An assembled active vibration isolation base for large-span precision equipment

Abstract

The utility model discloses a kind of active vibration isolation pedestal of assembly type for large-span precision equipment, including main pedestal unit, left suspension pedestal unit, right suspension pedestal unit and front suspension pedestal unit, the left suspension pedestal unit, right suspension pedestal unit and front suspension pedestal unit are all with the corresponding side surface precision assembly connection of main pedestal unit;At least one air floatation vibration isolator is equipped in the bottom of left suspension pedestal unit, right suspension pedestal unit and front suspension pedestal unit, the total number of air floatation vibration isolator located in the bottom of left suspension pedestal unit, right suspension pedestal unit and front suspension pedestal unit is greater than or equal to 4, the bottom of each air floatation vibration isolator is fixed, and the main pedestal unit is floor state when in original state, when all air floatation vibration isolator is in operating state, the main pedestal unit is suspension state.The utility model solves the manufacturing and installation and transportation problem faced by the vibration-proof pedestal of large-span precision equipment.

Description

Technical Field

[0001] This utility model relates to an assembled active vibration isolation base for large-span precision equipment, belonging to the technical field of precision equipment bases. Background Technology

[0002] As industries such as optics, semiconductors, and microelectronics enter the precision and ultra-precision stage, their requirements for vibration damping are becoming increasingly stringent. To ensure the processing accuracy and normal operation of precision equipment such as lithography machines, at least the VC-D level vibration damping standard must be met. To meet the VC-D level, the lowest-order free modal frequency (also known as the fundamental frequency or first-order natural frequency) of the base must reach above 100Hz. This frequency is directly proportional to the stiffness of the base and inversely proportional to its mass. Furthermore, for the bases of large-span (over 5 meters in length and over 3 meters in width) precision equipment (which typically weighs over 10 tons), in addition to meeting the VC-D level vibration damping requirements, they must also meet the high stiffness requirements for heavy loads, requiring the overall static stiffness of the base to be at least 3 × 10⁻⁶. 8 The current standard is N / m. To simultaneously meet the VC-D level of fretting resistance and the high stiffness requirement for heavy loads, using existing reinforced concrete foundation technology would result in an excessively heavy foundation (at least tens of tons). Combined with the weight of the precision equipment weighing over 10 tons, this could easily lead to severe overloading of the floor slab, causing damage to the floor beams and columns, affecting the floor's service life, and posing safety risks. Furthermore, such a large-span (over 5 meters in length and over 3 meters in width) and heavy (at least several tons) foundation is inconvenient for both transportation and on-site installation. Therefore, how to make the foundation for large-span precision equipment meet both the VC-D level of fretting resistance and the high stiffness requirement for heavy loads, while also achieving lightweight design and ease of transportation and on-site installation, is a pressing technical challenge that needs to be solved in this field. To date, no relevant technologies or products have been reported. Utility Model Content

[0003] In view of the above-mentioned problems and needs of the existing technology, the purpose of this utility model is to provide an assembled active vibration isolation base for large-span precision equipment that can meet the requirements of VC-D level anti-micro-vibration level and high stiffness requirements for large loads, while also achieving lightweight and easy transportation and on-site installation.

[0004] To achieve the above objectives, the present invention adopts the following technical solution:

[0005] An assembled active vibration isolation base for large-span precision equipment includes a main base unit, a left suspended base unit, a right suspended base unit, and a front suspended base unit. The left, right, and front suspended base units are all precisely assembled and connected to the corresponding sides of the main base unit. At least one air-floating vibration isolator is provided at the bottom of each of the left, right, and front suspended base units. The total number of air-floating vibration isolators at the bottom of the left, right, and front suspended base units is greater than or equal to four. The bottom of each air-floating vibration isolator is fixed. The main base unit is in a grounded state in its original state, and in a suspended state when all air-floating vibration isolators are in operation.

[0006] In a preferred embodiment, the sum of the maximum rated loads of all air-bearing vibration isolators is 1.2 to 1.5 times the total weight of the large-span precision equipment and the assembled active vibration isolation base.

[0007] In a preferred embodiment, an air-floating vibration isolator A is provided at the bottom of both the left and right suspension base units, and two air-floating vibration isolators B are provided at the bottom of both the front suspension base units. The maximum rated load of the air-floating vibration isolator A is greater than the maximum rated load of the air-floating vibration isolator B. The sum of the maximum rated loads of the two air-floating vibration isolators A and the two air-floating vibration isolators B is 1.2 to 1.5 times the total weight of the large-span precision equipment and the assembled active vibration isolation base.

[0008] In a preferred embodiment, the precision assembly connection includes the mating connection of the T-shaped guide rail and the T-shaped limiting groove, the transition fit connection of the positioning pin and the positioning pin hole, and the screw-locking connection of the bolt and the bolt hole.

[0009] In one embodiment, two T-shaped limiting grooves are vertically symmetrically provided on the connecting panels of each side where the main base unit connects to the left floating base unit, the right floating base unit, and the front floating base unit, and the upper end of the T-shaped limiting groove is an open end and the lower end is a closed end; furthermore, two T-shaped guide rails adapted to the T-shaped limiting grooves are vertically symmetrically provided on the connecting panels of each floating base where the left floating base unit, the right floating base unit, and the front floating base unit connect to the main base unit; the T-shaped guide rails are fitted into their corresponding T-shaped limiting grooves with a gap.

[0010] In a preferred embodiment, the gap value of the gap fitting connection is 0.5µm to 5µm.

[0011] In one embodiment, two symmetrical mounting slots for positioning pin fixing blocks are provided on the outer side of the connecting panels of each of the left, right, and front floating base units connected to the main base unit. A positioning pin fixing block is fixed in each mounting slot, and a first through hole for base positioning pin is provided at the center of each positioning pin fixing block. A second through hole for base positioning pin is provided on each side connecting panel of the main base unit connected to the left, right, and front floating base units, which is coaxial with the first through hole for base positioning pin. Each base positioning pin for connecting the main base unit to the left, right, and front floating base units is respectively connected to its corresponding first through hole and second through hole for transition fit.

[0012] In one embodiment, the locating pin fixing block and its corresponding locating pin fixing block mounting groove are detachably connected.

[0013] In one embodiment, the positioning pin fixing block and its corresponding positioning pin fixing block mounting groove are detachably fixedly connected by an axial locking screw.

[0014] In one embodiment, the axial locking screw is a stepped screw, comprising a screw head, a cylindrical section of the shaft, and a threaded section of the shaft.

[0015] In a preferred embodiment, the diameter of the cylindrical section of the rod is larger than the diameter of the threaded section of the rod.

[0016] In a preferred embodiment, the locating pin fixing block is also detachably connected to its corresponding locating pin fixing block mounting groove via a fixing block locating pin.

[0017] In a preferred embodiment, set screws for circumferential positioning of the base positioning pin are symmetrically provided on both sides of the positioning pin fixing block.

[0018] In one embodiment, the connecting panels of the left, right, and front suspension base units connected to the main base unit are provided with a plurality of bolt head positioning grooves and bolt shank through holes that are symmetrically arranged vertically or horizontally. The connecting panels of the main base unit connected to the left, right, and front suspension base units are provided with bolt shank through holes that are coaxial with and of the same diameter as the corresponding bolt shank through holes. The bolt heads of the bolts used to connect the left, right, and front suspension base units to the main base unit are embedded in the corresponding bolt head positioning grooves, and the bolt shank ends of the bolts protrude through the bolt shank through holes. Each bolt is threadedly connected to the corresponding bolt shank through hole and bolt shank through hole.

