existing SiC boats often fracture during rapid heating and cooling due to uneven local stress release. This can negatively impact production processes, product quality, equipment safety, and economic efficiency, limiting their application. For example, once a boat cracks, its structural integrity is compromised, making it unable to stably support the SiC wafer, requiring immediate cessation of the current process. Operators must stop the machine to inspect, clean up debris, replace the boat, and readjust equipment parameters (such as temperature profiles and gas flow rates), leading to extended production cycles for single batches and even disrupting the entire production line schedule. Summary of the Invention

[0003] In view of the shortcomings of the existing technology, this utility model proposes a silicon carbide crystal boat with long life and low defects.

[0004] The silicon carbide boat of this invention includes two end plates arranged opposite each other, and a grooved bar disposed between the end plates; each end plate is composed of region A, region B and region C, with two circular holes evenly formed in region A, a foolproof hole provided at the middle position of the lower edge of region C of one end plate, and three circular holes each provided in regions B and C; a handle is also provided on the outer side of region B of the end plate; the diameter of the circular holes is 20~35mm.

[0005] Furthermore, the circular holes in regions B and C of the silicon carbide crystal boat of this invention are symmetrically or asymmetrically distributed along the central axis of the end plate.

[0006] Furthermore, the silicon carbide crystal boat of this utility model has 5 slot bars, with two slot bars symmetrically arranged on the edge of the end plate near the A region, one slot bar on the edge of the end plate corresponding to the B region, and two slot bars symmetrically arranged on the edge of the end plate near the C region.

[0007] Furthermore, the cross-section of the groove bar of the silicon carbide crystal boat described in this utility model is teardrop-shaped or circular.

[0008] Furthermore, the side of the groove bar of the silicon carbide crystal boat facing away from the center of the end plate is arc-shaped, and the side of the groove bar facing the center of the end plate has multiple slots arranged side by side. The bottom of the slots is arc-shaped, and the slots are toothed.

[0009] The slot is composed of an arc-shaped bottom surface and two inclined surfaces. The angle between the inclined surfaces and the horizontal plane is 3~5°, and the width of the slot opening is greater than the width of its bottom. The depth of the slot is 1 / 5~1 / 3 of the longest dimension on the cross-section of the slot bar. The thickness of the end of the slot tooth is d, and the width of the slot opening is D, satisfying d=(0.5~0.8)D.

[0010] Furthermore, the outer side of the end plate of the silicon carbide crystal boat described in this utility model is also provided with a handle.

[0011] The beneficial effects of this utility model are:

[0012] This invention relates to a silicon carbide crystal boat, a complex structural component formed integrally with holes added later. On one hand, through innovative end-plate partitioning and optimized circular hole topology, two circular holes are symmetrically formed in area A, while three circular holes are respectively set in areas B and C, creating a gradient stress release. On the other hand, the diameter of each circular hole is strictly controlled within the range of 20-35mm, ensuring sufficient thermal expansion buffer space while avoiding excessive weakening of mechanical strength. Furthermore, the anti-foolproof hole design at the lower edge of area C simultaneously achieves the dual functions of assembly error prevention and stress guidance, effectively suppressing the risk of corner cracks. The silicon carbide crystal boat described in this invention significantly improves its structural reliability and service life under harsh thermal environments.

[0013] This invention also utilizes a non-uniform distribution of slot bars (two symmetrically distributed in areas A and C, and one in the center of area B) to form an optimized topology of "three-point main support + four-point auxiliary positioning." Combined with the precise geometric design of the slot bar cross-section (teardrop or circular) and the slot, this significantly improves the stability and process performance of wafer positioning. Designing the opposite sides of every two slot bars as an arc shape further enhances the wear resistance of the wafer boat, reducing surface wear during frequent use and cleaning, thereby ensuring the performance of the wafer boat and unaffected wafer placement. Attached Figure Description

[0014] Figure 1 This is a schematic diagram of the structure of the silicon carbide crystal boat described in this utility model;

[0015] Figure 2 This is a schematic diagram of the end plate of the present invention;

[0016] Figure 3 This is a partial structural schematic diagram of the grooved bar described in this utility model;

[0017] Figure 4 This is a cross-sectional view of the groove bar of the silicon carbide crystal boat described in Embodiment 1 of this utility model;

[0018] Among them: 1. End plate, 2. Handle, 3. Groove bar, 4. Slot, 5. Groove tooth, 100. Area A, 200. Area B, 300. Area C, 10. Round hole, 301. Anti-fool hole. Detailed Implementation

[0019] To make the objectives, technical solutions, and advantages of the specific embodiments of this utility model clearer, the technical solutions in the specific embodiments of this utility model will be clearly and completely described below. Where specific conditions are not specified in the specific embodiments, they shall be performed according to conventional conditions or conditions recommended by the manufacturer.