[0019] In a preferred embodiment, the main base unit is integrally formed by a steel internal frame and steel plates welded and fixed to its top, bottom and periphery. The left floating base unit, the right floating base unit and the front floating base unit are all integrally formed by a reinforcing frame body assembled by cross-welding of transverse metal reinforcing ribs and longitudinal metal reinforcing ribs and steel plates welded and fixed to its top, bottom and periphery.

[0020] In a preferred embodiment, the connecting panels on each side of the main base unit and the connecting panels of each suspended base are all made of thickened steel plates.

[0021] In a preferred embodiment, multiple reinforcing ribs are fixed at the connection points between the left and right side connecting panels of the main base unit and the top plate of the main base unit.

[0022] In a preferred embodiment, each suspended base unit has multiple reinforcing ribs fixed at the connection points between its connecting panel and its adjacent top and side panels.

[0023] In one embodiment, multiple equipment foot positioning components are fixed on the top of the main base unit, the left floating base unit, the right floating base unit, and the front floating base unit.

[0024] In one embodiment, equipment pipeline through holes are provided on the top of the main base unit, the left floating base unit, the right floating base unit, and the front floating base unit, and multiple equipment foot positioning members located on the same base unit are fixed around the corresponding equipment pipeline through holes.

[0025] In one embodiment, multiple lifting ring fasteners are embedded in the top of the main base unit, the left floating base unit, the right floating base unit, and the front floating base unit.

[0026] In one embodiment, a plurality of metal fittings for mounting equipment accessories are welded to the top and / or sides of the main base unit, the left suspension base unit, the right suspension base unit, and the front suspension base unit, and each metal fitting has a plurality of bolt holes pre-set on it.

[0027] In one embodiment, at least one drain pipe is embedded in the top of the left suspension base unit, the right suspension base unit, and the front suspension base unit.

[0028] In one embodiment, each air-floating vibration isolator is provided with a vibration isolator mounting base at its bottom. The vibration isolator mounting base includes an upper plate and a lower plate, and multiple adjusting feet are provided between the upper and lower plates. Each air-floating vibration isolator is fixedly provided with an upper fixing member and a lower fixing member. The upper fixing member is fixedly connected to the bottom of the corresponding suspension base unit by bolts, and the lower fixing member is fixedly connected to the upper plate of the corresponding vibration isolator mounting base by bolts.

[0029] In a preferred embodiment, the cup seat of each adjusting foot cup is fixedly connected to the top surface of the lower plate, the screw of each adjusting foot cup is screwed onto the upper plate, and two locking nuts are threaded onto the screw of each adjusting foot cup, with the locking nuts located below the upper plate.

[0030] In a preferred embodiment, multiple leveling feet are provided at the bottom of the main base unit.

[0031] Compared with the prior art, the beneficial technical effects of this utility model are as follows:

[0032] The prefabricated active vibration isolation base provided by this utility model can not only meet the requirements of VC-D level anti-micro-vibration level and high stiffness requirements for large loads, but also achieve lightweight and easy transportation and on-site installation. It creatively solves the manufacturing, installation and transportation problems faced by vibration isolation bases for large-span precision equipment. It is not only low in manufacturing cost and easy to industrialize, but also easy to transport and simple to install and operate. It is of great significance and significant application value for achieving stable and high-precision operation of large-span precision equipment. Attached Figure Description

[0033] Figure 1 This is a schematic diagram of a prefabricated active vibration isolation base for large-span precision equipment provided in the embodiment;

[0034] Figure 2 yes Figure 1 The diagram shown is a structural schematic of the assembled active vibration isolation base from another perspective.

[0035] Figure 3 It is a manifestation Figure 1 The diagram shows the bottom structure of the assembled active vibration isolation base;

[0036] Figure 4 This is a schematic diagram illustrating the precision assembly and connection structure between the main base unit and the suspended base unit described in the embodiment;

[0037] Figure 5 This is a schematic diagram illustrating the interlocking connection structure between the T-shaped limiting groove and the T-shaped guide rail described in the embodiment;

[0038] Figure 6 This is a schematic diagram illustrating the transition fit connection structure between the locating pin and the locating pin hole and the screw-locking connection structure between the bolt and the bolt hole as described in the embodiment.

[0039] Figure 7 This is a schematic diagram illustrating the detachable connection structure between the positioning pin fixing block and its corresponding positioning pin fixing block mounting groove in the embodiment.

[0040] Figure 8 This is a schematic diagram illustrating the axial locking screw structure and its mounting structure described in the embodiment;

[0041] Figure 9 This is a schematic diagram illustrating the mounting structure of the fixing block positioning pin described in the embodiment;

[0042] Figure 10 This is a schematic diagram illustrating the assembly structure between the set screw, the positioning pin fixing block, and the base positioning pin described in the embodiment;

[0043] Figure 11 This is a schematic diagram of the main base unit described in the embodiment;

[0044] Figure 12 yes Figure 11 The diagram shows the structure of the main base unit from another perspective.

[0045] Figure 13 It is a manifestation Figure 11 The diagram shows the bottom structure of the main base unit.

[0046] Figure 14 It is a manifestation Figure 11 A top view of the main base unit shown.

[0047] Figure 15 yes Figure 11 The diagram shown is a structural schematic of the main base unit after the top plate has been removed.

[0048] Figure 16 This is a schematic diagram of the structure of the left floating base unit described in the embodiment;

[0049] Figure 17 yes Figure 16 The diagram shows the structure of the left floating base unit from another perspective.

[0050] Figure 18 yes Figure 17 The diagram shows the structure of the left floating base unit from another perspective.

[0051] Figure 19 It is a manifestation Figure 16 A schematic diagram of the bottom structure of the left floating base unit is shown;

[0052] Figure 20 yes Figure 16 The diagram shows the structure of the left floating base unit after removing the top plate and the positioning pin fixing block;

[0053] Figure 21 This is a schematic diagram of the right floating base unit described in the embodiment;

[0054] Figure 22 yes Figure 21 The diagram shows the structure of the right floating base unit from another perspective.

[0055] Figure 23 yes Figure 22 The diagram shows the structure of the right floating base unit from another perspective.

[0056] Figure 24 It is a manifestation Figure 21 The diagram shows the bottom structure of the right floating base unit.

[0057] Figure 25 yes Figure 21 The diagram shows the structure of the right floating base unit after removing the top plate and the positioning pin fixing block;

[0058] Figure 26 This is a schematic diagram of the structure of the front suspension base unit described in the embodiment;

[0059] Figure 27 yes Figure 26 The diagram shows the structure of the front suspension base unit from another perspective.

[0060] Figure 28 yes Figure 27 The diagram shows the structure of the front suspension base unit from another perspective.

[0061] Figure 29 It is a manifestation Figure 26 A schematic diagram of the bottom structure of the front suspension base unit is shown;

[0062] Figure 30 yes Figure 26 The diagram shown is a structural schematic of the front suspension base unit after removing the top plate and the positioning pin fixing block;

[0063] Figure 31 This is a schematic diagram of the assembly structure of the air-floating vibration isolator A and the vibration isolator mounting base described in the embodiment;

[0064] Figure 32 This is a schematic diagram of the assembly structure of the air-floating vibration isolator B and the vibration isolator mounting base described in the embodiment;

[0065] The labels in the diagram are as follows:

[0066] 1. Main base unit; 1-1. Left side connecting panel; 1-1-1. T-shaped limiting groove I; 1-1-2. Second through hole I of base positioning pin; 1-1-3. Bolt rod through hole I; 1-2. Right side connecting panel; 1-2-1. T-shaped limiting groove II; 1-2-2. Second through hole II of base positioning pin; 1-2-3. Bolt rod through hole II; 1-3. Front connecting panel; 1-3-1. T-shaped limiting groove III; 1-3-2. Second through hole III of base positioning pin; 1-3-3. Bolt rod through hole III; 1-4. Steel internal frame; 1-5. Top plate; 1-6. Bottom plate; 1-7. Left front side plate; 1-8. Right front side plate; 1-9. Rear side plate; 1-10. Reinforcing rib; 1-11. Equipment leg positioning component; 1-11-1. Metal Support column; 1-11-2, Metal fixing plate; 1-11-3, Vertical metal reinforcing rib; 1-12, Equipment pipeline through hole; 1-13, Lifting ring fastener; 1-14, Metal fittings; 1-15, Leveling feet; 2, Left floating base unit; 2-1, Left connecting panel; 2-1-1, T-shaped guide rail I; 2-1-2, Positioning pin fixing block mounting groove I; 2-1-3, Positioning pin fixing block I; 2-1-31, Base positioning pin first through hole I; 2-1-4, Bolt head positioning groove I; 2-1-5, Bolt rod through hole I; 2-2, Reinforcing rib frame I; 2-2-1, Horizontal metal reinforcing rib I; 2-2-2, Longitudinal metal reinforcing rib I; 2-3, Top plate I; 2-4, Bottom plate I; 2-5, Side plate I; 2 -6. Reinforcing Rib I; 2-7. Equipment Foot Positioning Component I; 2-8. Equipment Pipeline Through Hole I; 2-9. Lifting Ring Fixing Component I; 2-10. Metal Fittings I; 2-11. Drainage Pipe I; 2-12. Air-Float Vibration Isolator Mounting Plate I; 3. Right Suspension Base Unit; 3-1. Right Connecting Panel; 3-1-1. T-Shaped Guide Rail II; 3-1-2. Positioning Pin Fixing Block Mounting Groove II; 3-1-3. Positioning Pin Fixing Block II; 3-1-31. Base Positioning Pin First Through Hole II; 3-1-4. Bolt Head Positioning Groove II; 3-1-5. Bolt Rod Through Hole II; 3-2. Reinforcing Rib Frame II; 3-2-1. Transverse Metal Reinforcing Rib II; 3-2-2. Longitudinal Metal Reinforcing Rib II; 3-3. Top Plate II; 3-4. Bottom Plate II; 3-5. Side plate II; 3-6, Reinforcing rib II; 3-7, Equipment foot positioning component II; 3-8, Equipment pipeline through hole II; 3-9, Lifting ring fixing component II; 3-10, Metal fittings II; 3-11, Drain pipe II; 3-12, Air-float vibration isolator mounting plate II; 4, Front suspension base unit; 4-1, Front connecting panel; 4-1-1, T-shaped guide rail III; 4-1-2, Positioning pin fixing block mounting groove III; 4-1-3, Positioning pin fixing block III; 4-1-31, Base positioning pin first through hole III; 4-1-4, Bolt head positioning groove III; 4-1-5, Bolt rod through hole III; 4-2, Reinforcing rib frame III; 4-2-1, Transverse metal reinforcing rib III; 4-2-2, Longitudinal metal reinforcing rib III; 4-3, Top plate III; 4-4, Bottom plate III;4-5. Side plate III; 4-6. Reinforcing rib III; 4-7. Equipment foot positioning component III; 4-8. Equipment pipeline through-hole III; 4-9. Lifting ring fastener III; 4-10. Metal fittings III; 4-11. Drain pipe III; 4-12. Air-float vibration isolator mounting plate III; 5. Air-float vibration isolator; 5a. Air-float vibration isolator A; 5b. Air-float vibration isolator B; 5-1. Upper fixing component; 5-2. Lower fixing component; 6. Base positioning. 7. Pin; 7-1. Axial locking screw; 7-2. Screw head; 7-3. Cylindrical rod section; 7-4. Threaded rod section; 8. Fixing block positioning pin; 9. Set screw; 10. Bolt; 10-1. Bolt head; 10-2. Bolt rod; 11. Vibration isolator mounting base; 11-1. Upper plate; 11-2. Lower plate; 11-3. Adjusting feet; 11-3-1. Cup holder; 11-3-2. Screw; 11-3-3. Locking nut. Detailed Implementation

[0067] The technical solution of this utility model will be further described in detail below with reference to the accompanying drawings and embodiments. Furthermore, it should be noted that the terminology used in this utility model is for the purpose of describing specific embodiments only and is not intended to limit the utility model. Unless otherwise defined, the technical or scientific terms used in this utility model should have the ordinary meaning understood by those skilled in the art. The terms "inner," "outer," "upper," "lower," "top," "bottom," "front," "rear," "left," and "right," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, and are only for the convenience of describing and simplifying the description of this utility model, and should not be construed as limiting the utility model. In addition, the terms "set," "install," "connect," "link," and "fix," etc., should be interpreted broadly. Those skilled in the art can understand the specific meaning of the above terms in this application according to the specific circumstances; the term "several" refers to one or more; the term "multiple" refers to two or more, unless otherwise explicitly defined.

[0068] Example

[0069] Please see Figures 1 to 3As shown: This embodiment provides an assembled active vibration isolation base for large-span precision equipment, including a main base unit 1, a left suspended base unit 2, a right suspended base unit 3, and a front suspended base unit 4. The left suspended base unit 2, right suspended base unit 3, and front suspended base unit 4 are all precisely assembled and connected to the corresponding sides of the main base unit 1. At least one air-floating vibration isolator 5 is provided at the bottom of each of the left suspended base unit 2, right suspended base unit 3, and front suspended base unit 4. The total number of air-floating vibration isolators 5 at the bottom of the left suspended base unit 2, right suspended base unit 3, and front suspended base unit 4 is greater than or equal to 4. The bottom of each air-floating vibration isolator 5 is fixed. The main base unit 1 is in a grounded state in its original state, and in a suspended state when all air-floating vibration isolators 5 are in operation. This application, through its inventive design, not only meets the VC-D level anti-micro-vibration requirements for the base of large-span precision equipment, but also solves the manufacturing, installation, and transportation challenges faced by the anti-vibration base of large-span precision equipment.

[0070] Please see Figure 3 As shown, in this embodiment, an air-floating vibration isolator A 5a is provided at the bottom of both the left suspension base unit 2 and the right suspension base unit 3, and two air-floating vibration isolators B 5b are provided at the bottom of both the front suspension base unit 4. The maximum rated load of the air-floating vibration isolator A 5a is greater than the maximum rated load of the air-floating vibration isolator B 5b. The sum of the maximum rated loads of the two air-floating vibration isolators A and the two air-floating vibration isolators B is 1.2 to 1.5 times the total weight of the large-span precision equipment and the assembled active vibration isolation base.