[0020] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art. The terminology used in the specification herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention. The term "and / or" as used herein includes any and all combinations of one or more of the associated listed items. Example 1:

[0021] As shown in Figures 1-4, the silicon carbide boat includes two end plates 1 arranged opposite each other and a grooved bar 3 disposed between the end plates 1. The end plate 1 is composed of region A 100, region B 200 and region C 300. Region A 100 has two evenly spaced circular holes 10. The lower edge of region C 300 of one end plate 1 is provided with a foolproof hole 301 at the middle position. Region B 200 and region C 300 are each provided with three circular holes 10. A handle 2 is also provided on the outer side of region B 200 of the end plate 1. The diameter of the circular holes 10 is 20-35mm.

[0022] In this embodiment 1, the diameter of the circular hole 10 is 30mm, and all the circular holes 10 are symmetrically distributed along the central axis of the end plate.

[0023] The number of grooved rods 3 is 5. Two grooved rods 3 are symmetrically arranged on the edge of the end plate 1 near the edge of area A 100, one grooved rod 3 is arranged on the edge of the end plate 1 corresponding to area B 200, and two grooved rods 3 are symmetrically arranged on the edge of the end plate 1 near the edge of area C 300. The cross-section of the grooved rod 3 is teardrop-shaped or circular. The side of the grooved rod 3 facing away from the center of the end plate is arc-shaped, and multiple slots 4 are arranged side by side on the side of the grooved rod 3 facing the center of the end plate. The bottom of the slots 4 is arc-shaped, and there are teeth 5 between the slots 4.

[0024] The slot 4 consists of an arc-shaped bottom surface and two inclined surfaces. The angle between the inclined surfaces and the horizontal plane is 3-5°. The width of the slot opening is greater than the width of its bottom, and the inclined surfaces are flat planes without any protrusions. The depth of the slot 4 is 1 / 5 to 1 / 3 of the longest dimension on the cross-section of the slotted rod 3. The thickness of the end of the slot tooth is d, and the width of the slot opening is D, satisfying d = (0.5-0.8)D. In this embodiment 1, the angle between the inclined surfaces and the horizontal plane is 4°, the depth of the slot 4 is 5.3 mm, and the width D of the slot opening is 0.17 mm.

[0025] The silicon carbide crystal boat described in this utility model is a one-piece molded design. During use, the wafers are inserted one by one into the slot 4, and then the silicon carbide crystal boat is loaded into the boat support and slowly moved along the length direction of the boat support. The wafers are constrained by the arc-shaped bottom surface of the slot 4 in the direction of movement and will not move, thereby greatly improving the operation efficiency and safety.

[0026] The embodiments described above are some, but not all, embodiments of this utility model. The detailed description of the embodiments of this utility model is not intended to limit the scope of the claimed utility model, but merely to illustrate selected embodiments of the utility model. All other embodiments obtained by those skilled in the art based on the embodiments of this utility model without inventive effort are within the scope of protection of this utility model.

Claims

1. A silicon carbide boat, comprising two end plates (1) disposed opposite to each other, and a grooved bar (3) disposed between the end plates (1); characterized in that, The end plate (1) is composed of area A (100), area B (200) and area C (300). Area A (100) has two round holes (10) evenly distributed. An anti-fool hole (301) is provided at the middle position of the lower edge of area C (300) of the end plate (1). Area B (200) and area C (300) are respectively provided with three round holes (10). A handle (2) is also provided on the outside of area B (200) of the end plate (1). The diameter of the round hole (10) is 20~35mm.

2. The silicon carbide boat according to claim 1, characterized in that: The circular holes (10) in regions B (200) and C (300) are symmetrically or asymmetrically distributed along the central axis of the end plate.

3. The silicon carbide boat according to claim 1, characterized in that: The number of grooved bars (3) is 5. Two grooved bars (3) are symmetrically arranged on the edge of the end plate (1) near the A area (100). One grooved bar (3) is arranged on the edge of the end plate (1) corresponding to the B area (200). Two grooved bars (3) are symmetrically arranged on the edge of the end plate (1) near the C area (300).

4. The silicon carbide boat according to claim 1, characterized in that: The cross-section of the grooved rod (3) is teardrop-shaped or circular.

5. The silicon carbide boat according to claim 4, characterized in that: The side of the grooved bar (3) facing away from the center of the end plate is arc-shaped, and the side of the grooved bar (3) facing the center of the end plate has multiple slots (4) arranged side by side. The bottom of the slots (4) is arc-shaped, and the slots (4) are toothed (5). The slot (4) consists of an arc-shaped bottom surface and two inclined surfaces. The angle between the inclined surfaces and the horizontal plane is 3~5°, and the width of the slot (4) is greater than the width of its bottom. The depth of the slot (4) is 1 / 5~1 / 3 of the longest dimension on the cross-section of the slot bar (3). The thickness of the end of the slot tooth (5) is d. The width of the slot (4) is D, and d=(0.5~0.8)D is satisfied.

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