[0071] Please see again. Figure 1 , Figure 2 and Figures 4 to 6 As shown: In this embodiment, the precision assembly connection between the left floating base unit 2, the right floating base unit 3 and the front floating base unit 4 and the main base unit 1 includes the interlocking connection of the T-shaped guide rail and the T-shaped limiting groove, the transition fit connection of the positioning pin and the positioning pin hole, and the screw-locking connection of the bolt and the bolt hole.

[0072] Specifically, the solution for achieving the interlocking connection between the T-shaped guide rail and the T-shaped limiting groove in this embodiment is as follows: Please refer to [link / reference]. Figure 1 , Figure 2 , Figure 11 and Figure 12As shown, two T-shaped limiting grooves I1-1-1 are vertically symmetrically arranged on the left connecting panel 1-1 connecting the main base unit 1 and the left floating base unit 2; two T-shaped limiting grooves II1-2-1 are vertically symmetrically arranged on the right connecting panel 1-2 connecting the main base unit 1 and the right floating base unit 3; and two T-shaped limiting grooves III1-3-1 are vertically symmetrically arranged on the front connecting panel 1-3 connecting the main base unit 1 and the front floating base unit 4. The upper ends of the T-shaped limiting grooves I1-1-1, II1-2-1, and III1-3-1 are all open, and the lower ends are all closed. Additionally, please refer to... Figure 1 and Figure 16 As shown, two T-shaped guide rails I2-1-1, which are adapted to the T-shaped limiting groove I1-1-1, are vertically symmetrically provided on the left connecting panel 2-1 connecting the left floating base unit 2 and the main base unit 1; please also refer to Figure 1 and Figure 21 As shown, two T-shaped guide rails II3-1-1, which are adapted to the T-shaped limiting groove II1-2-1, are vertically symmetrically provided on the right connecting panel 3-1 connecting the right floating base unit 3 and the main base unit 1; please also refer to Figure 1 and Figure 26 As shown, two T-shaped guide rails Ⅲ4-1-1, which are adapted to the T-shaped limiting groove Ⅲ1-3-1, are vertically symmetrically provided on the front connecting panel 4-1 connecting the front suspension base unit 4 and the main base unit 1; please also refer to Figure 1 , Figure 2 , Figure 4 and Figure 5 As shown, T-shaped guide rail I2-1-1 and T-shaped limiting groove I1-1-1 are connected with a gap, T-shaped guide rail II3-1-1 and T-shaped limiting groove II1-2-1 are connected with a gap, and T-shaped guide rail III4-1-1 and T-shaped limiting groove III1-3-1 are connected with a gap. The gap value of the gap connection is preferably 0.5µm to 5µm, which can be achieved by precision machining. The specific gap value is determined according to the required assembly accuracy. This application sets T-shaped limiting groove I1-1-1 on the left connecting panel 1-1 of the main base unit 1 and T-shaped limiting groove II1-1-1 on the right connecting panel 1-2. 2-1, A T-shaped limiting groove Ⅲ1-3-1 is set on the front connecting panel 1-3, and a T-shaped guide rail Ⅰ2-1-1 adapted to the T-shaped limiting groove Ⅰ1-1-1 is set on the left connecting panel 2-1, a T-shaped guide rail Ⅱ3-1-1 adapted to the T-shaped limiting groove Ⅱ1-2-1 is set on the right connecting panel 3-1, and a T-shaped guide rail Ⅲ4-1-1 adapted to the T-shaped limiting groove Ⅲ1-3-1 is set on the front connecting panel 4-1. This not only ensures the assembly accuracy between the left floating base unit 2, the right floating base unit 3, and the front floating base unit 4 and the main base unit 1, but also makes the on-site assembly operation very simple.

[0073] Furthermore, the solution for achieving the transition fit connection between the locating pin and the locating pin hole in this embodiment is as follows: Please refer to... Figures 16 to 20 As shown, two symmetrically arranged locating pin fixing block mounting slots I2-1-2 are provided on the outer side of the left connecting panel 2-1 connecting the left floating base unit 2 and the main base unit 1. A locating pin fixing block I2-1-3 is fixedly installed in each locating pin fixing block mounting slot I2-1-2, and a base locating pin first through hole I2-1-31 is provided at the center of each locating pin fixing block I2-1-3; please refer to [further details omitted]. Figures 21 to 25 As shown, two symmetrically arranged locating pin fixing block mounting grooves II3-1-2 are provided on the outer side of the right connecting panel 3-1 connecting the right floating base unit 3 and the main base unit 1. A locating pin fixing block II3-1-3 is fixedly installed in each locating pin fixing block mounting groove II3-1-2, and a base locating pin first through hole II3-1-31 is provided at the center of each locating pin fixing block II3-1-3; please refer to [further details omitted]. Figures 26 to 30 As shown, two symmetrically arranged locating pin fixing block mounting grooves Ⅲ4-1-2 are provided on the outer side of the front connecting panel 4-1 connecting the front suspension base unit 4 and the main base unit 1. A locating pin fixing block Ⅲ4-1-3 is fixed in each locating pin fixing block mounting groove Ⅲ4-1-2, and a base locating pin first through hole Ⅲ4-1-31 is provided at the center of each locating pin fixing block Ⅲ4-1-3. A base locating pin second through hole Ⅰ1-1-2, coaxial with the base locating pin first through hole Ⅰ2-1-31, is provided on the left connecting panel 1-1. A base locating pin second through hole Ⅱ1-2-2, coaxial with the base locating pin first through hole Ⅱ3-1-31, is provided on the right connecting panel 1-2. A base locating pin second through hole Ⅲ1-3-2, coaxial with the base locating pin first through hole Ⅲ4-1-31, is provided on the front connecting panel 1-3. Please refer to... Figure 6As shown, each base positioning pin 6 used to connect the main base unit 1 to the left suspension base unit 2 is transitionally connected to its corresponding base positioning pin first through hole I2-1-31 and base positioning pin second through hole I1-1-2. Each base positioning pin 6 used to connect the main base unit 1 to the right suspension base unit 3 is transitionally connected to its corresponding base positioning pin first through hole II3-1-31 and base positioning pin second through hole II1-2-2. Each base positioning pin 6 used to connect the main base unit 1 to the front suspension base unit 4 is transitionally connected to its corresponding base positioning pin first through hole III4-1-31 and base positioning pin second through hole III1-3-2. Connection; This application limits the positioning pin fixing block I2-1-3 by setting the positioning pin fixing block mounting groove I2-1-2, the positioning pin fixing block mounting groove II3-1-2, and the positioning pin fixing block mounting groove III4-1-2, and then limits the positioning pin fixing block III4-1-3 to their corresponding base positioning pins 6 by positioning pin fixing blocks I2-1-3, II3-1-3, and III4-1-3 respectively, which can further improve the assembly precision between the left floating base unit 2, the right floating base unit 3, and the front floating base unit 4 and the main base unit 1.

[0074] Please see again. Figure 7 , Figure 8 , Figures 17 to 19 , Figures 22 to 24 and Figures 27 to 29 As shown, in this embodiment, the locating pin fixing block I2-1-3 and the locating pin fixing block mounting groove I2-1-2, the locating pin fixing block II3-1-3 and the locating pin fixing block mounting groove II3-1-2, and the locating pin fixing block III4-1-3 and the locating pin fixing block mounting groove III4-1-2 are all detachably fixedly connected by axial locking screws 7. The axial locking screw 7 described in this embodiment is preferably a stepped screw, including a screw head 7-1, a cylindrical section 7-2, and a threaded section 7-3 (see [link to documentation]). Figure 8As shown), commercially available or custom-made sizes can be used. As a preferred option, the diameter of the cylindrical section 7-2 is larger than the diameter of the threaded section 7-3. This design allows the axial locking screw 7 to provide better positioning, ensuring that the positioning pin fixing block I2-1-3, positioning pin fixing block II3-1-3, and positioning pin fixing block III4-1-3 are all precisely fixed in the positioning pin fixing block mounting groove I2-1-2. This, in turn, ensures that the base positioning pin 6 can precisely connect the left connecting panel 2-1 to the left connecting panel 1-1, the right connecting panel 3-1 to the right connecting panel 1-2, and the front connecting panel 4-1 to the front connecting panel 1-3, further improving the assembly accuracy between each suspended base unit 2, 3, 4 and the main base unit 1.

[0075] Please see again. Figure 7 , Figure 9 , Figures 17 to 19 , Figures 22 to 24 and Figures 27 to 29 As shown, in this embodiment, the positioning pin fixing block I2-1-3 and its corresponding positioning pin fixing block mounting groove I2-1-2, the positioning pin fixing block II3-1-3 and its corresponding positioning pin fixing block mounting groove II3-1-2, and the positioning pin fixing block III4-1-3 and its corresponding positioning pin fixing block mounting groove III4-1-2 are also connected by fixing block positioning pins 8. As a preferred embodiment, two set screws 9 for circumferential positioning of the base positioning pin 6 are symmetrically provided on both sides of the positioning pin fixing block I2-1-3, positioning pin fixing block II3-1-3, and positioning pin fixing block III4-1-3 (see [link to documentation]). Figure 7 , Figure 10 , Figures 17 to 19 , Figures 22 to 24 and Figures 27 to 29 (As shown); This application can further improve the positioning accuracy of the base positioning pin 6 through this design, thereby further improving the assembly accuracy between each suspended base unit 2, 3, 4 and the main base unit 1.

[0076] Furthermore, the solution for achieving the screw-locking connection between bolt 10 and bolt hole in this embodiment is as follows: Please refer to [link to previous document]. Figure 1 , Figure 2 , Figure 4 , Figure 6 and Figures 16 to 30As shown, the outer perimeter of the left connecting panel 2-1 is provided with several bolt head positioning grooves I2-1-4 and bolt shank through holes I2-1-5 that are symmetrical vertically or horizontally. The outer perimeter of the right connecting panel 3-1 is provided with several bolt head positioning grooves II3-1-4 and bolt shank through holes II3-1-5 that are symmetrical vertically or horizontally. The outer perimeter of the front connecting panel 4-1 is provided with several bolt head positioning grooves III4-1-4 and bolt shank through holes III4-1-5 that are symmetrical vertically or horizontally. The outer perimeter of the left connecting panel 1-1 is provided with the same type of bolt shank through holes I2-1-5. The bolt rods are connected by a axial and equal diameter through hole I1-1-3. On the outer periphery of the right-side connecting panel 1-2, there are bolt rod through holes II1-2-3, coaxial and equal in diameter to bolt rod through holes II3-1-5. On the outer periphery of the front connecting panel 1-3, there are bolt rod through holes III1-3-3, coaxial and equal in diameter to bolt rod through holes III4-1-5. The bolt heads 10-1 of each bolt 10 used to connect the left suspension base unit 2 to the main base unit 1 are embedded in the bolt head positioning groove I2-1-4. The ends of the bolt rods 10-2 of each bolt 10 protrude through bolt rod through holes I1-1-3 (see [link to documentation]). Figure 6 As shown in the figure, each bolt 10 is threadedly connected to the corresponding bolt shank through hole I2-1-5 and bolt shank through hole I1-1-3; the bolt head 10-1 of each bolt 10 used to connect the right suspension base unit 3 to the main base unit 1 is embedded in the bolt head positioning groove II3-1-4, the end of the bolt shank 10-2 of each bolt 10 is protruding through the bolt shank through hole II1-2-3, and each bolt 10 is threadedly connected to the corresponding bolt shank through hole II3-1-5 and bolt shank through hole II1-2-3; the bolt head 10-1 of each bolt 10 used to connect the front suspension base unit 4 to the main base unit 1 is embedded in the bolt head positioning groove III4-1-4, the end of the bolt shank 10-2 of each bolt 10 is protruding through the bolt shank through hole III1-3-3, and each bolt 10 is threadedly connected to the corresponding bolt shank through hole III4-1-5 and bolt shank through hole III1-3-3.

[0077] Additionally, please see [link / reference] Figures 11 to 15As shown, in this embodiment, the main base unit 1, in addition to the left connecting panel 1-1, right connecting panel 1-2, and front connecting panel 1-3 connected to the left floating base unit 2, right floating base unit 3, and front floating base unit 4, also includes a steel internal frame 1-4, a top plate 1-5, a bottom plate 1-6, a left front side plate 1-7, a right front side plate 1-8, and a rear side plate 1-9. The steel internal frame 1-4 is a frame body constructed by welding steel sections. The left connecting panel 1-1, right connecting panel 1-2, front connecting panel 1-3, top plate 1-5, bottom plate 1-6, left front side plate 1-7, and right front side plate 1-8 are also included. Both the rear side panels 1-9 and the main base unit 1 are made of steel plates and are welded and fixed to the corresponding surfaces of the steel internal frame 1-4. The left connecting panel 1-1, the right connecting panel 1-2, and the front connecting panel 1-3 are all made of thick steel plates, while the left front side panel 1-7, the right front side panel 1-8, and the rear side panel 1-9 are all made of thin steel plates. This design can ensure the load-bearing rigidity of the main base unit 1 while also being lightweight. As a preferred option, multiple reinforcing ribs 1-10 are fixed at the connection points between the left connecting panel 1-1 and the right connecting panel 1-2 of the main base unit and the top plate 1-5 of the main base unit. This can further enhance the load-bearing rigidity and stability of the main base unit 1. In addition, multiple equipment foot positioning components 1-11 are welded to the top of the main base unit 1 (this embodiment uses three as an example, but is not limited to this design; any component that matches the base of the precision equipment being supported is acceptable). In this embodiment, the equipment foot positioning component 1-11 is constructed by welding a metal support column 1-11-1 to a metal fixing plate 1-11-2. The bottom of the metal support column 1-11-1 is welded and fixed to the top plate 1-5, and the metal fixing plate 1-11-2 has several threaded through holes pre-set on it. As a preferred embodiment, the equipment foot positioning component 1-11 also includes a vertical metal reinforcing rib 1-11-3. The top of the vertical metal reinforcing rib 1-11-3 is welded and fixed to the bottom of the metal fixing plate 1-11-2, the bottom of the vertical metal reinforcing rib 1-11-3 is welded and fixed to the top plate 1-5 of the main base unit 1, and the side of the vertical metal reinforcing rib 1-11-3 is welded and fixed to the metal support column 1-11-1. In addition, the top plate 1-5 of the main base unit 1 has equipment pipeline through holes 1-12, and multiple equipment foot positioning parts 1-11 are fixed around the equipment pipeline through holes 1-12; multiple lifting ring fixing parts 1-13 are embedded in the top of the main base unit 1 (this embodiment uses 4 as an example, but there can be more or less than 4, and there is no special limitation, as long as the lifting requirements can be met); the lifting ring fixing parts 1-13 mentioned in this embodiment are metal tubes with internal threads on the inner wall of the metal tubes, and the bottom of the metal tubes is welded and fixed to the top of the steel inner frame 1-4. The lifting rings used for lifting are detachably connected to the lifting ring fixing parts 1-13 (in this embodiment, it is a threaded connection).In addition, several metal fittings 1-14 for installing equipment accessories are welded on the top plate 1-5, left front side plate 1-7, right front side plate 1-8 and rear side plate 1-9 of the main base unit 1. Each metal fitting 1-14 has several bolt holes. Furthermore, multiple leveling cups 1-15 are provided at the bottom of the main base unit 1 (in this embodiment, there are 4 leveling cups 1-15, but there may be more or less than 4, and there is no special limitation on this).

[0078] Additionally, please see [link / reference] Figures 16 to 20 As shown, in this embodiment, the left floating base unit 2 is composed of a reinforcing frame I2-2 assembled by cross-welding of transverse metal reinforcing ribs I2-2-1 and longitudinal metal reinforcing ribs I2-2-2, a top plate I2-3 welded and fixed to the top of the reinforcing frame I2-2, a bottom plate I2-4 welded and fixed to the bottom of the reinforcing frame I2-2, and side plates I2-5 welded and fixed to the periphery of the reinforcing frame I2-2; and the left connecting panel 2-1 is made of thick steel plate and is welded and fixed to the reinforcing frame I2-2. In addition, several reinforcing ribs I2-6 are welded to the connection points of the left connecting panel 2-1 with its adjacent top plate I2-3 and side plate I2-5; multiple equipment foot positioning parts I2-7 (three are used as an example in this embodiment, but the design is not limited to this, as long as they match the feet of the equipment being supported) and equipment pipeline through holes I2-8 are welded to the top of the left floating base unit 2, and the equipment foot positioning parts I2-7 are fixed to the periphery of the equipment pipeline through holes I2-8. In addition, multiple lifting ring fixing parts I2-9 are embedded in the top of the left floating base unit 2 (four are used as an example in this embodiment, but there can be more or less than four, and there is no special limitation, as long as the lifting requirements are met). The lifting ring fixing parts I2-9 are metal tubes with internal threads on the inner wall. The bottom of the metal tube is welded and fixed to the top of the reinforcing rib frame body I2-2. The lifting rings used for lifting are detachably connected to the lifting ring fixing parts I2-9 (threaded connection in this embodiment). In addition, several metal fittings I2-10 for installing equipment accessories are welded on the top plate I2-3 and the side plate I2-5. Each metal fitting I2-10 has several bolt holes. Furthermore, at least one drain pipe I2-11 is embedded in the left floating base unit 2 (this embodiment uses two as an example, but there can be more or less than two. There is no special limitation on this, as long as it can timely drain the liquid on the top plate I2-3. The liquid includes condensate, exudate, cleaning liquid, etc. generated by precision equipment during operation). As a preferred embodiment, the upper end face of the drain pipe I2-11 is flush with the upper surface of the top plate I2-3, and the lower end face of the drain pipe I2-11 is flush with the lower surface of the bottom plate I2-4 or extends through the lower surface of the bottom plate I2-4.

[0079] Additionally, please see [link / reference] Figures 21 to 25As shown, in this embodiment, the right floating base unit 3 is composed of a reinforcing frame body II3-2 assembled by cross-welding of transverse metal reinforcing ribs II3-2-1 and longitudinal metal reinforcing ribs II3-2-2, a top plate II3-3 welded and fixed to the top of the reinforcing frame body II3-2, a bottom plate II3-4 welded and fixed to the bottom of the reinforcing frame body II3-2, and side plates II3-5 welded and fixed to the periphery of the reinforcing frame body II3-2; and the right connecting panel 3-1 is made of thick steel plate and is welded and fixed to the reinforcing frame body II3-2. In addition, several reinforcing ribs II3-6 are welded to the connection points of the right connecting panel 3-1 with its adjacent top plate II3-3 and side plate II3-5; multiple equipment foot positioning parts II3-7 (three are used as an example in this embodiment, but the design is not limited to this, as long as they match the feet of the equipment being supported) and equipment pipeline through holes II3-8 are welded to the top of the right floating base unit 3, and the equipment foot positioning parts II3-7 are fixed to the periphery of the equipment pipeline through holes II3-8. In addition, multiple lifting ring fixing parts II3-9 are embedded in the top of the right floating base unit 3 (four are used as an example in this embodiment, but there can be more or less than four, and there is no special limitation, as long as the lifting requirements are met). The lifting ring fixing parts II3-9 are metal tubes with internal threads on the inner wall. The bottom of the metal tube is welded and fixed to the top of the reinforcing rib frame II3-2. The lifting rings used for lifting are detachably connected to the lifting ring fixing parts II3-9 (threaded connection in this embodiment). In addition, several metal fittings II3-10 for installing equipment accessories are welded on the top plate II3-3 and the side plate II3-5. Each metal fitting II3-10 has several bolt holes. In addition, at least one drain pipe II3-11 is embedded in the right suspension base unit 3 (this embodiment takes two as an example, but there can be more or less than two. There is no special limitation on this, as long as it can meet the requirement of timely drainage of liquid on the top plate II3-3. The liquid includes condensate, exudate, cleaning liquid, etc. generated by precision equipment during operation). As a preferred embodiment, the upper end face of the drain pipe II3-11 is flush with the upper surface of the top plate II3-3, and the lower end face of the drain pipe II3-11 is flush with the lower surface of the bottom plate II3-4 or extends through the lower surface of the bottom plate II3-4.

[0080] Additionally, please see [link / reference] Figures 26 to 30As shown, in this embodiment, the front suspension base unit 4 is composed of a reinforcing frame body Ⅲ4-2 assembled by cross-welding of transverse metal reinforcing ribs Ⅲ4-2-1 and longitudinal metal reinforcing ribs Ⅲ4-2-2, a top plate Ⅲ4-3 welded and fixed to the top of the reinforcing frame body Ⅲ4-2, a bottom plate Ⅲ4-4 welded and fixed to the bottom of the reinforcing frame body Ⅲ4-2, and side plates Ⅲ4-5 welded and fixed to the periphery of the reinforcing frame body Ⅲ4-2; and the front connecting panel 4-1 is made of thick steel plate and is welded and fixed to the reinforcing frame body Ⅲ4-2. In addition, several reinforcing ribs Ⅲ4-6 are welded to the connection points of the front connecting panel 4-1 with its adjacent top plate Ⅲ4-3 and side plate Ⅲ4-5; multiple equipment foot positioning parts Ⅲ4-7 (three are used as an example in this embodiment, but the design is not limited to this, as long as they match the feet of the equipment being supported) and equipment pipeline through holes Ⅲ4-8 are welded to the top of the front suspension base unit 4, and the equipment foot positioning parts Ⅲ4-7 are fixed to the periphery of the equipment pipeline through holes Ⅲ4-8. In addition, multiple lifting ring fixing parts Ⅲ4-9 are embedded in the top of the front suspension base unit 4 (four are used as an example in this embodiment, but there can be more or less than four, and there is no special limitation, as long as the lifting requirements can be met). The lifting ring fixing parts Ⅲ4-9 are metal tubes with internal threads on the inner wall. The bottom of the metal tube is welded and fixed to the top of the reinforcing rib frame body Ⅲ4-2. The lifting rings used for lifting are detachably connected to the lifting ring fixing parts Ⅲ4-9 (threaded connection in this embodiment). In addition, several metal fittings III4-10 for equipment accessory installation are welded on the side plate III4-5, and each metal fitting III4-10 has several bolt holes pre-set; in addition, at least one drain pipe III4-11 is embedded in the front suspension base unit 4 (this embodiment takes two as an example, but there can be more or less than two, and there is no special limitation, as long as it can meet the requirement of timely drainage of liquid on the top plate III4-3, the liquid includes condensate, exudate, cleaning liquid, etc. generated by precision equipment during operation); as a preferred embodiment, the upper end face of the drain pipe III4-11 is flush with the upper surface of the top plate III4-3, and the lower end face of the drain pipe III4-11 is flush with the lower surface of the bottom plate III4-4 or extends through the lower surface of the bottom plate III4-4.

[0081] Additionally, please see Figure 31 and Figure 32As shown, in this embodiment, each air-floating vibration isolator A 5a and air-floating vibration isolator B 5b is fixedly provided with an upper fixing member 5-1 and a lower fixing member 5-2; each air-floating vibration isolator A 5a and air-floating vibration isolator B 5b is provided with a vibration isolator mounting base 11 at its bottom. The vibration isolator mounting base 11 includes an upper plate 11-1 and a lower plate 11-2. A plurality of adjusting feet 11-3 are provided between the upper plate 11-1 and the lower plate 11-2. The cup seat 11-3-1 of each adjusting foot 11-3 is fixedly connected to the top surface of the lower plate 11-2. The screw 11-3-2 of each adjusting foot 11-3 is screwed onto the upper plate 11-1. Two locking nuts 11-3-3 are connected to the upper plate 11-1, and both locking nuts 11-3-3 are located below the upper plate 11-1. The height of the upper plate 11-1 can be adjusted by the displacement of the locking nuts 11-3-3, thereby adjusting the height and level of the air-floating vibration isolator 5. After adjustment, the locking nuts 11-3-3 are used to lock and fix it to the bottom of the upper plate 11-1. In addition, an air-floating vibration isolator mounting plate I2-12 is fixed on the bottom plate of the left suspension base unit 2 (see [link]). Figure 19 As shown), the upper fixing part 5-1 of the air-floating vibration isolator 5 located at the bottom of the left suspension base unit 2 is fixedly connected to the air-floating vibration isolator mounting plate I2-12 by bolts, and the lower fixing part 5-2 of the air-floating vibration isolator 5 located at the bottom of the left suspension base unit 2 is fixedly connected to the upper plate 11-1 of the corresponding vibration isolator mounting base 11 by bolts; an air-floating vibration isolator mounting plate II3-12 is fixedly installed on the bottom plate of the right suspension base unit 3 (see [reference]). Figure 24 As shown), the upper fixing part 5-1 of the air-floating vibration isolator 5 located at the bottom of the right suspension base unit 3 is fixedly connected to the air-floating vibration isolator mounting plate II 3-12 by bolts, and the lower fixing part 5-2 of the air-floating vibration isolator 5 located at the bottom of the right suspension base unit 3 is fixedly connected to the upper plate 11-1 of its corresponding vibration isolator mounting base 11 by bolts; an air-floating vibration isolator mounting plate III 4-12 is fixedly installed on the bottom plate of the front suspension base unit 4 (see [reference]). Figure 29 As shown, the upper fixing part 5-1 of the air-floating vibration isolator 5 located at the bottom of the front suspension base unit 4 is fixedly connected to the air-floating vibration isolator mounting plate Ⅲ4-12 by bolts, and the lower fixing part 5-2 of the air-floating vibration isolator 5 located at the bottom of the front suspension base unit 4 is fixedly connected to the upper plate 11-1 of the corresponding vibration isolator mounting base 11 by bolts.

[0082] It should also be noted that the air-floating vibration isolator 5 described in this application is a commercially available finished product. It forms a stable "air cushion" inside the vibration isolator by compressing air, thereby suspending the equipment located on top of it on the air cushion, thus actively isolating external vibrations and interference. For example, the EHS series of air-floating vibration isolators from Tokkyokiki Co., Ltd. of Japan can be used, but it is not limited to products from that company. Any air-floating vibration isolator product that can achieve active vibration isolation is acceptable. The specific selection should be determined by comprehensively considering the vibration isolation level it can achieve, the maximum rated load it can bear, and its size.

[0083] The assembled active vibration isolation base for large-span precision equipment described in this application is assembled on-site as follows:

[0084] 1) First, transport the factory-processed main base unit 1, left floating base unit 2, right floating base unit 3 and front floating base unit 4 to the installation site. Then, screw the lifting ring into the lifting ring fixing part 1-13 embedded on the top of the main base unit 1. Then, use a gantry crane to lift the main base unit 1 and place it in the predetermined installation position. Finally, adjust the leveling cups 1-15 located at the bottom of the main base unit 1 to adjust the main base unit 1 to a horizontal state.

[0085] 2) Screw the lifting ring into the lifting ring fixing part I2-9 embedded at the top of the left suspension base unit 2. Then, use a gantry crane to lift the left suspension base unit 2 and place it on the left side of the main base unit 1. The bottom end of the T-shaped guide rail I2-1-1 on the left connecting panel 2-1 of the left suspension base unit 2 enters from the upper end of the corresponding T-shaped limiting groove I1-1-1 on the left connecting panel 1-1 of the main base unit 1 and slides down to the lower end of the T-shaped limiting groove I1-1-1. The T-shaped guide rail I2-1-1 and the T-shaped limiting groove I1-1-1 are then fitted together through the gap. Next, the left connecting panel 2-1 of the left floating base unit 2 is precisely fitted with the left connecting panel 1-1 of the main base unit 1. Because the T-shaped guide rail I2-1-1 and the T-shaped limiting groove I1-1-1 can be precision machined to control the gap between them to be 0.5µm to 5µm (the specific machining accuracy can be determined according to the required assembly precision); then, the positioning pin fixing block I2-1-3 is connected to its corresponding positioning pin fixing block mounting groove I2-1-2 via the axial locking screw 7, and then the base positioning pin 6 is screwed into the corresponding base positioning... After the base positioning pin 6 is fixed in place, tighten the axial locking screw 7 and the fixing block positioning pin 8. Then, screw several bolts 10 into the corresponding bolt rod through holes I2-1-5 through the bolt head positioning grooves 2-1-4 around the outer side of the left connecting panel 2-1, and out through the corresponding bolt rod through holes I1-1-3 around the outer side of the left connecting panel 1-1. Tighten all bolts until the bolt head 10-1 abuts against the bottom surface of the bolt head positioning groove 2-1-4. This completes the left floating base unit. 2. Precision assembly and connection with the main base unit 1; then, the upper fixing part 5-1 of the air-floating vibration isolator 5 is fixedly connected to the air-floating vibration isolator mounting plate Ⅰ2-12 at the bottom of the left suspension base unit 2 by bolts, so that the lower fixing part 5-2 of the air-floating vibration isolator 5 is fixedly connected to the upper plate 11-1 of the corresponding vibration isolator mounting base 11 by bolts, so that the lower plate 11-2 of the vibration isolator mounting base 11 is fixedly connected to the corresponding installation ground or floor slab by bolts; finally, the height and level of the air-floating vibration isolator 5 are adjusted by the adjusting feet 11-3 on the vibration isolator mounting base 11.

[0086] 3) Following the operation in step 2), complete the precision assembly and connection of the right suspension base unit 3 and the front suspension base unit 4 with the main base unit 1, as well as the installation and adjustment of the height and level of the corresponding air-floating vibration isolator 5; thereby completing the overall assembly of the assembled active vibration isolation base.

[0087] However, it should be noted that the order in which the left floating base unit 2, the right floating base unit 3, and the front floating base unit 4 are assembled and connected to the main base unit 1 is not limited to the order described above in this embodiment. The right floating base unit 3 can be assembled first, or the front floating base unit 4 can be assembled first, etc.

[0088] In its initial state, the main base unit 1 is ground-mounted. When all air-floating vibration isolators 5 are in operation, the main base unit 1 is suspended under the buoyancy force of the air-floating vibration isolators 5, thus achieving active vibration isolation for the entire assembled base. To ensure that the main base unit 1 is suspended (approximately 3mm off the ground) by the buoyancy force when all air-floating vibration isolators 5 are in operation, before installing large-span precision equipment, the upper surfaces of all air-floating vibration isolators 5 are checked for levelness using a level and adjusted to levelness using the adjusting feet 11-3 on the vibration isolator mounting base 11, ensuring uniform load distribution after the large-span precision equipment is installed.

[0089] As can be seen from the above, this application, through its ingenious structural design, not only meets the VC-D level anti-micro-vibration requirements for bases used in large-span precision equipment, but also features simple on-site assembly and ensures high precision in assembly connections. Furthermore, by employing specific high-rigidity and lightweight structural designs for the main base unit 1, left suspended base unit 2, right suspended base unit 3, and front suspended base unit 4, this application makes the base for large-span precision equipment not only easy to manufacture but also meets the high-rigidity requirements for heavy loads (ensuring the overall static stiffness of the base is greater than 3 × 10⁻⁶). 8 The requirements for the lowest free modal frequency (N / m) and the lowest free modal frequency (can reach above 100Hz) can be met. At the same time, the weight of the entire base can be reduced from more than ten tons to 4.5 tons. This effectively solves the manufacturing, installation and transportation problems faced by the anti-vibration base of large-span precision equipment. It is of great significance and significant application value for realizing the stable and high-precision operation of large-span precision equipment.

[0090] Finally, it should be pointed out that the above description is only a preferred embodiment of the present utility model, but the protection scope of the present utility model is not limited thereto. Any changes or substitutions that can be easily conceived by those skilled in the art within the technical scope disclosed in the present utility model should be included within the protection scope of the present utility model.

Claims

1. An assembled active vibration isolation base for large-span precision equipment, characterized in that: The system includes a main base unit, a left suspended base unit, a right suspended base unit, and a front suspended base unit. The left, right, and front suspended base units are precisely assembled and connected to the corresponding sides of the main base unit. At least one air-floating vibration isolator is provided at the bottom of each of the left, right, and front suspended base units. The total number of air-floating vibration isolators at the bottom of the left, right, and front suspended base units is greater than or equal to 4. The bottom of each air-floating vibration isolator is fixed. The main base unit is in a grounded state in its original state, and in a suspended state when all air-floating vibration isolators are in operation.

2. The assembled active vibration isolation base according to claim 1, characterized in that: An air-floating vibration isolator A is provided at the bottom of both the left and right suspension base units, and two air-floating vibration isolators B are provided at the bottom of both the front suspension base units. The maximum rated load of the air-floating vibration isolator A is greater than the maximum rated load of the air-floating vibration isolator B. The sum of the maximum rated loads of the two air-floating vibration isolators A and the two air-floating vibration isolators B is 1.2 to 1.5 times the total weight of the large-span precision equipment and the assembled active vibration isolation base.

3. The assembled active vibration isolation base according to claim 1, characterized in that: The precision assembly connection includes the fitting connection between the T-shaped guide rail and the T-shaped limiting groove, the transition fit connection between the positioning pin and the positioning pin hole, and the screw-locking connection between the bolt and the bolt hole.

4. The assembled active vibration isolation base according to claim 3, characterized in that: Two T-shaped limiting grooves are vertically symmetrically provided on the connecting panels of the main base unit and the left, right, and front floating base units, with the upper end of the T-shaped limiting groove being an open end and the lower end being a closed end. Furthermore, two T-shaped guide rails adapted to the T-shaped limiting grooves are vertically symmetrically provided on the connecting panels of the left, right, and front floating base units and the main base unit, respectively. The T-shaped guide rails are fitted with their corresponding T-shaped limiting grooves with a gap of 0.5µm to 5µm.

5. The assembled active vibration isolation base according to claim 3, characterized in that: Two symmetrical mounting slots for positioning pins are provided on the outer side of the connecting panels of each of the left, right, and front floating base units that connect to the main base unit. A positioning pin fixing block is fixed in each mounting slot. A first through hole for the base positioning pin is provided at the center of each positioning pin fixing block. A second through hole for the base positioning pin is provided on each side connecting panel of the main base unit that connects to the left, right, and front floating base units. The base positioning pins that connect the main base unit to the left, right, and front floating base units are respectively connected to their corresponding first and second through holes for transition fitting.

6. The assembled active vibration isolation base according to claim 3, characterized in that: On the four sides of the connection panels of each suspension base unit that connects to the main base unit, the left suspension base unit, the right suspension base unit, and the front suspension base unit are provided several bolt head positioning grooves and bolt rod through holes that are symmetrical vertically or horizontally. On the four sides of the connection panels of each side connecting the main base unit to the left suspension base unit, the right suspension base unit, and the front suspension base unit, there are bolt rod through holes that are coaxial with the corresponding bolt rod through holes and of the same diameter. The bolt heads of each bolt used to connect the left suspension base unit, the right suspension base unit, and the front suspension base unit to the main base unit are embedded in the corresponding bolt head positioning grooves, and the bolt rod ends of each bolt protrude through the bolt rod through holes. Each bolt is threadedly connected to the corresponding bolt rod through holes and bolt rod through holes.

7. The assembled active vibration isolation base according to claim 1, characterized in that: The main base unit is integrally formed by a steel internal frame and steel plates welded and fixed to its top, bottom and sides. The left floating base unit, right floating base unit and front floating base unit are all integrally formed by a reinforcing frame body assembled by cross-welding of transverse and longitudinal metal reinforcing ribs and steel plates welded and fixed to its top, bottom and sides.

8. The assembled active vibration isolation base according to claim 7, characterized in that: The connecting panels on each side of the main base unit and the connecting panels of each suspended base are all made of thickened steel plates.

9. The assembled active vibration isolation base according to claim 7, characterized in that: Multiple reinforcing ribs are fixed at the connection points between the left and right connecting panels of the main base unit and the top plate of the main base unit; multiple reinforcing ribs are fixed at the connection points between the connecting panels of each suspended base unit and its adjacent top and side plates.

10. The assembled active vibration isolation base according to claim 1, characterized in that: Each air-floating vibration isolator is equipped with a vibration isolator mounting base at its bottom. The vibration isolator mounting base includes an upper plate and a lower plate, with multiple adjusting feet between the upper and lower plates. Each air-floating vibration isolator is fixed with an upper fixing component and a lower fixing component. The upper fixing component is fixedly connected to the bottom of the corresponding suspension base unit by bolts, and the lower fixing component is fixedly connected to the upper plate of the corresponding vibration isolator mounting base by bolts.

Images